CN110938801A

CN110938801A - Metal point source for evaporation equipment and application thereof

Info

Publication number: CN110938801A
Application number: CN201911287026.8A
Authority: CN
Inventors: 刘汝强; 王殿春; 王之腾; 刘庆毅; 孙蕾
Original assignee: SHANDONG GUOJING NEW MATERIALS CO Ltd
Current assignee: SHANDONG GUOJING NEW MATERIALS CO Ltd
Priority date: 2019-12-13
Filing date: 2019-12-14
Publication date: 2020-03-31
Anticipated expiration: 2039-12-14
Also published as: CN110938801B

Abstract

The invention relates to a metal point source used on evaporation equipment and application thereof, comprising: the metal heater is connected to the inner wall of the heat-insulation plate, a cooling water jacket is arranged outside the heat-insulation plate, the bottom of the cooling water jacket is connected with a bottom ring, a large supporting plate is positioned in the bottom ring and is connected with the bottom ring through a small supporting plate support at the bottom of the bottom ring, a bottom plate is arranged above the large supporting plate, and the bottom plate support is connected with the heat-insulation plate; the external electrode and the thermocouple respectively penetrate through the connecting flange, the top end of the external electrode is electrically connected with the bottom end of the metal heater, the top end of the thermocouple is located inside the heat insulation board, and the upper end and the lower end of the cooling water pipe are respectively connected with the cooling water jacket and the connecting flange. According to the invention, the heating wires are only arranged on the side surface, and a partition heating mode is adopted, so that the heat of a heating area can be accurately controlled, and the heating is more uniform. According to the invention, the crucible is supported only at the upper opening position of the point source, so that heat conduction of other parts of the crucible through the insulating sheet and the supporting frame is avoided, and the temperature is controlled more accurately and uniformly.

Description

Metal point source for evaporation equipment and application thereof

Technical Field

The invention relates to a metal point source for evaporation equipment and application thereof, belonging to the technical field of material thermal evaporation.

Background

The point source used in the evaporation field is used for heating a crucible, evaporation materials are contained in the crucible, the point source used in the evaporation field is mostly used for supporting and heating the bottom of the crucible at present, thus the temperature of the evaporation material near the bottom of the crucible is high, the temperature of the evaporation material near the upper end is low, thus, the heating mode can not ensure the uniformity of heating, different evaporation materials are contained in different crucibles, different evaporation materials have different evaporation temperatures, the evaporation process has a big problem due to overhigh and overlow temperatures, the fine control requirement of evaporation can not be met, and other point source equipment is urgently needed to accurately control the temperature uniformity of the evaporation materials, thereby more finely controlling the evaporation rate of the evaporated material and preventing other problems caused by temperature fluctuation during the evaporation of the material, thereby obtaining a high-quality film.

Patent application publication No. CN107761056A discloses a point evaporation source, which comprises at least three heating portions for heating the crucible in sections, at least one heat reflection plate surrounding the outer side of each heating portion and the bottom of the crucible, and further comprises: a cooling plate, which may be a cooling wire or a cooling tube with a cooling liquid (e.g., water) disposed therein, is located outside the heat reflecting plate. The invention does not show the connection mode of the heating wire and the electrode. The point source equipment can be 1-2 heating parts, is simpler in structure and is easy to assemble; the structure of the reflecting plate is designed in detail, so that the heat loss of a point source heating area can be effectively reduced, and the stability of the temperature in the furnace is improved; the invention designs the cooling system in detail, can effectively control the temperature uniformity of the cooling system, and ensures that the heat conduction and dissipation at each position in the heating area are more stable, thereby ensuring the temperature stability of the internal system.

