CN110954018A - Optical coherence tomography scanning detection system - Google Patents

Optical coherence tomography scanning detection system Download PDF

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Publication number
CN110954018A
CN110954018A CN201911167543.1A CN201911167543A CN110954018A CN 110954018 A CN110954018 A CN 110954018A CN 201911167543 A CN201911167543 A CN 201911167543A CN 110954018 A CN110954018 A CN 110954018A
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China
Prior art keywords
mirror group
optical
light
fiber coupler
optical fiber
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CN201911167543.1A
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Inventor
蒋正英
蒋振刚
任峰
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Changchun University of Science and Technology
Changchun Normal University
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Changchun University of Science and Technology
Changchun Normal University
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Priority to CN201911167543.1A priority Critical patent/CN110954018A/en
Publication of CN110954018A publication Critical patent/CN110954018A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/22Measuring arrangements characterised by the use of optical techniques for measuring depth
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention provides an optical coherence tomography detection system, which comprises a light source, an optical fiber coupler, a first optical scanning mirror group, a reflecting mirror group scanning driving device, a second optical scanning mirror group driving device, a CCD detector and an image processing device, wherein the optical fiber coupler is arranged between the first optical scanning mirror group and the second optical scanning mirror group; after light emitted by the light source is split by the optical fiber coupler, one beam of light is collimated into parallel light by the first optical scanning mirror group and then enters the reflecting mirror group, and then is reflected by the reflecting mirror group and then returns to the optical fiber coupler along the original path, and the other beam of light is collimated by the second optical scanning mirror group and then enters the sample to be detected and returns to the optical fiber coupler along the original path after being backscattered by the sample to be detected; the two beams of light interfere through the optical fiber coupler and are output and focused on the CCD detector, and the CCD detector is connected with the image processing device. The invention can measure the laser weld penetration and the weld outline in real time, and can provide micron-order precision, process monitoring and quality guarantee.

