CN111288885B - Stretchable strain sensor and preparation method and application thereof - Google Patents

Stretchable strain sensor and preparation method and application thereof Download PDF

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CN111288885B
CN111288885B CN202010096176.7A CN202010096176A CN111288885B CN 111288885 B CN111288885 B CN 111288885B CN 202010096176 A CN202010096176 A CN 202010096176A CN 111288885 B CN111288885 B CN 111288885B
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metal particles
carbon material
strain sensor
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CN111288885A (en
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彭争春
林婉儿
王子娅
管晓
张琦
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Shenzhen University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
    • A61B5/024Detecting, measuring or recording pulse rate or heart rate
    • AHUMAN NECESSITIES
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    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/103Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
    • A61B5/11Measuring movement of the entire body or parts thereof, e.g. head or hand tremor, mobility of a limb
    • A61B5/1107Measuring contraction of parts of the body, e.g. organ, muscle
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/103Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
    • A61B5/11Measuring movement of the entire body or parts thereof, e.g. head or hand tremor, mobility of a limb
    • A61B5/1118Determining activity level
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048Interaction techniques based on graphical user interfaces [GUI]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/16Human faces, e.g. facial parts, sketches or expressions
    • G06V40/174Facial expression recognition

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Abstract

The invention provides a stretchable strain sensor and a preparation method and application thereof. The invention solves the problem of continuous conduction of a strain material under large tensile strain by utilizing the self-locking effect at the interface of the double-layer conductive sensing layers of the conductive carbon material layer and the conductive metal particle layer.

Description

Stretchable strain sensor and preparation method and application thereof
Technical Field
The invention relates to the technical field of sensors, in particular to a stretchable strain sensor and a preparation method and application thereof.
Background
Wearable electronic sensors have attracted extensive attention in the fields of human clinical diagnosis, health monitoring, human-computer interfaces, electronic skins, intelligent robots, and the like. As an important member of the electronic sensors, the tensile strain sensor has been rapidly developed in recent years, and can be used to detect various physiological activities of the human body, including large-scale bending movements of hands, arms, legs, etc., and small-scale deformations of deep breathing, swallowing, muscle vibration, blood pressure, pulse, etc. In particular, stretchable strain sensors applied in biomechanics, physiology and kinematics are required to have high sensitivity, a wide strain range and excellent durability.
Among these requirements, high stretchability and sensitivity are key parameters of a stretchable strain sensor. In order to manufacture a high-performance strain sensor, sensitive materials with high conductivity and stable electrical properties under large strain need to be considered. However, strain sensors still suffer from several problems: strain sensors with high sensitivity, but with a small extension range; or the sensor has a wide expansion range but its low sensitivity is low. On the other hand, stability and durability are also important for tensile strain sensors. Chinese patent CN108332647A proposes a flexible piezoresistive strain sensor, which uses a metal glass film as a sensitive material, and although the metal glass film has good linearity, its sensitivity coefficient is only 2.5. Chinese patent CN107655398A proposes a high-sensitivity stretchable flexible strain sensor, which mainly adopts a technical scheme that a polyurethane sponge composite material coated by graphene and a nickel film with cracks is encapsulated by a polymer, and although the maximum sensitivity coefficient of the strain sensor can reach 3300, the stretching range of the strain sensor is only 65%. In the paper entitled "graphene/silicone rubber composite for high sensitivity, wear-resistant, durable strain sensor and stretchable conductor", published in the journal of advanced functional materials by history et al in 2016, a strain sensor of graphene sheet and silicone rubber composite was reported, which has the largest value of sensitivity coefficient (164.5) at a sensor thickness of 10 μm, but with a stretching limit of 12%. Based on the above, a stretchable strain sensor that possesses high stretchability and sensitivity as well as good stability and durability remains a challenge.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, it is an object of the present invention to provide a stretchable strain sensor comprising a flexible substrate layer and a sensing layer partially embedded in the flexible substrate layer, the sensing layer comprising a layer of conductive metal particles and a layer of conductive carbon material, the layer of conductive carbon material being arranged between the flexible substrate layer and the layer of conductive metal particles, and a method for preparing and using the same. The invention solves the problem of continuous conduction of a strain material under large tensile strain by utilizing the self-locking effect at the interface of the double-layer conductive sensing layers of the conductive carbon material layer and the conductive metal particle layer.
