CN110927224B - Humidity sensor based on polyimide and preparation method thereof - Google Patents
Humidity sensor based on polyimide and preparation method thereof Download PDFInfo
- Publication number
- CN110927224B CN110927224B CN201911286179.0A CN201911286179A CN110927224B CN 110927224 B CN110927224 B CN 110927224B CN 201911286179 A CN201911286179 A CN 201911286179A CN 110927224 B CN110927224 B CN 110927224B
- Authority
- CN
- China
- Prior art keywords
- polyimide
- oxide layer
- humidity sensor
- substrate
- nanofiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F6/00—Monocomponent artificial filaments or the like of synthetic polymers; Manufacture thereof
- D01F6/58—Monocomponent artificial filaments or the like of synthetic polymers; Manufacture thereof from homopolycondensation products
- D01F6/74—Monocomponent artificial filaments or the like of synthetic polymers; Manufacture thereof from homopolycondensation products from polycondensates of cyclic compounds, e.g. polyimides, polybenzimidazoles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Textile Engineering (AREA)
- Power Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses a humidity sensor based on polyimide and a preparation method thereof, wherein the humidity sensor based on polyimide comprises a substrate, a first oxide layer, a lower electrode, a second oxide layer, a dielectric layer and an upper electrode; the dielectric layer is made of polyimide nanofiber. The humidity sensor based on the polyimide has the characteristics of high detection precision and small device size.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a humidity sensor based on polyimide and a preparation method thereof.
Background
People are aware of the importance of environmental humidity more and more at present, so that the requirement for detecting humidity is greater and greater, and the requirement for detecting precision of humidity is higher and higher. Most of the existing humidity detection devices use a polyimide film as a humidity sensing material, but the specific surface area of the polyimide film is small, so that the humidity sensing is not sensitive enough. There have also been attempts to enlarge the sensing area of the sensing film to improve the sensitivity of the device, but this has undoubtedly increased the device size.
Disclosure of Invention
The invention provides a humidity sensor based on polyimide and a preparation method thereof, aiming at improving the detection precision of the humidity sensor and reducing the size of a device.
In order to achieve the above object, the present invention provides a humidity sensor based on polyimide, comprising a substrate, a first oxide layer, a lower electrode, a second oxide layer, a dielectric layer and an upper electrode; the dielectric layer is made of polyimide nanofiber.
Preferably, the substrate is P-type silicon, the first oxide layer is silicon dioxide, the lower electrode is a gold film, the second oxide layer is silicon dioxide or aluminum oxide, and the upper electrode is a porous gold film.
Preferably, the first oxide layer is formed on the surface of the substrate, the lower electrode is deposited on the first oxide layer, the second oxide layer is deposited on the lower electrode, the dielectric layer is formed on the second oxide layer, and the upper electrode is deposited on the dielectric layer.
Preferably, the polyimide-based humidity sensor is a capacitive sensor formed by the lower electrode and the upper electrode, and the polyimide nanofiber is a dielectric of the capacitive sensor.
In addition, in order to achieve the above object, an embodiment of the present invention further provides a method for preparing a humidity sensor based on polyimide, including:
wiping the P-type silicon clean to be used as a substrate, and thermally oxidizing the surface of the substrate to form a first oxidation layer;
carrying out evaporation deposition on the surface of the substrate including the first oxide layer to form a gold film, and depositing a second oxide layer on the gold film;
taking the substrate modified with the gold film, the first oxidation layer and the second oxidation layer as a receiving substrate, placing the receiving substrate at a receiving end of an electrostatic spinning device, and receiving the polyimide composite nanofiber generated by the electrostatic spinning technology;
imidizing the polyimide composite nanofiber to obtain polyimide nanofiber, and taking the polyimide nanofiber as a dielectric layer;
and depositing a porous gold film on the dielectric layer by evaporation to obtain the polyimide-based humidity sensor.
Preferably, the step of preparing the polyimide nanofiber by the electrospinning technique comprises:
adding dimethylformamide into a test bottle containing diamine;
after diamine is dissolved, adding dianhydride into the test bottle to obtain an electrostatic spinning precursor solution;
the electrostatic spinning precursor solution is filled in a flat-head needle, and the distance from the flat-head needle to the receiving end of the electrostatic spinning device is 13 cm;
and under a preset condition, pushing out the electrostatic spinning precursor solution through the electrostatic spinning device, and receiving the prepared polyimide composite nanofiber by the receiving substrate.
Preferably, the molar ratio of diamine to dianhydride is 1: 0.8-1: 1.5.
preferably, the preset conditions are that the direct-current voltage is 20KV, and the propelling pump speed is 0.3ml/h-0.5 ml/h.
Preferably, the step of imidizing the polyimide composite nanofiber to obtain a polyimide nanofiber comprises:
imidizing the polyimide composite nanofiber according to a preset temperature gradient to obtain the polyimide nanofiber.
Preferably, the preset temperature gradient is heating from room temperature to 160 ℃ for 1h, and heating from 160 ℃ to 360 ℃ for 2 h.
Compared with the prior art, the invention provides a humidity sensor based on polyimide and a preparation method thereof, wherein the humidity sensor based on polyimide comprises a substrate, a first oxide layer, a lower electrode, a second oxide layer, a dielectric layer and an upper electrode; the dielectric layer is made of polyimide nanofiber. The humidity sensor based on the polyimide has the characteristics of high detection precision and small device size.
Drawings
FIG. 1 is a schematic diagram of the structure of a polyimide-based humidity sensor according to the present invention;
FIG. 2 is a graph of capacitance versus humidity for a polyimide based humidity sensor of the present invention;
FIG. 3 is a schematic flow chart of a method of making a polyimide-based humidity sensor according to the present invention;
FIG. 4 is a scanning electron micrograph of a polyimide nanofiber according to the present invention.
Reference numerals and names
| Reference numerals | Name (R) | Reference numerals | Name (R) |
| 1 | |
4 | |
| 2 | |
5 | |
| 3 | |
6 | Upper electrode |
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The first embodiment of the present invention provides a humidity sensor based on polyimide, which includes a substrate 1, a first oxide layer 2, a lower electrode 3, a second oxide layer 4, a dielectric layer 5, and an upper electrode 6; the dielectric layer 5 is made of polyimide nanofiber.
Specifically, referring to fig. 1, fig. 1 is a schematic structural view of a polyimide-based humidity sensor according to the present invention.
The substrate 1 is P-type silicon which is prepared by doping boron into monocrystalline silicon, and the more boron is doped, the more holes are generated by replacing silicon, the stronger the conductivity is, and the lower the resistivity is. The thickness of the substrate is approximately 0.5 nm.
The first oxide layer 2 is silicon dioxide, and the silicon dioxide in the first oxide layer 2 is prepared by thermally oxidizing P-shaped silicon in the substrate 1. The thickness of the first oxide layer 2 is about 300 nm. The first oxide layer 2 functions to reduce the parasitic capacitance of the substrate 1.
The lower electrode 3 is a gold film, which is formed by vapor deposition. The gold film thickness was about 50 nm.
The polyimide-based humidity sensor is a capacitive sensor formed by the lower electrode 3 and the upper electrode 6, and the polyimide nanofibers are dielectrics of the capacitive sensor. The thickness of the polyimide nanofiber is about 100 nm. Polyimide (PI) is a moisture-sensitive material with excellent performance and wide application, the dielectric constant of polyimide is very small (2.93F/m), and the dielectric constant is increased after moisture absorption (because the dielectric constant of water is very large (80F/m)). The polyimide nanofiber is a core induction part of the humidity sensor, the polyimide nanofiber is deposited on the surface of silicon dioxide and then has negative charges, when the external humidity changes, the polyimide nanofiber adsorbs water molecules, so that strong-polarity molecules are introduced, under the action of an external electric field, polarization occurs, dipole moment is increased, and namely the dielectric constant is increased. Polyimide nanofibers serve as the dielectric of a capacitive sensor, and when the ambient humidity changes, the dielectric permittivity changes, thereby changing the capacitance value. The nano-fiber has large specific surface area, excellent mechanical flexibility and excellent transmission performance. Compared with a humidity sensor based on a polyimide film, the humidity sensor prepared by using the polyimide nano fibers has better detection precision and smaller device size.
The second oxide layer 4 is silicon dioxide or aluminum oxide, and the thickness of the second oxide layer is about 120 nm.
The upper electrode 6 is a porous gold film. The thickness of the porous gold film is about 50 nm. The porous gold film is selected to be better in contact with the detection environment, so that the contact area of the device and the environment to be detected is increased, and the sensitivity and the detection precision of the device are improved.
Further, the first oxide layer 2 is formed on the surface of the substrate 1, the lower electrode 3 is deposited on the first oxide layer 2, the second oxide layer 4 is deposited on the lower electrode 3, the dielectric layer 5 is formed on the second oxide layer 4, and the upper electrode 6 is deposited on the dielectric layer 5.
Further, referring to fig. 2, fig. 2 is a graph of capacitance versus humidity for a polyimide based humidity sensor of the present invention. The abscissa of fig. 2 represents humidity RH, expressed in percentages; the ordinate represents the capacitance C in pf. As is clear from fig. 2, the capacitance increases with the increase of humidity, and the capacitance and humidity show an approximately linear relationship, that is, the polyimide-based humidity sensor has good humidity sensing performance and high detection accuracy.
In the present embodiment, by the above scheme, a humidity sensor based on polyimide is provided, which includes a substrate 1, a first oxide layer 2, a lower electrode 3, a second oxide layer 4, a dielectric layer 5, and an upper electrode 6; the dielectric layer 5 is made of polyimide nanofiber. The humidity sensor based on the polyimide has the characteristics of high detection precision and small device size.
A second embodiment of the present invention provides a method for preparing a polyimide-based humidity sensor. Referring to fig. 3, fig. 3 is a schematic flow chart of a method for manufacturing a polyimide-based humidity sensor according to the present invention. Referring to fig. three, the method for preparing the polyimide-based humidity sensor includes the steps of:
step S101, wiping the P-type silicon clean to be used as a substrate, and performing thermal oxidation on the surface of the substrate to form a first oxidation layer; the first oxide layer is silicon dioxide.
Step S102, performing evaporation deposition on the surface of the substrate including the first oxide layer to form a gold film, and depositing a second oxide layer on the gold film; and carrying out evaporation deposition on the surface of the substrate including the first oxide layer by using a vacuum evaporation coating machine to form a gold film with a certain thickness, wherein the thickness of the gold film can be 50 nm.
Step S103, using the substrate modified with the gold film, the first oxide layer, and the second oxide layer as a receiving substrate, placing the receiving substrate at a receiving end of an electrostatic spinning device, and receiving the polyimide composite nanofibers generated by the electrostatic spinning technique;
electrospinning is a special form of electrostatic atomization of high molecular fluids, where the material split by atomization is not a tiny droplet, but a tiny jet of polymer, which can travel a considerable distance and eventually solidify into fibers. Electrospinning is a special fiber manufacturing process, where polymer solutions or melts are jet spun in a strong electric field. Under the action of the electric field, the liquid drop at the needle head changes from a spherical shape to a conical shape (i.e. a Taylor cone) and extends from the tip of the cone to obtain a fiber filament. This way, polymer filaments of nanometer-scale diameter can be produced.
Specifically, the step of preparing the polyimide nanofiber by the electrospinning technique comprises:
adding dimethylformamide into a test bottle containing diamine; wherein the molar ratio of diamine to dianhydride is 1: 0.8-1: 1.5. the solid content is 20-25%. After diamine is dissolved, adding dianhydride into the test bottle to obtain an electrostatic spinning precursor solution; the electrostatic spinning precursor solution is yellow transparent liquid and has certain viscosity. The electrostatic spinning precursor solution is filled in a flat-head needle, and the distance from the flat-head needle to the receiving end of the electrostatic spinning device is 13 cm; and under a preset condition, pushing out the electrostatic spinning precursor solution through the electrostatic spinning device, and receiving the prepared polyimide composite nanofiber by the receiving substrate. The preset conditions are that the direct current voltage is 20KV, and the propelling pump speed is 0.3ml/h-0.5 ml/h.
Step S104, performing imidization treatment on the polyimide composite nanofiber to obtain a polyimide nanofiber, and taking the polyimide nanofiber as a dielectric layer;
specifically, imidizing the polyimide composite nanofiber according to a preset temperature gradient to obtain the polyimide nanofiber, wherein the preset temperature gradient is heating from room temperature to 160 ℃ and keeping for 1h, and heating from 160 ℃ to 360 ℃ and keeping for 2 h.
And step S105, evaporating and depositing a porous gold film on the dielectric layer to obtain the humidity sensor based on the polyimide. The porous gold film is better in contact with a detection environment, the contact area between the humidity sensor based on the polyimide and the environment to be detected is increased, and the sensitivity and the detection precision of the device are improved.
The humidity sensor based on polyimide has the advantages of simple preparation process, simple electrostatic spinning equipment and process and high production efficiency, and is beneficial to application of devices in consumer electronics.
Further, the polyimide nanofibers were characterized by Scanning Electron Microscopy (SEM). The scanning electron microscope is widely applied to the observation of the surface appearance of the electrostatic textile fiber. In practical application, the electrostatic textile fiber with different surface morphologies can be effectively reflected, and the electrostatic textile fiber comprises a smooth surface, a bead structure, a belt-shaped structure, a rough surface and the like.
Referring to fig. 4, fig. 4 is a scanning electron microscope image of the polyimide nanofiber according to the present invention. As can be seen from fig. 4, the polyimide nanofibers are elongated in shape and uniformly distributed.
In this embodiment, by using the above scheme, P-type silicon is wiped clean and then used as a substrate, and a first oxide layer is formed on the surface of the substrate through thermal oxidation; carrying out evaporation deposition on the surface of the substrate including the first oxide layer to form a gold film, and depositing a second oxide layer on the gold film; taking the substrate modified with the gold film, the first oxidation layer and the second oxidation layer as a receiving substrate, placing the receiving substrate at a receiving end of an electrostatic spinning device, and receiving the polyimide composite nanofiber generated by the electrostatic spinning technology; imidizing the polyimide composite nanofiber to obtain polyimide nanofiber, and taking the polyimide nanofiber as a dielectric layer; and depositing a porous gold film on the dielectric layer by evaporation to obtain the polyimide-based humidity sensor. Thus, the humidity sensor with high detection precision and small device size is manufactured.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or system. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or system that comprises the element.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
Through the above description of the embodiments, those skilled in the art will clearly understand that the method of the above embodiments can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware, but in many cases, the former is a better implementation manner.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and all equivalent structures or flow transformations made by the present specification and drawings, or applied directly or indirectly to other related arts, are included in the scope of the present invention.
Claims (7)
1. A method for preparing a humidity sensor based on polyimide is characterized by comprising the following steps:
wiping the P-type silicon clean to be used as a substrate, and thermally oxidizing the surface of the substrate to form a first oxidation layer;
carrying out evaporation deposition on the surface of the substrate including the first oxide layer to form a gold film, and depositing a second oxide layer on the gold film;
taking the substrate modified with the gold film, the first oxidation layer and the second oxidation layer as a receiving substrate, placing the receiving substrate at a receiving end of an electrostatic spinning device, and receiving the polyimide composite nanofiber generated by the electrostatic spinning technology;
imidizing the polyimide composite nanofiber to obtain polyimide nanofiber, and taking the polyimide nanofiber as a dielectric layer;
depositing a porous gold film on the dielectric layer by evaporation to obtain a polyimide-based humidity sensor;
the preparation method of the polyimide nanofiber through the electrostatic spinning technology comprises the following steps:
adding dimethylformamide into a test bottle containing diamine;
after diamine is dissolved, adding dianhydride into the test bottle to obtain an electrostatic spinning precursor solution;
the electrostatic spinning precursor solution is filled in a flat-head needle, and the distance from the flat-head needle to the receiving end of the electrostatic spinning device is 13 cm;
under a preset condition, pushing out the electrostatic spinning precursor solution through the electrostatic spinning device, and receiving the prepared polyimide composite nanofiber by the receiving substrate;
the molar ratio of diamine to dianhydride is 1: 0.8-1: 1.5;
the preset conditions are that the direct-current voltage is 20KV, and the speed of the propulsion pump is 0.3ml/h-0.5 ml/h.
2. The method according to claim 1, wherein the step of imidizing the polyimide composite nanofiber to obtain a polyimide nanofiber comprises:
imidizing the polyimide composite nanofiber according to a preset temperature gradient to obtain the polyimide nanofiber.
3. The method according to claim 2, wherein the preset temperature gradient is heating from room temperature to 160 ℃ for 1h and from 160 ℃ to 360 ℃ for 2 h.
4. A humidity sensor based on polyimide is characterized by comprising a substrate, a first oxide layer, a lower electrode, a second oxide layer, a dielectric layer and an upper electrode; the dielectric layer is made of polyimide nano fibers;
the polyimide-based humidity sensor is manufactured by the manufacturing method as set forth in any one of claims 1 to 3.
5. The polyimide-based humidity sensor according to claim 4, wherein the substrate is P-type silicon, the first oxide layer is silicon dioxide, the lower electrode is a gold film, the second oxide layer is silicon dioxide or aluminum oxide, and the upper electrode is a porous gold film.
6. The polyimide-based humidity sensor according to claim 4, wherein the first oxide layer is formed on the surface of the substrate, the lower electrode is deposited on the first oxide layer, the second oxide layer is deposited on the lower electrode, the dielectric layer is formed on the second oxide layer, and the upper electrode is deposited on the dielectric layer.
7. The polyimide-based humidity sensor according to claim 4, wherein the polyimide-based humidity sensor is a capacitive sensor formed by the lower electrode and the upper electrode, and the polyimide nanofibers are a dielectric of the capacitive sensor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911286179.0A CN110927224B (en) | 2019-12-13 | 2019-12-13 | Humidity sensor based on polyimide and preparation method thereof |
| PCT/CN2019/130231 WO2021114433A1 (en) | 2019-12-13 | 2019-12-31 | Polyimide-based humidity sensor and preparation method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911286179.0A CN110927224B (en) | 2019-12-13 | 2019-12-13 | Humidity sensor based on polyimide and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110927224A CN110927224A (en) | 2020-03-27 |
| CN110927224B true CN110927224B (en) | 2021-07-23 |
Family
ID=69859970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911286179.0A Active CN110927224B (en) | 2019-12-13 | 2019-12-13 | Humidity sensor based on polyimide and preparation method thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110927224B (en) |
| WO (1) | WO2021114433A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113311031A (en) * | 2021-07-01 | 2021-08-27 | 北京航天微电科技有限公司 | Double-sided capacitive humidity sensor and preparation method thereof |
| CN115058827A (en) * | 2022-07-13 | 2022-09-16 | 中国电子科技集团公司第四十九研究所 | Hydrophobic breathable film applied to humidity sensitive element |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2865523A1 (en) * | 2012-06-20 | 2015-04-29 | Toyobo Co., Ltd. | Process for producing layered product, layered product, process for producing layered product with device using said layered product, and layered product with device |
| CN110133068A (en) * | 2019-03-28 | 2019-08-16 | 南通纺织丝绸产业技术研究院 | A kind of humidity sensor based on electrostatic spinning nano fiber fabric |
| CN110494744A (en) * | 2017-03-31 | 2019-11-22 | 三美电机株式会社 | Humidity sensor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9603560B2 (en) * | 2012-01-26 | 2017-03-28 | The University Of Akron | Flexible electrode for detecting changes in temperature, humidity, and sodium ion concentration in sweat |
| CN103630582B (en) * | 2013-12-11 | 2016-02-10 | 江苏物联网研究发展中心 | A kind of MEMS humidity sensor and preparation method |
| CN103747609A (en) * | 2013-12-17 | 2014-04-23 | 上海洁晟环保科技有限公司 | Polyimide nano fiber composite film, and preparation method and application thereof |
| US11111593B2 (en) * | 2015-01-16 | 2021-09-07 | Nanowear Inc. | Large scale manufacturing of hybrid nanostructured textile sensors |
| CN108414603B (en) * | 2018-01-29 | 2021-06-04 | 江南大学 | Humidity sensor based on double electric layer thin film transistor and preparation method thereof |
-
2019
- 2019-12-13 CN CN201911286179.0A patent/CN110927224B/en active Active
- 2019-12-31 WO PCT/CN2019/130231 patent/WO2021114433A1/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2865523A1 (en) * | 2012-06-20 | 2015-04-29 | Toyobo Co., Ltd. | Process for producing layered product, layered product, process for producing layered product with device using said layered product, and layered product with device |
| CN110494744A (en) * | 2017-03-31 | 2019-11-22 | 三美电机株式会社 | Humidity sensor |
| CN110133068A (en) * | 2019-03-28 | 2019-08-16 | 南通纺织丝绸产业技术研究院 | A kind of humidity sensor based on electrostatic spinning nano fiber fabric |
Non-Patent Citations (3)
| Title |
|---|
| 基于纳米化聚酰亚胺材料的MEMS 湿度传感器的研究;雷程 等;《仪表技术与传感器》;20160131(第1期);第8页左栏第6行，第36页左栏第2段 * |
| 聚酰亚胺纳米纤维的功能化及性能研究;李学佳;《中国博士学位论文全文数据库 工程科技Ⅰ辑》;20151115(第11期);正文第8页；正文第13页图2-3；正文第15页倒数第2行；正文第16页；正文第22-26页 * |
| 静电纺丝法制备聚酰亚胺纳米纤维及其表征;李学佳 等;《化工新型材料》;20140531;第42卷(第5期);第81页右栏，第82页左栏 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110927224A (en) | 2020-03-27 |
| WO2021114433A1 (en) | 2021-06-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Zaarour et al. | A review on the secondary surface morphology of electrospun nanofibers: formation mechanisms, characterizations, and applications | |
| Smit et al. | Continuous yarns from electrospun fibers | |
| CN110927224B (en) | Humidity sensor based on polyimide and preparation method thereof | |
| Pan et al. | Continuous aligned polymer fibers produced by a modified electrospinning method | |
| US10350795B2 (en) | Flexible and electrically conductive polymer films and methods of making same | |
| Ding et al. | Electrospun nanomaterials for ultrasensitive sensors | |
| US7815842B2 (en) | Method for producing conducting polymer fibers with vinyl and conducting polymer fibers with vinyl produced thereby | |
| Panda | Ceramic nanofibers by electrospinning technique—A review | |
| Ura et al. | The significance of electrical polarity in electrospinning: A nanoscale approach for the enhancement of the polymer fibers' properties | |
| Scarlet et al. | Study on the solubility of polyetherimide for nanostructural electrospinning | |
| Forouharshad et al. | Manufacture and characterization of poly (butylene terephthalate) nanofibers by electrospinning | |
| Ebrahimi et al. | Characterization of triple electrospun layers of PVDF for direct contact membrane distillation process | |
| Saveh-Shemshaki et al. | Electrospun metal oxide nanofibrous mat as a transparent conductive layer | |
| Eslah et al. | Synthesis and characterization of tungsten trioxide/polyaniline/polyacrylonitrile composite nanofibers for application as a counter electrode of DSSCs | |
| CN201340404Y (en) | Macromolecule composite resistive-type humidity sensitive element with nanofiber structure | |
| Zulfikar et al. | Effect of processing parameters on the morphology of PVDF electrospun nanofiber | |
| CN113502605A (en) | Multilayer fiber membrane with oriented water transmission function and preparation method thereof | |
| CN109505064B (en) | Ammonia gas sensor comprising polyacrylic acid/graphene oxide nanofiber film | |
| Yu et al. | Coaxial mechano‐electrospinning of oriented fibers with core‐shell structure for tactile sensing | |
| Manea et al. | Sensors from electrospun nanostructures | |
| CN105696090A (en) | Preparation method of air-filtering carbon nano-tube fibrous membrane | |
| CN105624919A (en) | Method for preparing polyvinyl fluoride polymer patterned film | |
| Chotimah et al. | Electrospun Nanofiber Poly (3, 4-ethylenedioxytriophene): poly (styrene sulfonate)/poly (vinyl alcohol) as Strain Sensor Application | |
| Adomavičiūtė et al. | The influence of main technological parameters on the diameter of poly (vinyl alcohol)(PVA) nanofibre and morphology of manufactured mat | |
| Santibenchakul et al. | Fabrication and characterization of conducting PANI nanofibers via electrospinning |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200603 Address after: 261000 building 10, Geer phase II Industrial Park, No. 102, Ronghua Road, Ronghua community, Xincheng street, Weifang High tech Zone, Weifang City, Shandong Province Applicant after: Weifang goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Applicant before: GOERTEK Inc. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |