CN110987870A - System and method for real-time monitoring of gas concentration based on wavelength modulation spectroscopy - Google Patents

System and method for real-time monitoring of gas concentration based on wavelength modulation spectroscopy Download PDF

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CN110987870A
CN110987870A CN201911326880.0A CN201911326880A CN110987870A CN 110987870 A CN110987870 A CN 110987870A CN 201911326880 A CN201911326880 A CN 201911326880A CN 110987870 A CN110987870 A CN 110987870A
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value
gas
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CN110987870B (en
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李永刚
张涛
李洪刚
魏莹莹
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TIANJIN TONGYANG TECHNOLOGY DEVELOPMENT CO LTD
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Abstract

一种监测气体浓度的系统,包括分布式反馈激光器、信号发生模块、角锥棱镜、离轴抛物面镜、光电探测模块、信号传输模块、锁相放大模块和信号处理模块,其中:所述分布式反馈激光器输出的激光经准直后通过离轴抛物面镜中的中心孔和目标气体的待测区域,由角锥棱镜反射回至离轴抛物面镜,返回的激光汇聚到所述光电探测模块的光敏区;信号传输模块将所述光电探测模块采集到的电信号传输给锁相放大模块;锁相放大模块利用所述信号发生模块提供的参考信号将所述光电探测模块采集到的电信号进行解调;所述信号处理模块通过滤波器提取2f信号,并利用滤波器对所述提取的信号进行平滑滤波,从而为后续的算法处理提供2f信号和直流信号。

Figure 201911326880

A system for monitoring gas concentration, comprising a distributed feedback laser, a signal generation module, a corner prism, an off-axis parabolic mirror, a photoelectric detection module, a signal transmission module, a phase-locked amplification module and a signal processing module, wherein: the distributed The laser output from the feedback laser is collimated and passes through the central hole in the off-axis parabolic mirror and the area to be measured of the target gas, and is reflected back to the off-axis parabolic mirror by the corner cube prism. The signal transmission module transmits the electrical signal collected by the photoelectric detection module to the lock-in amplifier module; the lock-in amplifier module uses the reference signal provided by the signal generation module to decode the electrical signal collected by the photoelectric detection module. The signal processing module extracts the 2f signal through a filter, and uses the filter to smooth the extracted signal, so as to provide the 2f signal and the DC signal for subsequent algorithm processing.

Figure 201911326880

Description

System and method for monitoring gas concentration in real time based on wavelength modulation spectrum technology
Technical Field
The invention relates to the field of exhaust emission, in particular to a system and a method for monitoring gas concentration in real time based on a wavelength modulation spectrum technology.
Background
The tunable laser absorption spectrum technology can realize in-situ on-line measurement of parameters such as component concentration, temperature, pressure, speed and the like by utilizing the laser absorption characteristics of components in the gas to be measured. Compared with other technologies, the laser absorption spectrum technology has the advantages of accurate measurement, high response speed, non-invasive induction and the like, and has wide application prospect in the field of atmospheric environment detection. The tunable laser absorption spectroscopy technology is mainly divided into a direct absorption spectroscopy technology and a wavelength modulation spectroscopy technology.
The working principle of the direct absorption spectrum technology is that a certain scanning current is injected into a laser, the laser wave band emitted by the laser is driven to completely cover the wave band of a gas absorption peak, the laser passes through an absorption path containing gas to be detected and is absorbed by the gas at a specific position, an absorbed optical signal is converted into an electric signal through a photoelectric detector, and the characteristics of the absorption peak are provided by means of baseline fitting and the like. The direct absorption spectrum technology system is simple and easy to realize, but the measuring result is easily influenced by the emergent light intensity of the laser and the like, and the stability of the measuring result is poor. Therefore, the stability and the measurement accuracy of the system are often improved by the wavelength modulation spectrum technology.
The working principle of the wavelength modulation spectrum is that a high-frequency sinusoidal signal with the frequency f is modulated on the scanning current of a laser, laser emitted by the laser is absorbed by gas to be measured and then converted into an electric signal by a photoelectric detector, a phase-locked amplifier carries out phase-sensitive detection processing by utilizing the mutual irrelevance between an input signal and a noise signal, the electric signal is demodulated by a same-frequency (1f) or frequency-doubling (nf) signal and a complete useful signal is extracted from noise, and the concentration of the gas to be measured can be obtained by the relation between the amplitude of a harmonic signal and the concentration of the gas to be measured. The value of the frequency f is dozens of kHz to hundreds of kHz, and the frequency and the amplitude of the high-frequency sinusoidal modulation signal are changed, so that the optical noise in the direct absorption spectrum technology can be effectively reduced. Meanwhile, the wavelength modulation spectrum technology moves the information to be detected to a high-frequency wave band, so that 1/f low-frequency noise in the system is effectively inhibited, and higher detection precision is obtained.
