CN111028183A - Method for realizing graph trimming or expansion in LDI exposure - Google Patents
Method for realizing graph trimming or expansion in LDI exposure Download PDFInfo
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- CN111028183A CN111028183A CN201911372327.0A CN201911372327A CN111028183A CN 111028183 A CN111028183 A CN 111028183A CN 201911372327 A CN201911372327 A CN 201911372327A CN 111028183 A CN111028183 A CN 111028183A
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- 238000009966 trimming Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000011159 matrix material Substances 0.000 claims abstract description 16
- 238000010586 diagram Methods 0.000 claims abstract description 13
- 230000009467 reduction Effects 0.000 claims abstract description 10
- 230000001502 supplementing effect Effects 0.000 claims description 12
- 238000004364 calculation method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- 238000007650 screen-printing Methods 0.000 description 1
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T5/00—Image enhancement or restoration
- G06T5/77—Retouching; Inpainting; Scratch removal
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/10—Segmentation; Edge detection
- G06T7/187—Segmentation; Edge detection involving region growing; involving region merging; involving connected component labelling
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/70—Circuitry for compensating brightness variation in the scene
- H04N23/76—Circuitry for compensating brightness variation in the scene by influencing the image signals
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Abstract
The invention relates to the field of maskless exposure, in particular to a method for realizing graph trimming or expansion in LDI exposure, which comprises the following steps: s1, setting the number N of the trimming or expanding pixels of each edge in the polygon, and distinguishing the trimming or expanding; s2, filling the image data to be processed into a dot matrix diagram, and sending the dot matrix diagram to a processing module; s3, obtaining the data value of each row and each column according to the dot matrix map information; the method fills the original polygon into a dot matrix diagram, thereby solving the problem of common edges of the diagrams. The purpose of reducing a polygon to the inside by one pixel or expanding the polygon to the outside by one pixel is realized by using the AND or operation of two adjacent points, and in order to realize the reduction or expansion of a plurality of pixels, the result is only required to be operated for a plurality of times.
Description
Technical Field
The invention relates to the field of maskless exposure, in particular to a method for realizing graph trimming or expansion in LDI exposure.
Background
At present, the LDI exposure technology is classified into step exposure, direct scan exposure, and tilt scan exposure, wherein the tilt exposure technology has the characteristics of high exposure efficiency and high resolution, and has become the preferred exposure mode of LDI. However, tilt exposure has a problem: when positive exposure is carried out, the edge of the graph is widened, and the widening is more obvious when the exposure energy is larger; the edge reduction problem of the pattern occurs when negative polarity exposure is performed, and the reduction is more obvious when the exposure energy is larger. In order to obtain a pattern with a size required by a customer, certain processing needs to be performed on the exposed pattern before exposure, so as to ensure that the final exposed size of the pattern is consistent with the actual design.
The traditional edge cutting algorithm is to cut edges of polygons, and the traditional edge cutting algorithm has a mature algorithm function and can be directly used. However, the problem is that when two figures with common edges use the polygon trimming algorithm, cracks occur which are not desired. To solve this problem, polygons may be merged, merging the graphics in fig. 1 into a quadrangle. However, when the graphs are complex and large in quantity, the data processing amount of the merging algorithm is very large, the processing efficiency is very low, and the real-time processing of the data is not utilized.
Disclosure of Invention
In order to solve the problems that in the prior art, when the image of the public edge uses the polygon trimming algorithm in the prior art, cracks appear, and the data processing amount is small, the invention provides a method for realizing graph trimming or expansion in LDI exposure.
In order to achieve the purpose, the invention adopts the following technical scheme:
a method for realizing graph trimming or expansion in LDI exposure comprises the following steps:
s1, setting the number N of the trimming or expanding pixels of each edge in the polygon, and distinguishing the trimming or expanding;
s2, filling the image data to be processed into a dot matrix diagram, and sending the dot matrix diagram to a processing module;
s3, obtaining the data value of each row and each column according to the dot matrix map information;
a) when cutting edges in the row direction: respectively translating the data of each line forward and backward by 1 pixel, then supplementing 0 at the vacant position, and performing phase-contrast on the pixel value of the corresponding position in the two lines of data and the original pixel to form the pixel value of the corresponding position, namely obtaining the edge reduction of 1 pixel in the line direction of the corresponding line; repeating N times to obtain N pixels of line-direction trimming;
b) when cutting edges in the row direction: respectively translating each line of data by 1 pixel upwards and downwards, then supplementing 0 at a vacant position, and performing phase-contrast on a pixel value at a corresponding position in the two lines of data and an original pixel to form a pixel value at a corresponding position, namely obtaining 1 pixel of edge reduction in the direction of the corresponding line; repeating the N times to obtain N pixels with edges cut in the row direction;
c) and when the row direction expands: respectively translating the data of each line forward and backward by 1 pixel, then supplementing 0 at the vacant position, and carrying out the OR of the pixel value of the corresponding position in the two lines of data and the original pixel to form the pixel value of the corresponding position, namely obtaining 1 pixel of the edge extension of the line direction of the corresponding line; repeating N times to obtain N pixels expanded in the row direction;
d) and when the column direction expands: respectively translating each line of data by 1 pixel upwards and downwards, then supplementing 0 at a vacant position, and carrying out addition on pixel values at corresponding positions in two lines of data and original pixels to form pixel values at corresponding positions, namely obtaining 1 pixel extending in the edge direction of the corresponding line; repeating N times to obtain column direction expansion N pixels.