In order to achieve the above objects and other related objects, the present invention is achieved by the following technical solutions:
the invention provides a stretchable strain sensor which comprises a flexible substrate layer and a sensing layer, wherein the sensing layer is partially embedded in the flexible substrate layer, the sensing layer comprises a conductive metal particle layer and a conductive carbon material layer, and the conductive carbon material layer is arranged between the flexible substrate layer and the conductive metal particle layer.
The flexible substrate layer can be prepared from various common high-molecular polymers by means of pouring, coating, printing and the like.
Preferably, the flexible substrate layer is a substrate layer comprising polydimethylsiloxane.
Preferably, the conductive metal particle layer is a sensing layer containing silver particles and/or silver-coated copper particles.
Preferably, the conductive carbon material layer is a sensing layer comprising carbon nanotubes.
Preferably, the sensor further comprises a lead wire electrically connected with the sensing layer.
The tensile strain sensor can sample analog resistance signals directly from both ends of the electrode layer, and can also convert the analog resistance signals into corresponding digital signals for further application.
The second aspect of the present invention provides a method for preparing the stretchable strain sensor, comprising the following steps:
1) providing a hollow polymer mask having a design pattern on a substrate;
2) adding the conductive metal particle dispersion liquid into the hollow cavity of the hollow polymer mask, and drying to provide a substrate covered with conductive metal particles;
3) spraying the conductive carbon material dispersion on the substrate covered with the conductive metal particles obtained in step 2), and drying to provide a substrate covered with the conductive carbon material and the conductive metal particles;
4) removing the hollow polymer mask;
5) pouring a high molecular polymer precursor on the layered object obtained in the step 4), degassing, curing, and peeling from the substrate to obtain the tensile strain sensor.
The conductive metal particle dispersion is formed by dispersing conductive metal particles in a first solvent. The conductive metal particles may include silver particles and/or silver-clad copper particles. The first solvent is a solvent in which the conductive metal particles can be dispersed and can be volatilized during the drying process, for example: may be selected from one or more of ethanol, isopropanol, etc. The mass per unit area of the conductive metal particles used in the preparation is 1-1.4 mg/cm2E.g. 1 to 1.2mg/cm2Or 1.2 to 1.4mg/cm2. The concentration of the conductive metal particles in the conductive metal particle dispersion can be 0.025-0.035 g/mL, such as 0.025-0.03 g/mL or 0.03-0.035 g/mL.
The conductive carbon material dispersion liquid is formed by dispersing a conductive carbon material in a second solvent. The conductive carbon material is a carbon nanotube. The second solvent may disperse the solvent of the conductive carbon material and may be volatilized during drying, for example: may be one or more selected from n-hexane, etc. The unit area mass of the conductive carbon material used in the preparation is 0.2-0.6 mg/cm2E.g. 0.2-0.4 mg/cm2Or 0.4 to 0.6mg/cm2. The concentration of the conductive carbon material in the conductive carbon material dispersion may be 5 mg/mL.
Preferably, in the step 2), the thickness of the conductive metal particles in the substrate covered with the conductive metal particles is 8 to 12 micrometers, such as 8 to 10 micrometers or 10 to 12 micrometers.
Preferably, in step 3), the thickness of the conductive carbon material in the substrate covered with the conductive carbon material and the conductive metal particles is 2 to 7 micrometers, such as 2 to 5 micrometers or 5 to 7 micrometers.
The third aspect of the invention provides the use of the stretchable strain sensor for detecting the heart rate of a human body, detecting the breathing of the human body, recognizing facial expressions, capturing human body motion and providing a human-computer interface.
Compared with the prior art, the invention has at least one of the following advantages:
1) when the tensile strain sensor is stretched, the distance between the particles of the sensing layer is gradually increased, and the number of the particles which are connected and communicated with each other is reduced, so that the overall resistance of the sensor is increased.
2) The tensile strain sensor can adjust the permeation threshold of the original filler of micron-sized conductive metal particles through conductive carbon materials such as a carbon nano tube conductive network film so as to improve the omnibearing performance.
3) The stretchable strain sensor provided by the invention has the advantages that the cooperative multiphase structure design, the modulus mismatch principle and the separation mechanism of each layer are utilized, so that the sensor has a high strain coefficient and a wide strain range.
4) The stretchable strain sensor can be applied to detection of human heart rate and respiration, facial expression recognition, human motion capture, human-computer interfaces and the like.
5) The stretchable strain sensor has the advantages of simple structure and preparation method, easy lead, low product cost, high sensitivity and larger measurement range, and can replace the traditional strain sensor to be used for various human-computer interactions, human body sign monitoring and the like.
Drawings
FIG. 1(a) is a cross-sectional view under SEM of a tensile strain sensor prepared from 1mL of a dispersion of a conductive carbon material; FIG. 1(b) is 2 mL; FIG. 1(c) shows 3 mL.
FIG. 2 shows the resistance change rate of strain sensors made of conductive carbon material dispersions of different volumes (1-5 mL) under different strains.
FIG. 3 is the rate of change of resistance at different strains for the corresponding tensile strain sensor of example 1.
FIG. 4 is an electrical response of the tensile strain sensor of example 1 at 120% strain at a rate of 1.75Hz for 15000 load-unload cycles.
Detailed Description
The technical solution of the present invention is illustrated by specific examples below. It is to be understood that one or more method steps recited herein do not preclude the presence of additional method steps before or after the recited combining step, or that additional method steps may be intervening between the explicitly recited steps; it should also be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Moreover, unless otherwise indicated, the numbering of the various method steps is merely a convenient tool for identifying the various method steps, and is not intended to limit the order in which the method steps are arranged or the scope of the invention in which the invention may be practiced, nor is it intended to limit the scope of the invention in which changes or modifications in the relative relationship thereto may be made without materially changing the technical disclosure.
The sensor of the present invention can realize strain sensors with different performance parameters by adjusting the thickness of the conductive carbon material layer, for example, by adjusting the volume of the conductive carbon material dispersion used in the manufacturing process (see examples 1 to 3 below), and as shown in fig. 1, in order to adjust the relationship between the strain and the rate of change in resistance of a stretchable strain sensor made of the volume of the conductive carbon material dispersion used, the series of sensors uses a conductive particle dispersion having a concentration of 0.03g/mL and the thickness of conductive metal particles in a substrate covered with conductive metal particles is about 10 μm.
Example 1
The stretchable strain sensor is obtained by the preparation method comprising the following steps, and has the characteristics of high sensitivity, high stretchability and wide strain range, and good stability and durability.
1) A hollow polymer mask having a design pattern (the design pattern is a square of 5cm by 5 cm) was provided on a glass substrate;
2) 1mL of an ethanol solution having a concentration of 0.03g/mL of silver nanoparticles was deposited on a glass substrate containing a design pattern by a dropping method, and thenDrying at 80 deg.C for 5 minutes to remove ethanol to provide a substrate coated with conductive metal particles (silver nanoparticles) prepared with a mass per unit area of 1.2mg/cm2The thickness of the conductive metal particles in the substrate covered with the conductive metal particles is about 10 microns;
3) spraying 2mL of a CNT dispersion having a concentration of 5mg/mL onto the substrate coated with conductive metal particles obtained in step 2) and evaporating at room temperature to provide a substrate coated with a conductive carbon material (CNT) having a mass per unit area of 0.4mg/cm and conductive metal particles2The thickness of the conductive carbon material in the substrate covered with the conductive carbon material and the conductive metal particles is about 5 microns;
4) removing the hollow polymer mask having the design pattern;
5) poly (dimethylsiloxane) (PDMS, 10: 1 proportion) was poured onto the layer obtained in step 4), placed in a vacuum chamber for 20 minutes, and then cured at 80 ℃ for 1 hour, and peeled from the substrate to obtain the tensile strain sensor.
The stretchable strain sensor comprises a flexible substrate layer 1 and a sensing layer 2, wherein the sensing layer 2 is partially embedded in the flexible substrate layer 1, the sensing layer 2 comprises a conductive metal particle layer 21 and a conductive carbon material layer 22, and the conductive carbon material layer 22 is arranged between the flexible substrate layer 1 and the conductive metal particle layer 21.
The cross-sectional view of the prepared strain sensor under SEM is shown in fig. 1 (b). It can be seen from the figure that a uniform CNT network is distributed between the Ag particles and the PDMS substrate. The thickness of the CNT layer was about 5 μm from the cross-sectional photomicrograph. The strain sensor has a high strain coefficient (-3990.76), a wide strain range (-120%), as shown in fig. 2 or fig. 3. Based on its high sensitivity and large stretchability, the sensor can simultaneously detect large strain and small strain. At strain < 25%, the GF of the sensor was 218.794. In this strain range, the Ag particle sensing layer has greater conductivity, and the change in resistance of the sensor results primarily from the interaction between the Ag particles. At strains ε > 40%, the GF value of the sensor was 3990.769. The combination of the CNT and Ag particles produces an effective conductive network after the strain sensor is sprayed with CNTs at strain ∈ > 25%, enhancing long-range connectivity in the conductive elastomeric matrix. FIG. 4 is an electrical response of a tensile strain sensor at 120% strain at a rate of 1.75Hz for 15000 load-unload cycles. After 15000 stretch/release cycles, the relative resistance change of the tensile strain sensor remains stable and reproducible, thus it can be determined that the strain sensor has good mechanical durability and stability.
