CN110993183A - Manufacturing method of metal resonance type terahertz metamaterial, metamaterial and wave absorber - Google Patents
Manufacturing method of metal resonance type terahertz metamaterial, metamaterial and wave absorber Download PDFInfo
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- CN110993183A CN110993183A CN201911262366.5A CN201911262366A CN110993183A CN 110993183 A CN110993183 A CN 110993183A CN 201911262366 A CN201911262366 A CN 201911262366A CN 110993183 A CN110993183 A CN 110993183A
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Abstract
The invention discloses a manufacturing method of a metal resonance type terahertz metamaterial, the metal resonance type terahertz metamaterial and a wave absorber, wherein the method comprises the following steps of: the three-dimensional modeling metal resonance type terahertz metamaterial microstructure is characterized by comprising an opening arranged on the upper surface and a groove and/or a cavity communicated with the opening, wherein the characteristic dimension of the microstructure is smaller than the terahertz wavelength; slicing the microstructure, and printing the three-dimensional structure of the metal resonance type terahertz metamaterial formed by the microstructure through a 3D printer; immersing the three-dimensional structure in a container containing metal powder, and vibrating the container in a pressurized environment so that the metal powder fills the grooves and/or cavities of the three-dimensional structure through the openings; scraping the metal powder on the surface of the three-dimensional structure; and gluing the upper surface of the three-dimensional structure to seal the opening to generate the metal resonant terahertz metamaterial.
Description
Technical Field
The invention belongs to the technical field of terahertz metamaterials, and particularly relates to a manufacturing method of a metal resonance type terahertz metamaterial, the metal resonance type terahertz metamaterial and a wave absorber.
Background
Terahertz (THZ) waves generally refer to electromagnetic radiation in the electromagnetic spectrum between the infrared and microwave range, with a wavelength range of 0.03mm to 3mm and a frequency range of 100GHz to 10THZ, which lies between the microwave and infrared bands on the electromagnetic spectrum. Although terahertz radiation sources are widely visible in nature, terahertz waves have once been an unknown gap in the electromagnetic spectrum due to the lack of an effective source for emitting terahertz waves and the lack of effective means and equipment for detecting terahertz waves. The terahertz wave has the excellent characteristics of low energy, good permeability, large bandwidth and the like. Based on the characteristics, the terahertz wave has great application potential in the fields of frequency spectroscopy, broadband communication, medical imaging, environmental monitoring, safety scanning, national defense and military and the like.
The artificial microstructure can change the electromagnetic parameter spatial distribution in the electromagnetic wave transmission process, thereby effectively controlling the transmission and local area of the electromagnetic wave, the metamaterial is an artificial periodic structure with unit structure size smaller than the working wavelength, has the unconventional physical characteristics which are not possessed by natural materials, such as negative refractive index, inverse Doppler effect and the like, the electromagnetic property of the metamaterial mainly depends on the unit structure of the metamaterial, but not on the intrinsic property of the material, and the artificial control of the dielectric constant and the magnetic conductivity can be realized by adjusting the geometric parameters of the sub-wavelength unit structure. Metamaterials can be divided into two broad categories depending on the structural material: a metal resonance type and a dielectric type.
The research results of the metamaterial obtained at present mainly include two-dimensional metamaterial structures, and the structures have the unconventional physical properties such as negative refractive index, electromagnetic stealth and the like, but have many defects, such as difficulty in meeting practical use conditions, difficulty in adapting the metamaterial in a two-dimensional form to complex and diverse use requirements, difficulty in realizing specific propagation path control of electromagnetic waves in a three-dimensional space, and difficulty in accompanying non-uniformity, anisotropy, polarization sensitivity, narrow working band and the like. In order to overcome the defects of the two-dimensional metamaterial and expand the application range of the metamaterial, more and more researchers turn the attention to the three-dimensional metamaterial.
In the prior art, the three-dimensional metamaterial manufacturing process comprises the following steps: depositing a film on a substrate; photoetching a pattern on the film; placing the device into a corresponding solution to etch a cavity; performing directional evaporation in different directions, and evaporating and depositing gold on the surface of the cavity; and placing the device into a corresponding solution to remove the film, so as to obtain the three-dimensional metamaterial structure. Or, depositing a gold film on the silicon substrate covered with the photoresist; putting the flat plate into the solution to dissolve the photoresist between the gold film and the silicon substrate, and separating the gold film; taking out the gold film from the solution by using a copper frame; cutting the gold film by using a focused ion beam; the cut shape is folded using in-situ focused ion beam implantation. And finally obtaining the three-dimensional metamaterial structure.