In actual measurement, the intensity of laser is easily influenced by temperature, dust, vibration and the like to cause intensity change, the inversion concentration error is large only according to a 2f signal, a reference light path is generally arranged by adding a reference cell and the like to eliminate the influence of light intensity change on a measurement result, and the system complexity is high.
Disclosure of Invention
In view of the above, the main object of the present invention is to provide a system and a method for monitoring gas concentration, which are intended to at least partially solve at least one of the above technical problems.
In order to achieve the above object, as an aspect of the present invention, a system for monitoring gas concentration is provided, including a distributed feedback laser, a signal generating module, a corner cube prism, an off-axis parabolic mirror, a photodetection module, a signal transmission module, a phase-locked amplification module, and a signal processing module, wherein:
laser output by the distributed feedback laser is collimated, then passes through a central hole in the off-axis parabolic mirror and a region to be detected of target gas, is reflected back to the off-axis parabolic mirror by the pyramid prism, and the returned laser is converged to a photosensitive region of the photoelectric detection module;
the signal transmission module transmits the electric signal acquired by the photoelectric detection module to the phase-locked amplification module;
the phase-locked amplification module demodulates the electric signal acquired by the photoelectric detection module by using the reference signal provided by the signal generation module;
the signal processing module extracts the 2f signal through a filter and utilizes the filter to carry out smooth filtering on the extracted signal, thereby providing the 2f signal and the direct current signal for subsequent algorithm processing.
The signal generation module generates a sawtooth signal and a sine signal, and modulates the sine signal onto the sawtooth signal as a driving signal of the distributed feedback laser;
the photoelectric detection module is used for converting the received optical signal into an electric signal containing gas concentration information to obtain a direct absorption signal.
The system also comprises a temperature control module, wherein the temperature control module is used for controlling the working temperature of the distributed feedback laser, the internal secondary temperature control can accurately control the temperature to be the required temperature, the error is +/-0.001 ℃, and the stability of the output wavelength of the distributed feedback laser is effectively ensured;
the system also comprises a current driving module, wherein the current driving module converts the modulated voltage signal into a current signal and performs current tuning on the distributed feedback laser, so that the wavelength range of laser emitted by the distributed feedback laser is ensured to completely cover the absorption wavelength of the target gas.
The system utilizes the direct current signal to carry out normalization processing on the 2f signal, a reference air chamber and a reference light path do not need to be arranged inside the system, and the complexity of the system is low.
Wherein the signal processing module extracts an absorption line of the gas by using an FIR filter.
The signal processing module is used for carrying out normalization processing on the 2f signal by using the direct current signal, and quickly inverting the concentration by establishing a second-order relation between the peak value and the concentration of the normalized 2f signal.
The inversion method comprises the following specific steps:
pre-collecting 2f signals and direct absorption signals of different concentrations in a gas area to be detected, and carrying out the following processing:
extracting the maximum value of the 2f wave crest at the position known as the absorption peak, extracting the left wing minimum value and the right wing minimum value of the 2f wave trough at the positions of two wings of the absorption peak, subtracting the average value of the left wing minimum value and the right wing minimum value from the maximum value to obtain the peak value of the 2f absorption peak, and marking as 2 fpeak;
because the number of points of the direct absorption signal is known to be equal to that of the 2f signal, selecting a certain section of direct absorption signal at the position without an absorption peak, and averaging the section of direct absorption signal to be marked as dcmean;
normalizing the peak value 2fpeak of the 2f absorption peak by using the mean value dcmean of the direct absorption signal to obtain a normalized 2f value which is marked as 2 fmean;
establishing a nonlinear relation between the concentration and 2 fmean;
and flushing the gas with the concentration to be measured into the region of the gas to be measured, calculating to obtain the normalized 2f value, and substituting the value into the established nonlinear relation to obtain the true value of the concentration of the gas to be measured.
The signal generation module, the signal transmission module, the phase-locking amplification module and the signal processing module are integrated on the same circuit board.
The temperature control module and the current driving module are integrated on the same circuit board.
As another aspect of the present invention, there is also provided a method of monitoring a gas concentration, comprising the steps of:
the system is electrified and automatically started, the signal generation module generates waveform voltage, and the current driving module converts a voltage signal into current to drive the laser to generate a laser signal;
the laser signal passes through a target area of the gas to be detected through a central hole of the off-axis parabolic mirror, and the pyramid prism reflects the laser signal to the off-axis parabolic mirror;
the off-axis parabolic mirror converges laser on the photoelectric detection module, the photoelectric detection module converts an optical signal into a voltage signal, the signal transmission module collects the voltage signal and transmits the voltage signal to the phase-locked amplification module, and the phase-locked amplification module analyzes a 2f signal;
judging whether the light intensity meets the requirements, if not, alarming and judging whether the light intensity meets the requirements; and if the requirements are met, acquiring a 2f signal, and obtaining the gas concentration by adopting a quick inversion step.
