CN110987186B - Birefringent interferometer adjusting device and method based on optical path difference indication - Google Patents
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Abstract
The invention relates to a birefringent interferometer adjusting device and a birefringent interferometer adjusting method, in particular to a birefringent interferometer adjusting device and a birefringent interferometer adjusting method based on optical path difference indication, and solves the technical problem that the existing birefringent interferometer adjusting device and method based on interference fringe indication are difficult to meet the requirement of birefringent polarization interference type hyperspectral imaging device interferometer adjusting precision. The adjusting device is characterized in that: the device comprises a laser light source, a beam expanding system, a diffuser, a standard polarizer, an imaging objective lens and a detector which are sequentially arranged along a light path; defining: the direction of a reflection light path of the standard polarizer is positive x-axis direction, the direction of a transmission light path of the standard polarizer is positive z-axis direction, and the normal direction of a plane determined by the x-axis and the z-axis is the direction of y-axis; the polarization direction of the transmitted light of the standard polarizer is parallel to the x axis; the detector is located at the back focal plane of the imaging objective. The invention also provides an assembly and debugging method based on the assembly and debugging device.
Description
Technical Field
The invention relates to a birefringent interferometer adjusting device and a birefringent interferometer adjusting method, in particular to a birefringent interferometer adjusting device and a birefringent interferometer adjusting method based on optical path difference indication.
Background
The interference hyperspectral imaging technology carries out Fourier transform processing on interference signals based on the modulation relation among the signals, and can demodulate to obtain spectral signals of a detection target. The key to obtain a more ideal interference signal is to carry out high-precision adjustment on the core component interferometer and reduce the influence caused by adjustment errors as much as possible. The birefringence interference hyperspectral imaging device is widely applied to the field of spectral measurement due to the advantages of compact structure and simple light path. The core component of the device is a birefringent interferometer, the birefringent interferometer mostly adopts a structure of combining a Wollaston prism and a Saval prism, and the adjustment precision of the birefringent interferometer is closely related to the adjustment state of each birefringent device, especially influenced by the adjustment error of the optical axis of the birefringent device. At present, a birefringent interferometer adopting a structure combining a wollaston prism and a savart prism is generally adjusted by using a birefringent interferometer adjusting device and an adjusting method based on interference fringe indication.
The application publication number is "CN 108593105A", the application publication date is "2018.09.28", the invention name is "birefringent polarization interference type hyperspectral imaging device and imaging method thereof", Chinese patent, the birefringent interferometer structure disclosed in the patent comprises a front polarizer, a birefringent shear plate, a birefringent compensation plate and an analyzer which are arranged along an optical path in sequence; the two birefringent crystals are adopted to replace a structure combining a Wollaston prism and a Saval prism, so that the optical path difference with better linearity is introduced, the problem of the total optical path difference is solved, and the method is suitable for light, small and high-precision hyperspectral imaging application. However, for the birefringent interferometer with such a structure and the birefringent interferometer with a similar structure, the conventional birefringent interferometer adjusting device and adjusting method based on interference fringe indication have low adjusting precision, and it is difficult to meet the requirement of the adjusting precision of the interferometer.
Disclosure of Invention
The invention aims to provide a birefringent interferometer adjusting device and a birefringent interferometer adjusting method based on optical path difference indication, and aims to solve the technical problem that the existing birefringent interferometer adjusting device and method based on interference fringe indication are difficult to meet the requirement of birefringent polarization interference type hyperspectral imaging device interferometer adjusting precision.
The technical scheme adopted by the invention is that the birefringent interferometer adjusting device based on optical path difference indication comprises pre-polarizers P which are sequentially arranged along an optical path1Birefringent shear plate SP, birefringent compensation plate CP and analyzer P2(ii) a It is characterized in that:
the device comprises a laser light source, a beam expanding system, a diffuser, a standard polarizer, an imaging objective lens and a detector which are sequentially arranged along a light path;
defining: the direction of a reflection light path of the standard polarizer is positive x-axis direction, the direction of a transmission light path of the standard polarizer is positive z-axis direction, and the normal direction of a plane determined by the x-axis and the z-axis is the direction of y-axis;
the polarization direction of the transmitted light of the standard polarizer is parallel to the x axis;
the detector is located at the back focal plane of the imaging objective.
Further, for higher adjustment accuracy, the standard polarizer is a linear polarizer or a glan-taylor prism with a calibrated polarization direction.
The invention also provides a birefringence interferometer adjusting method based on optical path difference indication, which is characterized in that: the method is based on the birefringence interferometer adjusting device based on the optical path difference indication, and comprises the following steps:
step 1: front polarizer P1Installation and adjustment
A front polarizer P1The optical fiber is placed between a standard polarizer and an imaging objective lens; adjusting front polarizer P1The vibration transmission direction is vertical to the z axis, and the included angle between the vibration transmission direction and the x axis is 45 degrees;
step 2: polarization analyzer P2Installation and adjustment
Will analyzer P2Placed in a front polarizer P1And an imaging objective lens; adjusting the analyzer P2To make it have the transmission direction and the front polarizer P1The direction of the penetrating vibration is orthogonal, and the detector reaches an extinction state at the moment;
and step 3: coarse adjustment of birefringent shear plate SP
Placing a birefringent shear plate SP on a front polarizer P1And analyzer P2To (c) to (d); adjusting the birefringent shear plate SP until the interference fringes of the upper and lower fields of view collected by the detector are symmetrically distributed, namely completing the coarse adjustment of the birefringent shear plate SP;
and 4, step 4: fine adjustment of birefringent shear plate SP
Performing phase unpacking analysis on the upper and lower view field interference fringes which are symmetrically distributed and collected by the detector in the step 3 to obtain a total optical path difference distribution curve of the upper and lower view fields of each row, analyzing the total optical path difference distribution condition of the upper and lower view fields, and returning to the step 3 if the total optical path difference of the upper and lower view fields is asymmetrically distributed until the total optical path difference of the upper and lower view fields is symmetrically distributed to finish fine adjustment of the birefringent shear plate SP;
and 5: birefringent compensation plate CP Assembly
Placing the birefringent compensation plate CP on the birefringent shear plate SP and the analyzer P2To (c) to (d); adjusting the birefringent compensation plate CP, performing phase unpacking analysis on interference images acquired by the detector to obtain a total optical path difference distribution curve of upper and lower fields of view of each line, analyzing the total optical path difference distribution condition of the upper and lower fields of view, if the total optical path difference of the upper and lower fields of view is asymmetrically distributed, iteratively adjusting the birefringent compensation plate CP until the total optical path difference of the upper and lower fields of view is symmetrically distributed, completing the adjustment of the birefringent compensation plate CP, and completing the adjustment of the birefringent interferometer.
Further, step 1 said adjusting front polarizer P1The specific adjusting method for enabling the transmission direction to be perpendicular to the z axis and the included angle of the transmission direction and the x axis to be 45 degrees comprises the following steps: front polarizer P capable of rotating 360 degrees by taking z axis as rotating center1Recording the maximum and minimum values of the detector light intensity signal, and determining the maximum and minimum values based on the light intensity value and the pre-polarizer P1And adjusting the corresponding relation of the transmission vibration direction.
Further, the adjusting analyzer P in step 22To make it have the transmission direction and the front polarizer P1The specific adjusting method for the orthogonal vibration transmission direction comprises the following steps: rotating analyzer P with z-axis as rotation center2。
Further, the specific adjusting method for adjusting the birefringent shearing plate SP until the interference fringes of the upper and lower fields of view, which are acquired by the detector, are symmetrically distributed in step 3 is as follows: and rotating the birefringent shearing plate SP by taking the z axis as a rotation center, analyzing the interference fringes acquired by the detector, observing the distribution condition of the interference fringes of the upper and lower fields of view, and if the interference fringes of the upper and lower fields of view are asymmetrically distributed, iteratively adjusting the birefringent shearing plate SP until the interference fringes of the upper and lower fields of view acquired by the detector are symmetrically distributed.
Further, the method for adjusting the birefringence compensation plate CP in step 5 is to rotate the birefringence compensation plate CP with the z-axis as the rotation center.
