Preparation method of foamed ceramic material, foamed ceramic material and application of foamed ceramic material
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of optical absorption, in particular to a preparation method of a foamed ceramic material, the foamed ceramic material and application thereof.
[ background of the invention ]
Absorption spectroscopy based industrial gas analysis and monitoring techniques have been widely developed and used. Among them, a typical technique is a semiconductor laser absorption Spectroscopy (TDLAS), and measurement of a single or several absorption lines of molecules that are very close to each other and difficult to distinguish is realized mainly by using the characteristics that the narrow line width and the wavelength of a Tunable semiconductor laser change with the injection current. In the TDLAS technique, in order to realize the measurement of low concentration gas, a stronger absorption curve is obtained, and from the Beer-Lambert law directly, there are two ways that the increase of absorption can be adopted: one is to select a spectral line with strong absorption, and the other is to lengthen the optical path. The most direct method is to increase the equivalent optical length of the absorption cell.
In the prior art, the conventional TDLAS gas chambers mainly include White gas chambers, Herriott gas chambers, Chernin gas chambers and the like, and the optical path can be increased to several hundred meters in a certain volume. Such chambers require an increase in optical length, necessitating an increase in the volume and weight of the cell, and also making the cell more expensive. Therefore, research and development of new transmission media have been started in the industry.
The novel transmission medium mainly refers to a medium with high reflectivity for light transmission, so as to achieve the effect of increasing the optical path. Hollow core photonic band gap fibers (HC-PBFs) have been used for gas detection. However, when HC-PBFs are used as gas chambers for gas measurement, gas enters the optical fiber in a diffusion mode, and the response time of the system is longer due to the small gap and the slow diffusion speed, and effective improvement cannot be realized.
Somesfalean et al use a compact porous medium of powder compaction as the measurement medium, which due to the properties of the porous medium, results in an extended optical pathThe absorption is enhanced; ZrO investigated by Venturi et al2And Al2O3Oxygen uptake in ceramic porous media, 6mm ZrO was found2The porous medium can lengthen the optical path by 1000 times. However, the adoption of such a medium directly causes extremely low transmittance of an optical signal, and has quite high performance requirements on a detector which is adopted in a matching way, so that the detection cost is greatly increased.
[ summary of the invention ]
The invention aims to provide a preparation method of a foamed ceramic material, the foamed ceramic material and application of the foamed ceramic material in an absorption spectrum analysis technology, so that a micro air chamber with high reflectivity and adjustable porosity is realized, an equivalent optical path is obviously increased in a small volume, and the infiltrated atmosphere of the micro air chamber is accurately measured.
In order to solve the above technical problems, an embodiment of the present invention provides a method for preparing a foamed ceramic material, including the steps of: (1) foam pretreatment: soaking polyurethane foam into a sodium hydroxide solution for hydrolysis treatment, repeatedly kneading and washing with clear water, then soaking in a surfactant solution, taking out and extruding to remove the redundant surfactant solution, washing with clear water, and drying to obtain modified polyurethane foam; (2) preparing slurry: dissolving a dispersing agent in a solvent, adding a rheological agent, a binder and a sintering aid, and uniformly mixing; then adding a ceramic base material, and uniformly dispersing the ceramic base material by ultrasonic oscillation to obtain slurry; (3) slurry coating: placing the modified polyurethane foam into the slurry, and drying after complete impregnation; (4) and (3) sintering: and sintering the polyurethane foam subjected to slurry hanging in a muffle furnace to obtain the microporous foamed ceramic material.
Compared with the prior art, the embodiment of the invention utilizes the polyurethane foam as the framework, the micro air chamber with high reflectivity and adjustable porosity is sintered, the optical path can be increased by a small volume, and the measurement of the infiltrated atmosphere is further realized. The increase of the optical path is mainly related to the thickness of the microporous ceramic, the porosity of the material and the type of the ceramic, and the specific shape of the air chamber can be controlled by selecting the sponge with specific pores according to specific requirements.
Preferably, in the step (1), the sodium hydroxide solution is 10-20 wt%, the hydrolysis treatment is performed at 40-60 ℃ for 2-6 hours, and the surfactant is 0.1-12 wt% of carboxymethyl cellulose, polyethyleneimine or Surfynol TG; and the soaking time of the polyurethane foam in the surfactant is 1-5 hours. According to the embodiment of the invention, the polyurethane foam is selected as the organic foam material, the softening temperature of the polyurethane foam is low, and the thermal stress damage can be avoided in the subsequent sintering step, so that the collapse of a blank body is prevented, and the strength of the prepared foam ceramic material is ensured. In addition, the embodiment of the invention also removes the internetwork membrane of the polyurethane foam through the pretreatment step of the polyurethane foam, thereby avoiding the phenomenon that redundant slurry is left on the internetwork membrane to cause the pore blocking in the prepared foamed ceramic material in the subsequent dipping step.
Preferably, in step (2), the dispersant is selected from gum arabic or ammonium polymethacrylate; the solvent is selected from deionized water or ethanol with the volume percentage of 10-40%. The dispersant can improve the stability of the slurry, prevent particles from reuniting and further improve the solid content of the slurry.
Preferably, in step (2), the rheological agent is selected from bentonite or kaolin; the binder is selected from potassium silicate, sodium silicate, potassium borate, sodium borate, aluminum hydroxide sol or polyvinyl alcohol; the sintering aid is talcum powder; the ceramic base is selected from AL2O3Or ZrO2Powder; the rheological agent, the binder, the sintering agent and the ceramic base material are sequentially used in an amount of 0.1-12 parts, 1-5 parts, 0.005-1 part and 47-60 parts by mass. And the rheological agent, the binder, the sintering aid and the ceramic base material are sieved by a sieve of 80 meshes (<175um), more preferably, the rheological agent, binder, sintering aid, and ceramic base are sieved through a 325 mesh screen(s) ((ii)<45um)。
Preferably, in the step (2), the slurry is pre-stirred for 5-15 minutes before ultrasonic oscillation, and then ammonia water is added, so that the fluidity of the slurry in the preparation process can be remarkably improved, and a more uniform dispersion effect can be obtained.
Preferably, in the step (3), after the modified polyurethane foam is immersed in the slurry, the modified polyurethane foam is placed on a glass plate, and a glass rod is used for rolling back and forth, removing the excess slurry and uniformly coating the slurry on the modified polyurethane foam. The step not only eliminates the redundant slurry on the modified polyurethane foam, but also ensures the uniform distribution of the slurry on the wall of the hole of the network, and prevents the phenomenon of hole blockage. And after the steps, drying the modified polyurethane foam in a drying oven at 60 ℃ for 10-15 hours to perform drying treatment.
Preferably, in the step (4), the sintering temperature is 1000-1700 ℃, the temperature is maintained for 1-5 hours, and the temperature in the muffle furnace is controlled to rise slowly at the early stage. The sintering process provided by the embodiment of the invention is junction-controlled (the temperature is 1000-1700 ℃, and the heat preservation is carried out for 1-5 hours), so that the alumina foam ceramic can be sintered with proper compact hardness. In addition, the slurry contains a small amount of water, and the polyurethane sponge starts to decompose at about 200 ℃ and completely decomposes at about 600 ℃. If the temperature rises too fast in the water evaporation and sponge decomposition stages, the water evaporation and the sponge decomposition are too fast, the foam ceramic material collapses, and therefore, the temperature in the muffle furnace is controlled to rise slowly in the early stage of sintering.
The embodiment of the invention also provides the foamed ceramic material prepared by the method, which comprises a matrix and polyurethane foam immersed in the matrix, and the foamed ceramic material has an open-cell three-dimensional reticular framework structure, wherein the aperture of an open cell is 100-5 mm, and the porosity is 70-90%.
The embodiment of the invention also provides the application of the foamed ceramic material prepared by the method for preparing the optical absorption cell.
Compared with the prior art, the foamed ceramic material and the optical absorption cell (for example, an absorption cell in a semiconductor laser absorption spectrum analyzer) prepared from the foamed ceramic material provided by the embodiment of the invention have the following outstanding technical effects:
1) the optical absorption cell prepared from the foamed ceramic material can achieve the purposes of obviously increasing equivalent optical path and enhancing optical signal transmittance with lower production cost, thereby achieving better measurement performance.
2) The optical absorption cell prepared from the foamed ceramic material can ensure that an analysis device has good stability and can adapt to the field environment under various detection conditions. Compared with the electrochemical gas sensor which is most widely applied at present, the foamed ceramic material provided by the invention is an inorganic non-metallic material prepared by high-temperature sintering, has the advantages of high melting point, high hardness, high wear resistance, oxidation resistance and the like, is not easy to oxidize at high temperature, has good corrosion resistance to acid, alkali and salt, is not interfered and influenced by severe environment, and is not easy to damage.
3) The optical absorption cell prepared by the foamed ceramic material has high response speed and strong anti-interference performance. The foamed ceramic material provided by the invention is soaked in a target measurement environment by virtue of the natural advantages of the material structure, so that fixed-point in-situ measurement can be realized, and an operator is assisted in mastering on-site real-time information.
4) The optical absorption cell prepared from the foamed ceramic material provided by the invention has low comprehensive input cost, and does not need to input consumables for maintenance for a long time. Compared with the traditional absorption tank, the absorption tank does not need to be frequently replaced by accessories or be maintained by special persons, and meanwhile, the absorption tank is low in cost, can realize batch production and is low in total investment.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
FIG. 1 is a 200 μm electron micrograph of a foamed ceramic material prepared according to example 1 of the present invention;
FIG. 2 is a 2 μm electron micrograph of a foamed ceramic material prepared according to example 1 of the present invention;
FIG. 3 is a schematic view of a detection apparatus according to embodiment 5 of the present invention, wherein 1-semiconductor laser absorption cell;
FIG. 4 is a diagram showing the absorption intensity of the TDLAS second harmonic light intensity in accordance with embodiment 5 of the present invention, wherein FIG. 4-A is a diagram showing the absorption intensity; FIG. 4-B is a graph illustrating relative absorption intensity;
fig. 5 is a graph of equivalent absorption optical path length values according to example 5 of the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solutions claimed in the claims of the present application can be implemented without these technical details and with various changes and modifications based on the following embodiments.
The following are some examples of specific embodiments of the invention:
examples of preparation of materials
Example 1
This example describes an example of the preparation of a foamed ceramic material, which specifically includes:
(1) foam pretreatment: soaking polyurethane foam into a sodium hydroxide solution with the mass percentage of 20 wt%, carrying out hydrolysis treatment at 50 ℃ for 5 hours, repeatedly kneading and washing with clear water, then soaking in a carboxymethyl cellulose solution with the mass percentage of 10% for 3 hours to change the surface property of the polyurethane foam, taking out, extruding to remove the redundant carboxymethyl cellulose solution, washing with clear water, and drying to obtain the modified polyurethane foam;
(2) preparing slurry: dissolving a dispersing agent in a solvent, adding a rheological agent, a binder and a sintering aid, and uniformly mixing; then adding ceramic base material, pre-stirring for 15 min to make it uniform, adding ammonia water to improve its fluidity, then making it uniformly disperse by ultrasonic oscillation,in this embodiment, the dispersant is gum arabic, the solvent is 10-40% by volume of ethanol, the rheological agent is kaolin, the binder is potassium silicate, the sintering aid is talc powder, and the ceramic base material is α -AL with a particle size of 1 μm2O3Powder; the rheological agent, the binder, the sintering aid and the ceramic base material are sequentially 10 parts, 5 parts, 0.5 part and 50 parts by mass. In addition, the rheological agent, the binder, the sintering aid and the ceramic base material are sieved by a 325-mesh sieve to ensure that the particle sizes of the rheological agent, the binder, the sintering aid and the ceramic base material are reduced<45um。
(3) Slurry coating: placing the modified polyurethane foam in the slurry so that it absorbs a sufficient amount of the slurry; then placing the slurry on a glass plate, rolling the glass plate back and forth by using a glass rod to remove excess slurry and uniformly and fully coating the slurry on the foam; finally, drying the mixture in a drying box at 60 ℃ for 12 hours;
(4) and (3) sintering: and sintering the polyurethane foam subjected to slurry coating in a muffle furnace, wherein the highest sintering temperature is 1500 ℃, preserving the heat for 1-5 hours, and controlling the temperature in the muffle furnace to rise slowly in the early stage to obtain the microporous foamed ceramic material.
The sample thickness of the foamed ceramic material prepared by the embodiment is 1.5cm, the foamed ceramic material has an open-pore three-dimensional reticular framework structure, wherein the pore diameter of the open pores is 2mm, the porosity is 80%, and electron micrographs of the foamed ceramic material are shown in the attached figures 1 and 2.
Example 2
This example describes another example of the preparation of a foamed ceramic material, which specifically includes:
(1) foam pretreatment: soaking polyurethane foam into 10 wt% sodium hydroxide solution, hydrolyzing at 40 deg.c for 2 hr, kneading repeatedly, washing with clear water, soaking in 0.5 wt% carboxymethyl cellulose solution for 5 hr to change the surface property of polyurethane foam, taking out, extruding to eliminate excessive carboxymethyl cellulose solution, washing with clear water and drying to obtain modified polyurethane foam;
(2) preparing slurry: dissolving dispersant in solvent, adding rheological agent, adhesive and sintering aid, mixingMixing uniformly; and then adding a ceramic base material, pre-stirring for 5-15 minutes to ensure that the ceramic base material is initially uniform, adding ammonia water to improve the fluidity of the ceramic base material, and then ultrasonically oscillating to uniformly disperse the ceramic base material to obtain the slurry. In this example, the dispersant is gum arabic; the solvent is deionized water; the rheological agent is bentonite; the binder is sodium silicate; the sintering aid is talcum powder; the ceramic base material being ZrO2Powder; the rheological agent, the binder, the sintering aid and the ceramic base material are sequentially used in an amount of 2 parts, 5 parts, 1 part and 47 parts by mass. In addition, the rheological agent, the binder, the sintering aid and the ceramic base material are sieved by a 80-mesh sieve to ensure that the particle sizes of the rheological agent, the binder, the sintering aid and the ceramic base material are reduced<45um;
(3) Slurry coating: placing said modified polyurethane foam in said slurry such that it absorbs a sufficient amount of said slurry; then placing the slurry on a glass plate, rolling the glass plate back and forth by using a glass rod to remove excess slurry and uniformly and fully coating the slurry on the foam; finally, drying the mixture in a drying box at 60 ℃ for 15 hours;
(4) and (3) sintering: and sintering the polyurethane foam subjected to slurry hanging in a muffle furnace to obtain the microporous foamed ceramic material. The sintering highest temperature is 1700 ℃, the temperature is kept for 1 hour, and the temperature in the muffle furnace is controlled to rise slowly in the early stage.
The sample of the foamed ceramic material prepared in the embodiment has a thickness of 2cm and has an open-cell three-dimensional network skeleton structure, wherein the pore diameter of the open cell is 1mm, and the porosity is 70%.
Example 3
This example describes another example of the preparation of a foamed ceramic material, which specifically includes:
(1) foam pretreatment: soaking polyurethane foam into 15 wt% sodium hydroxide solution, hydrolyzing at 60 ℃ for 3 hours, repeatedly kneading and washing with clear water, then soaking in surfactant Surfynol TG for 1 hour to change the surface property of the polyurethane foam, taking out, extruding to remove redundant carboxymethyl cellulose solution, washing with clear water, and drying to obtain the modified polyurethane foam;
(2) preparing slurry: dissolving dispersant in solvent, adding rheological agent, binder andsintering aid, mixing evenly; and then adding a ceramic base material, pre-stirring for 5-15 minutes to ensure that the ceramic base material is initially uniform, adding ammonia water to improve the fluidity of the ceramic base material, and then ultrasonically oscillating to uniformly disperse the ceramic base material to obtain the slurry. In this example, the dispersant is Darvanc (25% ammonium polymethacrylate); the solvent is ethanol with the volume percentage content of 20 percent; the rheological agent is kaolin; the binder is aluminum hydroxide sol; the sintering aid is talcum powder; the ceramic base material is AL2O3(ii) a The rheological agent, the binder, the sintering aid and the ceramic base material are sequentially 2 parts, 1 part and 47 parts in parts by mass. In addition, the rheological agent, the binder, the sintering aid and the ceramic base material are sieved by a 325-mesh sieve to ensure that the particle sizes of the rheological agent, the binder, the sintering aid and the ceramic base material are reduced<45um;
(3) Slurry coating: placing said modified polyurethane foam in said slurry such that it absorbs a sufficient amount of said slurry; then placing the slurry on a glass plate, rolling the glass plate back and forth by using a glass rod to remove excess slurry and uniformly and fully coating the slurry on the foam; finally, drying the mixture in a drying box at 60 ℃ for 12 hours;
(4) and (3) sintering: and sintering the polyurethane foam subjected to slurry hanging in a muffle furnace to obtain the microporous foamed ceramic material. The sintering temperature is 1000 ℃, the temperature is kept for 5 hours, and the temperature in the muffle furnace is controlled to rise slowly in the early stage.
The sample thickness of the foamed ceramic material prepared by the embodiment is 1.2cm, and the foamed ceramic material has an open-cell three-dimensional reticular framework structure, wherein the aperture of an open cell is 800um, and the porosity is 90%.
Example 4
This example describes another example of the preparation of a foamed ceramic material, which specifically includes:
(1) foam pretreatment: soaking polyurethane foam into 10 wt% sodium hydroxide solution, hydrolyzing at 40 deg.c for 2 hr, kneading repeatedly and washing with clear water, soaking in surfactant polyethyleneimine for 2 hr to change the surface property of polyurethane foam, taking out, extruding to eliminate excessive carboxymethyl cellulose solution, washing with clear water and drying to obtain modified polyurethane foam;
(2) preparing slurry: dissolving a dispersing agent in a solvent, adding a rheological agent, a binder and a sintering aid, and uniformly mixing; then adding the ceramic base material, pre-stirring for 7 minutes to ensure that the ceramic base material is initially uniform, adding ammonia water to improve the fluidity of the ceramic base material, and then ultrasonically oscillating to ensure that the ceramic base material is uniformly dispersed to obtain the slurry. In this example, the dispersant is Darvanc (25% ammonium polymethacrylate); the solvent is deionized water; the rheological agent is bentonite or kaolin; the binder is sodium borate; the sintering aid is talcum powder; the ceramic base material is ZrO2Powder; the rheological agent, the binder, the sintering aid and the ceramic base material are sequentially used in 4 parts, 3 parts, 1 part and 60 parts by mass. In addition, the rheological agent, the binder, the sintering aid and the ceramic base material are sieved by a 325-mesh sieve to ensure that the particle sizes of the rheological agent, the binder, the sintering aid and the ceramic base material are reduced<45um;
(3) Slurry coating: placing said modified polyurethane foam in said slurry such that it absorbs a sufficient amount of said slurry; then placing the slurry on a glass plate, rolling the glass plate back and forth by using a glass rod to remove excess slurry and uniformly and fully coating the slurry on the foam; finally, drying the mixture in a drying box at 60 ℃ for 10 hours;
(4) and (3) sintering: and sintering the polyurethane foam subjected to slurry hanging in a muffle furnace to obtain the microporous foamed ceramic material. The highest sintering temperature is 1300 ℃, the temperature is kept for 3 hours, and the temperature in the muffle furnace is controlled to rise slowly in the early stage.
The sample of the foamed ceramic material prepared in the embodiment has a thickness of 1cm, and has an open-cell three-dimensional network skeleton structure, wherein the pore diameter of the open cell is 100um, and the porosity is 70%.
Example 5 (materials applications)
An absorption cell further prepared from the foamed ceramic material prepared in example 1 was subjected to detection of an equivalent optical path. The detection device is shown in figure 3. The thickness of the semiconductor laser absorption cell 1 prepared from the foamed ceramic material is 1.2cm, and the semiconductor laser absorption cell is used as an absorption medium, and a laser with a wavelength of 1470nm is adopted to detect the concentration of water molecules in 300ppm air in an open environment (room temperature and 1 atmosphere).
The schematic diagram of the absorption intensity of the second harmonic light intensity of the TDLAS is shown in FIG. 4, wherein FIG. 4-A is the schematic diagram of the absorption intensity; FIG. 4-B is a graph showing relative absorption intensity. 4-B, the detection method and the absorption data of the invention are stable and reliable.
By adopting the device, the gas absorption optical path value is calculated according to the relationship (shown in the following formula I) of the second harmonic signal and the frequency-doubled Fourier coefficient at the central frequency and the Lambert-beer law, and the figure 5 is an average equivalent absorption optical path value curve, so that the average equivalent absorption optical path value of the sample with the thickness of 1.2cm is 26.88 cm.
Wherein, P
2f(v
0) Is the secondary resonance value; g is the photoelectric gain in the detection system;
is the average value of the incident light intensity; p is atmospheric pressure; t is the temperature; s (T) represents a spectral line intensity function; x is the concentration of the measured gas; and L is the laser propagation path. Under the condition of certain temperature, pressure and measured gas concentration X, the second harmonic signal is in direct proportion to the gas absorption optical path L.
Therefore, the semiconductor laser absorption cell prepared by the foamed ceramic material can realize the remarkable increase (26.88 cm) of the equivalent optical length with smaller volume (the thickness is 1.2 cm).
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples of implementing the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in its practical application.