CN110988400A - MEMS accelerometer combination calibration method and calibration device - Google Patents
MEMS accelerometer combination calibration method and calibration device Download PDFInfo
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- G—PHYSICS
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
Abstract
The invention provides a calibration method and a calibration device for an MEMS accelerometer combination, wherein the method comprises the following steps: arranging a rotatable mounting plate; adjusting the mounting plate to be in a horizontal state; the method comprises the following steps that each outer side face of an MEMS accelerometer combination is sequentially used as a mounting face to fix the MEMS accelerometer combination on a mounting plate, and the output of the MEMS accelerometer combination is collected after the MEMS accelerometer combination is fixed on the mounting plate through any one outer side face; the mounting plate rotates m different angles around the horizontal symmetry axis in sequence, and the third step is repeated when the mounting plate rotates to any angle, so that the output of n groups of MEMS accelerometer combinations is obtained; and calculating error parameters of the MEMS accelerometer combination according to the output of the n groups of MEMS accelerometer combinations, and correcting the parameters of the MEMS accelerometer combination according to the error parameters of the MEMS accelerometer combination to finish the calibration of the MEMS accelerometer combination. By applying the technical scheme of the invention, the technical problem that the MEMS accelerometer combination calibration cannot be carried out in the external field test link in the prior art can be solved.
Description
Technical Field
The invention relates to the technical field of MEMS acceleration calibration compensation, in particular to a calibration method and a calibration device for an MEMS accelerometer combination.
Background
Before the inertial system is actually used, error calibration is usually needed, error values of all parameters of the inertial device can be obtained through the error calibration, and all parameters are compensated according to all the error values, so that the navigation precision can be improved. In the field of MEMS inertial devices, calibration of an MEMS accelerometer combination is usually performed by using test calibration equipment in a laboratory environment, while in practical engineering applications, most accelerometer combinations are used in an external field test environment, and due to condition limitations, related calibration methods and equipment which can be used in the external field test environment do not exist in the prior art, that is, calibration of the MEMS accelerometer combination cannot be performed in an external field test link.
Disclosure of Invention
The invention provides a calibration method and a calibration device for an MEMS accelerometer combination, which can solve the technical problem that the MEMS accelerometer combination cannot be calibrated in an outfield test link in the prior art.
According to an aspect of the present invention, there is provided a calibration method for a MEMS accelerometer combination, the calibration method comprising: step one, arranging a rotatable mounting plate, wherein the mounting plate can rotate around a horizontal symmetrical axis of the mounting plate; adjusting the mounting plate to be in a horizontal state; step three, sequentially taking each outer side surface of the MEMS accelerometer combination as a mounting surface to fix the MEMS accelerometer combination on the mounting plate, and collecting the output of the MEMS accelerometer combination in the x-axis direction, the y-axis direction and the z-axis direction after the MEMS accelerometer combination is fixed on the mounting plate through any one outer side surface; step four, the mounting plate rotates m different angles around the horizontal symmetry axis in sequence, and the step three is repeated when the mounting plate rotates to any angle, so that the output of n groups of MEMS accelerometer combinations is obtained; and step five, calculating error parameters of the MEMS accelerometer combination according to the output of the n groups of MEMS accelerometer combinations, and correcting the parameters of the MEMS accelerometer combination according to the error parameters of the MEMS accelerometer combination to finish the calibration of the MEMS accelerometer combination.