The invention has the beneficial effects that:
(1) the invention relates to a birefringent interferometer assembling device and method based on optical path difference indication, which can realize high-precision assembling and adjusting of each optical device in the birefringent interferometer one by utilizing the corresponding relation between each optical element parameter in the birefringent interferometer and the distribution condition of the introduced optical path difference and based on the indication of the optical path difference distribution condition of the birefringent interferometer, thereby realizing the prepositive polarizer P1Polarization direction analyzer P2The high-precision adjustment of the transmission vibration direction and the optical axis direction of the birefringent interferometer breaks through the subjective adjustment precision limit based on interference fringe indication, and the quantized high-precision adjustment of the birefringent interferometer is really realized; therefore, the birefringence interferometer adjusting device and the birefringence interferometer adjusting method based on the optical path difference indication solve the technical problem that the existing birefringence interferometer adjusting device and the existing birefringence interferometer adjusting method based on the interference fringe indication are difficult to meet the requirement of the birefringence polarization interference type hyperspectral imaging device on the interferometer adjusting precision.
(2) The birefringence interferometer adjusting device and the birefringence interferometer adjusting method based on the optical path difference indication have high adjusting sensitivity, reduce the adjusting error of the birefringence interferometer, improve the modulation degree of interference fringes and provide a technical basis for obtaining high-precision restored spectral signals.
(3) According to the birefringence interferometer adjusting device based on optical path difference indication, the standard polarizer is preferably a linear polaroid or a Glan Taylor prism with the polarization direction being calibrated, and therefore the adjusting precision is higher.
Drawings
FIG. 1 is a schematic diagram of an installation and adjustment path for installing and adjusting a birefringent interferometer using an optical path difference indication-based birefringent interferometer installation and adjustment apparatus of the present invention;
FIG. 2 is a flow chart of a birefringence interferometer setup method based on optical path difference indication of the present invention;
FIG. 3(a) shows the interference fringes of the upper and lower fields of view, which are symmetrically distributed and collected for the first time by the detector in step 3 according to the embodiment of the present invention;
fig. 3(b) is a distribution curve of total optical path difference between upper and lower fields of view obtained by performing phase unwrapping analysis on the interference fringes of fig. 3 (a);
FIG. 3(c) shows the interference fringes of upper and lower fields of view, which are symmetrically distributed and collected by the detector after the birefringent shear plate SP is finely tuned in step 4 according to the embodiment of the present invention;
fig. 3(d) is a distribution curve of total optical path difference between upper and lower fields of view obtained after phase unwrapping analysis is performed on the interference fringes of fig. 3 (c);
FIG. 4(a) is an interference image acquired by the detector for the first time in step 5 according to the embodiment of the present invention;
FIG. 4(b) is a distribution curve of total optical path difference between upper and lower fields of view for each row obtained by performing phase unwrapping analysis on the interference image of FIG. 4 (a);
FIG. 4(c) is an interference image collected by the detector after iteratively adjusting the birefringent compensation plate CP in step 5 according to the embodiment of the present invention;
fig. 4(d) is a distribution curve of the total optical path difference between the upper and lower fields of view for each line obtained by performing phase unwrapping analysis on the interference image of fig. 4 (c).
The reference numerals in the drawings are explained as follows:
the system comprises a laser source 1, a beam expanding system 2, a diffuser 3, a standard polarizer 4, a birefringence interferometer 5, an imaging objective 6 and a detector 7.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1, the birefringence interferometer adjusting device based on optical path difference indication of the invention, the birefringence interferometer 5 to be adjusted comprises pre-polarizers P arranged along the optical path in sequence1Birefringent shear plate SP, birefringent compensation plate CP and analyzer P2(ii) a The structure of the adjusting device comprises a laser light source 1, a beam expanding system 2, a diffuser 3, a standard polarizer 4, an imaging objective lens 6 and a detector 7 which are sequentially arranged along a light path.