The rapid inversion method comprises the following steps:
pre-collecting 2f signals and direct absorption signals of different concentrations in a gas area to be detected, and carrying out the following processing:
extracting the maximum value of the 2f wave crest at the position known as the absorption peak, extracting the left wing minimum value and the right wing minimum value of the 2f wave trough at the positions of two wings of the absorption peak, subtracting the average value of the left wing minimum value and the right wing minimum value from the maximum value to obtain the peak value of the 2f absorption peak, and marking as 2 fpeak;
because the number of points of the direct absorption signal is known to be equal to that of the 2f signal, selecting a certain section of direct absorption signal at the position without an absorption peak, and averaging the section of direct absorption signal to be marked as dcmean;
normalizing the peak value 2fpeak of the 2f absorption peak by using the mean value dcmean of the direct absorption signal to obtain a normalized 2f value which is marked as 2 fmean;
establishing a nonlinear relation between the concentration and 2 fmean;
and flushing the gas with the concentration to be measured into the region of the gas to be measured, calculating to obtain the normalized 2f value, and substituting the value into the established nonlinear relation to obtain the true value of the concentration of the gas to be measured.
Based on the technical scheme, compared with the prior art, the system and the method for monitoring the gas concentration have at least one of the following beneficial effects:
1. according to the method, the absorption signal of the environmental gas is collected in real time to serve as a background curve to be deducted, a reference gas chamber is not required to be arranged in the system, and the influence of the airtightness of the gas chamber, the adsorbability of the gas and the like on the measurement result is avoided;
2. the system of the invention utilizes the FIR filter to extract the absorption spectral line of the gas by selecting proper filter coefficients, thereby reducing the noise interference;
3. according to the method, the 2f signal is normalized by using the direct current signal, the influence of laser light intensity jitter, dust and the like on the light intensity is eliminated, and the concentration is quickly inverted by establishing a second-order linear relation between the peak value and the concentration of the normalized 2f signal;
4. in the system, the functions of the signal generation module, the phase-locking amplification module, the signal processing module and the like are integrated on one circuit board, and the functions of the current driving module and the temperature control module of the laser are integrated on one circuit board, so that the modularization and the integration of the system are facilitated.
Drawings
FIG. 1 is a flowchart of the operation of a hardware system according to an embodiment of the present invention;
FIG. 2 is a flow chart of a monitoring method according to an embodiment of the present invention;
FIG. 3 is a spectrum of the absorption peak and concentration of CO in example 1 of the present invention;
FIG. 4 is a second order nonlinear fit of CO concentration to 2fmean in example 1 of the present invention;
FIG. 5 shows CO in example 2 of the present invention2A spectrum of absorption peaks versus concentration;
FIG. 6 shows CO in example 2 of the present invention2Second order nonlinear fit plot of concentration to 2 fmean.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
The invention discloses a system and a method for monitoring gas concentration in real time based on a wavelength modulation spectrum technology, which centralize the functions of a signal generation module, a phase-locked amplification module, a signal processing module and the like on one circuit board, centralize the functions of a current driving module and a temperature control module of a laser on one circuit board, and are convenient for the modularization and the integration of a system; by collecting the absorption signal of the environmental gas in real time as a background curve to be deducted, a reference gas chamber is not required to be arranged in the system, so that the influence of the airtightness of the gas chamber, the adsorbability of the gas and the like on the measurement result is avoided; the system of the invention utilizes the FIR filter to extract the absorption spectral line of the gas by selecting proper filter coefficients, thereby reducing the noise interference; the 2f signal is normalized by using the direct current signal, the influence of laser light intensity jitter and the like on light intensity is eliminated, and the concentration is quickly inverted by establishing a second-order relational expression of the normalized 2f signal peak value and the concentration.
Specifically, as shown in fig. 1, it is a flowchart of the hardware system according to the embodiment of the present invention. The invention discloses a system for monitoring gas concentration, which comprises a distributed feedback laser, a signal generation module, a pyramid prism, an off-axis parabolic mirror, a photoelectric detection module, a signal transmission module, a phase-locked amplification module and a signal processing module, wherein:
laser output by the distributed feedback laser is collimated, then passes through a central hole in the off-axis parabolic mirror and a region to be detected of target gas, is reflected back to the off-axis parabolic mirror by the pyramid prism, and the returned laser is converged to a photosensitive region of the photoelectric detection module;
the signal transmission module transmits the electric signal acquired by the photoelectric detection module to the phase-locked amplification module;
the phase-locked amplification module demodulates the electric signal acquired by the photoelectric detection module by using the reference signal provided by the signal generation module;
the signal processing module extracts the 2f signal through a filter and utilizes the filter to carry out smooth filtering on the extracted signal, thereby providing the 2f signal and the direct current signal for subsequent algorithm processing.
The signal generation module generates a sawtooth signal and a sine signal, and modulates the sine signal onto the sawtooth signal as a driving signal of the distributed feedback laser;
the photoelectric detection module is used for converting the received optical signal into an electric signal containing gas concentration information to obtain a direct absorption signal.
The system also comprises a temperature control module, wherein the temperature control module is used for controlling the working temperature of the distributed feedback laser, the internal secondary temperature control can accurately control the temperature to be the required temperature, the error is +/-0.001 ℃, and the stability of the output wavelength of the distributed feedback laser is effectively ensured;
the system also comprises a current driving module, wherein the current driving module converts the modulated voltage signal into a current signal and performs current tuning on the distributed feedback laser, so that the wavelength range of laser emitted by the distributed feedback laser is ensured to completely cover the absorption wavelength of the target gas.
The system utilizes the direct current signal to carry out normalization processing on the 2f signal, a reference air chamber and a reference light path do not need to be arranged inside the system, and the complexity of the system is low.
Wherein the signal processing module extracts an absorption line of the gas by using an FIR filter.
The signal processing module is used for carrying out normalization processing on the 2f signal by using the direct current signal, and quickly inverting the concentration by establishing a second-order relation between the peak value and the concentration of the normalized 2f signal.
The inversion method comprises the following specific steps:
pre-collecting 2f signals and direct absorption signals of different concentrations in a gas area to be detected, and carrying out the following processing:
extracting the maximum value of the 2f wave crest at the position known as the absorption peak, extracting the left wing minimum value and the right wing minimum value of the 2f wave trough at the positions of two wings of the absorption peak, subtracting the average value of the left wing minimum value and the right wing minimum value from the maximum value to obtain the peak value of the 2f absorption peak, and marking as 2 fpeak;
because the number of points of the direct absorption signal is known to be equal to that of the 2f signal, selecting a certain section of direct absorption signal at the position without an absorption peak, and averaging the section of direct absorption signal to be marked as dcmean;
normalizing the peak value 2fpeak of the 2f absorption peak by using the mean value dcmean of the direct absorption signal to obtain a normalized 2f value which is marked as 2 fmean;
establishing a nonlinear relation between the concentration and 2 fmean;
and flushing the gas with the concentration to be measured into the region of the gas to be measured, calculating to obtain the normalized 2f value, and substituting the value into the established nonlinear relation to obtain the true value of the concentration of the gas to be measured.
The signal generation module, the signal transmission module, the phase-locking amplification module and the signal processing module are integrated on the same circuit board.
The temperature control module and the current driving module are integrated on the same circuit board.
Fig. 2 is a flow chart of a monitoring method according to an embodiment of the present invention. The method comprises the following steps:
the system is electrified and automatically started, the signal generation module generates waveform voltage, and the current driving module converts a voltage signal into current to drive the laser to generate a laser signal;
the laser signal passes through a target area of the gas to be detected through a central hole of the off-axis parabolic mirror, and the pyramid prism reflects the laser signal to the off-axis parabolic mirror;
the off-axis parabolic mirror converges laser on the photoelectric detection module, the photoelectric detection module converts an optical signal into a voltage signal, the signal transmission module collects the voltage signal and transmits the voltage signal to the phase-locked amplification module, and the phase-locked amplification module analyzes a 2f signal;
judging whether the light intensity meets the requirements, if not, alarming and judging whether the light intensity meets the requirements; and if the requirements are met, acquiring a 2f signal, and obtaining the gas concentration by adopting a quick inversion step.
The rapid inversion method comprises the following steps:
pre-collecting 2f signals and direct absorption signals of different concentrations in a gas area to be detected, and carrying out the following processing:
extracting the maximum value of the 2f wave crest at the position known as the absorption peak, extracting the left wing minimum value and the right wing minimum value of the 2f wave trough at the positions of two wings of the absorption peak, subtracting the average value of the left wing minimum value and the right wing minimum value from the maximum value to obtain the peak value of the 2f absorption peak, and marking as 2 fpeak;
because the number of points of the direct absorption signal is known to be equal to that of the 2f signal, selecting a certain section of direct absorption signal at the position without an absorption peak, and averaging the section of direct absorption signal to be marked as dcmean;
normalizing the peak value 2fpeak of the 2f absorption peak by using the mean value dcmean of the direct absorption signal to obtain a normalized 2f value which is marked as 2 fmean;
establishing a nonlinear relation between the concentration and 2 fmean;
and flushing the gas with the concentration to be measured into the region of the gas to be measured, calculating to obtain the normalized 2f value, and substituting the value into the established nonlinear relation to obtain the true value of the concentration of the gas to be measured.
The technical solution of the present invention is further illustrated by the following specific examples in conjunction with the accompanying drawings.
Example 1
Example 1 to monitor the change in the concentration of CO (carbon monoxide) in the air, the following example was analyzed.
Firstly, a DFB laser with the center wavelength of 2326.8nm is selected, the working temperature of the laser is set to be 29 ℃, the output wavelength of the laser is 2326.56 nm-2327.21 nm, and the absorption peak of CO at the position of 2326.823nm is completely covered.
And adjusting the light path to ensure that the voltage range of the absorbed light intensity of the detector is between 2V and 5V so as to ensure the accuracy of the measurement result.
Before measurement, the measurement concentration of CO needs to be subjected to nonlinear calibration, the maximum value of the measurement concentration is set to 1000ppm, 1000ppm is taken as the initial concentration, one point is selected at every 1000ppm, and 9 points are calibrated to obtain the relation between the absorption peak and the concentration, which is shown in figure 3;
establishing a non-linear relationship between concentration and ratio, as shown in fig. 4;
and the CO with the concentration of 2000ppm, 5000ppm and 10000ppm is measured again for verification, the measurement result is shown in the table 1, the maximum error is about 1%, the measurement precision is high, and the measurement requirement is met.
Table 1 measurement error in example 1
Figure BDA0002328607310000081
Example 2
Example 2 to monitor CO in air2The change in the concentration of (carbon dioxide) was analyzed in the following manner.
Selecting a DFB laser with the center wavelength of 2004nm, setting the working temperature of the laser to be 30 ℃, setting the output wavelength of the laser to be 2003.61-2004.41 nm, and completely covering CO2Absorption peak at 2004.019 nm.
And adjusting the light path to ensure that the maximum voltage value range of the absorption light intensity of the detector is between 2V and 5V so as to ensure the accuracy of the measurement result.
Before measurement, CO needs to be measured2The measured concentration is subjected to nonlinear calibration, the maximum value of the measured concentration is set to 50000ppm, 10000ppm is taken as the initial concentration, one point is selected at intervals of 10000ppm, and 5 points are calibrated in total, so that the relation between the absorption peak and the concentration is obtained and is shown in figure 5;
establishing a non-linear relationship between concentration and ratio, as shown in fig. 6;
again select CO concentrations of 10000ppm, 30000ppm and 50000ppm2The verification is carried out, the measurement result is shown in table 2, the error between the two is very small, the maximum error is within 7 percent, and the measurement requirement is met.
Table 2 measurement error in example 2
Figure BDA0002328607310000091
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1.一种监测气体浓度的系统,其特征在于,包括分布式反馈激光器、信号发生模块、角锥棱镜、离轴抛物面镜、光电探测模块、信号传输模块、锁相放大模块和信号处理模块,其中:1. a system for monitoring gas concentration, is characterized in that, comprises distributed feedback laser, signal generation module, corner cube prism, off-axis parabolic mirror, photoelectric detection module, signal transmission module, lock-in amplifier module and signal processing module, in: 所述分布式反馈激光器输出的激光经准直后通过离轴抛物面镜中的中心孔和目标气体的待测区域,由角锥棱镜反射回至离轴抛物面镜,返回的激光汇聚到所述光电探测模块的光敏区;The laser output from the distributed feedback laser is collimated and passes through the central hole in the off-axis parabolic mirror and the area to be measured of the target gas, and is reflected back to the off-axis parabolic mirror by the corner prism, and the returned laser is concentrated on the photoelectric mirror. The photosensitive area of the detection module; 信号传输模块将所述光电探测模块采集到的电信号传输给锁相放大模块;The signal transmission module transmits the electrical signal collected by the photoelectric detection module to the lock-in amplifier module; 锁相放大模块利用所述信号发生模块提供的参考信号将所述光电探测模块采集到的电信号进行解调;The lock-in amplifier module demodulates the electrical signal collected by the photoelectric detection module by using the reference signal provided by the signal generation module; 所述信号处理模块通过滤波器提取2f信号,并利用滤波器对所述提取的信号进行平滑滤波,从而为后续的算法处理提供2f信号和直流信号。The signal processing module extracts the 2f signal through a filter, and uses the filter to smooth and filter the extracted signal, so as to provide the 2f signal and the DC signal for subsequent algorithm processing. 2.根据权利要求1所述的监测气体浓度的系统,其特征在于,所述信号发生模块产生锯齿信号和正弦信号,并将正弦信号调制到锯齿信号上作为所述分布式反馈激光器的驱动信号;2. The system for monitoring gas concentration according to claim 1, wherein the signal generating module generates a sawtooth signal and a sine signal, and modulates the sine signal onto the sawtooth signal as a drive signal of the distributed feedback laser ; 所述光电探测模块用于将接收到的光信号转换为含有气体浓度信息的电信号,得到直接吸收信号。The photoelectric detection module is used to convert the received optical signal into an electrical signal containing gas concentration information to obtain a direct absorption signal. 3.根据权利要求1所述的监测气体浓度的系统,其特征在于,所述系统还包括温度控制模块,所述温度控制模块用于控制所述分布式反馈激光器的工作温度,内部的二级温控可将温度准确控制在所需的温度,误差为±0.001℃,有效保证了所述分布式反馈激光器输出波长的稳定性;3. The system for monitoring gas concentration according to claim 1, wherein the system further comprises a temperature control module, the temperature control module is used to control the operating temperature of the distributed feedback laser, and the internal secondary The temperature control can accurately control the temperature at the required temperature with an error of ±0.001°C, which effectively ensures the stability of the output wavelength of the distributed feedback laser; 所述系统还包括电流驱动模块,所述电流驱动模块将调制后的电压信号转为电流信号,并对所述分布式反馈激光器进行电流调谐,保证所述分布式反馈激光器发出激光的波长范围完全覆盖目标气体的吸收波长。The system further includes a current drive module, which converts the modulated voltage signal into a current signal, and performs current tuning on the distributed feedback laser to ensure that the wavelength range of the distributed feedback laser emits laser light completely. Covers the absorption wavelength of the target gas. 4.根据权利要求1所述的监测气体浓度的系统,其特征在于,所述系统利用直流信号对2f信号进行归一化处理,内部无需设置参考气室和参考光路,系统复杂度低。4 . The system for monitoring gas concentration according to claim 1 , wherein the system uses a DC signal to normalize the 2f signal, no reference gas chamber and reference optical path are required inside, and the system complexity is low. 5 . 5.根据权利要求1所述的监测气体浓度的系统,其特征在于,所述信号处理模块利用FIR滤波器提取气体的吸收谱线。5 . The system for monitoring gas concentration according to claim 1 , wherein the signal processing module uses an FIR filter to extract the absorption spectral lines of the gas. 6 . 6.根据权利要求1所述的监测气体浓度的系统,其特征在于,所述信号处理模块利用直流信号对2f信号进行归一化处理,并通过建立归一化后2f信号峰值与浓度的二阶关系式,快速反演浓度。6. The system for monitoring gas concentration according to claim 1, wherein the signal processing module utilizes a DC signal to normalize the 2f signal, and establishes a relationship between the peak value of the 2f signal and the concentration after normalization. Order relationship, fast inversion concentration. 7.根据权利要求6所述的监测气体浓度的系统,其特征在于,所述反演具体步骤如下:7. The system for monitoring gas concentration according to claim 6, wherein the specific steps of the inversion are as follows: 预采集待测气体区域不同浓度的2f信号和直接吸收信号,进行如下处理:Pre-collect 2f signals and direct absorption signals of different concentrations in the gas area to be measured, and perform the following processing: 在已知为吸收峰的位置处提取2f波峰的最大值,并在吸收峰两翼的位置处提取2f波谷的左翼最小值和右翼最小值,将最大值减去左翼最小值和右翼最小值的平均值得到2f吸收峰的峰值,记为2fpeak;The maximum value of the 2f peak is extracted at the position known as the absorption peak, and the left and right minimum values of the 2f trough are extracted at the positions flanking the absorption peak, and the maximum value is subtracted from the average of the left and right minimum values. The peak value of the 2f absorption peak is obtained, which is recorded as 2fpeak; 由于直接吸收信号的点数与2f信号的点数已知相等,选取无吸收峰位置处的某段直接吸收信号,并对该段直接吸收信号求均值,记为dcmean;Since the number of points of the direct absorption signal is known to be equal to the number of points of the 2f signal, a certain section of the direct absorption signal at the position without absorption peak is selected, and the average value of the direct absorption signal of this section is calculated, which is recorded as dcmean; 利用直接吸收信号的均值dcmean对2f吸收峰的峰值2fpeak进行归一化处理,得到归一化的2f值,记为2fmean;The peak value 2fpeak of the 2f absorption peak is normalized by the mean value dcmean of the direct absorption signal, and the normalized 2f value is obtained, which is recorded as 2fmean; 建立浓度与2fmean的非线性关系式;Establish a nonlinear relationship between concentration and 2fmean; 将待测浓度的气体冲入待测气体区域中,计算得到所述归一化的2f值,并将该值代入已建立的非线性关系式,即求得待测气体浓度的真值。The gas with the concentration to be measured is flushed into the area of the gas to be measured, the normalized 2f value is obtained by calculation, and the value is substituted into the established nonlinear relationship, that is, the true value of the concentration of the gas to be measured is obtained. 8.根据权利要求1所述的监测气体浓度的系统,其特征在于,所述信号发生模块、信号传输模块、锁相放大模块和信号处理模块集成在同一电路板上。8 . The system for monitoring gas concentration according to claim 1 , wherein the signal generating module, the signal transmission module, the lock-in amplifying module and the signal processing module are integrated on the same circuit board. 9 . 9.根据权利要求3所述的监测气体浓度的系统,其特征在于,所述温度控制模块和电流驱动模块集成在同一电路板上。9 . The system for monitoring gas concentration according to claim 3 , wherein the temperature control module and the current drive module are integrated on the same circuit board. 10 . 10.一种采用如权利要求1~9任一所述的监测气体浓度的系统进行气体浓度监测的方法,其特征在于,包括以下步骤:10. A method for monitoring gas concentration using the system for monitoring gas concentration according to any one of claims 1 to 9, characterized in that, comprising the following steps: 将所述系统上电自启,信号发生模块产生波形的电压,电流驱动模块将电压信号转换为电流,驱动激光器产生激光信号;The system is powered on and starts automatically, the signal generating module generates the voltage of the waveform, the current driving module converts the voltage signal into a current, and drives the laser to generate a laser signal; 激光信号通过离轴抛物面镜的中心孔,穿过待测气体的目标区域,角锥棱镜将激光信号反射至离轴抛物面镜;The laser signal passes through the center hole of the off-axis parabolic mirror and passes through the target area of the gas to be measured, and the corner prism reflects the laser signal to the off-axis parabolic mirror; 离轴抛物面镜将激光汇聚在光电探测模块上,光电探测模块将光信号转换为电压信号,信号传输模块采集电压信号传输给锁相放大模块,锁相放大模块解析出2f信号;The off-axis parabolic mirror gathers the laser light on the photoelectric detection module, the photoelectric detection module converts the optical signal into a voltage signal, the signal transmission module collects the voltage signal and transmits it to the lock-in amplifier module, and the lock-in amplifier module parses the 2f signal; 判断光强是否满足要求,若不满足要求,则报警,并判断光强是否满足要求;若满足要求,则采集2f信号,并采用快速反演步骤可得到气体浓度。Judging whether the light intensity meets the requirements, if not, it will alarm and judge whether the light intensity meets the requirements; if it meets the requirements, collect the 2f signal, and use the fast inversion step to obtain the gas concentration. 其中,快速反演包括如下步骤:Among them, the fast inversion includes the following steps: 预采集待测气体区域不同浓度的2f信号和直接吸收信号,进行如下处理:Pre-collect 2f signals and direct absorption signals of different concentrations in the gas area to be measured, and perform the following processing: 在已知为吸收峰的位置处提取2f波峰的最大值,并在吸收峰两翼的位置处提取2f波谷的左翼最小值和右翼最小值,将最大值减去左翼最小值和右翼最小值的平均值得到2f吸收峰的峰值,记为2fpeak;Extract the maximum value of the 2f peak at the position known as the absorption peak, and extract the left-wing minimum and right-wing minimum of the 2f trough at the positions flanking the absorption peak, and subtract the maximum value from the average of the left-wing minimum and the right-wing minimum. The peak value of the 2f absorption peak is obtained, which is recorded as 2fpeak; 由于直接吸收信号的点数与2f信号的点数已知相等,选取无吸收峰位置处的某段直接吸收信号,并对该段直接吸收信号求均值,记为dcmean;Since the number of points of the direct absorption signal is known to be equal to the number of points of the 2f signal, a certain section of the direct absorption signal at the position without absorption peak is selected, and the average value of the direct absorption signal of this section is calculated, which is recorded as dcmean; 利用直接吸收信号的均值dcmean对2f吸收峰的峰值2fpeak进行归一化处理,得到归一化的2f值,记为2fmean;The peak value 2fpeak of the 2f absorption peak is normalized by the mean value dcmean of the direct absorption signal, and the normalized 2f value is obtained, which is recorded as 2fmean; 建立浓度与2fmean的非线性关系式;Establish a nonlinear relationship between concentration and 2fmean; 将待测浓度的气体冲入待测气体区域中,计算得到所述归一化的2f值,并将该值代入已建立的非线性关系式,即求得待测气体浓度的真值。The gas with the concentration to be measured is flushed into the area of the gas to be measured, the normalized 2f value is obtained by calculation, and the value is substituted into the established nonlinear relationship, that is, the true value of the concentration of the gas to be measured is obtained.
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504981A (en) * 2020-11-25 2021-03-16 天津同阳科技发展有限公司 Method for detecting motor vehicle exhaust emission by using wavelength modulation spectrum technology
CN113533249A (en) * 2021-06-09 2021-10-22 山东师范大学 A N2O detection system and method based on open optical path and wavelength modulation
CN114047161A (en) * 2021-10-28 2022-02-15 中南大学 Self-diagnosis method for laser emission wavelength
CN114414517A (en) * 2021-12-17 2022-04-29 山东微感光电子有限公司 A low-power intrinsically safe laser carbon monoxide sensing control method and system
CN114993987A (en) * 2022-05-16 2022-09-02 北京航空航天大学 Temperature and gas concentration measurement method and system based on absorption spectrum amplitude modulation
CN115326754A (en) * 2022-09-14 2022-11-11 南京大学 A temperature-free gas concentration sensor
CN115855875A (en) * 2022-11-28 2023-03-28 长春理工大学 Three-dimensional gas concentration field measurement device, method, system and supporting probe system
CN117747008A (en) * 2024-02-07 2024-03-22 山东省科学院激光研究所 A baseline fitting and noise reduction method and system for gas laser absorption spectra

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013096396A1 (en) * 2011-12-20 2013-06-27 The Board Of Trustees Of The Leland Stanford Junior University A method for calibration-free scanned-wavelength modulation spectroscopy for gas sensing
CN106323878A (en) * 2016-08-08 2017-01-11 中国科学院合肥物质科学研究院 Laser remote sensing detector for natural gas concentration and distance
CN206161524U (en) * 2016-09-07 2017-05-10 天津大学 TDLAS gas concentration detection system
CN107478601A (en) * 2017-09-15 2017-12-15 江汉大学 Gas concentration detection system and detection method based on Wavelength modulation spectroscopy
CN109612965A (en) * 2018-12-25 2019-04-12 杭州电子科技大学 The miniaturization gas-detecting device and detection system of many kinds of parameters compensation
CN211505210U (en) * 2019-12-20 2020-09-15 天津同阳科技发展有限公司 System for monitoring gas concentration in real time based on wavelength modulation spectrum technology

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013096396A1 (en) * 2011-12-20 2013-06-27 The Board Of Trustees Of The Leland Stanford Junior University A method for calibration-free scanned-wavelength modulation spectroscopy for gas sensing
CN106323878A (en) * 2016-08-08 2017-01-11 中国科学院合肥物质科学研究院 Laser remote sensing detector for natural gas concentration and distance
CN206161524U (en) * 2016-09-07 2017-05-10 天津大学 TDLAS gas concentration detection system
CN107478601A (en) * 2017-09-15 2017-12-15 江汉大学 Gas concentration detection system and detection method based on Wavelength modulation spectroscopy
CN109612965A (en) * 2018-12-25 2019-04-12 杭州电子科技大学 The miniaturization gas-detecting device and detection system of many kinds of parameters compensation
CN211505210U (en) * 2019-12-20 2020-09-15 天津同阳科技发展有限公司 System for monitoring gas concentration in real time based on wavelength modulation spectrum technology

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
朱雁军 等: "基于可调谐激光吸收光谱技术的免校准硫化氢气体传感器", 激光杂志, vol. 38, no. 05, 31 May 2017 (2017-05-31), pages 40 - 44 *
杜振辉 等: "基于空心光波导的激光吸收光谱氨气传感器", 光谱学与光谱分析, vol. 36, no. 08, 15 August 2016 (2016-08-15), pages 2669 - 2673 *

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504981A (en) * 2020-11-25 2021-03-16 天津同阳科技发展有限公司 Method for detecting motor vehicle exhaust emission by using wavelength modulation spectrum technology
CN113533249A (en) * 2021-06-09 2021-10-22 山东师范大学 A N2O detection system and method based on open optical path and wavelength modulation
CN114047161A (en) * 2021-10-28 2022-02-15 中南大学 Self-diagnosis method for laser emission wavelength
CN114414517A (en) * 2021-12-17 2022-04-29 山东微感光电子有限公司 A low-power intrinsically safe laser carbon monoxide sensing control method and system
CN114414517B (en) * 2021-12-17 2024-02-20 山东微感光电子有限公司 A low-power intrinsically safe laser carbon monoxide sensing control method and system
CN114993987A (en) * 2022-05-16 2022-09-02 北京航空航天大学 Temperature and gas concentration measurement method and system based on absorption spectrum amplitude modulation
CN114993987B (en) * 2022-05-16 2024-04-30 北京航空航天大学 Temperature and gas concentration measurement method and system based on absorption spectrum amplitude modulation
CN115326754A (en) * 2022-09-14 2022-11-11 南京大学 A temperature-free gas concentration sensor
CN115855875A (en) * 2022-11-28 2023-03-28 长春理工大学 Three-dimensional gas concentration field measurement device, method, system and supporting probe system
CN117747008A (en) * 2024-02-07 2024-03-22 山东省科学院激光研究所 A baseline fitting and noise reduction method and system for gas laser absorption spectra
CN117747008B (en) * 2024-02-07 2024-05-03 山东省科学院激光研究所 A method and system for baseline fitting and noise reduction of gas laser absorption spectrum

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