Further, the fifth step specifically includes: (5.1) constructing a first matrix from the outputs of the combination of n sets of MEMS accelerometers
And a second matrix
Wherein the content of the first and second substances,
and
combining outputs of the nth group of MEMS accelerometers in the x-axis direction, the y-axis direction and the z-axis direction respectively; (5.2) according to
Solving a third matrix X; (5.3) according to X ═ A, B, D, E, F, G, H, I, J]T，
F＝-2δmz0，
H ═ 2 φ, I ═ 2 λ and
calculating an error parameter K of a MEMS accelerometer combinationmx、Kmy、Kmz、δmx0、δmy0、δmz0Rho, phi and lambda, where Kmx、KmyAnd KmzRespectively measuring the scale coefficient errors of the MEMS accelerometer combination in the x axial direction, the y axial direction and the z axial direction; δ mx0、δmy0And δ mz0Respectively combining the MEMS accelerometer with constant errors in the x-axis direction, the y-axis direction and the z-axis direction; rho, phi and lambda are all non-orthogonal error coefficients; (5.4) errors based on MEMS accelerometer combinationsAnd correcting the parameters of the MEMS accelerometer combination by the difference parameters to finish the calibration of the MEMS accelerometer combination.
Further, in the third step, acquiring the outputs of the MEMS accelerometer combination in the x-axis direction, the y-axis direction, and the z-axis direction after the MEMS accelerometer combination is fixed to the mounting plate through any one of the outer side surfaces specifically includes: after the MEMS accelerometer combination is fixed on the mounting plate through any one outer side face, actual outputs of the MEMS accelerometer combination in the x-axis direction, the y-axis direction and the z-axis direction are respectively collected within a set collection time period, an average value of the x-axis direction is obtained according to the actual outputs of the x-axis direction and is used as the output of the MEMS accelerometer combination in the x-axis direction, an average value of the y-axis direction is obtained according to the actual outputs of the y-axis direction and is used as the output of the MEMS accelerometer combination in the y-axis direction, and an average value of the z-axis direction is obtained according to the actual outputs of the z.
Further, the acquisition time period is set to 30 s.
Further, in step four, any one angle of rotation of the mounting plate about the horizontal axis of symmetry ranges from 0 to 180 °.
According to another aspect of the present invention, there is provided a calibration apparatus for a MEMS accelerometer assembly, the calibration apparatus comprising a rotatable mounting plate, the mounting plate being rotatable around a horizontal symmetry axis of the mounting plate, the calibration apparatus for a MEMS accelerometer assembly using the calibration method for a MEMS accelerometer assembly as described above.
The technical scheme of the invention is applied to provide a calibration method and a calibration device for an MEMS accelerometer combination, wherein the calibration method comprises the steps of arranging a mounting plate which can rotate at any angle, fixing the accelerometer combination on the mounting plate by taking each outer side surface of the MEMS accelerometer combination as a mounting surface in sequence when the mounting plate is in a horizontal position and rotates to any angle of m angles, acquiring the output of n groups of accelerometer combinations, calculating error parameters according to the output of the n groups of accelerometer combinations, and correcting the parameters of the corresponding MEMS accelerometer combinations. According to the calibration method for the MEMS accelerometer combination, the MEMS accelerometer combination can be calibrated in the outfield test link only by one rotatable mounting plate, and the calibration method is simple, practical and easy to operate. Compared with the prior art, the technical scheme of the application can solve the technical problem that the MEMS accelerometer combination calibration cannot be carried out in the outfield test link in the prior art.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
Fig. 1 is a schematic flow chart illustrating a calibration method for a MEMS accelerometer combination according to an embodiment of the present invention.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
As shown in fig. 1, a calibration method for a MEMS accelerometer assembly according to an embodiment of the present invention includes: step one, arranging a rotatable mounting plate, wherein the mounting plate can rotate around a horizontal symmetrical axis of the mounting plate; adjusting the mounting plate to be in a horizontal state; step three, sequentially taking each outer side surface of the MEMS accelerometer combination as a mounting surface to fix the MEMS accelerometer combination on the mounting plate, and collecting the output of the MEMS accelerometer combination in the x-axis direction, the y-axis direction and the z-axis direction after the MEMS accelerometer combination is fixed on the mounting plate through any one outer side surface; step four, the mounting plate rotates m different angles around the horizontal symmetry axis in sequence, and the step three is repeated when the mounting plate rotates to any angle, so that the output of n groups of MEMS accelerometer combinations is obtained; and step five, calculating error parameters of the MEMS accelerometer combination according to the output of the n groups of MEMS accelerometer combinations, and correcting the parameters of the MEMS accelerometer combination according to the error parameters of the MEMS accelerometer combination to finish the calibration of the MEMS accelerometer combination.
By applying the configuration mode, the MEMS accelerometer combination calibration method is provided, and the accelerometer combination is fixed on the mounting plate by arranging the mounting plate which can rotate at any angle and taking each outer side surface of the MEMS accelerometer combination as a mounting surface when the mounting plate is in a horizontal position and rotates to any one of m angles in sequence, so that the output of n groups of accelerometer combinations is obtained, error parameters are calculated according to the output of the n groups of accelerometer combinations, and the parameters of the corresponding MEMS accelerometer combinations are corrected. According to the calibration method for the MEMS accelerometer combination, the MEMS accelerometer combination can be calibrated in the outfield test link only by one rotatable mounting plate, and the calibration method is simple, practical and easy to operate. Compared with the prior art, the technical scheme of the application can solve the technical problem that the MEMS accelerometer combination calibration cannot be carried out in the outfield test link in the prior art.
Further, in the present invention, in order to realize the calibration of the MEMS accelerometer assembly, a rotatable mounting plate is first provided, and the mounting plate can rotate around the horizontal symmetry axis of the mounting plate. As an embodiment of the invention, the included angle between the mounting plate and the horizontal plane can be changed at will.
In addition, in the invention, after the rotatable mounting plate is arranged, the adjusting mounting plate is in a horizontal state.
Further, after the mounting plate is adjusted to be in a horizontal state, each outer side face of the MEMS accelerometer combination is sequentially used as a mounting face to fix the MEMS accelerometer combination on the mounting plate, and outputs of the MEMS accelerometer combination in the x-axis direction, the y-axis direction and the z-axis direction are acquired after the MEMS accelerometer combination is fixed on the mounting plate through any one outer side face.
As a specific embodiment of the present invention, when the accelerometer assembly is a hexahedron, the accelerometer assembly is turned over six times, and the MEMS accelerometer assembly is fixed on the mounting plate by using six outer side surfaces of the MEMS accelerometer assembly as mounting surfaces in sequence. And after the MEMS accelerometer combination is fixed on the mounting plate through any one of the outer side faces, acquiring the outputs of the MEMS accelerometer combination in the x-axis direction, the y-axis direction and the z-axis direction. In this embodiment, the hexahedral accelerometer assembly collects 6 sets of outputs when the mounting plate is in a horizontal state, each set of outputs including x-axis, y-axis, and z-axis outputs.
In addition, in the invention, in order to improve the accuracy of the output of the accelerometer combination, the actual outputs of the MEMS accelerometer combination in the x-axis direction, the y-axis direction and the z-axis direction can be respectively collected within a set collection time period, and an average value in the x-axis direction is obtained according to the actual output in the x-axis direction and is used as the output of the MEMS accelerometer combination in the x-axis direction, an average value in the y-axis direction is obtained according to the actual output in the y-axis direction and is used as the output of the MEMS accelerometer combination in the y-axis direction, and an average value in the z-axis direction is obtained according to the actual output. The set acquisition time can be adjusted according to actual conditions, and as a specific embodiment of the present invention, the set acquisition time can be set to 30 s.
Further, in the invention, after the outputs of the multiple groups of accelerometer combinations with the mounting plate in the horizontal state are obtained, the included angle between the mounting plate and the horizontal plane is adjusted, so that the mounting plate rotates by m different angles around the horizontal symmetry axis in sequence, and the third step is repeated when the mounting plate rotates to any angle, thereby obtaining the outputs of the n groups of MEMS accelerometer combinations. As an embodiment of the present invention, when the accelerometer assembly is a hexahedron, the mounting plate is sequentially rotated to m different angles from the horizontal position, and finally, the output of the MEMS accelerometer assembly with n ═ 6 groups (m +1) · can be obtained. In the present invention, the range of any one angle of rotation of the mounting plate about the horizontal axis of symmetry is 0-180 °.
In the present invention, a measurement model of a general MEMS triaxial accelerometer can be expressed as formula 1:
wherein the content of the first and second substances,
for the combined output of MEMS accelerometers, mbActual input of external acceleration, KmScale factor error for MEMS accelerometer combinations, Km＝diag(Kmx,Kmy,Kmz)，Kmx、KmyAnd KmzScale factor errors m in the x-axis, y-axis and z-axis, respectively, for the MEMS accelerometer combination0For constant error of MEMS accelerometer combination, m0＝[δmx0,δmy0,δmz0]T，δmx0、δmy0And δ mz0Constant error, T, in x, y and z axes for MEMS accelerometer combinations, respectivelymIs a non-orthogonal error matrix that is,
rho, phi and lambda are all non-orthogonal error coefficients.
The formula 2 is obtained by performing inverse operation on the formula 1:
the two sides of equation 2 are squared simultaneously to obtain equation 3:
wherein the content of the first and second substances,
and
actual input values of external acceleration in the x axial direction, the y axial direction and the z axial direction respectively; and m is the actual input value of the external acceleration. In the present invention, however, the actual input value of the external acceleration in the stationary state is equal to the local gravitational acceleration, i.e., the acceleration
Expanding equation 2 yields:
mixing the above
And
substituting into equation 3 yields equation 4:
after the formula 4 is expanded, the same terms are combined according to the corresponding coefficients, and the method can be rewritten as follows:
further written in matrix form:
order to
X＝[A,B,D,E,F,G,H,I,J]TIs the undetermined coefficient, wherein,
F＝-2δmz0，
h ═ 2 φ, I ═ 2 λ and
from the above derivation, in the present application, after the outputs of n sets of accelerometer combinations are obtained, a first matrix is constructed according to the outputs of n sets of MEMS accelerometer combinations
And a second matrix
Further in accordance with
The third matrix X is solved using least squares and then X ═ a, B, D, E, F, G, H, I, J obtained from the above derivation]TAnd an error parameter Kmx、Kmy、Kmz、δmx0、δmy0、δmz0Rho, phi and lambda, calculating an error parameter K of the MEMS accelerometer combinationmx、Kmy、Kmz、δmx0、δmy0、δmz0ρ, φ and λ. And finally, correcting parameters of the MEMS accelerometer combination according to the obtained error parameters of the MEMS accelerometer combination to finish calibration of the MEMS accelerometer combination.
According to another aspect of the present invention, there is provided a calibration apparatus for a MEMS accelerometer assembly, the calibration apparatus comprising a rotatable mounting plate, the mounting plate being rotatable around a horizontal symmetry axis of the mounting plate, the calibration apparatus for a MEMS accelerometer assembly using the calibration method for a MEMS accelerometer assembly as described above.
By applying the configuration mode, the MEMS accelerometer combination calibration device is provided, and the MEMS accelerometer combination calibration device calibrates the MEMS accelerometer combination by adopting the MEMS accelerometer combination calibration method. Therefore, the MEMS accelerometer combination calibration method is applied to the MEMS accelerometer combination calibration device, and the working performance of the MEMS accelerometer combination calibration device can be greatly improved.
For further understanding of the present invention, the calibration method of the MEMS accelerometer combination of the present invention is described in detail below with reference to fig. 1.
As shown in fig. 1, a calibration method for a MEMS accelerometer assembly is provided according to an embodiment of the present invention, which specifically includes the following steps.
Step one, a rotatable mounting plate is arranged, and the mounting plate can rotate around a horizontal symmetry axis of the mounting plate.
And step two, adjusting the mounting plate to be in a horizontal state.
And step three, sequentially taking each outer side surface of the MEMS accelerometer combination as a mounting surface to fix the MEMS accelerometer combination on the mounting plate, and acquiring the output of the MEMS accelerometer combination in the x-axis direction, the y-axis direction and the z-axis direction after the MEMS accelerometer combination is fixed on the mounting plate through any one outer side surface.