Defining: the direction of a reflection light path of the standard polarizer 4 is the positive direction of an x axis, the direction of a transmission light path of the standard polarizer 4 is the positive direction of a z axis, and the normal direction of a plane determined by the x axis and the z axis is the direction of a y axis; the polarization direction of the transmitted light of the standard polarizer 4 is parallel to the x axis; the detector 7 is located at the back focal plane of the imaging objective 6. Thus, the linear polarization direction of the light beam received by the detector 7 is parallel to the x-axis.
In the present embodiment, the laser light source 1 preferably employs a helium-neon laser with a wavelength of 632.8nm, and the standard polarizer 4 is preferably a linear polarizer or a glan-taylor prism with a calibrated polarization direction.
The invention also provides a birefringence interferometer adjusting method based on optical path difference indication, which is based on the birefringence interferometer adjusting device based on optical path difference indication, and referring to fig. 2, the adjusting method comprises the following steps:
step 1: front polarizer P1Installation and adjustment
A front polarizer P1Is arranged between the standard polarizer 4 and the imaging objective lens 6; adjusting front polarizer P1The vibration transmission direction is vertical to the z axis, and the included angle between the vibration transmission direction and the x axis is 45 degrees;
step 2: polarization analyzer P2Installation and adjustment
Will analyzer P2Placed in a front polarizer P1And the imaging objective 6; adjusting the analyzer P2To make it have the transmission direction and the front polarizer P1The direction of the transmitted vibration is orthogonal, and the detector 7 reaches an extinction state at the moment;
and step 3: coarse adjustment of birefringent shear plate SP
Placing a birefringent shear plate SP on a front polarizer P1And analyzer P2To (c) to (d); adjusting the birefringent shear plate SP until the interference fringes of the upper and lower fields of view, which are acquired by the detector 7, are symmetrically distributed, so as to finish the coarse adjustment of the birefringent shear plate SP;
and 4, step 4: fine adjustment of birefringent shear plate SP
Performing phase unpacking analysis on the upper and lower view field interference fringes which are symmetrically distributed and collected by the detector 7 in the step 3 to obtain an upper and lower view field total optical path difference distribution curve of each line, analyzing the upper and lower view field total optical path difference distribution condition, and returning to the step 3 if the upper and lower view field total optical path difference is asymmetrically distributed until the upper and lower view field total optical path difference is symmetrically distributed to finish fine adjustment of the birefringent shear plate SP;
and 5: birefringent compensation plate CP Assembly
Placing the birefringent compensation plate CP on the birefringent shear plate SP and the analyzer P2To (c) to (d); adjusting the birefringent compensation plate CP, performing phase unpacking analysis on the interference image acquired by the detector 7 to obtain a total optical path difference distribution curve of the upper and lower fields of view of each line, analyzing the total optical path difference distribution condition of the upper and lower fields of view, if the total optical path difference of the upper and lower fields of view is asymmetrically distributed, iteratively adjusting the birefringent compensation plate CP until the total optical path difference of the upper and lower fields of view is symmetrically distributed, completing the adjustment of the birefringent compensation plate CP, and completing the adjustment of the birefringent interferometer 5.
In this embodiment, the step 1 adjusts the front polarizer P1The specific adjusting method for enabling the transmission direction to be perpendicular to the z axis and the included angle of the transmission direction and the x axis to be 45 degrees comprises the following steps: front polarizer P capable of rotating 360 degrees by taking z axis as rotating center1Recording the maximum value 1 and the minimum value 0 of the normalized light intensity signal of the detector 7 according to the light intensity value and the front polarizer P1The corresponding relation of the transmission direction is that the front polarizer P is arranged1The direction of the transmission vibration is accurately adjusted to be vertical to the z axis, the included angle between the transmission vibration and the x axis is 45 degrees, and the normalized light intensity value is the maximum value at the moment
And about 0.7071.
In this embodiment, the step 2 adjusts the analyzer P2To make it have the transmission direction and the front polarizer P1The specific adjusting method for the orthogonal vibration transmission direction comprises the following steps: rotating analyzer P with z-axis as rotation center2. When the analyzer P2The transmission direction and the front polarizer P1When the transmission vibration directions are orthogonal, the detector 7 receives the minimum light intensity signal to reach an extinction state, and the analyzer P at the moment2And finishing the installation and adjustment.
In this embodiment, the specific adjusting method for adjusting the birefringent shearing plate SP in step 3 until the interference fringes of the upper and lower fields collected by the detector 7 are symmetrically distributed is as follows: and rotating the birefringent shearing plate SP by taking the z axis as a rotation center, analyzing the interference fringes acquired by the detector 7, observing the distribution condition of the interference fringes of the upper and lower fields of view, and if the interference fringes of the upper and lower fields of view are asymmetrically distributed, iteratively adjusting the birefringent shearing plate SP until the interference fringes of the upper and lower fields of view acquired by the detector 7 are symmetrically distributed. FIG. 3(a) shows the interference fringes of the upper and lower fields of view, which are symmetrically distributed and collected by the detector 7 for the first time in step 3 according to the embodiment of the present invention; fig. 3(b) is a distribution curve of the total optical path difference between the upper and lower fields of view for each line obtained by performing phase unwrapping analysis on the interference fringes of fig. 3 (a).
As can be seen from fig. 3(b), the total optical path difference distribution of the upper and lower viewing fields is asymmetric, the birefringent shearing plate SP is finely tuned according to the above step 4, and fig. 3(c) shows the symmetrically distributed upper and lower viewing field interference fringes collected by the detector 7 after the birefringent shearing plate SP is finely tuned in step 4 in the embodiment of the present invention; fig. 3(d) is a distribution curve of the total optical path difference between the upper and lower fields of view for each line obtained by performing phase unwrapping analysis on the interference fringes of fig. 3 (c). It can be seen that the total optical path difference of the upper and lower fields of view of fig. 3(d) is symmetrically distributed.
In this embodiment, the method for adjusting the birefringent compensation plate CP in step 5 is to rotate the birefringent compensation plate CP with the z-axis as the rotation center. In step 5, the interference image acquired by the detector 7 for the first time is shown in fig. 4 (a); FIG. 4(b) is a distribution curve of total optical path difference between upper and lower fields of view for each row obtained by performing phase unwrapping analysis on the interference image of FIG. 4 (a); as can be seen from fig. 4(b), the total optical path difference distribution of the upper and lower fields of view of each row is asymmetric, iterative adjustment needs to be performed on the birefringent compensation plate CP, and after the birefringent compensation plate CP is iteratively adjusted, an interference image acquired by the detector 7 is as shown in fig. 4 (c); fig. 4(d) is a distribution curve of the total optical path difference between the upper and lower fields of view for each line obtained by performing phase unwrapping analysis on the interference image of fig. 4 (c). As can be seen from fig. 4(d), the total optical path difference between the upper and lower fields of view is distributed symmetrically, the adjustment of the birefringent compensation plate CP is completed, and the adjustment of the birefringent interferometer 5 is completed.
The invention is suitable for the structure comprising a preposed polarizer P arranged along the light path in sequence1Birefringent shear plate SP, birefringent patchCompensation plate CP and analyzer P2And the installation and adjustment of birefringent interferometers of similar construction.
