CN111069778A - Method and system for generating microstructure in optical fiber - Google Patents
Method and system for generating microstructure in optical fiber Download PDFInfo
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- CN111069778A CN111069778A CN201811217852.0A CN201811217852A CN111069778A CN 111069778 A CN111069778 A CN 111069778A CN 201811217852 A CN201811217852 A CN 201811217852A CN 111069778 A CN111069778 A CN 111069778A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The embodiment of the invention provides a method and a system for generating a microstructure in an optical fiber, which are characterized in that target laser is transmitted through a target optical fiber and is combined with external heating, so that an optical fiber substance at a preset position on the target optical fiber absorbs the target laser to a required degree at a heated position, the target optical fiber is processed by the target laser, and the microstructure which is not originally present in the target optical fiber is generated near the heated position. The method for generating the microstructure on the optical fiber provided by the embodiment of the invention greatly simplifies the traditional method for generating the microstructure on the optical fiber, and improves the production efficiency and the production quality of the target microstructure in the target optical fiber.
Description
Technical Field
The embodiment of the invention relates to the technical field of microstructure optical fibers, in particular to a method and a system for generating a microstructure in an optical fiber.
Background
An optical fiber is a wire with an optical waveguide structure, by which light can be confined to propagate in a channel like a water pipe.
Microstructured optical fiber is a new type of optical fiber, where the presence of microstructures on the fiber gives the fiber many unique characteristics. The microstructure present on the optical fiber means a microstructure which is physically attached to the optical fiber but does not belong to the "core/cladding" structure in the usual sense. That is, the microstructure can be a cavity (with or without a gas present in the cavity), metal particles, metal-semiconductor mixture particles, polymer particles, liquid clusters, particles or clusters of combinations of the above and other substances that occupy only a limited length of the fiber; the microstructures may also be such structures distributed a substantial distance along the length of the fiber, such as cavity channels in a photonic crystal fiber. The microstructures may be optical waveguide structures that themselves participate in the construction of the optical fiber, that is, the microstructures are theoretically believed to help confine light to propagate within a certain spatial range. The microstructure has a maximum physical dimension of no more than 1 cm in a cross-section perpendicular to the direction of the optical fiber.
The microstructures can be present inside the fiber (i.e., completely covered by the material comprising the fiber, not in contact with the external environment), on the surface of the fiber, in contact with the external environment (for solid microstructures such as beads, etc.) or in communication (for hollow microstructures such as cavities, etc.). The microstructure may be distributed repeatedly over the optical fiber, for example, where a plurality of metal beads are arranged on one optical fiber, each bead is considered to be a microstructure. For another example, a photonic crystal fiber has a plurality of cavity channels along the fiber, and each cavity channel can be considered as a microstructure.
Similar to electronic chips, the optical fiber can realize the regulation and transformation of light properties by designing a specific microstructure. For example, the cavity microstructure fiber can be used as a sensor based on the Fabry-Perot (Fabry-Perot) interference principle to sense parameters such as temperature, stress, humidity and refractive index; the special shape of the transmission spectrum of the microstructure fiber can be used as a wavelength filter (edgefilter), and even the microstructure fiber can be used for cell sampling (cellselection), drug delivery (drug delivery) and the like in a special scene. Metal and semiconductor micro-structured optical fibers are considered to be possibly applied to scenes such as solar energy, all-optical information processing (namely 'optical chips') and the like.
In order to produce microstructures on optical fibers, microstructured optical fibers are manufactured, and the prior art methods can be roughly classified into three categories. The first type of method, called "top-down", is characterized by using an optical fiber that has been completely manufactured and has no desired microstructure, and removing a portion of the material and structure of the optical fiber in a certain way to form the desired microstructure on the optical fiber. The development of this approach has now led to a set of processes that are in principle relatively fixed.
For example, the process and apparatus used to create a void-type microstructure (with or without gas) within an optical fiber is shown in FIG. 1. A certain depressed shape 14 is first created at one end core location 13 of the completed fiber 11. The judgment basis of whether the fiber core position at one end of the optical fiber 11 generates the concave shape is as follows: the desired void-type microstructure can be made to appear inside the fiber when the subsequent steps are completed. This recessed shape may be provided by laser micromachining, such as laser micromachining system 12 in FIG. 1, to irradiate an end core location 13 of optical fiber 11 until recessed shape 14 is created. The recessed shape may also be provided by chemical etching, ion etching, or fusion splicing to another section of fiber that already has a recessed structure, such as a hollow fiber, capillary, photonic crystal fiber, etc. The optical fiber 11 with the depressed shape 14 is then fusion spliced with another optical fiber 15 by a fusion splicing apparatus 16 so that the depressed shape 14 is embedded between the optical fiber 11 and the optical fiber 15, forming a hollow-type microstructure 17. Whether the hollow microstructure 17 contains gas or not depends on whether the above process occurs in vacuum or not, and whether the material of the optical fiber itself releases gas during fusion splicing, which is complicated. If only the hollow microstructure communicating with the external environment (such as air, vacuum, or a liquid soaked in the air) is formed on the surface of the optical fiber, the hollow microstructure can be directly formed by the depressed shape 14 without fusion-splicing the optical fiber 11 and the optical fiber 15.
The second category, known as "bottom-up" (button-up) methods, is characterized by using the raw material from which the optical fiber is produced, placing the microstructures into the raw material (usually also liquid) without finally forming the optical fiber, and then solidifying the raw material into an optical fiber. For example, a hollow microstructure is generated inside an optical fiber made of a polymer material, and a gas is blown into a liquid polymer having a special performance by a needle connected to a high-precision micropump, so that the polymer containing the gas is solidified in the form of the optical fiber in a salt solution or a mold. In this process, the gas is encapsulated inside by the solidified polymer, thereby forming a hollow-hole type microstructure inside the optical fiber.
The third method combines some characteristics of the first two methods, and is usually used to fabricate microstructures with more complex materials (e.g., silicon germanium coexisting materials). The general steps are that substances with lower melting point than that of the optical fiber substrate material are embedded (or doped or dissolved) in advance in the manufacturing process of the optical fiber or the optical fiber preform, and after the formed optical fiber or the optical fiber preform is obtained, the optical fiber or the optical fiber preform is reheated, so that the substances for forming the microstructure in the optical fiber or the optical fiber preform are rearranged in space, and the needed microstructure is formed. For example, to obtain an optical fiber with a silica-based hetero-sphere microstructure of silicon germanium, it is necessary to embed silicon and germanium in the core (inside of the preform) to form an inner layer material uniformly or uniformly distributed along the direction of the optical fiber when the optical fiber (preform) is manufactured. The fiber (preform) is then reheated and drawn so that the lower melting point sige mixture of the inner layer melts and redistributes without complete melting and disintegration of the silica of the outer layer. This redistribution can be broken up into individual globules (similar to a water column under a faucet breaking up into water droplets) by fluid instability under precisely controlled thermal conditions. Through the fiber drawing process, the fiber containing the silicon-germanium heterogeneous ball microstructure is obtained.
It can be seen that the methods for generating microstructures on optical fibers provided in the prior art, on the one hand, involve complicated operations on optical fibers, and require the participation of expensive and large-area instruments and equipment, such as laser micromachining systems, chemical etching systems, ion etching systems, micropumps, and special polymer materials, and fiber drawing systems, which are relatively high in cost. On the other hand, since the method itself requires extreme environmental operations (including fusion splicing, cutting, etc.) on the optical fiber, it has a strong influence on the fiber material in the vicinity of the microstructure, which makes it impossible to create a new microstructure around the existing microstructure. Furthermore, in the first type of method, welding and cutting can destroy other microstructures that have already been created around the microstructure being created. In the second or third method, it is more difficult to produce microstructures of different properties in the same optical fiber.
In particular, in a first class of methods, microstructures are created on optical fibers using laser micromachining methods that use ultrafast lasers with peak powers of several megawatts or even higher. Only with such a laser having an extremely high peak power, the transparent optical fiber material can be processed by ablation. Continuous lasers cannot be used for processing of fiber optic materials. Thus, considerable cost and system complexity is incurred by the ultrafast laser.
Disclosure of Invention
To overcome the above problems or at least partially solve the above problems, embodiments of the present invention provide a method and system for generating microstructures in optical fibers.
In a first aspect, an embodiment of the present invention provides a method for generating a microstructure in an optical fiber, including:
heating a preset position on a target optical fiber, and transmitting target laser by using the target optical fiber to generate a microstructure at the preset position;
when the microstructure meets a preset condition, stopping heating or transmitting the target laser, and forming a target microstructure at the preset position;
and the heating time of the preset position on the target optical fiber and the action time of the target laser in the target optical fiber have an overlapping part.
In a second aspect, an embodiment of the present invention provides a system for generating a microstructure in an optical fiber, including:
the microstructure generating module is used for heating a preset position on a target optical fiber and transmitting target laser by using the target optical fiber to generate a microstructure at the preset position;
the target microstructure forming module is used for stopping heating or transmitting the target laser when the microstructure meets a preset condition, and forming a target microstructure at the preset position;
and the heating time of the preset position on the target optical fiber and the action time of the target laser in the target optical fiber have an overlapping part.
According to the method and the system for generating the microstructure in the optical fiber, which are provided by the embodiment of the invention, the target laser is transmitted through the target optical fiber and is combined with external heating, so that the optical fiber substance at the preset position on the target optical fiber can absorb the target laser to a required degree at the heated position, the target optical fiber is processed by the target laser, and the microstructure which is not originally present in the target optical fiber is generated near the heated position. The method for generating the microstructure on the optical fiber provided by the embodiment of the invention greatly simplifies the traditional method for generating the microstructure on the optical fiber, and improves the production efficiency and the production quality of the target microstructure in the target optical fiber.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic flow chart of a method for generating microstructures in an optical fiber according to the prior art;
FIG. 2 is a schematic flow chart illustrating a method for generating microstructures in an optical fiber according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an apparatus for forming a target microstructure when a heating pipe is used as a heating apparatus in a method for generating a microstructure in an optical fiber according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a target microstructure formed when a heating pipe is used as a heating device in a method for generating a microstructure in an optical fiber according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a plurality of target microstructures formed when a heating pipe is used as a heating device in a method for generating microstructures in an optical fiber according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of an apparatus for forming a target microstructure when an electrode with a predetermined voltage is used as a heating device in a method for generating a microstructure in an optical fiber according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a target microstructure formed when an electrode with a predetermined voltage is used as a heating device in a method for generating a microstructure in an optical fiber according to an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a plurality of target microstructures formed when an electrode with a predetermined voltage is used as a heating device in a method for generating microstructures in an optical fiber according to an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of a target microstructure formed when an electrode with a predetermined voltage is used as a heating device in a method for generating a microstructure in an optical fiber according to an embodiment of the present invention;
fig. 10 is a schematic structural diagram of a system for generating a microstructure in an optical fiber according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the embodiments of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.
Because the present application to an optical fiber carrying a microstructure is very wide, and the methods for generating microstructures on optical fibers in the prior art have defects, embodiments of the present invention provide a method and a system for generating microstructures on optical fibers, and aim to provide a method for generating microstructures on optical fibers, so as to avoid the defects of the methods for generating microstructures on optical fibers in the prior art.
As shown in fig. 2, an embodiment of the present invention provides a method for generating a microstructure on an optical fiber, including:
s1, heating a preset position on a target optical fiber, and transmitting target laser by using the target optical fiber to generate a microstructure at the preset position;
s2, when the microstructure meets a preset condition, stopping heating or transmitting the target laser, and forming a target microstructure at the preset position;
and the heating time of the preset position on the target optical fiber and the action time of the target laser in the target optical fiber have an overlapping part.
Specifically, in the method for generating a microstructure on an optical fiber provided in an embodiment of the present invention, a position on a target optical fiber where a target microstructure needs to be formed, that is, a preset position, needs to be determined, where there may be one or more preset positions on the target optical fiber. The target microstructure herein refers to a specific type, specific shape and size of microstructure that needs to be formed on the target optical fiber. Types of microstructures can include metal particles, metal-semiconductor mixture particles, polymer particles, liquid clusters, particles or clusters of combinations of the above and other substances, such as metal sphere microstructures, cavity microstructures, and the like. The shape of the microstructures may include spherical, spindle streamlined, and the like. The size of the microstructures can be set as desired.
After the preset position is determined, heating the preset position on the target optical fiber, and transmitting target laser by using the target optical fiber to enable the preset position to generate a microstructure. The execution sequence of the heating action and the laser transmission action can be set according to requirements, and only the overlapping part of the heating time of the preset position and the action time of the target laser in the target optical fiber is ensured. In the overlapping part, the optical fiber substance at the preset position absorbs the target laser under the condition of being heated, so that the micro-chemical structure of the optical fiber substance at the absorption position (namely the preset position) is subjected to specific change, the optical fiber substance at the preset position is processed by the target laser, and a micro-structure is generated at the preset position. The specific change in the microstructure of the optical fiber material as used herein means that the change in the morphology or spatial distribution of the optical fiber material results in a change that indicates the onset of microstructure formation.
In the processes of continuous heating and laser transmission, the generated microstructure can further grow or change along with the lapse of time, at this time, in order to obtain a target microstructure, when the generated microstructure meets a preset condition as required, heating is stopped or target laser transmission is stopped, the temperature of an optical fiber substance at a preset position starts to fall, and in the process of the temperature reduction of the optical fiber substance, the change of the form or spatial distribution of the optical fiber substance gradually stops. When the change of the form or spatial distribution of the optical fiber substance is completely stopped, the microstructure does not grow any more and is not changed at all (namely, is in a stable state), and the target microstructure is obtained.
It should be noted here that the microstructure in a stable state obtained after the heating or the transmission of the target laser is stopped is not completely identical to the microstructure obtained when the heating or the transmission of the target laser is stopped, because the microstructure generated after the heating or the transmission of the target laser is stopped continues to grow or changes due to the influence of residual heat, the action of the target laser, or other factors. This will cause the resulting microstructure to deviate from the target microstructure, and therefore the timing of stopping heating or stopping the delivery of the target laser is important. In order to obtain an accurate target microstructure, a preset condition needs to be set, and the time for stopping heating or transmitting the target laser is determined according to whether the generated microstructure meets the preset condition. That is, when the generated microstructure satisfies a preset condition, heating is stopped or transmission of the target laser is stopped, and when the microstructure is in a stable state, the target microstructure can be formed at a preset position.
The target optical fiber used in the embodiment of the present invention may be an optical fiber using silica as a main material, an optical fiber using other inorganic oxides as a main material, or an optical fiber using an organic polymer as a main material, which is not particularly limited in the embodiment of the present invention. Also, the target fiber may have other microstructures thereon.
The target laser used in the embodiment of the present invention refers to light generated by using a stimulated radiation amplification or spontaneous radiation amplification principle. The target laser may be a time-domain continuous laser or a pulsed laser. The target laser has a fixed average or peak power to produce the desired target microstructure.
According to the method for generating the microstructure on the optical fiber, provided by the embodiment of the invention, the target laser is transmitted through the target optical fiber and is combined with external heating, so that the optical fiber substance at the preset position on the target optical fiber can absorb the target laser to a required degree at the heated position, the target optical fiber is processed by the target laser, and the microstructure which is not originally present in the target optical fiber is generated near the heated position. The method for generating the microstructure on the optical fiber provided by the embodiment of the invention greatly simplifies the traditional method for generating the microstructure on the optical fiber, and improves the production efficiency and the production quality of the target microstructure in the target optical fiber.
Meanwhile, the method for generating the microstructure on the optical fiber provided by the embodiment of the invention can directly generate the target microstructure in the target optical fiber without performing operations such as cutting, welding, drawing, melting and the like on the target optical fiber, thereby greatly simplifying the difficulty of operation and the complexity of equipment and greatly reducing the cost; in the process, the original structure of the target optical fiber is not required to be damaged, and unnecessary damage to the mechanical properties of other parts of the target optical fiber, which do not generate the target microstructure, is avoided. Other microstructures already present in the target fiber may be retained and new target microstructures may be created at nearby predetermined locations. This has incomparable efficiency and quality advantages for special application scenarios where a series of microstructures need to be arranged in the same fiber.
In particular, compared to the first method mentioned in the background art in which a microstructure is generated on an optical fiber by using a laser micromachining method, the method for generating a microstructure on an optical fiber provided in the embodiment of the present invention uses external heating to control the ablation of a target optical fiber by a target laser, so that only a common laser, for example, a continuous laser having an average laser of only several watts or even lower, is required to ablate a transparent optical fiber material. In contrast, prior art laser micromachining techniques require the use of ultrafast lasers with peak powers of many megawatts or even higher to ablate transparent fiber materials. That is to say, the method for generating the microstructure on the optical fiber provided in the embodiment of the present invention greatly widens the range of the laser that can be used for processing the transparent optical fiber material, thereby greatly reducing the cost.
On the basis of the above embodiment, the method for generating a microstructure on an optical fiber according to an embodiment of the present invention includes heating a preset position on a target optical fiber, and transmitting a target laser beam using the target optical fiber, and specifically includes: heating the preset position, and then transmitting target laser by using the target optical fiber; alternatively, the first and second electrodes may be,
firstly, transmitting target laser by using the target optical fiber, and then heating the preset position; alternatively, the first and second electrodes may be,
and heating the preset position, and transmitting target laser by using the target optical fiber.
Specifically, in the embodiment of the present invention, the execution sequence of the heating action and the laser transmission action may be set as required, as long as it is ensured that there is an overlapping portion between the heating time of the preset position and the action time of the target laser in the target optical fiber.
In actual operation, the target optical fiber can be used for transmitting the target laser, and then external heating is applied to a preset position on the target optical fiber; or external heating can be applied to a preset position on the target optical fiber, and then the target optical fiber is utilized to transmit target laser; it is also possible to simultaneously apply external heating and transmit the target laser light using the target optical fiber. The heating time is the time for applying external heating, and the action time is the duration of the target laser.
In the embodiment of the invention, in order to facilitate the control of the target laser, a laser capable of emitting the target laser can be introduced, and the duration of the target laser is controlled by controlling the on and off of the laser.
The method for generating the microstructure on the optical fiber provided by the embodiment of the invention provides three realizable schemes for realizing the schemes, and increases the flexibility of realizing the schemes.
On the basis of the above embodiments, in the method for generating a microstructure on an optical fiber provided in an embodiment of the present invention, the preset condition is determined by the type of the microstructure generated at the preset position.
Specifically, in the method for generating a microstructure on an optical fiber provided in the embodiment of the present invention, when the microstructure satisfies a preset condition, heating is stopped or transmission of the target laser is stopped, and a target microstructure is formed at the preset position. The preset conditions are determined according to the type of the microstructure generated at the preset position, that is, the type of the final target microstructure obtained as required, and each type of microstructure corresponds to the same preset condition.
In general, the preset conditions are determined by a large number of experiments. For example, for the target microstructure belonging to the spindle flow line type, the preset condition to be satisfied in formation is determined by the timing of stopping heating or stopping transmitting the target laser light, which is determined when a large number of target microstructures of the spindle flow line type are generated, that is, the microstructure obtained when heating is stopped or transmission of the target laser light is stopped is the preset condition to be satisfied.
On the basis of the above embodiments, the method for generating a microstructure on an optical fiber provided in an embodiment of the present invention includes determining a length of the target microstructure in an axial direction of the target optical fiber according to one or more of the following parameters:
a heated length at the predetermined position;
an average or peak power of the target laser;
the maximum temperature of the preset position in the time of the overlapping part.
Specifically, in the method for generating a microstructure on an optical fiber provided in the embodiment of the present invention, the parameters of the obtained target microstructure may be adjusted by changing an external condition when the microstructure is generated, and the parameters of the target microstructure may specifically include a length parameter, that is, a length of the target microstructure in an axial direction of the target optical fiber. The length parameter can be adjusted by controlling the laser or external heating, specifically, by any one or combination of three ways, the first way is realized by changing the heated length at the preset position, the second way is realized by changing the average power or peak power of the target laser, and the third way is realized by changing the maximum temperature of the preset position within the time of the overlapping part. For the first mode, the heated length at the preset position can be increased, so that the length of the optical fiber material which absorbs the target laser and is heated from the outside is increased, and further the length parameter of the target microstructure is increased. For the second mode, the average power or peak power of the target laser can be increased, so that when the target laser and external heating act together, more optical fiber substances which can be ablated by the target laser and are heated by the external heating are generated, and the length parameter of the target microstructure is increased. For the third mode, the maximum temperature of external heating can be increased, so that the absorption of the target laser by the externally heated optical fiber substance is enhanced, and the length parameter of the target microstructure is increased.
The method for generating the microstructure on the optical fiber provided by the embodiment of the invention provides three realizable schemes for realizing the adjustment of the length parameter, and increases the flexibility of realizing the schemes.
On the basis of the above embodiments, the method for generating a microstructure on an optical fiber provided in the embodiments of the present invention is a method for generating a microstructure on an optical fiber, where the size of the target microstructure on the cross section of the target optical fiber is determined according to one or more of the following parameters:
a spot size of a beam of the target laser;
an average or peak power of the target laser;
the maximum temperature of the preset position in the time of the overlapping part.
Specifically, the method for generating a microstructure on an optical fiber provided in the embodiment of the present invention may further adjust a dimensional parameter of the obtained target microstructure, that is, a dimension of the target microstructure on a cross section of the target optical fiber, by changing an external condition when the microstructure is generated. The adjustment of the size parameter may also be achieved by controlling the laser or external heating, and specifically may be achieved by any one or a combination of any three of the following three ways, the first way is achieved by changing the spot size of the beam of the target laser, the second way is achieved by changing the average power or peak power of the target laser, and the third way is achieved by changing the maximum temperature of the preset position within the time of the overlapping portion. For the first mode, the spot size of the beam of the target laser can be increased, that is, the passing area of the target laser when passing through the cross section of the target optical fiber is enlarged, so that more areas on the cross section are subjected to the combined action of the target laser and external heating, and the size parameter of the target microstructure is increased. For the second mode, the average power or peak power of the target laser can be increased, so that when the target laser and external heating act together, more optical fiber substances which can be ablated by the target laser and are heated by the external heating are generated, and the size parameters of the target microstructure are increased. For the third mode, the maximum temperature of external heating can be increased, so that the absorption of the target laser by the externally heated optical fiber substance is enhanced, and the size parameter of the target microstructure is increased.
The method for generating the microstructure on the optical fiber provided by the embodiment of the invention provides three realizable schemes for realizing the adjustment of the length parameter, and increases the flexibility of realizing the schemes.
On the basis of the above embodiments, in the method for generating a microstructure on an optical fiber provided in the embodiments of the present invention, the heating of the preset position on the target optical fiber is performed by a heating device.
Specifically, in the embodiment of the present invention, a heating device is used to externally heat a preset position on a target optical fiber. The heating principle of different heating devices is different, but the external heating can be carried out on the preset position as long as the external heating can be realized.
Preferably, in the method for generating a microstructure on an optical fiber provided in the embodiment of the present invention, a heating tube or an electrode with a predetermined voltage is used as a heating device.
When the heating pipe is used as a heating device, the target optical fiber penetrates through the heating pipe, so that the preset position on the target optical fiber is located in the heating pipe.
Specifically, as shown in fig. 3, the target optical fiber 31 passes through the heating tube 30 such that the heating tube 30 is facing a preset position on the target optical fiber 31; one end of the target optical fiber 31 is connected to a laser 32. The heating duct 30 is activated such that a predetermined position in the heating duct 30 is externally heated. The laser 32 is activated so that the target laser light generated by the laser 32 is transmitted along the waveguide structure of the target optical fiber 31. The fiber substance 33 at the predetermined position on the target fiber 31 starts to change its morphology or spatial distribution under the combined action of the target laser and external heating. This change is manifested by ablation of a portion of the material that would otherwise occupy the interior or surface of the fiber, such that the space that it would otherwise occupy is now occupied by one or more of the following: substances resulting from chemical changes of the optical fiber substance 33 itself; melting the transferred substance from other portions of the target optical fiber 31; substances in the external environment.
When the resulting microstructure has been shaped to a predetermined condition, the laser 32 is turned off and the target laser injection into the target fiber is stopped to stop continuing to work in conjunction with external heating so that the microstructure continues to grow. When the resulting microstructure reaches a steady state, the target microstructure 34 is obtained. The target optical fiber 31 may be drawn out of the heating tube 30 immediately or may be drawn out of the heating tube 30 after a certain annealing process.
In the embodiment of the present invention, to increase the length of the target microstructure in the axial direction of the target optical fiber, one or more of the following methods may be adopted: increasing the length of the heating tube 30 for applying external heating, that is, increasing the length of the heating tube 30, so that the length of the externally heated optical fiber material 33 for absorbing the target laser light becomes longer; the average power or the peak power of the target laser is improved, so that when the target laser and external heating act together, the fiber substance 33 which can be ablated by the target laser and is heated by the external heating is increased; before the target laser light is transmitted by the target optical fiber, the maximum temperature to which the heating tube 30 applies external heating is increased, so that the absorption of the target laser light by the externally heated optical fiber substance 33 is enhanced.
In the embodiment of the present invention, to increase the size of the target microstructure on the cross section of the target optical fiber, one or more of the following methods may be adopted: the average power or the peak power of the target laser is improved, so that when the target laser and external heating act together, the fiber substance 33 which can be ablated by the target laser and is heated by the external heating is increased; before the target laser is applied, the highest temperature of the heating pipe 30 for applying external heating is increased, so that the absorption of the target laser by the externally heated optical fiber substance 33 is enhanced; the passing area of the target laser light when passing through the cross section of the target optical fiber 31 is enlarged so that more regions on the cross section are subjected to the cooperation of the target laser light and external heating.
The target microstructure obtained by using the heating tube as a heater was placed in a refractive index matching fluid having the same refractive index as the target optical fiber and observed, as shown in fig. 4. In fig. 4, the spindle flow object is the target microstructure 40 in the target optical fiber. The purpose of the observation by adding the refractive index matching fluid is to eliminate image distortion and contrast distortion caused by the optical fiber structure. In obtaining the target microstructure 40 shown in fig. 4, the laser used was a continuous laser, the average power of the laser was 18 watts, the external heated length of the target fiber was 1 cm, and the target fiber used was an 10/130 fiber doped with ytterbium ions.
As shown in fig. 5, to create a plurality of different target microstructures 50 in a target fiber, the laser used to obtain such target microstructures 50 was a continuous laser, the average power of the laser was 18 watts, the external heated length of the target fiber was 10 cm, and the target fiber used was an 10/130 fiber doped with ytterbium ions. Due to the longer externally heated length, coupled with the effects of the fluid instability of the target substance within the target fiber under the combined action of the target laser and external heating, several target microstructures can be obtained.
On the basis of the above embodiment, in the method for generating a microstructure on an optical fiber provided in the embodiment of the present invention, when the electrode with the preset voltage is used as a heating device, the electrode with the preset voltage is disposed close to a preset position on the target optical fiber, and an arc generated by the electrode with the preset voltage provides heat for the preset position on the target optical fiber.
Specifically, as shown in fig. 6, one end of a target optical fiber 61 in the embodiment of the present invention is connected to a laser 62; the electrode 60 of a preset voltage is disposed near a preset position on the target optical fiber 61. The laser 62 is activated so that the target laser light generated by the laser 62 is transmitted along the waveguide structure of the target optical fiber 61. The electrode 60 of a preset voltage is activated to generate an arc, so that the target optical fiber 61 is heated by the outside of the arc. The fiber substance 63 at the predetermined position on the target fiber 61 starts to change its morphology or spatial distribution under the combined action of the target laser and external heating. This change is manifested by ablation of a portion of the material that would otherwise occupy the interior or surface of the target fiber 61, such that the space that it would otherwise occupy is now occupied by one or more of the following: substances resulting from chemical changes of the optical fiber substance 63 itself; melting the transferred substance from other portions of the target optical fiber 61; substances in the external environment.
When the resulting microstructure has been shaped to a predetermined condition (i.e., grown to a certain extent), the generation of the arc is terminated to stop the external heating, thereby stopping the microstructure from continuing to grow. When the resulting microstructure reaches a steady state, the target microstructure 64 is obtained. Laser 62 may be turned off immediately so that the target laser light is no longer produced, or laser 62 may be turned off after a period of time.
In the embodiment of the present invention, to increase the length of the target microstructure in the axial direction of the target optical fiber, one or more of the following methods may be adopted: the average power or the peak power of the target laser is improved, so that when the target laser and external heating act together, the fiber substance 63 which can be ablated by the target laser and is heated by the external heating is increased; the current amount or the discharge time of the arc generated by the electrode 60 with the preset voltage is increased, so that the maximum temperature of external heating is higher, and the absorption effect of the optical fiber substance 63 subjected to external heating on the target laser is further enhanced; the electrode 60 of a preset voltage is moved in the optical axis direction during the generation of the arc, so that the optical fiber substance 63 externally heated in the optical axis direction becomes large.
In the embodiment of the present invention, to increase the size of the target microstructure on the cross section of the target optical fiber, one or more of the following methods may be adopted: the average power or the peak power of the target laser is improved, so that when the target laser and external heating act together, the fiber substance 63 which can be ablated by the target laser and is heated by the external heating is increased; the current amount or the discharge time of the arc generated by the electrode 60 with the preset voltage is increased, so that the maximum temperature of external heating is higher, and the absorption effect of the optical fiber substance 63 subjected to external heating on the target laser is further enhanced; enlarging the passing area of the target laser when passing through the cross section of the target optical fiber, so that more areas on the cross section are subjected to the combined action of the target laser and external heating; the arc generated by the electrode 60 of a preset voltage is deviated from the center of the cross section of the target optical fiber 61, so that the peripheral area of the cross section of the target optical fiber 61 is subjected to more external heating, thereby enhancing the cooperation with the target laser.
A target microstructure obtained by using an electrode of a preset voltage as a heater was placed in a refractive index matching fluid having the same refractive index as that of a target optical fiber and observed, as shown in fig. 7. In fig. 7, the spindle flow object is the target microstructure 70 in the target optical fiber. The purpose of the observation by adding the refractive index matching fluid is to eliminate image distortion and contrast distortion caused by the optical fiber structure. In the process of obtaining the target microstructure 70 shown in fig. 7, the laser used was a continuous laser, the average power of the laser was 2 watts, the current of the arc generated by the electrode at the preset voltage was 50 milliamperes, the discharge time was 400 milliseconds, the target fiber used was a standard g652.d fiber, and the whole generation process required only 1 second.
As shown in fig. 8, in order to generate a plurality of different target microstructures 80 in a target optical fiber, the laser used to obtain such target microstructures 80 is a continuous laser, the average power of the laser is 2 watts, the current of the arc generated by the electrode with a preset voltage is 70 milliamperes, the discharge time is 400 milliseconds, and the target optical fiber used is a standard g652.d optical fiber. After each target microstructure is obtained, the electrode with the preset voltage is moved to the preset position for generating the next target microstructure along the target optical fiber, and then the operation is repeated to generate the next target microstructure. The time for generating the electrode position for adjusting the preset voltage between two adjacent target microstructures is not more than 10 seconds.
As shown in fig. 9, a target microstructure 90 is created in the target fiber that is in communication with the external environment on the side of the target fiber. The laser used to obtain this target microstructure 90 was a continuous laser with an average power of 2 watts, an arc generated by electrodes at a predetermined voltage of 70 milliamps with a discharge time of 400 milliseconds, and the cross-section of the target fiber was offset from the center of the arc by about 1 millimeter. So configured, a portion of the cross-section of the target fiber will be subjected to greater external heating than other portions, thereby enabling the creation of a target microstructure that is laterally over-ablated and in communication with the external environment. The target fiber used is again a standard G652.D fiber.
It can be seen that the method for generating microstructures on optical fibers provided by the present invention can efficiently accomplish the task of generating various target microstructures in various lasers and various target optical fibers.
As shown in fig. 10, on the basis of the above embodiments, an embodiment of the present invention provides a system for generating a microstructure on an optical fiber, including: a microstructure generation block 101 and a target microstructure formation block 102. Wherein the content of the first and second substances,
the microstructure generating module 101 is configured to heat a preset position on a target optical fiber, and transmit target laser light through the target optical fiber to generate a microstructure at the preset position;
the target microstructure forming module 102 is configured to stop heating or stop transmitting the target laser when the microstructure meets a preset condition, so as to form a target microstructure at the preset position;
and the heating time of the preset position on the target optical fiber and the action time of the target laser in the target optical fiber have an overlapping part.
Specifically, in the embodiment of the present invention, the execution sequence of the heating action and the laser transmission action implemented by the microstructure generating module 101 may be set as required, as long as it is ensured that the heating time at the preset position and the action time of the target laser in the target optical fiber have an overlapping portion. In the overlapping part, the optical fiber substance at the preset position absorbs the target laser under the condition of being heated, so that the micro-chemical structure of the optical fiber substance at the absorption position (namely the preset position) is subjected to specific change, the optical fiber substance at the preset position is processed by the target laser, and a micro-structure is generated at the preset position. The specific change in the microstructure of the optical fiber material as used herein means that the change in the morphology or spatial distribution of the optical fiber material results in a change that indicates the onset of microstructure formation.
In the processes of continuous heating and laser transmission, the generated microstructure may further grow or change with the passage of time, at this time, in order to obtain the target microstructure, the target microstructure forming module 102 is required to stop heating or stop transmitting the target laser when the generated microstructure meets a preset condition as required, the temperature of the optical fiber substance at a preset position starts to decrease, and in the process of decreasing the temperature of the optical fiber substance, the change of the form or spatial distribution of the optical fiber substance gradually stops. When the change of the form or spatial distribution of the optical fiber substance is completely stopped, the microstructure does not grow any more and is not changed at all (namely, is in a stable state), and the target microstructure is obtained.
The functions of the modules in the system for generating microstructures on optical fibers provided in the embodiment of the present invention correspond to the operation flows in the above method embodiments one to one, and the noun meanings are also consistent with the noun meanings in the above method embodiments, which are not described again in the embodiment of the present invention.
According to the system for generating the microstructure on the optical fiber, which is provided by the embodiment of the invention, the target optical fiber transmission target laser and external heating are combined through the microstructure generation module, so that the optical fiber substance at the preset position on the target optical fiber can absorb the target laser to the required degree at the heated position, the target optical fiber is processed by the target laser, and the microstructure which is not originally present in the target optical fiber is generated near the heated position. The system for generating the microstructure on the optical fiber provided by the embodiment of the invention greatly simplifies the traditional method for generating the microstructure on the optical fiber and improves the production efficiency and the production quality of the target microstructure in the target optical fiber.
On the basis of the above embodiments, the microstructure generating module 101 in the embodiment of the present invention is specifically configured to: heating the preset position, and then transmitting target laser by using the target optical fiber; or, the target optical fiber is used for transmitting target laser, and then the preset position is heated; or heating the preset position, and transmitting the target laser by using the target optical fiber.
On the basis of the above embodiments, the microstructure generating module 101 in the embodiment of the present invention specifically includes: and the heating device is used for heating a preset position on the target optical fiber.
On the basis of the above embodiments, the heating device in the embodiments of the present invention is a heating tube or an electrode with a preset voltage.
On the basis of the above embodiment, in the embodiment of the present invention, the heating tube is a hollow heating tube, when the heating tube is used as a heating device, the target optical fiber passes through the heating tube, and a preset position on the target optical fiber is located in the heating tube.
On the basis of the above embodiment, in the embodiment of the present invention, when the electrode with the preset voltage is used as the heating device, the electrode with the preset voltage is disposed close to the preset position on the target optical fiber, and the electric arc generated by the electrode with the preset voltage provides heat for the preset position on the target optical fiber.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware. With this understanding in mind, the above-described technical solutions may be embodied in the form of a software product, which can be stored in a computer-readable storage medium such as ROM/RAM, magnetic disk, optical disk, etc., and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the methods described in the embodiments or some parts of the embodiments.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A method of creating a microstructure in an optical fiber, comprising:
heating a preset position on a target optical fiber, and transmitting target laser by using the target optical fiber to generate a microstructure at the preset position;
when the microstructure meets a preset condition, stopping heating or transmitting the target laser, and forming a target microstructure at the preset position;
and the heating time of the preset position on the target optical fiber and the action time of the target laser in the target optical fiber have an overlapping part.
2. The method for generating microstructures in optical fiber according to claim 1, wherein the heating a predetermined position on a target optical fiber and the transmitting a target laser beam using the target optical fiber comprise: heating the preset position, and then transmitting target laser by using the target optical fiber; alternatively, the first and second electrodes may be,
firstly, transmitting target laser by using the target optical fiber, and then heating the preset position; alternatively, the first and second electrodes may be,
and heating the preset position, and transmitting target laser by using the target optical fiber.
3. The method of claim 1, wherein the predetermined condition is determined by the type of microstructure generated at the predetermined position.
4. The method of claim 1, wherein the length of the target microstructure in the axial direction of the target fiber is determined according to one or more of the following parameters:
a heated length at the predetermined position;
an average or peak power of the target laser;
the maximum temperature of the preset position in the time of the overlapping part.
5. The method of claim 1, wherein the size of the target microstructure in the cross-section of the target fiber is determined according to one or more of the following parameters:
a spot size of a beam of the target laser;
an average or peak power of the target laser;
the maximum temperature of the preset position in the time of the overlapping part.
6. A method for generating microstructures in optical fibers according to any of claims 1 to 5, wherein the heating of the predetermined position on the target optical fiber is performed by a heating device.
7. The method of claim 6, wherein the heating device is a heating tube or an electrode with a predetermined voltage.
8. The method of claim 7, wherein the heating tube is a hollow heating tube, and when the heating tube is used as a heating device, the target optical fiber is passed through the heating tube such that a predetermined position on the target optical fiber is located in the heating tube.
9. The method of claim 7, wherein the preset voltage electrode is disposed close to the preset position on the target optical fiber when the preset voltage electrode is used as the heating device, and the arc generated by the preset voltage electrode provides heat for the preset position on the target optical fiber.
10. A system for generating microstructures in an optical fiber, comprising:
the microstructure generating module is used for heating a preset position on a target optical fiber and transmitting target laser by using the target optical fiber to generate a microstructure at the preset position;
the target microstructure forming module is used for stopping heating or transmitting the target laser when the microstructure meets a preset condition, and forming a target microstructure at the preset position;
and the heating time of the preset position on the target optical fiber and the action time of the target laser in the target optical fiber have an overlapping part.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0843647A (en) * | 1994-05-23 | 1996-02-16 | Nec Corp | Sphering method of optical fiber end and device therefor |
| CN1447136A (en) * | 2002-03-25 | 2003-10-08 | 住友电气工业株式会社 | Microstructure optical fiber and its mfg. method |
| CN101285914A (en) * | 2007-04-10 | 2008-10-15 | 古河电子北美公司 | Systems and methods for modifying selected portion of optical fiber microstructure |
| CN101710193A (en) * | 2009-11-27 | 2010-05-19 | 电子科技大学 | Method for manufacturing microstructure fiber |
| US20170336548A1 (en) * | 2014-12-15 | 2017-11-23 | National Taiwan University Of Science And Technology | Method for fabricating a light emitting module that generates ultrabroadband near-infrared light |
| CN108490535A (en) * | 2018-06-22 | 2018-09-04 | 深圳大学 | The optical fibre device and preparation method thereof of polymer micro-nano structure is integrated in optical fiber |
-
2018
- 2018-10-18 CN CN201811217852.0A patent/CN111069778B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0843647A (en) * | 1994-05-23 | 1996-02-16 | Nec Corp | Sphering method of optical fiber end and device therefor |
| CN1447136A (en) * | 2002-03-25 | 2003-10-08 | 住友电气工业株式会社 | Microstructure optical fiber and its mfg. method |
| CN101285914A (en) * | 2007-04-10 | 2008-10-15 | 古河电子北美公司 | Systems and methods for modifying selected portion of optical fiber microstructure |
| CN101710193A (en) * | 2009-11-27 | 2010-05-19 | 电子科技大学 | Method for manufacturing microstructure fiber |
| US20170336548A1 (en) * | 2014-12-15 | 2017-11-23 | National Taiwan University Of Science And Technology | Method for fabricating a light emitting module that generates ultrabroadband near-infrared light |
| CN108490535A (en) * | 2018-06-22 | 2018-09-04 | 深圳大学 | The optical fibre device and preparation method thereof of polymer micro-nano structure is integrated in optical fiber |
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