CN111146070A - Small-size high performance space detection mass spectrometer - Google Patents
Small-size high performance space detection mass spectrometer Download PDFInfo
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- CN111146070A CN111146070A CN201911358714.9A CN201911358714A CN111146070A CN 111146070 A CN111146070 A CN 111146070A CN 201911358714 A CN201911358714 A CN 201911358714A CN 111146070 A CN111146070 A CN 111146070A
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- 238000001514 detection method Methods 0.000 title claims abstract description 10
- 230000005684 electric field Effects 0.000 claims abstract description 38
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 5
- 229910001004 magnetic alloy Inorganic materials 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims 2
- 230000009977 dual effect Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 21
- 239000006185 dispersion Substances 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 230000004075 alteration Effects 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/062—Ion guides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/20—Magnetic deflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/22—Electrostatic deflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
- H01J49/328—Static spectrometers using double focusing with a cycloidal trajectory by using crossed electric and magnetic fields, e.g. trochoidal type
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses a small-sized high-performance space detection mass spectrometer, which comprises an ion source, an electric field analyzer, a magnetic field analyzer and an ion flow detector, wherein the ion source is connected with the electric field analyzer; the electric field generated by the electric field analyzer and the magnetic field generated by the magnetic field analyzer are mutually orthogonally nested; wherein, the electric field analyzer generates 1/4 circular electric field, the electric field direction is radial, the magnetic field force FBIs the force of an electric field FE2 times the distance l from the ion source outlet to the electric field inlet0Distance l from the electric field outlet to the ion current detector1，l0＝l1And equal to 0.35 times the beam deflection radius r; the invention canThe mass spectrometer can be miniaturized while the performance of the mass spectrometer is improved.
Description
Technical Field
The invention belongs to the technical field of instruments and meters, and particularly relates to a small high-performance space detection mass spectrometer.
Background
With the continuous development of the aerospace technology, higher requirements are put forward on a space mass spectrometer, for example, the mass spectrometer for space detection is required to firstly meet the requirements of light weight and small volume, and meanwhile, the working performance of the mass spectrometer is also required to meet the requirements (high sensitivity, high resolution and wide mass range).
Generally, a spatial detection magnetic deflection mass spectrometer is composed of an ion source, a mass analyzer and an ion current detector, and although the spatial detection magnetic deflection mass spectrometer has the advantages of simple structure, good mass spectrum peak shape and good quantification compared with other types of mass spectrometers, the working performance of the mass spectrometer cannot be substantially improved due to the energy dispersion of ion source ion energy and the energy dispersion of the mass analyzer. In addition, the performance of a mass spectrometer depends on its mass and volume, which affect and constrain each other. At present, the size of the existing double-focusing mass spectrometer is large, most of the existing double-focusing mass spectrometer is applied to ground scientific experimental research, the area of the whole laboratory is occupied, and the length of the instrument exceeds 1 meter. The technical indexes of the existing mass spectrometer are as follows: 1) resolution ratio: 3000A; 2) mass number range: 12-100 amu; 3) sensitivity: 10-7A/Pa; 4) weight: about 16 kg.
Disclosure of Invention
In view of the above, the present invention provides a small-sized high-performance space-detecting mass spectrometer, which can improve the performance of the mass spectrometer and realize the miniaturization of the mass spectrometer.
The technical scheme for realizing the invention is as follows:
a small-sized high-performance space detection mass spectrometer comprises an ion source, an electric field analyzer, a magnetic field analyzer and a ionization detectorA sub-stream detector; the electric field generated by the electric field analyzer and the magnetic field generated by the magnetic field analyzer are mutually orthogonally nested; wherein, the electric field analyzer generates 1/4 circular electric field, the electric field direction is radial, the magnetic field force FBIs the force of an electric field F E2 times the distance l from the ion source outlet to the electric field inlet0Distance l from the electric field outlet to the ion current detector1，l0＝l1And is equal to 0.35 times the beam deflection radius r.
Further, the ion source is an electron impact ionization source based on a symmetric magnetic field and a double-filament structure.
Further, the ion current detector receives the ion current using an electron multiplier.
Further, the magnetic field analyzer comprises a magnet, a pole piece and a yoke; the magnet is made of neodymium iron boron (NdFeB) permanent magnet material with high magnetic energy product (48MGO), and the pole shoe and the yoke are made of soft magnetic alloy (1J22) with high magnetic permeability.
Has the advantages that:
(1) the mass spectrometer can eliminate high-level aberration, form a perfect secondary focusing ion optical system, enable the mass spectrometer to have the capability of double focusing of energy and direction, improve the resolution of the mass spectrometer without losing the sensitivity of the instrument, and further realize the high performance of the instrument.
(2) The electric field analyzer and the magnetic field analyzer adopt an orthogonal nested structure, so that the weight and the volume of the mass spectrometer can be reduced to the greatest extent, the weight of the miniaturized mass spectrometer of the space mass spectrometer is about 4.3kg, and the volume size is 180mm multiplied by 185mm multiplied by 220 mm.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
The ion source is 1-ion source, the electric field analyzer is 2-electric field analyzer, the magnetic field analyzer is 3-magnetic field analyzer, and the ion current detector is 4-ion current detector.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The invention mainly adopts a method of combining theoretical calculation and software simulation to realize the design of the high-performance miniaturized space mass spectrometer. As shown in fig. 1, the mass spectrometer of the present invention includes:
(1) the ion source 1 is designed as an electron impact ionization source, and when the electron energy is set to 72eV, the interference of fragment stray peaks can be eliminated, and the measured substance can be accurately and qualitatively analyzed; the ionization efficiency can be increased by the symmetrical magnetic field in the ion source, and the sensitivity of the mass spectrometer is improved; in the double-filament structure, one of the filaments is used as an anode for receiving electrons and can obviously improve the reliability of the mass spectrometer.
(2) The electric field vector in the electric field analyzer 2 points in the radial direction, the magnetic field vector points in the axial direction of the analyzer perpendicular to the electric field vector, an E multiplied by B orthogonal electromagnetic field is formed, and the magnetic field force FBIs the force of an electric field F E2 times of the total weight of the powder.
(3) Object distance l of ions0Sum image distance l1Equal to 0.35 times the beam deflection radius r.
(4) The electric field analyzer 2 and the magnetic field analyzer 3 are orthogonally nested with each other to achieve miniaturization, and reduce the weight and volume of the instrument.
(5) The magnetic field analyzer 3 is composed of three parts of a magnet, a pole shoe and a yoke. The magnetic induction of the magnetic analyzer was 0.6T and the air gap distance was 5 mm. The magnet is made of neodymium iron boron (NdFeB) permanent magnet material with high magnetic energy product (48MGO), and the pole shoe and the yoke are made of soft magnetic alloy (1J22) with high magnetic permeability, so that the influence of a dispersion field on the motion track of ions can be reduced, and the sensitivity of the instrument is improved.
(6) The core parameters of the mass spectrometer are designed to satisfy the following relations:
α＝90°；
l0＝(8～10)mm；
B＝0.6T；
E＝(150～170)V/mm；
l1＝(8～10)mm；
r＝(2.8～3.5)mm。
the mass spectrometer developed based on the parameter has the characteristics of large dispersion and small aberration, high sensitivity and resolution and mass less than 5 kg.
The working process of the mass spectrometer is as follows:
the force balance equation of an ion with mass m, charge q and velocity v in the E x B field is as follows:
the deflection radius r is obtained from the formula (1),
in addition, in order to eliminate energy dispersion, it is required to:
this yields vB 2E, i.e. when the magnetic field force is twice the electric field force, the orthogonal electromagnetic field E × B is able to eliminate energy dispersion.
And the directional focusing of the charged particles can be obtained by solving the Mattauch-Herzog equation to obtain the current inlet distance l0Equal to the outlet distance l1And equal to 0.35 times the center radius r of the E x B field analyzer. Therefore, provided that vB ═ 2E and l are satisfied simultaneously0＝l1Under two conditions of 0.35r, the orthogonal electromagnetic field can realize the double focusing functions of charged particle energy focusing and direction focusing. Thus, for a scanning voltage type orthogonal double focus mass spectrometer, there are,
the relationship between the mass-to-charge ratio and the scanning voltage is finally obtained,
wherein,
mμis 1.66X 10 atomic mass unit-27kg, e is unit charge, 1.60X 10-19C. Therefore, when the magnetic field strengths B and B are equalWhen the deflection radius r is determined, the mass-to-charge ratio is only related to the scanning voltage U, and ions with different mass-to-charge ratios can be separated by changing the scanning voltage, so that mass spectrometry is completed.
The invention adopts a method of combining theoretical calculation with numerical simulation software such as 'Matlab' and 'Simion' to determine the core parameters of a mass spectrometer and the relationship between the core parameters, mainly comprises the steps of determining the object distance l0, the image distance l1, the deflection angle α, the magnetic field intensity B, the electric field intensity E, the ion deflection radius r and the mutual relationship between the object distance l0, the image distance l1, the deflection angle l α, the magnetic field intensity B, the electric field intensity E and the ion deflection radius r, eliminates the geometric aberration introduced by the divergence angle of an ion source and the chromatic aberration introduced by the energy dispersion of the analyzer by theoretically designing the instrument parameters, and.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. A small-sized high-performance space detection mass spectrometer is characterized by comprising an ion source, an electric field analyzer, a magnetic field analyzer and an ion flow detector; the electric field generated by the electric field analyzer and the magnetic field generated by the magnetic field analyzer are mutually orthogonally nested; wherein, the electric field analyzer generates 1/4 circular electric field, the electric field direction is radial, the magnetic field force FBIs the force of an electric field FE2 times the distance l from the ion source outlet to the electric field inlet0Distance l from the electric field outlet to the ion current detector1，l0＝l1And is equal to 0.35 times the beam deflection radius r.
2. The compact, high performance space detection mass spectrometer of claim 1, wherein said ion source is an electron impact ionization source based on a symmetric magnetic field and a dual filament configuration.
3. The compact, high performance space probe mass spectrometer of claim 1, wherein the ion current detector receives the ion current using an electron multiplier.
4. A compact high performance space probe mass spectrometer as claimed in claim 1 wherein said magnetic field analyzer comprises a magnet, pole piece and yoke; the magnet is made of Nd-Fe-B permanent magnet with high magnetic energy product, and the pole shoe and the yoke are made of soft magnetic alloy with high magnetic conductivity.
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| CN201911358714.9A CN111146070B (en) | 2019-12-25 | 2019-12-25 | Small-size high performance space detection mass spectrometer |
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| CN111146070B CN111146070B (en) | 2023-06-16 |
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3984682A (en) * | 1974-07-12 | 1976-10-05 | Nihon Denshi Kabushiki Kaisha | Mass spectrometer with superimposed electric and magnetic fields |
| JPS5234785A (en) * | 1975-09-12 | 1977-03-16 | Shimadzu Corp | Mass spectrometer |
| US4054796A (en) * | 1975-06-24 | 1977-10-18 | Nihon Denshi Kabushiki Kaisha | Mass spectrometer with superimposed electric and magnetic fields |
| EP0097535A2 (en) * | 1982-06-23 | 1984-01-04 | Fujitsu Limited | Crossed-field velocity filter and ion-beam processing system |
| DE3301305A1 (en) * | 1983-01-17 | 1984-07-19 | Jeol Ltd., Akishima, Tokio/Tokyo | Mass spectrometer |
| GB2133924A (en) * | 1983-01-17 | 1984-08-01 | Jeol Ltd | Mass spectrometry |
| JPS59215650A (en) * | 1983-05-24 | 1984-12-05 | Jeol Ltd | Mass analysis device |
| US4912326A (en) * | 1987-09-18 | 1990-03-27 | Jeol Ltd. | Direct imaging type SIMS instrument |
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| CN206432236U (en) * | 2016-12-22 | 2017-08-22 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure magnetic enhancement and magnetic confinement direct current glow discharge ion source |
-
2019
- 2019-12-25 CN CN201911358714.9A patent/CN111146070B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3984682A (en) * | 1974-07-12 | 1976-10-05 | Nihon Denshi Kabushiki Kaisha | Mass spectrometer with superimposed electric and magnetic fields |
| US4054796A (en) * | 1975-06-24 | 1977-10-18 | Nihon Denshi Kabushiki Kaisha | Mass spectrometer with superimposed electric and magnetic fields |
| JPS5234785A (en) * | 1975-09-12 | 1977-03-16 | Shimadzu Corp | Mass spectrometer |
| EP0097535A2 (en) * | 1982-06-23 | 1984-01-04 | Fujitsu Limited | Crossed-field velocity filter and ion-beam processing system |
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| US4945236A (en) * | 1988-04-28 | 1990-07-31 | Jeol Ltd. | Direct imaging type SIMS instrument having TOF mass spectrometric mode |
| JPH03245451A (en) * | 1990-02-21 | 1991-11-01 | Jeol Ltd | Mass analyzer |
| WO2001085312A1 (en) * | 2000-05-08 | 2001-11-15 | Mass Sensors, Inc. | Microscale mass spectrometric chemical-gas sensor |
| US20020014587A1 (en) * | 2000-07-25 | 2002-02-07 | Benveniste Victor M. | Method and system for ion beam containment in an ion beam guide |
| US6815674B1 (en) * | 2003-06-03 | 2004-11-09 | Monitor Instruments Company, Llc | Mass spectrometer and related ionizer and methods |
| US20140339435A1 (en) * | 2011-12-15 | 2014-11-20 | Thales | System for detecting and counting ions |
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