CN111288900A - Edge positioning method for groove width fixed value - Google Patents
Edge positioning method for groove width fixed value Download PDFInfo
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- CN111288900A CN111288900A CN202010238600.7A CN202010238600A CN111288900A CN 111288900 A CN111288900 A CN 111288900A CN 202010238600 A CN202010238600 A CN 202010238600A CN 111288900 A CN111288900 A CN 111288900A
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- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 238000009792 diffusion process Methods 0.000 claims abstract description 11
- 238000010226 confocal imaging Methods 0.000 claims abstract description 10
- 238000012545 processing Methods 0.000 claims abstract description 5
- 238000010606 normalization Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 7
- 210000001747 pupil Anatomy 0.000 description 5
- 239000000243 solution Substances 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 238000004624 confocal microscopy Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an edge positioning method for groove width fixed value, which comprises the following steps: establishing a shielding aperture point diffusion function and an edge shielding confocal imaging model; calculating an ideal groove intensity image by using an edge shielding confocal imaging model, and performing normalization processing to obtain an ideal groove normalized intensity image; extracting the contour line of the complex amplitude of the normalized intensity image of the ideal groove, and finding the intensity value I of the intersection point of the edge of the groove and the normalized intensity imageNor(ii) a Extracting an axial envelope curve of the lower surface of the groove from the actually measured three-dimensional data, determining the quasi-focus position of the lower surface of the groove and the quasi-focus image of the lower surface of the groove by a centroid method, and normalizing to obtain an actually measured normalized intensity image of the groove; finding the intensity value I in the groove normalized intensity image obtained by actual measurementNorThe corresponding transverse position of the coordinate point is the edge position of the groove in actual measurement, so that the width of the groove can be determined, and a more accurate and reasonable groove width value determining method is provided for the reflection type confocal microscope.
Description
Technical Field
The invention relates to the technical field of three-dimensional shape basic geometric parameter representation in confocal microscopic measurement technology, in particular to an edge positioning method for groove width fixed value.
Background
The reflection type confocal microscope has three-dimensional non-contact nondestructive measurement, is widely applied to the fields of material surface appearance measurement, semiconductor processing line width detection, injection molding microfluidic chip groove molding detection and the like, and is an important tool commonly used for measuring and detecting the three-dimensional appearance of a microstructure. In actual measurement, a microstructure shape measurement result is different from a real shape, for example, a groove sample is seriously degraded in the shape of a position with abundant spatial frequency distribution such as an edge, so that the edge of the groove cannot be accurately positioned, and the width of the groove cannot be accurately given.
The existing edge positioning method in the prior confocal microscopy does not fully consider the influence caused by the introduction of the groove height, and not only needs to consider the shielding influence of the step edge, but also needs to consider the distribution of the light field on the surface of the defocused groove at the detection end. Currently, the traditional edge location method is that under coherent conditions, the edge is at 1/4 of the normalized intensity response curve of the trench; under incoherent conditions, the step edge is at 1/2 of the normalized step intensity response curve. However, the method is not suitable for positioning the groove edge in the reflective confocal microscopic three-dimensional measurement, because the influence of the shielding of the groove edge and the defocusing light field is not negligible, the introduction of the height information causes the shielding of the detection light needle when the detection light needle is close to the edge position, the shape of the detection light needle is changed, the point spread function of the imaging system is further changed, and the imaging system is no longer a space linear invariant system.
Therefore, how to provide an edge positioning method for trench width constant value is a problem that needs to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides an edge positioning method for groove width constant value, and provides a more accurate and reasonable groove width constant value method for a reflection type confocal microscope by considering the edge shielding effect caused by the introduction of the groove height and the defocusing light field effect of the upper surface of the groove when the groove bottom is in focus.
In order to achieve the purpose, the invention adopts the following technical scheme:
an edge positioning method for groove width constant value comprises the following steps:
establishing a shielding aperture point diffusion function, and establishing an edge shielding confocal imaging model based on the shielding aperture point diffusion function;
calculating an ideal groove intensity image by using an edge shielding confocal imaging model, and carrying out normalization processing on the ideal groove intensity image to obtain an ideal groove normalized intensity image;
extracting the contour line of the complex amplitude of the normalized intensity image of the ideal groove, and finding the intensity value I of the intersection point of the edge of the groove and the normalized intensity imageNor；
Extracting an axial envelope curve of the lower surface of the groove from actually measured three-dimensional data, determining a quasi-focus position of the lower surface of the groove by a centroid method, extracting a quasi-focus image of the lower surface of the groove according to the quasi-focus position, and normalizing to obtain an actually measured normalized intensity image of the groove;
finding the intensity value I in the groove normalized intensity image obtained by actual measurementNorThe corresponding transverse position of the coordinate point is the edge position of the groove in actual measurement, and the width of the groove can be further determined.
Preferably, the shading aperture point spread function is a point spread function which changes with the relative position relationship between the groove edge and the optical axis of the optical system.
