CN111255690B - Straight-line series vacuum pump set - Google Patents

Straight-line series vacuum pump set Download PDF

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Publication number
CN111255690B
CN111255690B CN202010248420.7A CN202010248420A CN111255690B CN 111255690 B CN111255690 B CN 111255690B CN 202010248420 A CN202010248420 A CN 202010248420A CN 111255690 B CN111255690 B CN 111255690B
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vacuum pump
steam
valve
water
water separator
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CN111255690A (en
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荣易
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Jiangsu Greek Vacuum Technology Co ltd
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Jiangsu Greek Vacuum Technology Co ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02Pumps characterised by combination with or adaptation to specific driving engines or motors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F04C29/128Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves

Abstract

The invention discloses a direct-exhaust series vacuum pump set which comprises a three-shaft modular dry vacuum pump, a vacuum pump driving motor, a preceding stage vacuum pump device, a three-way pipeline and a spring type one-way valve, wherein the vacuum pump driving motor is in transmission connection with a middle pump shaft of the three-shaft modular dry vacuum pump; by using the device, the maximum air exhaust capacity can be met by using a small liquid ring vacuum pump or an oil type rotary vane vacuum pump at 0-100kpa, the device is not influenced by the environment, the high vacuum degree (0.01-0.1Pa) can be reached, and the most economic energy consumption requirement can be met at any stage.

Description

Straight-line series vacuum pump set
Technical Field
The invention relates to the technical field of vacuum equipment, in particular to a direct-discharge series vacuum pump set.
Background
Due to the capacity limitations caused by the different configurations of vacuum pumps, in the existing industrial vacuum applications, many vacuum obtaining equipment configurations are not 1 vacuum pump, but are used by grouping and matching a plurality of different types of vacuum pumps to form a system. Most commonly, a plurality of roots vacuum pumps are provided with a backing vacuum pump (the backing vacuum pump is most commonly a liquid ring vacuum pump, an oil type rotary vane vacuum pump, a screw vacuum pump, a slide valve vacuum pump, etc.).
The liquid ring vacuum pump can safely and reliably process dust, viscous substances, corrosive gases, high molecular compounds, flammable and explosive process media and the like, but because the vacuum degree and the air extraction capacity of the liquid ring vacuum pump are influenced by the temperature of circulating liquid and the temperature of cooling water, the general vacuum degree can only reach 5000Pa, and in order to obtain higher vacuum degree, for example, when reaching 50Pa, one or more Roots vacuum pumps are required to be arranged at the air inlet of the liquid ring vacuum pump.
Although the oil type rotary vane vacuum pump, the screw vacuum pump and the slide valve vacuum pump can achieve higher vacuum degree (about 100 Pa), the air pumping capacity of the vacuum pumps is generally 100-800m3In between/h, often higher requirements for the application cannot be achieved, for example, the pumping capacity is relatively large (>1000m3H) higher vacuum (1)<Pa), one or more roots vacuum pumps must be provided at the suction port of the vacuum pump.
The roots vacuum pump is also called a booster type vacuum pump, and uses the compression of the roots vacuum pump to the sucked gas, the process gas volume of the exhaust port is smaller than that of the inlet port, and the pressure of the exhaust port is higher than that of the inlet port. Therefore, the vacuum pump can be used as a vacuum pump connected in series before the preceding stage vacuum pump, and the air suction capacity and the vacuum degree are improved.
However, the roots vacuum pump has its drawbacks that it is not suitable for direct exhaust of air, and it needs to be equipped with a backing vacuum pump (such as a liquid ring vacuum pump, an oil-type rotary vane vacuum pump, a screw vacuum pump, and a slide valve vacuum pump) to operate more reliably. And the operation can be started only when the vacuum degree of the inlet of the Roots vacuum pump is lower than the operation pressure allowed by the Roots vacuum pump to be started, and if the vacuum degree of the inlet of the Roots vacuum pump is higher than the inlet start pressure, the phenomena of current overload, heating, blocking and the like can be easily caused when the Roots vacuum pump operates.
