CN111261428A - A kind of method for ammonia plasma to enhance the performance of cobalt-nickel sulfide supercapacitor - Google Patents

A kind of method for ammonia plasma to enhance the performance of cobalt-nickel sulfide supercapacitor Download PDF

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CN111261428A
CN111261428A CN202010123476.XA CN202010123476A CN111261428A CN 111261428 A CN111261428 A CN 111261428A CN 202010123476 A CN202010123476 A CN 202010123476A CN 111261428 A CN111261428 A CN 111261428A
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cobalt
nickel
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肖婷
肖锐
谭新玉
向鹏
姜礼华
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China Three Gorges University CTGU
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    • HELECTRICITY
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Abstract

本发明公开了一种氨气等离子体增强硫化钴镍超级电容器性能的方法,即采用等离子体化学气相沉积(PECVD)系统,以氨气为等离子体气源,在一定条件下对硫化钴镍进行处理。在1 M KOH电解液中对样品进行电化学性能评价,发现PECVD处理后,硫化钴镍的最大容量可达到3.32 F/cm2,约为PECVD处理前样品的3倍,循环稳定性提升了14.2%,说明PECVD方法能明显提高硫化钴镍的超级电容器性能。

Figure 202010123476

The invention discloses a method for enhancing the performance of a cobalt-nickel sulfide supercapacitor by ammonia gas plasma, that is, a plasma chemical vapor deposition (PECVD) system is used, ammonia gas is used as a plasma gas source, and the cobalt-nickel sulfide supercapacitor is processed under certain conditions. deal with. The electrochemical properties of the samples were evaluated in 1 M KOH electrolyte, and it was found that after PECVD treatment, the maximum capacity of cobalt-nickel sulfide could reach 3.32 F/cm 2 , which was about 3 times that of the samples before PECVD treatment, and the cycle stability was improved by 14.2%. %, indicating that the PECVD method can significantly improve the supercapacitor performance of cobalt-nickel sulfide.

Figure 202010123476

Description

一种氨气等离子体增强硫化钴镍超级电容器性能的方法A kind of method for ammonia plasma to enhance the performance of cobalt-nickel sulfide supercapacitor

技术领域technical field

本发明超级电容器领域,具体涉及一种氨气等离子体增强硫化钴镍超级电容器电性能的方法。The present invention relates to the field of supercapacitors, in particular to a method for enhancing the electrical properties of cobalt-nickel sulfide supercapacitors by ammonia gas plasma.

背景技术Background technique

超级电容器,是对传统电容器的升级,其能量密度大于传统电容器,功率密度大于电池、且循环寿命长、安全环保、适用温度范围广等,是一种非常具有应用前景的新型储能器件。Supercapacitors are an upgrade to traditional capacitors. Its energy density is greater than that of traditional capacitors, power density is greater than that of batteries, and it has long cycle life, safety and environmental protection, and a wide range of applicable temperatures. It is a very promising new type of energy storage device.

超级电容器的主要缺点在于其能量密度比锂离子电池低,这一点阻碍了其大规模商业应用。传统的商用超级电容器一般使用碳材料做电极材料,这类电极材料通过和电解液之间形成双电荷层储存电荷,属于物理过程,比电容较低。赝电容型电极材料通过活性材料与电解液之间高度可逆的氧化还原反应储存电荷,在相同有效面积条件下,赝电容是双电层电容量的10-100倍左右,因而具有更大的能量密度。The main disadvantage of supercapacitors is their lower energy density than lithium-ion batteries, which hinders their large-scale commercial application. Traditional commercial supercapacitors generally use carbon materials as electrode materials. Such electrode materials store charges by forming an electric double layer between them and the electrolyte, which is a physical process and has a low specific capacitance. Pseudocapacitive electrode materials store charge through a highly reversible redox reaction between the active material and the electrolyte. Under the condition of the same effective area, the pseudocapacitance is about 10-100 times the capacitance of the electric double layer, so it has greater energy density.

硫化钴镍因理论容量高、氧化还原电对多样、易于制备、成本低廉等诸多优点,是极具应用前景的赝电容电极材料。然而,导电性较低,电子、离子传输受阻,不仅导致电化学反应活性低而降低其实际容量,还会影响其倍率性能和循环稳定性。与高导电碳材料复合,构筑外部导电通道,是目前优化材料导电性的主要措施。与三维导电碳网络复合时,为保证活性材料与碳材料充分接触,活性材料的负载量通常较低,不利于器件的能量密度;而在活性材料外表面包覆碳层时,循环过程中的体积效应容易破坏碳包覆层,使活性材料与碳材料之间丧失电接触,影响其循环稳定性;与此同时,碳材料的引入还会降低活性材料的有效质量,从而降低器件的能量密度。Cobalt-nickel sulfide is a promising pseudocapacitive electrode material due to its high theoretical capacity, diverse redox couples, easy preparation, and low cost. However, the low conductivity and hindered electron and ion transport not only lead to low electrochemical reactivity and reduce their actual capacity, but also affect their rate performance and cycling stability. Combining with highly conductive carbon materials to construct external conductive channels is the main measure to optimize the conductivity of materials. When compounding with a three-dimensional conductive carbon network, in order to ensure full contact between the active material and the carbon material, the loading of the active material is usually low, which is not conducive to the energy density of the device; when the surface of the active material is coated with a carbon layer, the cycling process The volume effect easily destroys the carbon coating layer, causing the loss of electrical contact between the active material and the carbon material, affecting its cycle stability; at the same time, the introduction of the carbon material will also reduce the effective mass of the active material, thereby reducing the energy density of the device. .

发明内容SUMMARY OF THE INVENTION

本发明的目的是针对以上问题,从硫化钴镍的内部电子结构出发,通过氨气等离子体处理,采用等离子体化学气相沉积方法对硫化钴镍进行处理,调控硫化钴镍表面结构,即制造表面S空位,同时引入氮元素掺杂,优化导电性和离子传输性能,从而提高其容量、倍率性能和循环稳定性,处理后电极的比电容是未处理的3倍左右,循环稳定性提升了至少14.2%。The purpose of the present invention is to address the above problems, starting from the internal electronic structure of cobalt nickel sulfide, through ammonia plasma treatment, using plasma chemical vapor deposition method to process cobalt nickel sulfide, regulating the surface structure of cobalt nickel sulfide, that is, manufacturing surface S vacancies, while introducing nitrogen doping, optimizes conductivity and ion transport properties, thereby improving its capacity, rate performance and cycle stability. The specific capacitance of the treated electrode is about 3 times that of the untreated electrode, and the cycle stability is improved by at least 14.2%.

本发明的技术方案包括以下步骤:The technical scheme of the present invention comprises the following steps:

(1)泡沫镍基底的清洗:将泡沫镍依次用自来水、丙酮、稀盐酸、蒸馏水超声清洗干净并烘干;(1) cleaning of nickel foam base: the nickel foam is ultrasonically cleaned and dried with tap water, acetone, dilute hydrochloric acid, distilled water successively;

(2)制备钴镍前驱体:将一定量的硝酸钴、硝酸镍和尿素溶于去离子水,搅拌至充分溶解后倒入反应釜内,放入泡沫镍,密封,水热反应一段时间后依次用去离子水和无水乙醇冲洗干净并自然凉干得到钴镍前驱体;(2) Preparation of cobalt-nickel precursor: dissolve a certain amount of cobalt nitrate, nickel nitrate and urea in deionized water, stir until fully dissolved, pour into the reactor, put in foam nickel, seal, and hydrothermally react for a period of time Rinse with deionized water and absolute ethanol in turn and dry naturally to obtain cobalt-nickel precursor;