The patent with application publication number CN110106477A discloses a pyrolysis metal evaporation source with a graphite core structure, wherein the heating unit is a resistance wire heater, resistance wires in the resistance wire heater are arranged at intervals with the crucible, and the distance between the resistance wires and the crucible is 0.5 cm-1 cm; the resistance wire extends from the top of the crucible to the bottom of the crucible. The heating zone is not designed in detail in the invention patent and is used as a core component of evaporation equipment, the design of the heating zone is particularly critical, the heating zone is designed in detail in the invention, and the key connection mode of an electrode-resistance wire is fully explained; the invention does not mention the arrangement of the resistance wire and the crucible at intervals; the insulating sheets are respectively arranged at the cup mouth of the crucible, the middle part of the crucible and the bottom of the crucible; the ceramic tube support frame is arranged between the two adjacent insulating sheets, and the bottom of the insulating sheet at the lowest end is used for supporting the insulating sheet. According to the invention, the crucible is supported only at the upper opening position of the point source, so that heat conduction of other parts of the crucible through the insulating sheet and the supporting frame is avoided, and the temperature is controlled more accurately and uniformly.

The uniformity of heating can not be guaranteed to traditional heating methods, also can not satisfy the control requirement that becomes more meticulous of coating by vaporization, so need seek other metal point source to accurately control the temperature homogeneity of evaporation material urgently, and then the evaporation rate of more meticulous control evaporation material to obtain the high film of quality.

Disclosure of Invention

Aiming at the defects of the prior art, the invention provides the metal point source used on the evaporation equipment, and the crucible can be uniformly heated by using the metal point source, so that the evaporation uniformity of the evaporation material in the crucible is obviously improved.

The invention also provides a use method of the metal point source used on the evaporation equipment.

The technical scheme of the invention is as follows:

a metal point source for an evaporation device comprises a connecting base, a connecting flange, an external electrode, a thermocouple, a cooling water pipe, a metal heater, a heat-insulating plate, a large supporting plate and a cooling water jacket;

the metal heater is connected to the inner wall of the heat-insulation plate, a cooling water jacket is arranged outside the heat-insulation plate, the bottom of the cooling water jacket is connected with a bottom ring, a large supporting plate is positioned in the bottom ring and is connected with the bottom ring through a small supporting plate support at the bottom of the bottom ring, a bottom plate is arranged above the large supporting plate, and the bottom plate support is connected with the heat-insulation plate;

the external electrode and the thermocouple are respectively connected with the base in a penetrating mode, the connecting base is coaxially connected with the connecting flange, the top end of the external electrode is electrically connected with the bottom end of the metal heater, the top end of the thermocouple is located inside the heat insulation board, and the upper end and the lower end of the cooling water pipe are respectively connected with the cooling water jacket and the connecting flange.

Preferably, a plurality of bolt holes are uniformly distributed in the connecting flange.

Preferably, the connecting flange is evenly provided with 6 bolt holes and two positioning holes.

Preferably, the connecting flange is provided with two stepped dislocation holes, one stepped dislocation hole is a water inlet hole and a water inlet hole, the other stepped dislocation hole is a water outlet hole and a water outlet hole, and the bottom ends of the two cooling water pipes are respectively connected with the two stepped dislocation holes.

Preferably, the center of the connecting flange is connected with a connecting base, and the connecting base is provided with a through hole for the external electrode and the thermocouple joint to pass through.

Preferably, a sealing ring is arranged between the connecting base and the connecting flange.

Preferably, the small supporting plate is connected with the bottom ring and the large supporting plate through bolts.

Preferably, the bottom ring is connected with the cooling water jacket through a transition ring, the bottom ring is provided with two water guide grooves, the transition ring is provided with two water guide holes, and the two water guide holes in the transition ring are communicated with the two water guide grooves in the bottom ring.

Preferably, the cooling water jacket is provided with two water diversion holes and a plurality of water diversion grooves, the two water diversion holes on the cooling water jacket are correspondingly communicated with the two water diversion holes on the transition ring, and the two water diversion holes and the plurality of water diversion grooves are communicated up and down to form a water circulation loop.

Preferably, the large supporting plate, the bottom plate and the heat-insulation plate are connected through a coaxial sleeve, and the coaxial sleeve is in threaded connection through a supporting column.

Preferably, metal heater includes upper zone heater strip and lower zone heater strip, and upper zone heater strip, lower zone heater strip are annular heater strip, leave the clearance between upper zone heater strip and the lower zone heater strip, and upper zone heater strip, lower zone heater strip respectively draw forth electrode and external electrode through two and be connected.

Preferably, the upper and lower gaps of the upper zone heating wire and the lower zone heating wire are at least 5 mm.

