CN110928218A - Digital galvanometer control method, device and system - Google Patents

Digital galvanometer control method, device and system Download PDF

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CN110928218A
CN110928218A CN201911131321.4A CN201911131321A CN110928218A CN 110928218 A CN110928218 A CN 110928218A CN 201911131321 A CN201911131321 A CN 201911131321A CN 110928218 A CN110928218 A CN 110928218A
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data
current
control
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杨文杰
唐建辉
何国洪
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Foshan Linkage Technology Co Ltd
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0423—Input/output
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25257—Microcontroller

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Abstract

The invention relates to the technical field of laser processing, in particular to a digital galvanometer control method, a device and a system, wherein the data deviation of the current control period is obtained by acquiring the running data of a motor in the current control period in real time and comparing the running data with the target position data; generating a control output quantity of the current control period according to the data deviation of the current control period, and triggering a control instruction containing the control output quantity to control the motor to operate; and then judging whether the operation data of the motor is consistent with the target position data, and when the result is inconsistent, repeatedly executing the steps until the operation data of the motor is consistent with the target position data.

Description

Digital galvanometer control method, device and system
Technical Field
The invention relates to the technical field of laser processing, in particular to a digital galvanometer control method, device and system.
Background
In laser systems, the laser is focused on the target object by an optical scanner, so a galvanometer-based closed-loop optical scanner is essential. The closed-loop optical scanner based on the galvanometer enables the laser system to be applied in a wider range, and is mainly applied to biomedical systems, laser engineering, laser imaging and printing, semiconductor engineering, laser material processing and the like.
The laser galvanometer scanning system mainly comprises an XY deflection mirror, a high-speed galvanometer controller and the like, laser beams are incident on two reflectors, and the galvanometer controller is used for controlling the swinging of the scanning reflectors so as to finally focus the laser on the designated part of a target object.
The existing galvanometer scanning control system is mainly based on an analog galvanometer control system, and the analog galvanometer control system has the defects of weak anti-interference capability, difficulty in expansion and the like. And once the circuit is designed, the parameters are fixed, so that the galvanometer control system is very inconvenient to adjust.
Disclosure of Invention
In order to solve the problems, the invention provides a digital galvanometer control method, a device and a system, which have better anti-interference capability on the scanning control of a laser galvanometer.
In order to achieve the purpose, the invention provides the following technical scheme:
a digital galvanometer control method comprises the following steps:
step 1, acquiring running data of a motor in a current control period in real time, wherein the running data of the current control period comprises position data of the current control period and current data of the current control period;
step 2, comparing the position data of the current control period with the target position data to obtain the position deviation of the current control period;
step 3, processing the data deviation of the current control period through a PID closed-loop control algorithm to generate a control output quantity of the current control period;
step 4, triggering a control instruction containing the control output quantity to control the motor to operate;
and 5, judging whether the motor reaches the target position in real time, and if not, jumping to the step S1 until the position data of the current control period is consistent with the target position data.
Further, in step 2, the data deviation of the current control period is obtained by:
and T represents a sampling period, k represents the total accumulated number of the sampling periods, and then:
t＝k·T,k＝1,2,...
wherein t represents a sampling moment corresponding to the current operation data of the motor;
calculating the current data bias by the following formula:
e(t)＝r(t)-u(t)
wherein, r (t) is the current operation data of the motor, u (t) is the target position data, and e (t) is the current data deviation.
Further, the PID closed-loop control algorithm adopts three closed-loop control of a position loop, a speed loop and a current loop.
Further, the step 3 comprises:
calculating the proportional control output quantity of the current control period by the following formula:
uP(t)＝Kp*ek
wherein, TiRepresenting the integration period, TdDenotes the period of differentiation, T ═ Ti+Td；
Calculating an integrated control output quantity of the current control period by the following formula:
Figure BDA0002278369950000021
calculating a differential control output quantity of the current control period by the following formula:
Figure BDA0002278369950000022
calculating the control output quantity of the current control period by the following formula:
Figure BDA0002278369950000023
where j denotes a sampling number, j is 0,1,2kRepresents a control output amount corresponding to a sampling time k · T; e.g. of the typekIndicating a data deviation corresponding to a sampling time k · T; e.g. of the typek-1Represents the data deviation corresponding to the sampling time (k-1). T; kpIndicating the proportionality coefficient of the controller, KiDenotes the integral coefficient, KdRepresenting a differential coefficient, TiIs the integration time of the controller, TdIs the controller's differential time.
A digital galvanometer control device, comprising:
the operation data acquisition module is used for acquiring the operation data of the motor in the current control period in real time, wherein the operation data of the current control period comprises position data of the current control period and current data of the current control period;
the data deviation calculation module is used for comparing the position data of the current control period with the target position data to obtain the position deviation of the current control period;
the control output quantity generating module is used for processing the data deviation of the current control period through a PID closed-loop control algorithm to generate the control output quantity of the current control period;
the control module is used for triggering a control instruction containing the control output quantity so as to control the motor to operate;
and the judging module is used for judging whether the motor reaches the target position in real time, and if not, skipping and executing the running data acquisition module until the position data of the current control period is consistent with the target position data.
Further, in the data deviation calculation module, the data deviation of the current control period is obtained by:
and T represents a sampling period, k represents the total accumulated number of the sampling periods, and then:
t＝k·T,k＝1,2,...
wherein t represents a sampling moment corresponding to the current operation data of the motor;
calculating the current data bias by the following formula:
e(t)＝r(t)-u(t)
wherein, r (t) is the current operation data of the motor, u (t) is the target position data, and e (t) is the current data deviation.
Further, the PID closed-loop control algorithm in the control output generation module adopts three closed-loop control of a position loop, a speed loop and a current loop.
Further, the control output generation module is specifically configured to:
calculating the proportional control output quantity of the current control period by the following formula:
uP(t)＝Kp*ek
wherein, TiRepresenting the integration period, TdDenotes the period of differentiation, T ═ Ti+Td；
Calculating an integrated control output quantity of the current control period by the following formula:
Figure BDA0002278369950000031
calculating a differential control output quantity of the current control period by the following formula:
Figure BDA0002278369950000032
calculating the control output quantity of the current control period by the following formula:
Figure BDA0002278369950000033
where j denotes a sampling number, j is 0,1,2kRepresents a control output amount corresponding to a sampling time k · T; e.g. of the typekIndicating a data deviation corresponding to a sampling time k · T; e.g. of the typek-1Represents the data deviation corresponding to the sampling time (k-1). T; kpIndicating the proportionality coefficient of the controller, KiRepresenting integralsCoefficient, KdRepresenting a differential coefficient, TiIs the integration time of the controller, TdIs the controller's differential time.
A digital galvanometer control system, comprising: the controller is used for acquiring the operation data of the motor in the current control period in real time, the operation data of the current control period comprises the position data of the current control period and the current data of the current control period, and the controller comprises: the digital galvanometer control program is stored on the memory and can be operated on the processor, and the digital galvanometer control program realizes the digital galvanometer control method when being executed by the processor.
The invention has the beneficial effects that: the invention discloses a digital galvanometer control method, a device and a system, wherein the data deviation of the current control period is obtained by acquiring the running data of a motor in the current control period in real time and comparing the running data with the target position data; generating a control output quantity of the current control period according to the data deviation of the current control period, and triggering a control instruction containing the control output quantity to control the motor to operate; and then judging whether the operation data of the motor is consistent with the target position data or not, and when the result is inconsistent, repeatedly executing the steps until the operation data of the motor is consistent with the target position data. The invention has better anti-interference capability on the scanning control of the laser galvanometer.
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In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic flow chart of a laser galvanometer scanning method of the present invention;
FIG. 2 is a block diagram of a scanning device of a laser galvanometer according to the present invention;
fig. 3 is a schematic structural diagram of a laser galvanometer scanning system of the present invention.
Detailed Description
The conception, specific structure and technical effects of the present disclosure will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, aspects and effects of the present disclosure. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
Referring to fig. 1, an embodiment of the present invention provides a digital galvanometer control method, including the following steps:
step S100, acquiring running data of the motor in the current control period in real time, wherein the running data of the current control period comprises position data of the current control period and current data of the current control period.
The current data of the current control period are acquired, so that the running speed of the motor in the current control period can be calculated through the current data.
And S200, comparing the position data of the current control period with the target position data to obtain the position deviation of the current control period.
The target position data may be manually set in real time, or default values may be preset, or a target position may be determined based on real-time captured images. When the system runs, the target position data is obtained by triggering an instruction for inquiring the target position data. The position deviation is a difference value obtained by comparing the position data of the current control period with the target position data.
And step S300, processing the position deviation of the current control period through a PID closed-loop control algorithm to generate a control output quantity of the current control period.
And step S400, triggering a control instruction containing the control output quantity to control the motor to operate.
And S500, judging whether the motor reaches a target position in real time, and if not, jumping to the S100 until the position data of the current control period is consistent with the target position data.
In this embodiment, before the control cycle starts, target position data is first obtained, the operating data of the system is collected by the position sensor and the current sensor, the controller compares the collected position data of the current control cycle with the target position data to obtain a position deviation of the current control cycle, the position deviation of the current system is processed by a PID closed-loop control algorithm, and a control output of the current control cycle is given to the motor. And judging whether the running data of the motor is consistent with the target position data or not, and when the result is inconsistent, repeatedly executing the steps until the running data of the motor is consistent with the target position data.
In the embodiment provided by the disclosure, the position data and the target position data of the current control period are used as the generation basis of the control output quantity, and the control output quantity in each control period is updated in real time, so that the motor can be continuously controlled to stably run even when the motor is subjected to external disturbance or the target position data is changed. The scanning control of the laser galvanometer has better anti-interference capability.
In a specific embodiment, in step S200, the position deviation of the current control period is obtained by:
and T represents a sampling period, k represents the total accumulated number of the sampling periods, and then:
t＝k·T,k＝1,2,...
wherein t represents a sampling moment corresponding to the current operation data of the motor;
calculating the current position deviation by the following formula:
e(t)＝r(t)-u(t)
wherein, r (t) is the position data of the current control period, u (t) is the target position data, and e (t) is the position deviation of the current control period.
In the art, PID refers to: proportional (proportionality), integral (integral), differential (differential), in a preferred embodiment, the PID closed-loop control algorithm employs three closed-loop control of position loop-speed loop-current loop. The current loop and the speed loop are inner loops, and the position loop is an outer loop. The current loop is used for improving the rapidity of the system and inhibiting the internal interference of the current loop; the speed ring is used for eliminating interference in the speed ring; the position ring is used for eliminating steady-state errors and enhancing the load disturbance resistance of the system. In one embodiment, the position loop and the speed loop are controlled digitally, the current loop is controlled in an analog mode, the hardware of the three closed loops is integrated on a galvanometer driving plate, and the speed data of the speed loop is obtained by differentiating the position data.
Since the control of the computer is digital control, it is necessary to discretize the amount of control. As a further improvement of this embodiment, the step S300 includes:
calculating the proportional control output quantity of the current control period by the following formula:
uP(t)＝Kp*ek
wherein, TiRepresenting the integration time, T, of the controllerdRepresenting the differential time of the controller, T ═ Ti+Td；
Calculating an integrated control output quantity of the current control period by the following formula:
Figure BDA0002278369950000061
calculating a differential control output quantity of the current control period by the following formula:
Figure BDA0002278369950000062
calculating the control output quantity of the current control period by the following formula:
Figure BDA0002278369950000063
where j denotes a sampling number, j is 0,1,2kRepresents a control output amount corresponding to a sampling time k · T; e.g. of the typekIndicating a data deviation corresponding to a sampling time k · T; e.g. of the typek-1Represents the data deviation corresponding to the sampling time (k-1). T; kpIndicating the proportionality coefficient of the controller, KiDenotes the integral coefficient, KdRepresenting the differential coefficient.
It is clear to a person skilled in the art that for the above discretization equation to be valid, the sampling period T needs to be sufficiently short. The method can be specifically adjusted according to the actual engineering requirements. Proportional coefficient K of controllerpIntegral coefficient KiCoefficient of differentiation KdThe method can be obtained by adopting an engineering setting method, mainly depends on engineering experience, is directly carried out in the test of a control system, is simple and easy to master, and is widely adopted in engineering practice. The engineering setting method of PID controller parameters mainly comprises a critical proportion method, a reaction curve method and an attenuation method. The three methods have the characteristics that the common point is that the controller parameters are adjusted according to an engineering empirical formula after passing a test. However, the controller parameters obtained by any method need to be finally adjusted and perfected in actual operation. The critical ratio method is generally used.
In this embodiment, a corresponding constant acting force is applied to the motor by giving a control output quantity of the current control period, where the control output quantity is a direct-current voltage value, and the motor operates at a constant acceleration under the acting force, so as to reach a target position in the current control period.
According to the embodiment, the control parameters are written in by the upper computer, and the problem that the conventional analog control board is complicated in that a plurality of potentiometers are required to be manually adjusted to adjust the parameters is solved. The digital galvanometer control system has parameter uniformity, can use the same parameters aiming at the motors with the same model and the lenses with the same model, and greatly improves the debugging efficiency of the galvanometer motor by quickly writing in the upper computer. The method has better autonomy and flexibility, and better anti-interference capability on the scanning control of the laser galvanometer.
Referring to fig. 2, the present embodiment further provides a digital galvanometer control device, including:
the operation data acquisition module 100 is configured to acquire operation data of the motor in a current control period in real time, where the operation data of the current control period includes position data of the current control period and current data of the current control period;
a data deviation calculation module 200, configured to compare the position data of the current control period with the target position data to obtain a position deviation of the current control period;
a control output generation module 300, configured to process the data deviation of the current control period through a PID closed-loop control algorithm, and generate a control output of the current control period;
the control module 400 is used for triggering a control instruction containing the control output quantity so as to control the motor to operate;
and the judging module 500 is configured to judge whether the motor reaches the target position in real time, and if not, skip and execute the operation data acquiring module 100 until the position data of the current control period is consistent with the target position data.
In one embodiment, in the data deviation calculating module 200, the data deviation of the current control period is obtained by:
and T represents a sampling period, k represents the total accumulated number of the sampling periods, and then:
t＝k·T,k＝1,2,...
wherein t represents a sampling moment corresponding to the current operation data of the motor;
calculating the current data bias by the following formula:
e(t)＝r(t)-u(t)
wherein, r (t) is the current operation data of the motor, u (t) is the target position data, and e (t) is the current data deviation.
In one embodiment, the PID closed-loop control algorithm in the control output generation module 300 employs three closed-loop control of position loop-velocity loop-current loop.
In one embodiment, the control output generation module 300 is specifically configured to:
calculating the proportional control output quantity of the current control period by the following formula:
uP(t)＝Kp*ek
wherein, TiRepresenting the integration period, TdDenotes the period of differentiation, T ═ Ti+Td；
Calculating an integrated control output quantity of the current control period by the following formula:
Figure BDA0002278369950000081
calculating a differential control output quantity of the current control period by the following formula:
Figure BDA0002278369950000082
calculating the control output quantity of the current control period by the following formula:
Figure BDA0002278369950000083
where j denotes a sampling number, j is 0,1,2kRepresents a control output amount corresponding to a sampling time k · T; e.g. of the typekIndicating a data deviation corresponding to a sampling time k · T; e.g. of the typek-1Represents the data deviation corresponding to the sampling time (k-1). T; kpIndicating the proportionality coefficient of the controller, KiDenotes the integral coefficient, KdRepresenting a differential coefficient, TiIs the integration time of the controller, TdIs the controller's differential time.
Referring to fig. 3, the present embodiment further provides a digital galvanometer control system, including: controller 1, position sensor 2 and current sensor 3, position sensor 2 is used for detecting the position data of motor, current sensor 3 is used for detecting the current data of motor, controller 1 respectively with position sensor 2 and current sensor 3 are connected, controller 1 is used for obtaining the operating data of motor at present control cycle in real time, the operating data of present control cycle includes the position data of present control cycle, the current data of present control cycle, controller 1 includes: the digital galvanometer control method comprises a memory, a processor and a digital galvanometer control program which is stored on the memory and can run on the processor, wherein the digital galvanometer control program realizes the digital galvanometer control method when being executed by the processor.
It can be seen that the contents in the foregoing method embodiments are all applicable to this system embodiment, the functions specifically implemented by this system embodiment are the same as those in the foregoing method embodiment, and the advantageous effects achieved by this system embodiment are also the same as those achieved by the foregoing method embodiment.
The Processor may be a Central-Processing Unit (CPU), other general-purpose Processor, a Digital Signal Processor (DSP), an Application-Specific-Integrated-Circuit (ASIC), a Field-Programmable Gate Array (FPGA) or other Programmable logic device, a discrete Gate or transistor logic device, a discrete hardware component, or the like.
The memory may be used to store the computer program and/or module, and the processor may implement the various functions of the laser galvanometer scanning system by running or executing the computer program and/or module stored in the memory and calling up the data stored in the memory. The memory may mainly include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program required by at least one function (such as a sound playing function, an image playing function, etc.), and the like; the storage data area may store data (such as audio data, a phonebook, etc.) created according to the use of the cellular phone, and the like. In addition, the memory may include high speed random access memory, and may also include non-volatile memory, such as a hard disk, a memory, a plug-in hard disk, a Smart-Media-Card (SMC), a Secure-Digital (SD) Card, a Flash-memory Card (Flash-Card), at least one magnetic disk storage device, a Flash memory device, or other volatile solid state storage device.
While the present disclosure has been described in considerable detail and with particular reference to a few illustrative embodiments thereof, it is not intended to be limited to any such details or embodiments or any particular embodiments, but it is to be construed with references to the appended claims so as to provide a broad, possibly open interpretation of such claims in view of the prior art, and to effectively encompass the intended scope of the disclosure. Furthermore, the foregoing describes the disclosure in terms of embodiments foreseen by the inventor for which an enabling description was available, notwithstanding that insubstantial modifications of the disclosure, not presently foreseen, may nonetheless represent equivalent modifications thereto.

Claims (9)

1. A digital galvanometer control method is characterized by comprising the following steps:
step 1, acquiring running data of a motor in a current control period in real time, wherein the running data of the current control period comprises position data of the current control period and current data of the current control period;
step 2, comparing the position data of the current control period with the target position data to obtain the position deviation of the current control period;
step 3, processing the data deviation of the current control period through a PID closed-loop control algorithm to generate a control output quantity of the current control period;
step 4, triggering a control instruction containing the control output quantity to control the motor to operate;
and 5, judging whether the motor reaches the target position in real time, and if not, jumping to the step S1 until the position data of the current control period is consistent with the target position data.
2. The digital galvanometer control method according to claim 1, wherein in the step 2, the data deviation of the current control period is obtained by:
and T represents a sampling period, k represents the total accumulated number of the sampling periods, and then:
t＝k·T,k＝1,2,...
wherein t represents a sampling moment corresponding to the current operation data of the motor;
calculating the current data bias by the following formula:
e(t)＝r(t)-u(t)
wherein, r (t) is the current operation data of the motor, u (t) is the target position data, and e (t) is the current data deviation.
3. The digital galvanometer control method according to claim 2, wherein the PID closed-loop control algorithm adopts three closed-loop control of position loop-speed loop-current loop.
4. A digital galvanometer control method according to claim 3, wherein said step 3 comprises:
calculating the proportional control output quantity of the current control period by the following formula:
uP(t)＝Kp*ek
wherein, TiRepresenting the integration period, TdDenotes the period of differentiation, T ═ Ti+Td；
Calculating an integrated control output quantity of the current control period by the following formula:
Figure FDA0002278369940000011
calculating a differential control output quantity of the current control period by the following formula:
Figure FDA0002278369940000021
calculating the control output quantity of the current control period by the following formula:
Figure FDA0002278369940000022
where j denotes a sampling number, j is 0,1,2kRepresents a control output amount corresponding to a sampling time k · T; e.g. of the typekIndicating a data deviation corresponding to a sampling time k · T; e.g. of the typek-1Represents the data deviation corresponding to the sampling time (k-1). T; kpIndicating the proportionality coefficient of the controller, KiDenotes the integral coefficient, KdRepresenting a differential coefficient, TiIs the integration time of the controller, TdIs the controller's differential time.
5. A digital galvanometer control device, comprising:
the operation data acquisition module is used for acquiring the operation data of the motor in the current control period in real time, wherein the operation data of the current control period comprises position data of the current control period and current data of the current control period;
the data deviation calculation module is used for comparing the position data of the current control period with the target position data to obtain the position deviation of the current control period;
the control output quantity generating module is used for processing the data deviation of the current control period through a PID closed-loop control algorithm to generate the control output quantity of the current control period;
the control module is used for triggering a control instruction containing the control output quantity so as to control the motor to operate;
and the judging module is used for judging whether the motor reaches the target position in real time, and if not, skipping and executing the running data acquisition module until the position data of the current control period is consistent with the target position data.
6. The digital galvanometer controller according to claim 5, wherein in the data deviation calculating module, the data deviation of the current control period is obtained by:
and T represents a sampling period, k represents the total accumulated number of the sampling periods, and then:
t＝k·T,k＝1,2,...
wherein t represents a sampling moment corresponding to the current operation data of the motor;
calculating the current data bias by the following formula:
e(t)＝r(t)-u(t)
wherein, r (t) is the current operation data of the motor, u (t) is the target position data, and e (t) is the current data deviation.
7. The digital galvanometer control device according to claim 6, wherein the PID closed-loop control algorithm in the control output generation module adopts three closed-loop control of position loop-speed loop-current loop.
8. The digital galvanometer control device of claim 7, wherein the control output generation module is specifically configured to:
calculating the proportional control output quantity of the current control period by the following formula:
uP(t)＝Kp*ek
wherein, TiRepresenting the integration period, TdDenotes the period of differentiation, T ═ Ti+Td；
Calculating an integrated control output quantity of the current control period by the following formula:
Figure FDA0002278369940000031
calculating a differential control output quantity of the current control period by the following formula:
Figure FDA0002278369940000032
calculating the control output quantity of the current control period by the following formula:
Figure FDA0002278369940000033
where j denotes a sampling number, j is 0,1,2kRepresents a control output amount corresponding to a sampling time k · T; e.g. of the typekIndicating a data deviation corresponding to a sampling time k · T; e.g. of the typek-1Represents the data deviation corresponding to the sampling time (k-1). T; kpIndicating the proportionality coefficient of the controller, KiDenotes the integral coefficient, KdRepresenting a differential coefficient, TiIs the integration time of the controller, TdIs the controller's differential time.
9. A digital galvanometer control system, comprising: the controller is used for acquiring the operation data of the motor in the current control period in real time, the operation data of the current control period comprises the position data of the current control period and the current data of the current control period, and the controller comprises: a memory, a processor, and a digital galvanometer control program stored on the memory and executable on the processor, the digital galvanometer control program when executed by the processor implementing the digital galvanometer control method of any one of claims 1 to 4.
CN201911131321.4A 2019-11-19 2019-11-19 Digital galvanometer control method, device and system Pending CN110928218A (en)

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