CN111258344A - Gas concentration regulating system, method and device - Google Patents
Gas concentration regulating system, method and device Download PDFInfo
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- CN111258344A CN111258344A CN202010098953.1A CN202010098953A CN111258344A CN 111258344 A CN111258344 A CN 111258344A CN 202010098953 A CN202010098953 A CN 202010098953A CN 111258344 A CN111258344 A CN 111258344A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/139—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring a value related to the quantity of the individual components and sensing at least one property of the mixture
Abstract
The present application relates to a gas concentration regulation system, method and apparatus; the gas concentration adjusting system comprises a sealed cavity, a gas distribution device, a target gas detector and a gas pressure measuring device, wherein the gas distribution device is used for injecting filling gas and mixed gas into the sealed cavity; also comprises a control device; the control device comprises a control circuit and a plurality of pneumatic valves connected with the control circuit; the air pressure measuring device and the target gas detector are both connected with the control circuit; each pneumatic valve is respectively connected between the seal cavity and the gas distribution device and between the seal cavity and the target gas detector; the application solves the problems of automatic adjustment and accurate control of the concentration of the target gas in the sealed cavity.
Description
Technical Field
The present disclosure relates to the field of concentration control technologies, and in particular, to a system, a method, and an apparatus for adjusting gas concentration.
Background
In recent years, the electronic components in the sealed assembly are subject to failure caused by hydrogen poisoning, and the reliability of the electronic products is seriously threatened. Therefore, it is necessary to develop a "hydrogen poisoning" evaluation test of the electronic component and grasp hydrogen resistance information of the electronic component. During testing, the tested electronic components need to be sealed in the airtight cavity, and the internal hydrogen concentration is accurately adjusted.
In the traditional technology, the gas concentration in the sealed cavity is controlled by utilizing the difference value of the internal pressure and the external pressure, the gas concentration is detected after the initial adjustment, and when the gas concentration has deviation from an expected value, the gas in the sealed cavity is filled or extracted, so that the hydrogen concentration is diluted or increased to realize the fine adjustment of the hydrogen concentration. However, in the implementation process, the inventor finds that at least the following problems exist in the conventional technology: the hydrogen concentration control system in the prior art has a complex structure and low concentration regulation accuracy.
Disclosure of Invention
In view of the above, it is desirable to provide a gas concentration adjustment system, method and apparatus that can accurately control the concentration of a target gas and have a simplified structure.
In order to achieve the above object, in one aspect, an embodiment of the present invention provides a gas concentration adjusting system, including a sealed cavity, a gas distribution device for filling a gas and a mixed gas into the sealed cavity, a target gas detector for detecting a concentration of a target gas in the sealed cavity, and a gas pressure measuring device for measuring an internal pressure of the sealed cavity; wherein the mixed gas is the mixture of filling gas and target gas;
also comprises a control device; the control device comprises a control circuit and a plurality of pneumatic valves connected with the control circuit; the air pressure measuring device and the target gas detector are both connected with the control circuit; each pneumatic valve is respectively connected between the seal cavity and the gas distribution device and between the seal cavity and the target gas detector;
the control circuit outputs a primary adjusting signal to each pneumatic valve according to the adjusting concentration of the target gas and the concentration of the target gas in the mixed gas; each pneumatic valve acts based on the primary adjustment signal, and the control circuit outputs a concentration adjustment signal to each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before primary adjustment; and each pneumatic valve acts based on the concentration adjusting signal until the absolute value of the difference between the adjusting concentration of the target gas and the current detection value of the target gas detector is smaller than the target gas concentration tolerance, and the concentration adjustment of the target gas is confirmed to be completed.
In one embodiment, the gas distribution device comprises a first gas distribution pipeline and a second gas distribution pipeline;
one end of the first gas distribution pipeline is communicated with the sealed cavity, the other end of the first gas distribution pipeline is communicated with the filling gas source, and the first gas distribution pipeline is provided with a first pneumatic valve;
one end of the second gas distribution pipeline is communicated with the sealed cavity, the other end of the second gas distribution pipeline is communicated with the mixed gas source, and the second gas distribution pipeline is provided with a second pneumatic valve;
the second pneumatic valve is opened based on the preliminary adjustment signal, mixed gas is filled into the sealed cavity, and the second pneumatic valve is closed until the current measured value is a preset value; the preset value is the product of the ratio of the target gas adjusting concentration to the concentration of the target gas in the mixed gas and a measured value before primary adjustment;
and the first pneumatic valve is opened based on the initial adjustment signal when the second pneumatic valve is closed, and the filling gas is filled into the sealed cavity until the current measured value is the measured value before the initial adjustment.
In one embodiment, the source of fill gas is a nitrogen gas source; the mixed gas source is a hydrogen-nitrogen mixed gas source.
