CN111195628A - Be used for silicon chip substandard product to retrieve and use belt cleaning device - Google Patents
Be used for silicon chip substandard product to retrieve and use belt cleaning device Download PDFInfo
- Publication number
- CN111195628A CN111195628A CN202010044465.2A CN202010044465A CN111195628A CN 111195628 A CN111195628 A CN 111195628A CN 202010044465 A CN202010044465 A CN 202010044465A CN 111195628 A CN111195628 A CN 111195628A
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- Prior art keywords
- wall
- welded
- shell
- liquid
- cleaning device
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 59
- 239000010703 silicon Substances 0.000 title claims abstract description 59
- 238000004140 cleaning Methods 0.000 title claims abstract description 44
- 230000002950 deficient Effects 0.000 claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- 238000005192 partition Methods 0.000 claims abstract description 19
- 238000004064 recycling Methods 0.000 claims abstract description 18
- 239000007788 liquid Substances 0.000 claims description 69
- 239000013049 sediment Substances 0.000 claims description 14
- 238000003860 storage Methods 0.000 claims description 13
- 238000007599 discharging Methods 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 2
- 239000010813 municipal solid waste Substances 0.000 claims 3
- 238000007665 sagging Methods 0.000 claims 2
- 238000007789 sealing Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract description 46
- 238000011027 product recovery Methods 0.000 abstract 1
- 238000003466 welding Methods 0.000 description 16
- 238000001914 filtration Methods 0.000 description 15
- 239000002699 waste material Substances 0.000 description 11
- 239000011148 porous material Substances 0.000 description 8
- 230000001680 brushing effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 2
- 235000017491 Bambusa tulda Nutrition 0.000 description 2
- 241001330002 Bambuseae Species 0.000 description 2
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 2
- 239000011425 bamboo Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005201 scrubbing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a cleaning device for silicon wafer defective product recovery, which comprises a cleaning mechanism and a bottom plate, wherein the cleaning mechanism comprises four support columns and a tubular shell, the inner wall of the shell, which is close to the bottom end, is fixedly connected with a same inclined flow plate, the inner walls of two sides of the shell are fixedly connected with a plurality of cushion strips, the tops of the cushion strips are provided with a same net cage, a plurality of partition mechanisms which are distributed at equal intervals are arranged in the net cage, each partition mechanism comprises a partition plate and a plurality of cross rods, two ends of each partition plate and each cross rod are respectively and fixedly connected with the inner walls of two sides of the shell, and the outer wall of one side, opposite to the two adjacent cross. The cleaning device for recycling the defective silicon wafers can separate the defective silicon wafers and wash and scrub the surfaces of the defective silicon wafers, so that the cleaning sufficiency of the cleaning device for the defective silicon wafers is improved.
Description
Technical Field
The invention relates to the technical field of cleaning devices, in particular to a cleaning device for recycling silicon wafer defective products.
Background
The silicon chip is an important material for manufacturing integrated circuits, and various semiconductor devices can be manufactured by means of photoetching, ion implantation and the like on the silicon chip. In the production and processing processes of the silicon wafers, a large number of defective silicon wafers are generated, and the defective silicon wafers have high recycling value, so the defective silicon wafers need to be recycled, and the defective silicon wafers need to be cleaned by a cleaning device during recycling.
Most of the existing cleaning devices for recycling the defective silicon wafers have the following defects that the defective silicon wafers are cleaned in a centralized mode, and the surfaces of the defective silicon wafers are flat and smooth, so that the defective silicon wafers are easy to adsorb together during cleaning, the defective silicon wafers are not cleaned completely, and in conclusion, the existing cleaning devices for recycling the defective silicon wafers cannot well meet actual needs.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides a cleaning device for recycling defective silicon wafers.
In order to achieve the purpose, the invention adopts the following technical scheme:
a cleaning device for recovering inferior silicon wafer products comprises a cleaning mechanism and a bottom plate, wherein the cleaning mechanism comprises four supporting columns and a tubular shell, the inner wall of the shell, which is close to the bottom end, is fixedly connected with a same inclined flow plate, the inner walls of the two sides of the shell are fixedly connected with a plurality of cushion placing strips, the tops of the cushion placing strips are placed in a same net cage, a plurality of partition mechanisms which are distributed equidistantly are arranged in the net cage, each partition mechanism comprises a partition plate and a plurality of cross rods, the two ends of each partition plate and the two ends of each cross rod are respectively and fixedly connected with the inner walls of the two sides of the shell, the outer wall of one side, opposite to the two adjacent cross rods, of each cross rod is fixedly connected with a plurality of vertical rods, the outer walls of the two sides of each vertical rod and the inner walls of the two sides of the shell are respectively and fixedly connected with brush strips through bolts, the bottom of support column all is fixed with electric telescopic handle, the same roof of electric telescopic handle's top fixedly connected with through the bolt.
As a still further scheme of the invention: the top of bottom plate is passed through the bolt fastening and is had the liquid reserve tank, and the bottom inner wall of liquid reserve tank passes through the bolt fastening and has the drawing liquid pump, and open at the top of liquid reserve tank has down liquid hole and outage, and the inner wall of down liquid hole and outage has welded down liquid pipe and fluid-discharge tube respectively, and the exit end at the drawing liquid pump is pegged graft to the bottom of fluid-discharge tube.
As a still further scheme of the invention: the utility model discloses a convenient operation, including liquid reserve tank, the inner wall welding in miscellaneous hole of row has the mouth of draining to open near the bottom position of one side outer wall of liquid reserve tank, and the inner wall welding in miscellaneous hole of row has the miscellaneous pipe of row, and the lateral wall of liquid reserve tank is opened there is the backward flow hole, and the inner wall welding in backward flow hole has the connecting pipe, and the valve has been cup jointed to the one end of connecting pipe.
As a still further scheme of the invention: the inner wall that the liquid reserve tank is close to the bottom has the filter screen panel of same L shape with the welding of bottom inner wall, and the both ends of filter screen panel and the both sides inner wall welding of liquid reserve tank, arrange the tip of miscellaneous pipe and connecting pipe and be located the filter screen panel.
As a still further scheme of the invention: open the top of roof has a plurality of through-holes, and the shunt tubes has all been welded to the inner wall of through-hole, and the welding of the top of shunt tubes has same drum, and the reposition of redundant personnel section of thick bamboo has all been welded to the bottom of shunt tubes, and a plurality of screw holes have all been opened to the bottom of reposition of redundant personnel section of thick bamboo, and the equal screw thread of the inner wall of screw hole is pegged graft and is had the shower head, and open at the top of drum has the feed liquor hole, and the inner wall screw thread in feed liquor hole is pegged graft and.
As a still further scheme of the invention: the lateral wall of casing is opened there are two at least mounting holes, and the inner wall of mounting hole all is fixed with the push rod motor through the bolt, and the extension rod of push rod motor all is fixed through the lateral wall of bolt and box with a net.
As a still further scheme of the invention: and a vibration motor is fixed on the outer wall of the bottom of the oblique dropping plate through a bolt and is positioned at one end close to the lower end of the oblique dropping plate.
As a still further scheme of the invention: the bottom of the outer wall of one side of the shell is provided with a sundry outlet, the inner wall of the sundry outlet is welded with a rectangular pipe placed in an inclined mode, the rectangular pipe is located near the lower end of an inclined trickling plate, one end of the rectangular pipe is welded with one end of the adapter, two stand columns are welded on the outer walls of the two sides of the shell, and the bottom ends of the stand columns are welded with the top of the bottom plate.
As a still further scheme of the invention: the bottom of rectangular pipe is opened there is the mounting hole, and the inner wall welding of mounting hole has the sediment fill, and the bottom screw thread of sediment fill has cup jointed the closing cap, and the one side inner wall that the casing was kept away from to the sediment fill is close to the top position welding and has the filter plate, and the lateral wall of filter plate is opened has multirow filtration pore, and the filtration pore is round platform shape structure, and the one end diameter ratio filtration pore that the filtration pore is close to the casing is less than the one end diameter that the casing was kept away from to.
The invention has the beneficial effects that:
1. by arranging the net cage and the separating mechanism, when the defective silicon wafers are placed, the defective silicon wafers can be sequentially placed in the space separated by the separating mechanism, so that the silicon wafers can be separately placed, the silicon wafers are prevented from being mutually adsorbed due to smooth surfaces in the cleaning process, and the arrangement of the pad placing strip, the push rod motor and the brush strip is combined, in the cleaning process, the push rod motor drives the net cage to shake in a reciprocating manner, defective silicon wafers can shake when the net cage moves in a reciprocating manner, but the defective silicon wafers and the net cage can move relatively, the brush strips and the net cage move synchronously, so that the defective silicon wafer and the brush strips move relatively, the brush strips brush the surfaces of the defective silicon wafer along with the sliding of the net cage, the end face of the brush strip is Y-shaped, so that the defective silicon wafer can flatten the end part of the brush strip, namely the brush strip is unfolded, the brushing area is increased, and the brushing sufficiency is improved;
2. by arranging the rectangular pipe, the filter plate and the sediment hopper, liquid generated during cleaning and sundries washed off can flow into the rectangular pipe along the inclined flow plate, when the cleaning liquid enters the rectangular pipe, the cleaning liquid is filtered by the filter plate, the sundries are filtered off and are precipitated in the sediment hopper, so that the waste liquid is filtered, the waste liquid is recycled, and the working personnel can conveniently select whether to recycle the waste liquid or not by combining the arrangement of the valve;
3. through setting up vibrating motor, vibrating motor drives and trickles the board vibration to one side, and then supplementary waste liquid ejection of compact fast, avoids debris to drip to one side and accumulates on the board.
Drawings
FIG. 1 is a schematic sectional view of a main view of a cleaning apparatus for recovering inferior silicon wafers according to an embodiment 1 of the present invention;
FIG. 2 is a schematic structural view of portion A of FIG. 1;
FIG. 3 is a schematic structural view of a net cage and a partition plate of a cleaning apparatus for silicon wafer inferior recycling according to embodiment 1 of the present invention;
FIG. 4 is a schematic partial front view showing a cross-sectional structure of a cleaning apparatus for recovering inferior silicon wafers according to embodiment 2 of the present invention.
In the figure: the device comprises a base plate 1, supporting columns 2, a shell 3, an electric telescopic rod 4, a spray header 5, a shunt cylinder 6, a shunt tube 7, a cylinder 8, a partition plate 9, a hose 10, a cross rod 11, a vertical rod 12, an inclined flow plate 13, a vertical column 14, a vibrating motor 15, a cushion placing strip 16, a net cage 17, a filtering hole 18, a rectangular pipe 19, a filtering plate 20, a switching joint 21, a liquid storage tank 22, a liquid pump 23, a valve 24, a sediment hopper 25, a hairbrush strip 26 and a filter screen cover 27.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
Referring to fig. 1-3, a cleaning device for recycling inferior silicon wafer products comprises a cleaning mechanism and a bottom plate 1, wherein the cleaning mechanism comprises four support columns 2 and a tubular shell 3, the inner wall of the shell 3 close to the bottom end is welded with a same inclined flow plate 13, the inner walls of two sides of the shell 3 are welded with a plurality of cushion placing strips 16, the top of each cushion placing strip 16 is provided with a same net cage 17, the net cage 17 is internally provided with a plurality of partition mechanisms distributed at equal intervals, each partition mechanism comprises a partition plate 9 and a plurality of cross rods 11, two ends of each partition plate 9 and each cross rod 11 are respectively welded with the inner walls of two sides of the shell 3, the outer wall of one side, opposite to each two adjacent cross rods 11, is welded with a plurality of vertical rods 12, the outer walls of two sides of each vertical rod 12 and the inner walls of the two sides of the shell 3 are both fixed with brush strips 26 through bolts, when the net cage 17 moves in a reciprocating manner, the defective silicon wafers will shake, but will move relative to the net cage 17 (due to inertia), the brush strips 26 and the net cage 17 move synchronously, so that the defective silicon wafers also move relative to the brush strips 26, the brush strips 26 brush the surfaces of the defective silicon wafers along with the sliding of the net cage 17, and the end face of the brush strip 26 is Y-shaped, so that the defective silicon wafer can flatten the end part of the brush strip 26, brush strip 26 is expanded promptly, has increased the area of scrubbing, improves the sufficiency of scrubbing, and the end face structure of division board 9 is the V-arrangement that handstand was placed, and the bottom of four support columns 2 all welds at the top of bottom plate 1, and the bottom of support column 2 all is fixed with electric telescopic handle 4 through the bolt, and the top welding of electric telescopic handle 4 has same roof, and further, electric telescopic handle 4's specification is the same, and electric telescopic handle 4 is connected with same switch one through the wire.
According to the invention, the liquid storage tank 22 is fixed on the top of the bottom plate 1 through bolts, the liquid pumping pump 23 is fixed on the inner wall of the bottom of the liquid storage tank 22 through bolts, furthermore, the liquid pumping pump 23 is connected with the same switch II through a wire, the top of the liquid storage tank 22 is provided with a liquid pouring hole and a liquid discharging hole, the inner walls of the liquid pouring hole and the liquid discharging hole are respectively welded with a liquid pouring pipe and a liquid discharging pipe, and the bottom end of the liquid discharging pipe is inserted into the outlet end of the liquid pumping pump 23.
Wherein, one side outer wall of liquid reserve tank 22 is close to the bottom position and opens there is the row miscellaneous hole, and the inner wall welding in row miscellaneous hole has row miscellaneous pipe, and the lateral wall of liquid reserve tank 22 is opened there is the backward flow hole, and the inner wall welding in backward flow hole has the connecting pipe, and the valve 24 has been cup jointed to the one end of connecting pipe, and the one end of valve 24 is pegged graft and is had adapter 21.
Wherein, open the top of roof has a plurality of through-holes, shunt tubes 7 have all been welded to the inner wall of through-hole, the top welding of shunt tubes 7 has same drum 8, shunt tubes 6 have all been welded to the bottom of shunt tubes 7, shunt tubes 6 and partition mechanism alternate distribution, a plurality of screw holes have all been opened to the bottom of shunt tubes 6, the equal screw thread of inner wall of screw hole is pegged graft and is had shower head 5, open at the top of drum 8 has the feed liquor hole, the inner wall screw thread in feed liquor hole is pegged graft and is had hose 10, the bottom of hose 10 is cup jointed on the top of fluid-.
Wherein, the lateral wall of casing 3 is opened there are two at least mounting holes, and the inner wall of mounting hole all is fixed with the push rod motor through the bolt, and the extension rod of push rod motor all is fixed with the lateral wall of box with a net 17 through the bolt, and further, the specification of push rod motor is the same, and the push rod motor is connected with same switch three through the wire.
Wherein, the bottom outer wall of the board 13 of trickling to one side has vibrating motor 15 through the bolt fastening, and vibrating motor 15 is located and is close to the lower one end of the board 13 of trickling to one side, and further, vibrating motor 15 is connected with switch four through the wire, and switch one, switch two, switch three and switch four all are connected with external power supply through the wire, and vibrating motor 15 drives the board 13 vibration of trickling to one side, and then supplementary waste liquid is ejection of compact fast, avoids debris to accumulate on the board 13 of trickling to one side.
Wherein, the position that one side outer wall of casing 3 is close to the bottom is opened there is a miscellaneous hole, and the inner wall welding that goes out miscellaneous hole has the rectangular pipe 19 that the slope was placed, and rectangular pipe 19 is located and is close to the lower one end of the board 13 that trickles to one side, and the one end of rectangular pipe 19 and the one end welding of adapter 21, and two stands 14 have all been welded to the both sides outer wall of casing 3, and the bottom of stand 14 all welds with the top of bottom plate 1.
Wherein, open the bottom of rectangular pipe 19 has the mounting hole, the inner wall welding of mounting hole has sediment fill 25, the bottom screw thread of sediment fill 25 has cup jointed the closing cap, one side inner wall that sediment fill 25 kept away from the casing is close to the top position welding and has filter plate 20, the lateral wall of filter plate 20 is opened there is multirow filtration pore 18, filtration pore 18 is round platform shape structure, the one end diameter ratio that filtration pore 18 is close to casing 3 is less than the one end diameter that casing 3 was kept away from to filtration pore 18, the liquid that produces during the washing and the debris that wash down can trickle down to rectangular pipe 19 along trickling to one side in the board 13, when getting into rectangular pipe 19, the washing liquid will receive the filtration of filter plate 20, debris will be filtered down, and deposit in sediment fill 25, this has realized the filtration to the waste liquid promptly, and then carry out reuse to the waste liquid.
When the silicon wafer cleaning machine is used, when defective silicon wafers are placed, the defective silicon wafers are sequentially placed in the spaces separated by the separating mechanism, the silicon wafers can be placed separately, the silicon wafers are prevented from being mutually adsorbed due to smooth surfaces in the cleaning process, in addition, the push rod motor is started during cleaning, the push rod motor drives the net cage 17 to perform reciprocating shaking, when the net cage 17 performs reciprocating movement, the defective silicon wafers can also perform shaking, but relative movement (due to inertia) exists between the defective silicon wafers and the net cage 17, the brush strips 26 and the net cage 17 perform synchronous movement, so that the defective silicon wafers and the brush strips 26 perform relative movement, the brush strips 26 perform brushing on the surfaces of the defective silicon wafers along with the sliding of the net cage 17, the end surfaces of the brush strips 26 are Y-shaped, the defective silicon wafers flatten the end parts of the brush strips 26, namely the brush strips 26 are unfolded, the brushing area is increased, the brushing sufficiency is improved, liquid generated during cleaning and cleaned impurities can flow into the inclined flow flowing plate 13, when getting into rectangular pipe 19 in, the washing liquid will receive the filtration of filter plate 20, debris will be filtered to get off to deposit in sediment fill 25, this has realized the filtration to the waste liquid promptly, and then carries out reuse to the waste liquid, and valve 24 can be convenient for whether staff chooses to carry out recycle to the waste liquid, and vibrating motor 15 drives the board 13 vibration of trickling to one side, and then supplementary waste liquid quick ejection of compact, avoids debris to accumulate on the board 13 of trickling to one side.
Example 2
Referring to fig. 4, the present embodiment is different from embodiment 1 in that the same L-shaped filter screen 27 is welded to the inner wall of the liquid storage tank 22 near the bottom and the inner wall of the bottom, both ends of the filter screen 27 are welded to the inner walls of both sides of the liquid storage tank 22, and the ends of the impurity discharge pipe and the connecting pipe are both located in the filter screen 27.
The working principle is as follows: when in use, the filter screen cover 27 can filter the liquid filtered by the filter plate again, so that the filtering sufficiency is improved.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (9)
1. A cleaning device for silicon chip defective product recycling comprises a cleaning mechanism and is characterized by further comprising a bottom plate (1), wherein the cleaning mechanism comprises four supporting columns (2) and a tubular shell (3), the inner wall of the shell (3) close to the bottom end is fixedly connected with a same inclined flow plate (13), the inner walls of the two sides of the shell (3) are fixedly connected with a plurality of cushion placing strips (16), the top of each cushion placing strip (16) is provided with a same net cage (17), a plurality of partition mechanisms distributed at equal intervals are arranged in each net cage (17), each partition mechanism comprises a partition plate (9) and a plurality of cross rods (11), the two ends of each partition plate (9) and each cross rod (11) are respectively and fixedly connected with the inner walls of the two sides of the shell (3), the outer walls of one side, opposite to two adjacent cross rods (11), of each vertical rod (12) and the inner walls of the two sides of the shell (3) are respectively and are fixedly connected with a hairbrush strip (26, the end face structure of brush strip (26) is the Y shape that the level was placed, and the end face structure of division board (9) is the V-arrangement that the handstand was placed, four the equal fixed connection in bottom of support column (2) is at the top of bottom plate (1), and the bottom of support column (2) all is fixed with electric telescopic handle (4), the same roof of top fixedly connected with of electric telescopic handle (4) through the bolt.
2. The cleaning device for silicon chip substandard product recycling according to claim 1, wherein a liquid storage tank (22) is fixed on the top of the bottom plate (1) through bolts, a liquid pump (23) is fixed on the inner wall of the bottom of the liquid storage tank (22) through bolts, a liquid pouring hole and a liquid discharging hole are formed in the top of the liquid storage tank (22), a liquid pouring pipe and a liquid discharging pipe are welded on the inner walls of the liquid pouring hole and the liquid discharging hole respectively, and the bottom end of the liquid discharging pipe is inserted into the outlet end of the liquid pump (23).
3. The cleaning device for silicon chip substandard product recycling according to claim 2, wherein an outer wall of one side of the liquid storage tank (22) is provided with a trash discharging hole near the bottom, a trash discharging pipe is welded on the inner wall of the trash discharging hole, a return hole is formed on the side wall of the liquid storage tank (22), a connecting pipe is welded on the inner wall of the return hole, a valve (24) is sleeved at one end of the connecting pipe, and an adapter (21) is inserted at one end of the valve (24).
4. The cleaning device for silicon wafer substandard product recycling according to claim 3, wherein the inner wall of the liquid storage tank (22) near the bottom and the inner wall of the bottom are welded with the same L-shaped filter screen cover (27), both ends of the filter screen cover (27) are welded with the inner walls of both sides of the liquid storage tank (22), and the end parts of the impurity discharging pipe and the connecting pipe are both positioned in the filter screen cover (27).
5. The cleaning device for silicon chip substandard product recycling according to claim 3 or 4, characterized in that a plurality of through holes are formed in the top of the top plate, shunt tubes (7) are welded to the inner walls of the through holes, the same cylinder (8) is welded to the top ends of the shunt tubes (7), shunt tubes (6) are welded to the bottom ends of the shunt tubes (7), the shunt tubes (6) and the separating mechanisms are alternately distributed, a plurality of threaded holes are formed in the bottom of the shunt tubes (6), spray heads (5) are inserted into the inner walls of the threaded holes in a threaded manner, liquid inlet holes are formed in the top of the cylinder (8), hoses (10) are inserted into the inner walls of the liquid inlet holes in a threaded manner, and the bottom ends of the hoses (10) are sleeved on the top ends.
6. The cleaning device for silicon wafer defective recycling according to claim 5, wherein the side wall of the housing (3) is provided with at least two mounting holes, the inner walls of the mounting holes are fixed with push rod motors through bolts, and the extension rods of the push rod motors are fixed with the side wall of the net cage (17) through bolts.
7. The cleaning device for silicon chip defective recycling according to claim 6, wherein the vibrating motor (15) is fixed on the outer wall of the bottom of the inclined sagging plate (13) through bolts, and the vibrating motor (15) is positioned near the lower end of the inclined sagging plate (13).
8. The cleaning device for silicon chip substandard product recycling according to claim 7, characterized in that the outer wall of one side of the shell (3) is provided with a sundry hole near the bottom, the inner wall of the sundry hole is welded with a rectangular pipe (19) which is obliquely arranged, the rectangular pipe (19) is positioned near the lower end of the oblique dripping plate (13), one end of the rectangular pipe (19) is welded with one end of the adapter (21), the outer walls of two sides of the shell (3) are welded with two upright posts (14), and the bottom ends of the upright posts (14) are welded with the top of the bottom plate (1).
9. The cleaning device for silicon wafer defective product recycling according to claim 8, wherein a mounting hole is formed in the bottom of the rectangular tube (19), a sediment hopper (25) is welded to the inner wall of the mounting hole, a sealing cover is sleeved at the bottom end of the sediment hopper (25) in a threaded manner, a filter plate (20) is welded to the inner wall, close to the top end, of one side, away from the shell, of the sediment hopper (25), a plurality of rows of filter holes (18) are formed in the side wall of the filter plate (20), the filter holes (18) are of a circular truncated cone-shaped structure, and the diameter of one end, close to the shell (3), of each filter hole (18) is smaller than the diameter of one end, away from the shell (3), of each filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010044465.2A CN111195628A (en) | 2020-01-16 | 2020-01-16 | Be used for silicon chip substandard product to retrieve and use belt cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010044465.2A CN111195628A (en) | 2020-01-16 | 2020-01-16 | Be used for silicon chip substandard product to retrieve and use belt cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111195628A true CN111195628A (en) | 2020-05-26 |
Family
ID=70742080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010044465.2A Withdrawn CN111195628A (en) | 2020-01-16 | 2020-01-16 | Be used for silicon chip substandard product to retrieve and use belt cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111195628A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111842328A (en) * | 2020-07-28 | 2020-10-30 | 宣城知明灯机械设计有限公司 | Gear belt cleaning device for machining |
| CN111992529A (en) * | 2020-07-16 | 2020-11-27 | 南京灵雀智能制造有限公司 | Small machining tool cleaning equipment for machinery factory |
-
2020
- 2020-01-16 CN CN202010044465.2A patent/CN111195628A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111992529A (en) * | 2020-07-16 | 2020-11-27 | 南京灵雀智能制造有限公司 | Small machining tool cleaning equipment for machinery factory |
| CN111842328A (en) * | 2020-07-28 | 2020-10-30 | 宣城知明灯机械设计有限公司 | Gear belt cleaning device for machining |
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Application publication date: 20200526 |
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| WW01 | Invention patent application withdrawn after publication |