Preferably, upper zone heater strip, lower zone heater strip are connected in the heated board inner wall through the multilayer holding ring respectively, have seted up the constant head tank on the heated board, and the constant head tank is provided with the buckle, buckle fixed connection holding ring.

Preferably, the upper zone heating wire is fixedly connected with the upper layer of positioning ring and the lower zone heating wire is fixedly connected with the lower layer of positioning ring through the upper layer of positioning ring, the middle layer of positioning ring and the lower layer of positioning ring.

Preferably, the positioning ring is provided with a plurality of through holes for the heating wires to pass through, and the outer edge of the positioning ring is provided with a notch for the thermocouple to pass through.

Preferably, the thermocouple comprises a high-position thermocouple and a low-position thermocouple, the top end of the high-position thermocouple is located between the metal heater and the inner side wall of the heat insulation plate, the top end of the low-position thermocouple is located at the bottom of the metal heater, and the bottom end of the high-position thermocouple and the bottom end of the low-position thermocouple penetrate through the heat insulation plate, the bottom plate and the large supporting plate and are connected with the thermocouple joint on the connecting base.

Preferably, the high thermocouple and the low thermocouple are provided with insulating sleeves on the outer parts.

Preferably, the two leading-out electrodes of the metal heater are connected with the external electrode through a U-shaped elastic sheet.

Preferably, 3 groups of thermocouple joints are arranged on the connecting base.

Preferably, the heat insulation plate comprises a plurality of layers of annular heat insulation plates and a plurality of layers of plane heat insulation plates, and the plurality of layers of plane heat insulation plates are located above the bottom plate.

Preferably, the cooling water jacket, the transition ring and the bottom ring are welded into a whole.

Preferably, a shield is connected to the bottom of the bottom ring.

Preferably, at least two support rods are arranged between the connecting flange and the bottom ring.

A use method of a metal point source used on an evaporation device is characterized in that the metal point source is installed in the evaporation device through a connecting flange, and the use method comprises the following steps:

putting the crucible containing the evaporation material into a metal heater from the top; and setting working parameters of the metal heater and the cooling water jacket by a control system of the evaporation equipment, and finishing evaporation operation by the metal heater and the cooling water jacket according to a built-in program.

The invention has the beneficial effects that:

1) the invention designs the structure of the insulation board in detail, and can effectively reduce the heat loss of the point source heating area, thereby improving the stability of the temperature in the furnace.

2) The invention fully considers the temperature influence of the cooling system on the heating area, designs the cooling system in detail, can effectively control the temperature uniformity of the cooling system, and ensures the temperature stability of the internal system because the heat conduction and dissipation at each position in the heating area are more stable.

3) According to the invention, the heating wires are only arranged on the side surface, and a partition heating mode is adopted, so that the heat of a heating area can be accurately controlled, and the heating is more uniform.

4) According to the invention, the crucible is supported only at the upper opening position of the point source, so that heat conduction of other parts of the crucible through the insulating sheet and the supporting frame is avoided, and the temperature is controlled more accurately and uniformly.

Drawings

FIG. 1 is a front view of a metal point source of the present invention;

FIG. 2 is a schematic view of a partial small pallet of the present invention;

FIG. 3 is a schematic structural view of a partial spring plate according to the present invention;

FIG. 4 is a top view of the attachment flange;

FIG. 5 is a schematic structural view of a bottom ring;

FIG. 6 is a schematic view of a transition ring;

FIG. 7 is a bottom view of the cooling water jacket;

fig. 8 is a schematic plan view of a metal heating wire;

fig. 9 is a perspective view of the metal heating wire;

FIG. 10 is a schematic view of a retaining ring;

FIG. 11 is a schematic view of the buckle;

FIG. 12 is a schematic view of the construction of the sleeve and support post of the present invention;

FIG. 13 is a schematic view showing the construction of a thermocouple junction according to the present invention;

wherein: 1-external electrode, 2-connecting base, 3-connecting flange, 4-cooling water pipe, 5-thermocouple, 6-shield, 7-small supporting plate, 8-large supporting plate, 9-bottom ring, 10-bottom plate, 11-heat preservation plate, 12-cooling water jacket, 13-heating wire, 14-positioning ring, 15-thermocouple joint, 16-water outlet, 17-water inlet, 18-water inlet, 19-water outlet, 20-water guiding groove, 21-transition ring, 22-water guiding hole, 23-water guiding hole, 24-U-shaped elastic sheet, 25-upper zone heating wire, 26-lower zone heating wire, 27-positioning ring, 28-supporting column and 29-thermocouple joint.