(3)制备硫化钴镍:将硫化钠溶液加入到钴镍前驱体,密封,水热反应一段时间后依次用去离子水和无水乙醇冲洗干净并自然凉干得到硫化钴镍;(3) prepare cobalt-nickel sulfide: add sodium sulfide solution to cobalt-nickel precursor, seal, rinse with deionized water and absolute ethanol successively after hydrothermal reaction for a period of time and naturally dry to obtain cobalt-nickel sulfide;

(4)将制备得到的硫化钴镍等离子体化学气相沉积系统的腔体内,调节腔体内压强和温度,并施加氨气等离子体,经气相沉积即可制备得到硫化钴镍超级电容器。(4) In the cavity of the prepared cobalt-nickel sulfide plasma chemical vapor deposition system, the pressure and temperature in the cavity are adjusted, and ammonia gas plasma is applied, and the cobalt-nickel sulfide supercapacitor can be prepared by vapor deposition.

所述的硝酸钴、硝酸镍、尿素的摩尔比范围为1:1-2:3.5-6,所述的尿素还可替换为氟化铵。The molar ratio range of the cobalt nitrate, nickel nitrate and urea is 1:1-2:3.5-6, and the urea can also be replaced with ammonium fluoride.

步骤(2)的水热反应温度为100-140℃,水热反应时间为5~10h。The hydrothermal reaction temperature in step (2) is 100-140° C., and the hydrothermal reaction time is 5-10 h.

所述的硫化钠溶液浓度为0.05~0.3mol/L,钴镍前驱体是一块薄膜样品,直接放入硫化钠溶液。The concentration of the sodium sulfide solution is 0.05-0.3 mol/L, and the cobalt-nickel precursor is a thin film sample, which is directly put into the sodium sulfide solution.

步骤(3)的水热反应温度为100-140℃,水热反应时间为5~10h。The hydrothermal reaction temperature in step (3) is 100-140° C., and the hydrothermal reaction time is 5-10 h.

步骤(3)中等离子体化学气相沉积系统的腔体内压强调节为10-4-10-3Pa,腔体内温度调节为150-350℃。通入氨气的流量为10-30sccm,时间为5-30min,温度为150-350℃,溅射功率为100-400W,溅射压强为40-80Pa。In step (3), the pressure in the chamber of the plasma chemical vapor deposition system is adjusted to 10 -4 -10 -3 Pa, and the temperature in the chamber is adjusted to 150-350°C. The flow rate of ammonia gas is 10-30sccm, the time is 5-30min, the temperature is 150-350°C, the sputtering power is 100-400W, and the sputtering pressure is 40-80Pa.

采用本发明所述的制备方法制得的硫化钴镍,与未经任何处理的硫化钴镍相比,容量和循环稳定性能均有明显提升,原因是:PECVD处理后,硫化钴镍表面产生了更多的硫空位,并掺杂了更多的氮元素,使其导电性更高,最终明显提高了电化学反应活性、倍率性能和循环稳定性。Compared with the cobalt-nickel sulfide without any treatment, the cobalt-nickel sulfide prepared by the preparation method of the present invention has significantly improved capacity and cycle stability. More sulfur vacancies and doping with more nitrogen elements make it more conductive, and ultimately significantly improve the electrochemical reactivity, rate capability, and cycling stability.

附图说明Description of drawings

图1为实施例1、2中PECVD处理前后硫化钴镍电极的充放电曲线图。1 is a graph showing the charge and discharge curves of the cobalt-nickel sulfide electrodes before and after PECVD treatment in Examples 1 and 2.

图2为实施例1、2中PECVD处理前后硫化钴镍电极在不同电流密度下的比电容曲线。FIG. 2 shows the specific capacitance curves of the cobalt-nickel sulfide electrodes before and after PECVD treatment in Examples 1 and 2 at different current densities.

图3为实施例1、2中PECVD处理前后硫化钴镍电极循环稳定性能图(电流密度为20mA/cm2)。3 is a graph showing the cycle stability performance of the cobalt-nickel sulfide electrode before and after PECVD treatment in Examples 1 and 2 (the current density is 20 mA/cm 2 ).