Description

Optical coherence tomography scanning detection system
Technical Field
The invention belongs to the technical field of optical nondestructive testing, and relates to an Optical Coherence Tomography (OCT) testing system.
Background
The laser welding process is a typical multivariable complex system, is a nonlinear time-varying process, and is interfered by a plurality of random factors, particularly strong plasma radiation, smoke dust, splashing, visible light radiation and other factors, so that great difficulty is brought to real-time extraction of welding seam information. The high-power laser welding has the advantages of high beam power density, small spot diameter (the minimum can reach 20 mu m), narrow welding seam gap (the minimum can reach 0.1mm), high requirement on welding seam tracking precision, very small allowed welding seam path deviation error, and generally, the high-power laser welding cannot meet engineering requirements when the deviation between a laser beam and a welding seam exceeds 0.2 mm. Particularly, with the application of laser welding precision weldments, most welding seams are close butt joint, groove-free welding seams and welding seams which cannot be seen by naked eyes. The method has the advantages that the weld joint is accurately identified and tracked in real time, the problem of instability of the welding process is monitored, and the stable and reliable control of the welding quality is finally realized, so far, the method is still a research difficulty in the field of the domestic and foreign automatic control of laser welding.
Laser welding is a dynamic process, and the fluctuation of welding parameters and the instability of laser beams can affect welding joints; in addition, the laser welding has high requirements on the clamping precision of workpieces, and if two layers of steel plates are not tightly clamped, the base metal is not melted uniformly, and the defects of incomplete fusion, insufficient fusion depth and the like can be generated. Therefore, it is important to establish a method for effectively evaluating the quality of the laser welding head.
The quality evaluation methods for laser welding heads are mainly used in two ways: on-line evaluation based on process parameters and post-weld destructive testing. The former establishes a mathematical model for joint quality prediction according to the corresponding relation between welding process parameters and joint quality. However, laser welding is a multi-parameter coupling process, and on-line evaluation based on process parameters can only provide limited quality information and cannot accurately reflect the quality of a joint. The latter requires cutting damage to the joint, and measuring the geometric parameters such as fusion width and fusion depth. This not only wastes material, and the detection cycle is long moreover, influences welding production efficiency, increases manufacturing cost. The analysis of the quality of welded joints by means of non-destructive testing is an important direction of research. The establishment of the nondestructive testing method has important academic significance and application value for ensuring and improving the quality of the welded joint.
Therefore, how to provide an optical coherence tomography detection system for performing high-precision nondestructive detection on a welding seam is a problem to be solved urgently by those skilled in the art.
Disclosure of Invention
Aiming at the current research situation and the existing problems, the laser welding quality is analyzed by using the OCT technology, the laser welding seam penetration and the welding seam profile can be measured in real time, and micron-order precision, process monitoring and quality guarantee can be provided.
In order to achieve the above object, the present invention provides an optical coherence tomography detection system, which includes a light source, an optical fiber coupler, a first optical scanning mirror group, a reflecting mirror group scanning driving device, a second optical scanning mirror group driving device, a CCD detector, and an image processing device;
after light emitted by the light source is split by the optical fiber coupler, one beam of light is collimated into parallel light by the first optical scanning mirror group and then enters the reflecting mirror group, and then is reflected by the reflecting mirror group and then returns to the optical fiber coupler along the original path, and the other beam of light is collimated by the second optical scanning mirror group and then enters the sample to be detected and returns to the optical fiber coupler along the original path after being backscattered by the sample to be detected; the two beams of light interfere through the optical fiber coupler and are output and focused on the CCD detector, and the CCD detector is connected with the image processing device.
Preferably, the mirror group scanning driving device drives the mirror group to move in the X direction under the driving of the piezoelectric motor, so as to complete the scanning in the X direction.
Preferably, the second driving device of the optical scanning mirror group is driven by the second piezoelectric motor to move in the Y direction, so as to complete the scanning in the Y direction.
Compared with the prior art, the invention has the following beneficial effects:
the invention adopts the optical coherence tomography detection method to analyze the laser welding quality, has short detection period, does not influence the welding production efficiency, can carry out real-time measurement on the laser welding seam penetration and the welding seam profile, has the advantages of high signal-to-noise ratio, high imaging speed, low sensitivity reduction along with the depth and the like, and can provide micron-scale precision, process monitoring and quality guarantee.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is obvious that the drawings in the following description are only embodiments of the invention, and that for a person skilled in the art, other drawings can be obtained from the provided drawings without inventive effort.
FIG. 1 is a schematic diagram of an optical coherence tomography detection system provided by the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An embodiment of the present invention will be described in detail below with reference to fig. 1.
Referring to FIG. 1, a schematic diagram of an embodiment of an optical coherence tomography detection system according to the present invention is shown. In the present embodiment, the optical coherence tomography detection system includes a light source 1, an optical fiber coupler 2, a first optical scanning mirror group 31, a second optical scanning mirror group 32, a first mirror group scanning driving device 33, a second optical scanning mirror group 41, a second optical scanning mirror group driving device 43, a CCD detector 5, and an image processing device 6. Light emitted from the light source 1 is split by the optical fiber coupler 2, one light enters the reflector group 32 through the first optical scanning mirror group 31, is collimated into parallel light by the first optical scanning mirror group 31 and is incident on the reflector group 32, the parallel light is reflected by the reflector group 32 and returns along the original path to be coupled into the second optical fiber through the first optical scanning mirror group 31, the other light enters the second optical scanning mirror group 41 through the third optical fiber and is collimated and then is incident on the sample 42 to be detected, and the light incident on the sample 42 to be detected returns along the original path to be coupled into the third optical fiber after being backscattered by the sample 42 to be detected. The two returning light beams interfere through the optical fiber coupler 2, are output through the output end of the optical fiber coupler 2, are focused on the CCD detector 5 through the optical fiber four, and are finally processed by the image processing device 6.
According to the method, the OCT image acquisition and processing of the characteristic weld joint forming size are completed, the image processing device 6 is used for carrying out structured light characteristic extraction on the image sent by the CCD detector 5, and fully considering the main direction and gradient strength of pixel neighborhood gradient and aiming at gray level images of undercut, air holes and unfused defects in the weld joint, surface defect detection is developed, and the image target is more accurately segmented.
The mirror group scanning driving device 33 drives the mirror group 32 to move in the X direction under the driving of the piezoelectric motor, so as to complete the scanning in the X direction. The second driving device 43 of the optical scanning mirror group moves in the Y direction under the driving of the second piezoelectric motor, so as to complete the scanning in the Y direction. Under the combined action of the two driving devices 43, one plane scan of the sample can be completed.
The laser welding process has a large amount of interference of light radiation (visible light, infrared light, ultraviolet light and the like), flight lobes and plasma, and also has interference of sound, electricity, magnetism, high temperature and the like, and the welding range is large. The system adopts a synchronous trigger control system, overcomes the technical problem that the traditional optical scanning and reference light path position scanning are uncertain, and obviously improves the detection precision of the three-dimensional morphology of the detected tissue; specifically, by using the mirror group scanning driving device 33 and the second optical scanning lens group driving device 43, and using a high-precision synchronous control algorithm, the technical problems of scanning galvanometer presetting and reference light path trajectory control are overcome, and spatial full trajectory control is realized. The invention realizes two-dimensional scanning by using an optical coherence tomography method, and firstly, points are scanned into lines and then the lines are scanned into planes. Generally, a single-axis galvanometer can only realize one-dimensional scanning, because when light is reflected to the galvanometer, the light rotates along with the rotation of the galvanometer, and a point scans a line. On the basis of single-axis galvanometer, the system can realize surface scanning by using the reflecting mirror group scanning driving device 33 and the optical scanning mirror group two driving device 43.
The optical coherence tomography detection system provided by the present invention is described in detail above, and the principle and the implementation of the present invention are explained in this document by applying specific examples, and the description of the above examples is only used to help understanding the method of the present invention and the core idea thereof; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Claims (3)