Example 2
When measuring a small strain, the strain sensor does not need a wide strain measurement range, and the volume usage of the conductive carbon material can be properly reduced, i.e. the thickness of the conductive carbon material layer is reduced. Example 2A conductive metal particle dispersion having a concentration of 0.03g/mL and a volume of 1mL, i.e., a conductive metal particle having a mass per unit area of 1.2mg/cm was used in the preparation2. The conductive carbon material dispersion solution has a concentration of 5mg/mL and a volume of 1mL, i.e., the conductive metal particles used in the preparation have a mass per unit area of 0.2mg/cm2. The other preparation steps and preparation conditions were the same as in example 1, and in step 2), the thickness of the conductive metal particles in the substrate covered with the conductive metal particles was about 10 μm, and in step 3), the thickness of the conductive carbon material in the substrate covered with the conductive carbon material and the conductive metal particles was about 2 μm, as shown in fig. 1(a), which was smaller than that of the conductive carbon material layer of the sensor in example 1. When the volume of the conductive carbon material dispersion used is reduced, that is, the thickness of the conductive carbon material in the base material covered with the conductive carbon material and the conductive metal particles is reduced, the tensile property of the strain sensor is reduced, but the sensitivity thereof is improved. The strain versus rate of change of resistance curve of this sensor is shown in fig. 2, which has a maximum tensile strain of about 25%, but has a sensitivity greater than that of the sensor of example 1. The strain sensor of embodiment 2 is more suitable for detecting a minute strain signal such as facial muscle movement and pulse.
Example 3
When a larger strain is measured, the strain sensor needs a larger strain detection range, and the volume usage of the conductive carbon material, i.e., the coverage of the conductive carbon material can be increased appropriatelyThe thickness of the conductive carbon material in the base material of the material and conductive metal particles. Example 3A conductive metal particle dispersion having a concentration of 0.03g/mL and a volume of 1mL, i.e., a conductive metal particle having a mass per unit area of 1.2mg/cm was used in the preparation2. The volume of the conductive carbon material dispersion liquid is 3mL, the concentration is 5mg/mL, namely the unit area mass of the conductive metal particles used in the preparation is 0.6mg/cm2. The other preparation steps and preparation conditions were the same as in example 1, and in step 2), the thickness of the conductive metal particles in the substrate covered with the conductive metal particles was about 10 μm, and in step 3), the thickness of the conductive carbon material in the substrate covered with the conductive carbon material and the conductive metal particles was about 7 μm, as shown in fig. 1(c), which was larger than that of the conductive carbon material layer of the sensor in example 1. When the volume of the conductive carbon material dispersion used is increased, that is, the thickness of the conductive carbon material in the base material covered with the conductive carbon material and the conductive metal particles is increased, the sensitivity of the strain sensor is lowered, but the tensile property thereof is improved. The strain versus rate of change of resistance curve of this sensor is shown in fig. 2, which has a maximum tensile strain of about 140% which is greater than the maximum strain detected by the sensor of example 1, which is 120%. The strain sensor of embodiment 3 is more suitable for detecting the movement of a human limb.
Example 4
Example 4A conductive carbon material dispersion having a concentration of 5mg/mL and a volume of 2mL (i.e., a conductive carbon material having a mass per unit area of 0.4mg/cm2) And a conductive metal particle dispersion having a concentration of 0.025g/mL and a volume of 1mL (i.e., the conductive metal particles used in the preparation had a mass per unit area of 1mg/cm2) The other preparation steps and preparation conditions were the same as in example 1, and in step 2), the thickness of the conductive metal particles in the substrate covered with the conductive metal particles was about 8 μm, and in step 3), the thickness of the conductive carbon material in the substrate covered with the conductive carbon material and the conductive metal particles was about 5 μm, to obtain a strain sensor. The maximum tensile strain of the sensor was about 60%, and the tensile properties were inferior to those of example 1; however, the sensitivity was about 750, which is better than example 1 in the range of lower low strain of 0 to 40%.
