CN1110949A

CN1110949A - Improved conveyance system

Info

Publication number: CN1110949A
Application number: CN 95101791
Authority: CN
Inventors: W·J·富特; C·W·本多尔; R·G·P·库塞
Original assignee: BOC Group Ltd
Current assignee: BOC Group Ltd
Priority date: 1994-01-27
Filing date: 1995-01-27
Publication date: 1995-11-01
Also published as: JPH07270019A; EP0667634A1; GB9401528D0; DE69508296D1; EP0667634B1; DE69508296T2

Abstract

A non-water cooled conveyance vehicle for the transportation of a wholly or partially evacuated vessel, the vessel including: a vacuum pumping system gripper means for receiving a neck of the vessel and sealingly connecting the interior of the vessel to the pumping system via the neck, an on-board refrigeration system for providing circulating refrigerant fluid to and from heat exchange means associated with the gripper means.

Description

Improved conveyance system

The present invention relates to the improved conveying arrangement that in the vacuum article manufacture process, uses, particularly the vehicle of the special use of in these devices, using.

In the production of teletube or other forms of similar pipe,, need be evacuated to this class pipe less than 10 usually in the final fabrication phase ^-6The excess pressure of millibar simultaneously, at least some fabrication phases, allows the heating pipe.

In the representative type manufacturing line, every kind of pipe is placed in and forms on the single transport vehicle of device feature (being called " car " sometimes), and wherein vehicle still moves along straight line or annular/oval manufacturing line with continuous mode of motion slowly.Each conveying arrangement for example 70 to 100 minutes manufacturing line in the time representative type can comprise until 250 cars (perhaps depending on manufactured article).

With regard to image reconstructor, every kind of vehicle comprises the needs equipment in each processing and manufacturing stage of enforcement.Known vehicle has the vacuum that for example is diffused pump or turbomolecular pump form usually, and described this class vacuum supports after by rotary pump.

Known vehicle also has gripper equipment usually, and gripper equipment is used to hold " neck " of teletube and the inside of described pipe is connected hermetically with vacuum, so that keep the vacuum in the pipe.

Yet the vehicle that comprises this equipment also needs to supply with water usually and cools off this kind equipment with actv..At first, gripper equipment adopts water-cooled usually, so that it remains on the temperature that needs, and this moment, gripper equipment was to contact with the pipe that is heated.

Adopt known mode in whole production operation process, need supply with cooling water expansion tank to the diffused pump usually equally, in the prior art.In addition, in order to prevent diffused pump known " backflow " problem, the working fluid that is the diffused pump refluxes towards the pump mouth from the nozzle of pump, thereby need set up chamber, as everyone knows, such pump comprises water-cooled " retaining ring " or " dividing plate ", is blocked by it is solidified on retaining ring or dividing plate so that reflux.

Yet, be conspicuous with the relevant shortcoming of using this moving vehicle of water cooling.Vehicle need assemble usually and carry water-circulating pump cooling water expansion tank extraction and gargle pipe together; Water extraction and gargle pipe, increase thereby maintain so be easy to damage or dislocation because of its extra assembling position, reduce operating reliability.

In addition, the vehicular transport device must be provided with water and suck and letdown tank, the groove that causes owing to the duct member by implosion blocks and also needs more maintenance, and the duct member of implosion can cause simultaneously suck and gargle pipe in the water of guiding pump turn to and/or flow away and handgrip overheated with the opening circuit of vehicle.In producing the special quality electronics package, it also is difficult keeping necessary high-caliber cleanliness level.

Describe the equipment of the transport vehicle of type above the present invention relates to, wherein above mentioned difficulty can be overcome.

According to the present invention, be provided for transmitting transport vehicles whole or the part vacuum-pumping container, this transport vehicles comprises:

Vacuum pick-up system

Be used for the storage container neck and internal tank be connected to the gripper equipment of suction system by neck

To providing the chiller on the load instrument of circulating cooling fluid with the heat exchange rig that gripper equipment connects mutually

Preferably the vehicle chiller also further comprises the heat exchange rig that connects mutually with vacuum pick-up system.This heat exchange rig can be provided with " shading ring " or " dividing plate " specially in diffused vacuum pump housing.

The frigorific unit of use on the load instrument eliminated the needs of gripper equipment to cooling water expansion tank, also eliminated their needs to cooling water expansion tank if be provided with the shading ring that connects mutually with the diffused vacuum pump or dividing plate.

Refrigerating system can be made of any known structure, but preferably include a compressor, this driven compressor refrigeration fluid ring is around the loop of a closure, and the fluid that especially drives pressurized is to the H Exch that connects mutually with gripper equipment, and said fluid allows to expand and the cooling gripper equipment.

Dilated refrigeration fluid is preferably also by another heat exchange rig, pack into C/LOOP and connect mutually with diffused pump (if any) as a suction system part of this heat exchange rig.

All transport vehicle members must be installed on the suitable car body, and this car body is suitable for being used in the conveyer just, so that vehicle can slowly be moved along its manufacturing line usually.

For understanding the present invention preferably, the major technique feature of vehicle of the present invention is only described generally by way of example referring now to Figure of description.

With reference to accompanying drawing, show a pump intake device that is bound up on (itself is not shown) on the vehicle chassis, it comprises the different parts of bonded assembly sealed to each other of some, especially cylindrical main pipe 1, normally

less parts

2,3 and 4, and the supporting head 5 of a hollow.

Supporting head 5 have one can with the diffused pump or the turbomolecular pump (not shown) bonded assembly flange 6 of production-release design, if necessary, diffuser pump can with the back-to-back arrangement of oil packing rotary pump.

According to most preferred embodiment of the present invention, the diffused pump is designed to air-cooled.Parts 3 have the elongated portion 7 that a level is pointed to, and this elongated portion end is a flange, can connect the suction gage of known design on it.Parts 3 also have a vertical elongation " cap " 8 of pointing to, and " cap " 8 plays as a glass cover and hold issuable organic matter residue.In use, cap 8 is connected to parts 3 hermetically, and still, after vehicle used, it can be opened to remove the organic matter residue.

Main pipe 1 is connected to handgrip 9 with its upper end, handgrip 9 has the handgrip head of being made by heat conducting material 10 and has three upright openings that vertically pass, wherein the

hole

11,12 of two maximums is used to hold the seal ring (not shown), and the neck shaped of opening wide of pipe can be transmitted along manufacturing line, and the 3rd hole 13 makes between the pumparound of tube interior and vehicle and can connect.

Handgrip 9 also comprises a H Exch 14 with handgrip head 10 closed contacts, and H Exch 14 comprises that having multiple interior space/passage is defined in salver, some therebetween.

Vehicle also has dress refrigeration system thereon, and refrigeration system comprises a refrigeration system 15 that adopts the air cooled compressor set.Fridge equipment also defines one and is suitable for the inlet 17 on-cycle C/LOOPs of cooling fluid from the compressor set that adopts capillary tub joint 16 forms to the heat exchange rig 14 of handgrip head 10, and cooling fluid is to get back to refrigeration system 15 by the internal channel and the pipe unit 18 of device 14.

In being shown in the most preferred embodiment of accompanying drawing, pipe unit 18 is by the wall of supporting head 5; Another heat exchange rig is the form setting of " herringbone " shape dividing plate 19." dividing plate " that this dividing plate 19 forms one " retaining ring " or connects mutually with the mouth of diffused pump, in use, the diffused pump is fixed to flange 6.Retaining ring or cooling headgear can play the effect of above-described mode.

In vehicle operation, air cooled diffused pump (perhaps turbomolecular pump) is connected to flange 6 and best and the back-to-back setting of oil packing pump, and pipe processed on manufacturing line is contained in the handgrip 9 hermetically with the suction gage that is connected to flange 6 hermetically.Cooling fluid is by the air cooling compression set of pipe 16 from cooling system 15; Promptly direction shown in the arrow is pushed into around cooling mechanism among the figure, after this expands in heat exchanger device 14 and at this cooling handgrip 9; Expand in view of the above, chilled refrigeration fluid is advanced to chevron pointing dividing plate 19 by pipe unit 18, thereby cooled partition and turns back to system 15 from dividing plate.

Claims

1, a kind ofly be applicable to whole or part vacuumizes the non-water-cooled transport vehicles that vehicle transmits, this vehicle comprises:

A vacuum suction apparatus

Be used for the neck of storage container and by neck the inside of container and aspirator bonded assembly gripper equipment hermetically

Be contained in the cooling mechanism on the vehicle, its be used for making cooling fluid with heat exchange rig that gripper equipment connects mutually in reciprocation cycle.

2, according to a kind of transport vehicles of claim 1, it also further comprises the heat exchange rig that is connected with the vacuum pump mouth of vacuum suction apparatus.

3, according to a kind of transport vehicles of claim 2, wherein another heat exchange rig is connected with the diffused pump, and the diffused pump is provided with a retaining ring or dividing plate.

4, according to the transport vehicles of aforementioned arbitrary claim, wherein cooling mechanism comprises that one advances the compressor reducer of cooling fluid around a closed loop.

5, according to a kind of transport vehicles of claim 4, wherein compressor reducer is advanced to a H Exch that connects mutually with gripper equipment to the pressurized cooling fluid, allows cooling fluid to expand and the cooling gripper equipment at this.

6, according to a kind of transport vehicle of claim 4 or 5, wherein dilated cooling fluid flows through another heat exchange rig, and this heat exchange rig is arranged in the circulation loop.

7, according to the transport vehicles of claim 6, wherein other heat-exchange fluid is to interrelate with diffused pump as an aspirator part.

8, according to a kind of transport vehicles of aforementioned arbitrary claim, it comprises the vehicle body that vehicle part is fixed in the above, and vehicle body is suitable for being used in the feedway, so that vehicle can move slowly along manufacturing line.