In one embodiment, the sealed cavity is communicated with the target gas detector through a sampling pipeline; the sampling pipeline is provided with a third pneumatic valve;
the third pneumatic valve is opened based on the concentration adjusting signal, and the target gas detector outputs the current detection value to the control circuit; wherein the third starting valve is kept open based on the concentration adjusting signal until the current measurement value of the air pressure measuring device is a preset value.
In one embodiment, the preset value is 100 Kpa;
when the absolute value of the difference between the target gas adjusting concentration and the current detection value is larger than the target gas concentration tolerance, the control circuit detects whether the target gas adjusting concentration is smaller than the current detection value;
when the detection result is yes, the control circuit indicates the first pneumatic valve to be opened, and fills the filling gas into the sealed cavity until the current measurement value of the air pressure measurement device is
Closing the switch; wherein y is the current detection value; x is the target gas adjustment concentration;
the control circuit outputs a concentration adjustment signal to the third pneumatic valve.
In one embodiment, when the detection result is negative, the control circuit instructs the second pneumatic valve to open and fill the mixed gas into the sealed cavity until the current measurement value of the gas pressure measuring device is negative
Closing the switch; the control circuit indicates the first pneumatic valve to be opened, the sealed cavity is filled with filling gas, and the sealed cavity is closed until the current measurement value of the air pressure measurement device is 200 Kpa; wherein N is the concentration of the target gas in the mixed gas;
the control circuit outputs a concentration adjustment signal to the third pneumatic valve.
In one embodiment, the air pressure measuring device is an air pressure gauge; the target gas detector is a hydrogen detector.
A gas concentration adjustment method comprising the steps of:
acquiring the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas;
outputting a preliminary adjustment signal to each pneumatic valve according to the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas; the preliminary adjustment signal is used for indicating the action of each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before preliminary adjustment;
outputting a concentration adjusting signal to each pneumatic valve; the concentration adjusting signal is used for indicating each pneumatic valve to act until the absolute value of the difference between the target gas adjusting concentration and the current detection value of the target gas detector is smaller than the target gas concentration tolerance.
A gas concentration adjustment device comprising:
the parameter acquisition module is used for acquiring the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas;
the primary adjusting module is used for outputting primary adjusting signals to each pneumatic valve according to the adjusting concentration of the target gas and the concentration of the target gas in the mixed gas; the preliminary adjustment signal is used for indicating the action of each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before preliminary adjustment;
the concentration adjusting module is used for outputting concentration adjusting signals to each pneumatic valve; the concentration adjusting signal is used for indicating each pneumatic valve to act until the absolute value of the difference between the target gas adjusting concentration and the current detection value of the target gas detector is smaller than the target gas concentration tolerance.
A computer-readable storage medium, on which a computer program is stored which, when being executed by a processor, carries out the steps of any of the methods described above.
One of the above technical solutions has the following advantages and beneficial effects:
the gas concentration adjusting system comprises a sealed cavity, a gas distribution device, a target gas detector and a gas pressure measuring device, wherein the control device comprises a control circuit and a plurality of pneumatic valves connected with the control circuit; the control circuit can read the readings of the air pressure measuring device and the target gas detector and can control the opening and closing of the pneumatic valve, so that the gas concentration regulation is further completed (the absolute value of the difference between the target gas regulation concentration and the current detection value of the target gas detector is less than the target gas concentration tolerance) by utilizing the gas partial pressure principle under the condition of completing the preliminary concentration regulation (the current measurement value of the air pressure measuring device is the measurement value before the preliminary regulation); the application provides an automatic adjustment mode of gas concentration in a sealed cavity, which can automatically realize adjustment of target gas concentration through feedback based on data of a target gas detector, namely a feedback process is provided on a gas adjustment method, so that accurate gas concentration control is realized, and the problems of automatic adjustment and accurate control of the target gas concentration in the sealed cavity are solved; further, based on the structure of this application for gas concentration accommodation process only need inflate and need not bleed (need not air exhaust device), has simplified the system, also is convenient for utilize the pressure differential sample detection gas concentration.