Example 5
Example 4A conductive carbon material dispersion having a concentration of 5mg/mL and a volume of 2mL (i.e., a conductive carbon material having a mass per unit area of 0.4mg/cm2) And a conductive metal particle dispersion having a concentration of 0.035g/mL and a volume of 1mL (i.e., the conductive metal particles used in the preparation had a mass per unit area of 1.4mg/cm2) The other preparation steps and preparation conditions were the same as in example 1, and in step 2), the thickness of the conductive metal particles in the base material covered with the conductive metal particles was about 12 μm, and in step 3), the thickness of the conductive carbon material in the base material covered with the conductive carbon material and the conductive metal particles was about 5 μm, to prepare a strain sensor. The maximum tensile strain of the sensor is about 180%, and compared with the sensor in the embodiment 1, the tensile property of the sensor is improved; but its sensitivity is about 80.
While the invention has been described with respect to a preferred embodiment, it will be understood by those skilled in the art that the foregoing and other changes, omissions and deviations in the form and detail thereof may be made without departing from the scope of this invention. Those skilled in the art can make various changes, modifications and equivalent arrangements, which are equivalent to the embodiments of the present invention, without departing from the spirit and scope of the present invention, and which may be made by utilizing the techniques disclosed above; meanwhile, any changes, modifications and variations of the above-described embodiments, which are equivalent to those of the technical spirit of the present invention, are within the scope of the technical solution of the present invention.

Claims (10)

1. A stretchable strain sensor, comprising a flexible substrate layer (1) and a sensing layer (2), the sensing layer (2) being partially embedded in the flexible substrate layer (1), the sensing layer (2) comprising a layer of conductive metal particles (21) and a layer of conductive carbon material (22), the layer of conductive carbon material (22) being arranged between the flexible substrate layer (1) and the layer of conductive metal particles (21);
the tensile strain sensor is obtained by adopting a preparation method comprising the following steps:
1) providing a hollow polymer mask having a design pattern on a substrate;
2) adding the conductive metal particle dispersion liquid into the hollow cavity of the hollow polymer mask, and drying to provide a substrate covered with conductive metal particles;
3) spraying the conductive carbon material dispersion on the substrate covered with the conductive metal particles obtained in step 2), and drying to provide a substrate covered with the conductive carbon material and the conductive metal particles;
4) removing the hollow polymer mask;
5) pouring a high molecular polymer precursor on the layered object obtained in the step 4), degassing, curing, and peeling from the substrate to obtain the tensile strain sensor.
2. A stretchable strain sensor according to claim 1, wherein the flexible substrate layer (1) is a substrate layer comprising polydimethylsiloxane.
3. A stretchable strain sensor according to claim 1, wherein the layer of conductive metal particles (21) is a sensing layer comprising silver particles and/or silver-clad copper particles.
4. The stretchable strain sensor of claim 1, wherein the conductive carbon material layer (22) is a sensing layer comprising carbon nanotubes.
5. A stretchable strain sensor according to claim 1, further comprising leads electrically connected to the sensing layer (2).
6. A method of making a stretchable strain sensor according to any of claims 1 to 5, comprising the steps of:
1) providing a hollow polymer mask having a design pattern on a substrate;
2) adding the conductive metal particle dispersion liquid into the hollow cavity of the hollow polymer mask, and drying to provide a substrate covered with conductive metal particles;
3) spraying the conductive carbon material dispersion on the substrate covered with the conductive metal particles obtained in step 2), and drying to provide a substrate covered with the conductive carbon material and the conductive metal particles;
4) removing the hollow polymer mask;
5) pouring a high molecular polymer precursor on the layered object obtained in the step 4), degassing, curing, and peeling from the substrate to obtain the tensile strain sensor.
7. The method according to claim 6, wherein in the step 2), the conductive metal particles used in the preparation have a mass per unit area of 1 to 1.4mg/cm2
8. The method according to claim 6, wherein in the step 2), the thickness of the conductive metal particles in the substrate covered with the conductive metal particles is 8 to 12 μm.
9. The method according to claim 6, wherein the step 3) further comprises at least one of the following technical features:
1) the unit area mass of the conductive carbon material used in the preparation is 0.2-0.6 mg/cm2
2) The thickness of the conductive carbon material in the base material covered with the conductive carbon material and the conductive metal particles is 2-7 micrometers.
10. Use of a stretchable strain sensor according to any of claims 1 to 5 in a device for detecting human heart rate, detecting human respiration, facial expression recognition, human motion capture, human-machine interface.
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