Claims (6)
1. A birefringent interferometer adjusting method based on optical path difference indication is characterized in that the birefringent interferometer (5) to be adjusted comprises a front polarizer P which is sequentially arranged along an optical path1Birefringent shear plate SP, birefringent compensation plate CP and analyzer P2(ii) a The adjusting device based on the adjusting method comprises a laser light source (1), a beam expanding system (2), a scatterer (3), a standard polarizer (4), an imaging objective lens (6) and a detector (7) which are sequentially arranged along a light path; defining: the direction of a reflection light path of the standard polarizer (4) is the positive direction of an x axis, the direction of a transmission light path of the standard polarizer (4) is the positive direction of a z axis, and the normal direction of a plane determined by the x axis and the z axis is the direction of a y axis; the polarization direction of the transmitted light of the standard polarizer (4) is parallel to the x axis; the detector (7) is positioned at the back focal plane of the imaging objective lens (6); the method is characterized by comprising the following steps:
step 1: front polarizer P1Installation and adjustment
A front polarizer P1Is arranged between the standard polarizer (4) and the imaging objective lens (6); adjusting front polarizer P1The vibration transmission direction is vertical to the z axis, and the included angle between the vibration transmission direction and the x axis is 45 degrees;
step 2: polarization analyzer P2Installation and adjustment
Will analyzer P2Placed in a front polarizer P1And an imaging objective (6); adjusting the analyzer P2To make it have the transmission direction and the front polarizer P1The direction of the penetrating vibration is orthogonal, and the detector (7) reaches an extinction state;
and step 3: coarse adjustment of birefringent shear plate SP
Placing a birefringent shear plate SP on a front polarizer P1And analyzer P2To (c) to (d); adjusting the birefringent shear plate SP until the interference fringes of the upper and lower fields of view collected by the detector (7) are symmetrically distributed, namely completing the rough adjustment of the birefringent shear plate SP;
and 4, step 4: fine adjustment of birefringent shear plate SP
Performing phase unpacking analysis on the upper and lower view field interference fringes which are symmetrically distributed and collected by the detector (7) in the step 3 to obtain an upper and lower view field total optical path difference distribution curve of each line, analyzing the upper and lower view field total optical path difference distribution condition, and returning to the step 3 if the upper and lower view field total optical path difference distribution is asymmetric, until the upper and lower view field total optical path difference distribution is symmetric, and finishing the fine adjustment of the birefringent shear plate SP;
and 5: birefringent compensation plate CP Assembly
Placing the birefringent compensation plate CP on the birefringent shear plate SP and the analyzer P2To (c) to (d); adjusting the birefringent compensation plate CP, performing phase unpacking analysis on interference images acquired by the detector (7) to obtain total optical path difference distribution curves of the upper and lower fields of view of each line, analyzing the total optical path difference distribution conditions of the upper and lower fields of view, if the total optical path difference distribution of the upper and lower fields of view is asymmetric, iteratively adjusting the birefringent compensation plate CP until the total optical path difference distribution of the upper and lower fields of view is symmetric, completing the adjustment of the birefringent compensation plate CP, and completing the adjustment of the birefringent interferometer.
2. A method for adjusting a birefringent interferometer based on an optical path difference indicator, according to claim 1, wherein: the standard polarizer (4) is a linear polaroid or a Glan Taylor prism with a calibrated polarization direction.
3. A method for adjusting a birefringent interferometer based on an optical path difference indicator, according to claim 2, wherein: step 1 adjusting the Pre-polarizer P1The specific adjusting method for enabling the transmission direction to be perpendicular to the z axis and the included angle of the transmission direction and the x axis to be 45 degrees comprises the following steps: front polarizer P capable of rotating 360 degrees by taking z axis as rotating center1Recording the maximum value and the minimum value of the light intensity signal of the detector (7) according to the light intensity value and the front polarizer P1And adjusting the corresponding relation of the transmission vibration direction.
4. A method for adjusting a birefringent interferometer based on an optical path difference indicator according to claim 3, wherein: step 2 adjusting the analyzer P2To make it have the transmission direction and the front polarizer P1Is orthogonal to the direction of vibrationThe specific adjusting method comprises the following steps: rotating analyzer P with z-axis as rotation center2。
5. A method for adjusting a birefringent interferometer based on an optical path difference indicator, according to claim 4, wherein: step 3, the specific adjusting method for adjusting the birefringent shearing plate SP until the interference fringes of the upper and lower fields of view collected by the detector (7) are symmetrically distributed comprises the following steps: and rotating the birefringent shearing plate SP by taking the z axis as a rotation center, analyzing the interference fringes collected by the detector (7), observing the distribution condition of the interference fringes of the upper and lower fields of view, and if the interference fringes of the upper and lower fields of view are asymmetrically distributed, iteratively adjusting the birefringent shearing plate SP until the interference fringes of the upper and lower fields of view, which are collected by the detector (7), are symmetrically distributed.
6. A method for adjusting a birefringent interferometer based on an optical path difference indicator, according to claim 5, wherein: the method for adjusting the birefringence compensation plate CP in step 5 is to rotate the birefringence compensation plate CP with the z-axis as the rotation center.
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