CN110926533B - Device and method for measuring multiple parameters in laser damage in real time - Google Patents
Device and method for measuring multiple parameters in laser damage in real time Download PDFInfo
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- CN110926533B CN110926533B CN201911205096.4A CN201911205096A CN110926533B CN 110926533 B CN110926533 B CN 110926533B CN 201911205096 A CN201911205096 A CN 201911205096A CN 110926533 B CN110926533 B CN 110926533B
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Abstract
The invention discloses a device for measuring multiple parameters in laser damage in real time, which comprises a target spot instrument, a spectroscope, a spectrometer, a water-cooling integrating sphere and a target, wherein the water-cooling integrating sphere is provided with a first hole, a second hole and a third hole; the spectroscope is used for continuously receiving the laser beam and respectively outputting a reflected beam and a transmitted beam transmitted along a transmission light path; the target spot instrument is used for continuously receiving the reflected light beam and measuring the light spot parameters in real time; the target is used for continuously receiving the transmitted light beams which sequentially pass through the first hole and the second hole and reflecting the transmitted light beams to the inner wall of the water-cooled integrating sphere; wherein, the normal of the target forms an included angle with the transmission light path; the spectrometer is used for continuously detecting the transmission light rays subjected to diffuse reflection on the inner wall of the water-cooling integrating sphere through the third hole, and recording a target reflectivity signal and a target thermal radiation signal in real time. The invention also discloses a method for measuring the multiple parameters in the laser damage in real time. The invention can simultaneously measure a plurality of key important parameters in the laser damage process.
Description
Technical Field
The invention relates to the technical field of laser damage efficiency research, in particular to a device and a method for measuring multiple parameters in laser damage in real time.
Background
With the development of laser technology, laser damage performance has received more and more attention as a core key technology for laser equipment demonstration and prototyping. The laser damage process is a subject related to multiple subjects, and the problems of absorption, heating, softening and mass loss (pyrolysis, ablation, melting, sublimation and vaporization) of the material to the irradiation laser, material cratering and perforation, structure recess fracture, layer cracking or interlayer separation, mechanical denudation and the like are solved, the content coverage is wide, and the research difficulty is very high.
At the early stage, scholars at home and abroad develop relevant theoretical analysis and internal and external field damage effect test work aiming at the laser damage effect research, certain achievements are obtained, and the progress of the laser irradiation effect research work is promoted. However, the early laser irradiation effect test mainly studies the damage capability of different laser parameters to the target, usually acquires intuitive parameters such as breakdown time and size of a shot hole to represent the damage capability, or measures only single parameters such as temperature rise and ablation heat in the damage process. At present, research on a plurality of relevant important parameter real-time testing technologies in the laser damage process is blank, and how to acquire a plurality of important parameter data describing dynamic association in the laser damage process is a problem to be solved urgently.
Disclosure of Invention
In view of the defects in the prior art, the present invention provides a device and a method for measuring multiple parameters in laser damage in real time, which can simultaneously measure multiple key parameters in the laser damage process.
In order to achieve the above objects, in a first aspect, the present invention provides a device for measuring multiple parameters in laser damage in real time, the device includes a target spot instrument, a spectroscope, a spectrometer, a water-cooled integrating sphere and a target, the water-cooled integrating sphere is provided with a first hole, a second hole and a third hole, and the first hole and the second hole are symmetrically arranged with respect to a sphere center of the water-cooled integrating sphere;
the spectroscope is used for continuously receiving the laser beam and respectively outputting a reflected beam and a transmitted beam transmitted along a transmission light path;
the target spot instrument is used for continuously receiving the reflected light beam and measuring light spot parameters in real time;
the target is used for continuously receiving the transmitted light beams which sequentially pass through the first hole and the second hole and reflecting the transmitted light beams to the inner wall of the water-cooled integrating sphere; wherein, the normal of the target forms an included angle with the transmission light path;
the spectrometer is used for continuously detecting the transmission light rays subjected to diffuse reflection on the inner wall of the water-cooling integrating sphere through the third hole, and recording a target reflectivity signal and a target thermal radiation signal in real time.
In the technical scheme, a fourth hole is formed in the water-cooling integrating sphere, the device further comprises an attenuation sheet and a high-speed camera, the attenuation sheet is arranged between the fourth hole and the high-speed camera, and a camera shooting port of the high-speed camera faces the fourth hole and is used for recording target ablation back-spray characteristics and target damage morphology in real time.
In the above aspect, the apparatus further includes:
the device comprises a horizontally arranged gravity strain gauge, a laser device and a laser device, wherein one end of the gravity strain gauge is fixedly arranged, and the other end of the gravity strain gauge is bonded to the bottom of a target and is used for measuring the ablation mass loss rate of the target in real time; and/or
The impulse strain gauge is vertically arranged; one end of the impulse strain gauge is fixedly arranged, and the other end of the impulse strain gauge is bonded on one side of the target far away from the transmission light path and used for acquiring an impulse coupling coefficient in real time.
In the technical scheme, the value range of the included angle is more than 00 and less than or equal to 80.
In the technical scheme, the wall of the water-cooling integrating sphere is of a sandwich structure, circulating cooling liquid is arranged in the sandwich structure, a water inlet is formed in the upper portion of the sandwich structure, and a water outlet is formed in the lower portion of the sandwich structure.
In the technical scheme, the total opening area of the first hole, the second hole, the third hole and the fourth hole is less than 5% of the total surface area of the inner wall of the water-cooling integrating sphere.
In a second aspect, an embodiment of the present invention further provides a method for measuring multiple parameters in a laser damage in real time, where the method includes:
presetting a device for measuring multiple parameters in the laser damage in real time;
continuously emitting laser beams to a spectroscope, wherein the spectroscope continuously receives the laser beams and respectively outputs reflected beams and transmitted beams transmitted along a transmission light path;
continuously receiving the reflected light beam by using a target spot instrument and measuring light spot parameters in real time;
the target is used for continuously receiving the transmitted light beams which sequentially pass through the first hole and the second hole on the water-cooled integrating sphere, and the target reflects the received transmitted light beams to the inner wall of the water-cooled integrating sphere so as to generate diffuse reflection on the inner wall; wherein, the normal of the target forms an included angle with the transmission light path;
and continuously detecting the transmission light rays subjected to diffuse reflection on the inner wall of the water-cooling integrating sphere through the third hole by using a spectrometer, and recording a target reflectivity signal and a target thermal radiation signal in real time.
In the technical scheme, a fourth hole is formed in the water-cooled integrating sphere, the device further comprises an attenuation sheet and a high-speed camera, the attenuation sheet is arranged between the fourth hole and the high-speed camera, and a camera shooting port of the high-speed camera faces the fourth hole; the method further comprises the following steps:
and the high-speed camera is used for collecting the inner cavity of the water-cooling integrating sphere in real time through the fourth hole, and recording the target ablation back-spray object characteristic and the target damage morphology in real time.
In the above aspect, the apparatus includes a gravity strain gauge adhered to a bottom of the target, and the method includes:
the gravity strain gauge is used for measuring the ablation mass loss rate of the target in real time when the target is damaged by laser.
In the above solution, the apparatus includes an impulse strain gauge adhered to a side of the target away from the transmission light path, and the method includes:
measuring the impulse generated by target ablation in real time by using the impulse strain gauge;
acquiring impulse coupling coefficients in real time according to the light spot parameters and the impulses; the light spot parameters include: the power of the encircling laser, the power density distribution of light spots and the diameter of the encircling light beam.
Compared with the prior art, the invention has the advantages that:
the invention provides a device for measuring multiple parameters in laser damage in real time, which can measure multiple key important parameters at the same time in the laser damage process, such as: facula parameter, target reflectivity signal and target heat radiation signal, simultaneously, still can set up gravity foil gage and/or impulse foil gage on the target to and the outside of water-cooling integrating sphere sets up high-speed camera in order to obtain the damage parameter in real time, and the damage parameter includes: the ablation mass loss rate of the target, the impulse coupling coefficient, the ablation back-spray characteristics of the target and the damage appearance of the target. The device provided by the invention integrates multiple key important parameters needing to be measured simultaneously in laser damage on one device by utilizing the water-cooled integrating sphere and the holes on the water-cooled integrating sphere, breaks through the bottleneck that the key important parameters in the prior art are measured independently and cannot be measured synchronously at the same time, has simple and uncomplicated structure, is simple and easy to operate in a testing method, can detect the multiple key important parameters in the laser damage in real time, and can be used for researching the laser damage mechanism and efficiency.
