CN110976222A

CN110976222A - Target coating device

Info

Publication number: CN110976222A
Application number: CN201911321660.9A
Authority: CN
Inventors: 郭庆生; 余芳; 朱刘; 童培云; 何坤鹏
Original assignee: Umicore NV SA
Current assignee: Umicore NV SA
Priority date: 2019-12-18
Filing date: 2019-12-18
Publication date: 2020-04-10

Abstract

The invention relates to the technical field of target component manufacturing, and discloses a target coating device which comprises a rack, a controller, a heating box body, a rolling device, a coating piece and a pushing device, wherein the controller is respectively and electrically connected with the heating box body, the coating piece, the pushing device and the rolling device, the heating box body and the pushing device are both installed on the upper surface of the rack, the rolling device is installed in the heating box body and used for driving a target to rotate in the heating box body, and the output end of the pushing device is connected with the coating piece and used for driving the coating piece to move back and forth along the direction of the rotation axis of the target. The target coating device provided by the invention can automatically coat a layer of binding material on the inner wall of the target, is automatic in the whole process, and does not need manual participation.

Description

Target coating device

Technical Field

The invention relates to the technical field of target assembly manufacturing, in particular to a target coating device.

Background

The target material is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering system, multi-arc ion plating system or other types of film coating systems under proper process conditions. The rotary target is one of the targets and is a magnetic control target. The shape of the rotating target is cylindrical. When the target material is bound, the target material is sleeved on the liner tube, and a filling cavity is formed between the target material and the liner tube. And injecting liquid binding material into the filling cavity, wherein the binding material can be metal indium in a molten state. Heating the target material to connect the target material and the metal indium together. In order to enable the binding material to be better fused on the inner wall of the target, the target needs to be pretreated before the target is bound, namely, a layer of metal indium is coated on the inner wall of the target, so that the indium forms a layer of film on the inner wall of the target. At present, the coating process is finished manually, and the labor intensity of workers is high.

Disclosure of Invention

The purpose of the invention is: the target material coating device can automatically coat a layer of binding material on the inner wall of a target material, is automatic in the whole process, and does not need manual participation.

In order to achieve the aim, the invention provides a target material coating device which comprises a machine frame, a controller, a heating box body, a rolling device, a coating piece and a pushing device,

the controller is respectively and electrically connected with the heating box body, the coating piece, the pushing device and the rolling device,

the heating box body and the pushing device are both installed on the upper surface of the rack, the rolling device is installed in the heating box body and used for driving the target to rotate in the heating box body, and the output end of the pushing device is connected with the coating piece so as to drive the coating piece to move back and forth along the direction of the rotation axis of the target.

Preferably, the rolling device includes at least one rolling driver and two rolling shafts distributed in the heating box body side by side, the rolling driver is electrically connected to the controller, the rolling driver is located outside one end of the heating box body and is installed on the rack, and an output end of the rolling driver is connected to the rolling shafts.

Preferably, the rolling drivers are first motors, the number of the first motors is two, and each first motor corresponds to each rolling shaft one by one.

As a preferred scheme, a first support and a second support are respectively arranged at two ends of the heating box body, the first support and the second support are fixedly connected to the upper surface of the rack, one end of the rolling shaft penetrates through the first support to be connected with the rolling driver, and the other end of the rolling shaft is rotatably connected to the second support.

Preferably, the pushing device comprises a second motor, the second motor is electrically connected with the controller, the second motor is mounted on the frame, and an output end of the second motor is connected with one end, far away from the heating box, of the coating member.

Preferably, the second motor is connected with the coating member through a ball screw, the ball screw is mounted on the frame, a screw of the ball screw is connected with an output end of the second motor, and a nut of the ball screw is connected with the coating member.

Preferably, the second motor and the ball screw are both mounted on the rack through a connecting box, the connecting box is mounted on the upper surface of the rack, the second motor is mounted at one end of the connecting box, the ball screw is mounted in the connecting box, one end of a screw rod of the ball screw penetrates through the connecting box to be connected with the second motor, and the other end of the screw rod of the ball screw is rotatably connected with the inner wall of the connecting box.

Preferably, the nut of the ball screw is connected with one end of the coating piece through a connecting plate, one side of the connecting plate is fixedly connected with the nut of the ball screw, the other side of the connecting plate is fixedly connected with the coating piece, and the connecting plate is connected with one side of a connecting box in a sliding mode.

Preferably, the coating piece comprises a coating head and a coating rod fixedly connected with the coating head, and a nut of the ball screw is connected with one end, far away from the coating head, of the coating rod.

Preferably, the controller is mounted in the housing.

Compared with the prior art, the target coating device has the beneficial effects that: the target coating device comprises a heating box body, a rolling device, a coating piece, a pushing device and the like, wherein the rolling device can drive the target to roll in the heating box body, and the pushing device can drive the coating piece to stretch into the inner wall of the target to coat and bind materials. The target material coating device can automatically complete coating, the whole working process does not need manual intervention, the labor intensity of workers can be reduced, and the coating quality is good.

Drawings

Fig. 1 is a perspective view of a target coating apparatus according to an embodiment of the present invention.

In the figure, 1, a target; 2. a frame; 3. a controller; 4. heating the box body; 41. a first case; 42. a second case; 5. a rolling device; 51. a scroll driver; 52. a roller; 6. coating a piece; 61. coating heads; 62. coating a rod; 7. a second motor; 8. a connection box; 9. a notch; 10. a void; 11. a connecting plate; 12. a slide rail; 13. a handle; 14. a first bracket; 15. a second support.

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

In the description of the present invention, it should be understood that the terms used in the present invention are used in the description of the present invention, and it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "horizontal", "bottom", "inner", "outer", etc. used in the present invention are based on the directions or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

It should be understood that the terms "first", "second", etc. are used herein to describe various information, but the information should not be limited to these terms, which are only used to distinguish one type of information from another. For example, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information, without departing from the scope of the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1, a target material coating apparatus according to a preferred embodiment of the present invention includes a frame 2, a controller 3, a heating box 4, a rolling device 5, a coating member 6, and a pushing device, where the controller 3 is electrically connected to the heating box 4, the coating member 6, the pushing device, and the rolling device 5, the heating box 4 and the pushing device are both installed on an upper surface of the frame 2, the rolling device 5 is installed in the heating box 4 and is used to drive the target material 1 to rotate in the heating box 4, and an output end of the pushing device is connected to the coating member 6 to drive the coating member 6 to move back and forth along a direction of a rotation axis of the target material 1.

Based on above-mentioned technical scheme, frame 2 is ordinary workstation, and heating box 4 and pusher are arranged along the length direction of frame 2. The controller 3 can be a control panel or a PLC control cabinet. The heating box 4 comprises a first box 41 and a second box 42, wherein the bottom side of the first box 41 is fixedly connected to the upper surface of the frame 2, the first box 41 is hinged with the second box 42, and the second box 42 can be turned over up and down. The handle 13 is arranged on the outer side of the second box body 42, so that the worker can turn over the second box body 42 conveniently. Before coating, the worker may turn the second casing 42 over the first casing 41 and put the target 1 into the heating casing 4. At the time of coating, the second casing 42 is turned downward such that the second casing 42 covers the frame 2 and forms a heating space with the first casing 41. One end of the second box 42 close to the coating piece 6 is provided with a notch 9 for the coating piece 6 to pass through, so that the coating piece 6 can extend into the heating box 4 to coat the inner wall of the target 1. The rolling device 5 is arranged in the heating box body 4 and used for bearing the target 1 and driving the target 1 in heating to rotate at a constant speed, so that the binding materials can be uniformly distributed on the inner wall of the target 1. The pushing device is used for driving the coating piece 6 to move back and forth along the length direction of the frame 2, so that the coating piece 6 moves on the inner wall of the target 1.

Before coating, the second box 42 is turned upwards, and the target 1 is placed on the rolling device 5, wherein the length direction of the target 1 is the same as that of the rack 2. And closing the second box 42, opening the heating box 4 and the rolling device 5, heating and rotating the target 1, controlling the pushing device by the controller 3 to stretch the coating piece 6 into the heating box 4 through the notch 9, and coating a layer of indium on the inner wall surface of the target 1. The coating member 6 can coat the inner wall of the target 1 at 360 ° while the target 1 rotates. After one circle of coating, the controller 3 controls the pushing device to drive the coating piece 6 to move, and coating is continued at another position of the target 1. This 1 coating unit of target can be automatically at 1 inner wall coating binding material of target, the staff only need through controller 3 control coating process can, no longer need adopt artifical coated mode, reduced staff's intensity of labour, degree of automation is high.

