CN111223672B - Impact self-sensing supercapacitor with micro short-circuit structure and application - Google Patents
Impact self-sensing supercapacitor with micro short-circuit structure and application Download PDFInfo
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- 239000003990 capacitor Substances 0.000 claims abstract description 88
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- 239000003292 glue Substances 0.000 claims description 21
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 230000003321 amplification Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 10
- 239000011231 conductive filler Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 8
- 239000003822 epoxy resin Substances 0.000 claims description 7
- 229920000647 polyepoxide Polymers 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 6
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- 238000007711 solidification Methods 0.000 claims description 6
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- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000003792 electrolyte Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 239000012745 toughening agent Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 238000009516 primary packaging Methods 0.000 claims description 3
- 239000002356 single layer Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000005538 encapsulation Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 claims 1
- 230000010354 integration Effects 0.000 abstract description 6
- 230000001052 transient effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000004382 potting Methods 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
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- 239000010936 titanium Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/10—Multiple hybrid or EDL capacitors, e.g. arrays or modules
- H01G11/12—Stacked hybrid or EDL capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/08—Shock-testing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/26—Electrodes characterised by their structure, e.g. multi-layered, porosity or surface features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/78—Cases; Housings; Encapsulations; Mountings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/78—Cases; Housings; Encapsulations; Mountings
- H01G11/82—Fixing or assembling a capacitive element in a housing, e.g. mounting electrodes, current collectors or terminals in containers or encapsulations
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electric Double-Layer Capacitors Or The Like (AREA)
Abstract
The invention discloses an impact self-sensing super capacitor with a micro short-circuit structure and application thereof, belonging to the technical field of super capacitors, wherein the super capacitor is of a series laminated structure, an upper layer monomer is a common structure monomer capacitor, and a plurality of monomer capacitors are connected in series to form a laminated upper layer capacitor; the positive electrode of the bottom monomer is coated with a conductive adhesive contact array, the positive electrode and the negative electrode are connected by an elastic flange to form a monomer capacitor with a micro short circuit structure, the upper capacitor and the bottom monomer are connected in series and stacked to form an integrated structure, when high overload impact occurs, the positive electrode and the negative electrode of the bottom monomer capacitor are subjected to micro short circuit, and output voltage is subjected to transient jump, so that overload impact is sensed; under non-impact conditions, the supercapacitor is normally powered. The super capacitor has the function of impact sensing besides the function of a basic capacitor, and realizes the integration of a sensor and an energy storage device.
Description
Technical Field
The invention belongs to the technical field of super capacitors, and particularly relates to an impact self-sensing super capacitor with a micro short-circuit structure and application thereof.
Background
The super capacitor has the advantages of large charging and discharging current, long cycle life, good shock resistance and the like, and is often applied to an electrical system to be used as a power supply or a standby power supply. In the high overload impact detection field, a super capacitor is used as a power supply part to be used together with a sensor, and the super capacitor supplies power for impact, so that the power supply can normally supply power to the sensor in the high overload impact environment, and the reliable detection of the impact is ensured.
The energy and the sensor work in the system respectively, the degree of integration of the device is not high, the function is single, the reduction of the volume of the impact measurement system is not facilitated to a certain degree, and the application of the super capacitor is limited.
Disclosure of Invention
The invention aims to provide an impact self-sensing super capacitor with a micro short-circuit structure and application thereof; the super capacitor is characterized in that a series laminated structure is adopted in the super capacitor, an upper layer monomer is of a common structure, namely, a positive electrode, a diaphragm and a negative electrode are connected by a rigid flange, current collectors are attached to the outer sides of the positive electrode and the negative electrode to form a monomer capacitor, and the positive current collectors and the negative current collectors of two adjacent monomer capacitors are stacked together in sequence and connected in series to form the series laminated structure of a plurality of monomer capacitors; coating a conductive adhesive contact array on a positive electrode of the monomer at the bottommost layer in advance, connecting the positive electrode and the negative electrode by using an elastic flange to form a monomer capacitor with a micro short circuit structure, then assembling the monomer capacitor and a series laminated structure of a plurality of monomer capacitors into an integrated structure, encapsulating the integrated structure by using 712 curing adhesive, primarily packaging, and finishing curing by pressing a heavy object; and after solidification, injecting electrolyte into a cavity between capacitor electrodes by using a reserved liquid injection needle during primary packaging, then pulling out the needle head for sealing, then placing the integral structure in a plastic shell with a proper shape, carrying out secondary filling and solidification to form an elastic structure, respectively leading out wires from the positive electrode and the negative electrode at the head and the tail of the device, and then filling and sealing by using a pouring sealant to obtain the impact self-sensing supercapacitor with the micro-short circuit structure.
The height of the conductive adhesive contact array is shorter than the width of the elastic flange, so that the conductive adhesive contact array and the negative electrode are kept disconnected under the non-impact condition of the single capacitor, and the normal power supply capacity of the super capacitor is not influenced; when the positive electrode and the negative electrode are compressed axially during high overload impact, the electrode distance is reduced, the conductive adhesive contact array is in contact with the negative electrode to form a micro short circuit, and the output voltage jumps downwards instantly, so that the super capacitor senses an overload impact response signal and self-power supply of the super capacitor to a circuit is realized by utilizing self energy storage.
The conductive adhesive contact array is formed by coating conductive adhesive with conductive characteristics on an electrode film of a supercapacitor monomer by using a dispenser, and curing at a high temperature for one hour; the other electrode does not carry out additional operation; the glue dispensing amount of the conductive glue contact array is kept consistent, glue dispensing heads of the glue dispensing machine are kept consistent, the height of each glue dispensing point is guaranteed to be consistent and lower than the height between two layers of electrodes, the number of single-layer glue dispensing points is in central symmetry distribution, and the stress distribution of the electrodes is guaranteed to be uniform; adopt elastic flange or insulating elastic glue to support and seal between two-layer electrode, guarantee ultracapacitor system can remain stable output voltage under normal condition, guarantees simultaneously that little short circuit can in time break off after external impact is removed.
The laminated single body with the conductive adhesive contact array and other common super capacitor single bodies are positioned at the bottom of the whole body when being assembled; during installation, the bottom of the device faces to the impact direction, when impact occurs, a plurality of monomers on the top layer simultaneously serve as the mass block, the contact force between the conductive adhesive micro short circuit contact array and the electrode is increased, and micro short circuit formation is guaranteed.
The conductive adhesive is prepared by adopting epoxy resin as a base material, doping a toughening agent and a conductive filler in the epoxy resin base material and fully mixing, wherein the conductive filler is activated carbon powder, so that the energy storage performance of the electrode is additionally improved besides the conductivity; the doping proportion of the activated carbon is controlled by controlling the proportion of the components of the base material and the conductive filler to be close to a critical value, namely controlling the resistivity in a high-end range, and ensuring that few energy is lost by a capacitor monomer during micro short circuit.
The impact self-sensing super capacitor with the micro short-circuit structure is used when being fully charged; when in use, the device can normally supply power to the outside, and is also externally connected with a differential amplification circuit consisting of an OPA316 operational amplifier to obtain the negative jump of the capacitor voltage during impact so as to finish impact identification; two ends of the capacitor are used as power supplies to supply power to the differential amplification circuit, processing and amplification of an impact response signal are completed while the circuit works stably, and self-sensing characteristics of the device are really realized; the sensor and the energy supply are integrated in a real sense, the problem that the sensor needs extra power supply in the conventional high-overload impact detection is solved, the size of detection equipment can be effectively reduced, and the sensor and the method are suitable for being applied to certain occasions with strict requirements on the size of devices.
The invention has the beneficial effects that: by adopting the micro short circuit structure, the super capacitor has the sensor function besides the basic capacitor function, the integration of the sensor and the energy storage device is realized, the problem that the conventional impact sensor needs additional power supply can be solved, a signal processing mode for self-powering the circuit by utilizing the energy storage of the device is provided, the integration of a plurality of device functions in a single device is realized, the integration development of a complex system is facilitated, and the application occasion of the super capacitor is expanded.
Drawings
FIG. 1 is a schematic structural diagram of an impact self-sensing supercapacitor with a micro-short circuit structure.
Fig. 2 is a schematic diagram of a differential amplifier circuit.
Reference numbers in the figures: positive electrode 1, negative electrode 2, current collector 3, rigid flange 4, shell 5, pouring sealant 6, elastic flange 7 and conductive adhesive contact array 8
Detailed Description
The invention aims to provide an impact self-sensing super capacitor with a micro short-circuit structure and an application method; the invention is further described below with reference to the figures and examples. FIG. 1 is a schematic structural diagram of an impact self-sensing supercapacitor with a micro-short circuit structure. The super capacitor shown in the figure adopts a series laminated structure, the upper layer of monomer capacitors are of a common structure, namely, a positive electrode 1 and a negative electrode 2 are connected by a rigid flange 4, current collectors 3 are attached to the positive outer side and the negative outer side to form a monomer capacitor, and the positive current collectors and the negative current collectors of two adjacent monomer capacitors are overlapped and sequentially stacked and connected in series to form the series laminated structure of a plurality of monomer capacitors; a conductive adhesive contact array 8, namely a micro short circuit structure, is coated on a positive electrode 1 of the monomer capacitor at the bottommost layer in advance, the positive electrode 1 and a negative electrode 2 are connected through an elastic flange 7 to form the monomer capacitor with the micro short circuit structure, then the monomer capacitor and a series laminated structure of a plurality of monomer capacitors are arranged in a shell 5, and potting adhesive 6 is used for potting, so that the impact self-sensing super capacitor with the micro short circuit structure is obtained.
The height of the conductive adhesive contact array is shorter than the width of the elastic flange, so that the conductive adhesive contact array 8 and a negative electrode are kept disconnected under the non-impact condition of the single capacitor, and the normal power supply capacity of the super capacitor is not influenced; when the positive electrode and the negative electrode are compressed axially during high overload impact, the electrode distance is reduced, the conductive adhesive contact array 8 is in contact with the negative electrode 2 to form a micro short circuit, and the output voltage jumps downwards instantly, so that the super capacitor senses overload impact response signals, and self-powered signals of the circuit are processed by the super capacitor by utilizing self energy storage.
The conductive adhesive contact array is formed by coating conductive adhesive with conductive characteristics on an electrode film of a supercapacitor monomer by using a dispenser, and curing at a high temperature for one hour; the other electrode does not carry out additional operation; the glue dispensing amount of the conductive glue contact array is kept consistent, glue dispensing heads of the glue dispensing machine are kept consistent, the height of each glue dispensing point is guaranteed to be consistent and lower than the height between two layers of electrodes, the number of single-layer glue dispensing points is in central symmetry distribution, and the stress distribution of the electrodes is guaranteed to be uniform; adopt elastic flange or insulating elastic glue to support and seal between two-layer electrode, guarantee ultracapacitor system can remain stable output voltage under normal condition, guarantees simultaneously that little short circuit can in time break off after external impact is removed.
The laminated single body with the conductive adhesive contact array and other common super capacitor single bodies are positioned at the bottom of the whole body when being assembled; during installation, the bottom of the device faces to the impact direction, when impact occurs, a plurality of single capacitors on the top layer serve as the mass block at the same time, the contact force between the conductive adhesive contact array and the electrode is increased, and micro short circuit is guaranteed.
The conductive adhesive is prepared by adopting epoxy resin as a base material, doping a toughening agent and a conductive filler in the epoxy resin base material and fully mixing, wherein the conductive filler is activated carbon powder, so that the energy storage performance of the electrode is additionally improved besides the conductivity; the doping proportion of the activated carbon is controlled by controlling the proportion of the components of the base material and the conductive filler to be close to a critical value, namely controlling the resistivity in a high-end range, and ensuring that few energy is lost by a capacitor monomer during micro short circuit.
In this example, the positive and negative electrode-current collectors were both coated with titanium-based ruthenium oxide, and the electrolyte was 38% sulfuric acid solution.
The super capacitor is internally of a serial laminated structure, the upper layer of monomer capacitors are of a common structure and are formed by stacking a positive electrode, a diaphragm and a negative electrode in sequence, and a positive current collector and a negative current collector of two adjacent monomer capacitors are stacked together to form a serial structure; according to the method, as shown in fig. 1, a conductive adhesive dot array is applied to a positive electrode of a monomer capacitor at the bottommost layer in advance, epoxy resin is used as a base material, a toughening agent and activated carbon are mixed uniformly in proportion, the height of each adhesive point is kept consistent and curing is completed, a negative electrode is not changed, the two electrodes are separated in an elastic flange mode, the structure is encapsulated by 712 curing adhesive, primary encapsulation is performed, and curing is completed by pressing a weight of 50 g; and after solidification, injecting electrolyte into a cavity between the electrodes of the capacitor by using a reserved injection needle during primary packaging, then pulling out the needle head for sealing, then placing the integral structure into a plastic shell with a proper shape, performing secondary filling and solidification to form an elastic structure, and respectively leading out wiring from the positive electrode and the negative electrode at the head and the tail of the device to finish the preparation of the device.
The capacitor is used when fully charged. When in use, the device can normally supply power to the outside, and is also externally connected with a differential amplification circuit shown in figure 2 to acquire the negative jump of the capacitor voltage during impact, thereby completing impact identification. In the embodiment, two ends of the capacitor are used as power supplies to supply power to the differential amplification circuit, so that the processing and amplification of the impulse response signal are completed while the circuit works stably, and the self-sensing of the device is really realized. The differential amplifier circuit shown in fig. 2 uses a low power consumption and low voltage OPA316 operational amplifier; respectively connecting the positive electrode and the negative electrode of the self-sensing super capacitor in parallel with the bypass capacitor and then connecting the bypass capacitor to a positive power source end and a ground end of the differential circuit, connecting a negative power source end of the circuit with the ground end, and directly supplying power to the circuit by using the capacitor; the problem of self-sensing capacitor in the discharge process voltage is not zero all the time this characteristic causes the interference to impact recognition is solved to accomplish the effective amplification to device output signal under the condition that need not the synchronous power supply of external power, gain effect can reach tens of times.
The invention really realizes the integrated integration of sensing and energy supply, overcomes the problem that the sensor needs additional power supply in the prior high overload impact detection, can effectively reduce the volume of detection equipment, and is very suitable for being applied to certain occasions with strict requirements on the volume of devices.
Claims (5)
1. An impact self-sensing super capacitor with a micro short circuit structure is characterized in that a series laminated structure is adopted in the super capacitor, an upper layer of single bodies are of a common structure, namely, positive electrodes, diaphragms and negative electrodes are connected through rigid flanges, current collectors are attached to the outer sides of the positive electrodes and the negative electrodes to form a single capacitor, and positive current collectors and negative current collectors of two adjacent single capacitors are stacked together in sequence and connected in series to form a series laminated structure of a plurality of single capacitors; coating a conductive adhesive contact array on a positive electrode of the monomer at the bottommost layer in advance, connecting the positive electrode and the negative electrode by using an elastic flange to form a monomer capacitor with a micro short circuit structure, then assembling the monomer capacitor and a series laminated structure of a plurality of monomer capacitors into an integrated structure, encapsulating the integrated structure into one package by using 712 curing adhesive, and pressing a heavy object to finish curing; after solidification, injecting electrolyte into a cavity between capacitor electrodes by using a liquid injection needle retained during primary packaging, then pulling out the needle head for sealing, then placing the integral structure in a plastic shell with a proper shape, carrying out secondary encapsulation and solidification to form an elastic structure, respectively leading out wires from the positive electrode and the negative electrode at the head and the tail of the device, and then encapsulating by using an encapsulating adhesive to obtain the impact self-sensing supercapacitor with the micro-short circuit structure;
the height of the conductive adhesive contact array is shorter than the width of the elastic flange, so that the conductive adhesive contact array and the negative electrode are kept disconnected under the non-impact condition of the single capacitor, and the normal power supply capacity of the super capacitor is not influenced; when the positive electrode and the negative electrode are compressed axially during high overload impact, the electrode distance is reduced, the conductive adhesive contact array is contacted with the negative electrode to form a micro short circuit, and the output voltage jumps downwards instantly, so that the super capacitor senses overload impact response signals, and self-power supply of the circuit is realized by utilizing self energy storage of the super capacitor.
2. The impact self-sensing supercapacitor with the micro-short circuit structure according to claim 1, wherein the conductive adhesive contact array is formed by coating conductive adhesive with conductive characteristics on an electrode film of a supercapacitor monomer by using a dispenser, and curing at high temperature for one hour; the other electrode does not carry out additional operation; the glue dispensing amount of the conductive glue contact array is kept consistent, glue dispensing heads of the glue dispensing machine are kept consistent, the height of each glue dispensing point is guaranteed to be consistent and lower than the height between two layers of electrodes, the number of single-layer glue dispensing points is in central symmetry distribution, and the stress distribution of the electrodes is guaranteed to be uniform; adopt elastic flange or insulating elastic glue to support and seal between two-layer electrode, guarantee ultracapacitor system can remain stable output voltage under normal condition, guarantees simultaneously that little short circuit can in time break off after external impact is removed.
3. The impact self-sensing supercapacitor with the micro-short circuit structure according to claim 1, wherein the laminated single body with the conductive adhesive contact array and other common supercapacitor single bodies are positioned at the bottom of the whole body when being assembled; during installation, the bottom of the device faces to the impact direction, when impact occurs, a plurality of monomers on the top layer simultaneously serve as the mass block, the contact force between the conductive adhesive micro short circuit contact array and the electrode is increased, and micro short circuit formation is guaranteed.
4. The impact self-sensing supercapacitor with the micro-short-circuit structure according to claim 1, wherein the conductive adhesive is formed by fully mixing epoxy resin serving as a base material, a toughening agent and conductive filler which are doped in the epoxy resin base material, wherein the conductive filler is activated carbon powder, so that the energy storage performance of the electrode is additionally improved besides the conductivity; the doping proportion of the activated carbon is controlled by controlling the proportion of the components of the base material and the conductive filler to be close to a critical value, namely controlling the resistivity in a high-end range, and ensuring that few energy is lost by a capacitor monomer during micro short circuit.
5. Use of the impact self-sensing supercapacitor of the micro-short circuit structure of claim 1; the impact self-sensing super capacitor with the micro short-circuit structure is used when the super capacitor is fully charged; when in use, the device can normally supply power to the outside, and is also externally connected with a differential amplification circuit consisting of an OPA316 operational amplifier to obtain the negative jump of the capacitor voltage during impact so as to finish impact identification; two ends of the capacitor are used as power supplies to supply power to the differential amplification circuit, processing and amplification of an impact response signal are completed while the circuit works stably, and self-sensing characteristics of the device are really realized; the sensor and the energy supply are integrated in a real sense, the problem that the sensor needs extra power supply in the conventional high-overload impact detection is solved, and the size of detection equipment can be effectively reduced.
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| WO2017201591A1 (en) * | 2016-05-23 | 2017-11-30 | Araujo Dayrell Ivan | Graphene supercapacitor design and manufacture |
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| CN110542767A (en) * | 2019-09-25 | 2019-12-06 | 杭州电子科技大学 | high-sensitivity self-powered acceleration sensor and preparation method thereof |
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