CN111187008A - Glass substrate coating method and glass substrate coating device - Google Patents
Glass substrate coating method and glass substrate coating device Download PDFInfo
- Publication number
- CN111187008A CN111187008A CN202010170512.8A CN202010170512A CN111187008A CN 111187008 A CN111187008 A CN 111187008A CN 202010170512 A CN202010170512 A CN 202010170512A CN 111187008 A CN111187008 A CN 111187008A
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- coating
- carrying platform
- tapered
- rotate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
The invention discloses a glass substrate coating method which comprises a device providing step, a glass substrate setting step, an expansion plate closing step, a coating step and an expansion plate removing step. According to the method, when the coating layer is coated on the glass substrate, the initial part and the ending part with uneven thickness of the coating layer are respectively coated on the two expansion plates, and finally the initial part and the ending part are removed in a manner of removing the expansion plates and only the uniform thickness part with even thickness is left, so that the coating layer on the glass substrate can have even and consistent thickness, and the photoresist coating effect of the glass substrate is improved.
Description
Technical Field
The present invention relates to a glass substrate coating method, and more particularly, to a glass substrate coating method and a glass substrate coating apparatus.
Background
Referring to fig. 1 and 2, a conventional glass substrate coating process is mainly performed by using a glass substrate coating apparatus, which includes a stage 91 and a coating head 92 suspended above the stage 91. The coating head stores photoresist and can be connected with a pump so as to convey the coating agent in the coating head outwards through the pump. When the coating process is performed, the glass substrate 93 to be processed is set on the stage 91, the coating head 92 is driven to move from one side of the glass substrate 93 to the other side, and simultaneously, a photoresist is coated on the glass substrate 93 to form a coating layer 94 made of the photoresist, and the coating layer 94 has a start portion 941 and an end portion 942 opposite to the start portion 941. However, the coating head 92 is just at the time point of initial start and start of outputting the photoresist when coating the start portion 941, so that the photoresist output pressure is turned from weak to strong, resulting in that the start portion 941 cannot have a uniform thickness due to its thickness being thin and thick. Similarly, the coating head 92 coats the ending part 942 at a point of time just before closing and stopping the photoresist output, so that the photoresist output pressure is changed from strong to weak, resulting in that the thickness of the ending part 942 is changed from thick to thin and cannot reach a uniform thickness. Therefore, the initial portion 941 and the final portion of the coating layer 94 cannot have a desired uniform thickness and need to be adjusted with time and labor, resulting in poor coating effect of the glass substrate.
Therefore, it is necessary to provide a glass substrate coating method and a glass substrate coating apparatus to solve the problems of the prior art.
Disclosure of Invention
The invention provides a glass substrate coating method and a glass substrate coating device, which aim to solve the problem that the coating effect of a glass substrate is poor due to the fact that the thickness of the initial part and the final part of a coating layer manufactured by a glass substrate coating process in the prior art is not uniform and the subsequent labor and time are consumed for adjustment.
The invention mainly aims to provide a glass substrate coating method, which comprises the following steps:
a device providing step of providing a glass substrate coating device, wherein the glass substrate coating device comprises a carrying platform, two expansion plates and a coating head, wherein the two expansion plates are respectively arranged at two sides of the carrying platform, each expansion plate can move, rotate or simultaneously move and rotate to be close to or far away from the carrying platform, the coating head is arranged above the starting side of the carrying platform and is at a distance from the carrying platform, and the coating head is filled with a coating agent;
a glass substrate setting step of setting a glass substrate on the stage, wherein the glass substrate has a starting side and an ending side;
an extension plate folding step of moving the two extension plates to the start side and the end side adjacent to the glass substrate, respectively;
a coating step of driving the coating head to coat the coating agent onto the two spread portions and the glass substrate in a direction from the start side to the end side of the glass substrate to form a coating layer having a start portion and an end portion on the two spread portions, respectively, and a thickness-equalizing portion between the start portion and the end portion; and
and a spreading plate removing step, including removing the two spreading plates and simultaneously removing the starting part and the ending part of the coating layer to only leave the thickness-equalizing part on the glass substrate so as to finish coating.
In an embodiment of the present invention, each of the expansion boards has a base portion far away from the stage and a tapered portion connected to the base portion and close to the stage, and a vertical cross section of the tapered portion is gradually narrowed toward the stage to form a slope on a top surface of the tapered portion; in the coating step, the start portion and the end portion of the coating layer are coated on the tapered portions of the two spreading plates, respectively.
In an embodiment of the present invention, the start portion and the end portion correspond to the start side and the end side of the glass substrate, respectively.
In an embodiment of the invention, in the step of removing the spreading plates, each spreading plate moves or rotates in a direction away from the glass substrate to separate the start portion and the end portion of the coating layer from the thickening portion.
In an embodiment of the invention, in the spreading plate removing step, each spreading plate moves or rotates to lift the tapered portion and move or rotate the tapered portion away from the glass substrate, so as to separate the start portion and the end portion of the coating layer from the thickening portion.
In one embodiment of the present invention, the coating agent in the coating head is photoresist.
A second objective of the present invention is to provide a glass substrate coating apparatus, which includes a stage, two expansion plates, and a coating head, wherein the two expansion plates are respectively disposed at two sides of the stage, each of the expansion plates can move, rotate, or move and rotate simultaneously to approach or depart from the stage, the coating head is disposed above a starting side of the stage and at a distance from the stage, and the coating head contains a coating agent.
In an embodiment of the invention, each of the expansion plates has a base portion far away from the stage and a tapered portion connected to the base portion and close to the stage, and a vertical cross section of the tapered portion is gradually narrowed toward the stage to form a slope on a top surface of the tapered portion.
In an embodiment of the invention, each of the expansion plates can move or rotate in a direction away from the carrier.
In an embodiment of the invention, in the step of removing the expansion boards, each of the expansion boards may move or rotate to lift the tapered portion and move or rotate the tapered portion away from the stage.
Compared with the existing glass substrate coating process, the glass substrate coating method and the glass substrate coating device respectively coat the starting part and the ending part with non-uniform thickness of the coating layer on the two expansion plates during coating, and finally remove the starting part and the ending part in a manner of removing the expansion plates and only leave the uniform thickness part, so that the coating layer on the glass substrate can have uniform thickness, and the photoresist coating effect of the glass substrate is further improved. In addition, the initial part and the finishing part of the coating layer are placed outside the range of the glass substrate, so that the photoresist coated on the glass substrate is discharged in a state of constant speed and stable pressure, the film thickness threshold of the subsequent coating layer is greatly reduced, and the film thickness debugging efficiency is improved.
In order to make the aforementioned and other objects of the present invention more comprehensible, preferred embodiments accompanied with figures are described in detail below:
drawings
Fig. 1 is a top view of a conventional glass substrate coating apparatus for coating a glass substrate, wherein the lateral arrow indicates the moving direction of the coating head.
FIG. 2 is a side view of the operation of the conventional glass substrate coating apparatus of FIG. 1, wherein the lateral arrows indicate the moving direction of the coating head.
FIG. 3 is a flowchart illustrating steps of a method for coating a glass substrate according to an embodiment of the present invention.
FIG. 4 is a top view of the glass substrate coating apparatus according to the embodiment of the present invention, wherein the long arrow is the moving direction of the coating head and the short arrows are the moving direction of the spreading plate.
FIG. 5 is a side view of the glass substrate coating apparatus according to the embodiment of the present invention, wherein the long arrow is the moving direction of the coating head and the short arrows are the moving direction of the spreading plate.
FIG. 6 is a side view of the glass substrate coating apparatus according to the embodiment of the present invention, which is continued from the glass substrate coating method of FIG. 5, wherein the arc-shaped arrows are the directions of the two spreading plates respectively moving away from the starting side and the ending side of the glass substrate.
Detailed Description
Referring to fig. 3, an embodiment of the invention provides a method for coating a glass substrate, including: a device providing step S01, a glass substrate setting step S02, an expansion board drawing step S03, a coating step S04, and an expansion board removing step S05.
Referring to fig. 4 and 5, in the device providing step S01, a glass substrate coating device is provided, wherein the glass substrate coating device includes a stage 10, two expansion plates 20, and a coating head 30, wherein the two expansion plates 20 are respectively disposed on two sides of the stage 10, each of the expansion plates 20 is movable, rotatable, or simultaneously movable and rotatable to be close to or away from the stage 10, the coating head 30 is disposed above a start side 41 of the stage 10 and at a distance from the stage 10, and the coating head 30 contains a coating agent. In one embodiment of the present invention, the coating agent in the coating head 30 is photoresist.
The glass substrate setting step S02 sets a glass substrate 40 on the stage 10, wherein the glass substrate 40 has a start side 41 and an end side 42.
The extension plate closing step S03 moves the extension plates 20 to the start side 41 and the end side 42 adjacent to the glass substrate 40, respectively.
The coating step S04 is to drive the coating head 30 to coat the coating agent on the two expansions and the glass substrate 40 along the direction from the starting side 41 to the ending side 42 of the glass substrate 40 to form a coating layer 50, wherein the coating layer 50 has a starting portion 51 and an ending portion 52 respectively located on the two expansions and a thickened portion 53 between the starting portion 51 and the ending portion 52.
Referring to fig. 6, the spreader plate removing step S05 includes removing the two spreader plates 20 and simultaneously removing the start portion 51 and the end portion 52 of the coating layer 50 to leave only the thickness-equalizing portion 53 on the glass substrate 40, so as to complete the coating. Specifically, when the two spreading plates 20 are separated from the glass substrate 40, the front ends of the spreading plates are tilted so as to prevent the carrier 10 from being contaminated by the dripping of the photoresist from the front ends of the spreading plates 20 due to fluidity, and then the glass substrate 40 together with the coating layer 50 is moved to a cleaning device to perform a cleaning measure, and then the cleaning before coating of the next glass substrate 40 is completed.
In an embodiment of the present invention, each of the expansion boards 20 has a base portion 21 far away from the stage 10 and a tapered portion connected to the base portion 21 and close to the stage 10, and a vertical cross section of the tapered portion gradually narrows toward the stage 10 to form a slope on a top surface of the tapered portion 22; in the coating step S04, the start portion 51 and the end portion 52 of the coating layer 50 are coated on the tapered portions of the spreading plates 20, respectively.
In an embodiment of the present invention, the starting portion 51 and the ending portion 52 correspond to the starting side 41 and the ending side 42 of the glass substrate 40, respectively.
In one embodiment of the present invention, in the spreading plate removing step S05, each spreading plate 20 is moved or rotated in a direction away from the glass substrate 40 to separate the start portion 51 and the end portion 52 of the coating layer 50 from the thickening portion 53.
In one embodiment of the present invention, in the spreading plate removing step S05, each spreading plate 20 is moved or rotated to lift the tapered portion and move or rotate the tapered portion away from the glass substrate 40, so as to separate the start portion 51 and the end portion 52 of the coating layer 50 from the thickening portion 53.
Referring to fig. 3 to 5, the present invention provides a glass substrate coating apparatus, including a stage 10, two expansion plates 20, and a coating head 30, wherein the two expansion plates 20 are respectively disposed on two sides of the stage 10, each of the expansion plates 20 is movable, rotatable, or simultaneously movable and rotatable to be close to or far from the stage 10, the coating head 30 is disposed above a start side 41 of the stage 10 and at a distance from the stage 10, and the coating head 30 contains a coating agent.
In an embodiment of the invention, each of the expansion boards 20 has a base portion 21 far away from the stage 10 and a tapered portion connected to the base portion 21 and close to the stage 10, and a vertical cross section of the tapered portion is gradually narrowed toward the stage 10 to form a slope on a top surface of the tapered portion 22.
Referring to fig. 6, in an embodiment of the invention, each of the expansion plates 20 can move or rotate in a direction away from the carrier 10.
Referring to fig. 6, in the expanding plate removing step S05, in an embodiment of the invention, each expanding plate 20 may move or rotate to lift the tapered portion and move or rotate the tapered portion away from the carrier 10.
Compared with the conventional glass substrate 40 coating process, in the glass substrate coating method and the glass substrate coating apparatus according to the embodiments of the present invention, the start portion 51 and the end portion 52 of the coating layer 50 with non-uniform thickness are coated on the two spreading plates 20 respectively during coating, and finally the start portion 51 and the end portion 52 are removed by removing the spreading plates 20 and only the uniform thickness portion 53 with uniform thickness is left, so that the coating layer 50 on the glass substrate 40 can have uniform thickness, thereby improving the photoresist coating effect of the glass substrate 40. In addition, by placing the starting part 51 and the ending part 52 of the coating layer 50 outside the range of the glass substrate 40, the photoresist coated on the glass substrate 40 is discharged in a state of constant speed and stable pressure, thereby greatly reducing the film thickness threshold of the subsequent coating layer and improving the film thickness debugging efficiency.
Claims (10)
1. A glass substrate coating method is characterized in that: the glass substrate coating method comprises
A device providing step of providing a glass substrate coating device, wherein the glass substrate coating device comprises a carrying platform, two expansion plates and a coating head, wherein the two expansion plates are respectively arranged at two sides of the carrying platform, each expansion plate can move, rotate or simultaneously move and rotate to be close to or far away from the carrying platform, the coating head is arranged above the starting side of the carrying platform and is at a distance from the carrying platform, and the coating head is filled with a coating agent;
a glass substrate setting step of setting a glass substrate on the stage, wherein the glass substrate has a starting side and an ending side;
an extension plate folding step of moving the two extension plates to the start side and the end side adjacent to the glass substrate, respectively;
a coating step of driving the coating head to coat the coating agent onto the two spread portions and the glass substrate in a direction from the start side to the end side of the glass substrate to form a coating layer having a start portion and an end portion on the two spread portions, respectively, and a thickness-equalizing portion between the start portion and the end portion; and
and a spreading plate removing step, including removing the two spreading plates and simultaneously removing the starting part and the ending part of the coating layer to only leave the thickness-equalizing part on the glass substrate so as to finish coating.
2. The glass substrate coating method according to claim 1, wherein: each expansion plate is provided with a base part far away from the carrier and a tapered part connected with the base part and close to the carrier, and the vertical section of the tapered part is gradually narrowed towards the carrier so as to form a slope on the top surface of the tapered part; in the coating step, the start portion and the end portion of the coating layer are coated on the tapered portions of the two spreading plates, respectively.
3. The glass substrate coating method according to claim 1, wherein: the start portion and the end portion correspond to the start side and the end side of the glass substrate, respectively.
4. The glass substrate coating method according to claim 1, wherein: in the spreading plate removing step, each spreading plate is moved or rotated in a direction away from the glass substrate to separate the start portion and the end portion of the coating layer from the thickening portion.
5. The glass substrate coating method according to claim 2, wherein: in the spreading plate removing step, each spreading plate is moved or rotated to lift the tapered portion and move or rotate the tapered portion away from the glass substrate, so as to separate the start portion and the end portion of the coating layer from the thickening portion.
6. The glass substrate coating method according to claim 1, wherein: the coating agent in the coating head is photoresist.
7. A glass substrate coating device is characterized in that: the glass substrate coating device comprises a carrying platform, two expansion plates and a coating head, wherein the two expansion plates are respectively arranged on two sides of the carrying platform, each expansion plate can move, rotate or simultaneously move and rotate to be close to or far away from the carrying platform, the coating head is arranged above the starting side of the carrying platform and is at a distance from the carrying platform, and coating agents are contained in the coating head.
8. The glass substrate coating apparatus according to claim 7, wherein: each expansion plate is provided with a base part far away from the carrier and a tapered part connected with the base part and close to the carrier, and the vertical section of the tapered part is gradually narrowed towards the carrier so as to form a slope on the top surface of the tapered part.
9. The glass substrate coating apparatus according to claim 7, wherein: each expansion plate can move or rotate towards the direction far away from the carrying platform.
10. The glass substrate coating apparatus of claim 8, wherein: in the expanding plate removing step, each expanding plate may move or rotate to lift the tapered portion and move or rotate the tapered portion away from the stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010170512.8A CN111187008B (en) | 2020-03-12 | 2020-03-12 | Glass substrate coating method and glass substrate coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010170512.8A CN111187008B (en) | 2020-03-12 | 2020-03-12 | Glass substrate coating method and glass substrate coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111187008A true CN111187008A (en) | 2020-05-22 |
| CN111187008B CN111187008B (en) | 2022-04-26 |
Family
ID=70704179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010170512.8A Active CN111187008B (en) | 2020-03-12 | 2020-03-12 | Glass substrate coating method and glass substrate coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111187008B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113649226A (en) * | 2021-09-07 | 2021-11-16 | 深圳市曼恩斯特科技股份有限公司 | Coating die head and coating debugging method thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003080146A (en) * | 2001-09-07 | 2003-03-18 | Dainippon Printing Co Ltd | Coating apparatus |
| JP2003164789A (en) * | 2001-11-29 | 2003-06-10 | Canon Inc | Method and device for removing excess coating liquid at substrate end-face |
| JP2004103835A (en) * | 2002-09-10 | 2004-04-02 | Tokyo Electron Ltd | Coating processor and coating processing method of substrate |
| CN101003041A (en) * | 2006-01-19 | 2007-07-25 | 东京毅力科创株式会社 | Application method, applicator and processing procedure |
| CN101685257A (en) * | 2005-05-30 | 2010-03-31 | 东京毅力科创株式会社 | Coating method and coating apparatus |
| CN104353594A (en) * | 2014-11-14 | 2015-02-18 | 深圳市华星光电技术有限公司 | Coating method and coating device |
| JP2018008210A (en) * | 2016-07-13 | 2018-01-18 | 株式会社エナテック | Coating applying device and coating applying method |
| JP6364531B1 (en) * | 2017-06-23 | 2018-07-25 | 東京応化工業株式会社 | LAMINATE MANUFACTURING METHOD, ELECTRONIC DEVICE MANUFACTURING METHOD, LAMINATE, AND LAMINATE MANUFACTURING SYSTEM |
-
2020
- 2020-03-12 CN CN202010170512.8A patent/CN111187008B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003080146A (en) * | 2001-09-07 | 2003-03-18 | Dainippon Printing Co Ltd | Coating apparatus |
| JP2003164789A (en) * | 2001-11-29 | 2003-06-10 | Canon Inc | Method and device for removing excess coating liquid at substrate end-face |
| JP2004103835A (en) * | 2002-09-10 | 2004-04-02 | Tokyo Electron Ltd | Coating processor and coating processing method of substrate |
| CN101685257A (en) * | 2005-05-30 | 2010-03-31 | 东京毅力科创株式会社 | Coating method and coating apparatus |
| CN101003041A (en) * | 2006-01-19 | 2007-07-25 | 东京毅力科创株式会社 | Application method, applicator and processing procedure |
| CN104353594A (en) * | 2014-11-14 | 2015-02-18 | 深圳市华星光电技术有限公司 | Coating method and coating device |
| JP2018008210A (en) * | 2016-07-13 | 2018-01-18 | 株式会社エナテック | Coating applying device and coating applying method |
| JP6364531B1 (en) * | 2017-06-23 | 2018-07-25 | 東京応化工業株式会社 | LAMINATE MANUFACTURING METHOD, ELECTRONIC DEVICE MANUFACTURING METHOD, LAMINATE, AND LAMINATE MANUFACTURING SYSTEM |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113649226A (en) * | 2021-09-07 | 2021-11-16 | 深圳市曼恩斯特科技股份有限公司 | Coating die head and coating debugging method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111187008B (en) | 2022-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7842350B2 (en) | Method and apparatus for coating a photosensitive material | |
| CN111187008B (en) | Glass substrate coating method and glass substrate coating device | |
| TW201729249A (en) | Coating film forming method, coating film forming device, and storage medium adjusting the thickness of a film formed on a wafer in coating the wafer with a coating liquid to form the film | |
| JP6498006B2 (en) | Application method | |
| KR20090033079A (en) | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | |
| JP2012196609A (en) | Coating method and coating apparatus | |
| US20060115992A1 (en) | Coating apparatus, coating method and coating-film forming apparatus | |
| KR20110022530A (en) | Coating method, computer storage midium and coating apparatus | |
| CN110088880B (en) | Coating processing method, computer storage medium, and coating processing device | |
| TW201622823A (en) | Method for coating a substrate and coating device | |
| EP1205258A1 (en) | Circular or annular coating film forming method | |
| US7895969B2 (en) | Method and apparatus for forming outer electrode of electronic component | |
| JP2009154106A (en) | Coating method, coating apparatus, and method for preparing component for use in liquid crystal display | |
| JP4197107B2 (en) | Coating equipment | |
| JP2008114137A (en) | Coater, coating apparatus and method, and apparatus and method of manufacturing member for display | |
| KR20080022034A (en) | Coating method of die coater | |
| JP2008149225A (en) | Coating method | |
| KR20200124166A (en) | Substrate treatment method and substrate treatment apparatus | |
| JP5338071B2 (en) | Coating method, coating apparatus, and method for manufacturing liquid crystal display member | |
| JP2007260485A (en) | Coating method, coating apparatus, and method for manufacturing component for use in liquid crystal display | |
| TWI414495B (en) | Reduced friction molds for injection molded solder processing | |
| JP2004050025A (en) | Die head for coating | |
| JP2008238083A (en) | Coating method, coating apparatus, and method for preparing component for use in liquid crystal display | |
| TWM629552U (en) | Wafer excess edge removal device | |
| KR101081527B1 (en) | Spin coater apparatus and method for coating photo register using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |