CN111289867B - Self-holding type power supply device and method of semiconductor automatic test system - Google Patents

Self-holding type power supply device and method of semiconductor automatic test system Download PDF

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Publication number
CN111289867B
CN111289867B CN202010112449.2A CN202010112449A CN111289867B CN 111289867 B CN111289867 B CN 111289867B CN 202010112449 A CN202010112449 A CN 202010112449A CN 111289867 B CN111289867 B CN 111289867B
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China
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power supply
relay
switch
stage
test system
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CN111289867A (en
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孙鹏
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Shanghai Ncatest Technologies Co Ltd
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Shanghai Ncatest Technologies Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02JCIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J3/00Circuit arrangements for ac mains or ac distribution networks

Abstract

The invention discloses a self-holding power supply device of a semiconductor automatic test system, which comprises a first-stage power supply module and a second-stage power supply module, wherein the first-stage power supply module and the second-stage power supply module respectively provide power for a first-stage electric appliance and a second-stage electric appliance of the semiconductor automatic test system; the first-level POWER supply module comprises a first switch, a first relay, a third relay and a first POWER supply interface, wherein one end of the first switch is connected with a GND POWER supply, the other end of the first switch is connected with one coil terminal of the third relay through the first POWER supply interface, the other coil terminal of the third relay is connected with a POWER + POWER supply, and when the third relay is closed, a first-level electric appliance starts to work in the semiconductor automatic test system. The self-holding power supply device and the method of the semiconductor automatic test system provided by the invention avoid the situation that the three-level electrical appliance is directly powered off and simultaneously powered on due to human operation errors and alarm relief.

Description

Self-holding type power supply device and method of semiconductor automatic test system
Technical Field
The invention relates to a semiconductor automatic test system, in particular to a self-holding power supply device and a self-holding power supply method for the semiconductor automatic test system.
Background
The automatic semiconductor test system comprises a plurality of devices, the whole system comprises a smoke module, a temperature sensor, a monitoring unit, a liquid cooling system CDU (cooling Distribution unit), a test head, an industrial personal computer, a workstation, a display, an instrument and other devices in a main cabinet, and the system needs to be processed in a grading way in the power supply and Distribution process, so that the system realizes diagnosis and self-check, reduces impact current in the power supply and Distribution process and protects power supply and Distribution and self-devices in the power supply and Distribution process in the grading way. Generally, the smoke module and the temperature sensor belong to a sensing unit, and the first-stage electric appliance, the second-stage electric appliance and the third-stage electric appliance are powered on after the first-stage electric appliance, the second-stage electric appliance and the third-stage electric appliance are powered on preferentially. In a semiconductor automatic test system, generally, a first-stage electrical appliance includes one or more of a motor module, a cabinet fan and a liquid cooling system CDU; the second-stage electrical appliance comprises one or more of an industrial personal computer, a display, a router, an instrument, a workstation and a KVM (keyboard Video mouse); the third-stage electric appliance is equipment in the test head and comprises a cooling fan, a main control board, a test board card and the like.
As shown in fig. 1, the power-on and power-off modes of the semiconductor automatic test system in the prior art are as follows:
and (3) electrifying:
the AC380V main control switch rotates to the position, and the smoke sensing module and the temperature sensor in the sensing unit are directly powered on.
The first stage of power-up: the cabinet panel START button switch is pressed down, and the system monitoring unit, the motor module, the cabinet fan and the liquid cooling system CDU are powered on.
And second-stage power-on: and the cabinet panel knob switch is rotated to the STANDBY from OFF, and related equipment such as an industrial personal computer, a display, a router, an instrument, a KVM (keyboard, video and mouse), a workstation and the like is electrified.
And third-stage electrification: and the cabinet panel knob switch is turned ON from STANDBY, the cooling fan, the main control board, other board cards and the like in the test head are electrified, and the system is electrified.
The power-off process:
the operation sequence of the power-down process and the power-up process is opposite, and power down from the third stage to the first stage is respectively realized.
In the prior art, when a START button is pressed down, power supply communication is carried out, and the first-stage electrification is finished; when the START button is pressed again, the power supply is cut off, and the first-stage power-off is completed; and when the knob switch is respectively rotated to the STANDBY position and the ON position from OFF, power supply communication is carried out, corresponding to second-level power-up and third-level power-down, the knob switch is respectively rotated to the STANDBY position and the OFF position from ON when the knob switch is respectively rotated to the STANDBY position and the ON position from OFF when the knob switch is correspondingly rotated to the third-level power-up and second-level power-down.
The power supply device of the semiconductor automatic test system in the prior art is shown in the attached figure 2, wherein 1, 2, 3 and 4 are system power-on and power-off control interfaces, and relays a, b and c respectively realize the power-on and power-off control functions of a first stage, a second stage and a third stage of the system. When the START button is pressed down, the button switch is closed, the relay a is excited and closed, and the first stage of electrification is completed; when the START button is pressed again, the button switch is switched off, the relay a is switched off after loss of magnetism, and the first stage of power-off is completed. Similarly, the rotary switch rotates to the corresponding position to control the excitation or the loss of the excitation of the relays b and c, and the second-level and third-level power-on and power-off control of the system is realized.
When a knob switch is closed, the START button switch is pressed by mistake, so that the three-stage equipment of the system can be powered on and powered off simultaneously, and the requirement that the system is powered on and powered off sequentially is not met; simultaneously, report an emergency and ask for help or increased vigilance when smog module, temperature sensor and cut off relay a, give the system back of cutting off the electricity, because START button switch is in the closure state, can directly construct the relay a excitation circuit after the sensor reports an emergency and asks for help or increased vigilance and removes, make the system appear the condition of repeatedly going up and down the electricity. The two conditions are not in accordance with the principle that the semiconductor automatic test system is powered up and down in sequence, so that great current impact can be generated on power supply and distribution equipment and the semiconductor automatic test system, the service life of the system is shortened, and personal danger and high economic loss are caused.
Disclosure of Invention
The invention aims to provide a self-holding power supply device and a self-holding power supply method for a semiconductor automatic test system, which avoid the situation that three-stage electric appliances are directly powered off and on at the same time due to human operation errors and alarm relief.
In order to achieve the purpose, the invention adopts the following technical scheme: a self-holding power supply device of a semiconductor automatic test system comprises a first-stage power supply module and a second-stage power supply module, wherein the first-stage power supply module and the second-stage power supply module respectively provide power for a first-stage electric appliance and a second-stage electric appliance of the semiconductor automatic test system; the first-stage POWER supply module comprises a first switch, a first relay, a third relay and a first POWER supply interface, wherein one end of the first switch is connected with a GND POWER supply, the other end of the first switch is connected with one coil terminal of the third relay through the first POWER supply interface, the other coil terminal of the third relay is connected with a POWER + POWER supply, and when the third relay is closed, a first-stage electric appliance in the semiconductor automatic test system starts to work;
coil terminals of the first relay are respectively connected with one end of the first switch and the sensing interface, and contact terminals of the first relay are respectively connected with two ends of the first switch;
The sensing interface is connected to a POWER + POWER supply through a normally closed switch, and when the sensing unit is in a normal working state, the normally closed switch is closed.
Further, the second-stage POWER supply module comprises a second switch, a second relay, a fourth relay and a second POWER supply interface, wherein one end of the second switch is connected with a GND POWER supply, the other end of the second switch is connected with one coil terminal of the fourth relay through the second POWER supply interface, the other coil terminal of the fourth relay is connected with a POWER + POWER supply, and when the fourth relay is closed, a second-stage electric appliance in the semiconductor automatic test system starts to work;
and coil terminals of the second relay are respectively connected with one end of the second switch and a POWER + POWER supply, and contact terminals of the second relay are respectively connected with two ends of the second switch.
Furthermore, the self-holding power supply device also comprises a third-stage power supply module, a monitoring unit and a control unit, wherein the third-stage power supply module is used for providing a power supply for a third-stage electric appliance of the semiconductor automatic test system; and when the monitoring unit monitors that the second switch is closed, the control unit carries out delayed power supply on the third-stage power supply module.
Further, the second switch is a knob switch.
Further, the sensing unit comprises a smoke module and/or a temperature sensor.
Further, the first switch is a push-button switch.
A method for supplying power to a self-holding power supply device of a semiconductor automatic test system comprises the following steps:
s01: the first switch is closed, the contact terminal of the third relay is conducted, and the first-stage electric appliance in the semiconductor automatic test system starts to work; meanwhile, a contact terminal of the first relay is conducted, the first switch and the first relay form a self-holding circuit, and the third relay is controlled together to enable the first-stage power supply module to be electrified;
s02: the second switch is closed, the contact terminal of the fourth relay is conducted, and the second-stage electric appliance in the semiconductor automatic test system starts to work; meanwhile, a contact terminal of the second relay is conducted, the second switch and the second relay form a self-holding circuit, and the fourth relay is controlled together to enable the second-stage power supply module to be electrified;
s03: when the monitoring unit monitors that the second switch is closed, the control unit carries out delayed power supply on the third-stage power supply module.
Further, when the power supply device is powered off, the method comprises the following steps:
T01: the second switch is disconnected, due to the self-holding function of the second relay, the contact terminal in the fourth relay keeps closed, the monitoring unit monitors that the second switch is disconnected, and the control unit powers off the third-stage power supply module;
t02: the second-stage power supply module is powered off by controlling the second-stage electric appliance to be powered off;
t03: and closing the main control switch, and cutting off the main power supply of the semiconductor automatic test system, so that the semiconductor automatic test system is powered off integrally.
Further, when the first switch is turned off, the contact terminal of the first relay is still turned on.
Further, when the sensing unit gives an alarm, the control unit cuts off the POWER + POWER supply, the contact terminal of the first relay is disconnected, the contact terminal of the third relay is controlled to be disconnected, and the control unit cuts off the POWER supply of all the electric appliances; when the sensing unit gives an alarm and the control unit is connected with the POWER + POWER supply, the contact terminals of the first relay and the second relay are still in an off state, and POWER supply to the system is avoided.
The invention has the beneficial effects that: the self-holding circuit is added on the basis of the START button, the START button is used for triggering the self-holding circuit to close and power on, and the system cannot be powered off by operating the START button. The situations that the three-level electrical appliance is directly powered off and simultaneously powered on due to manual operation errors and after the alarms of the smoke module and the temperature sensor are removed are avoided; a self-holding circuit is added ON the basis of the knob switch, the knob only needs to be operated once, the STANDBY is rotated to the ON position, the second-stage electrification is completed, and the third-stage electrification is completed after the monitoring unit is subjected to time delay processing. ON the contrary, the three-level and two-level power-down can be realized only by rotating the knob switch from the ON position to the STANDBY position, so that the manual operation steps are simplified, and the possibility of error operation is reduced.
Drawings
FIG. 1 is a schematic diagram of a power-on sequence of a semiconductor automatic test system in the prior art;
FIG. 2 is a schematic diagram of a power supply device of a semiconductor automatic test system in the prior art;
FIG. 3 is a schematic structural diagram of a first-stage power supply module of the semiconductor automatic test system according to the present invention;
fig. 4 is a schematic structural diagram of a second-stage power supply module of the semiconductor automatic test system according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings.
The invention provides a self-holding power supply device of a semiconductor automatic test system, which comprises a first-stage power supply module, a second-stage power supply module and a third-stage power supply module, wherein the first-stage power supply module, the second-stage power supply module and the third-stage power supply module respectively provide power for a first-stage electric appliance, a second-stage electric appliance and a third-stage electric appliance of the semiconductor automatic test system, namely, the first-stage power-on, the second-stage power-on and the third-stage power-on are realized. The first-stage electrical appliance in the semiconductor automatic test system can comprise one or more of a motor module, a cabinet fan and a liquid cooling system CDU; the second stage appliance may include one or more of an industrial personal computer, a display, a router, a meter, a workstation, a KVM; the third stage appliance may include a heat dissipation fan and/or a main control panel.
As shown in fig. 3, the first stage power supply module of the present invention includes a first switch, a first relay, a third relay, a first power supply interface J2 and a sensing interface J1, wherein the first switch is a START button switch; one end of the first switch is connected with a GND POWER supply, the other end of the first switch is connected with one coil terminal of a third relay through a first POWER supply interface, the other coil terminal of the third relay is connected with a POWER + POWER supply, and when the third relay is closed, a first-stage electric appliance in the semiconductor automatic test system starts to work; coil terminals of the first relay are respectively connected with one end of the first switch and the sensing interface J1, and contact terminals of the first relay are respectively connected with two ends of the first switch; sensing interface is connected to POWER + POWER through normally closed switch, sensing unit includes sensing equipment such as smog module, temperature sensor, sensing unit work (no temperature, smog report an emergency and ask for help or increased vigilance) when normal condition, and normally closed switch is closed, and normally closed switch takes precedence over first order POWER module, second level POWER module and third level POWER module and supplies POWER, and only when sensing equipment sensing early warning in sensing unit, normally closed switch just can break off. The first switch and the first relay are positioned on a panel adapter plate of a cabinet in the semiconductor automatic test system.
As shown in fig. 4, the second stage power supply module in the present invention includes a second switch, a second relay, a fourth relay, and a second power supply interface J3, wherein the second switch is a knob switch, and two corresponding knob positions of the second switch are a STANDBY position and an ON position, respectively. One end of the second switch is connected with a GND POWER supply, the other end of the second switch is connected with one coil terminal of a fourth relay through a second POWER supply interface J3, the other coil terminal of the fourth relay is connected with a POWER + POWER supply, and when the fourth relay is closed, a second-stage electric appliance in the semiconductor automatic test system starts to work; and the coil terminal of the second relay is respectively connected with one end of the second switch and the POWER + POWER supply, and the contact terminal of the second relay is respectively connected with two ends of the second switch. The second switch and the second relay are positioned on the panel adapter plate of the cabinet in the semiconductor automatic test system.
The self-holding power supply device also comprises a third-stage power supply module, a monitoring unit and a control unit, wherein the third-stage power supply module is used for providing a power supply for a third-stage electric appliance of the semiconductor automatic test system; when the monitoring unit monitors that the second switch is closed, the control unit carries out delayed power supply on the third-stage power supply module.
Example 1
Referring to fig. 3 and 4, when the present invention includes a three-stage electrical apparatus, a method for supplying power to a self-sustaining power supply apparatus of a semiconductor automatic test system according to the present invention includes the following steps:
s01: when the main control switch is closed, the sensing unit is powered on, the first switch is closed, namely the START button switch in the attached figure 3 is pressed, at the moment, the third relay is excited to be closed, namely the contact terminal of the third relay is conducted, and the first-stage electric appliance in the semiconductor automatic testing system STARTs to work; meanwhile, the contact terminal of the first relay is conducted, the first switch and the first relay form a self-holding circuit, and the third relay is controlled together, so that the first-stage power supply module is electrified.
The third relay realizes the first-level power-on and power-off control function, and the conduction and the closing of the contact terminal of the third relay correspond to the first-level power-on and power-off state of the semiconductor automatic test system. The START button switch and the first relay are positioned on the cabinet panel adapter plate to form a self-holding circuit, and the state of the third relay is controlled under the combined action.
In the invention, after the first switch is switched off, the contact terminal of the first relay is still conducted. That is to say, after the first-level electrification of the system is completed, if personnel press the START button switch by mistake, the third relay keeps the excitation state, does not respond to the mistake operation command, and avoids the condition of mistake electrification.
When the smoke module and the temperature sensor give an alarm, the POWER + POWER supply of the J1 is cut off by the alarm, the first relay loses magnetism and falls, the third relay loses magnetism and falls, and the semiconductor automatic testing system cuts off the POWER supply to finish POWER-off. After the smog module and the temperature sensor relieve the alarm and hook on the POWER + POWER supply, the third relay still maintains the disconnection state because the first relay is in the disconnection state, and the repeated POWER-on and POWER-off condition of the system is avoided.
S02: the second switch is closed, the contact terminal of the fourth relay is conducted, and a second-stage electric appliance in the semiconductor automatic test system starts to work; meanwhile, a contact terminal of the second relay is conducted, the second switch and the second relay form a self-holding circuit, and the fourth relay is controlled together to enable the second-stage power supply module to be powered on;
the fourth relay realizes the control function of the second-stage power-on and power-off state of the system, and the opening and closing state of the contact corresponds to the second-stage power-on and power-off state of the system. The knob switch and the second relay are positioned on the cabinet panel adapter plate to form a self-holding circuit, and the state of the fourth relay is controlled under the combined action. The monitoring unit detects the state of the knob switch and is used for controlling the third-level power-on and power-off state of the system.
And in the second-level and third-level power-ON processes of the system, the knob switch is rotated to the ON position from the STANDBY, the fourth relay is excited, and the second-level power-ON is completed. Meanwhile, the excitation of the second relay attracts to form a self-holding loop.
S03: after the monitoring unit monitors the ON state of the knob switch, the control unit controls the third-level system to be electrified after time delay, and therefore the time sequence relation of the three-level electrification of the system is guaranteed.