图4为实施例1、2中PECVD处理前后硫化钴镍电极的EIS曲线。4 is the EIS curve of the cobalt-nickel sulfide electrode before and after PECVD treatment in Examples 1 and 2.

图5为实施例3、4中PECVD处理前后硫化钴镍电极的充放电曲线。5 shows the charge-discharge curves of the cobalt-nickel sulfide electrodes before and after PECVD treatment in Examples 3 and 4.

图6为实施例3、4中PECVD处理前后硫化钴镍电极在不同电流密度下的比电容曲线。6 shows the specific capacitance curves of the cobalt-nickel sulfide electrodes before and after PECVD treatment in Examples 3 and 4 at different current densities.

图7为实施例3、4中PECVD处理前后硫化钴镍电极的EIS曲线。7 is the EIS curve of the cobalt-nickel sulfide electrode before and after PECVD treatment in Examples 3 and 4.

具体实施方式:Detailed ways:

为进一步了解本发明的发明内容与特点,下面给出本发明的几个实施例,应理解,这些实施例仅用于说明本发明而不用于限制本发明的范围。In order to further understand the content and characteristics of the present invention, several embodiments of the present invention are given below. It should be understood that these embodiments are only used to illustrate the present invention and not to limit the scope of the present invention.

下述实施例中的实验方法,如无特别说明,均为常规方法。The experimental methods in the following examples are conventional methods unless otherwise specified.

实施例1Example 1

(1)泡沫镍基底的清洗:将泡沫镍依次用自来水、丙酮、稀盐酸、蒸馏水超声清洗干净并烘干。(1) Cleaning of the foamed nickel substrate: The foamed nickel was ultrasonically cleaned with tap water, acetone, dilute hydrochloric acid, and distilled water in turn and dried.

(2)钴镍前驱体的制备:称取2mmol氯化镍,4mmol硝酸钴和12mmol尿素,溶于35mL去离子水,磁力搅拌至完全溶解后,将溶液转移至聚四氟乙烯内衬。将泡沫镍放入内衬中,盖好内衬和不锈钢外套,放入烘箱,在120℃条件下反应7h。反应完成后,待自然冷却至室温,取出泡沫镍,并依次用去离子水和无水乙醇冲洗干净,并在60℃条件下烘干。(2) Preparation of cobalt-nickel precursor: Weigh 2mmol of nickel chloride, 4mmol of cobalt nitrate and 12mmol of urea, dissolve in 35mL of deionized water, magnetically stir until completely dissolved, and transfer the solution to a polytetrafluoroethylene lining. Put the nickel foam into the inner lining, cover the inner lining and the stainless steel jacket, put it into an oven, and react at 120 °C for 7 h. After the reaction was completed, after being naturally cooled to room temperature, the nickel foam was taken out, rinsed with deionized water and absolute ethanol in sequence, and dried at 60°C.

(3)硫化钴镍的制备:配置浓度为0.2mol/L的硫化钠溶液,倒入反应釜内衬,将步骤(2)得到的样品放入反应釜,密封好后在120℃条件下加热6h,依次用去离子水和无水乙醇冲洗干净并自然凉干。(3) preparation of cobalt-nickel sulfide: the sodium sulfide solution with a concentration of 0.2 mol/L is configured, poured into the inner lining of the reactor, the sample obtained in step (2) is put into the reactor, and heated at 120 ° C after sealing 6h, rinsed with deionized water and absolute ethanol in turn and air-dried naturally.

(4)PECVD处理:将步骤(3)得到的样品放入PECVD系统的腔体内,固定在样品台上,待PECVD体系真空度降为10-4Pa,温度升为250℃时,施加氨气等离子体,氨气流量为15sccm,通气持续时间为15min,压强为60Pa,功率为250W。(5)将此电极作为工作电极,以铂电极为对极,氧化汞电极为参比电极,组成三电极测试体系,以1M KOH为电解液,采用CHI760E电化学测试系统。电化学测试结果显示,PECVD处理后电极的充放电时间明显大于处理前的样品(附图1),根据容量计算公式:

Figure BDA0002393701310000031
电流密度为6mA/cm2时,其最大比电容为3.23F/cm2,即使电流密度增加至50mA/cm2,比电容仍然高达2.38F/cm2(附图2);相比之下,PECVD处理前的电极在电流密度为10mA/cm2时,其比电容仅为1.3F/cm2,当电流密度为50mA/cm2时,容量降为0.83F/cm2。附图3为PECVD处理前后,硫化钴镍电极在电流密度为20mA/cm2的条件下得到的循环稳定性,可见,经PECVD处理后,电极的循环稳定性提升了14.2%。附图4为电化学阻抗图(EIS)对比,插图为EIS放大图和等效电路图,通过分析可知,PECVD处理后电极的内阻(Rs)从1.41降至1.38Ω,离子扩散电阻也明显降低(即EIS曲线直线斜率明显变大)。(4) PECVD treatment: put the sample obtained in step (3) into the cavity of the PECVD system and fix it on the sample stage. When the vacuum degree of the PECVD system is reduced to 10 -4 Pa and the temperature is raised to 250°C, ammonia gas is applied Plasma, the ammonia flow rate is 15sccm, the ventilation duration is 15min, the pressure is 60Pa, and the power is 250W. (5) This electrode is used as the working electrode, the platinum electrode is used as the counter electrode, and the mercury oxide electrode is used as the reference electrode to form a three-electrode test system. 1M KOH is used as the electrolyte, and the CHI760E electrochemical test system is used. The electrochemical test results show that the charge and discharge time of the electrode after PECVD treatment is significantly longer than that of the sample before treatment (Fig. 1). According to the capacity calculation formula:
Figure BDA0002393701310000031
When the current density is 6mA/cm 2 , the maximum specific capacitance is 3.23F/cm 2 . Even if the current density is increased to 50mA/cm 2 , the specific capacitance is still as high as 2.38F/cm 2 (Fig. 2); in contrast, The specific capacitance of the electrode before PECVD treatment was only 1.3F/cm 2 when the current density was 10mA/cm 2 , and the capacity decreased to 0.83F/cm 2 when the current density was 50mA/cm 2 . Figure 3 shows the cycle stability of the cobalt-nickel sulfide electrode before and after PECVD treatment under the condition of a current density of 20 mA/cm 2 . It can be seen that after PECVD treatment, the cycle stability of the electrode is improved by 14.2%. Figure 4 is a comparison of the electrochemical impedance diagram (EIS), and the inset is the enlarged EIS diagram and the equivalent circuit diagram. It can be seen from the analysis that the internal resistance (Rs) of the electrode after PECVD treatment decreased from 1.41 to 1.38Ω, and the ion diffusion resistance was also significantly reduced. (that is, the slope of the straight line of the EIS curve becomes significantly larger).

实施例2Example 2

与实施例1相比除了不进行PECVD,其余和实施例1相同。试验效果如图1-4所示。Compared with Example 1, the rest is the same as Example 1 except that PECVD is not performed. The test results are shown in Figure 1-4.

实施例3Example 3

(1)泡沫镍基底的清洗:将泡沫镍依次用自来水、丙酮、稀盐酸、蒸馏水超声清洗干净并烘干。(1) Cleaning of the foamed nickel substrate: The foamed nickel was ultrasonically cleaned with tap water, acetone, dilute hydrochloric acid, and distilled water in turn and dried.

(2)钴镍前驱体的制备:称取1mmol硝酸镍、1mmol硝酸钴和3.5mmol氟化铵,溶于35mL去离子水,磁力搅拌至完全溶解后,将溶液转移至聚四氟乙烯内衬。将泡沫镍放入内衬中,盖好内衬和不锈钢外套,放入烘箱,在120℃条件下反应8h。反应完成后,待自然冷却至室温,取出泡沫镍,并依次用去离子水和无水乙醇冲洗干净,并在60℃条件下烘干。(2) Preparation of cobalt-nickel precursor: Weigh 1 mmol of nickel nitrate, 1 mmol of cobalt nitrate and 3.5 mmol of ammonium fluoride, dissolve in 35 mL of deionized water, stir magnetically until completely dissolved, and transfer the solution to a polytetrafluoroethylene lining . Put the nickel foam into the inner lining, cover the inner lining and stainless steel jacket, put it into an oven, and react at 120 °C for 8 h. After the reaction was completed, after being naturally cooled to room temperature, the nickel foam was taken out, rinsed with deionized water and absolute ethanol in sequence, and dried at 60°C.

(3)硫化钴镍的制备:配置浓度为0.1mol/L的硫化钠溶液,倒入反应釜内衬,将步骤(2)得到的样品放入反应釜,密封好后在120℃条件下加热6h,依次用去离子水和无水乙醇冲洗干净并自然凉干。(3) preparation of cobalt-nickel sulfide: configure sodium sulfide solution with a concentration of 0.1 mol/L, pour it into the inner lining of the reactor, put the sample obtained in step (2) into the reactor, and heat it at 120 ° C after sealing 6h, rinsed with deionized water and absolute ethanol in turn and air-dried naturally.

(4)PECVD处理:将步骤(3)得到的样品放入PECVD系统的腔体内,固定在样品台上,待PECVD体系真空度降为10-4Pa,温度升为300℃时,施加氨气等离子体,氨气流量为15sccm,通气持续时间为10min,压强为60Pa,功率为250W。(4) PECVD treatment: put the sample obtained in step (3) into the cavity of the PECVD system and fix it on the sample stage. When the vacuum degree of the PECVD system is reduced to 10 -4 Pa and the temperature is raised to 300°C, ammonia gas is applied Plasma, the ammonia flow is 15sccm, the ventilation duration is 10min, the pressure is 60Pa, and the power is 250W.

(5)将此电极作为工作电极,以铂电极为对极,氧化汞电极为参比电极,组成三电极测试体系,以1M KOH为电解液,采用CHI760E电化学测试系统。电化学测试结果显示,PECVD处理后电极的放电时间明显大于处理前的样品(附图5),说明电极的容量明显提高。根据容量计算公式:

Figure BDA0002393701310000041
电流密度为5mA/cm2时,其最大比电容为1.23F/cm2,电流密度增加至50mA/cm2,比电容仍然高达1F/cm2(附图6);相比之下,PECVD处理前的电极在电流密度为5mA/cm2时,虽然电容为1.13F/cm2,但当电流密度为30mA/cm2时,容量降为0.75F/cm2,说明倍率性能明显比处理后的样品差。附图7为电化学阻抗图(EIS)对比,插图为EIS放大图和等效电路图,通过分析可知,PECVD处理后电极的内阻(Rs)从2.46降至1.96Ω,离子扩散电阻也明显降低(即EIS曲线直线斜率明显变大)。(5) This electrode is used as the working electrode, the platinum electrode is used as the counter electrode, and the mercury oxide electrode is used as the reference electrode to form a three-electrode test system. 1M KOH is used as the electrolyte, and the CHI760E electrochemical test system is used. The electrochemical test results show that the discharge time of the electrode after PECVD treatment is significantly longer than that of the sample before treatment (Fig. 5), indicating that the capacity of the electrode is significantly improved. According to the calculation formula of capacity:
Figure BDA0002393701310000041
When the current density was 5mA/cm 2 , the maximum specific capacitance was 1.23F/cm 2 , and the current density increased to 50mA/cm 2 , and the specific capacitance was still as high as 1F/cm 2 (Fig. 6); in contrast, PECVD treatment When the current density of the former electrode is 5mA/cm 2 , although the capacitance is 1.13F/cm 2 , when the current density is 30mA/cm 2 , the capacity drops to 0.75F/cm 2 , which shows that the rate performance is significantly better than that of the treated electrode. Poor sample. Figure 7 is a comparison of the electrochemical impedance diagram (EIS), and the inset is an enlarged EIS diagram and an equivalent circuit diagram. It can be seen from the analysis that the internal resistance (Rs) of the electrode after PECVD treatment decreased from 2.46 to 1.96Ω, and the ion diffusion resistance was also significantly reduced. (that is, the slope of the straight line of the EIS curve becomes significantly larger).