Detailed Description

The present invention will be further described by way of examples, but not limited thereto, with reference to the accompanying drawings.

Example 1:

the embodiment provides a metal point source for evaporation equipment, which comprises a connecting base 2, a connecting flange 3, an external electrode 1, a thermocouple 5, a cooling water pipe 4, a metal heater, a heat-insulating plate 11 and a cooling water jacket 12, wherein the connecting flange 3 is arranged on the connecting base;

the metal heater is connected to the inner wall of the heat-insulation plate 11, a cooling water jacket 12 is arranged outside the heat-insulation plate 11, the bottom of the cooling water jacket 12 is connected with a bottom ring 9, a large supporting plate 8 is positioned in the bottom ring 9 and is in supporting connection through a small supporting plate 7 at the bottom of the bottom ring 9, a bottom plate 10 is arranged above the large supporting plate 8, and the bottom plate 10 is in supporting connection with the heat-insulation plate 11;

the external electrode 1 and the thermocouple 5 are respectively connected with the base 2 in a penetrating mode, the connecting base 2 is installed on the connecting flange 3 through screws, the top end of the external electrode 1 is electrically connected with the bottom end of the metal heater, the top end of the thermocouple 5 is located inside the heat insulation board 11, and the upper end and the lower end of the cooling water pipe 4 are respectively connected with the cooling water jacket 12 and the connecting flange 3.

Specifically, the upper heating zone is a barrel-shaped structure and sequentially comprises a metal heater, a multilayer heat insulation plate 11 and a cooling water jacket 12 from inside to outside. When the crucible evaporation device is used, the crucible is placed in the metal heater, and the metal heater is used for carrying out heat radiation on the crucible from the periphery so as to evaporate evaporation materials in the crucible.

Electric heating wire 13 is selected for use to metal heater, and metal heater includes two parts that upper zone heater strip 25 and lower zone heater strip 26 are relatively independent, leaves the clearance between upper zone heater strip 25 and the lower zone heater strip 26, and the upper and lower clearance of upper zone heater strip 25 and lower zone heater strip 26 is 5mm in this embodiment, and upper zone heater strip 25, lower zone heater strip 26 are the annular heater strip, and upper zone heater strip 25, lower zone heater strip 26 respectively are connected with external electrode 1 through two extraction electrodes. Because the heat dissipation at the two ends of the heating wire is faster than the middle position, a gap is left between the upper region and the lower region, and the heating radiation can be more uniform.

The upper zone heating wire 25 and the lower zone heating wire 26 are respectively connected to the inner wall of the heat insulation board through positioning rings 27, wherein the upper zone heating wire 25 is fixedly connected through an upper positioning ring 27 and a lower positioning ring 27, and the lower zone heating wire 26 is fixedly connected through an upper positioning ring 27, a middle positioning ring 27 and a lower positioning ring 27. The insulation board 11 is provided with a positioning groove which is provided with a buckle fixedly connected with a positioning ring 27. The heating wire is convenient to install through the buckle and the positioning ring 27, and the effective fixing effect is achieved.

The positioning ring 27 is provided with a plurality of through holes for the heating wires to pass through, and the outer edge of the positioning ring is provided with a gap for the heating couple to pass through. The retaining ring structure is shown in fig. 10 and the snap structure is shown in fig. 11.