Drawings
The foregoing and other objects, features and advantages of the application will be apparent from the following more particular description of preferred embodiments of the application, as illustrated in the accompanying drawings. Like reference numerals refer to like parts throughout the drawings, and the drawings are not intended to be drawn to scale in actual dimensions, emphasis instead being placed upon illustrating the subject matter of the present application;
FIG. 1 is a first schematic block diagram of a gas concentration regulation system of an embodiment;
FIG. 2 is a second schematic block diagram of a gas concentration regulation system of an embodiment;
FIG. 3 is a schematic flow chart of a gas concentration adjustment method according to an embodiment;
FIG. 4 is a schematic diagram of an embodiment of an automatic gas concentration adjustment process;
FIG. 5 is a schematic view of a gas concentration adjustment apparatus according to an embodiment.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present application are shown in the drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element and be integral therewith, or intervening elements may also be present. The terms "communicate," "one end," "another end," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The gas concentration control in the sealed cavity is realized by utilizing the difference value of the internal pressure and the external pressure in the traditional technical scheme, the gas concentration is detected after the initial adjustment, and when the gas concentration is deviated from an expected value, the gas in the sealed cavity is filled or extracted to dilute or increase hydrogen so as to realize the fine adjustment of the hydrogen concentration. However, the conventional techniques have at least the following disadvantages: the traditional technology belongs to open-loop control on gas concentration and lacks a feedback process; secondly, after the actually measured concentration is adjusted for the first time to be larger than the expected value, part of gas needs to be extracted by using an air extractor in the traditional technology, so that the structural complexity is increased; finally, the traditional technology adopts the difference value between the internal pressure and the external pressure as the control basis, and is not intuitive.
The application provides an automatic adjustment mode of gas concentration in the sealed cavity, which can automatically realize adjustment of target gas concentration through feedback based on data of a target gas detector, and realize accurate gas concentration control; and then the problems of automatic adjustment and accurate control of the concentration of the target gas in the sealed cavity are solved. Furthermore, the gas regulating method has a feedback process, and the regulating process only needs to be inflated and does not need to be pumped (thereby an air pumping device is not needed, the system is simplified, and the gas concentration can be conveniently detected by sampling the gas pressure difference).
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
In one embodiment, as shown in fig. 1, a gas concentration regulating system is provided, which may include a sealed chamber, a gas distribution device for injecting a filling gas and a mixed gas into the sealed chamber, a target gas detector for detecting a concentration of a target gas in the sealed chamber, and a gas pressure measuring device for measuring an internal pressure of the sealed chamber; wherein the mixed gas is the mixture of filling gas and target gas;
also comprises a control device; the control device comprises a control circuit and a plurality of pneumatic valves connected with the control circuit; the air pressure measuring device and the target gas detector are both connected with the control circuit; each pneumatic valve is respectively connected between the seal cavity and the gas distribution device and between the seal cavity and the target gas detector;
the control circuit outputs a primary adjusting signal to each pneumatic valve according to the adjusting concentration of the target gas and the concentration of the target gas in the mixed gas; each pneumatic valve acts based on the primary adjustment signal, and the control circuit outputs a concentration adjustment signal to each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before primary adjustment; and each pneumatic valve acts based on the concentration adjusting signal until the absolute value of the difference between the adjusting concentration of the target gas and the current detection value of the target gas detector is smaller than the target gas concentration tolerance, and the concentration adjustment of the target gas is confirmed to be completed.
Specifically, in order to solve the problems of automatic adjustment and accurate control of the concentration of the target gas in the sealed cavity, the automatic adjustment mode of the concentration of the target gas provided by the application needs certain hardware as a basis. The main hardware can comprise a gas distribution device for conveying mixed gas and target gas, a pneumatic valve arranged on a pipeline of the gas distribution device, a seal cavity connected with the pipeline of the gas distribution device, an air pressure measuring device for measuring the internal pressure of the seal cavity and a target gas detector; the device also comprises a pipeline for connecting the target gas detector and the seal cavity, a pneumatic valve arranged on the pipeline, and a control circuit. The control circuit can read the readings of the air pressure measuring device and the target gas detector and can control the opening and closing of the pneumatic valve.
The sealed cavity can be a sealed cavity, namely a device for storing gas with certain concentration; specifically, the sealed cavity may be a high-temperature and high-pressure cavity containing hydrogen gas with a certain concentration for evaluating the hydrogen poisoning resistance of the electronic device, and the sealed cavity may enable the filled gas not to contain other impurity gases so as to obtain gas with accurate concentration. In one specific example, the present application requires that a vacuum be drawn from the sealed chamber and all the lines during the initial concentration adjustment stage. Thus, a sealed cavity in this application may refer to a vacuum sealed cavity.
Further, the target gas in the present application may refer to a gas in a mixed gas to be controlled to a specific concentration, for example, when the "hydrogen poisoning" resistance of the electronic device is evaluated, the concentration of hydrogen needs to be strictly controlled, the target gas may be hydrogen, the filling gas may refer to a gas which is mixed with the target gas and does not react with the target gas, such as nitrogen, and the like, and may also refer to an inert gas such as helium, and the like. Wherein the mixed gas is a mixture of the filling gas and the target gas.
In one specific example, the air pressure measuring device can be implemented by using an air pressure meter; and the target gas detector may be a hydrogen detector.
Based on the structure, the concentration of the target gas can be automatically adjusted and accurately controlled, for example, the gas concentration adjustment is further completed by using a gas partial pressure formula PV-nRT under the condition of completing the preliminary concentration adjustment; wherein P is the pressure of the ideal gas, V is the volume of the ideal gas, n represents the amount of the gas substance, and T represents the thermodynamic temperature of the ideal gas; r is an ideal gas constant.
The adjustment concentration of the target gas is x (unit ppm), the reading of the target gas detector is y (unit ppm), the concentration of the target gas in the mixed gas is N (unit ppm), the air pressure in the sealed cavity at the end of the initial concentration adjustment stage is A (unit kPa, A is more than 100 kPa; namely the reading of the air pressure measuring device before the start of adjustment), and the tolerance range of the concentration of the target gas is +/-phi (unit ppm) for example:
first, a preliminary concentration adjustment stage may be performed; in the preceding step of this stage, it is necessary to ensure that the sealed chamber and all the lines have been evacuated. The control circuit outputs a primary adjusting signal to each pneumatic valve according to the adjusting concentration x of the target gas and the concentration N of the target gas in the mixed gas; each pneumaticThe valve is actuated based on a preliminary adjustment signal, for example, by opening a pneumatic valve associated with the gas distribution device, opening a gas path between the sealed chamber and the gas distribution device (mixed gas distribution line), and filling the mixed gas into the sealed chamber until the reading of the gas pressure measuring device reaches a preset value (the preset value may be the product of the ratio of the target gas adjustment concentration to the target gas concentration in the mixed gas and the measurement value before preliminary adjustment, that is, the ratio is the product of the target gas adjustment concentration and the measurement value before preliminary adjustment
Closing the corresponding pneumatic valve; and then, opening a related pneumatic valve, conducting an air channel (a filling gas distribution pipeline) between the sealed cavity and the gas distribution device, and filling gas into the sealed cavity until the reading of the gas pressure measuring device is the measured value before the initial adjustment (namely the reading A of the gas pressure measuring device before the initial adjustment).
At this time, the preliminary concentration adjustment is completed.
Secondly, the control circuit outputs concentration adjusting signals to each pneumatic valve; and each pneumatic valve acts based on the concentration adjusting signal until the absolute value of the difference between the adjusting concentration of the target gas and the current detection value of the target gas detector is smaller than the target gas concentration tolerance, and the concentration adjustment of the target gas is confirmed to be completed. Specifically, the corresponding pneumatic valve is opened, a gas path channel (sampling pipeline) between the sealed cavity and the target gas detector is conducted, and the reading y of the target gas detector is obtained. Wherein the pneumatic valve may be kept open until the air pressure measuring device reads a preset value (the preset value may be 100kPa), and the pneumatic valve may be closed.
If the | x-y | is less than phi, adjustment is not needed, and the concentration of the target gas meets the requirement.
If x-y > phi, further adjustment is needed to make the target gas concentration meet the requirement. It should be noted that the above further adjustment can still be based on the principle of gas partial pressure, for example, when y > x, the corresponding pneumatic valve is opened, the filling gas is filled into the sealed cavity, and the valve is closed until the current measured value of the gas pressure measuring device reaches the corresponding threshold value; and then reading y of the gas detector is obtained again to detect whether the target gas concentration tolerance is met.
For another example, when y is less than x, the corresponding pneumatic valve is opened, the mixed gas is filled into the sealed cavity until the current measured value of the air pressure measuring device reaches the threshold value, and then the sealed cavity is filled with the filling gas until the current measured value of the air pressure measuring device is a preset value (for example, 200 Kpa); and then reading y of the gas detector is obtained again to detect whether the target gas concentration tolerance is met.
In the above, the gas concentration adjusting system includes a sealed cavity, a gas distribution device, a target gas detector, and a gas pressure measuring device, where the control device includes a control circuit and a plurality of pneumatic valves connected to the control circuit; the control circuit can read the readings of the air pressure measuring device and the target gas detector and can control the opening and closing of the pneumatic valve, so that the gas concentration regulation is further completed (the absolute value of the difference between the target gas regulation concentration and the current detection value of the target gas detector is less than the target gas concentration tolerance) by utilizing the gas partial pressure principle under the condition of completing the preliminary concentration regulation (the current measurement value of the air pressure measuring device is the measurement value before the preliminary regulation); the application provides a gas concentration automatically regulated mode in seal chamber body can realize accurate gas concentration control through the adjustment of the automatic target gas concentration that realizes of feedback based on the data of target gas detector, and then has solved the automatically regulated and the accurate control problem of target gas concentration in the seal chamber body. Further, based on the structure of this application for gas concentration adjustment process only need inflate and need not bleed (do not need air exhaust device), has simplified the system, also is convenient for utilize the pressure differential sample detection gas concentration.
In one embodiment, the filling gas is nitrogen, the target gas is hydrogen, and the mixed gas is a hydrogen-nitrogen mixed gas as an example; as shown in fig. 2, there is provided a gas concentration adjusting system, which may include:
the gas distribution device comprises a sealed cavity, a gas distribution device, a target gas detector and a gas pressure measuring device, wherein the gas distribution device is used for injecting filling gas and mixed gas into the sealed cavity; also comprises a control device; the control device comprises a control circuit and a plurality of pneumatic valves connected with the control circuit; the air pressure measuring device and the target gas detector are both connected with the control circuit; each pneumatic valve is respectively connected between the seal cavity and the gas distribution device and between the seal cavity and the target gas detector;
wherein, the air pressure measuring device is an air pressure meter; the target gas detector is a hydrogen detector.
In a particular embodiment, the gas distribution arrangement comprises a first gas distribution line and a second gas distribution line;
one end of the first gas distribution pipeline is communicated with the sealed cavity, the other end of the first gas distribution pipeline is communicated with the filling gas source, and the first gas distribution pipeline is provided with a first pneumatic valve (namely, the pneumatic valve 1 in the figure 2);
one end of the second gas distribution pipeline is communicated with the sealed cavity, the other end of the second gas distribution pipeline is communicated with the mixed gas source, and the second gas distribution pipeline is provided with a second pneumatic valve (namely a pneumatic valve 2 in the graph 2);
in a particular embodiment, the source of fill gas is a nitrogen gas source; the mixed gas source is a hydrogen-nitrogen mixed gas source.
In a specific embodiment, the sealed cavity is communicated with the target gas detector through a sampling pipeline; the sampling line is provided with a third pneumatic valve (i.e. pneumatic valve 3 in fig. 2);
particularly, this application gas concentration governing system can be including each one of the distribution pipeline of carrying hydrogen nitrogen mist and nitrogen gas, pneumatic valve on the distribution pipeline, the seal chamber who links to each other with the distribution pipeline, the barometer of measuring seal chamber internal pressure, the hydrogen detector, the sample pipeline of connecting hydrogen detector and seal chamber, pneumatic valve on the sample pipeline, control circuit. The control circuit can read the readings of the air pressure meter and the hydrogen detector and can control the opening and closing of the pneumatic valve.
Specifically, the second pneumatic valve in the application can be opened based on the preliminary adjustment signal, and the mixed gas is filled into the sealed cavity until the current measured value is a preset value, and then the second pneumatic valve is closed; the preset value is the product of the ratio of the target gas adjusting concentration to the concentration of the target gas in the mixed gas and a measured value before primary adjustment;
and the first pneumatic valve is opened based on the preliminary adjustment signal when the second pneumatic valve is closed, and the filling gas is filled into the sealed cavity until the current measured value is the measured value before preliminary adjustment.
Further, the third pneumatic valve is opened based on the concentration adjusting signal, and the target gas detector outputs the current detection value to the control circuit; wherein the third starting valve is kept open based on the concentration adjusting signal until the current measurement value of the air pressure measuring device is a preset value.
Furthermore, the control circuit detects whether the target gas adjustment concentration is smaller than the current detection value when the absolute value of the difference between the target gas adjustment concentration and the current detection value is larger than the target gas concentration tolerance;
when the detection result is yes, the control circuit indicates the first pneumatic valve to be opened, and fills the filling gas into the sealed cavity until the current measurement value of the air pressure measurement device is
Closing the switch; wherein y is the current detection value; x is the target gas adjustment concentration; the control circuit outputs a concentration adjustment signal to the third pneumatic valve.
When the detection result of the control circuit is negative, the control circuit instructs the second pneumatic valve to open, the mixed gas is filled into the sealed cavity until the current measurement value of the air pressure measurement device is
Closing the switch; the control circuit indicates the first pneumatic valve to be opened, the sealed cavity is filled with filling gas, and the sealed cavity is closed until the current measurement value of the air pressure measurement device is 200 Kpa; wherein N is the concentration of the target gas in the mixed gas; the control circuit outputs a concentration adjustment signal to the third pneumatic valve.
In order to further explain the implementation process of the scheme of the application, the following description takes an example that the target hydrogen adjustment concentration is x (unit ppm), the reading of a hydrogen detector is y (unit ppm), the hydrogen concentration in the hydrogen-nitrogen mixed gas is N (unit ppm), the air pressure in the sealed cavity at the end of the initial concentration adjustment stage is A (unit kPa, A is more than 100 kPa; namely the reading of the air pressure measuring device before the adjustment is started), and the tolerance range of the target gas concentration is +/-phi (unit ppm);
(1) a primary concentration adjusting stage: in the previous step, vacuum is extracted from the sealed cavity and all the pipelines. Firstly, the pneumatic valve 2 is opened, and hydrogen-nitrogen mixed gas is filled into the sealed cavity until the reading of the barometer is
The pneumatic valve 2 is closed. Then, the pneumatic valve 1 is opened, nitrogen is filled into the sealed cavity until the reading of the barometer is A (KPa), and the pneumatic valve 1 is closed.