Preferably, the edge-occlusion confocal imaging model is a model based on trench bottom focused imaging calculation.
Preferably, the light field of the ideal groove intensity image is obtained by superposing two parts of light fields, wherein the light field distribution of the lower surface of the groove on the detection image surface is calculated based on the shielding aperture point diffusion function, and the light field distribution of the upper surface of the groove on the detection image surface is calculated based on the three-dimensional off-focus diffusion function.
According to the technical scheme, compared with the prior art, the invention discloses an edge positioning method for groove width constant value, simultaneously considers the edge shielding influence and the defocusing light field influence on the upper surface of the groove when the bottom of the groove is in focus, establishes a focus-on imaging model on the lower surface of the groove based on the shielding aperture point diffusion function and the three-dimensional defocusing point diffusion function, determines the normalized light intensity of the intersection point position of the groove edge and the groove normalized intensity image, and determines the groove edge position in actual measurement by combining the normalized intensity value and the groove normalized intensity image obtained by actual measurement, so that the groove width is obtained, a more accurate and reasonable groove width constant value method is provided for a confocal microscope, and the method is helpful for guiding a tester to correctly give a groove width test result.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a flow chart of an edge positioning method for trench width determination according to the present invention;
FIG. 2 is a diagram illustrating the mapping of the groove edge to the pupil coordinate system according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
To solve the problems in the prior art, the embodiment of the present invention discloses a new edge positioning method for determining the width of a trench in three-dimensional measurement of a confocal microscope, and refer to fig. 1 and fig. 2, which specifically includes the following steps:
establishing a shielding aperture point diffusion function, and establishing an edge shielding confocal imaging model based on the shielding aperture point diffusion function;
where P (ξ) is the pupil function, a is the pupil radius, k is the wave vector, d1Is the imaging distance, x-b is the coordinate value of the groove edge abscissa mapped to the pupil coordinate system, x-b is related to the groove height H, the numerical aperture NA of the imaging objective and the pupil radius a, as shown in the formula:
wherein x-d is the distance between the optical axis of the optical system and the edge of the groove, and x is the distance between the edge of the groove and the optical axis of the optical system when the edge of the groove is positioned on the right side-b the relation takes +; when the trench edge is on the left side, x-b, taking a relation of "-";
calculating an ideal groove intensity image by using an edge shielding confocal imaging model, and carrying out normalization processing on the ideal groove intensity image to obtain a groove normalized intensity image;
extracting the contour line of the complex amplitude of the normalized intensity image of the ideal groove, and finding the intensity value I of the intersection point of the edge of the groove and the normalized intensity imageNor；
Extracting an axial envelope curve of the lower surface of the groove from actually measured three-dimensional data, determining a quasi-focus position of the lower surface of the groove by a centroid method, extracting a quasi-focus image of the lower surface of the groove according to the quasi-focus position, and normalizing to obtain an actually measured normalized intensity image of the groove;
finding the intensity value I in the groove normalized intensity image obtained by actual measurementNorThe corresponding transverse position of the coordinate point is the edge position of the groove in actual measurement, and the width of the groove can be further determined.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (4)
1. An edge positioning method for groove width constant value is characterized by comprising the following steps:
establishing a shielding aperture point diffusion function, and establishing an edge shielding confocal imaging model based on the shielding aperture point diffusion function;
calculating an ideal groove intensity image by using an edge shielding confocal imaging model, and carrying out normalization processing on the ideal groove intensity image to obtain an ideal groove normalized intensity image;
extracting the contour line of the complex amplitude of the normalized intensity image of the ideal groove, and finding the intensity value I of the intersection point of the edge of the groove and the normalized intensity imageNor；
Extracting an axial envelope curve of the lower surface of the groove from actually measured three-dimensional data, determining a quasi-focus position of the lower surface of the groove by a centroid method, extracting a quasi-focus image of the lower surface of the groove according to the quasi-focus position, and normalizing to obtain an actually measured normalized intensity image of the groove;
finding the intensity value I in the groove normalized intensity image obtained by actual measurementNorThe corresponding transverse position of the coordinate point is the edge position of the groove in actual measurement, and the width of the groove can be further determined.
2. The method according to claim 1, wherein the shading aperture point spread function is a point spread function which varies with the relative position of the groove edge and the optical axis of the optical system.
3. The method of claim 1, wherein the edge-masking confocal imaging model is a model based on trench bottom focused imaging calculation.
4. The edge positioning method for fixed value of trench width according to claim 1, wherein the light field of the ideal trench intensity image is obtained by superimposing two light fields, wherein the light field distribution of the lower surface of the trench on the detection image surface is calculated based on the shading aperture point spread function, and the light field distribution of the upper surface of the trench on the detection image surface is calculated based on the three-dimensional off-focus spread function.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114383533A (en) * | 2022-01-12 | 2022-04-22 | 哈尔滨工业大学 | Dark field confocal microscopic width fixed value measuring method |
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2020
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