CN110970540A - Display panel, preparation method thereof and display device - Google Patents

Display panel, preparation method thereof and display device Download PDF

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CN110970540A
CN110970540A CN201911308257.2A CN201911308257A CN110970540A CN 110970540 A CN110970540 A CN 110970540A CN 201911308257 A CN201911308257 A CN 201911308257A CN 110970540 A CN110970540 A CN 110970540A
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photonic crystal
white light
display panel
array
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CN110970540B (en
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卢梦梦
王琳
张奇峰
杨宏建
王晓波
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BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
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BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
    • H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G02B1/005—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials made of photonic crystals or photonic band gap materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008—Processes
    • H01L2933/0033—Processes relating to semiconductor body packages

Abstract

The invention relates to the technical field of display, and discloses a display panel, a preparation method thereof and a display device. Wherein, the display panel includes: driving the back plate; the white light micro LED array is positioned on the driving back plate and comprises white light micro LEDs which are arranged in one-to-one correspondence with the sub-pixels; the photonic crystal array is positioned on one side of the white light micro LED array, which is far away from the driving back plate, and comprises photonic crystals which are arranged in one-to-one correspondence with the sub-pixels; the photonic crystal array comprises various photonic crystals corresponding to the color sub-pixels respectively, each photonic crystal comprises a nano microsphere and is configured to diffract light, and the diffraction wavelength peak value is the same as the light-emitting wavelength of the corresponding sub-pixel. The display panel provided by the embodiment of the invention can realize full-color display by only adopting one white light Micro-LED, does not need Micro-LEDs with various colors, does not need a large-scale transfer process for many times, and has the advantages of low manufacturing process difficulty and high yield.

Description

Display panel, preparation method thereof and display device
Technical Field
The invention relates to the technical field of display, in particular to a display panel, a preparation method of the display panel and a display device.
Background
The Micro light emitting diode (Micro-LED) is a display technology which is used for carrying out microminiaturization and matrixing on a traditional LED structure, manufacturing a driving backboard by adopting an integrated circuit process, and transferring the Micro-LED to the driving backboard through a mass transfer technology to realize the addressing control and the independent driving of each pixel point. Since various indexes such as brightness, service life, contrast, reaction time, energy consumption, visual angle, resolution and the like of Micro-LED technology are better than those of LCD and OLED technology, and in addition, Micro-LED technology has the advantages of self-luminescence, simple structure, small volume and energy saving, and is considered as the next generation display technology, various display technology leaders and enterprises have started to be actively deployed.
The existing bulk transfer technology comprises Van der Waals force transfer technology, laser or optical transfer technology, electrostatic/electromagnetic force adsorption transfer technology, fluid assembly and the like, and various transfer technology principles are different, but the existing bulk transfer technology has various defects that the manufacturing process is complex, the yield cannot meet the requirements and the like. In the existing full-color Micro-LED display technology, red, blue and high-color Micro-LEDs need to be respectively transferred to the driving back plate, so that the manufacturing process is difficult and the yield is low.
Disclosure of Invention
The invention discloses a display panel, a preparation method thereof and a display device, and aims to provide a full-color Micro-LED display panel which is low in manufacturing process difficulty and high in yield.
In order to achieve the purpose, the invention provides the following technical scheme:
a display panel, comprising:
driving the back plate;
the white light micro LED array is positioned on the driving back plate and comprises white light micro LEDs which are arranged in one-to-one correspondence with the sub-pixels;
the photonic crystal array is positioned on one side of the white light micro LED array, which is far away from the driving back plate, and comprises photonic crystals which are arranged in one-to-one correspondence with the sub-pixels; the photonic crystal array comprises various photonic crystals corresponding to the color sub-pixels respectively, each photonic crystal comprises a nano microsphere and is configured to diffract light, and the diffraction wavelength peak is the same as the light-emitting wavelength of the corresponding sub-pixel.
