CN110954265A - Novel hot cathode ionization vacuum gauge electrical parameter calibration device - Google Patents
Novel hot cathode ionization vacuum gauge electrical parameter calibration device Download PDFInfo
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- CN110954265A CN110954265A CN201911052211.9A CN201911052211A CN110954265A CN 110954265 A CN110954265 A CN 110954265A CN 201911052211 A CN201911052211 A CN 201911052211A CN 110954265 A CN110954265 A CN 110954265A
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- hot cathode
- vacuum gauge
- cathode ionization
- ionization vacuum
- calibration device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
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Abstract
The invention relates to a novel hot cathode ionization vacuum gauge electrical parameter calibration device which can be divided into an output module, a measurement module, a control module, a power circuit and an interface conversion and protection circuit. The device is a hot cathode ionization vacuum gauge electrical parameter calibration device based on circuit simulation, and comprises a hot cathode ionization vacuum gauge filament simulation resistor, a simulation emission current source and a simulation ion current source. The electric parameter calibration device is only used for calibrating the electric parameters of the hot cathode ionization vacuum gauge, and when the transfer function between the input signal of the hot cathode ionization vacuum gauge and the emission current of the modulation output is monotonous and continuous, and the emission current is within the feedback adjustment range of the hot cathode ionization vacuum gauge, the hot cathode ionization vacuum gauge can adjust the emission current to a set point through feedback.
Description
Technical Field
The invention relates to the technical field of power electronics, in particular to a novel device for calibrating electrical parameters of a hot cathode ionization vacuum gauge.
Background
The ultrahigh vacuum measurement has extremely wide application in the fields of space environment simulation, surface analysis science, high-energy particle accelerators, semiconductors, nuclear fusion, aerospace and the like, and the calibration of a vacuum gauge is the basis of tracing of vacuum magnitude values, so that the correctness of the vacuum measurement result can be effectively guaranteed.
At present, the conventional electrical parameter calibration device of a domestic vacuum calibration laboratory must be externally connected with a hot cathode ionization vacuum gauge to maintain the hot cathode ionization vacuum gauge to be calibrated in a working state emitted by a hot cathode filament, and a high vacuum environment capable of working normally must be provided for the hot cathode ionization vacuum gauge or an unopened glass hot cathode ionization vacuum gauge must be adopted; under the condition of no matched hot cathode ionization vacuum gauge, the hot cathode ionization vacuum gauge cannot enter a normal working state, and the traditional calibration device cannot calibrate electrical parameters.
Disclosure of Invention
The invention aims to provide a novel hot cathode ionization vacuum gauge electrical parameter calibration device, which improves the traditional electrical parameter calibration device and ensures that a hot cathode ionization vacuum gauge to be calibrated is in a normal working state; the improved electrical parameter calibration device is small in size, convenient to carry, free of an external hot cathode ionization vacuum gauge and suitable for field calibration or calibration under the condition that no matched hot cathode ionization vacuum gauge is arranged.
In order to achieve the purpose, the invention adopts the following technical scheme.
The hot cathode ionization vacuum gauge comprises a cathode, a grid and a collector; the hot cathode ionization vacuum gauge comprises a cathode potential power supply, a grid power supply, an emission current stabilizer and an ion current amplifier.
The calibration of the electrical parameters of the hot cathode ionization vacuum gauge comprises the calibration of a grid voltage, a cathode voltage, an emission current and an ion current amplifier; the calibration device comprises a standard voltmeter, a standard ammeter, a standard current source and the like.
The circuit is used for simulating the electrical characteristics of the hot cathode ionization vacuum gauge, the power detection circuit is used for measuring the output power of the cathode power supply of the hot cathode ionization vacuum gauge, and the measurement result is used for controlling the rear-stage current source circuit.
When the ion current amplifier is calibrated, an external standard current source is generally used for providing adjustable standard current for the ion current amplifier, and the current source can also be integrated in the device for providing adjustable standard current for the hot cathode ionization vacuum gauge so as to simulate the ion current of the hot cathode ionization vacuum gauge when the hot cathode ionization vacuum gauge works under different vacuum degree environments.
The hot cathode ionization vacuum gauge electrical parameter calibration device based on circuit simulation comprises a hot cathode ionization vacuum gauge filament simulation resistor, a simulation emission current source and a simulation ion current source.
The electric parameter calibration device is only used for calibrating the electric parameters of the hot cathode ionization vacuum gauge, and when the transfer function between the input signal of the hot cathode ionization vacuum gauge and the emission current of the modulation output is monotonous and continuous, and the emission current is within the feedback adjustment range of the hot cathode ionization vacuum gauge, the hot cathode ionization vacuum gauge can adjust the emission current to a set point through feedback.