The two-level and three-level power supply and distribution scheme simplifies the manual power-on and power-off operation steps of the system and reduces the possibility of misoperation.
When the power supply device is powered off, the method comprises the following steps:
t01: and the second switch is disconnected, the contact terminal in the fourth relay keeps closed due to the self-holding function of the second relay, the monitoring unit monitors that the second switch is disconnected, and the control unit powers off the third-stage power supply module.
Specifically, when the semiconductor automatic test system is powered off, the knob switch is screwed to the STANDBY position from the ON state, the fourth relay maintains the excitation state due to the self-holding function of the second relay, and the second-stage power supply is continuously maintained. And after the monitoring unit monitors the state of the knob switch STANDBY, the control system completes the third-stage power-off.
T02: and powering off each device in the second-stage electric appliance, so that the second-stage power supply module is powered off.
T03: and closing the main control switch, and cutting off the main power supply of the semiconductor automatic test system, so that the semiconductor automatic test system is powered off integrally.
The self-holding circuit is added on the basis of the START button, the START button is used for triggering the self-holding circuit to close and power on, and the system cannot be powered off by operating the START button. The situations that the three-level electrical appliance is directly powered off and simultaneously powered on due to manual operation errors and after the alarms of the smoke module and the temperature sensor are removed are avoided; a self-holding circuit is added ON the basis of the knob switch, the knob only needs to be operated once, the STANDBY is rotated to the ON position, the second-stage electrification is completed, and the third-stage electrification is completed after the monitoring unit is subjected to time delay processing. ON the contrary, the three-level and two-level power-down can be realized only by rotating the knob switch from the ON position to the STANDBY position, so that the manual operation steps are simplified, and the possibility of error operation is reduced.
Example 2
Referring to fig. 3 and 4, when the present invention includes two stages of electric appliances, the third stage power supply module is reduced, and the monitoring unit and the control unit corresponding to the third stage power supply module are reduced, compared to embodiment 1. The structures and the power-up and power-down processes of the first-stage power supply module and the second-stage power supply module are similar to those of embodiment 1. The method for supplying power to the self-holding power supply device of the semiconductor automatic test system provided by the embodiment comprises the following steps:
S01: when the main control switch is closed, the sensing unit is powered on, the first switch is closed, namely the START button switch in the attached figure 3 is pressed, at the moment, the third relay is excited to be closed, namely the contact terminal of the third relay is conducted, and the first-stage electric appliance in the semiconductor automatic testing system STARTs to work; meanwhile, the contact terminal of the first relay is conducted, the first switch and the first relay form a self-holding circuit, and the third relay is controlled together, so that the first-stage power supply module is electrified.
The third relay realizes the first-stage power-on and power-off control function, and the conduction and the closing of the contact terminal of the third relay correspond to the first-stage power-on and power-off state of the semiconductor automatic test system. The START button switch and the first relay are positioned on the cabinet panel adapter plate to form a self-holding circuit, and the state of the third relay is controlled under the combined action. The self-holding structure can avoid the power-off condition generated when a person mistakenly operates and presses the START button switch; the system can be prevented from being repeatedly powered up and down when the sensing unit alarms.
S02: the second switch is closed, the contact terminal of the fourth relay is conducted, and the second-stage electric appliance in the semiconductor automatic test system starts to work; meanwhile, a contact terminal of the second relay is conducted, the second switch and the second relay form a self-holding circuit, and the fourth relay is controlled together to enable the second-stage power supply module to be electrified;
The fourth relay realizes the control function of the second-stage power-on and power-off state of the system, and the opening and closing state of the contact corresponds to the second-stage power-on and power-off state of the system. The knob switch and the second relay are positioned on the cabinet panel adapter plate to form a self-holding circuit, and the state of the fourth relay is controlled under the combined action.
When the power supply device is powered off, the method comprises the following steps:
t01: the second switch is disconnected, and due to the self-holding effect of the second relay, the contact terminal in the fourth relay keeps closed, and all devices in the second-stage electric appliance are operated to be powered off, so that the second-stage power supply module is powered off.
T02: and closing the main control switch, and cutting off the main power supply of the semiconductor automatic test system, so that the whole semiconductor automatic test system is powered off.
The above description is only a preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all equivalent structural changes made by using the contents of the specification and the drawings of the present invention should be included in the scope of the appended claims.

Claims (9)

1. A self-holding power supply device of a semiconductor automatic test system comprises a first-stage power supply module and a second-stage power supply module, wherein the first-stage power supply module and the second-stage power supply module respectively provide power for a first-stage electric appliance and a second-stage electric appliance of the semiconductor automatic test system; the semiconductor automatic test system is characterized in that the first-stage POWER supply module comprises a first switch, a first relay, a third relay and a first POWER supply interface, wherein one end of the first switch is connected with a GND POWER supply, the other end of the first switch is connected with one coil terminal of the third relay through the first POWER supply interface, the other coil terminal of the third relay is connected with a POWER + POWER supply, and when the third relay is closed, a first-stage electric appliance in the semiconductor automatic test system starts to work;
Coil terminals of the first relay are respectively connected with one end of the first switch and the sensing interface, and contact terminals of the first relay are respectively connected with two ends of the first switch;
the second-stage POWER supply module comprises a second switch, a second relay, a fourth relay and a second POWER supply interface, wherein one end of the second switch is connected with a GND POWER supply, the other end of the second switch is connected with one coil terminal of the fourth relay through the second POWER supply interface, the other coil terminal of the fourth relay is connected with a POWER + POWER supply, and when the fourth relay is closed, a second-stage electric appliance in the semiconductor automatic test system starts to work;
coil terminals of the second relay are respectively connected with one end of a second switch and a POWER + POWER supply, and contact terminals of the second relay are respectively connected with two ends of the second switch;
the sensing interface is connected to a POWER + POWER supply through a normally closed switch, and the normally closed switch is closed when the sensing unit is in a normal working state.
2. The self-sustaining power supply unit of a semiconductor automatic test system of claim 1, wherein said self-sustaining power supply unit further comprises a third stage power supply module, a monitoring unit and a control unit, said third stage power supply module provides power supply for third stage electrical appliances of the semiconductor automatic test system; and when the monitoring unit monitors that the second switch is closed, the control unit carries out delayed power supply on the third-stage power supply module.
3. The self-sustaining power supply apparatus of claim 1, wherein said second switch is a turn-knob switch.
4. The self-sustaining power supply of a semiconductor automated testing system according to claim 1, wherein said sensing unit comprises a smoke module and/or a temperature sensor.
5. The self-sustaining power supply apparatus of claim 1, wherein said first switch is a push-button switch.
6. A method for supplying power to a self-holding power supply device of a semiconductor automatic test system is characterized by comprising the following steps:
s01: the first switch is closed, the contact terminal of the third relay is conducted, and a first-stage electric appliance in the semiconductor automatic test system starts to work; meanwhile, a contact terminal of the first relay is conducted, the first switch and the first relay form a self-holding circuit, and the third relay is controlled together to enable the first-stage power supply module to be electrified;
s02: the second switch is closed, the contact terminal of the fourth relay is conducted, and a second-stage electric appliance in the semiconductor automatic test system starts to work; meanwhile, a contact terminal of the second relay is conducted, the second switch and the second relay form a self-holding circuit, and the fourth relay is controlled together to enable the second-stage power supply module to be electrified;
S03: when the monitoring unit monitors that the second switch is closed, the control unit carries out delayed power supply on the third-stage power supply module.
7. The method of claim 6, wherein the step of powering down the self-sustaining power supply unit comprises the following steps:
t01: the second switch is disconnected, due to the self-holding function of the second relay, the contact terminal in the fourth relay keeps closed, the monitoring unit monitors that the second switch is disconnected, and the control unit powers off the third-stage power supply module;
t02: the second-stage power supply module is powered off by controlling the second-stage electric appliance to be powered off;
t03: and closing the main control switch, and cutting off the main power supply of the semiconductor automatic test system, so that the whole semiconductor automatic test system is powered off.
8. The method as claimed in claim 6, wherein the contact terminal of the first relay is still conductive when the first switch is turned off.
9. The method of claim 6, wherein when the sensing unit alarms, the control unit cuts off POWER supply, the contact terminal of the first relay is opened, and the contact terminal of the third relay is controlled to be opened, so that the first stage POWER supply module is powered off; when the sensing unit gives an alarm and the control unit is connected with the POWER + POWER supply, the contact terminals of the first relay and the second relay are still in an off state, and POWER supply to the system is avoided.
CN202010112449.2A 2020-02-24 2020-02-24 Self-holding type power supply device and method of semiconductor automatic test system Expired - Fee Related CN111289867B (en)

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