CN111290065B - Microfluidic-controlled three-dimensional terahertz wave optical window and preparation method and application thereof - Google Patents

Microfluidic-controlled three-dimensional terahertz wave optical window and preparation method and application thereof Download PDF

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CN111290065B
CN111290065B CN201811494296.1A CN201811494296A CN111290065B CN 111290065 B CN111290065 B CN 111290065B CN 201811494296 A CN201811494296 A CN 201811494296A CN 111290065 B CN111290065 B CN 111290065B
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optical window
terahertz wave
fluid
wave optical
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CN111290065A (en
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李琦
杨炜沂
鞠小晶
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Institute of Metal Research of CAS
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre

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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract

The invention discloses a microfluid-regulated three-dimensional terahertz wave optical window and a preparation method and application thereof, and belongs to the technical fields of three-dimensional printing, terahertz wave application technology and microfluidic chips. The three-dimensional optical window with adjustable optical characteristics can be prepared by combining the mode-free direct writing and the microfluid technology. When fluid flows with different dielectric properties pass through a three-dimensional pore channel structure constructed by a mode-free direct writing technology, a three-dimensional optical window formed by the fluid filled in real time and a base material can accurately regulate and control the electromagnetic response of the terahertz waveband optical window due to the fact that the dielectric properties of microfluid in the three-dimensional pore channel are adjustable in real time, the defect that the characteristics of the traditional optical window are difficult to change once the traditional optical window is prepared is overcome, and the three-dimensional optical window can be directly used as optical function units such as a filter, a detector, a waveguide and an optical switch.

Description

Microfluidic-controlled three-dimensional terahertz wave optical window and preparation method and application thereof
Technical Field
The invention relates to the technical field of three-dimensional terahertz optical windows and optical functional units, in particular to a microfluid-regulated three-dimensional terahertz wave optical window and a preparation method and application thereof.
Background
Terahertz waves refer to waves with a frequency of 0.1-10THz (1THz ═ 10)12Hz) having a wavelength in the range of 3mm to 30 μm. The characteristics of high permeability, transient property, low energy, coherence, fingerprint spectrum and the like of the terahertz wave enable the terahertz technology to have great application potential in the fields of wireless communication, biomedical imaging, nondestructive testing, material identification, national defense industry and the like. The terahertz wave optical window is a photoelectric device capable of generating optical response to terahertz waves, can regulate and control the transmission of the terahertz waves, and is one of key devices of the terahertz technology. Once a conventional terahertz wave optical window is formed, the optical characteristics of the conventional terahertz wave optical window cannot be changed, and the conventional terahertz wave optical window is not beneficial to detection and analysis of complex samples.
The photonic crystal is composed of different dielectric materials which are periodically arranged in space, and the internal dielectric constant of the photonic crystal is periodically arranged, so that the propagation of electromagnetic waves in the photonic crystal can be controlled. The optical device with the photonic crystal structure has the characteristics of small volume and high efficiency. In the aspect of preparation of terahertz devices, compared with microwave devices, the terahertz devices are smaller in size, and particularly, in terahertz devices with three-dimensional photonic crystal structures, the traditional processing method is often difficult to meet the precision requirement. The 3D printing technology can realize the preparation of a complex three-dimensional structure with the characteristic size ranging from submicron to several millimeters, and provides a new method for the preparation and processing of the terahertz device.
The non-mold direct writing technology is one of 3D printing technologies, and has the advantages that various complex three-dimensional structures can be conveniently prepared, so that attention is paid to the fields, the range of printable materials is wide, and metal, ceramic, resin and the like can be used for non-mold direct writing printing. The mode-free direct writing technology can be adopted to conveniently prepare the microfluid chip embedded with the three-dimensional photonic crystal structure, the dielectric property of fluid in the microfluid chip directly determines the final terahertz wave propagation characteristic of the three-dimensional optical window, and a new thought is provided for the design of a novel adjustable terahertz wave optical window.
Disclosure of Invention
The invention aims to provide a microfluid-regulated three-dimensional terahertz wave optical window, a preparation method and application thereof, and the three-dimensional optical window with adjustable optical characteristics is prepared by combining a mode-free direct writing technology and a microfluid technology. When fluid flows with different dielectric properties pass through a three-dimensional pore channel structure constructed by a mode-free direct writing technology, a three-dimensional optical window formed by the fluid filled in real time and a base material can accurately regulate and control the electromagnetic response of the terahertz waveband optical window due to the fact that the dielectric properties of microfluid in the three-dimensional pore channel are adjustable in real time, the defect that the characteristics of the traditional optical window are difficult to change once the traditional optical window is prepared is overcome, and the three-dimensional optical window can be directly used as optical function units such as a filter, a detector, a waveguide and an optical switch.
In order to achieve the purpose, the invention adopts the following scheme:
a method for preparing a microfluid-regulated three-dimensional terahertz wave optical window comprises the steps of firstly preparing a substrate with a three-dimensional communicating pore channel by a mode-free direct writing technology, then solidifying the substrate, and finally filling fluid. The preparation method of the microfluid-regulated three-dimensional terahertz wave optical window comprises the following steps:
(1) preparing a sample with a three-dimensional communicating pore canal of a photonic crystal structure by using a semi-solid matrix material through a die-free direct writing technology, and obtaining a matrix with the three-dimensional communicating pore canal after curing treatment;
(2) and (2) filling the required fluid material in the three-dimensional communicating pore channel of the substrate obtained in the step (1) to obtain the three-dimensional terahertz wave optical window.
The three-dimensional terahertz wave optical window comprises a substrate with a three-dimensional communication pore channel and a fluid material, wherein the three-dimensional communication pore channel is provided with a photonic crystal structure, and the fluid material is filled in the three-dimensional communication pore channel; the real-time regulation and control of the optical characteristics of the optical window are realized by changing the dielectric characteristics of the fluid in the three-dimensional communication pore channel.
The substrate is provided with an inlet and an outlet, and the inlet and the outlet are respectively connected with the three-dimensional communicating pore channel; fluid with different dielectric properties can be filled into the three-dimensional communicating pore channel through the inlet by an external driving device (such as a syringe). When the fluid in the three-dimensional communicating pore canal needs to be replaced, the original fluid is discharged from the outlet, and then new fluid is filled in through the inlet.
The matrix material is a curable semi-solid material, such as silica gel, glass cement or photoresist; the matrix material can change its dielectric constant by adding ceramic powder. The filled fluid is a suspension of liquid metal (pure metal or alloy), liquid dielectric material (glycerol or ethanol), and solid dielectric material. The dielectric constant of the matrix material differs from that of the filled fluid material (preferably by more than 2).
The curing treatment refers to a process of changing the semi-solid state of the matrix material into a solid state, and the specific curing method is light treatment, heating treatment or standing treatment.
The invention has the following advantages and beneficial effects:
the invention uses the mode-free direct writing technology to prepare the three-dimensional terahertz optical window which can be regulated and controlled in real time. The preparation process is simple, the defect that the characteristics of the traditional optical window are difficult to change once the window is prepared is overcome, the window can be directly used as optical functional units such as a filter, a detector, a waveguide and an optical switch, and a new thought is provided for the design of a novel adjustable terahertz wave optical window.
Drawings
Fig. 1 is a flow chart of a microfluidic-controlled three-dimensional terahertz wave optical window preparation process.
Fig. 2 is a schematic diagram of microfluidic-controlled three-dimensional terahertz wave optical window modeless direct writing.
FIG. 3 is a three-dimensional terahertz wave optical window object diagram regulated by microfluid.
Fig. 4 is a terahertz transmission spectrum of the three-dimensional optical window obtained in example 1.
Fig. 5 is a terahertz transmission spectrum of the three-dimensional optical window obtained in example 2.
Detailed Description
The invention is described in detail below with reference to the figures and examples.
The invention relates to a preparation method of a microfluid-regulated three-dimensional terahertz wave optical window, and the preparation flow is shown in figure 1. The method comprises the steps of firstly, constructing a substrate with a three-dimensional communicated pore passage of a photonic crystal structure by using a semisolid substrate material by adopting a dieless direct writing technology, connecting a driving device to the substrate after the substrate is solidified, introducing fluid from an inlet of the substrate, and finally realizing real-time regulation and control of an optical window by regulating the dielectric property of the fluid. The method comprises the following steps:
when the matrix material is in a semi-solid state, a micro-fluid chip can be prepared by using a die-free direct writing technology, and the matrix material is solidified into a usable matrix after molding. The matrix material is silica gel, glass cement, photoresist and the like, and the dielectric constant of the matrix material can be adjusted by adding ceramic powder. The example used was dow corning neutral transparent (translucent) glass cement.
The solidification refers to a process of changing the semi-solid of the slurry into a solid, and different matrix materials need different solidification methods, and the specific solidification methods include light treatment, heating treatment or standing treatment and the like. The curing method used in the examples was a standing treatment for 5 hours.
The external driving device can be a peristaltic pump, a syringe and other driving devices. In the embodiment, the injector is externally connected to the inlet of the microfluidic chip and is used for filling the microfluidic chip with liquid materials, and the container is externally connected to the outlet and is used for storing liquid overflowing during filling.
The dielectric constant of the liquid medium material is different from that of the substrate material of the microfluidic chip, and the liquid medium material can be selected from liquid metal and alloy thereof, liquid dielectric material, suspension of solid dielectric material or mixture thereof. Liquid metal (gallium 75 wt.%, indium 25 wt.%), glycerol and deionized water were used in the examples.
The three-dimensional optical window capable of being regulated and controlled in real time can be used as an optical device such as a filter, a detector, a waveguide, an optical switch and the like.
Example 1
1. 20g of glass cement (Dow Corning, NP-clear) was charged into a 30ml cartridge. The microfluidic chip was printed using a mode-free direct write method with the number of photonic crystal layers set to 4 and the period constant set to 700 μm.
2. Placing the printed substrate sample in air for 5h to completely cure the substrate sample;
3. two syringe needles are respectively inserted into the positions of the microfluid inlet and outlet and are fixed by being stuck by glass cement. The inlet needle is connected with the injector, and the outlet needle is connected with the container. As shown in fig. 3.
6. Injecting glycerol by using an injector to completely fill the microfluid channel, and carrying out terahertz time-domain spectroscopy test; and injecting liquid metal by using an injector until the glycerol is completely discharged and the microfluid channel is filled with the liquid metal, and performing the terahertz time-domain spectroscopy test again.
The time domain spectrum obtained by the test is subjected to fast Fourier transform to obtain a frequency domain spectrum, and as shown in FIG. 4, a three-dimensional optical window filled with glycerol in the micro-channel has a forbidden band with the center frequency of 0.28THz and the transmittance of-17 dB. After the micro-channel is replaced by liquid metal, the three-dimensional optical window has a forbidden band with the transmittance of-40 dB at 0.1-0.2THz, and has a forbidden band with the center frequency of 0.51THz with the transmittance of-16 dB. A large change in the performance of the optical window is achieved by replacing the liquid dielectric material with a liquid metal material.
Example 2
1. Glass cement (daokoning, NP-transparent) was added to the barrel. The microfluidic chip was printed using a mode-free direct write method with the number of photonic crystal layers set to 4 and the period constant set to 500 μm.
2. Placing the printed microfluid chip in the air for 5h to completely solidify the microfluid chip;
3. two syringe needles are respectively inserted into the positions of the inlet and the outlet of the base body and are fixed by being stuck by glass cement. The inlet needle is connected with the injector, and the outlet needle is connected with the container.
6. Injecting glycerol by using an injector to completely fill the microfluid channel, and carrying out terahertz time-domain spectroscopy test; injecting deionized water by using an injector until the glycerol is completely discharged and the microfluid channel is filled with liquid metal, and performing terahertz time-domain spectroscopy test again.
The time domain spectrum obtained by the test is subjected to fast Fourier transform to obtain a frequency domain spectrum, and as shown in FIG. 5, a three-dimensional optical window filled with glycerol in the micro-channel has a forbidden band with the center frequency of 0.4THz and the transmittance of-40 dB. The position of the center of the forbidden band is reduced to 0.26THz after the micro flow channel is replaced by deionized water. The regulation and control of the performance of the optical window are realized by replacing the liquid dielectric material.
The above embodiments are merely exemplary and it is within the scope of the present patent to provide a method for producing three-dimensional optical windows without direct-write modeling that is similar to or extends from the teachings of the present patent.