The display panel provided by the embodiment of the invention is a Micro LED display panel, and comprises a white light Micro LED array and a photonic crystal array which are sequentially arranged on a driving back plate, wherein the white light Micro LED array consists of white light Micro LEDs (Micro-LEDs) distributed in an array, the photonic crystal array consists of photonic crystals distributed in an array, concretely, the photonic crystal array comprises various photonic crystals which are in one-to-one correspondence with various sub-pixels of the display panel, nano microspheres in each photonic crystal can diffract light, and the peak value of the diffraction wavelength is the same as the light-emitting wavelength of the corresponding sub-pixel, namely, each photonic crystal can take out the light wave with the same light-emitting wavelength as the corresponding sub-pixel from the light emitted by the white light Micro-LEDs, so that the sub-pixels of various colors emit light with different colors, and full-color display is realized. In summary, the Micro-LED display panel provided in the embodiment of the invention can realize full-color display only by using one white light Micro-LED, does not need Micro-LEDs with multiple colors, does not need multiple mass transfer processes, and has low manufacturing process difficulty and high yield.
Optionally, the photonic crystal array includes a first photonic crystal, a second photonic crystal, and a third photonic crystal corresponding to the red subpixel, the green subpixel, and the blue subpixel, respectively;
the particle sizes of the nano-microspheres in the first photonic crystal, the second photonic crystal and the third photonic crystal are 190nm-210nm, 160nm-180nm and 130nm-150nm respectively.
Optionally, the refractive index of the material of the nanoparticle is greater than 2.
Optionally, the material of the nano-microsphere includes one or more of cadmium sulfide, cuprous oxide, titanium oxide, zinc oxide, and zinc sulfide.
Optionally, the display panel further includes:
and the protective layer is positioned between the white light micro LED array and the photonic crystal array, is provided with grooves distributed in an array, and the photonic crystal is arranged in the grooves.
Optionally, the protective layer is an optical resin material.
Optionally, the display panel further includes:
and the reflecting layer is arranged on the side wall of the groove.
Optionally, the light reflecting layer is made of a metal material.
Optionally, the display panel further includes:
the light absorption layer is positioned on one side, deviating from the driving back plate, of the protection layer and comprises openings in one-to-one correspondence with the grooves, and the projections of the grooves on the driving back plate are positioned in the projections of the openings on the driving back plate.
A preparation method of a display panel comprises the following steps:
a white light micro LED array is arranged on the driving back plate and comprises white light micro LEDs which are arranged in one-to-one correspondence with the sub-pixels;
preparing a photonic crystal array on the white light micro LED array, wherein the photonic crystal array comprises photonic crystals which are arranged in one-to-one correspondence with the sub-pixels; the photonic crystal array comprises various photonic crystals corresponding to the color sub-pixels respectively, each photonic crystal comprises a nano microsphere and is configured to diffract light, and the diffraction wavelength peak is the same as the light-emitting wavelength of the corresponding sub-pixel.
Optionally, before the photonic crystal array is prepared on the white light micro LED array, the method further includes:
and preparing a protective layer on the white light micro LED array, wherein the protective layer is provided with grooves distributed in an array.
Optionally, before the photonic crystal array is prepared on the white light micro LED array, the method further includes:
and preparing a reflective layer on the side wall of the groove of the protective layer.
Optionally, the preparing a photonic crystal array on the white light micro LED array specifically includes:
preparing nano microspheres by a hydrothermal method, a sol-gel method or an emulsion polymerization method;
dispersing the nano microspheres in a mixture solvent, and performing ultrasonic dispersion treatment to obtain monodisperse colloid nano microspheres;
and printing the monodisperse colloid nano microspheres into the grooves of the protective layer by adopting an ink-jet printing mode to form photonic crystals.
Optionally, after the protective layer is prepared on the white light micro LED array, the method further includes:
preparing a light absorption layer on the protective layer, wherein the light absorption layer comprises openings corresponding to the grooves one to one, and the projection of the grooves on the driving back plate is positioned in the projection of the openings on the driving back plate.
A display device comprising the display panel of any one of the above.
Drawings
Fig. 1 is a schematic cross-sectional structure diagram of a display panel according to an embodiment of the present invention;
fig. 2 is a schematic cross-sectional view of a display panel according to another embodiment of the present invention;
fig. 3 is a schematic front structure diagram of a display panel according to an embodiment of the present invention;
fig. 4 is a schematic front structure diagram of a display panel according to another embodiment of the present invention;
fig. 5 is a flowchart of a method for manufacturing a display panel according to an embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 2, a display panel includes:
a driving back plate 1;
the white light micro LED array 2 is positioned on the driving backboard 1 and comprises white light micro LEDs 20 which are arranged corresponding to the sub-pixels one by one;
the photonic crystal array 3 is positioned on one side of the white light micro LED array 2, which is far away from the driving backboard 1, and comprises photonic crystals 30 which are arranged in one-to-one correspondence with the sub-pixels; specifically, the photonic crystal array 3 includes various photonic crystals (such as a first photonic crystal 31, a second photonic crystal 32, and a third photonic crystal 33 in the figure) corresponding to the sub-pixels, and each photonic crystal 30 includes a type of nano-microsphere 300 configured to diffract light, and the peak of the diffraction wavelength is the same as the light-emitting wavelength of the corresponding sub-pixel.
The display panel of the embodiment of the invention is a Micro LED display panel, the display panel comprises a white light Micro LED array 2 and a photonic crystal array 3 which are sequentially arranged on a driving backboard 1, the white light Micro LED array 2 consists of white light Micro LEDs (Micro-LEDs) 20 distributed in an array, the photonic crystal array 3 consists of photonic crystals 30 distributed in an array, concretely, the photonic crystal array 3 comprises various photonic crystals 30 which are in one-to-one correspondence with various sub-pixels of the display panel, nano microspheres in each photonic crystal 30 can diffract light, and the peak value of the diffraction wavelength is the same as the light-emitting wavelength of the corresponding sub-pixel, that is, each photonic crystal 30 can extract a light wave with the same wavelength as the light output wavelength of the corresponding sub-pixel from the light output from the white light Micro-LED20, so that the sub-pixels of each color output light with different colors, thereby realizing full-color display. In summary, the Micro-LED display panel provided in the embodiment of the invention can realize full-color display only by using one white light Micro-LED, does not need Micro-LEDs with multiple colors, does not need multiple mass transfer processes, and has low manufacturing process difficulty and high yield.
Specifically, the white light micro LEDs 20 and the photonic crystals 30 are respectively arranged in a one-to-one correspondence with the sub-pixels, that is, the photonic crystals 30 are arranged in a one-to-one correspondence with the micro LEDs 20, each sub-pixel includes a pair of the photonic crystals 30 and the micro LEDs 20, the photonic crystals 30 and the micro LEDs 20 in each pair are arranged in a stacked manner to form a sub-pixel structure, and the photonic crystals 30 of each sub-pixel extract a light color, that is, a light color corresponding to the sub-pixel.
Specifically, in the display panel provided by the embodiment of the present invention, the light-emitting colors of the sub-pixels can be mixed into white light.
In a specific embodiment, as shown in fig. 2, the photonic crystal array may include three types of photonic crystals 30, specifically, a first photonic crystal 31, a second photonic crystal 32, and a third photonic crystal 33 corresponding to the red sub-pixel, the green sub-pixel, and the blue sub-pixel, respectively; specifically, the particle diameters of the nano-microspheres 300 in the first photonic crystal 31, the second photonic crystal 32 and the third photonic crystal 33 are 190nm to 210nm, 160nm to 180nm and 130nm to 150nm respectively.
Specifically, the refractive index of the nano microsphere material is greater than 2.