(2) The pneumatic valve 3 is opened and the hydrogen detector reading y is read. The pneumatic valve 3 was kept open until the barometer reading was 100kPa, and the pneumatic valve 3 was closed.
① if x-y is less than phi, then no adjustment is needed, and the hydrogen concentration meets the requirement;
② if y>x, and y-x>Phi, the pneumatic valve 1 is opened, nitrogen is filled into the sealed cavity until the reading of the barometer is
The air-operated valve 1 is closed. Repeating the step (2);
③ if y < x, and x-y>Phi, the pneumatic valve 2 is opened first, and the hydrogen-nitrogen mixed gas is filled into the sealed cavity until the reading of the barometer is
The air-operated valve 2 is closed. Then, the air-operated valve 1 was opened, nitrogen gas was charged into the sealed cavity until the barometer reading was 200kPa, and the air-operated valve 1 was closed. And (4) repeating the step (2).
In the method, the quantity of the gas filled into the sealed cavity in each step of the flow can be automatically adjusted by controlling the gas flow; specifically, the control circuit can read the readings of the barometer and the hydrogen detector and can control the on-off of the pneumatic valve, so that the gas concentration regulation is further completed (the absolute value of the difference between the hydrogen regulation concentration and the current detection value of the hydrogen detector is less than the target gas concentration tolerance) by utilizing the gas partial pressure principle under the condition of completing the preliminary concentration regulation (the current measurement value of the barometer is the measurement value before the preliminary regulation); the application provides a gas concentration automatically regulated mode in seal chamber can realize accurate gas concentration control through the automatic adjustment that realizes hydrogen concentration of feedback based on hydrogen detector's data, and then has solved the automatically regulated and the accurate control problem of hydrogen concentration in the seal chamber. And the gas regulating method of the application is provided with a feedback process, and the regulating process only needs to be inflated and does not need to be pumped (thereby an air pumping device is not needed, the system is simplified, and the gas concentration can be conveniently sampled and detected by utilizing the air pressure difference).
It will be understood by those skilled in the art that the configurations shown in fig. 1 and 2 are only block diagrams of partial configurations relevant to the present disclosure, and do not constitute limitations on the components or devices to which the present disclosure may be applied, and a particular component or device may include more or less components than those shown in the drawings, or may combine some components, or have a different arrangement of components.
In one embodiment, as shown in fig. 3, there is provided a gas concentration adjusting method including the steps of:
step S310, acquiring the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas;
step S320, outputting a preliminary adjustment signal to each pneumatic valve according to the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas; the preliminary adjustment signal is used for indicating the action of each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before preliminary adjustment;
step S330, outputting concentration adjusting signals to each pneumatic valve; the concentration adjusting signal is used for indicating each pneumatic valve to act until the absolute value of the difference between the target gas adjusting concentration and the current detection value of the target gas detector is smaller than the target gas concentration tolerance.
Specifically, the amount of the gas filled into the sealed cavity in each step of the flow can be automatically adjusted by controlling the gas flow; according to the method, the gas concentration adjustment is further completed (the absolute value of the difference between the hydrogen adjustment concentration and the current detection value of the hydrogen detector is smaller than the target gas concentration tolerance) by utilizing the gas partial pressure principle under the condition of completing the initial concentration adjustment (the current measurement value of the barometer is the measurement value before the initial adjustment). In addition, the gas regulating method has a feedback process, and the regulating process only needs to be inflated and does not need to be pumped (thereby not needing an air pumping device, simplifying the system and being convenient for utilizing the air pressure difference to sample and detect the gas concentration).
Meanwhile, in order to clarify the implementation process of the gas concentration adjusting method of the present application, as shown in fig. 4, taking as an example that the gas concentration adjusting method of the present application is applied to each device in the gas concentration adjusting system shown in fig. 2, the gas concentration adjusting method of the present application may include the following steps:
(1) a primary concentration adjusting stage: in the previous step, vacuum is extracted from the sealed cavity and all the pipelines. Firstly, the pneumatic valve 2 is opened, and hydrogen-nitrogen mixed gas is filled into the sealed cavity until the reading of the barometer is
The pneumatic valve 2 is closed. Then, the pneumatic valve 1 is opened, nitrogen is filled into the sealed cavity until the reading of the barometer is A (KPa), and the pneumatic valve 1 is closed.
(2) The pneumatic valve 3 is opened and the hydrogen detector reading y is read. The pneumatic valve 3 was kept open until the barometer reading was 100kPa, and the pneumatic valve 3 was closed.
① if x-y is less than phi, then no adjustment is needed, and the hydrogen concentration meets the requirement;
② if y>x, and y-x>Phi, the pneumatic valve 1 is opened, nitrogen is filled into the sealed cavity until the reading of the barometer is
Close offAn air-operated valve 1. Repeating the step (2);
③ if y < x, and x-y>Phi, the pneumatic valve 2 is opened first, and the hydrogen-nitrogen mixed gas is filled into the sealed cavity until the reading of the barometer is
The air-operated valve 2 is closed. Then, the air-operated valve 1 was opened, nitrogen gas was charged into the sealed cavity until the barometer reading was 200kPa, and the air-operated valve 1 was closed. And (4) repeating the step (2).
The target hydrogen adjusting concentration is x (unit ppm), the reading of a hydrogen detector is y (unit ppm), the hydrogen concentration in the hydrogen-nitrogen mixed gas is N (unit ppm), the air pressure in the sealed cavity at the end of the primary concentration adjusting stage is A (unit kPa, A is more than 100 kPa; namely the reading of the air pressure measuring device before the beginning of adjustment), and the tolerance range of the target gas concentration is +/-phi (unit ppm).
More than, this application provides a gas concentration automatically regulated mode in seal chamber, can realize accurate gas concentration control through the automatic adjustment that realizes hydrogen concentration of feedback based on hydrogen detector's data, and then solved the automatically regulated and the accurate control problem of hydrogen concentration in the seal chamber. Meanwhile, the gas regulating method has a feedback process, and the regulating process only needs inflation and does not need air exhaust, so that the gas concentration can be conveniently detected by sampling by using the air pressure difference while the system structure is simplified.
It should be understood that, although the steps in the flowcharts of fig. 3 and 4 are shown in sequence as indicated by the arrows, the steps are not necessarily performed in sequence as indicated by the arrows. The steps are not performed in the exact order shown and described, and may be performed in other orders, unless explicitly stated otherwise. Moreover, at least some of the steps in fig. 3 and 4 may include multiple sub-steps or multiple stages, which are not necessarily performed at the same time, but may be performed at different times, and the order of performing the sub-steps or stages is not necessarily sequential, but may be performed alternately or alternately with other steps or at least some of the sub-steps or stages of other steps.
In one embodiment, as shown in fig. 5, there is provided a gas concentration adjusting apparatus including:
a parameter obtaining module 510, configured to obtain a target gas adjustment concentration and a concentration of a target gas in the mixed gas;
a preliminary adjustment module 520, configured to output a preliminary adjustment signal to each pneumatic valve according to the target gas adjustment concentration and the concentration of the target gas in the mixed gas; the preliminary adjustment signal is used for indicating the action of each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before preliminary adjustment;
a density adjusting module 530 for outputting density adjusting signals to each pneumatic valve; the concentration adjusting signal is used for indicating each pneumatic valve to act until the absolute value of the difference between the target gas adjusting concentration and the current detection value of the target gas detector is smaller than the target gas concentration tolerance.
For specific definition of the gas concentration adjusting means, reference may be made to the definition of the gas concentration adjusting method above, and details thereof are not repeated here. The respective modules in the gas concentration adjusting apparatus may be wholly or partially implemented by software, hardware, and a combination thereof. The modules can be embedded in a hardware form or independent from a processor in the computer device, and can also be stored in a memory in the computer device in a software form, so that the processor can call and execute operations corresponding to the modules.
In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored, which computer program, when being executed by a processor, carries out the steps of any of the above-mentioned gas concentration adjustment methods.
It will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by hardware instructions of a computer program, which can be stored in a non-volatile computer-readable storage medium, and when executed, can include the processes of the embodiments of the methods described above. Any reference to memory, storage, database, or other medium used in the embodiments provided herein may include non-volatile and/or volatile memory, among others. Non-volatile memory can include read-only memory (ROM), Programmable ROM (PROM), Electrically Programmable ROM (EPROM), Electrically Erasable Programmable ROM (EEPROM), or flash memory. Volatile memory can include Random Access Memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in a variety of forms, such as Static RAM (SRAM), Dynamic RAM (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDRSDRAM), Enhanced SDRAM (ESDRAM), Synchronous Link DRAM (SLDRAM), Rambus DRAM (RDRAM), and interface DRAM (DRDRAM).
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A gas concentration regulating system is characterized by comprising a sealed cavity, a gas distribution device for filling gas and mixed gas into the sealed cavity, a target gas detector for detecting the concentration of target gas in the sealed cavity, and a gas pressure measuring device for measuring the internal pressure of the sealed cavity; wherein the mixed gas is a mixture of the fill gas and the target gas;
also comprises a control device; the control device comprises a control circuit and a plurality of pneumatic valves connected with the control circuit; the air pressure measuring device and the target gas detector are both connected with the control circuit; each pneumatic valve is respectively connected between the sealed cavity and the gas distribution device and between the sealed cavity and the target gas detector;
the control circuit outputs a preliminary adjustment signal to each pneumatic valve according to the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas; each pneumatic valve acts based on the initial adjustment signal, and the control circuit outputs a concentration adjustment signal to each pneumatic valve until the current measurement value of the air pressure measurement device is the measurement value before initial adjustment; and each pneumatic valve acts based on the concentration adjusting signal until the absolute value of the difference between the target gas adjusting concentration and the current detection value of the target gas detector is smaller than the target gas concentration tolerance, and the concentration adjustment of the target gas is confirmed to be completed.
2. The gas concentration regulating system according to claim 1, wherein the gas distribution device includes a first gas distribution line and a second gas distribution line;
one end of the first gas distribution pipeline is communicated with the sealed cavity, the other end of the first gas distribution pipeline is communicated with a filling gas source, and the first gas distribution pipeline is provided with a first pneumatic valve;
one end of the second gas distribution pipeline is communicated with the sealed cavity, the other end of the second gas distribution pipeline is communicated with a mixed gas source, and the second gas distribution pipeline is provided with a second pneumatic valve;
the second pneumatic valve is opened based on the preliminary adjustment signal, the mixed gas is filled into the sealed cavity, and the second pneumatic valve is closed until the current measured value is a preset value; wherein the preset value is the product of the ratio of the target gas adjustment concentration and the concentration of the target gas in the mixed gas and the measured value before the primary adjustment;
and the first pneumatic valve is opened based on the preliminary adjustment signal when the second pneumatic valve is closed, and the filling gas is filled into the sealed cavity until the current measured value is the measured value before preliminary adjustment.
3. The gas concentration adjustment system of claim 2, wherein the source of the fill gas is a nitrogen gas source; the mixed gas source is a hydrogen-nitrogen mixed gas source.
4. The gas concentration regulating system according to claim 2, wherein the sealed chamber is communicated with the target gas detector through a sampling pipeline; the sampling pipeline is provided with a third pneumatic valve;
the third pneumatic valve is opened based on the concentration adjusting signal, and the target gas detector outputs the current detection value to the control circuit; wherein the third starting valve is kept open based on the concentration adjusting signal until the current measurement value of the air pressure measuring device is a preset value.
5. The gas concentration adjustment system according to claim 4, wherein the preset value is 100 Kpa;
the control circuit detects whether the target gas adjustment concentration is smaller than the current detection value when the absolute value of the difference between the target gas adjustment concentration and the current detection value is larger than a target gas concentration tolerance;
when the detection result is yes, the control circuit indicates the first pneumatic valve to be opened, the filling gas is filled into the sealed cavity until the current measurement value of the air pressure measurement device is
Closing the switch; wherein y is the current detection value; x is the target gas adjustment concentration;
the control circuit outputs the concentration adjustment signal to the third pneumatic valve.
6. The gas concentration adjustment system according to claim 5,
when the detection result is negative, the control circuit indicates the second pneumatic valve to be opened, the mixed gas is filled into the sealed cavity until the current measurement value of the air pressure measurement device is
Closing the switch; the control circuit indicates the first pneumatic valve to be opened, the filling gas is filled into the sealed cavity, and the sealed cavity is closed until the current measurement value of the air pressure measuring device is 200 Kpa; wherein N is the concentration of the target gas in the mixed gas;
the control circuit outputs the concentration adjustment signal to the third pneumatic valve.
7. The gas concentration regulating system according to claim 1, wherein the gas pressure measuring device is a gas pressure gauge; the target gas detector is a hydrogen detector.
8. A gas concentration adjustment method, characterized by comprising the steps of:
acquiring the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas;
outputting a preliminary adjustment signal to each pneumatic valve according to the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas; the preliminary adjustment signal is used for indicating the action of each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before preliminary adjustment;
outputting a concentration adjustment signal to each of the pneumatic valves; the concentration adjusting signal is used for indicating each pneumatic valve to act until the absolute value of the difference between the target gas adjusting concentration and the current detection value of the target gas detector is smaller than the target gas concentration tolerance.
9. A gas concentration adjustment device characterized by comprising:
the parameter acquisition module is used for acquiring the adjustment concentration of the target gas and the concentration of the target gas in the mixed gas;
the preliminary adjusting module is used for outputting preliminary adjusting signals to each pneumatic valve according to the adjusting concentration of the target gas and the concentration of the target gas in the mixed gas; the preliminary adjustment signal is used for indicating the action of each pneumatic valve until the current measured value of the air pressure measuring device is the measured value before preliminary adjustment;
the concentration adjusting module is used for outputting concentration adjusting signals to the pneumatic valves; the concentration adjusting signal is used for indicating each pneumatic valve to act until the absolute value of the difference between the target gas adjusting concentration and the current detection value of the target gas detector is smaller than the target gas concentration tolerance.
10. A computer-readable storage medium, on which a computer program is stored, which, when being executed by a processor, carries out the steps of the method as claimed in claim 8.
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