实施例4Example 4

与实施例3相比,除了不进行PECVD,其余和实施例3相同,其效果如图5、6、7所示。Compared with Example 3, except that PECVD is not performed, the rest is the same as Example 3, and the effects are shown in Figures 5, 6, and 7.

Claims (7)

1. A method for enhancing the performance of a cobalt nickel sulfide supercapacitor by ammonia plasma is characterized by comprising the following steps:
(1) cleaning of the foamed nickel substrate: ultrasonically cleaning and drying the foamed nickel by using tap water, acetone, dilute hydrochloric acid and distilled water in sequence;
(2) preparing a cobalt-nickel precursor: dissolving a certain amount of cobalt nitrate, nickel nitrate and urea in deionized water, stirring until the cobalt nitrate, the nickel nitrate and the urea are fully dissolved, pouring the mixture into a reaction kettle, adding foamed nickel, sealing, performing hydrothermal reaction for a period of time, sequentially washing the mixture by using the deionized water and absolute ethyl alcohol, and naturally drying the mixture to obtain a cobalt-nickel precursor;
(3) preparing cobalt nickel sulfide: putting the cobalt-nickel precursor into a sodium sulfide solution, sealing, carrying out hydrothermal reaction for a period of time, sequentially washing the cobalt-nickel precursor with deionized water and absolute ethyl alcohol, and naturally drying the cobalt-nickel precursor to obtain cobalt-nickel sulfide;
(4) and (3) regulating the pressure and temperature in the cavity of the prepared cobalt nickel sulfide plasma chemical vapor deposition system, applying ammonia plasma, and performing vapor deposition to obtain the cobalt nickel sulfide supercapacitor electrode.
2. The method for enhancing the performance of the cobalt nickel sulfide supercapacitor by ammonia gas plasma according to claim 1, wherein the molar ratio of the cobalt nitrate to the nickel nitrate to the urea in the step (2) is in the range of 1:1-2:3.5-6, and the urea can be replaced by ammonium fluoride.
3. The method for enhancing the performance of the cobalt nickel sulfide supercapacitor by using the ammonia gas plasma as claimed in claim 2, wherein the hydrothermal reaction temperature in the step (2) is 100 ℃ and 140 ℃, and the hydrothermal reaction time is 5-10 h.
4. The method for enhancing the performance of the cobalt nickel sulfide supercapacitor by ammonia gas plasma according to claim 3, wherein the concentration of the sodium sulfide solution is 0.05-0.3 mol/L.
5. The method for enhancing the performance of the cobalt nickel sulfide supercapacitor by using the ammonia gas plasma as claimed in claim 4, wherein the hydrothermal reaction temperature in the step (3) is 100 ℃ and 140 ℃, and the hydrothermal reaction time is 5-10 h.
6. The method for enhancing the performance of a cobalt nickel sulfide supercapacitor by ammonia plasma according to claim 5, wherein the pressure in the cavity of the plasma chemical vapor deposition system is adjusted to 10-4-10-3Pa, regulating the temperature in the cavity to be 150-350 ℃.
7. The method as claimed in claim 6, wherein the flow rate of the introduced ammonia gas is 10-30sccm, the time is 5-30min, the temperature is 150-350 ℃, the sputtering power is 100-400W, and the sputtering pressure is 40-80 Pa.
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