The compression ratio of the Roots vacuum pump to the next-stage vacuum pump is generally not more than 5-6 times, and the Roots vacuum pump is overloaded and easily has overheating faults due to an excessively high compression ratio. The compression ratio is too low, which causes waste of energy consumption and investment, so the selection of the Roots vacuum pump and the backing vacuum pump on the air pumping capacity ratio is very important, and in practical application, according to the capacity of the backing vacuum pump and the parameters of practical requirements, the reasonable compression ratio between stages is selected, so that vacuum system units with different stages are provided, and the common vacuum systems with 2 stages, 3 stages, 4 stages, 5 stages and even 6 stages under special working conditions are provided (for example, 4 stages are that 3 Roots vacuum pumps are connected in series at a suction inlet, and the last 1 stage is provided with 1 backing vacuum pump)
The more the vacuum unit is in stages, the advantages are that: the inlet ultimate vacuum degree of the vacuum unit is very high, and the air extraction capacity is very large in high vacuum. But has the following disadvantages: the more the stages, the smaller the pumping capacity of the backing vacuum pump of the first stage is, and when the inlet pressure is higher, all the Roots vacuum pumps are not actually put into operation and form airflow obstruction, so that the pumping capacity becomes very small; secondly, because the number of stages is large, the pressure of each stage of roots vacuum pump when starting is required to be lower than the specified inlet pressure for starting, the number of motors is large, the control is very complex, and in the running process, once a certain stage of roots vacuum pump breaks down, the whole vacuum system is inevitably collapsed, and the running is stopped; moreover, because the number of stages is large, each Roots vacuum pump needs to be connected by a pipeline, and a cooling water pipeline needs to be connected with necessary valves and instruments, the whole vacuum unit is necessarily a large device integration after being combined, and the cost is high and the occupied area is large. The possible failure rate of multiple devices results in poor system stability and difficult maintenance.
The fewer the number of stages of the vacuum unit, the advantages are that: the vacuum unit has relatively large air extraction capacity at the initial stage, simple structure, low failure rate and small occupied space. However, the disadvantage is that the large air extraction amount is required, the preceding stage vacuum pump is required to meet the large air extraction capacity, the manufacturing cost is very high, the energy consumption is also large, and particularly, when the high vacuum pump is operated, the energy consumption far exceeds the multi-stage vacuum unit.
In the application market, the screw vacuum pump is not suitable for pumping dust particles, and is easy to corrode, solidify, oxidize and adhere to high boiling point compound process media, and the oil type rotary vane vacuum pump and the slide valve vacuum pump are not suitable for pumping inflammable and explosive process media and water vapor process media. Although liquid ring vacuum pumps are well suited for pumping the above media, because the process media can be mixed with water to generate a large amount of wastewater, the treatment of a large amount of wastewater is an important factor that restricts the limited use of liquid ring vacuum pumps under strict environmental requirements.
Another important factor is that the liquid ring vacuum pump made of carbon steel is easy to corrode and corrode, while the liquid ring vacuum pump made of stainless steel is very expensive, which is equivalent to the screw vacuum pump. In comparison with the two phases, although the screw vacuum pump is known to have many problems in the process media of high boiling point compounds such as dust particle suction, easy corrosion, easy solidification, easy oxidation, coking adhesion and the like, many pharmaceutical and chemical enterprises still use the screw vacuum pump instead of the liquid ring vacuum pump.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a direct-discharging series-connection vacuum pump group, which can meet the maximum air suction capacity at 0-100kpa by using a small liquid ring vacuum pump or an oil type rotary vane vacuum pump, is not influenced by the environment, can reach very high vacuum degree (0.01-0.1Pa), and can meet the most economic energy consumption requirement at any stage.
The utility model provides a straight line vacuum pump group that establishes ties, includes triaxial modularization dry vacuum pump, vacuum pump driving motor, preceding stage vacuum pump device, tee bend pipeline and spring check valve, vacuum pump driving motor is connected with triaxial modularization dry vacuum pump's well pump shaft transmission, a port department in the three port of tee bend pipeline is provided with the spring check valve, and two other ports of tee bend pipeline communicate with triaxial modularization dry vacuum pump's gas vent and preceding stage vacuum pump device's air inlet respectively, preceding stage vacuum pump device's air inlet department is equipped with the valve.
Preferably, the backing vacuum pump device is an oil-type rotary vane vacuum pump.
Preferably, the backing vacuum pump device comprises a liquid ring vacuum pump and a steam-water separator, one port of the three-way pipeline is communicated with an air inlet of the liquid ring vacuum pump, the liquid ring vacuum pump is communicated with the steam-water separator, a steam-water mixture discharged by the liquid ring vacuum pump enters the steam-water separator to be separated, separated gas is discharged from an exhaust port of the steam-water separator, and separated circulating liquid flows back to the liquid ring vacuum pump.
Preferably, a water replenishing port is formed in the steam-water separator, a water replenishing pipe is connected to the water replenishing port, the water replenishing pipe is communicated with a water outlet of the triaxial modular dry vacuum pump, a floating ball type liquid level switch is arranged in the steam-water separator, and the floating ball type liquid level switch can automatically open and close the water replenishing port of the steam-water separator according to the water amount in the steam-water separator.
Preferably, a manual water replenishing switch valve is arranged on the water replenishing pipe.
Preferably, the system further comprises a foreline vacuum pump device gas inlet pipeline, two ends of the foreline vacuum pump device gas inlet pipeline are respectively connected with a gas inlet of the foreline vacuum pump device and one port of the three-way pipeline, and the valve is arranged on the foreline vacuum pump device gas inlet pipeline.
Preferably, the valve is an electromagnetic valve, and the electromagnetic valve and a driving motor of the backing vacuum pump device are controlled by the same switch.
Preferably, a manual air inlet switch valve is further arranged on the air inlet pipeline of the backing vacuum pump device.
Preferably, a silencer is installed at an exhaust port of the triaxial modular dry vacuum pump. The exhaust port of the three-shaft multistage pump is provided with a silencer, so long as the silencer is used for reducing exhaust noise in the direct exhaust atmosphere.
Preferably, the vacuum pump device further comprises a base, and the three-axis modular dry vacuum pump, the vacuum pump driving motor and the backing vacuum pump device are all mounted on the base.
In order to solve the above problems, the inventor designs the present technical solution, in the present technical solution, a three-axis modular dry vacuum pump is adopted, which is different from the conventional roots vacuum pump, structurally, the pump is driven by a vacuum pump driving motor, and the multi-stage pump is composed of multi-stage roots vacuum pumps. Because the structure of the Roots vacuum pump that the inner chamber adopted, can effectual suction dust particulate matter. Meanwhile, the triaxial modular dry vacuum pump adopts multistage continuous compression, can directly exhaust air, does not need a preceding stage vacuum pump to give a negative pressure, and is like a liquid ring vacuum pump, a screw vacuum pump and a rotary vane vacuum pump. On the other hand, the three-shaft modular dry vacuum pump can be connected with a backing vacuum pump in series, and the gas exhausted by the three-shaft modular dry vacuum pump directly enters the backing vacuum pump, so that the three-shaft modular dry vacuum pump is like a multi-stage roots vacuum pump. The three-shaft modular dry vacuum pump in the technical scheme is the technical scheme in the patent document in the publication number CN 107420306B.
Because the triaxial modularization dry vacuum pump can reach the ultimate vacuum degree of 10Pa when directly discharging to the atmosphere, even if no preceding stage vacuum pump (liquid ring vacuum pump or oil type rotary vane vacuum pump) intervenes to operate, the triaxial modularization dry vacuum pump can also independently operate, and the current overload phenomenon and the overheating and blocking phenomenon can not occur. The traditional roots vacuum pump needs a preceding stage vacuum pump to be involved in operation, and the suction inlet can be safely started to operate after reaching the lowest starting inlet pressure.
When the exhaust of the three-axis modular dry vacuum pump directly enters a liquid ring vacuum pump or an oil type rotary vane vacuum pump, the three-axis modular dry vacuum pump is equivalent to a roots vacuum unit consisting of a plurality of roots vacuum pumps, so that the suction inlet of the three-axis modular dry vacuum pump can reach a very high vacuum degree (which can be close to 0.01 Pa). The traditional roots vacuum unit needs to reach such high vacuum degree, and can be realized by series combination of 3-4 roots vacuum pumps.
As the three-shaft modular dry vacuum pump belongs to multi-stage continuous compression, the compression ratio of inlet gas after multi-stage compression can reach about 100-120 times (continuous multiplication between 4-5 stages), and the reasonable compression ratio of a general Roots vacuum pump is about 3-4 times. Therefore, after compression by the three-axis modular dry vacuum pump, the volume of gas entering the backing vacuum pump is only about 5% of the original volume. Therefore, only a forepump matched with a small pumping amount is needed.
And one port of the three ports of the three-way pipeline is provided with a spring type one-way valve, the other two ports of the three-way pipeline are respectively communicated with an exhaust port of the three-axis modular dry vacuum pump and an air inlet of the backing stage vacuum pump device, and the spring type one-way valve is of an internal spring structure. When the vacuum pump group starts to operate, the pressure at the inlet of the initial triaxial modular dry vacuum pump is higher, and when the pressure is close to the atmospheric pressure, the gas flow discharged by the triaxial modular dry vacuum pump is higher, so the exhaust pressure of the triaxial modular dry vacuum pump is also higher, and the air exhaust capacity of the backing vacuum pump device is far smaller than the exhaust flow of the triaxial modular dry vacuum pump, and the pressure at the exhaust outlet of the triaxial modular dry vacuum pump is higher than 1 atmospheric pressure, namely the atmospheric pressure, at this time, the gas can push against the spring of the spring type check valve (the set opening pressure of the spring is slightly higher than 1 atmospheric pressure). The gas is discharged from the spring type one-way valve directly to the outside of the vacuum pump set.
The triaxial modular dry vacuum pump can reach the ultimate vacuum of 20pa at the lowest when the triaxial modular dry vacuum pump is in straight line, so that the vacuum pump set can obtain higher air suction capacity (without reducing efficiency) when the inlet pressure is higher. And the faults caused by pressure holding and overheating can not occur, which can not be realized by all roots vacuum pumps. When the pressure of the inlet is gradually reduced and a high vacuum degree is reached, the gas flow discharged by the triaxial modular dry vacuum pump is smaller and smaller, the final exhaust capacity is lower than the air pumping capacity of the liquid ring vacuum pump or the oil type rotary vane vacuum pump, the pressure of the spring type one-way valve is lower than the normal pressure, and the spring automatically returns to keep the closing state. At the moment, the gas discharged by the three-axis modular dry vacuum pump is pumped by the liquid ring vacuum pump or the oil type rotary vane vacuum pump, so that a multi-stage roots-liquid ring (or rotary vane) vacuum unit is formed. The vacuum degree of the inlet of the triaxial modular dry vacuum pump is further improved and can reach 0.01 Pa. While the inlet pumping capacity continues to maintain the same capacity as when the tri-axial modular dry vacuum pump is inline. Along with the inlet pressure value is continuously reduced, when high vacuum is achieved, less gas passes through the triaxial modular dry vacuum pump, less gas passes through the exhaust port, the pressure at the spring type check valve is lower and lower, the reverse force of the spring is larger and larger, sealing is further performed, and the gas is prevented from leaking from the spring type check valve. Simultaneously, along with the pressure reduction of the spring type one-way valve, the pressure difference value between the pressure of the suction inlet and the pressure difference value of the exhaust outlet of the three-axis modular dry vacuum pump is smaller and smaller, the passing air flow is also lower and lower, and the shaft power of the three-axis modular dry vacuum pump is smaller and smaller at the moment. And the liquid ring vacuum pump has low shaft power, so that the most economical energy consumption is realized. In conclusion, the invention completely improves the defects of the prior vacuum unit, can obtain the optimal operation energy consumption when realizing the continuous and stable air exhaust capacity, does not need any electrical control, and does not have the phenomena of current overload and overheating and blocking of the Roots vacuum pump caused by large pressure difference.
In the technical scheme, an electromagnetic valve and a manual air inlet switch valve are arranged on a suction inlet pipeline of a liquid ring vacuum pump or an oil type rotary vane vacuum pump. The electromagnetic valve adopts 220V 50Hz, the electromagnetic valve and a driving motor of the fore vacuum pump device are controlled by the same switch, when the driving motor of the fore vacuum pump device is electrified and operated, the electromagnetic valve is opened, at the moment, a suction inlet pipeline of the fore vacuum pump device is opened, when the fore vacuum pump device stops or fails to jump, the driving motor of the fore vacuum pump device is powered off, the corresponding electromagnetic valve is powered off and closed immediately, and thus circulating liquid (or vacuum oil in an oil type rotary vane vacuum pump) in the liquid ring vacuum pump cannot flow backwards to an exhaust port of the three-shaft modular dry vacuum pump; in addition, after the electromagnetic valve is closed, gas cannot pass through, the gas of the three-shaft modular dry vacuum pump cannot be exhausted through the backing vacuum pump device, then gas flow can be gathered at the position of the three-way pipeline, the spring can be pushed open to exhaust when the pressure exceeds the spring type one-way valve, at the moment, the three-shaft modular dry vacuum pump is changed into direct exhaust, the shaft power of the corresponding three-shaft modular dry vacuum pump can rise, the original traditional roots vacuum unit cannot be generated, and all the roots vacuum pumps must stop running when the backing vacuum pump breaks down, so that the whole system collapses, and the vacuum of a process system is interrupted.
The manual air inlet switch valve plays a maintenance role, for example, under the severe working condition, a large amount of sludge is gathered inside the liquid ring vacuum pump, when the vacuum oil needs to be replaced by the oil type rotary vane vacuum pump, dust in an inlet filter tank needs to be cleaned, or when the electromagnetic valve fails and needs to be replaced, the manual air inlet switch valve only needs to be closed, and the three-axis modular dry vacuum pump is enabled to be in the direct exhaust mode to operate.
And under the condition that the foreline vacuum pump device adopts a liquid ring vacuum pump, the discharged gas-liquid mixture enters a rear integrated steam-water separator, after gas-liquid separation is carried out through the steam-water separator, the gas is discharged from the exhaust port of the liquid ring vacuum pump at the top, and the circulating liquid flows back to the liquid ring vacuum pump from the pipeline again.
And because the liquid ring vacuum pump can be selected to be very small (100)0m3The triaxial modular dry vacuum pump of/h only needs to be equipped with a liquid ring vacuum pump of 1.5 kw), so that the heat of compression of the liquid ring vacuum pump is low, and the water temperature of the circulating liquid is easily maintained at a stable temperature by air cooling. Meanwhile, the three-shaft modular dry vacuum pump can independently reach the ultimate vacuum of 20Pa, so that the water temperature of the liquid ring vacuum pump cannot influence the whole vacuum unit, and any heat exchange equipment is not needed. Therefore, the process medium and the dust which are easy to solidify at low temperature are better treated.
Along with continuous operation, the water that stores in the catch water can reduce, just can see through catch water liquid level sight glass, needs regular moisturizing. A water replenishing pipe is connected to the water replenishing port and communicated with a water outlet of the three-shaft modular dry vacuum pump; a mechanical floating ball type liquid level switch is adopted in a steam-water separator, when the liquid level is lowered, a floating ball type valve is opened, cooling water passing through a three-shaft modularized dry vacuum pump enters the steam-water separator for water supplement, when the liquid level is normal, a floating ball rises along with the liquid level, the valve is finally closed, and water supplement is not performed any more. The manual water replenishing switch valve is used for closing the manual water replenishing switch valve to forcibly close water inflow when the steam-water separator needs to be washed or the floating ball type liquid level valve fails.
It can be seen from the above that the whole vacuum unit is like a complete vacuum pump without additional electrical control, and can not only play the role of the original traditional roots-liquid ring, roots-screw and other vacuum systems. And the defects of the original vacuum system can be improved.
The invention has the beneficial effects that: the technical scheme provides a vacuum pump set with a brand-new structure, which is characterized in that: the maximum air extraction capacity can be met at 0-100kpa by using a small liquid ring vacuum pump or an oil type rotary vane vacuum pump, the environment influence is avoided, the high vacuum degree (0.01-0.1Pa) can be achieved, and the most economic energy consumption requirement can be met at any stage; the vacuum pump set can be ensured to stably and reliably operate without any logic control or frequency converter. At any time, when the preceding stage vacuum pump (a liquid ring vacuum pump or an oil type rotary vane vacuum pump) breaks down, the use of a vacuum system cannot be influenced; after the liquid ring vacuum pump is equipped, the device is completely suitable for the severe working conditions of dust particle suction, high boiling point compounds such as easy corrosion, easy solidification, easy oxidation, coking adhesion and the like.
Drawings
In order to more clearly illustrate the detailed description of the invention or the technical solutions in the prior art, the drawings that are needed in the detailed description of the invention or the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.
FIG. 1 is a schematic structural view of example 1 of the present invention;
fig. 2 is a schematic structural diagram of embodiment 2 of the present invention.
In the attached drawing, 1-a three-shaft modular dry vacuum pump, 2-a vacuum pump driving motor, 3-a backing vacuum pump device, 4-a three-way pipeline, 5-a backing vacuum pump device air inlet pipeline, 6-an electromagnetic valve, 7-a manual air inlet switch valve, 8-a spring type one-way valve, 9-a steam-water separator, 10-a liquid ring vacuum pump, 11-a steam-water separator liquid level sight glass, 12-a steam-water separator air outlet, 13-a base and 14-a filter.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.
It is to be noted that, unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the invention pertains.
Example 1
As shown in fig. 1, the vacuum pump system comprises a three-axis modular dry vacuum pump 1, a vacuum pump driving motor 2, a backing vacuum pump device 3, a three-way pipe 4 and a spring type check valve 8, wherein the vacuum pump driving motor 2 is in transmission connection with a middle pump shaft of the three-axis modular dry vacuum pump 1, the spring type check valve 8 is arranged at one port of three ports of the three-way pipe 4, the other two ports of the three-way pipe 4 are respectively communicated with an exhaust port of the three-axis modular dry vacuum pump 1 and an air inlet of the backing vacuum pump device 3, and a valve is arranged at the air inlet of the backing vacuum pump device 3. In this embodiment, the backing vacuum pump device 3 is an oil-type rotary vane vacuum pump. The three-way valve is characterized by further comprising a foreline vacuum pump device air inlet pipeline 5, wherein two ends of the foreline vacuum pump device air inlet pipeline 5 are respectively connected with an air inlet of the foreline vacuum pump device 3 and one port of the three-way pipeline 4, and the valve is arranged on the foreline vacuum pump device air inlet pipeline 5. In this embodiment, the valve is an electromagnetic valve 6, and the electromagnetic valve 6 and a driving motor of the backing vacuum pump device 3 are controlled by the same switch. In this embodiment, the gas inlet pipeline 5 of the backing vacuum pump apparatus is further provided with a manual gas inlet switch valve 7. In this embodiment, a silencer is installed at an exhaust port of the triaxial modular dry vacuum pump 1. The vacuum pump comprises a three-shaft modularized dry vacuum pump 1, a vacuum pump driving motor 2 and a backing vacuum pump device 3 which are all arranged on a base 13. In this embodiment, a filter 14 is installed at an air inlet of the backing vacuum pump apparatus 3.
Example 2
As shown in fig. 2, the vacuum pump comprises a three-axis modular dry vacuum pump 1, a vacuum pump driving motor 2, a backing vacuum pump device 3, a three-way pipe 4 and a spring type check valve 8, wherein the vacuum pump driving motor 2 is in transmission connection with a middle pump shaft of the three-axis modular dry vacuum pump 1, the spring type check valve 8 is arranged at one port of three ports of the three-way pipe 4, the other two ports of the three-way pipe 4 are respectively communicated with an exhaust port of the three-axis modular dry vacuum pump 1 and an air inlet of the backing vacuum pump device 3, and a valve is arranged at the air inlet of the backing vacuum pump device 3. In this embodiment, the backing vacuum pump device 3 includes a liquid ring vacuum pump 10 and a steam-water separator 9, one port of the three-way pipeline 4 is communicated with an air inlet of the liquid ring vacuum pump 10, the liquid ring vacuum pump 10 is communicated with the steam-water separator 9, a steam-water mixture discharged by the liquid ring vacuum pump 10 enters the steam-water separator 9 to be separated, separated gas is discharged from an exhaust port 12 of the steam-water separator, and separated circulating liquid flows back to the liquid ring vacuum pump 10. The water replenishing device is characterized in that a water replenishing hole is formed in the steam-water separator 9, a water replenishing pipe is connected to the water replenishing hole and is communicated with a water outlet of the three-shaft modular dry vacuum pump 1, a floating ball type liquid level switch is arranged in the steam-water separator 9, and the floating ball type liquid level switch can automatically open and close the water replenishing hole of the steam-water separator 9 according to the amount of water in the steam-water separator 9. And a manual water replenishing switch valve is arranged on the water replenishing pipe. A steam-water separator liquid level sight glass 11 is arranged on the steam-water separator 9, and the liquid level in the steam-water separator 9 can be seen through the steam-water separator liquid level sight glass 11.
The three-way valve is characterized by further comprising a foreline vacuum pump device air inlet pipeline 5, wherein two ends of the foreline vacuum pump device air inlet pipeline 5 are respectively connected with an air inlet of the foreline vacuum pump device 3 and one port of the three-way pipeline 4, and the valve is arranged on the foreline vacuum pump device air inlet pipeline 5. In this embodiment, the valve is an electromagnetic valve 6, and the electromagnetic valve 6 and a driving motor of the backing vacuum pump device 3 are controlled by the same switch. In this embodiment, the gas inlet pipeline 5 of the backing vacuum pump apparatus is further provided with a manual gas inlet switch valve 7. In this embodiment, a silencer is installed at an exhaust port of the triaxial modular dry vacuum pump 1.
The vacuum pump comprises a three-shaft modularized dry vacuum pump 1, a vacuum pump driving motor 2 and a backing vacuum pump device 3 which are all arranged on a base 13. In this embodiment, a filter 14 is installed at an air inlet of the backing vacuum pump apparatus 3.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention, and they should be construed as being included in the following claims and description.

Claims (10)

1. The utility model provides a straight row series connection vacuum pump package, its characterized in that, includes triaxial modularization dry vacuum pump (1), vacuum pump driving motor (2), preceding stage vacuum pump device (3), tee bend pipeline (4) and spring check valve (8), vacuum pump driving motor (2) are connected with the well pump shaft transmission of triaxial modularization dry vacuum pump (1), a port department in three ports of tee bend pipeline (4) is provided with spring check valve (8), and two other ports of tee bend pipeline (4) communicate with the gas vent of triaxial modularization dry vacuum pump (1) and the air inlet of preceding stage vacuum pump device (3) respectively, the air inlet department of preceding stage vacuum pump device (3) is equipped with the valve.
2. An inline vacuum pump group according to claim 1, characterized in that the foreline vacuum pump arrangement (3) is an oil-type rotary vane vacuum pump.
3. The in-line vacuum pump group according to claim 1, wherein the backing vacuum pump device (3) comprises a liquid ring vacuum pump (10) and a steam-water separator (9), one port of the tee pipe (4) is communicated with an air inlet of the liquid ring vacuum pump (10), the liquid ring vacuum pump (10) is communicated with the steam-water separator (9), a steam-water mixture discharged by the liquid ring vacuum pump (10) enters the steam-water separator (9) for separation, separated gas is discharged from an air outlet (12) of the steam-water separator, and separated circulating liquid flows back to the liquid ring vacuum pump (10).
4. The in-line series vacuum pump group according to claim 3, wherein a water replenishing port is arranged on the steam-water separator (9), a water replenishing pipe is connected to the water replenishing port and is communicated with a water outlet of the three-shaft modular dry vacuum pump (1), a floating ball type liquid level switch is arranged in the steam-water separator (9), and the floating ball type liquid level switch can automatically open and close the water replenishing port of the steam-water separator (9) according to the water amount in the steam-water separator (9).
5. The in-line tandem vacuum pump group as claimed in claim 4, wherein the water replenishing pipe is provided with a manual water replenishing switch valve.
6. An inline vacuum pump package according to claim 1, characterized by further comprising a foreline vacuum pump means gas inlet conduit (5), both ends of said foreline vacuum pump means gas inlet conduit (5) being connected to the gas inlet of the foreline vacuum pump means (3) and to one port of the tee conduit (4), respectively, said valve being arranged on the foreline vacuum pump means gas inlet conduit (5).
7. An inline vacuum pump group according to claim 6, characterized in that said valve is a solenoid valve (6), said solenoid valve (6) being controlled by the same switch as the driving motor of the backing vacuum pump device (3).
8. An inline vacuum pump group according to claim 7, characterized in that the foreline vacuum pump means inlet conduit (5) is further provided with a manual inlet on-off valve (7).
9. An inline vacuum pump group according to claim 1, characterized in that the exhaust port of the triaxial modular dry vacuum pump (1) is equipped with a silencer.
10. An inline vacuum pump stack according to any of claims 1-9, characterized by a base (13), and said three-axis modular dry vacuum pump (1), vacuum pump drive motor (2) and backing vacuum pump arrangement (3) are mounted on the base (13).
CN202010248420.7A 2020-04-01 2020-04-01 Straight-line series vacuum pump set Active CN111255690B (en)

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CN111706509B (en) * 2020-06-30 2022-01-04 江苏格里克真空技术有限公司 Three-shaft multi-stage roots pump
CN113982928B (en) * 2021-10-29 2024-05-07 山东宽量节能环保技术有限公司 Series-parallel connection combined system of screw vacuum pump and liquid ring vacuum pump

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WO2017031807A1 (en) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Non-coaxial vacuum pump with multiple driving chambers
CN205330979U (en) * 2016-01-28 2016-06-22 江阴华西节能技术有限公司 Dry -type vacuum unit
CN205779711U (en) * 2016-06-24 2016-12-07 杭州新安江工业泵有限公司 The complete vacuum pump set of Roots's pendular ring
CN107420306B8 (en) * 2017-09-13 2021-10-08 上海伊莱茨真空技术有限公司 Three-shaft modularized dry vacuum pump
CN209724661U (en) * 2019-04-29 2019-12-03 山东精工泵业有限公司 Roots Vacuum Pump Units

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