Drawings
FIG. 1 is a schematic structural diagram of an apparatus for real-time measurement of multiple parameters in laser damage in an embodiment of the present invention;
in the figure: 1. a target spot instrument; 2. a beam splitter; 3. a spectrometer; 4. water-cooling the integrating sphere; 41. a first hole; 42. a second hole; 43. a third aperture; 44. a fourth aperture; 5. a target; 6. an attenuation sheet; 7. a high-speed camera; 8. a gravity strain gauge; 9. impulse strain gauges; 10. and (4) comprehensive data acquisition equipment.
Detailed Description
Embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
Referring to fig. 1, an embodiment of the present invention provides a device for measuring multiple parameters in a laser damage in real time, where the device includes a target spot meter 1, a spectroscope 2, a spectrometer 3, a water-cooled integrating sphere 4 and a target 5, where the water-cooled integrating sphere 4 is provided with a first hole 41, a second hole 42 and a third hole 43, the first hole 41 and the second hole 42 are symmetrically arranged with respect to a sphere center of the water-cooled integrating sphere 4, and the openings of the first hole 41 and the second hole 42 are the same in size; the spectroscope 2 is used for continuously receiving the laser beam and respectively outputting a reflected beam and a transmitted beam transmitted along a transmission light path; the target spot instrument 1 is used for continuously receiving the reflected light beam and measuring light spot parameters in real time; the target 5 is used for continuously receiving the transmitted light beams which sequentially pass through the first hole 41 and the second hole 42, namely the transmitted light beams damage the target 5 and reflect the transmitted light beams to the inner wall of the water-cooled integrating sphere 4; wherein, the normal of the target 5 forms an included angle with the transmission light path; the spectrometer 3 is used for continuously detecting the transmission light rays subjected to diffuse reflection on the inner wall of the water-cooling integrating sphere 4 through the third hole 43, and recording a target reflectivity signal and a target thermal radiation signal in real time.
The working principle of the invention is as follows:
continuously emitting a laser beam (having a wavelength of 1080nm, a wavelength accuracy of not less than 0.1nm, and an energy diameter of 84% of the beam of 3cm) to a beam splitter 2, the beam splitter 2 continuously receiving the laser beam and outputting a reflected beam and a transmitted beam propagating along a transmission optical path, respectively, the beam splitter 2 being an 5/5 beam splitter; wherein, the reflected light beam propagates to the target spot appearance 1 and hits on the target spot appearance 1, uses the target spot appearance 1 to continuously receive the reflected light beam and measure the facula parameter in real time, the facula parameter includes: the power of the encircling laser, the power density distribution of light spots and the diameter of the encircling light beam. The transmitted light beams are transmitted forwards and sequentially pass through a first hole 41 and a second hole 42 on the water-cooled integrating sphere 4 to be irradiated on the target 5, the target 5 is continuously irradiated by the transmitted light beams, part of the transmitted light beams are absorbed, the target 5 is subjected to temperature rise, carbonization and ablation reactions, an included angle is formed between the normal line of the target 5 and a transmission light path, and part of the transmitted light beams are reflected by the target 5, so that the reflected part of the transmitted light beams enter the water-cooled integrating sphere 4 through the second hole 42 and are subjected to diffuse reflection on the inner wall of the water-cooled integrating sphere 4 to form uniform reflected light signals, and a spectrometer at a third hole 43 continuously detects the reflected light signals subjected to diffuse reflection in real time to obtain reflectivity signals; in this embodiment, target 5 is 3mm thick carbon fiber composite flat board, and vertical placing, and in laser irradiation process, target 5 can temperature rise, burning, produces the heat radiation signal, and this heat radiation signal is also continuously surveyed and real-time recording by spectrum appearance 3 after a lot of diffuse reflection in the water-cooling integrating sphere. The embodiment of the invention integrates multiple key important parameters which need to be measured simultaneously in laser damage on one device, and breaks through the bottleneck that the key important parameters in the prior art are measured independently and cannot be measured synchronously for multiple key important parameters simultaneously.
In order to meet the measurement accuracy, the real-time reaction time of the spectrometer 6 is less than 0.01s, and the spectral resolution is better than 0.1 nm.
Further, the invention can also measure the damage parameters in real time on the basis of the method, and the damage parameters comprise: target ablation back spray characteristics, target damage morphology, target ablation mass loss rate, and impulse coupling coefficient.
Specifically, a fourth hole 44 is formed in the water-cooled integrating sphere 4, the device further comprises an attenuation sheet 6 and a high-speed camera 7, the attenuation sheet 6 is arranged between the fourth hole 44 and the high-speed camera 7, and a camera opening of the high-speed camera 7 faces the fourth hole 44 and is used for recording target ablation back-spray characteristics and target damage morphology in real time. The high-speed camera 7 can record the characteristics of the target ablation back-spray object, namely the particle size, distribution, speed and motion track of the ablation back-spray object and real-time data of the target damage appearance through the fourth hole 44 in a camera shooting state. Wherein the high-speed camera 7 has 300 million effective pixels and the frame frequency is more than 500 Hz.
Furthermore, the device also comprises a gravity strain gauge 8 which is horizontally arranged, one end of the gravity strain gauge 8 is fixedly arranged, and the other end of the gravity strain gauge 8 is adhered to the bottom of the target 5 and is used for measuring the ablation mass loss rate of the target in real time. In the process of damaging the target 5, the target 5 is ablated, weight loss occurs, and the ablation mass loss rate of the target can be measured in real time by using the gravity strain gauge 8.
Further, the device also comprises an impulse strain gauge 9 which is vertically arranged; one end of the impulse strain gauge 9 is fixedly arranged, and the other end of the impulse strain gauge is bonded on one side of the target 5 far away from the transmission light path and used for acquiring an impulse coupling coefficient in real time. The transmitted beam continuously irradiates the target 5, the target 5 is ablated and vaporized, impulse is generated in the steam generation process, and the impulse generated by target ablation is measured in real time by using the impulse strain gauge 9.
Specifically, the value range of the included angle is more than 00 and less than or equal to 80, and the laser reflected by the target 5 can be reflected to the inner wall of the water-cooling integrating sphere 4 by the range, so that the influence of laser overflow on the measurement precision is avoided. In this embodiment, the included angle is preferably 6 °. Also, during the destruction of the target 5, the target 5 is vertically arranged.
Referring to fig. 1, specifically, the wall of the water-cooling integrating sphere 4 is a sandwich structure, a circulating cooling liquid is arranged in the sandwich structure, a water inlet is arranged at the upper part of the sandwich structure, and a water outlet is arranged at the lower part of the sandwich structure. In the measuring process, the sandwich structure adopts cooling liquid for circulating refrigeration, a water inlet at the upper part flows in, and a water outlet at the lower part flows out, so that the laser energy of the inner wall of the water-cooling integrating sphere 4 is taken away quickly, and the water-cooling integrating sphere is prevented from being damaged by laser. Specifically, the temperature of the cooling liquid is 5-10 ℃, the inner diameter of the water-cooling integrating sphere is 15cm, the thickness of the sandwich structure is 1cm, the thickness of the single-layer wall is 1.5mm, wherein the sphere of the water-cooling integrating sphere 4 is made of an aluminum alloy material, the inner wall of the water-cooling integrating sphere is a gold-plated diffuse reflection layer, and the diameters of the first hole 41 and the second hole 42 are both 4.5 cm.
In order to meet the requirement of measurement accuracy, the total opening area of the first hole 41, the second hole 42, the third hole 43 and the fourth hole 44 is less than 5% of the total surface area of the inner wall of the water-cooled integrating sphere 4.
The embodiment of the invention also provides a comprehensive data acquisition device which is connected with the target spot instrument 1, the spectrometer 3, the high-speed camera 7, the gravity strain gauge 8 and the impulse strain gauge 9, can uniformly display, manage and analyze all the acquired parameters, can analyze and process a plurality of key important parameters acquired at the same time, and breaks through the bottleneck that the key important parameters in the prior art can not be simultaneously and synchronously measured due to independent measurement.
In summary, the most preferred embodiment of the present invention can test the spot parameters, the optical characteristics, and the damage parameters in real time during the laser damage process. The light spot parameters are the power of the encircling laser, the power density distribution of the light spot and the diameter of the encircling light beam. The optical characteristics are a target reflectivity signal and a target thermal emission signal. The damage parameters are target ablation back-spray characteristics, target damage morphology, target ablation mass loss rate and impulse coupling coefficient. The embodiment of the invention integrates various parameters needing real-time measurement in laser damage on one device, can measure various key important parameters at the same time, has simple and uncomplicated structure and is beneficial to the research on laser damage mechanism and efficiency.
The embodiment of the invention also provides a method for measuring multiple parameters in laser damage in real time, which comprises the following steps:
presetting a device for measuring multiple parameters in the laser damage in real time;
continuously emitting laser beams to the spectroscope 2, wherein the spectroscope 2 continuously receives the laser beams and respectively outputs reflected beams and transmitted beams transmitted along a transmission light path;
continuously receiving the reflected light beam by using a target spot instrument 1 and measuring light spot parameters in real time;
the target 5 is used for continuously receiving the transmitted light beams which sequentially pass through the first hole 41 and the second hole 42 on the water-cooled integrating sphere 4, and the target 5 reflects the received transmitted light beams to the inner wall of the water-cooled integrating sphere 4 so as to generate diffuse reflection on the inner wall; wherein, the normal of the target 5 forms an included angle with the transmission light path;
and continuously detecting the transmission light rays subjected to diffuse reflection on the inner wall of the water-cooled integrating sphere 4 through the third hole 43 by using the spectrometer 3, and recording a target reflectivity signal and a target thermal radiation signal in real time.
Furthermore, a fourth hole 44 is formed in the water-cooled integrating sphere 4, the device further comprises an attenuation sheet 6 and a high-speed camera 7, the attenuation sheet 6 is arranged between the fourth hole 44 and the high-speed camera 7, and a camera shooting port of the high-speed camera 7 faces the fourth hole 44; the method further comprises the following steps:
and continuously collecting the inner cavity of the water-cooling integrating sphere 4 through the fourth hole 44 by using the high-speed camera 7, and recording the target ablation back-spray characteristic and the target damage morphology in real time.
Further, the device comprises a gravity strain gauge 8 bonded to the bottom of the target 5, the method comprising:
the gravity strain gauge 8 is used to measure the target ablation mass loss rate in real time as the laser damages the target 5.
Still further, the apparatus comprises an impulse strain gauge 9 bonded to a side of the target 5 remote from the transmission light path, the method comprising:
measuring the impulse generated by target ablation in real time when the target 5 is damaged by laser by using the impulse strain gauge 9;
acquiring impulse coupling coefficients in real time according to the light spot parameters and the impulses; the light spot parameters include: the power of the encircling laser, the power density distribution of light spots and the diameter of the encircling light beam.
It should be noted that, the specific implementation of the measurement method in this embodiment has been described in detail in the above corresponding measurement apparatus embodiment, and therefore, the detailed description is not repeated.
The present invention is not limited to the above-mentioned preferred embodiments, and any other products in various forms can be obtained by anyone with the teaching of the present invention, but any changes in the shape or structure thereof, which have the same or similar technical solutions as the present invention, are within the protection scope.
Claims (5)
1. The device for measuring the multiple parameters of the laser damage in real time is characterized by comprising a target spot instrument (1), a spectroscope (2), a spectrometer (3), a water-cooling integrating sphere (4) and a target (5), wherein the water-cooling integrating sphere (4) is provided with a first hole (41), a second hole (42) and a third hole (43), the first hole (41) and the second hole (42) are symmetrically arranged relative to the sphere center of the water-cooling integrating sphere (4), the wall of the water-cooling integrating sphere (4) is of an interlayer structure, circulating cooling liquid is arranged in the interlayer structure, a water inlet is formed in the upper portion of the interlayer structure, and a water outlet is formed in the lower portion of the interlayer structure;
the spectroscope (2) is used for continuously receiving the laser beam and respectively outputting a reflected beam and a transmitted beam transmitted along a transmission light path;
the target spot instrument (1) is used for continuously receiving the reflected light beam and measuring light spot parameters in real time;
the target (5) is used for continuously receiving the transmitted light beams which sequentially pass through the first hole (41) and the second hole (42) and reflecting the transmitted light beams to the inner wall of the water-cooled integrating sphere (4); wherein the normal of the target (5) forms an included angle with the transmission light path; the value range of the included angle is more than 0 degree and less than or equal to 8 degrees;
the spectrometer (3) is used for continuously detecting the transmission light rays subjected to diffuse reflection on the inner wall of the water-cooling integrating sphere (4) through the third hole (43), and recording a target reflectivity signal and a target thermal radiation signal in real time;
the device further comprises:
the device comprises a horizontally arranged gravity strain gauge (8), wherein one end of the gravity strain gauge (8) is fixedly arranged, and the other end of the gravity strain gauge is bonded to the bottom of a target (5) and used for measuring the ablation mass loss rate of the target in real time; and/or
The impulse strain gauge (9) is vertically arranged; one end of the impulse strain gauge (9) is fixedly arranged, and the other end of the impulse strain gauge is bonded to one side, away from the transmission light path, of the target (5) and used for acquiring an impulse coupling coefficient in real time;
wherein the step of obtaining the impulse coupling coefficient comprises: measuring the impulse generated by target ablation in real time by using the impulse strain gauge (9); acquiring impulse coupling coefficients in real time according to the light spot parameters and the impulses; the light spot parameters include: the power of the encircling laser, the power density distribution of light spots and the diameter of encircling light beams;
a fourth hole (44) is formed in the water-cooled integrating sphere (4), the device further comprises an attenuation sheet (6) and a high-speed camera (7), the attenuation sheet (6) is arranged between the fourth hole (44) and the high-speed camera (7), and a camera shooting port of the high-speed camera (7) faces the fourth hole (44) and is used for recording target ablation back-spray characteristics and target damage morphology in real time;
the total opening area of the first hole (41), the second hole (42), the third hole (43) and the fourth hole (44) is less than 5% of the total surface area of the inner wall of the water-cooled integrating sphere (4).
2. A method for measuring multiple parameters in laser damage in real time, which is characterized by comprising the following steps:
presetting the device for measuring multiple parameters in laser damage in real time according to claim 1;
continuously emitting laser beams to the spectroscope (2), wherein the spectroscope (2) continuously receives the laser beams and respectively outputs reflected beams and transmitted beams transmitted along a transmission light path;
continuously receiving the reflected light beam by using a target spot instrument (1) and measuring a light spot parameter in real time;
the target (5) is used for continuously receiving the transmitted light beams which sequentially pass through a first hole (41) and a second hole (42) on the water-cooled integrating sphere (4), and the target (5) reflects the received transmitted light beams to the inner wall of the water-cooled integrating sphere (4) so as to generate diffuse reflection on the inner wall; wherein the normal of the target (5) forms an included angle with the transmission light path;
and continuously detecting the transmission light rays subjected to diffuse reflection on the inner wall of the water-cooled integrating sphere (4) through the third hole (43) by using a spectrometer (3), and recording a target reflectivity signal and a target thermal radiation signal in real time.
3. The method for measuring the multiparameters in the laser damage in real time as claimed in claim 2, wherein a fourth hole (44) is formed in the water-cooled integrating sphere (4), the device further comprises an attenuation sheet (6) and a high-speed camera (7), the attenuation sheet (6) is arranged between the fourth hole (44) and the high-speed camera (7), and a camera port of the high-speed camera (7) faces the fourth hole (44); the method further comprises the following steps:
and continuously collecting the inner cavity of the water-cooling integrating sphere (4) through the fourth hole (44) by using the high-speed camera (7), and recording the target ablation back-spray characteristic and the target damage morphology in real time.
4. A method of real-time measurement of multiparameters in laser damage as defined in claim 3, wherein the device comprises a gravity strain gauge (8) bonded to the bottom of the target (5), the method comprising:
the gravity strain gauge (8) is used to measure the target ablation mass loss rate in real time when the target (5) is damaged by laser.
5. A method of real-time measurement of multiparameters in laser damage as claimed in claim 2 or 3, wherein said device comprises an impulse strain gauge (9) bonded to a side of said target (5) remote from said transmission light path, said method comprising:
measuring the impulse generated by target ablation in real time by using the impulse strain gauge (9);
acquiring impulse coupling coefficients in real time according to the light spot parameters and the impulses; the light spot parameters include: the power of the encircling laser, the power density distribution of light spots and the diameter of the encircling light beam.
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