CN111060042A - Method for measuring uncertainty of industrial CT geometric dimension based on spherical model - Google Patents
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Abstract
The invention relates to a method for measuring uncertainty of industrial CT geometric dimension based on a spherical model, belonging to the technical field of industrial CT dimension measurement and comprising the following steps: the method comprises the steps of selecting a ball model as a detected workpiece and carrying out calibration detection to obtain a calibration certificate, carrying out industrial CT scanning reconstruction on the detected workpiece, completing geometric dimension measurement on the ball model, calculating standard uncertainty of the geometric dimension measurement, and calculating extended uncertainty.
Description
Technical Field
The invention belongs to the technical field of industrial CT size measurement, and particularly relates to a method for measuring uncertainty of industrial CT geometric size based on a spherical model.
Background
With the development of the industrial manufacturing level, the structure of an industrial product becomes more and more complex, the precision requirement on the manufacturing technology is higher and higher, and the requirements on the quality control and quality guarantee of the product are higher and higher. Therefore, new technologies are continuously emerging to meet the user's requirements. Since birth, the CT technology is first used for medical diagnosis and nondestructive testing, and with the progress of the CT technology and the improvement of the measurement accuracy, the application range thereof is gradually expanded to the field of industrial product measurement and is completely open. In the field of industrial measurements, the CT technique together with contact three-coordinate, optical three-coordinate techniques is referred to as third generation measurement techniques. In the fields of military industry, aviation, automobiles and the like, a large number of precision castings and mechanical structural parts exist, generally have complicated internal structures, the use of the traditional destructive layer cutting method is expensive and can cause the change of the geometric structure of a measured object, and the nondestructive measurement of the internal structure dimension of an object is one of the difficulties in production practice for the traditional contact or optical non-contact three-coordinate measuring equipment. The CT technology provides an effective way for solving the problems. The CT technique is one of the reasons why the technique is widely focused in the industrial field, and can acquire a three-dimensional model of an object to be measured in a short time, and can realize measurement of microstructures, such as parts manufactured by additive manufacturing and injection molding, and coordinate measurement of complex assemblies with multi-material components, which are difficult to realize by the conventional three-coordinate measurement method.
However, there are many problems associated with CT technology in metrology applications, such as: a large number of complicated influence factors exist in the imaging process; currently there is no fully available measurement standard; the measurement results are generally not traceable; difficulty in evaluating measurement uncertainty, etc. To become a metrology instrument, industrial CT must establish its own system of magnitude transmission and traceability. Thus, in application, although we do not know the true value of the measured value, we can know the range where the true value exists, which is also the biggest feature of the measuring instrument. The metering of the instrument is to express the measurement error of the instrument in an uncertainty form, and in order to achieve the purpose, the uncertainty research of industrial CT measurement must be carried out.
Relevant scholars at home and abroad carry out a lot of valuable researches on uncertainty of industrial CT measurement on the basis of some physical standard devices. However, currently, no consistently approved method has been found for the industrial CT dimensional measurement uncertainty assessment.
Disclosure of Invention
In order to solve the above problems, a method for measuring uncertainty of industrial CT geometric dimension based on a spherical mold is proposed.
In order to achieve the purpose, the invention provides the following technical scheme:
a method for measuring uncertainty of industrial CT geometric dimension based on a spherical model comprises the following steps:
s1: before use, the ball model is sent to a metering department for calibration detection and is used as a workpiece to be detected to obtain a calibration certificate, wherein the ball model is a single-ball model, a double-ball model or a multi-ball model, and the ball model is made of silicon nitride, aluminum oxide, zirconium dioxide or stainless steel;
s2: carrying out multiple scanning reconstruction on a detected workpiece by adopting industrial CT;
s3: importing the scanning reconstruction data into data analysis and visualization software, selecting the diameter and/or the spherical center distance as a geometric quantity evaluation object, and completing the measurement of the geometric dimension of the detected workpiece in a fitting mode;
s4: the standard uncertainty of the industrial size measurement is Uc, then
Wherein u iscalStandard uncertainty, u, introduced for the calibration procedurepStandard uncertainty, u, introduced for the measurement processwStandard uncertainty, u, introduced for the material and manufacturing variations of the workpiece to be inspectedbStandard uncertainty introduced for systematic errors in the measurement process;
s5: calculating the expansion uncertainty U, then U is k × UcAnd k is an inclusion factor.
Further, in step S2, the number of scans is not less than 5.
Further, in step S3, the geometric dimension of the workpiece to be inspected is measured by a binomial fitting method after threshold segmentation.
Further, the calibration procedure introduces a standard uncertainty ucalThe calculation method comprises the following steps:
maximum allowable error of calibration process is + -UcalThen, then
k1Is an inclusion factor.
Further, the standard uncertainty u introduced by the measurement processpThe calculation method comprises the following steps:
wherein, yiAs a result of a single scan,
n is the average of the scan results.
Further, the standard uncertainty u introduced by the inspected workpiece material and manufacturing variationswTwo uncertainty factors are associated: manufacturing variation of the workpiece to be inspected and coefficient of thermal expansion of the material, the manufacturing variation of the workpiece to be inspected being included in upIn the step (1), then:
uw＝(t-20℃)·uα·l；
wherein u isαThe standard uncertainty of the linear expansion coefficient of the workpiece to be detected is shown, t is the temperature of the workpiece in the scanning process, 20 ℃ is normal temperature, and l is the size of a geometric quantity evaluation object marked in a calibration certificate.
Further, for an uncalibrated system, the standard uncertainty u introduced by the system error of the measurement processbB is a systematic error, and
xcaland calibrating the value for the workpiece to be detected.
Further, when the ball model is a multi-ball model, the ball model comprises a plurality of balls, the connecting lines of the centers of the balls form a straight line or a polygon, and adjacent balls are connected through carbon fibers, organic glass or aluminum alloy.
The invention has the beneficial effects that:
based on the calibrated spherical model, the method preliminarily establishes an evaluation step and a mathematical model of the industrial CT measurement uncertainty aiming at a specific task by adopting an experimental evaluation method, and systematically analyzes the influence of the calibration process, the measurement process, a detected workpiece, system errors and the like on the uncertainty of the measurement result, wherein the maximum contribution of the measurement uncertainty is mainly from the system error of the industrial CT equipment, and before the measurement activity is carried out, the influence of the uncertainty component can be greatly reduced by carrying out systematic calibration on the industrial CT equipment, so that the measurement accuracy is improved.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions of the present invention are clearly and completely described, and other similar embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present application based on the embodiments in the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are merely directions of reference, and thus, the directional terms used are intended to illustrate rather than limit the present invention.
The first embodiment is as follows:
a method for measuring uncertainty of industrial CT geometric dimension based on a spherical model comprises the following steps:
s1: before use, the ball model is sent to a metering department for calibration detection and is used as a workpiece to be detected, and a calibration certificate is obtained, wherein the ball model is a single-ball model, a double-ball model or a multi-ball model, and the ball model is made of silicon nitride, aluminum oxide, zirconium dioxide or stainless steel.
S2: and carrying out multiple scanning reconstruction on the detected workpiece by adopting industrial CT, wherein the scanning times are not less than 5.
A complete industrial CT measurement process comprising the steps of: firstly, scanning and reconstructing a sample, wherein X-rays transilluminate the sample, and are influenced by the structure and component difference of the sample to cause different attenuation degrees of the X-rays, so that a group of bright and dark projections related to the structure of the sample are formed on a detector; the turntable synchronously rotates to acquire a large number of two-dimensional projection images at different angles; reconstructing to obtain a CT sectional image of the sample by combining a filtering back projection algorithm such as FDK (fully-drawn projection) and the like with an artifact correction algorithm; and reconstructing a plurality of CT sectional images to generate a sample three-dimensional voxel model.
S3: and importing the scanning reconstruction data into data analysis and visualization software, selecting the diameter and/or the spherical center distance as a geometric quantity evaluation object, and completing the measurement of the geometric dimension of the detected workpiece in a fitting mode.
Specifically, processing reconstructed volume data, and extracting an outline boundary on a CT image by setting a segmentation threshold; sampling is carried out on the edge of the image according to a set sampling strategy, least square fitting is carried out on sampling points, geometric characteristics such as points, lines and surfaces on sample reconstruction data are obtained, measurement is completed, and geometric size parameters of corresponding characteristics are obtained.