Claims (7)

1. A three-dimensional terahertz wave optical window regulated by microfluid is characterized in that: the three-dimensional terahertz wave optical window comprises a substrate with a three-dimensional communication pore channel and a fluid material, wherein the three-dimensional communication pore channel is provided with a photonic crystal structure, and the fluid material is filled in the three-dimensional communication pore channel; the real-time regulation and control of the optical characteristics of the optical window are realized by changing the dielectric characteristics of the fluid in the three-dimensional communicating pore channel;
the substrate is provided with an inlet and an outlet, and the inlet and the outlet are respectively connected with the three-dimensional communicating pore channel; fluid with different dielectric properties can be filled into the three-dimensional communicating pore channel through the inlet by an external driving device;
the base material is a curable semisolid material, and the curable semisolid material is silica gel, glass cement or photoresist; the matrix material can change the dielectric constant thereof by adding ceramic powder; the fluid filled is a suspension of liquid metal, liquid dielectric material, or solid dielectric material.
2. The microfluidically tuned three-dimensional terahertz wave optical window of claim 1, wherein: when the fluid in the three-dimensional communicating pore canal needs to be replaced, the original fluid is discharged from the outlet, and then new fluid is filled in through the inlet.
3. The microfluidically tuned three-dimensional terahertz wave optical window of claim 1, wherein: the dielectric constant of the filled fluid material differs from that of the matrix material.
4. The method for preparing the microfluid-regulated three-dimensional terahertz wave optical window according to claim 1, characterized in that: the method constructs a matrix with a three-dimensional communicating pore channel structure by a dieless direct writing technology, and the optical window characteristics of the three-dimensional communicating pore channel in the matrix are adjusted in real time by filling fluids with different dielectric properties.
5. The method for preparing the microfluid-regulated three-dimensional terahertz wave optical window according to claim 4, characterized in that: the method comprises the following steps:
(1) preparing a sample with a three-dimensional communicating pore canal of a photonic crystal structure by using a semi-solid matrix material through a die-free direct writing technology, and obtaining a matrix with the three-dimensional communicating pore canal after curing treatment;
(2) and (2) filling the required fluid material in the three-dimensional communicating pore channel of the substrate obtained in the step (1) to obtain the three-dimensional terahertz wave optical window.
6. The method for preparing the microfluid-regulated three-dimensional terahertz wave optical window according to claim 5, characterized in that: the curing treatment refers to a process of changing the semi-solid state of the matrix material into a solid state, and the specific curing method is light treatment, heating treatment or standing treatment.
7. The use of the microfluidically tuned three-dimensional terahertz wave optical window of claim 1, wherein: the three-dimensional terahertz wave optical window is used as a filter, a detector, a waveguide or an optical switch optical functional device, and can also be used for detecting and discriminating complex fluids.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103529520A (en) * 2013-10-21 2014-01-22 天津大学 Tunable wavelength division multiplexing device and multiplexing method based on microfluid regulation
CN107954711A (en) * 2016-10-14 2018-04-24 中国科学院金属研究所 A kind of forming method of adjustable THz wave optical window and its application
CN107957404A (en) * 2016-10-14 2018-04-24 中国科学院金属研究所 A kind of method of regulation and control THz wave optical window response characteristic
CN108121090A (en) * 2016-11-29 2018-06-05 中国科学院金属研究所 A kind of THz wave flexible optical window of field of force regulation and control and its preparation method and application
CN108507969A (en) * 2018-03-08 2018-09-07 电子科技大学 A kind of highly sensitive Terahertz microfluidic sensor based on band gap plasma resonance

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9063117B2 (en) * 2007-02-21 2015-06-23 Paul L. Gourley Micro-optical cavity with fluidic transport chip for bioparticle analysis

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103529520A (en) * 2013-10-21 2014-01-22 天津大学 Tunable wavelength division multiplexing device and multiplexing method based on microfluid regulation
CN107954711A (en) * 2016-10-14 2018-04-24 中国科学院金属研究所 A kind of forming method of adjustable THz wave optical window and its application
CN107957404A (en) * 2016-10-14 2018-04-24 中国科学院金属研究所 A kind of method of regulation and control THz wave optical window response characteristic
CN108121090A (en) * 2016-11-29 2018-06-05 中国科学院金属研究所 A kind of THz wave flexible optical window of field of force regulation and control and its preparation method and application
CN108507969A (en) * 2018-03-08 2018-09-07 电子科技大学 A kind of highly sensitive Terahertz microfluidic sensor based on band gap plasma resonance

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