Preferably, the processing module is an FPGA.
Optimally, the method filled in step S2 is any polygon scan line filling algorithm.
Optimization, and/or operation between multiple points.
Optimally, in step S1, the cut edge and the extension are distinguished by using positive and negative.
Optimally, step S1 and step S2 are set in computer software.
Preferably, in step S2, the computer sends the bitmap to the processing module through the internet access or the USB interface.
The invention has the advantages that:
(1) the original polygons are filled into the dot matrix diagram, so that the problem of common edges of the diagrams is solved, and only each pixel point is 0 or 1. The purpose of reducing a polygon to the inside by one pixel or expanding the polygon to the outside by one pixel is realized by using the AND or operation of two adjacent points, and in order to realize the reduction or expansion of a plurality of pixels, the result is only required to be operated for a plurality of times.
(2) The invention uses the parallel operation of the FPGA to process a plurality of pixel points simultaneously, thereby having very high data processing speed and meeting the requirement of real data processing.
(3) The data format of the LDI exposed graph is gerber or ODB + +, and the data required by DMD exposure is a dot-matrix graph, so that the application firstly converts the gerber or ODB + + graph into polygon data which can be filled, and the data requirement is met.
(4) The whole algorithm only relates to simple and operation, is simple and easy to realize, and is suitable for various fields of PCB boards, screen printing plates, ceramics, glass and the like.
Drawings
FIG. 1 shows the result of the polygon trimming with adjacent edges in the prior art.
Detailed Description
A method for realizing graph trimming or expansion in LDI exposure comprises the following steps:
s1, setting the number N of pixels for cutting or expanding each edge in the polygon in computer software, and distinguishing cutting or expanding; in the scheme, positive and negative values are used for distinguishing cutting edges and extension, specifically, the positive value is extension, and the negative value is cutting edge; the cutting and the expansion are carried out on the upper side, the lower side, the left side and the right side of the polygon.
S2, filling image data to be processed into a dot matrix diagram, wherein the filling method is any polygon scanning line filling algorithm, and sending the dot matrix diagram to a processing module; in the scheme, the processing module is an FPGA, and the computer sends the dot-matrix diagram to the processing module through a network port or a USB interface. Operations and or operations between points are performed simultaneously. The operation and the operation can be performed simultaneously, or the operation and the operation can be performed simultaneously, so that the data processing speed is improved.
S3, under a general condition, the frame of a graph is 0, and the data value of each row and each column is obtained according to the dot matrix map information;
a00、a01、a02、a03、a04、a05…
a10、a11、a12、a13、a14、a15…
a20、a21、a22、a23、a24、a25…
a30、a31、a32、a33、a34、a35…
………………………………………
a) when cutting edges in the row direction: respectively translating the data of each line by 1 pixel forwards and backwards, then supplementing 0 at the vacant position, and performing phase-addition on the pixel value of the corresponding position in the obtained two lines of data and the original pixel, wherein the formula is obtained by taking a first line example as follows: 0&a00&a01、a00&a01&a02、a01&a02&a03、a02&a03&a04…, to form pixel values at corresponding positions, i.e. to obtain corresponding row-wise edge reductions of 1 pixel.
And repeating the calculation result as a new row pixel value for N times to obtain row direction edge cutting N pixels.
b) When cutting edges in the row direction: shifting each line of data up and down by 1 pixel respectively, then supplementing 0 at the vacant position, and taking the three phases of the pixel value of the corresponding position in the two lines of data and the original pixel as an example, the formula is obtained as follows: 0&a00&a10、a00&a10&a20、a10&a20&a30、a20&a30&a40…, to form pixel values at corresponding positions, i.e. to obtain corresponding row-wise edge reductions of 1 pixel.
And repeating the calculation result as a new column pixel value for N times to obtain column direction edge cutting N pixels.
c) And when the row direction expands: respectively shifting the data of each line forward and backward by 1 pixel, then supplementing 0 at the vacant position, and carrying out addition or subtraction on the pixel value of the corresponding position in the obtained data of two lines and the original pixel, wherein the formula is obtained by taking a first behavior example as follows: 0| a00|a01、a00|a01|0&a02、a01|a02|a03、a02|a03|a04…, so as to form pixel values at corresponding positions, namely to obtain corresponding row direction edge extension of 1 pixel;
repeating the calculation result for N times to obtain N pixels of line direction extension by taking the calculation result as a new line pixel value;
d) and when the column direction expands: shifting each column of data up and down by 1 pixel respectively, then supplementing 0 at the vacant position, and taking the first column as an example, the pixel value of the corresponding position in the obtained two columns of data and the original pixel are combined to obtain a formula: 0| a00|a10、a00|a10|0&a20、a10|a20|a30、a20|a30|a40…, forming pixel values at corresponding positions, namely obtaining 1 pixel corresponding to the edge extension of the column direction;
the above calculation results are repeated N times as new column pixel values to obtain column direction expansion N pixels.
The invention is not to be considered as limited to the specific embodiments shown and described, but is to be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Claims (7)
1. A method for realizing graph trimming or expansion in LDI exposure is characterized by comprising the following steps:
s1, setting the number N of the trimming or expanding pixels of each edge in the polygon, and distinguishing the trimming or expanding;
s2, filling the image data to be processed into a dot matrix diagram, and sending the dot matrix diagram to a processing module;
s3, obtaining the data value of each row and each column according to the dot matrix map information;
a) when cutting edges in the row direction: respectively translating the data of each line forward and backward by 1 pixel, then supplementing 0 at the vacant position, and performing phase-contrast on the pixel value of the corresponding position in the two lines of data and the original pixel to form the pixel value of the corresponding position, namely obtaining the edge reduction of 1 pixel in the line direction of the corresponding line; repeating N times to obtain N pixels of line-direction trimming;
b) when cutting edges in the row direction: respectively translating each line of data by 1 pixel upwards and downwards, then supplementing 0 at a vacant position, and performing phase-contrast on a pixel value at a corresponding position in the two lines of data and an original pixel to form a pixel value at a corresponding position, namely obtaining 1 pixel of edge reduction in the direction of the corresponding line; repeating the N times to obtain N pixels with edges cut in the row direction;
c) and when the row direction expands: respectively translating the data of each line forward and backward by 1 pixel, then supplementing 0 at the vacant position, and carrying out the OR of the pixel value of the corresponding position in the two lines of data and the original pixel to form the pixel value of the corresponding position, namely obtaining 1 pixel of the edge extension of the line direction of the corresponding line; repeating N times to obtain N pixels expanded in the row direction;
d) and when the column direction expands: respectively translating each line of data by 1 pixel upwards and downwards, then supplementing 0 at a vacant position, and carrying out addition on pixel values at corresponding positions in two lines of data and original pixels to form pixel values at corresponding positions, namely obtaining 1 pixel extending in the edge direction of the corresponding line; repeating N times to obtain column direction expansion N pixels.
2. The method for implementing graph trimming or expanding in LDI exposure as claimed in claim 1, wherein said processing module is FPGA.
3. The method for implementing pattern trimming or expanding in LDI exposure as claimed in claim 2, wherein the filling method in step S2 is any polygon scan line filling algorithm.
4. The method of claim 2, wherein the operations and/or the operations between the plurality of dots are performed simultaneously.
5. The method for implementing pattern trimming or expanding in LDI exposure as claimed in claim 1, wherein in step S1, the trimming and expanding are distinguished by using positive and negative.
6. The method of claim 1, wherein the steps S1 and S2 are implemented in computer software.
7. The method for implementing graphic trimming or expanding in LDI exposure as claimed in claim 6, wherein in step S2, the computer sends the bitmap to the processing module through a network port or a USB interface.
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Citations (4)
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| CN101296338A (en) * | 2008-06-11 | 2008-10-29 | 四川虹微技术有限公司 | Image zooming method and apparatus |
| CN101742080A (en) * | 2008-11-04 | 2010-06-16 | 深圳市融创天下科技发展有限公司 | Method for amplifying video image by 4/3 times |
| US20140055486A1 (en) * | 2012-08-24 | 2014-02-27 | Canon Kabushiki Kaisha | Method, system and apparatus for rendering a graphical object |
| CN106296614A (en) * | 2016-08-17 | 2017-01-04 | 北京集创北方科技股份有限公司 | Image processing apparatus and image processing method |
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|---|---|---|---|---|
| CN101296338A (en) * | 2008-06-11 | 2008-10-29 | 四川虹微技术有限公司 | Image zooming method and apparatus |
| CN101742080A (en) * | 2008-11-04 | 2010-06-16 | 深圳市融创天下科技发展有限公司 | Method for amplifying video image by 4/3 times |
| US20140055486A1 (en) * | 2012-08-24 | 2014-02-27 | Canon Kabushiki Kaisha | Method, system and apparatus for rendering a graphical object |
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