The simulated emission current can be stabilized at the emission current value set by the hot cathode ionization vacuum gauge to be calibrated by matching the hot cathode ionization vacuum scale analog circuit with the internal circuit of the hot cathode ionization vacuum gauge.
The standard voltmeter in the electrical parameter calibration device is realized by using a range switching circuit and a high-resolution ADC (analog to digital converter), and is used for measuring the grid voltage and the cathode voltage of the hot cathode ionization vacuum gauge to be calibrated, the measurement ranges are respectively 150-250V and 20-50V, the device is suitable for various hot cathode ionization vacuum gauges, and the maximum relative error is 0.10%; the standard ammeter in the electrical parameter calibration device is realized by utilizing a sampling resistor, a signal conditioning circuit and an ADC (analog to digital converter), and is used for measuring the emission current of the hot cathode ionization vacuum gauge to be calibrated, wherein the measurement range is 50 muA-5 mA, and the maximum relative error is 0.10%.
According to the functional division, the electric parameter calibration device can be divided into an output module, a measurement module, a control module, a power circuit and an interface conversion and protection circuit.
Drawings
FIG. 1 is a schematic diagram of a hot cathode ionization vacuum gauge.
FIG. 2 is a schematic diagram of ionization gauge electrical parameter calibration.
Fig. 3 is a diagram of a calibration apparatus based on circuit simulation.
Fig. 4 is a schematic diagram of the structure of the calibration device.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
The principle of the hot cathode ionization vacuum gauge is shown in figure 1, and in the range of the hot cathode ionization vacuum gauge, the ratio of the collector ion current to the filament emission current and the pressure are in equal proportion.
As shown in fig. 2, a in the figure is a standard ammeter, V is a standard voltmeter, and R is an equalizing resistance; GJB/J3416-98 specifies that in the hot cathode ionization vacuum gauge electrical parameter calibration device, a voltmeter measures a direct current voltage of 1.0 × 10-3~1.5×10-2V and 20-40At 0V, the maximum allowable error is better than +/-0.5 percent; the ammeter measures the direct current at 5.0 multiplied by 10-5~5.0×10-3When A is adopted, the maximum allowable error is better than +/-1%; the current source outputs DC current of 1.0 × 10-12~1.0×10-8At A, the maximum allowable error is better than +/-5 percent and is 1.0 multiplied by 10-8~1.0×10-4When A is adopted, the maximum allowable error is better than +/-3 percent; the equalizing resistance R is not less than 10 times of the resistance value of the hot cathode filament.
In FIG. 3, RcSimulating resistance for hot cathode ionization vacuum gauge filament; effective value detection chip U1Operational amplifier U2Triode Q1Capacitor CdAnd a resistance Rd、R1The analog transmitting current source is formed together; s1To simulate an ion current source.
Hot cathode filament analog resistor RcProviding a current loop, a resistor R, for a filament power supply of a hot cathode ionization vacuum gauge to be calibratedcThe resistance value of the filament is the same as or similar to that of the hot cathode ionization vacuum gauge filament, generally about 1 omega, is determined by the resistance value of the filament of the hot cathode ionization vacuum gauge to be simulated, the temperature drift characteristic is as low as possible to meet the use condition of a later-stage simulated emission current source, and the rated power of the filament needs to meet the requirement of simulating the working state of the hot cathode ionization vacuum gauge hot cathode filament.
The filament is simulated by adopting a low-temperature drift resistor, and the power loaded on the resistor is in direct proportion to the square of the voltage at two ends of the resistor.
In order to simultaneously be compatible with two modes of filament direct current heating and alternating current heating, a voltage effective value detection chip U is adopted1(e.g., AD536, AD637, etc.) vs. URcIs sampled and utilized by the U2、Q1、R1The formed V-I conversion circuit linearly converts the sampling voltage into current to simulate emission current, and the output range of the V-I conversion circuit is 0mA to the maximum emission current value of the hot cathode ionization vacuum gauge to be simulated.
Considering that a certain time delay exists between the heating current and the emission current of the filament of the actual hot cathode ionization vacuum gauge, the device is added with a capacitor C after the effective value of the voltage is sampleddAnd a resistance RdComposition ofThe delay element can be adjusted by adjusting the capacitance CdAnd a resistance RdTo simulate different models of hot cathode ionization vacuum gauges.
Analog ion current source S1And outputting standard current to simulate the collector ion current of the hot cathode ionization vacuum gauge, wherein the output range is 0mA to the maximum ion current value of the hot cathode ionization vacuum gauge to be simulated.
The standard ammeter in the electrical parameter calibration device is realized by utilizing a sampling resistor, a signal conditioning circuit and an ADC (analog to digital converter), and is used for measuring the emission current of the hot cathode ionization vacuum gauge to be calibrated, wherein the measurement range is 50 muA-5 mA, and the maximum relative error is 0.10%.