1. An optical coherence tomography detection system is characterized by comprising a light source, an optical fiber coupler, a first optical scanning mirror group, a reflecting mirror group scanning driving device, a second optical scanning mirror group driving device, a CCD detector and an image processing device;
after light emitted by the light source is split by the optical fiber coupler, one beam of light is collimated into parallel light by the first optical scanning mirror group and then enters the reflecting mirror group, and then is reflected by the reflecting mirror group and then returns to the optical fiber coupler along the original path, and the other beam of light is collimated by the second optical scanning mirror group and then enters the sample to be detected and returns to the optical fiber coupler along the original path after being backscattered by the sample to be detected; the two beams of light interfere through the optical fiber coupler and are output and focused on the CCD detector, and the CCD detector is connected with the image processing device.
2. The optical coherence tomography detecting system of claim 1, wherein the mirror group scanning driving device drives the mirror group to move in the X direction under the driving of a piezoelectric motor, so as to complete the scanning in the X direction.
3. The optical coherence tomography detecting system of claim 1 or 2, wherein the second driving device of the optical scanning mirror set is driven by the second piezoelectric motor to move in the Y direction for completing the scanning in the Y direction.
CN201911167543.1A 2019-11-25 2019-11-25 Optical coherence tomography scanning detection system Pending CN110954018A (en)

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CN107661089A (en) * 2017-09-19 2018-02-06 北京工业大学 A kind of domain optical coherence chromatographs continuous dispersion compensation imaging method and system
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Patent Citations (8)

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Publication number Priority date Publication date Assignee Title
CN1539376A (en) * 2003-11-03 2004-10-27 四川大学 Longitudinal scanning method and device in optical image system of coherent faults
CN103439295A (en) * 2013-08-16 2013-12-11 中国科学院上海光学精密机械研究所 Full-range Fourier-domain Doppler optical coherence tomography method
JP2016075513A (en) * 2014-10-03 2016-05-12 日本電信電話株式会社 Optical measurement device
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CN109967910A (en) * 2019-03-19 2019-07-05 上海航天精密机械研究所 Welding penetration on-line measuring device and method
CN110385539A (en) * 2019-07-16 2019-10-29 广州德擎光学科技有限公司 Penetrating detection equipment and its detection method based on low coherence interferometry

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Application publication date: 20200403