And step four, the mounting plate rotates for m different angles around the horizontal symmetry axis in sequence, and the step three is repeated when the mounting plate rotates to any angle, so that the output of the combination of n groups of MEMS accelerometers is obtained.
Step five, constructing a first matrix according to the output of the combination of the n groups of MEMS accelerometers
And a second matrix
According to
Solving a third matrix X; according to X ═ A, B, D, E, F, G, H, I, J]T，
F＝-2δmz0，
H ═ 2 φ, I ═ 2 λ and
calculating an error parameter K of a MEMS accelerometer combinationmx、Kmy、Kmz、δmx0、δmy0、δmz0ρ, φ and λ; and correcting the parameters of the MEMS accelerometer combination according to the error parameters of the MEMS accelerometer combination to finish the calibration of the MEMS accelerometer combination.
In summary, the present invention provides a calibration method and a calibration apparatus for an MEMS accelerometer assembly, in which an installation plate capable of rotating at any angle is provided, and when the installation plate is in a horizontal position and rotates to any one of m angles, each outer side surface of the MEMS accelerometer assembly is sequentially used as an installation surface to fix the accelerometer assembly on the installation plate, so as to obtain outputs of n groups of accelerometer assemblies, calculate error parameters according to the outputs of the n groups of accelerometer assemblies, and correct parameters of the corresponding MEMS accelerometer assemblies. According to the calibration method for the MEMS accelerometer combination, the MEMS accelerometer combination can be calibrated in the outfield test link only by one rotatable mounting plate, and the calibration method is simple, practical and easy to operate. Compared with the prior art, the technical scheme of the application can solve the technical problem that the MEMS accelerometer combination calibration cannot be carried out in the outfield test link in the prior art.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A calibration method for an MEMS accelerometer combination is characterized by comprising the following steps:
the method comprises the following steps that firstly, a rotatable mounting plate is arranged, and the mounting plate can rotate around a horizontal symmetry axis of the mounting plate;
adjusting the mounting plate to be in a horizontal state;
step three, sequentially taking each outer side surface of the MEMS accelerometer assembly as a mounting surface to fix the MEMS accelerometer assembly on the mounting plate, and collecting the output of the MEMS accelerometer assembly in the x-axis direction, the y-axis direction and the z-axis direction after the MEMS accelerometer assembly is fixed on the mounting plate through any one outer side surface;
step four, the mounting plate rotates by m different angles around the horizontal symmetry axis in sequence, and the step three is repeated when the mounting plate rotates to any angle, so that the output of n groups of MEMS accelerometer combinations is obtained;
and fifthly, calculating error parameters of the MEMS accelerometer combination according to the output of the n groups of MEMS accelerometer combinations, and correcting the parameters of the MEMS accelerometer combination according to the error parameters of the MEMS accelerometer combination to finish the calibration of the MEMS accelerometer combination.
2. The method for calibrating the combination of the MEMS accelerometer according to claim 1, wherein the step five specifically includes:
(5.1) constructing a first matrix from the outputs of the n groups of said MEMS-accelerometer combinations
And a second matrix
Wherein the content of the first and second substances,
and
combining outputs of the nth group of MEMS accelerometers in the x-axis direction, the y-axis direction and the z-axis direction respectively;
(5.2) according to
Solving a third matrix X;
(5.3) according to X ═ A, B, D, E, F, G, H, I, J]T，
F＝-2δmz0，
H ═ 2 φ, I ═ 2 λ and
calculating an error parameter K of the MEMS accelerometer combinationmx、Kmy、Kmz、δmx0、δmy0、δmz0Rho, phi and lambda, where Kmx、KmyAnd KmzRespectively being said MEMS accelerometer groupsThe scale coefficient errors in the x-axis direction, the y-axis direction and the z-axis direction are combined; δ mx0、δmy0And δ mz0Respectively combining the MEMS accelerometer with constant errors in the x-axis direction, the y-axis direction and the z-axis direction; rho, phi and lambda are all non-orthogonal error coefficients;
and (5.4) correcting the parameters of the MEMS accelerometer combination according to the error parameters of the MEMS accelerometer combination to finish the calibration of the MEMS accelerometer combination.