The structural principle of the device is shown in figure 4.
The MCU controller adopts ATMEL ATmega128 singlechip and has functional configurations of a plurality of groups of I/O interfaces, Flash, EEPROM, USB controllers and the like; the output module takes a 16-bit DAC as a core and realizes the output of standard voltage or standard current through a post-stage signal conditioning and converting circuit; the measuring module takes a 20-bit ADC as a core, and converts a current signal or a voltage signal to be measured into a proper voltage signal which can be directly sampled by the ADC through a conditioning circuit.
The working power supply comprises a digital power supply and an analog power supply, which are both realized by adopting a linear stabilized voltage power supply, and the digital power supply outputs +5V working voltage to supply power for digital circuits such as an MCU (microprogrammed control Unit), a key display interface, a communication interface and the like; the analog power supply comprises three groups of outputs of +12V, -12V and +5V and supplies power for analog circuits such as an operational amplifier, a high-precision voltage reference, an ADC (analog to digital converter), a DAC (digital to analog converter) and the like.
The interface conversion circuit mainly comprises a relay group and is used for solving the problems that interface connectors of hot cathode ionization vacuum gauges of different manufacturers are the same but pin definitions are different.
Claims (5)
1. The utility model provides a novel calibration of hot cathode ionization vacuum gauge electrical parameter device which characterized in that: the circuit is used for simulating the electrical characteristics of the hot cathode ionization vacuum gauge, the power detection circuit is used for measuring the output power of the cathode power supply of the hot cathode ionization vacuum gauge, and the measurement result is used for controlling the rear-stage current source circuit.
2. The new hot cathode ionization vacuum gauge electrical parameter calibration device according to claim 1, characterized in that: when the ion current amplifier is calibrated, an external standard current source is generally used for providing adjustable standard current for the ion current amplifier, and the current source can also be integrated in the device for providing adjustable standard current for the hot cathode ionization vacuum gauge so as to simulate the ion current of the hot cathode ionization vacuum gauge when the hot cathode ionization vacuum gauge works under different vacuum degree environments.
3. The new hot cathode ionization vacuum gauge electrical parameter calibration device according to claim 2, characterized in that: the simulated emission current can be stabilized at the emission current value set by the hot cathode ionization vacuum gauge to be calibrated by matching the hot cathode ionization vacuum scale analog circuit with the internal circuit of the hot cathode ionization vacuum gauge.
4. The new hot cathode ionization vacuum gauge electrical parameter calibration device of claim 3, characterized in that: the electrical parameter calibration device can be divided into an output module, a measurement module, a control module, a power circuit and an interface conversion and protection circuit.
5. The device for calibrating the electrical parameters of the vacuum gauge based on the novel hot cathode ionization according to claim 4, is characterized in that: the standard voltmeter in the electrical parameter calibration device is realized by using a range switching circuit and a high-resolution ADC (analog to digital converter) and is used for measuring the grid voltage and the cathode voltage of the hot cathode ionization vacuum gauge to be calibrated.
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| CN201911052211.9A CN110954265A (en) | 2019-10-31 | 2019-10-31 | Novel hot cathode ionization vacuum gauge electrical parameter calibration device |
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| CN201911052211.9A CN110954265A (en) | 2019-10-31 | 2019-10-31 | Novel hot cathode ionization vacuum gauge electrical parameter calibration device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111678642A (en) * | 2020-05-29 | 2020-09-18 | 中国航发南方工业有限公司 | Device and method for testing emission current of hot cathode ionization vacuum gauge |
| CN112504553A (en) * | 2020-12-07 | 2021-03-16 | 杭州盘古自动化系统有限公司 | Ionization gauge emission current voltage-controlled constant current control circuit |
| CN114326482A (en) * | 2021-12-06 | 2022-04-12 | 兰州空间技术物理研究所 | Vacuum gauge control system |
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2019
- 2019-10-31 CN CN201911052211.9A patent/CN110954265A/en active Pending
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| US20060123915A1 (en) * | 2004-12-14 | 2006-06-15 | Helix Technology Corporation | Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111678642A (en) * | 2020-05-29 | 2020-09-18 | 中国航发南方工业有限公司 | Device and method for testing emission current of hot cathode ionization vacuum gauge |
| CN112504553A (en) * | 2020-12-07 | 2021-03-16 | 杭州盘古自动化系统有限公司 | Ionization gauge emission current voltage-controlled constant current control circuit |
| CN112504553B (en) * | 2020-12-07 | 2022-03-18 | 杭州盘古自动化系统有限公司 | Ionization gauge emission current voltage-controlled constant current control circuit |
| CN114326482A (en) * | 2021-12-06 | 2022-04-12 | 兰州空间技术物理研究所 | Vacuum gauge control system |
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