The rolling device 5 includes at least one rolling driver 51 and two rolling shafts 52 distributed in the heating box 4 side by side, the rolling driver 51 is electrically connected with the controller 3, the rolling driver 51 is located outside one end of the heating box 4 and is installed on the rack 2, and an output end of the rolling driver 51 is connected with the rolling shafts 52. The length direction of the rollers 52 is the length direction of the frame 2, the two rollers 52 are arranged side by side, a gap 10 is left between the two rollers, and the width of the gap 10 is smaller than the diameter of the target 1. The operator can place the target 1 in the gap 10 so that the target 1 abuts against the two rollers 52 at the same time. The controller 3 controls the rolling driver 51 to drive the rotating shaft to rotate, so as to drive the target 1 to rotate in the heating box 4. The rolling driver 51 is a first motor, the number of the first motors is two, and the two first motors are both arranged at one end of the heating box body 4 far away from the pushing device. The two first motors are distributed side by side, each first motor corresponds to each roller 52 one by one, and the output end of one first motor is connected with one roller 52. The two first motors are simultaneously controlled by the controller 3, and simultaneously drive the rollers 52 to rotate, so as to drive the target 1 to rotate. The two ends of the heating box body 4 are respectively provided with a first support 14 and a second support 15, the first support 14 and the second support 15 are both fixedly connected to the upper surface of the frame 2, one end of the roller 52 penetrates through the first support 14 to be connected with the rolling driver 51, and the other end of the roller 52 is rotatably connected to the second support 15. The first bracket 14 is provided with two through holes for the two rollers 52 to pass through, and the rollers 52 pass through the through holes to be connected with the first motor. The rollers 52 are rotatably connected to the first bracket 14 and the second bracket 15. The first bracket 14 and the second bracket 15 are used to fix the position of the roller 52, and the roller 52 is mounted on the upper surface of the frame 2 through the first bracket 14 and the second bracket 15.

Specifically, the pushing device comprises a second motor 7, the second motor 7 is electrically connected with the controller 3, the second motor 7 is installed on the frame 2, and the output end of the second motor 7 is connected with one end, far away from the heating box body 4, of the coating piece 6. The controller 3 controls the second motor 7 to drive the coating piece 6 to move back and forth along the length direction of the frame 2 so as to stretch into or out of the heating box body 4, and the coating piece 6 can be flexibly driven to move back and forth. The second motor 7 is connected with the coating piece 6 through a ball screw, the ball screw is installed on the rack 2, a screw of the ball screw is connected with the output end of the second motor 7, and a nut of the ball screw is connected with the coating piece 6. The ball screw has high transmission precision, can feed at high speed, has small friction loss, and the second motor 7 can drive the ball screw to convert rotary motion into linear motion of the coating piece 6 without large power. Second motor 7 and ball all install in frame 2 through connecting box 8, and connecting box 8 installs the upper surface at frame 2, and second motor 7 installs the one end at connecting box 8, and ball installs in connecting box 8, and ball's the one end of screw rod is passed connecting box 8 and is connected with second motor 7, and ball's the other end of screw rod is rotationally connected with connecting box 8's inner wall. The bottom side of the connecting box 8 is fixedly connected with the upper surface of the frame 2, and the second motor 7 is horizontally arranged at one end of the connecting box 8 far away from the heating box body 4. Ball installs in connecting box 8, avoids in transmission process, and ball receives external factors to disturb, influences the coating of scribbling piece 6. The nut spiro union of ball is on the screw rod, and is connected with the one end of scribbling the piece 6 through connecting plate 11, and the nut fixed connection of ball 11 is connected to one side of connecting plate 11, and the opposite side of connecting plate 11 and scribble piece 6 fixed connection, and connecting plate 11 sliding connection is in one side of connecting box 8. One side of the connecting box 8 is provided with a slide rail 12, and the connecting plate 11 can slide on the slide rail 12. The second motor 7 drives the screw of the ball screw to rotate in the connecting box 8, so that the nut moves on the screw, the connecting plate 11 is driven to slide on the sliding rail 12, and the coating piece 6 can slide back and forth.

Preferably, the coating member 6 comprises a coating head 61 and a coating rod 62 fixedly connected with the coating head 61, and a nut of a ball screw is connected with one end of the coating rod 62 far away from the coating head 61. One end of the coating rod 62 is fixedly connected with the coating head 61, and the other end of the coating rod 62 is fixedly connected with the nut. The coating bar 62 is disposed along the length of the frame 2. When the controller 3 controls the second motor 7 to drive the ball screw to rotate, the coating rod 62 moves back and forth along with the nut, so that the coating head 61 can extend into or out of the heating box 4, and the depth of the coating head 61 extending into the target 1 is changed.

In addition, the controller 3 is installed in the housing 2. The controller 3 is located below the pushing device, and a worker can control the whole working process of the coating device of the target 1 through the controller 3 by bending down, so that the coating process can be adjusted in time according to the actual working condition.

The working process of the target coating device comprises the following steps: the second casing 42 is turned up, the target 1 is placed in the gap 10 between the two rollers 52, and the heating casing 4 is closed. The heating box 4 is opened, and the controller 3 controls the two first motors to drive the rollers 52 to rotate, so as to drive the target 1 to rotate while being heated in the heating box 4. The controller 3 controls the second motor 7 to drive the screw of the ball screw to rotate in the connecting box 8, the nut moves on the screw, and the connecting plate 11 and the coating rod 62 are driven to move along the length direction of the rack 2, so that the coating head 61 enters the target 1 through the gap 9 of the heating box 4, and the coating head 61 coats one end of the inner wall of the target 1 close to the pushing device. The target 1 rolls with the roller 52 for one circle, and the coating head 61 coats the inner wall of the target 1 for one circle. Subsequently, the second motor 7 drives the ball screw to rotate, so that the coating head 61 moves away from the pushing device to coat the inner wall of the target material 1. After the target material 1 rotates for one circle, the coating head 61 goes deep into the target material 1 in the direction away from the pushing device until the coating head 61 moves to the end of the target material 1 away from the pushing device, and after the coating is finished, the second motor 7 drives the ball screw to rotate reversely, and the coating head 61 leaves the heating box body 4 from the notch 9. The ring-by-ring coating mode ensures that the inner wall of the target material 1 is uniformly coated with the binding material, so that the coating quality is ensured. The heating box 4 stops heating, and the staff can open the heating box 4 and take out the coated target 1.

In summary, the present invention provides a target material coating apparatus, which includes a heating box, a rolling device, a coating member, and a pushing device, wherein the rolling device can drive the target material to roll in the heating box, and the pushing device can drive the coating member to extend into the inner wall of the target material to coat the binding material.

The target material coating device can automatically complete coating, the whole working process does not need manual intervention, the labor intensity of workers can be reduced, and the coating quality is good.

The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A target material coating device is characterized by comprising a frame, a controller, a heating box body, a rolling device, a coating piece and a pushing device,

2. The target coating apparatus of claim 1, wherein the rolling device comprises at least one rolling driver and two rollers disposed in the heating chamber side by side, the rolling driver is electrically connected to the controller, the rolling driver is located outside one end of the heating chamber and mounted on the frame, and an output end of the rolling driver is connected to the rollers.

3. The target coating apparatus of claim 2, wherein the rolling driver is a first motor, the number of the first motors is two, and each of the first motors corresponds to each of the rollers.

4. The target coating apparatus of claim 2, wherein a first bracket and a second bracket are respectively disposed at two ends of the heating box, the first bracket and the second bracket are both fixedly connected to the upper surface of the frame, one end of the roller passes through the first bracket and is connected to the roller driver, and the other end of the roller is rotatably connected to the second bracket.

5. The target coating apparatus of claim 1, wherein the pushing device comprises a second motor electrically connected to the controller, the second motor is mounted on the frame, and an output end of the second motor is connected to an end of the coating member away from the heating box.

6. The target coating apparatus of claim 5, wherein the second motor is connected to the coating member via a ball screw, the ball screw is mounted on the frame, a screw of the ball screw is connected to an output end of the second motor, and a nut of the ball screw is connected to the coating member.

7. The target coating apparatus according to claim 6, wherein the second motor and the ball screw are both mounted on the frame via a connection box, the connection box is mounted on the upper surface of the frame, the second motor is mounted at one end of the connection box, the ball screw is mounted in the connection box, one end of a screw rod of the ball screw passes through the connection box and is connected to the second motor, and the other end of the screw rod of the ball screw is rotatably connected to an inner wall of the connection box.

8. A target material coating device according to claim 7, wherein the nut of the ball screw is connected to one end of the coating member through a connecting plate, one side of the connecting plate is fixedly connected to the nut of the ball screw, the other side of the connecting plate is fixedly connected to the coating member, and the connecting plate is slidably connected to one side of a connecting box.

9. The target coating apparatus of claim 6, wherein the coating member comprises a coating head and a coating rod fixedly connected to the coating head, and a nut of the ball screw is connected to an end of the coating rod away from the coating head.

10. The target coating apparatus of any of claims 1-9, wherein the controller is mounted in the frame.