The bottom of the cooling water jacket 12 is connected with a transition ring 21, and the bottom of the transition ring 21 is connected with a bottom ring 9; the structure of the bottom ring 9 is shown in fig. 5, two water guide grooves 20 are arranged on the bottom ring 9; the structure of the transition ring 21 is shown in fig. 6, two water diversion holes 22 are arranged on the transition ring 21, the two water diversion holes 22 are very close to each other, one water diversion hole is used for supplying water, and the other water diversion hole is used for draining water; the bottom structure of the cooling water jacket 12 is shown in fig. 7, the bottom of the cooling water jacket 12 is provided with two water guide holes 23 and a plurality of water guide grooves, the two water guide holes 23 at the bottom of the cooling water jacket 12 are correspondingly communicated with the two water guide holes 22 on the transition ring 21, and the two water guide holes 23 on the cooling water jacket 12 and the plurality of water guide grooves are vertically communicated to form a water circulation loop.

The two water guide grooves 20 on the bottom ring 9 act: when the upper surface of the bottom ring 9 is connected with the transition ring 21, the distance between the upper water and the lower water is very small, the distance is very close, the water circulation loop is uniform, and the phenomenon that the cooling is uneven due to the fact that the water loop is in a neutral position is avoided; two condenser tubes 4 are connected to end ring 9 lower surface, and two condenser tubes 4 cause the distance to be far away because of the restriction of mounted position and physical space, can effectively solve this problem through diversion flume 20 on the end ring 9. The distance between the two cooling water pipes 4 below the bottom ring 9 is kept far, and the distance between the upper water and the lower water is very close through the water guide grooves 20 on the upper surface of the bottom ring 9, so that the water loop neutral gear is avoided.

Two little layer boards 7 are symmetrical relation, all correspond on little layer board 7, big layer board 8, the end ring 9 and have seted up the screw, pass through bolted connection between little layer board 7 and end ring 9, the big layer board 8, little layer board 7 plays the effect of the big layer board 8 of fixed support.

Heated board 11 includes multilayer annular heated board and multilayer plane heated board, ring-shaped heated board and plane heated board respectively are the three-layer in this embodiment, 8 tops of big layer board are bottom plate 9, bottom plate 9 tops are the plane heated board, big layer board 8, bottom plate 10, all seted up the mounting hole on the plane heated board 11 and support the connection with the three interval through coaxial sleeve, then through a screw support column 28 with coaxial sleeve through threaded connection, the sleeve bottom of below is passed through the fixed block, the bolt is in the same place with big layer board 8 fixed connection. The plane heat preservation board is in annular heat preservation board, and gapped between the two, and the bottom bearing of annular heat preservation board is on bottom plate 10.

The thermocouple 5 comprises a high-position thermocouple and a low-position thermocouple, the top end of the high-position thermocouple is located between the upper zone heating wire and the inner side wall of the heat insulation plate 11, the top end of the low-position thermocouple is located at the bottom of the lower zone heating wire, the high-position thermocouple and the low-position thermocouple are externally provided with insulating sleeves, and the bottom end of the high-position thermocouple and the bottom end of the low-position thermocouple are connected with a thermocouple joint 15 on the connecting base 2 after penetrating through the heat insulation plate 11, the bottom plate 10 and the large.

The upper zone heater strip and the lower zone heater strip respectively have two extraction electrodes, the extraction electrodes extend out after passing the plane heated board, the bottom plate 10, the big layer board 8 in proper order along the inner wall of annular heated board 11, be connected through U type shell fragment between four extraction electrodes and the external electrode 1, two upper and lower faces of U type shell fragment are respectively through the extraction electrode of hexagonal bolted connection external electrode 1 with the heater strip, U type shell fragment has certain elasticity volume of activity, in the installation, assurance that can be smooth is installed and is targetting in place.

6 bolt holes are uniformly distributed on the circumference of the connecting flange 3, and two positioning holes are symmetrically formed. 6 bolt holes and two locating holes are used for installing on evaporation equipment. The connecting flange is provided with two step dislocation holes, one of the step dislocation holes is a water inlet hole 17 and a water inlet hole 18, the other step dislocation hole is a water outlet hole 19 and a water outlet hole 16, and the bottom ends of the two cooling water pipes 4 are respectively connected with the two step dislocation holes.