Illustratively, the material of the nanospheres may include one or more of cadmium sulfide, cuprous oxide, titanium oxide, zinc oxide, and zinc sulfide.
Specifically, the photonic crystal can be prepared by adopting an ink-jet printing mode, specifically, the nano-microspheres can be dispersed in a mixture solvent to obtain monodisperse colloid nano-microspheres, and then the monodisperse colloid nano-microspheres are printed on the driving back plate according to a preset pattern.
Specifically, the light extraction principle of the photonic crystal can be explained by a Bragg diffraction theory, and the diffraction wavelength peak of the photonic crystal can be calculated according to the following basic formula of Bragg diffraction:
Figure BDA0002323764380000061
n2 eff＝n2 spherefsphere+n2 airfair
Figure BDA0002323764380000062
wherein λ isBraggIs the peak value of the diffraction wavelength, neffIs an effective refractive index, nsphereIs the refractive index of the nano microsphere material, nairIs refractive index of air, fsphereAnd fairThe volume ratio of the nano microspheres in the photonic crystal and the volume ratio of air are respectively, the sum of the two is equal to 1, theta is the incident angle of light, and D is the diameter of the microspheres. If the effective refractive index of the photonic crystal is large enough, the influence of the incident angle of the light on the diffraction wavelength peak value of the photonic crystal can be approximately ignored. Specifically, for example, cadmium sulfide (CdS) nanoparticles with a refractive index of 2.51 are used as a material for constructing the photonic crystal, the particle sizes of the nanoparticles in the first photonic crystal, the second photonic crystal and the third photonic crystal are respectively in three ranges of 190nm-210nm, 160nm-180nm and 130nm-150nm, so that the corresponding diffraction wavelength peaks are respectively 610nm-680nm (red light region), 520nm-580nm (green light region) and 420nm-485nm (blue light region), that is, the photonic crystals corresponding to the red, green and blue subpixels can respectively take out red light, green light and blue light to realize full-color display.
In a specific embodiment, as shown in fig. 2 to 4, the display panel provided in the embodiment of the present invention further includes a protective layer 4, where the protective layer 4 is located between the white light micro LED array and the photonic crystal array, and the array of grooves 41 are provided, and the photonic crystal 30 is disposed in the grooves 41.
Specifically, the protective layer 4 may be an optical resin material, and may be Polyimide (PI), for example. Of course, the protective layer 4 may be other materials that can function to protect the Micro-LED20 while having a high transmittance.
Specifically, the grooves 41 may be formed in the protective layer 4 through a patterning process, each groove 41 is used to accommodate one photonic crystal 30, thereby defining a sub-pixel region, and the Micro-LEDs 20 are disposed below the grooves 41 and within the sub-pixel region, corresponding to the grooves 41 one by one.
In particular, the pattern of the protective layer 4 may comprise a portion covering the Micro-LED20, i.e. the recess 41 has a bottom wall; of course, the pattern of the protective layer 4 may also be a through-slot without covering the Micro-LED20, i.e. the recess 41 has no bottom wall.
In addition, the protective layer 4 may be a pattern of an array distribution configured to cover the array distribution of the Micro-LEDs 20, each array pattern may have a groove 41, and the portion between the adjacent Micro-LEDs 20 may have no pattern of the protective layer 4, so that the thickness of the display panel may be minimized.
In a specific embodiment, as shown in fig. 2 and 4, the display panel provided in the embodiment of the present invention may further include a light reflecting layer 5 disposed on the sidewall of the groove 41.
Specifically, the light reflecting layer 5 can reflect the light emitted by the Micro-LED20 and irradiated on the side wall of the groove 41 to the photonic crystal 30 in the groove 41, so that the light emitting efficiency of the Micro-LED display panel can be improved.
The light reflecting layer 5 may be made of a metal material, and an aluminum or silver material may be used. Specifically, the light reflecting layer 5 may be formed by a physical vapor deposition process.
In a specific embodiment, as shown in fig. 4, the display panel provided in the embodiment of the present invention may further include a light absorbing layer 6, where the light absorbing layer 6 is located on a side of the protective layer 4 away from the driving back plate 1, and includes openings corresponding to the recesses 41 one to one, and a projection of the recess 41 on the driving back plate 1 is located within a projection of the opening on the driving back plate 1. I.e. the light absorbing layer 6 has openings corresponding to the positions of the sub-pixel areas to allow light to exit the sub-pixel areas.
In particular, the projection of the opening of the light-absorbing layer 6 and the projection of the recess of the protective layer 4 may coincide completely.
Specifically, the light absorbing layer 6 can eliminate crosstalk between sub-pixels and improve the contrast of the display panel, and the light absorbing layer 6 can be made of a black matrix material and is prepared by an ink jet printing process.
An embodiment of the present invention further provides a display device, which includes the display panel in any of the above embodiments.
Based on the display panel provided by the embodiment of the present invention, the embodiment of the present invention further provides a method for manufacturing a display panel, as shown in fig. 5, the method includes the following steps:
step 101, arranging a white light micro LED array on a driving back plate, wherein the white light micro LED array comprises white light micro LEDs which are arranged in one-to-one correspondence with sub-pixels;
102, preparing a photonic crystal array on the white light micro LED array, wherein the photonic crystal array comprises photonic crystals which are arranged in one-to-one correspondence with the sub-pixels; specifically, the photonic crystal array comprises various photonic crystals corresponding to the color sub-pixels respectively, each photonic crystal comprises a nano-microsphere and is configured to diffract light, and the diffraction wavelength peak is the same as the light-emitting wavelength of the corresponding sub-pixel.
In a specific embodiment, before step 102, i.e. before the photonic crystal array is prepared on the white light micro LED array, the method further includes:
and forming a protective layer on the white light micro LED array, wherein the protective layer is provided with grooves arranged in an array.
Specifically, the protective layer may be an optical resin material, and may be Polyimide (PI), for example. Of course, the protective layer may be other materials that can function to protect the Micro-LEDs while having a high transmittance.
Specifically, the groove may be formed in the protective layer through a patterning process, and the patterning process generally includes process steps of coating a photoresist, exposing and developing, etching, and the like. Each recess is for receiving a photonic crystal to define a sub-pixel region.
In particular, the pattern of the protective layer may comprise a portion covering the Micro-LED, i.e. the recess has a bottom wall; of course, the pattern of the protective layer may also be a through-slot without covering the Micro-LED, i.e. the recess has no bottom wall.
In addition, the protective layer may be an array distribution pattern configured to cover the array distribution of the Micro-LEDs, each array pattern may have a groove, and a portion between adjacent Micro-LEDs may have no protective layer pattern, so that the thickness of the display panel may be reduced as much as possible.
In a specific embodiment, before step 102, i.e. before the photonic crystal array is prepared on the white light micro LED array, the method may further include:
and preparing a reflective layer on the side wall of the groove of the protective layer.
The light reflecting layer may be made of metal, and aluminum or silver may be used.
Specifically, a physical vapor deposition process may be used to deposit a reflective layer on the sidewall of the recess of the protective layer.
In one specific embodiment, step 102, a photonic crystal array is fabricated on a white light micro LED array, which specifically includes:
preparing nano microspheres by a hydrothermal method, a sol-gel method or an emulsion polymerization method;
dispersing the nano microspheres in a mixture solvent, and performing ultrasonic dispersion treatment to obtain monodisperse colloid nano microspheres; specifically, the mixture solvent can comprise a high-boiling-point auxiliary agent, ethanol, glycerol, a surfactant, a defoaming agent, a gelling agent, a regulator and deionized water;
and printing the monodisperse colloid nano microspheres into the grooves of the protective layer by adopting an ink-jet printing mode to form the photonic crystals.