3. The method for calibrating the MEMS accelerometer combination according to claim 1 or 2, wherein the step three of acquiring the outputs of the MEMS accelerometer combination in the x-axis direction, the y-axis direction, and the z-axis direction after the MEMS accelerometer combination is fixed to the mounting plate through any one of the outer side surfaces specifically includes: the MEMS accelerometer combination is fixed in through arbitrary one lateral surface behind the mounting panel, gather respectively in setting for the collection duration MEMS accelerometer combination is at x axial, y axial and z axial's actual output to it is used as to find x axial's average value according to x axial's actual output MEMS accelerometer combination is at x axial's output, it is used as to find y axial's average value according to y axial's actual output MEMS accelerometer combination is at y axial's output, it is used as to find z axial's average value according to z axial's actual output MEMS accelerometer combination is at z axial's output.
4. The calibration method for the MEMS accelerometer combination of claim 3, wherein the set acquisition time is 30 s.
5. A calibration method for a MEMS accelerometer combination according to any one of claims 1 to 4, wherein in step four, the mounting plate is rotated around the horizontal symmetry axis by any one angle in the range of 0-180 °.
6. A calibration device for a MEMS accelerometer assembly, comprising a rotatable mounting plate, wherein the mounting plate is rotatable around a horizontal symmetry axis of the mounting plate, and the calibration device for the MEMS accelerometer assembly is used for calibrating the MEMS accelerometer assembly by using the calibration method for the MEMS accelerometer assembly according to any one of claims 1 to 5.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112683304A (en) * | 2020-12-02 | 2021-04-20 | 北京开拓航宇导控科技有限公司 | MEMS inclinometer calibration compensation method |
| CN113532385A (en) * | 2021-06-28 | 2021-10-22 | 中大检测(湖南)股份有限公司 | Method and system for rapid calibration and temperature compensation of inclination angle |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101788305A (en) * | 2010-03-26 | 2010-07-28 | 中北大学 | Method for rapid field calibration of micro inertial measurement unit |
| JP5445270B2 (en) * | 2010-03-29 | 2014-03-19 | セイコーエプソン株式会社 | Calibration data acquisition method, acceleration sensor output correction method, and calibration data acquisition system |
| CN104501833A (en) * | 2014-12-08 | 2015-04-08 | 北京航天控制仪器研究所 | Method for calibrating combined error coefficient of accelerometer under condition of reference uncertainty |
| CN105242070A (en) * | 2014-07-09 | 2016-01-13 | 北京自动化控制设备研究所 | Accelerometer unit calibration method without vector standard |
-
2019
- 2019-12-11 CN CN201911267175.8A patent/CN110988400A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101788305A (en) * | 2010-03-26 | 2010-07-28 | 中北大学 | Method for rapid field calibration of micro inertial measurement unit |
| JP5445270B2 (en) * | 2010-03-29 | 2014-03-19 | セイコーエプソン株式会社 | Calibration data acquisition method, acceleration sensor output correction method, and calibration data acquisition system |
| CN105242070A (en) * | 2014-07-09 | 2016-01-13 | 北京自动化控制设备研究所 | Accelerometer unit calibration method without vector standard |
| CN104501833A (en) * | 2014-12-08 | 2015-04-08 | 北京航天控制仪器研究所 | Method for calibrating combined error coefficient of accelerometer under condition of reference uncertainty |
Non-Patent Citations (1)
| Title |
|---|
| 任建新: "实用的MEMS惯性器件外场标定方法", 《传感器与微系统》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112683304A (en) * | 2020-12-02 | 2021-04-20 | 北京开拓航宇导控科技有限公司 | MEMS inclinometer calibration compensation method |
| CN113532385A (en) * | 2021-06-28 | 2021-10-22 | 中大检测(湖南)股份有限公司 | Method and system for rapid calibration and temperature compensation of inclination angle |
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