CN111238679A - Extreme environment resistant optical fiber Fabry-Perot temperature sensor and manufacturing method thereof - Google Patents
Extreme environment resistant optical fiber Fabry-Perot temperature sensor and manufacturing method thereof Download PDFInfo
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- CN111238679A CN111238679A CN202010048232.XA CN202010048232A CN111238679A CN 111238679 A CN111238679 A CN 111238679A CN 202010048232 A CN202010048232 A CN 202010048232A CN 111238679 A CN111238679 A CN 111238679A
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- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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Abstract
The invention discloses an extreme environment resistant optical fiber Fabry-Perot temperature sensor and a manufacturing method thereof, wherein the extreme environment resistant optical fiber Fabry-Perot temperature sensor comprises a packaging outer tube, an optical fiber, a connected optical fiber, an FP air cavity and a metal sheet; the optical fiber and the connected optical fiber are both fixedly arranged in the packaging outer tube; the optical fiber and the connected optical fiber are welded to form an FP air cavity; the FP air cavity is fixedly arranged on the metal sheet; the metal sheet is fixedly arranged in the packaging outer tube. The optical fiber Fabry-Perot temperature sensor senses the external temperature change through the metal sheet, and the FP air cavity records interference fringes to obtain the external temperature change. Simultaneously, this optical fiber Fabry-Perot temperature sensor simple structure, removable sheetmetal make the sensor reach different temperature sensitivity, all can normally work under extreme environment such as high pressure and irradiation, and the practicality is strong. The manufacturing method of the optical fiber Fabry-Perot temperature sensor is simple and easy to operate, the used materials can be replaced according to actual conditions, and the manufacturing process is rapid and convenient.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensing, and particularly relates to an extreme environment resistant optical fiber Fabry-Perot temperature sensor and a manufacturing method thereof.
Background
In the optical fiber sensing technology, the change of various external measured physical quantities is induced by light transmitted in an optical fiber, and the measured information can be transmitted through the optical fiber. The optical fiber has the advantages of low cost, chemical corrosion resistance, electromagnetic interference resistance, small transmission loss and the like, so that the optical fiber sensor has unique advantages in measurement under long distance and complex environment, and various optoelectronic devices appear along with the rapid development of modern optoelectronic technology, thereby accelerating the application of the optical fiber sensor in the engineering field and gradually moving to the life of people. Compared with the traditional sensor, the optical fiber sensor has the advantages of being passive, anti-electromagnetic interference, wide in working frequency band, large in dynamic range and the like. At present, the existing optical fiber temperature sensor has more environmental restrictions, can not completely meet engineering requirements, and is particularly applied to an optical fiber temperature sensor in an extreme environment. Therefore, the invention provides an extreme environment resistant optical fiber Fabry-Perot temperature sensor and a manufacturing method thereof.
Disclosure of Invention
The invention aims to solve the problem of applying an optical fiber temperature sensor in an extreme environment, and provides an extreme environment resistant optical fiber Fabry-Perot temperature sensor and a manufacturing method thereof.
The technical scheme of the invention is as follows: an extreme environment resistant optical fiber Fabry-Perot temperature sensor comprises a packaging outer tube, an optical fiber, a connected optical fiber, an FP air cavity and a metal sheet; the optical fiber and the connected optical fiber are both fixedly arranged in the packaging outer tube; the optical fiber and the connected optical fiber are welded to form an FP air cavity; the FP air cavity is fixedly arranged on the metal sheet; the metal sheet is fixedly arranged in the packaging outer tube.
The invention has the beneficial effects that: the optical fiber Fabry-Perot temperature sensor senses the external temperature change through the metal sheet, and the FP air cavity records interference fringes to obtain the external temperature change. Simultaneously, this optical fiber Fabry-Perot temperature sensor simple structure, removable sheetmetal make the sensor reach different temperature sensitivity, all can normally work under extreme environment such as high pressure and irradiation, and the practicality is strong.
Further, the optical fiber and the connected optical fiber are welded by laser or arc welding.
The beneficial effects of the further scheme are as follows: in the invention, the mode of the welding device adopts a laser welding or arc welding mode, the welding material is not easy to deform, the welding process can be accurately positioned, and the welding device is not limited by environment.
Further, the outer tube is cylindrical.
The beneficial effects of the further scheme are as follows: in the invention, the cylindrical packaging outer tube is beneficial to fixedly installing the metal sheet in the packaging outer tube.
Furthermore, the end face of the optical fiber is processed by laser, particle beam etching or electron beam etching.
The beneficial effects of the further scheme are as follows: in the invention, the processing mode of the optical fiber end face is precise and fine, the stress and the deformation of the optical fiber end face can not be caused, and the processing speed is high.
Further, the FP air cavity is cylindrical with a depth of 10mm to 200mm and a diameter of 10 μm to 100 μm.
The beneficial effects of the further scheme are as follows: in the invention, the FP air cavity is used for recording interference fringes and can work under the environments of high pressure or irradiation and the like, thereby meeting the working requirements of the optical fiber Fabry-Perot temperature sensor under extreme environments. The diameter of the optical fiber is 125mm, and the FP air cavity with the diameter of 10-100 μm meets the maximum range limit of the connecting optical fiber and the connected optical fiber; the FP air cavity with a depth of 10mm-200mm is the largest range for existing laser welding. Meanwhile, FP air cavities with different depths and diameters can be selected according to the measuring range and the precision required by different environments.
Further, the metal sheet is made of aluminum alloy, stainless steel or chrome-nickel alloy.
The beneficial effects of the further scheme are as follows: in the invention, the metal sheets are made of materials with different expansion coefficients, and the metal sheets made of different materials are selected to enable the temperature sensor to reach different temperature sensitivities, so that the temperature sensor has higher practicability.
Based on the system, the invention also provides a manufacturing method of the extreme environment resistant optical fiber Fabry-Perot temperature sensor, which comprises the following steps:
s1: cutting the end face of the optical fiber flat, and forming a round hole with the diameter of 10-100 mu m and the depth of 10-200 mm by laser processing;
s2: the end face of the optical fiber to be connected is cut flat, and the optical fiber and the end face of the optical fiber are welded through the circular hole to form an FP air cavity;
s3: mounting the FP air cavity on a metal sheet;
s4: and installing a metal sheet in the packaging outer tube to finish the manufacture of the extreme environment resistant optical fiber Fabry-Perot temperature sensor.
The invention has the beneficial effects that: the manufacturing method of the optical fiber Fabry-Perot temperature sensor is simple and easy to operate, the used materials can be replaced according to actual conditions, and the manufacturing process is rapid and convenient.
Drawings
FIG. 1 is a block diagram of a fiber Fabry-Perot temperature sensor;
FIG. 2 is a flow chart of a method of fabricating a fiber Fabry-Perot temperature sensor;
in the figure, 1, an outer tube is encapsulated; 2. an optical fiber; 3. a spliced optical fiber; 4. FP air cavity; 5. a metal sheet.
Detailed Description
The embodiments of the present invention will be further described with reference to the accompanying drawings.
As shown in FIG. 1, the invention provides an optical fiber Fabry-Perot temperature sensor resisting extreme environment, which comprises an outer packaging tube 1, an optical fiber 2, a connected optical fiber 3, an FP air cavity 4 and a metal sheet 5; the optical fiber 2 and the connected optical fiber 3 are both fixedly arranged in the packaging outer tube 1; the optical fiber 2 and the connected optical fiber 3 are welded to form an FP air cavity 4; the FP air cavity 4 is fixedly arranged on the metal sheet 5; the metal sheet 5 is fixedly arranged in the outer packaging tube 1.
In the embodiment of the present invention, as shown in fig. 1, the optical fiber 2 and the connected optical fiber 3 are welded by laser welding or arc welding. In the invention, the mode of the welding device adopts a laser welding or arc welding mode, the welding material is not easy to deform, the welding process can be accurately positioned, and the welding device is not limited by environment.
In the embodiment of the present invention, as shown in fig. 1, the outer packaging tube 1 has a cylindrical shape. In the invention, the cylindrical packaging outer tube is beneficial to fixedly installing the metal sheet in the packaging outer tube.
In the embodiment of the present invention, as shown in fig. 1, the end face of the optical fiber 2 is processed by laser, particle beam lithography or electron beam lithography. In the invention, the processing mode of the optical fiber end face is precise and fine, the stress and the deformation of the optical fiber end face can not be caused, and the processing speed is high.
In the present example, as shown in FIG. 1, the FP air cavity 4 is cylindrical with a depth of 10mm to 200mm and a diameter of 10 μm to 100 μm. In the invention, the FP air cavity is used for recording interference fringes and can work under the environments of high pressure or irradiation and the like, thereby meeting the working requirements of the optical fiber Fabry-Perot temperature sensor under extreme environments. The diameter of the optical fiber is 125mm, and the FP air cavity with the diameter of 10-100 μm meets the maximum range limit of the connecting optical fiber and the connected optical fiber; the FP air cavity with a depth of 10mm-200mm is the largest range for existing laser welding. Meanwhile, FP air cavities with different depths and diameters can be selected according to the measuring range and the precision required by different environments.
In the embodiment of the present invention, as shown in fig. 1, the metal sheet 5 is made of an aluminum alloy, stainless steel, or inconel. In the invention, the metal sheets are made of materials with different expansion coefficients, and the metal sheets made of different materials are selected to enable the temperature sensor to reach different temperature sensitivities, so that the temperature sensor has higher practicability.
Based on the above system, the invention further provides a manufacturing method of the extreme environment resistant optical fiber Fabry-Perot temperature sensor, as shown in FIG. 2, comprising the following steps:
s1: cutting the end face of the optical fiber flat, and forming a round hole with the diameter of 10-100 mu m and the depth of 10-200 mm by laser processing;
s2: the end face of the optical fiber to be connected is cut flat, and the optical fiber and the end face of the optical fiber are welded through the circular hole to form an FP air cavity;
s3: mounting the FP air cavity on a metal sheet;
s4: and installing a metal sheet in the packaging outer tube to finish the manufacture of the extreme environment resistant optical fiber Fabry-Perot temperature sensor.
The working principle and the process of the invention are as follows: the optical fiber Fabry-Perot temperature sensor comprises a packaging outer tube 1, an optical fiber 2, a connected optical fiber 3, an FP air cavity 4 and a metal sheet 5. The end face of the optical fiber 2 is cut and flattened to form a circular hole, and then the circular hole and the optical fiber 3 to be connected form an FP air cavity 4 through laser welding or arc welding. Meanwhile, FP air cavities with different depths and diameters can be selected according to the measuring range and the precision required by different environments. The FP air cavity 4 is mounted on a metal sheet 5 and finally encapsulated in the outer packaging tube 1. When the optical fiber Fabry-Perot temperature sensor is used, the temperature sensitivity of the temperature sensor can be changed by replacing the metal sheet 5 with aluminum alloy, stainless steel, chrome-nickel alloy or the like. When the outside temperature changes, the metal sheet 5 senses the temperature change, transmits the temperature change to the FP air cavity 4, and obtains the change of the outside temperature by recording interference fringes of the FP air cavity 4.
The invention has the beneficial effects that: the optical fiber Fabry-Perot temperature sensor senses the external temperature change through the metal sheet, and the FP air cavity records interference fringes to obtain the external temperature change. Simultaneously, this optical fiber Fabry-Perot temperature sensor simple structure, removable sheetmetal make the sensor reach different temperature sensitivity, all can normally work under extreme environment such as high pressure and irradiation, and the practicality is strong. The manufacturing method of the optical fiber Fabry-Perot temperature sensor is simple and easy to operate, the used materials can be replaced according to actual conditions, and the manufacturing process is rapid and convenient.
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the invention, and these changes and combinations are within the scope of the invention.
Claims (7)
1. An extreme environment resistant optical fiber Fabry-Perot temperature sensor is characterized by comprising a packaging outer tube (1), an optical fiber (2), a connected optical fiber (3), an FP air cavity (4) and a metal sheet (5); the optical fiber (2) and the connected optical fiber (3) are both fixedly arranged in the packaging outer tube (1); the optical fiber (2) and the connected optical fiber (3) are fused to form an FP air cavity (4); the FP air cavity (4) is fixedly arranged on the metal sheet (5); the metal sheet (5) is fixedly arranged in the packaging outer tube (1).
2. The extreme environment resistant fiber Fabry-Perot temperature sensor according to claim 1, characterized in that the optical fiber (2) and the spliced optical fiber (3) are welded by laser or arc.
3. Extreme environment resistant fiber fabry-perot temperature sensor according to claim 1, characterized in that the outer encapsulation tube (1) is cylindrical.
4. The extreme environment resistant fiber Fabry-Perot temperature sensor according to claim 1, characterized in that the end face of the optical fiber (2) is processed by means of laser, particle beam lithography or electron beam lithography.
5. The extreme environment resistant fiber Fabry-Perot temperature sensor according to claim 1, characterized in that the FP air cavity (4) is cylindrical with a depth of 10mm-200mm and a diameter of 10 μm-100 μm.
6. The extreme environment resistant fiber Fabry-Perot temperature sensor according to claim 1, characterized in that the metal sheet (5) is made of aluminum alloy, stainless steel or chrome-nickel alloy.
7. A manufacturing method of an extreme environment resistant optical fiber Fabry-Perot temperature sensor is characterized by comprising the following steps:
s1: cutting the end face of the optical fiber flat, and forming a round hole with the diameter of 10-100 mu m and the depth of 10-200 mm by laser processing;
s2: the end face of the optical fiber to be connected is cut flat, and the optical fiber and the end face of the optical fiber are welded through the circular hole to form an FP air cavity;
s3: mounting the FP air cavity on a metal sheet;
s4: and installing a metal sheet in the packaging outer tube to finish the manufacture of the extreme environment resistant optical fiber Fabry-Perot temperature sensor.
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| CN202010048232.XA CN111238679A (en) | 2020-01-16 | 2020-01-16 | Extreme environment resistant optical fiber Fabry-Perot temperature sensor and manufacturing method thereof |
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| CN202010048232.XA CN111238679A (en) | 2020-01-16 | 2020-01-16 | Extreme environment resistant optical fiber Fabry-Perot temperature sensor and manufacturing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964386A (en) * | 2021-02-23 | 2021-06-15 | 山东省科学院激光研究所 | Optical fiber FP resonant cavity temperature sensor and manufacturing method thereof |
| CN114485986A (en) * | 2021-12-31 | 2022-05-13 | 中国空气动力研究与发展中心超高速空气动力研究所 | Optical fiber FP temperature sensor with enhanced sensitivity of external structure and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090003759A1 (en) * | 2007-01-16 | 2009-01-01 | Baker Hughes Incorporated | Distributed Optical Pressure and Temperature Sensors |
| CN201575820U (en) * | 2010-01-09 | 2010-09-08 | 常州南方通信科技有限公司 | Non-intrinsic Fabry-Perot sensor |
| CN110118614A (en) * | 2019-05-29 | 2019-08-13 | 电子科技大学 | The sapphire fiber grating sensor and its temperature checking method of anti-extreme environment |
| CN110262090A (en) * | 2019-06-28 | 2019-09-20 | 上海理工大学 | A kind of non-volatile fiber-optical switch structure and preparation method |
| CN110617901A (en) * | 2019-09-25 | 2019-12-27 | 北京航空航天大学 | Sapphire optical fiber F-P high-temperature sensor with inclined reflection surface, preparation method and temperature sensing system |
-
2020
- 2020-01-16 CN CN202010048232.XA patent/CN111238679A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090003759A1 (en) * | 2007-01-16 | 2009-01-01 | Baker Hughes Incorporated | Distributed Optical Pressure and Temperature Sensors |
| CN201575820U (en) * | 2010-01-09 | 2010-09-08 | 常州南方通信科技有限公司 | Non-intrinsic Fabry-Perot sensor |
| CN110118614A (en) * | 2019-05-29 | 2019-08-13 | 电子科技大学 | The sapphire fiber grating sensor and its temperature checking method of anti-extreme environment |
| CN110262090A (en) * | 2019-06-28 | 2019-09-20 | 上海理工大学 | A kind of non-volatile fiber-optical switch structure and preparation method |
| CN110617901A (en) * | 2019-09-25 | 2019-12-27 | 北京航空航天大学 | Sapphire optical fiber F-P high-temperature sensor with inclined reflection surface, preparation method and temperature sensing system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964386A (en) * | 2021-02-23 | 2021-06-15 | 山东省科学院激光研究所 | Optical fiber FP resonant cavity temperature sensor and manufacturing method thereof |
| CN114485986A (en) * | 2021-12-31 | 2022-05-13 | 中国空气动力研究与发展中心超高速空气动力研究所 | Optical fiber FP temperature sensor with enhanced sensitivity of external structure and preparation method thereof |
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