It can be seen that the existing metal resonant three-dimensional metamaterial has a complex manufacturing process and adopts high-requirement technologies such as coating, photoetching, etching, deposition, directional evaporation, ion beam cutting and the like. The geometric limitation on the manufactured three-dimensional metamaterial is large, and the manufacturing cost is high. In the above conventional methods for manufacturing metamaterials, the printed circuit board technology, the photolithography technology and the related MEMS manufacturing process have great limitations in manufacturing the three-dimensional micro-nano structure, and the three-dimensional structure is often obtained by adopting a complicated and high-cost process. A plurality of three-dimensional metamaterial devices can be manufactured by adopting a machining mode, but the machining capacity of the metamaterial device is difficult to meet the machining requirement of a metamaterial unit array with a complex micro or macro structure, in addition, manual assembly is often needed after the micro-structural units manufactured by machining are completed, the machining precision can be reduced to a certain degree, and the product performance is influenced. The 3D printing process cannot realize synchronous manufacturing of various material structures, and the design space of the three-dimensional metamaterial structure is limited.
The above information disclosed in this background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known in this country to a person of ordinary skill in the art.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a method for manufacturing a metal resonance type terahertz metamaterial, a material and a wave absorber thereof. The invention aims to realize the purpose through the following technical scheme, and the manufacturing method of the metal resonance type terahertz metamaterial comprises the following steps:
in the first step, a microstructure of a metal resonance type terahertz metamaterial is modeled in a three-dimensional mode, the characteristic size of the microstructure is smaller than the terahertz wavelength, and the microstructure comprises an opening arranged on the upper surface and a groove and/or a cavity communicated with the opening;
in the second step, the microstructure is sliced, and a three-dimensional structure of the metal resonance type terahertz metamaterial formed by the microstructure is printed and generated through a 3D printer;
in a third step, the three-dimensional structure is immersed into a container filled with metal powder, and the container is vibrated under a pressurized environment so that the metal powder fills the groove and/or cavity of the three-dimensional structure through the opening;
in the fourth step, scraping the metal powder on the surface of the three-dimensional structure;
and in the fifth step, gluing the upper surface of the three-dimensional structure to seal the opening, so as to generate the metal resonance type terahertz metamaterial.
In the method described, in a first step, the slots and/or cavities comprise continuous slots and/or split rings for producing an electrical resonant response, and/or a fishing net cavity for producing a magnetic resonant response.
In the method, in the first step, a metal resonance type terahertz metamaterial microstructure is modeled in a three-dimensional mode by using CAD, and a digital model of the microstructure is output.
In the method, in the second step, the microstructures are periodically arranged to form a three-dimensional structure forming the metal resonance type terahertz metamaterial.
In the method, in the second step, a polymer three-dimensional structure of the metal resonance type terahertz metamaterial formed by periodically arranging the microstructures is generated by micro-nano printing of a 3D printer.
In the method, in the third step, the metal powder comprises gold powder or silver powder, the container comprises an open container, and the characteristic dimensions comprise length, width, and height.
In the method, in a third step, in a sealed pressurized tank, a vibration motor vibrates the container so that the metal powder fills the grooves and/or cavities of the three-dimensional structure via the openings under the action of gravity and pressure.
In the method, the upper surface is provided with a plurality of openings, and the grooves and/or cavities occupy less and less space in the downward direction from the upper surface.
According to another aspect of the invention, the metal resonance type terahertz metamaterial is prepared by the method.
A three-dimensional structure of a metal resonance type terahertz metamaterial is formed by periodically arranging the following microstructures:
and for the microstructure, the characteristic dimension of the microstructure is smaller than the terahertz wavelength, and the microstructure comprises an opening arranged on the upper surface and a groove and/or a cavity communicated with the opening.
In the metal resonance type terahertz metamaterial, the grooves and/or the cavities comprise continuous grooves and/or split rings for generating electric resonance response, and/or fishing net cavities for generating magnetic resonance response.
In the metal resonance type terahertz metamaterial, the upper surface is provided with a plurality of openings, and the space occupied by the grooves and/or the cavities in the downward direction from the upper surface is smaller and smaller.
According to another aspect of the invention, the wave absorber is made of the metal resonance type terahertz metamaterial.
Advantageous effects
The invention provides a flexible, rapid and low-cost method for manufacturing a three-dimensional metamaterial, aiming at the problems that the metal resonant type three-dimensional metamaterial is difficult to manufacture by the conventional metamaterial manufacturing method or the process is complex and the cost is high when the metal resonant type three-dimensional metamaterial is manufactured. Compared with the existing manufacturing methods such as photoetching, evaporation, deposition and the like, the method can more economically and conveniently manufacture the three-dimensional metamaterial structure, the 3D printing is convenient and quick, the manufacturing of a complex structure is easy to realize, and when metal is added, the method of pressurizing a pressurizing tank and vibrating a vibration source is adopted to fill metal powder in a self-assembly mode. According to the invention, by utilizing the convenience of a 3D micro-nano printing technology, the structure of the three-dimensional metamaterial can be flexibly designed and manufactured according to the regulation and control requirements on the terahertz electromagnetic wave, and then the manufacturing of the metal resonance type three-dimensional metamaterial is completed by adding metal powder.
Drawings
Various other advantages and benefits of the present invention will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. Also, like parts are designated by like reference numerals throughout the drawings.
In the drawings:
fig. 1 is a schematic step diagram of a method for manufacturing a metal resonance type terahertz metamaterial according to one embodiment of the invention;
FIG. 2 is a schematic flow chart of a manufacturing method of a metal resonance type terahertz metamaterial according to one embodiment of the invention;
3a to 3c are schematic microstructures of a metal resonance type terahertz metamaterial according to one embodiment of the invention;
FIG. 4 is a schematic flow chart of a method for manufacturing a metal resonance type terahertz metamaterial through 3D micro-nano printing according to one embodiment of the invention, and the method comprises the steps of 1-a computer, 2-a 3D printer, 3-a pressurizing tank, 4-a metal powder container, 5-metal powder, 6-a vibrating device, 7-a polymer structure, 8-a scraper and 9-glue;
fig. 5 is a schematic structural diagram of a metal resonance type terahertz metamaterial according to one embodiment of the invention.
The invention is further explained below with reference to the figures and examples.
Detailed Description
Specific embodiments of the present invention will be described in more detail below with reference to fig. 1 to 5. While specific embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
It should be noted that certain terms are used throughout the description and claims to refer to particular components. As one skilled in the art will appreciate, various names may be used to refer to a component. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. The description which follows is a preferred embodiment of the invention, but is made for the purpose of illustrating the general principles of the invention and not for the purpose of limiting the scope of the invention. The scope of the present invention is defined by the appended claims.
Furthermore, for ease of description, spatially relative terms such as "on/above … …", "on/above … …", "on/above … …", "above … …", etc., may be used herein to describe the spatial relationship of a metamaterial/device or feature to other references (e.g., other metamaterials/devices or features or objects). It will be understood that the spatially relative terms are intended to encompass different orientations of the material in use or operation in addition to the orientation depicted in the present disclosure. For example, if the metamaterial is inverted, a metamaterial described as having an "upper surface" would then be positioned "under … …" or "under … …" or understood as a "lower surface". Thus, the exemplary term "upper surface" may include both an orientation of "above … …" and "below … …". The meta-material/device or feature may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
For the purpose of facilitating understanding of the embodiments of the present invention, the following description will be made by taking specific embodiments as examples with reference to the accompanying drawings, and the drawings are not to be construed as limiting the embodiments of the present invention.
For better understanding, as shown in fig. 1, a method for manufacturing a metal resonance type terahertz metamaterial comprises the following steps:
in a first step S1, three-dimensionally modeling a microstructure of a metal resonance type terahertz metamaterial, wherein the characteristic dimension of the microstructure is smaller than the terahertz wavelength, and the microstructure comprises an opening arranged on the upper surface and a groove and/or a cavity communicated with the opening;
in a second step S2, slicing the microstructure, and printing the three-dimensional structure of the metal resonance type terahertz metamaterial formed by the microstructure through a 3D printer;
in a third step S3, the three-dimensional structure is immersed in a container containing the metal powder, and the container is vibrated in a pressurized environment so that the metal powder fills the grooves and/or cavities of the three-dimensional structure via the openings;
in a fourth step S4, scraping the metal powder on the surface of the three-dimensional structure;
in a fifth step S5, glue is applied to the upper surface of the three-dimensional structure to close the opening, so as to generate the metal resonance type terahertz metamaterial.
In a preferred embodiment of the method, in the first step S1, a CAD is used to three-dimensionally model the microstructure of the metal resonance type terahertz metamaterial and output a digital model of the microstructure.
In a preferred embodiment of the method, in the second step S2, the microstructures are periodically arranged to form a three-dimensional structure constituting the metal resonance type terahertz metamaterial.
In a preferred embodiment of the method, in the second step S2, the 3D printer performs micro-nano printing to generate a three-dimensional polymer structure of the metal-resonance-type terahertz metamaterial composed of the periodic arrangement of the microstructures.
In a preferred embodiment of the method, in the third step S3, the metal powder includes gold powder or silver powder, the container includes an open container, the feature size of the microstructure further includes the size of the grooves and cavities, and the periodic size of the periodic arrangement of the microstructures is adjustable.
In a preferred embodiment of the method, in a third step S3, the container is vibrated by a vibration motor in a sealed pressurized can so that the metal powder fills the grooves and/or cavities of the three-dimensional structure via the openings under the influence of gravity and pressure.
In a preferred embodiment of the method, the upper surface is provided with a plurality of openings, the grooves and/or cavities occupy less and less space in a direction from the upper surface downwards, the upper surface may have one or more openings according to the designed microstructure, the grooves and/or cavities should be connected to one or more upper surface openings, and the overall shape of the grooves and/or cavities runs downwards from the upper surface and not vice versa.
In order to further understand the invention, in one embodiment, as shown in fig. 2, the method first uses computer 1CAD software to design a desired three-dimensional structure, then uses 3D slicing software to slice the model and guides the model into a 3D printer to print the model to manufacture the skeleton structure of the wave absorber; the polymer skeleton is then placed in a metal powder container such that the metal powder covers the polymer skeleton structure. Placing the container in a pressurizing tank, loading vibration with proper frequency and amplitude to the container by using a small vibration source, closing the pressurizing tank, and increasing the pressure to a certain value, so that the metal powder is automatically filled in a groove and cavity structure in a polymer framework in a self-assembly mode under the action of gravity and pressure; after the metal powder is filled, taking out the polymer framework, scraping redundant metal powder by using a scraper, and finally sealing the openings of the groove and cavity structures of the polymer framework by using glue; finally, the required metal resonant type three-dimensional metamaterial is formed. According to the invention, a micro-nano 3D printing technology is introduced into the manufacturing of the terahertz wave metamaterial, and a micro-nano metal three-dimensional structure which is complex in structure and difficult to process by other means can be simply and rapidly manufactured.
In a preferred embodiment of the method, as shown in fig. 3a to 3c, in a first step S1 the slots and/or cavities comprise continuous slots and/or split rings for generating an electrical resonant response, and/or for utilising a fishing net cavity for generating a magnetic resonant response. Furthermore, a plurality of vertical grooves are arranged below the opening. In one embodiment, an inverted U-shaped slot is provided below the opening.
The structure is that an opening is reserved on the upper surface of a microstructure which forms the metamaterial and has the characteristic dimension smaller than the wavelength, and the opening is connected with the internal groove and cavity structure, so that metal powder can be filled into a printed model in the third step and glue is used for sealing the opening in the fourth step. In practical application, the specific structure and the specific structure size can be designed and determined according to the specific requirements of the application.
In one embodiment, as shown in fig. 4, the whole manufacturing process of the method for manufacturing the metal resonance type terahertz metamaterial based on 3D micro-nano printing is composed of five parts, namely three-dimensional modeling of the metamaterial, printing and manufacturing of a three-dimensional model, filling of metal powder, removing of residual metal, and gluing and sealing of openings on the upper surface of the metamaterial.
Step one, designing a required three-dimensional metamaterial structure by using CAD software such as Solidworks, UGNX and the like, outputting a digital model in a format such as standard STL, OBJ and the like, and considering the addition of subsequent metal powder, the designed structure is a structure with an opening left on the upper surface and a groove and a cavity inside and can be completed in the computer 1.
And step two, processing the designed model by using slicing software or general slicing software provided by a 3D printer supplier for the printer, and converting files such as STL (standard template language) and OBJ (object-based object) into printing instructions of the 3D printer. The model is then printed using a high resolution 3D printer 2 to obtain the polymer backbone structure.
And step three, immersing the polymer framework structure into a metal powder container 4 filled with gold, silver and the like, wherein the container can adopt a beaker and the like, then fixedly connecting the container with a vibrating device 6 such as a small vibrating table or a vibrating motor, then putting the whole into a pressurizing tank, starting the vibrating device, closing a cover of the pressurizing tank 3 to seal the pressurizing tank, starting the pressurizing tank to pressurize, and automatically filling the groove and cavity structures reserved on the polymer framework with metal powder 5 under the action of gravity and pressure.
Step four, after the filling of the metal powder is completed, the polymer structure 7 is taken out from the container, and in order to prevent the metal powder from spilling, the polymer structure should be slowly taken out and kept horizontal. Then, the residual metal particles on the upper surface of the polymer are scraped off by a scraper 8.
And step five, uniformly coating glue 9 on the upper surface of the polymer structure, and sealing the openings of the groove and cavity structures to prevent the metal powder in the polymer structure from leaking. And the glue is cured to complete the manufacture of the whole metal resonant three-dimensional metamaterial.
As shown in FIG. 5, the metal resonance type terahertz metamaterial is manufactured through the method.
In one embodiment, the metal resonance type terahertz metamaterial comprises a periodic arrangement of the microstructures.
In one embodiment, the three-dimensional structure of the metal resonance type terahertz metamaterial is formed by periodically arranging the following microstructures:
and for the microstructure, the characteristic dimension of the microstructure is smaller than the terahertz wavelength, and the microstructure comprises an opening arranged on the upper surface and a groove and/or a cavity communicated with the opening.
In one embodiment, the groove and/or cavity comprises a continuous groove and/or split ring for producing an electrical resonant response, and/or a fishing net cavity for producing a magnetic resonant response.
In one embodiment, the upper surface is provided with a plurality of openings, the slots and/or cavities occupying less and less space in a direction downwards from the upper surface.
In addition, in another embodiment, the wave absorber is made of the metal resonance type terahertz metamaterial.
Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments and application fields, and the above-described embodiments are illustrative, instructive, and not restrictive. Those skilled in the art, having the benefit of this disclosure, may effect numerous modifications thereto without departing from the scope of the invention as defined by the appended claims.
Claims (10)
1. A manufacturing method of a metal resonance type terahertz metamaterial comprises the following steps:
in the first step (S1), three-dimensionally modeling a microstructure of a metal resonance type terahertz metamaterial, wherein the characteristic dimension of the microstructure is smaller than the terahertz wavelength, and the microstructure comprises an opening arranged on the upper surface and a groove and/or a cavity communicated with the opening;
in the second step (S2), the microstructure is sliced, and a three-dimensional structure of the metal resonance type terahertz metamaterial formed by the microstructure is generated through printing of a 3D printer;
in a third step (S3), the three-dimensional structure is immersed in a container containing the metal powder, the container is vibrated in a pressurized environment such that the metal powder fills the slots and/or cavities of the three-dimensional structure via the openings;
in the fourth step (S4), the metal powder on the surface of the three-dimensional structure is scraped off;
in the fifth step (S5), gluing is carried out on the upper surface of the three-dimensional structure to close the opening, and the metal resonance type terahertz metamaterial is generated.
2. The method of claim 1, wherein, in the second step (S2), the 3D printer micro-nano level printing generates a polymer three-dimensional structure of the metal resonance type terahertz metamaterial formed by the periodic arrangement of the microstructures.
3. The method according to claim 1, wherein in the third step (S3), the metal powder comprises gold powder or silver powder, the container comprises an open container, and the characteristic dimensions comprise length, width and height.
4. The method according to claim 1, wherein in a third step (S3), in a sealed pressurized tank, a vibration motor vibrates the container so that the metal powder fills the grooves and/or cavities of the three-dimensional structure via the openings under the action of gravity and pressure.
5. A method according to claim 1, wherein the upper surface is provided with a plurality of openings, the grooves and/or cavities taking up less and less space in a direction from the upper surface downwards.
6. A metal resonance type terahertz metamaterial characterized by being produced by the method of any one of claims 1 to 5.
7. A metal resonance type terahertz metamaterial is characterized in that,
the three-dimensional structure of the metal resonance type terahertz metamaterial is formed by periodically arranging the following microstructures:
and for the microstructure, the characteristic dimension of the microstructure is smaller than the terahertz wavelength, and the microstructure comprises an opening arranged on the upper surface and a groove and/or a cavity communicated with the opening.
8. The metal resonance type terahertz metamaterial according to claim 7,
the grooves and/or cavities include continuous grooves and/or split rings for producing an electrical resonant response, and/or fishing net cavities for producing a magnetic resonant response.
9. The metal resonance type terahertz metamaterial according to claim 7,
the upper surface is provided with a plurality of openings, and the grooves and/or cavities occupy less and less space in the downward direction from the upper surface.
10. A wave absorber, characterized in that the wave absorber is made of the metal resonance type terahertz metamaterial according to any one of claims 6 to 9.
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