Specifically, taking the preparation of the photonic crystal in the red sub-pixel by using the inkjet printing process as an example, the step may specifically include the following steps:
taking 6g of polyvinylpyrrolidone powder (PVP), adding 150mL of diethylene glycol, adding equal amount of cadmium nitrate and thiourea powder, wherein the amount of the cadmium nitrate and the thiourea is 15mmol, and stirring until all the powder is completely dissolved. Heating the solution to 160 ℃, carrying out heat preservation reaction for 5 hours, then naturally cooling to room temperature, centrifuging the product, washing for 3 times by using ethanol and water, and then drying to form CdS microsphere powder.
Weighing a certain amount of monodisperse CdS microsphere powder, fully grinding, and then dispersing the CdS microsphere powder in a mixture solvent to form monodisperse colloid nano microspheres; specifically, the content of the added CdS microsphere powder is 12 wt%, the content of ethylene glycol is 5 wt%, the content of ethanol is 10 wt%, the content of glycerol is 5 wt%, the content of PVP is 2.7 wt%, the content of tributyl phosphate is 0.1 wt%, the content of polyvinyl alcohol is 1 wt%, the content of triethanolamine is 3 wt%, and the balance is deionized water. Performing ultrasonic dispersion treatment for 30min to prepare uniformly dispersed ink.
And (3) placing the prepared ink into an ink box, and printing the designed pattern by using an ink-jet printer to ensure that the CdS nano particles in the ink are uniformly deposited on the high-gloss photographic paper, thereby finally obtaining the photonic crystals in the red sub-pixels.
In a specific embodiment, after step 102, i.e. after preparing the protective layer on the white light micro LED array, the method may further include:
and preparing a light absorbing layer on the protective layer, wherein the light absorbing layer comprises openings corresponding to the grooves one to one, and the projection of the grooves on the substrate is positioned in the projection of the openings on the substrate.
In a specific embodiment, step 101, disposing a white light micro LED array on a driving backplane specifically includes:
a white light Micro-LED chip is manufactured on a clean GaN substrate by adopting methods such as Metal Organic Chemical Vapor Deposition (MOCVD) and the like, and then the white light Micro-LED chip is transferred onto a driving backboard through a mass transfer technology to form a white light Micro-LED array.
Specifically, a thin film transistor array, a signal line and the like are formed on the driving back plate and used for driving the white light Micro-LED array to emit light.
Specifically, the process steps for preparing the micro LED on the GaN substrate may include the following steps:
using a common two-step growth method of low temperature nucleation followed by high temperature growth, first, the C-plane sapphire substrate was heated to 1170 ℃ in a hydrogen atmosphere and held for 10 minutes to obtain a clean substrate surface. The substrate temperature was then lowered to 520 c and a 25nm thick nucleation layer was grown. The substrate temperature was then raised to 1040 c and a 3 μm thick buffer layer of doped SiGaN was grown. The temperature was then lowered to 845 c and a 220nm thick n-type InGaN layer was grown. Subsequently, 4 periods of active region InGaN (3nm)/GaN (17nm) multiple quantum wells were grown, with the growth temperatures of InGaN and GaN controlled at 814 ℃ and 714 ℃, respectively. Thereafter, a 10nm GaN spacer layer was grown. And finally growing a P-type doped GaN layer at 920 ℃.
Specifically, the preparation of the white light Micro-LED chip is a mature technology at present, and is not described herein again; in addition, the technology for transferring the chip bulk includes van der waals force transfer technology, laser or optical transfer technology, electrostatic/electromagnetic force adsorption transfer technology, fluid assembly and the like, and in the embodiment of the invention, because the single-color Micro-LED is simply transferred, the bulk transfer is easily realized, and a bulk transfer method can be specifically selected according to requirements, and is not limited herein.
It will be apparent to those skilled in the art that various changes and modifications may be made in the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (15)

1. A display panel, comprising:
driving the back plate;
the white light micro LED array is positioned on the driving back plate and comprises white light micro LEDs which are arranged in one-to-one correspondence with the sub-pixels;
the photonic crystal array is positioned on one side of the white light micro LED array, which is far away from the driving back plate, and comprises photonic crystals which are arranged in one-to-one correspondence with the sub-pixels; the photonic crystal array comprises various photonic crystals corresponding to the color sub-pixels respectively, each photonic crystal comprises a nano microsphere and is configured to diffract light, and the diffraction wavelength peak is the same as the light-emitting wavelength of the corresponding sub-pixel.
2. The display panel of claim 1, wherein the photonic crystal array comprises first, second, and third photonic crystals corresponding to red, green, and blue subpixels, respectively;
the particle sizes of the nano-microspheres in the first photonic crystal, the second photonic crystal and the third photonic crystal are 190nm-210nm, 160nm-180nm and 130nm-150nm respectively.
3. The display panel of claim 1, wherein the material refractive index of the nanovesicles is greater than 2.
4. The display panel of claim 3, wherein the material of the nano-microspheres comprises one or more of cadmium sulfide, cuprous oxide, titanium oxide, zinc oxide, and zinc sulfide.
5. The display panel according to any one of claims 1 to 4, further comprising:
and the protective layer is positioned between the white light micro LED array and the photonic crystal array, is provided with grooves distributed in an array, and the photonic crystal is arranged in the grooves.
6. The display panel according to claim 5, wherein the protective layer is an optical resin material.
7. The display panel of claim 5, further comprising:
and the reflecting layer is arranged on the side wall of the groove.
8. The display panel of claim 7, wherein the light reflecting layer is a metal material.
9. The display panel of claim 5, further comprising:
the light absorption layer is positioned on one side, deviating from the driving back plate, of the protection layer and comprises openings in one-to-one correspondence with the grooves, and the projections of the grooves on the driving back plate are positioned in the projections of the openings on the driving back plate.
10. A preparation method of a display panel is characterized by comprising the following steps:
a white light micro LED array is arranged on the driving back plate and comprises white light micro LEDs which are arranged in one-to-one correspondence with the sub-pixels;
preparing a photonic crystal array on the white light micro LED array, wherein the photonic crystal array comprises photonic crystals which are arranged in one-to-one correspondence with the sub-pixels; the photonic crystal array comprises various photonic crystals corresponding to the color sub-pixels respectively, each photonic crystal comprises a nano microsphere and is configured to diffract light, and the diffraction wavelength peak is the same as the light-emitting wavelength of the corresponding sub-pixel.
11. The method of manufacturing according to claim 10, wherein before manufacturing the photonic crystal array on the white light micro LED array, further comprising:
and preparing a protective layer on the white light micro LED array, wherein the protective layer is provided with grooves distributed in an array.
12. The method of manufacturing according to claim 11, wherein before manufacturing the photonic crystal array on the white light micro LED array, further comprising:
and preparing a reflective layer on the side wall of the groove of the protective layer.
13. The method according to claim 11, wherein the step of preparing the photonic crystal array on the white light micro LED array comprises:
preparing nano microspheres by a hydrothermal method, a sol-gel method or an emulsion polymerization method;
dispersing the nano microspheres in a mixture solvent, and performing ultrasonic dispersion treatment to obtain monodisperse colloid nano microspheres;
and printing the monodisperse colloid nano microspheres into the grooves of the protective layer by adopting an ink-jet printing mode to form photonic crystals.
14. The method of any one of claims 11-13, further comprising, after preparing the protective layer on the white light micro LED array:
preparing a light absorption layer on the protective layer, wherein the light absorption layer comprises openings corresponding to the grooves one to one, and the projection of the grooves on the driving back plate is positioned in the projection of the openings on the driving back plate.
15. A display device characterized by comprising the display panel according to any one of claims 1 to 9.
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