The central threaded connection of flange 3 has connection base 2, is equipped with the sealing washer between connection base 2 and flange 1, sets up the through-hole that supplies external electrode 1 and thermocouple joint 15 to pass on the connection base 2. The connecting base 2 is provided with 2 groups of thermocouple joints 15, and each group of thermocouple joints is a positive electrode and a negative electrode. The high-level thermocouple and the low-level thermocouple are respectively provided with two lead wires, and the four lead wires are correspondingly connected with 2 groups of thermocouple joints 15.

The top cover, the cooling water jacket 12, the transition ring 21, the bottom ring 9, the cooling water pipe 4, the support rod and the connecting flange 3 are welded into a whole. The top cover is used for plugging a water diversion groove at the top end of the cooling water jacket 12, a hoisting hole is formed in the top cover, and two support rods welded between the connecting flange 3 and the bottom ring 9 play a role in supporting the whole upper part.

Example 2:

a metal point source used for an evaporation device is disclosed as embodiment 1, and the structure is different from that: the connection base 2 is provided with 3 sets of thermocouple junctions 15 as shown in fig. 13. 2 thermocouple joints are arranged for standby, so that the phenomenon of failure and incapability of working normally is avoided.

Example 3:

a metal point source used for an evaporation device is disclosed as embodiment 1, and the structure is different from that: the bottom of the bottom ring 9 is connected with a shield 6, and the shield 6 is connected with the bottom ring 9 through screws. As shown in fig. 1, the shield serves as insulation protection.

Example 4:

the use method of the metal point source for the evaporation equipment as described in embodiment 1 is to install the metal point source in the evaporation equipment through a connecting flange, and includes the following steps when in use:

Claims

1. A metal point source for an evaporation device is characterized by comprising a connecting base, a connecting flange, an external electrode, a thermocouple, a cooling water pipe, a metal heater, a heat-insulating plate, a large supporting plate and a cooling water jacket;

2. A metal point source for use in an evaporation apparatus as defined in claim 1, wherein said attachment flange has a plurality of bolt holes formed therein.

3. The metal point source for vapor deposition equipment as recited in claim 1, wherein the connecting flange has two stepped offset holes, one of the stepped offset holes is a water inlet hole and a water inlet hole, the other stepped offset hole is a water outlet hole and a water outlet hole, and the bottom ends of the two cooling water pipes are connected to the two stepped offset holes respectively.

4. The metal point source used for the evaporation equipment as claimed in claim 1, wherein the large support plate, the bottom plate and the heat insulation plate are connected through a coaxial sleeve, and the coaxial sleeve is connected through a support column in a threaded mode.

5. The metal point source used on evaporation equipment as claimed in claim 1, wherein the metal heater comprises an upper zone heating wire and a lower zone heating wire, the upper zone heating wire and the lower zone heating wire are both annular heating wires, a gap is left between the upper zone heating wire and the lower zone heating wire, and the upper zone heating wire and the lower zone heating wire are respectively connected with the external electrode through two extraction electrodes.

6. The metal point source used for the evaporation equipment as claimed in claim 5, wherein the upper region heating wire and the lower region heating wire are respectively connected to the inner wall of the insulation board through a plurality of positioning rings, the insulation board is provided with a positioning groove, and the positioning groove is provided with a buckle fixedly connected with the positioning ring.

7. A metal point source for use in an evaporation apparatus according to claim 1, wherein said thermocouple comprises a high thermocouple and a low thermocouple, the top end of the high thermocouple is located between the metal heater and the inner sidewall of the thermal insulation plate, the top end of the low thermocouple is located at the bottom of the metal heater, and the bottom end of the high thermocouple and the bottom end of the low thermocouple are connected to the thermocouple junction of the connection base after passing through the thermal insulation plate, the bottom plate, and the large support plate.

8. The metal point source used in evaporation equipment as claimed in claim 5, wherein the two extraction electrodes of the metal heater are connected with the external electrode through U-shaped elastic pieces.

9. A metal point source for use on an evaporation apparatus as defined in claim 1, wherein said insulation board comprises a plurality of layers of annular insulation boards and a plurality of layers of planar insulation boards, the plurality of layers of planar insulation boards being positioned above the bottom plate.

10. A method for using a metal point source as claimed in any one of claims 1 to 9, wherein the metal point source is installed in the evaporation apparatus through a connecting flange, and the method comprises the following steps: