CN110927219A - Gas sensitive material, preparation method thereof and manufacturing method of gas sensor - Google Patents
Gas sensitive material, preparation method thereof and manufacturing method of gas sensor Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 79
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000002360 preparation method Methods 0.000 title abstract description 11
- 239000007789 gas Substances 0.000 claims abstract description 152
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 58
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims abstract description 47
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims abstract description 47
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 35
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 239000002131 composite material Substances 0.000 claims abstract description 6
- 239000002086 nanomaterial Substances 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims abstract description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 21
- 238000003756 stirring Methods 0.000 claims description 21
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 20
- 238000001354 calcination Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 15
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 14
- 238000001027 hydrothermal synthesis Methods 0.000 claims description 13
- 239000002002 slurry Substances 0.000 claims description 10
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 claims description 7
- 239000008367 deionised water Substances 0.000 claims description 7
- 229910021641 deionized water Inorganic materials 0.000 claims description 7
- 238000000227 grinding Methods 0.000 claims description 7
- 235000006408 oxalic acid Nutrition 0.000 claims description 7
- XMVONEAAOPAGAO-UHFFFAOYSA-N sodium tungstate Chemical compound [Na+].[Na+].[O-][W]([O-])(=O)=O XMVONEAAOPAGAO-UHFFFAOYSA-N 0.000 claims description 7
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000005303 weighing Methods 0.000 claims description 7
- 229910021529 ammonia Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
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Abstract
The invention provides a gas-sensitive material, a preparation method thereof and a manufacturing method of a gas sensor, wherein the gas-sensitive material is a composite nano material of tungsten trioxide and tin dioxide, the tungsten trioxide is used as a substrate of the gas-sensitive material, and the tin dioxide accounts for 4-64% of the gas-sensitive material by mass percent. The gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas can detect ammonia gas at low temperature, and has lower detection limit on hydrogen sulfide gas at high temperature.
Description
Technical Field
The invention relates to the technical field of gas sensors, in particular to a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas, a preparation method of the gas-sensitive material and a manufacturing method of a gas sensor with the gas-sensitive material.
Background
In the field of gas sensors, semiconductor gas sensors have been rapidly developed and widely used due to their advantages of high sensitivity, simple structure, convenient use, low price, etc. And semiconductor gas sensors can be classified into sintering type, thin film type and thick film type sensors according to the fabrication process. The sintered sensor is widely applied at present, simple in process and low in price, but has the problems of difficulty in controlling a film, poor consistency, high energy consumption and the like. The thick film type sensor has the advantages of good stability and long service life, but has high power consumption.
Disclosure of Invention
The invention aims to provide a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas, which can detect ammonia gas at low temperature and has lower detection limit on hydrogen sulfide gas at high temperature.
It is another object of the invention to provide a WO-based MEMS device3/SnO2The thin film gas sensor can detect ammonia gas at low temperature, can be used for detecting hydrogen sulfide gas at high temperature, and has a lower detection limit.
Particularly, the invention provides a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas, wherein the gas-sensitive material is a composite nano material of tungsten trioxide and tin dioxide, the tungsten trioxide is used as a substrate of the gas-sensitive material, and the tin dioxide accounts for 4-64% of the gas-sensitive material by mass percent.
Further, the gas sensitive material detects ammonia gas with the concentration of 5ppm-200ppm at the temperature of 150 ℃ -180 ℃, and detects hydrogen sulfide gas with the concentration of 10ppb-500ppb at the temperature of 300 ℃ -350 ℃.
The invention also provides a preparation method of the gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas, which is used for preparing the gas-sensitive material in the embodiment, and the preparation method comprises the following steps:
weighing sodium tungstate, adding deionized water at room temperature, stirring and dissolving to form a first solution;
adding concentrated hydrochloric acid to the first solution and stirring to form a second solution;
adding oxalic acid and tin tetrachloride to the second solution and stirring to form a third solution;
transferring the third solution to a reaction kettle for hydrothermal reaction, and centrifuging and washing a product generated after the reaction;
and drying and calcining the washed product to obtain the gas-sensitive material compounded by tungsten trioxide and tin dioxide.
Further, in the step of forming the first solution, 0.5g to 3g of sodium tungstate is weighed, 20ml to 60ml of deionized water is added, and the stirring time is 5min to 20 min.
Further, in the step of forming the second solution, the amount of the concentrated hydrochloric acid is 1ml to 5ml, and the stirring time is 10min to 30 min.
Further, in the step of forming the third solution, the mass of the oxalic acid is 0.5g-2g, the mass of the tin tetrachloride is 0.2g-2g, and the stirring time is 15min-45 min.
Further, in the step of carrying out the hydrothermal reaction in the reaction kettle, the temperature of the hydrothermal reaction is 100-220 ℃, and the time of the hydrothermal reaction is 10-15 h.
Further, in the step of drying and calcining the washed product, the drying temperature is 60-80 ℃, the calcining time is 1-4 h, and the calcining temperature is 300-700 ℃.
The invention also provides a manufacturing method of the gas sensor for detecting ammonia gas and hydrogen sulfide gas, which comprises the following steps:
weighing the gas-sensitive material described in the above embodiment, and mixing, grinding and drying with isopropanol and ethylene glycol as solvents to form slurry;
the slurry was coated on a micro-heating plate and packaged to make a gas sensor.
Further, in the step of forming the slurry, weighing the gas sensitive material with the mass of 1.5g-3g, the isopropanol with the amount of 10ml-30ml, the ethylene glycol with the amount of 0.5ml-4ml, and the grinding time of 2h-8 h.
The gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas can detect ammonia gas at low temperature, and has lower detection limit on hydrogen sulfide gas at high temperature. The preparation method of the gas sensitive material is simple, the conditions are easy to control, and the gas sensitive material is suitable for large-area popularization and application.
Further, the manufacturing method of the gas sensor for detecting ammonia gas and hydrogen sulfide gas is based on MEMS technology, and the gas sensor manufactured by the manufacturing method has the advantages of miniaturization, easy integration, low power consumption and good consistency. The gas sensor manufactured by the manufacturing method can detect ammonia gas at low temperature, can be used for detecting hydrogen sulfide gas at high temperature, and has lower detection limit.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
fig. 1 is a flowchart of a method for producing a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas according to an embodiment of the present invention;
FIG. 2 is a graph showing the response of a gas sensitive material according to an embodiment of the present invention to ammonia gas;
FIG. 3 is a graph of the response of a gas sensitive material of an embodiment of the present invention to 200ppm ammonia at different operating temperatures;
FIG. 4 is a graph of the response of a gas sensor according to an embodiment of the present invention to different ammonia concentrations;
FIG. 5 is a graph of the response of a gas sensitive material of an embodiment of the present invention to different concentrations of hydrogen sulfide gas at 330 ℃;
FIG. 6 is a graph of the response of multiple gas sensors of an embodiment of the present invention to different concentrations of hydrogen sulfide gas at 330 ℃.
Detailed Description
The gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas in the embodiment of the invention is tungsten trioxide (WO)3) And tin dioxide (SnO)2) The composite nanomaterial of (1). The gas-sensitive material takes a tungsten trioxide material as a substrate, tin dioxide is doped on the tungsten trioxide material, and the mass percentage of the tin dioxide in the gas-sensitive material is 4% -64%, namely the mass percentage of the tin dioxide in the gas-sensitive material is 4% -64%. In the invention, the grain growth of the gas-sensitive material is controlled by regulating the doping amount of tin dioxide, the calcining temperature and the like, so that the prepared gas-sensitive material can detect ammonia (NH) at low temperature3) Hydrogen sulfide (H) at elevated temperature2S) has a lower detection limit.
Specifically, referring to fig. 2 to 6, wherein fig. 2 is a graph showing the response of the gas sensitive material of the embodiment of the present invention to ammonia gas, the response of the gas sensitive material of the present invention to ammonia gas of 5ppm to 200ppm was tested in fig. 2, and it can be seen from fig. 2 that WO3/SnO2The composite gas-sensitive material can detect 5ppm of ammonia gas, and the response value is gradually increased along with the increase of the gas concentration, so that an obvious concentration gradient is formed. Fig. 3 is a graph showing the response of the gas sensitive material of the embodiment of the present invention to 200ppm of ammonia gas at different operating temperatures, and the response of the gas sensitive material of the present invention to 200ppm of ammonia gas at different operating temperatures is tested in fig. 3, and it can be seen from fig. 3 that the response performance of the gas sensitive material is the same at the operating temperature of 150 ℃ -180 ℃, and the response performance is attenuated as the temperature is further increased. As can be seen from the combination of FIG. 2 and FIG. 3, the gas sensitive material of the present invention can detect ammonia gas with a concentration of 5ppm to 200ppm at low temperature, i.e., at a temperature of 150 ℃ to 180 ℃. FIG. 5 is a graph showing the response of the gas sensitive material of the embodiment of the present invention to different concentrations of hydrogen sulfide gas at 330 deg.C, FIG. 5 shows the response of the gas sensitive material of the present invention to 10ppb-500ppb H2S at 330 deg.C, and it can be seen from FIG. 5 that the gas sensitive material of the present invention can detect 10ppb of hydrogen sulfide gas at 330 deg.CAnd as the gas concentration increases, the response gradually increases, and a concentration gradient is obvious. The gas sensitive material can detect hydrogen sulfide gas with the concentration of 10ppb to 500ppb under the high temperature condition, namely the gas sensitive material is under the temperature condition of 300 ℃ to 350 ℃, preferably 330 ℃.
Therefore, the gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas can detect ammonia gas at low temperature, and has lower detection limit on hydrogen sulfide gas at high temperature.
The preparation method of the gas sensitive material for detecting ammonia gas and hydrogen sulfide gas, provided by the invention, is used for preparing the gas sensitive material in the embodiment, and comprises the following steps:
s1, weighing sodium tungstate, adding deionized water at room temperature, stirring and dissolving to form a first solution;
s2, adding concentrated hydrochloric acid into the first solution and stirring to form a second solution;
s3, adding oxalic acid and stannic chloride into the second solution and stirring to form a third solution;
s4, transferring the third solution to a reaction kettle for hydrothermal reaction, and centrifuging and washing a product generated after the reaction;
and S5, drying and calcining the washed product to obtain the gas-sensitive material compounded by tungsten trioxide and tin dioxide.
Specifically, referring to fig. 1, in the preparation method of the present invention, first, a certain amount of sodium tungstate (Na) may be weighed2WO4·2H2O), adding a certain amount of deionized water, and stirring to dissolve to form a first solution. Wherein the mass of the sodium tungstate is 0.5g-3g, the amount of the deionized water is 20ml-60ml, and the stirring time is 5min-20 min. Then, adding concentrated hydrochloric acid into the first solution while stirring to form a second solution, wherein the amount of the added concentrated hydrochloric acid can be 1ml-5ml, and the stirring time is 10min-30 min. Then, oxalic acid and tin tetrachloride (SnCl) were added to the second solution4·5H2O) is added, and stirring is carried out simultaneously to form a third solution, wherein the mass of the added oxalic acid is 0.5g-2g, and the mass of the added stannic chloride is0.2g-2g, and the stirring time is 15min-45 min. And then, transferring the third solution into a reaction kettle for hydrothermal reaction, wherein the temperature of the hydrothermal reaction is 100-220 ℃, and the time of the hydrothermal reaction is 10-15 h. And after the hydrothermal reaction is finished, centrifuging and washing a product generated after the reaction to wash the product generated after the reaction to be neutral. And finally, drying and calcining the washed product to prepare the gas sensitive material doped with the tin dioxide on the tungsten trioxide material. In the process of drying and calcining the washed product, the drying temperature is 60-80 ℃, the calcining time is 1-4 h, and the calcining temperature is 300-700 ℃.
In the preparation method of the gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas, WO can be controlled by regulating and controlling the doping amount of tin dioxide in the tungsten trioxide material, the calcining temperature and other conditions3/SnO2The grain growth of the composite nano material enables the prepared gas-sensitive material to detect NH3 at low temperature and has lower detection limit on H2S at high temperature.
The invention also provides a manufacturing method of the gas sensor for detecting ammonia gas and hydrogen sulfide gas, which comprises the following steps:
weighing the gas-sensitive material prepared in the above embodiment, and mixing, grinding and drying with isopropanol and ethylene glycol as solvents to form slurry;
the slurry was coated on a micro-heating plate and packaged to make a gas sensor.
Specifically, the method for manufacturing the gas sensor for detecting ammonia gas and hydrogen sulfide gas of the present invention is based on the MEMS (micro electro Mechanical Systems) technology, in the method for manufacturing the gas sensor for detecting ammonia gas and hydrogen sulfide gas, firstly, the gas sensitive material prepared in the embodiment is weighed, and a certain amount of isopropanol and glycol are added as solvents for mixing, grinding and drying, in the process, the mass of the gas sensitive material is weighed to be 1.5g-3g, the amount of isopropanol is 10ml-30ml, the amount of ethylene glycol is 0.5ml-4ml, the grinding time is 2h-8h, the gas sensor can be fabricated by coating the slurry on a micro-heating plate and packaging, and in the fabrication method, the consistency of the performance of the prepared gas sensor can be ensured by regulating the concentration of the slurry and adopting a coating process.
The gas sensor manufactured by the manufacturing method is subjected to performance test of response consistency, wherein a response curve graph of the gas sensor of the embodiment of the invention in fig. 4 to different ammonia concentrations is shown, in the test process of fig. 4, response curves of 14 gas sensors to 5ppm-200ppm ammonia are simultaneously tested, and the response consistency is very good as shown in fig. 4. FIG. 6 is a graph showing the response of the gas sensor of the embodiment of the present invention to different hydrogen sulfide gas concentrations at 330 ℃ in the test process of FIG. 6, in which 16 gas sensors were simultaneously tested for 10ppb-500ppb H2The S response, which is also very consistent as can be seen in fig. 6.
In summary, the gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas of the present invention can detect ammonia gas at low temperature and has a lower detection limit for hydrogen sulfide gas at high temperature. The preparation method of the gas sensitive material is simple, the conditions are easy to control, and the gas sensitive material is suitable for large-area popularization and application. The manufacturing method of the gas sensor for detecting ammonia gas and hydrogen sulfide gas is based on MEMS technology, and the gas sensor manufactured by the manufacturing method has the advantages of miniaturization, easy integration, low power consumption and good consistency. The gas sensor manufactured by the manufacturing method can detect ammonia gas at low temperature, has good anti-interference characteristic, can be used for detecting hydrogen sulfide gas at high temperature, and has low detection limit.
Thus, it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the invention have been illustrated and described in detail herein, many other variations or modifications consistent with the principles of the invention may be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the invention. Accordingly, the scope of the invention should be understood and interpreted to cover all such other variations or modifications.
Claims (10)
1. The gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas is characterized by being a composite nano material of tungsten trioxide and tin dioxide, wherein the tungsten trioxide is used as a substrate of the gas-sensitive material, and the tin dioxide accounts for 4-64% of the gas-sensitive material by mass.
2. The gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas as claimed in claim 1, wherein the gas-sensitive material detects ammonia gas with a concentration of 5ppm to 200ppm at a temperature of 150 ℃ to 180 ℃, and detects hydrogen sulfide gas with a concentration of 10ppb to 500ppb at a temperature of 300 ℃ to 350 ℃.
3. A method for producing a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas, for producing the gas-sensitive material as claimed in claim 1 or 2, characterized in that the production method comprises the steps of:
weighing sodium tungstate, adding deionized water at room temperature, stirring and dissolving to form a first solution;
adding concentrated hydrochloric acid to the first solution and stirring to form a second solution;
adding oxalic acid and tin tetrachloride to the second solution and stirring to form a third solution;
transferring the third solution to a reaction kettle for hydrothermal reaction, and centrifuging and washing a product generated after the reaction;
and drying and calcining the washed product to obtain the gas-sensitive material compounded by tungsten trioxide and tin dioxide.
4. The method for preparing the gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas according to claim 3, wherein in the step of forming the first solution, the mass of the sodium tungstate is weighed to be 0.5g-3g, the amount of the deionized water is added to be 20ml-60ml, and the stirring time is 5min-20 min.
5. The method for preparing a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas as claimed in claim 3, wherein in the step of forming the second solution, the amount of the concentrated hydrochloric acid is 1ml to 5ml, and the stirring time is 10min to 30 min.
6. The method for preparing a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas as claimed in claim 3, wherein in the step of forming the third solution, the mass of the oxalic acid is 0.5g to 2g, the mass of the tin tetrachloride is 0.2g to 2g, and the stirring time is 15min to 45 min.
7. The method for preparing the gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas according to claim 3, wherein in the step of performing the hydrothermal reaction in the reaction kettle, the temperature of the hydrothermal reaction is 100 ℃ to 220 ℃, and the time of the hydrothermal reaction is 10h to 15 h.
8. The method for preparing a gas-sensitive material for the detection of ammonia and hydrogen sulfide gas as claimed in claim 3, wherein in the step of drying and calcining the washed product, the drying temperature is 60 ℃ to 80 ℃, the calcining time is 1h to 4h, and the calcining temperature is 300 ℃ to 700 ℃.
9. A manufacturing method of a gas sensor for detecting ammonia gas and hydrogen sulfide gas is characterized by comprising the following steps:
weighing the gas sensitive material of claim 1 or 2, and mixing, grinding and drying with isopropanol and ethylene glycol as solvents to form a slurry;
the slurry was coated on a micro-heating plate and packaged to make a gas sensor.
10. The method for manufacturing a gas sensor of a gas-sensitive material for detecting ammonia gas and hydrogen sulfide gas as claimed in claim 9, wherein in the step of forming the slurry, the mass of the gas-sensitive material is measured to be 1.5g to 3g, the amount of isopropanol is measured to be 10ml to 30ml, the amount of ethylene glycol is measured to be 0.5ml to 4ml, and the grinding time is measured to be 2h to 8 h.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113030196A (en) * | 2021-02-25 | 2021-06-25 | 合肥微纳传感技术有限公司 | WO (WO)3Preparation method of gas-sensitive material, prepared gas-sensitive material and application thereof |
| CN113030196B (en) * | 2021-02-25 | 2022-09-30 | 微纳感知(合肥)技术有限公司 | WO (WO) 3 Preparation method of gas-sensitive material, prepared gas-sensitive material and application thereof |
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