S4: according to ISO/TS 15530-3: 2011, an industrial CT measurement uncertainty evaluation mathematical model is established by adopting an experimental evaluation method, and if the standard uncertainty of the industrial size measurement is Uc, then:
wherein u iscalThe maximum allowable error of the calibration process is +/-Ucal for the standard uncertainty introduced by the calibration process
k1Is an inclusion factor.
upThe standard uncertainty introduced for the measurement process, the noise of the image and the iso-surface-based method adopted in the size measurement process of the industrial CTThe 50% threshold segmentation method inevitably introduces measurement uncertainty, and because such influencing factors exist all the time and are difficult to quantitatively distinguish, the A-type uncertain measurement evaluation method is adopted to treat the factors as a whole,
wherein, yiAs a result of a single scan,
n is the average of the scan results.
uwThe standard uncertainty introduced for the inspected workpiece material and manufacturing variations, which is related to two uncertainties: manufacturing variation of the workpiece to be inspected and coefficient of thermal expansion of the material, the manufacturing variation of the workpiece to be inspected being included in upIn the step (1), then: u. ofw＝(t-20℃)·uαL, wherein uαThe standard uncertainty of the linear expansion coefficient of the workpiece to be detected is shown, t is the temperature of the workpiece in the scanning process, 20 ℃ is normal temperature, and l is the size of a geometric quantity evaluation object marked in a calibration certificate.
ubStandard uncertainty introduced for the systematic error of the measurement process, and for an uncalibrated system, standard uncertainty introduced for the systematic error of the measurement process ubB is a systematic error, and
xcaland calibrating the value for the workpiece to be detected. When the system error is large, a correction method or an alternative measurement method is needed to further reduce the system error, namely, a measurement link for calibrating the detected workpiece with higher precision is added in the cyclic measurement to correct the influence of the industrial CT system error.
S5: calculating the expansion uncertainty U, then U is k × UcAnd k is an inclusion factor.
When the ball model is a multi-ball model, the ball model comprises a plurality of balls, and the connecting lines of the centers of the balls form a straight line or a polygon. That is to say, the number of spheroid is unlimited, and the overall arrangement is unlimited, connects through carbon fiber, organic glass or aluminum alloy between the adjacent spheroid. After the ball model is manufactured, only the reference true value for measurement uncertain evaluation is given by calibrating the diameter and the ball center distance through the high-precision contact CMM.
Example two:
parts of this embodiment that are the same as those of the first embodiment are not described again, except that:
selecting a ball model consisting of 2 silicon nitride ceramic balls with the grade of G10 as a research object, and carrying out uncertainty evaluation on industrial CT measurement. The advantages of selecting the silicon nitride ceramic ball group model are that: high precision, high strength, high hardness, low cost, easy calibration, easy fitting measurement, small thermal expansion coefficient, small linear attenuation coefficient, and resistance to threshold fluctuation of the sphere center distance. Before industrial CT measurement is carried out on the selected ball model (namely the workpiece to be detected), the selected ball model is subjected to metrological verification of a metering mechanism, and a calibration certificate displays that: ceramic ball diameter 19.05mm, ball center distance 38.10mm, G10 scale, calibration test conditions: temperature: 20.3 ℃ and a relative humidity of 46.8 percent.
Based on a 450kV conventional industrial CT system, the system is initialized before starting, and main scanning and reconstruction technical parameters are shown in a table l under the condition that a detected workpiece and the industrial CT system are in a sufficient thermal balance state.
Table 1: main scanning and reconstruction technique parameters
Selecting a double-ball model consisting of ceramic balls with the diameter of 19.05mm, placing and fixing the double-ball model on a rotary table of an ICT-450-plus 001 industrial CT system, setting scanning parameters according to the table 1, and performing cone beam standard scanning reconstruction. And importing the reconstructed data into data analysis and visualization software VG Studio MAX 2.2 to complete the measurement of the geometric dimension of the detected workpiece.
Experimental test conditions: temperature: 24 ℃ and relative humidity 60%.
And (3) measuring the diameter and the center distance of the sphere of the workpiece to be detected, scanning each parameter for 9 times respectively, and marking the measurement result as a 1# sphere and a 2# sphere respectively.
Table 2: geometric dimension measurement result of inspected workpiece
According to the standard GB/T31703-2015 ceramic ball bearing silicon nitride ball, the grade G10 ceramic ball has a variation of 0.25um corresponding to the ball diameter, and since the nominal length of the ceramic ball is used in the calculation instead of the actual length, and the calibration certificate of the ceramic ball confirms that the ceramic ball meets the requirement of G10 grade accuracy, the deviation of the diameter should be within the range of +/-0.25 μm, and the rectangular distribution is satisfied. When the probability of receiving the receipt is 95%, the receipt contains a factor k1When 2, then:
according to the measurement results in Table 2, the standard uncertainty introduced by the measurement process corresponding to the diameter of the No. 1 ball is recorded as up1And the standard uncertainty introduced by the measuring process corresponding to the diameter of the 2# ball is recorded as up2And the standard uncertainty introduced by the measuring process corresponding to the sphere center distance is recorded as up3Then u isp1＝13.23μm，up2＝14.53μm，up3＝9.28μm。
Checking the standard uncertainty u of the linear expansion coefficient of silicon nitride ceramicsαAbout 3.0X 10-6 deg.C－1And the standard uncertainty introduced by the material and the manufacturing deviation of the workpiece corresponding to the diameter of the 1# ball is recorded as uw1And the standard uncertainty introduced by the material and the manufacturing deviation of the workpiece corresponding to the 2# ball diameter is recorded as uw2And the standard uncertainty introduced by the material and the manufacturing deviation of the workpiece corresponding to the center distance is recorded as uw3And calculating:
uw1＝(t-20℃)·uα·l＝0.229μm，
uw2＝(t-20℃)·uα·l＝0.229μm，
uw3＝(t-20℃)·uα·l＝0.457μm。
in most cases, the systematic error b is the mean value of the CT scan and the calibrated value x of the inspected workpiececalThe difference, expressed as:
according to the above calculation, the evaluation results of the uncertain components are summarized as shown in table 3.
Table 3: summary of uncertainties
| Component of uncertainty | Diameter y of 1# ball1 | Diameter y of 2# ball2 | Center distance D1 |
| ucal | 0.125μm | 0.125μm | 0.125μm |
| up | 13.23μm | 14.53μm | 9.28μm |
| uw | 0.229μm | 0.229μm | 0.457μm |
| ub | －30.00μm | －28.89μm | －28.89μm |
The uncertainty components are independent of each other, and standard uncertainty is synthesized. Wherein, the standard uncertainty corresponding to the diameter of the 1# ball is recorded as Uc1And the standard uncertainty corresponding to the diameter of the 2# ball is recorded as Uc2And the standard uncertainty corresponding to the center distance of the sphere is recorded as Uc3And calculating: u shapec1＝32.79μm，Uc2＝32.34μm，Uc3＝30.35μm。
As can be seen from Table 3: uncertainty introduced by a measurement process and system errors is a component which takes an obvious advantage, and meanwhile, the two maximum components are subjected to normal distribution, so that the measured quantity can be judged to be also approximately subjected to normal distribution. Furthermore, the most significant contribution to measurement uncertainty comes from the systematic error b, which contributes nearly 90%. The influence of systematic errors appears as a composite influence, is composed of many factors, and cannot be accurately quantified. The system errors related to the invention mainly come from:
first, threshold and voxel size calibration effects
In the CT measurement process, the selection of the boundary threshold and the accurate calculation of the voxel size have great influence on the measurement result. Artifacts and noise, which may cause the image gray distribution to deviate from the true distribution and cause difficulties in subsequent threshold segmentation and accurate measurement, may be transferred to the CT measurement result without proper correction, resulting in increased uncertainty of the measurement result. Voxel size is related to the magnification ratio, which is calculated from the shaft position readings, and shaft positioning errors directly affect voxel size. In addition, the voxel size calculation is also influenced by factors such as repeated positioning precision, radial jump of a rotary table, detector inclination, focus drift and the like, and the influence of the factors can be reduced by designing a special threshold fluctuation resisting die body and adopting a special geometric correction algorithm, so that the measurement error is reduced.
Second, influence of spatial resolution of system
The 450kV conventional industrial CT is adopted as an experimental platform, the size of a radiation source focus is 0.4mm, the size of a detector probe element is 0.2mm, the ultimate spatial resolution of the system is about 0.125mm, and the actual spatial resolution is slightly lower than the ultimate index in consideration of the influence of the actual amplification ratio (M is 2.5) and hardening artifact and noise factors. The lower spatial resolution of the system is another major factor that leads to higher uncertainty in the system measurements.
The uncertainty of expansion corresponding to the diameter of the 1# ball is recorded as U1And the expansion uncertainty corresponding to the diameter of the 2# ball is recorded as U2And the uncertainty of the expansion corresponding to the center distance of the sphere is recorded as U3When the confidence probability is 95%, the factor k is 2, and is calculated as follows: u shape1＝65.58μm，U2＝64.68μm，U3＝60.70μm。
In the embodiment, a 450kV industrial CT system is taken as an example, a calibrated double-sphere model is used as a research object, and an experimental evaluation method is adopted to preliminarily establish an evaluation step and a mathematical model of industrial CT measurement uncertainty aiming at a specific task; the influence of the calibration process, the measurement process, the detected workpiece, the system error and the like on the uncertainty of the measurement result is analyzed by the system, wherein the maximum contribution of the uncertainty of the measurement mainly comes from the system error of the industrial CT equipment, and before the measurement activity is carried out, the influence of the uncertainty component can be greatly reduced by carrying out the system calibration on the industrial CT equipment, so that the measurement accuracy is improved. In view of the fact that currently there is no accepted industrial CT measurement uncertainty evaluation standard in China, the method has reference significance for carrying out uncertain evaluation and quantity value tracing on industrial CT measurement.
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Claims (8)
1. A method for measuring uncertainty of industrial CT geometric dimension based on a spherical model is characterized by comprising the following steps:
s1: before use, the ball model is sent to a metering department for calibration detection and is used as a workpiece to be detected to obtain a calibration certificate, wherein the ball model is a single-ball model, a double-ball model or a multi-ball model, and the ball model is made of silicon nitride, aluminum oxide, zirconium dioxide or stainless steel;
s2: carrying out multiple scanning reconstruction on a detected workpiece by adopting industrial CT;
s3: importing the scanning reconstruction data into data analysis and visualization software, selecting the diameter and/or the spherical center distance as a geometric quantity evaluation object, and completing the measurement of the geometric dimension of the detected workpiece in a fitting mode;
s4: the standard uncertainty of the industrial size measurement is Uc, then
Wherein u iscalStandard uncertainty, u, introduced for the calibration procedurepStandard uncertainty, u, introduced for the measurement processwStandard uncertainty, u, introduced for the material and manufacturing variations of the workpiece to be inspectedbStandard uncertainty introduced for systematic errors in the measurement process;
s5: calculating the expansion uncertainty U, then U is k × UcAnd k is an inclusion factor.
2. The method for industrial CT geometric dimension measurement uncertainty based on sphere model body as claimed in claim 1, wherein in step S2, the number of scanning is not less than 5.
3. The method of claim 1, wherein the geometric dimension measurement uncertainty of the workpiece to be tested is determined by a binomial fitting method after threshold segmentation in step S3.
4. Method for industrial CT geometric dimension measurement uncertainty based on spherical phantom according to claim 2 or 3, characterized in that the calibration procedure introduces a standard uncertainty ucalThe calculation method comprises the following steps:
maximum allowable error of calibration process is + -UcalThen, then
k1Is an inclusion factor.
5. The method of claim 4, wherein the standard uncertainty u introduced by the measurement process is a standard uncertainty of the geometric dimension measurement of industrial CT based on the spherical modelpThe calculation method comprises the following steps:
wherein, yiAs a result of a single scan,
n is the average of the scan results.
6. A method for industrial CT geometric dimension uncertainty based on spherical model body as claimed in claim 5, characterized in that the standard uncertainty u introduced by the inspected workpiece material and manufacturing deviationwTwo uncertainty factors are associated: manufacturing variation of the workpiece to be inspected and coefficient of thermal expansion of the material, the manufacturing variation of the workpiece to be inspected being included in upIn the step (1), then:
uw＝(t-20℃)·uα·l；
wherein u isαThe standard uncertainty of the linear expansion coefficient of the workpiece to be detected is shown, t is the temperature of the workpiece in the scanning process, 20 ℃ is normal temperature, and l is the size of a geometric quantity evaluation object marked in a calibration certificate.
7. The method of claim 6, wherein the standard uncertainty u introduced by the system error of the measurement process for the uncalibrated system is the uncertainty of the measurement of the geometry of industrial CT based on the spherical phantombB is a systematic error, and
xcaland calibrating the value for the workpiece to be detected.
8. The method for industrial CT geometric dimension measurement uncertainty based on the sphere model according to any one of claims 1-7, characterized in that when the sphere model is a multi-sphere model, the sphere model comprises a plurality of spheres, the connecting lines of the centers of the spheres form a straight line or a polygon, and adjacent spheres are connected through carbon fiber, organic glass or aluminum alloy.
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