CN111076654A - Eddy current displacement sensor calibration device for measuring thickness of oil film - Google Patents

Eddy current displacement sensor calibration device for measuring thickness of oil film Download PDF

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Publication number
CN111076654A
CN111076654A CN202010064466.3A CN202010064466A CN111076654A CN 111076654 A CN111076654 A CN 111076654A CN 202010064466 A CN202010064466 A CN 202010064466A CN 111076654 A CN111076654 A CN 111076654A
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guide rail
eddy current
displacement
displacement sensor
calibration
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王建梅
段林涛
侯定邦
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Taiyuan University of Science and Technology
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Taiyuan University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

本发明涉及一种用于油膜厚度测量的电涡流位移传感器标定装置,目的是为了解决现有的电涡流位移传感器标定装置在标定过程中不能保证水平放置精度、针对不同型号的传感器探头只能通过夹持的方式进行固定、无法确保传感器探头与靶面有效贴合的技术问题。技术方案包括位移校准导轨、水平仪、固定支架、可调节移动支架、螺旋千分尺和靶面;固定支架设在位移校准导轨的导轨上并位于导轨的一侧;可调节移动支架设在位移校准导轨的导轨上并位于导轨的另一侧,螺旋千分尺设在可调节移动支架上,靶面设在螺旋千分尺一端的螺纹孔中并靠近固定支架。本发明结构简单,水平放置精度高,易于调节,生产成本低,兼具互换性与实用性,普适性也大大提高。

Figure 202010064466

The invention relates to a calibration device for an eddy current displacement sensor used for oil film thickness measurement. It is a technical problem that the method of clamping cannot ensure the effective fit of the sensor probe and the target surface. The technical scheme includes a displacement calibration guide rail, a spirit level, a fixed bracket, an adjustable movable bracket, a screw micrometer and a target surface; the fixed bracket is arranged on the guide rail of the displacement calibration guide rail and is located on one side of the guide rail; the adjustable movable bracket is arranged on the side of the displacement calibration guide rail. On the guide rail and on the other side of the guide rail, the screw micrometer is arranged on the adjustable movable bracket, and the target surface is arranged in the threaded hole at one end of the screw micrometer and is close to the fixed bracket. The invention has the advantages of simple structure, high horizontal placement accuracy, easy adjustment, low production cost, interchangeability and practicability, and greatly improved universality.

Figure 202010064466

Description

Eddy current displacement sensor calibration device for measuring thickness of oil film
Technical Field
The invention belongs to the technical field of sensor calibration, and particularly relates to an eddy current displacement sensor calibration device for measuring the thickness of an oil film.
Background
The oil film bearing is widely applied to high-end key equipment in various industries, and the requirement of low-speed heavy-load operation working conditions on stable formation of an oil film is very important, so that the bearing performance of the bearing is ensured, and the friction between a shaft and a bearing bush is reduced to a certain extent. The rigidity and the bearing capacity of the oil film bearing mainly depend on the thickness of an oil film, and the measurement of the film thickness is particularly important. However, the eddy current displacement sensor for measuring the thickness of the oil film has certain drift after being used for a period of time, and the sensor needs to be verified.
The eddy current displacement sensor has higher requirement on the levelness of a placing plane in the calibration process. At the present stage, the traditional calibration device in the market can not guarantee the horizontal placement precision, is only limited to be fixed in a clamping mode aiming at the sensor probes of different models, and can not ensure the effective fit of the sensor probes and the target surface.
Disclosure of Invention
The invention aims to solve the technical problems that the existing calibration device for the eddy current displacement sensor cannot ensure the horizontal placement precision in the calibration process, can only fix sensor probes of different types in a clamping mode, cannot ensure the effective fit between the sensor probes and a target surface and the like, and provides the calibration device for the eddy current displacement sensor for measuring the thickness of an oil film.
In order to solve the technical problems, the invention adopts the following technical scheme:
an eddy current displacement sensor calibration device for measuring the thickness of an oil film comprises a displacement calibration guide rail, two gradienters, a fixed support, an adjustable movable support, a spiral micrometer and a target surface; the displacement calibration guide rail comprises a bottom plate and a guide rail positioned in the middle of the bottom plate, the two gradienters are symmetrically arranged on the bottom plates at two sides of the displacement calibration guide rail, the fixed support is arranged on the guide rail of the displacement calibration guide rail and positioned at one side of the guide rail, and the upper part of the fixed support is provided with a plurality of threaded holes matched with the threaded part of the probe of the eddy current displacement sensor; the adjustable movable support is arranged on a guide rail of the displacement calibration guide rail and located on the other side of the guide rail, the spiral micrometer is arranged on the adjustable movable support, and the target surface is arranged in a threaded hole in one end of the spiral micrometer and close to the fixed support.
Furthermore, foundation bolts are respectively arranged at four corners of the bottom plate of the displacement calibration guide rail.
Furthermore, the adjustable movable support comprises a base, a screw rod adjusting seat arranged on the base, an adjusting screw rod arranged on the screw rod adjusting seat, a lower supporting plate arranged at the upper end of the adjusting screw rod, an upper pressing plate arranged above the lower supporting plate, a connecting rod for connecting the lower supporting plate and the upper pressing plate, and fastening bolts arranged at two ends of the upper pressing plate, the spiral micrometer is arranged on the lower supporting plate and fixed through the upper pressing plate and the fastening bolts, and the base is arranged on a guide rail of the displacement calibration guide rail.
Furthermore, the adjusting screw, the lower supporting plate and the upper pressing plate are provided with two groups.
Furthermore, the upper end of the adjusting screw is provided with a rubber protective sleeve.
Further, the bottom of the upper pressure plate is provided with a rubber protection pad.
By adopting the technical scheme, the invention has the following beneficial effects:
1. according to the invention, the displacement calibration guide rail is arranged, the fixed support for mounting the sensor probe and the adjustable movable support for mounting the target surface are arranged on the displacement calibration guide rail, so that the sensor probe is ensured to be effectively attached to the target surface, and the foundation bolt and the level gauge are arranged on the bottom plate of the displacement calibration guide rail, so that the horizontal placement of the displacement calibration guide rail is ensured.
2. The upper part of the fixing bracket is provided with a plurality of threaded holes matched with the threaded parts of the probes of the eddy current displacement sensor, so that the probes of different types can be installed, and the fixing bracket has a wide application range.
3. The horizontal placing device is simple in structure, high in horizontal placing precision, easy to adjust, low in production cost, and capable of achieving interchangeability and practicability and greatly improving universality. The calibration device solves the technical problems that the existing calibration device for the eddy current displacement sensor cannot ensure the horizontal placement precision in the calibration process, can only fix the sensor probes of different types in a clamping mode, and cannot ensure the effective attachment of the sensor probes and a target surface.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of an adjustable mobile mount according to the present invention;
FIG. 3 is a partial cross-sectional view of an adjustable motion housing according to the present invention;
FIG. 4 is a calibration curve between calibration displacement, converted displacement and voltage when calibrating an eddy current displacement sensor in accordance with the present invention;
FIG. 5 is a fitting curve of the transfer displacement when calibrating the eddy current displacement sensor according to the present invention.
In the figure: moving a calibration guide rail-1; a level-2; a fixed support-3; an adjustable moving support-4; a base-401, a screw adjusting seat-402, an adjusting screw-403, a lower supporting plate-404, an upper pressing plate-405, a connecting rod-406, a fastening bolt-407, a rubber protective sleeve-408 and a rubber protective pad-409; a screw micrometer-5; target surface-6; anchor bolts-7.
Detailed Description
The invention is further described below with reference to the drawings and field measurement data.
As shown in fig. 1 and fig. 2, the calibration device for the eddy current displacement sensor for measuring the thickness of an oil film in the present embodiment includes a displacement calibration guide rail 1, two gradienters 2, a fixed support 3, an adjustable moving support 4, a micrometer 5 and a target surface 6; the displacement calibration guide rail 1 comprises a bottom plate and a guide rail located in the middle of the bottom plate, the two gradienters 2 are symmetrically arranged on the bottom plates on two sides of the displacement calibration guide rail 1, and foundation bolts 7 are respectively arranged on four corners of the bottom plate of the displacement calibration guide rail 1.
The displacement calibration guide rail 1 can be horizontally placed through the four foundation bolts 7 and the level gauge 2. Adjustable movable support 4 moves on the guide rail of displacement calibration guide rail 1, can make target surface 6 and the effective laminating of eddy current displacement sensor probe, adjusts four rag bolts, judges whether to place the level through the spirit level of observing the left and right sides.
The fixed support 3 is arranged on the guide rail of the displacement calibration guide rail 1 and is positioned on one side of the guide rail, and the upper part of the fixed support 3 is provided with a plurality of threaded holes which are matched with the threaded part of the probe of the eddy current displacement sensor and are used for installing the eddy current displacement sensor; the adjustable moving support 4 is arranged on the guide rail of the displacement calibration guide rail 1 and is positioned at the other side of the guide rail.
As shown in fig. 3, the adjustable moving bracket 4 includes a base 401, a screw adjusting seat 402 disposed on the base 401, two adjusting screws 403 disposed on the screw adjusting seat 402, two lower support plates 404 disposed at the upper ends of the two adjusting screws 403, two upper press plates 405 disposed above the two lower support plates 404, a connecting rod 406 connecting the lower support plates 404 and the upper press plates 405, and fastening bolts 407 disposed at both ends of the upper press plates 405, the micrometer screws 5 are disposed on the lower support plates 404 and fixed by the upper press plates 405 and the fastening bolts 407, and the base 401 is disposed on the guide rail of the displacement calibration guide rail 1.
The target surface 6 is arranged in a threaded hole at one end of the micrometer 5 and close to the fixed support 3. The central line of the positioning hole of the probe of the eddy current displacement sensor is kept level with the center of the target surface 6 by adjusting the adjustable movable support 4 to move up and down.
The upper end of the adjusting screw 403 is provided with a rubber protective sleeve 408. The bottom of the upper pressure plate 405 is provided with a rubber protection pad 409.
The using method of the invention is as follows:
1. adjusting the foundation bolts 7, and judging the placement level of the displacement calibration guide rail 1 through the level meter 2;
2. mounting the fixed support 3 and the adjustable mobile support 4 on the displacement calibration guide rail 1;
3. embedding the probe of the eddy current displacement sensor into a threaded hole at the upper end of a fixed support 3, placing a spiral micrometer 5 on a lower supporting plate 404 of an adjustable movable support 4, fixing the spiral micrometer 5 with a fastening bolt 407 through an upper pressing plate 405, and then embedding a target surface 6 into a threaded hole at the end part of the spiral micrometer 5;
4. the target surface 6 is attached to the probe of the eddy current displacement sensor, the spiral micrometer 5 is adjusted, the distance between the target surface 6 and the probe of the eddy current displacement sensor is sequentially increased by displacement increment delta x which is 0.25mm, voltage changes under different calibration displacements and conversion displacements after correction of a PLC program are collected through a computer, and then calibration displacement and a calibration curve between the conversion displacement and the voltage are obtained.
5. And obtaining a relational expression between the conversion displacement and the calibration displacement by utilizing Origin linear fitting, and correcting the PLC program.
The invention is further described below with reference to a specific field measurement data.
Firstly, according to the delivery data of the eddy current displacement sensor and the range of the measuring range of the eddy current displacement sensor, the distance between the probe of the sensor and the target surface 6 is adjusted according to the displacement increment delta x of 0.25mm in sequence, the adjustment process takes the output voltage of a front end device as the standard, and the conversion displacement results obtained by the calibration displacements on a computer are recorded. The in-situ calibration data of the eddy current displacement sensor are shown in table 1.
TABLE 1 on-site calibration data of eddy current displacement sensor
Figure BDA0002375530500000041
Figure BDA0002375530500000051
Before the positioning and shifting of the adjusting mark, firstly, a power supply is switched on for a prepositive device of the eddy current displacement sensor, the distance between a sensor probe and a target surface 6 is adjusted by adjusting a screw micrometer 5, data acquired by the eddy current displacement sensor is processed by a PLC, and finally, the voltage and the indication of the converted displacement are read on a computer. And obtaining a relational expression between the conversion displacement and the calibration displacement by utilizing Origin linear fitting, and correcting the PLC program to ensure that the measurement result is more accurate.
FIG. 4 is a calibration curve between calibration displacement, converted displacement and voltage when calibrating an eddy current displacement sensor in accordance with the present invention; FIG. 5 is a fitting curve of the transfer displacement when calibrating the eddy current displacement sensor according to the present invention. From fig. 5, the fitting equation can be obtained as y-0.8628 x-0.1940, where x is the nominal displacement and y is the conversion displacement.

Claims (6)

1.一种用于油膜厚度测量的电涡流位移传感器标定装置,其特征在于:包括位移校准导轨(1)、两个水平仪(2)、固定支架(3)、可调节移动支架(4)、螺旋千分尺(5)和靶面(6);所述位移校准导轨(1)包括底板和位于底板中间的导轨,所述两个水平仪(2)对称设置在位移校准导轨(1)两侧的底板上,所述固定支架(3)设在位移校准导轨(1)的导轨上并位于导轨的一侧,所述固定支架(3)的上部设有若干与电涡流位移传感器探头螺纹部分相适应的螺纹孔;所述可调节移动支架(4)设在位移校准导轨(1)的导轨上并位于导轨的另一侧,所述螺旋千分尺(5)设在可调节移动支架(4)上,所述靶面(6)设在螺旋千分尺(5)一端的螺纹孔中并靠近固定支架(3)。1. An eddy current displacement sensor calibration device for oil film thickness measurement, characterized in that: it comprises a displacement calibration guide rail (1), two levels (2), a fixed bracket (3), an adjustable movable bracket (4), A screw micrometer (5) and a target surface (6); the displacement calibration guide rail (1) includes a base plate and a guide rail located in the middle of the base plate, and the two levels (2) are symmetrically arranged on the base plate on both sides of the displacement calibration guide rail (1) Above, the fixed bracket (3) is arranged on the guide rail of the displacement calibration guide rail (1) and is located on one side of the guide rail, and the upper part of the fixed bracket (3) is provided with a number of eddy current displacement sensor probes. threaded holes; the adjustable movable bracket (4) is arranged on the guide rail of the displacement calibration guide rail (1) and is located on the other side of the guide rail, and the screw micrometer (5) is arranged on the adjustable movable bracket (4), so The target surface (6) is arranged in a threaded hole at one end of the screw micrometer (5) and is close to the fixing bracket (3). 2.根据权利要求1所述的一种用于油膜厚度测量的电涡流位移传感器标定装置,其特征在于:所述位移校准导轨(1)的底板的四角上分别设有一个地脚螺栓(7)。2. The eddy current displacement sensor calibration device for oil film thickness measurement according to claim 1, characterized in that: an anchor bolt (7) is respectively provided on the four corners of the bottom plate of the displacement calibration guide rail (1). ). 3.根据权利要求1所述的一种用于油膜厚度测量的电涡流位移传感器标定装置,其特征在于:所述可调节移动支架(4)包括底座(401)、设在底座(401)上的螺杆调节座(402)、设在螺杆调节座(402)上的调节螺杆(403)、设在调节螺杆(403)上端的下托板(404)、设在下托板(404)上方的上压板(405)、连接下托板(404)和上压板(405)的连接杆(406)以及设在上压板(405)两端的紧固螺栓(407),所述螺旋千分尺(5)设在下托板(404)上并通过上压板(405)和紧固螺栓(407)固定,所述底座(401)设在位移校准导轨(1)的导轨上。3. An eddy current displacement sensor calibration device for oil film thickness measurement according to claim 1, characterized in that: the adjustable movable bracket (4) comprises a base (401), which is arranged on the base (401) The screw adjustment seat (402), the adjustment screw (403) arranged on the screw adjustment seat (402), the lower support plate (404) arranged on the upper end of the adjustment screw (403), the upper support plate (404) arranged on the upper The pressure plate (405), the connecting rod (406) connecting the lower support plate (404) and the upper pressure plate (405), and the fastening bolts (407) arranged at both ends of the upper pressure plate (405), the screw micrometer (5) is arranged on the lower plate (405). The support plate (404) is fixed by the upper pressing plate (405) and the fastening bolts (407), and the base (401) is arranged on the guide rail of the displacement calibration guide rail (1). 4.根据权利要求3所述的一种用于油膜厚度测量的电涡流位移传感器标定装置,其特征在于:所述调节螺杆(403)、下托板(404)和上压板(405)均设有两组。4. An eddy current displacement sensor calibration device for oil film thickness measurement according to claim 3, characterized in that: the adjusting screw (403), the lower support plate (404) and the upper pressure plate (405) are all provided with There are two groups. 5.根据权利要求3所述的一种用于油膜厚度测量的电涡流位移传感器标定装置,其特征在于:所述调节螺杆(403)的上端设有橡胶保护套(408)。5. An eddy current displacement sensor calibration device for oil film thickness measurement according to claim 3, characterized in that: the upper end of the adjusting screw (403) is provided with a rubber protective cover (408). 6.根据权利要求3所述的一种用于油膜厚度测量的电涡流位移传感器标定装置,其特征在于:所述上压板(405)的底部设有橡胶保护垫(409)。6 . The eddy current displacement sensor calibration device for oil film thickness measurement according to claim 3 , wherein a rubber protection pad ( 409 ) is provided at the bottom of the upper pressing plate ( 405 ). 7 .
CN202010064466.3A 2020-01-20 2020-01-20 Eddy current displacement sensor calibration device for measuring thickness of oil film Pending CN111076654A (en)

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CN112378326A (en) * 2020-10-10 2021-02-19 中国科学院苏州生物医学工程技术研究所 Single-end type eddy current micro-displacement sensor calibration device and method, computer equipment and storage medium
CN113137943A (en) * 2021-06-03 2021-07-20 沈阳工业大学 Displacement sensor calibration device and measurement method thereof
CN115371533A (en) * 2022-07-22 2022-11-22 北京航天动力研究所 Calibration device for eddy current displacement sensor under liquid hydrogen and liquid oxygen environment

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Publication number Priority date Publication date Assignee Title
CN112378326A (en) * 2020-10-10 2021-02-19 中国科学院苏州生物医学工程技术研究所 Single-end type eddy current micro-displacement sensor calibration device and method, computer equipment and storage medium
CN113137943A (en) * 2021-06-03 2021-07-20 沈阳工业大学 Displacement sensor calibration device and measurement method thereof
CN115371533A (en) * 2022-07-22 2022-11-22 北京航天动力研究所 Calibration device for eddy current displacement sensor under liquid hydrogen and liquid oxygen environment
CN115371533B (en) * 2022-07-22 2024-07-09 北京航天动力研究所 Eddy current displacement sensor calibration device under liquid hydrogen and liquid oxygen environments

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