CN110917841B - Waste gas treatment system used in electroplating process and working method thereof - Google Patents

Waste gas treatment system used in electroplating process and working method thereof Download PDF

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CN110917841B
CN110917841B CN201911007488.XA CN201911007488A CN110917841B CN 110917841 B CN110917841 B CN 110917841B CN 201911007488 A CN201911007488 A CN 201911007488A CN 110917841 B CN110917841 B CN 110917841B
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CN110917841A (en
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金驰
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Anhui Hongyuan electroplating surface treatment Co.,Ltd.
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Anhui Hongyuan Electroplating Surface Treatment Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75Multi-step processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77Liquid phase processes
    • B01D53/78Liquid phase processes with gas-liquid contact
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes

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Abstract

本发明涉及一种用于电镀工艺过程中的废气处理系统及其工作方法,包括:处理腔室、处理器;处理腔室包括抽气模块、反应模块;处理腔室上设置有导气口,导气口贯通处理腔室;抽气模块包括循环泵、抽气管道;抽气管道上设置有若干第一进气口;抽气管道内设置有抽气内管道,抽气管道套设于抽气内管道外,抽气内管道上设置有第二进气口;反应模块包括光化学反应装置、氧化装置、触媒层;触媒层设置于第二进气口上,触媒层用于覆盖第二进气口,电镀废气穿过触媒层并与触媒层进行反应;光化学反应装置环绕第二进气口的内侧设置;氧化装置设置于抽气内管道中,氧化装置包括氧化喷头与输液管道,氧化喷头与处理器连接。

Figure 201911007488

The invention relates to a waste gas treatment system used in an electroplating process and a working method thereof, comprising: a treatment chamber and a processor; the treatment chamber includes an air extraction module and a reaction module; The air outlet runs through the processing chamber; the air extraction module includes a circulation pump and an air extraction pipeline; a plurality of first air inlets are arranged on the air extraction pipeline; an air extraction inner pipeline is arranged in the air extraction pipeline, and the air extraction pipeline is sleeved outside the air extraction inner pipeline , a second air inlet is arranged on the inner exhaust pipe; the reaction module includes a photochemical reaction device, an oxidation device, and a catalyst layer; the catalyst layer is arranged on the second air inlet, and the catalyst layer is used to cover the second air inlet, and the electroplating exhaust gas Passing through the catalyst layer and reacting with the catalyst layer; the photochemical reaction device is arranged around the inner side of the second air inlet; the oxidizing device is arranged in the inner pipeline of the gas extraction, and the oxidizing device comprises an oxidizing nozzle and an infusion pipeline, and the oxidizing nozzle is connected with the processor.

Figure 201911007488

Description

Waste gas treatment system used in electroplating process and working method thereof
Technical Field
The invention relates to electroplating waste gas treatment, in particular to a waste gas treatment system used in an electroplating process and a working method thereof.
Background
Electroplating is a small but indispensable basic technological industry in national economy, and is also a heavily polluted industry, and waste gas, waste water and waste residues generated by electroplating seriously influence the life and health of people.
Various additives and complexes in the formula of the electroplating process solution are dazzling. In addition, at present, a few plating species can not eliminate cyanide in a short period, so that cyanide-containing electroplating still exists in electroplating of some special products. Especially, the increase of the acid and alkali dosage during the surface treatment and deplating before plating and the like, which finally still inevitably generates a large amount of waste gas in the electroplating production process. The main components are metal dust, acid-base waste gas, organic waste gas, chromic acid mist and various waste gases emitted by heating various electroplating bath solutions, including ammonia-containing waste gas, cyanogen-containing waste gas and the like.
At present, an exhaust system is installed to convey polluted waste gas to a gas purification system so as to achieve the purpose of removing toxic and harmful gases. In the treatment of acid waste gas, the main method for purifying the acid waste gas is to spray the acid waste gas with three-stage alkali liquor and discharge the acid waste gas through a chimney.
However, it cannot solve the problem of immediately treating the exhaust gas after extracting the exhaust gas, and if the exhaust gas overflows in the transmission process, the environment and the human safety in the environment will be affected.
Disclosure of Invention
The purpose of the invention is as follows:
in view of the problems mentioned in the background art, the present invention provides an exhaust gas treatment system for use in an electroplating process and a method for operating the same.
The technical scheme is as follows:
an effluent treatment system for use in an electroplating process, comprising: the device comprises a processing chamber, a processor, an air pumping module and a reaction module; the processing chamber is provided with an air guide port which penetrates through the processing chamber;
the air extraction module comprises a circulating pump and an air extraction pipeline; the air exhaust pipeline is arranged on the outer side of the processing chamber and is connected with the circulating pump, and the circulating pump is connected with the processor; the processor outputs an opening signal or a closing signal to the circulating pump, and the circulating pump is opened or closed according to an instruction of the processor; the circulating pump pumps electroplating waste gas through the air pumping pipeline;
the air extraction pipeline is provided with a plurality of first air inlets, the first air inlets are uniformly distributed on one side of the air extraction pipeline, and the first air inlets are used for the entry of electroplating waste gas;
an air exhaust inner pipeline is arranged in the air exhaust pipeline, the air exhaust pipeline is sleeved outside the air exhaust inner pipeline, a second air inlet is arranged on the air exhaust inner pipeline, and the position of the second air inlet is not corresponding to that of the first air inlet;
the reaction module comprises a photochemical reaction device, an oxidation device and a catalyst layer;
the catalyst layer is arranged on the second air inlet and used for covering the second air inlet, and the electroplating waste gas passes through the catalyst layer and reacts with the catalyst layer; the photochemical reaction device is arranged around the inner side of the second air inlet and used for providing illumination for the catalyst layer to promote the reaction of the catalyst layer and electroplating waste gas;
the oxidation device is arranged in the air exhaust inner pipeline and comprises an oxidation spray head and a liquid conveying pipeline, the liquid conveying pipeline is connected with an oxidant storage tank, the liquid conveying pipeline outputs oxidant in the oxidant storage tank to the oxidation spray head, and the oxidation spray head sprays the oxidant into the air exhaust inner pipeline; the oxidation sprayer is connected with the processor, the processor outputs an opening signal or a closing signal to the oxidation sprayer, and the oxidation sprayer executes opening or closing operation according to an instruction of the processor.
As a preferred mode of the present invention, the processing chamber includes a processing module therein, the processing module includes a reaction tank and a vent pipe, the internal pumping pipeline is communicated with the vent pipe, and the vent pipe is communicated with the reaction tank; the reaction tank is internally stored with a reaction medicament, and the reaction medicament is used for reacting with electroplating waste gas.
As a preferable mode of the present invention, the reaction tank includes at least two reaction tanks, and a monitoring device is disposed in the reaction tank and connected to the processor;
the number of the vent pipes corresponds to that of the reaction tanks one by one, and the air exhaust inner pipeline is communicated with only one vent pipe at the same time; a switching device is arranged at the joint of the vent pipe and the air exhaust inner pipeline and is used for switching the connection of the air exhaust inner pipeline and different vent pipes;
the monitoring device outputs the concentration of the reaction medicament to the processor, if the concentration is lower than a preset concentration threshold value, the processor outputs a switching signal to the switching device, and the switching device switches the vent pipe connected with the air exhaust inner pipeline.
As a preferred mode of the invention, an updating module is arranged in the reaction tank, the updating module comprises a water suction pump, a water suction port and a water diversion pipe, the water suction pump is connected with the processor, the water suction port is arranged at the bottom of the reaction tank, the water diversion pipe is connected with the water suction port, and the water suction pump sucks out the solution in the reaction tank through the water diversion pipe;
and if the concentration of the solution monitored by the monitoring device is lower than a preset concentration threshold value, the processor outputs a starting signal to the water suction pump, and the water suction pump is started and extracts the solution in the reaction tank.
As a preferred mode of the present invention, a recovery module is disposed in the air exhaust pipeline, and the recovery module includes a sealing layer, a recovery port, and a drainage tube; the closed layer is arranged at the bottom of the air exhaust pipeline and used for closing the bottom of the air exhaust pipeline, the recovery port is arranged on the closed layer and used for collecting liquid in the air exhaust pipeline; the drainage tube is arranged in the closed layer, and the drainage tube leads out liquid in the closed layer to a waste liquid collecting position.
A method of operating an exhaust gas treatment system for use in an electroplating process, comprising the steps of:
the processor outputs a starting signal to the circulating pump, the circulating pump is started, and the circulating pump extracts electroplating waste gas from the air extraction pipeline;
the processor outputs a starting signal to the photochemical reaction device, the photochemical reaction device is started, and light irradiation is output to the catalyst layer;
the processor outputs a starting signal to the oxidation nozzle, the oxidation nozzle is started, and the oxidation nozzle sprays oxidant into the air exhaust pipeline.
The method comprises the following steps:
the monitoring device monitors the concentration of the solution in the reaction tank, generates a concentration value and outputs the concentration value to the processor;
the processor receives the real-time concentration value and compares the real-time concentration value with a preset concentration threshold value;
if the concentration value is lower than the preset concentration threshold value, the processor outputs a switching signal to the switching device;
the switching device switches the vent pipe connected with the air exhaust inner pipeline.
As a preferred embodiment of the present invention, if the concentration value is lower than the preset concentration threshold, the method further includes the following steps:
the processor outputs a starting signal to the water pump, and the water pump is started;
the water pump pumps the solution in the reaction tank through the water pumping port and the water conduit.
The invention realizes the following beneficial effects:
the electroplating waste gas is extracted and treated through the air extraction module and the reaction module. The photochemical reaction device is combined with the catalyst layer to improve the treatment efficiency of the electroplating waste gas, the treatment range of the electroplating waste gas is enlarged, the oxidation device is matched, the electroplating waste gas is extracted into the air exhaust pipeline and then is treated in real time, and the treatment efficiency is improved. The reaction tank in the treatment chamber prolongs the reaction time of the electroplating waste gas, avoids incomplete reaction of the electroplating waste gas and avoids environmental pollution caused by discharge.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
FIG. 1 is a schematic view of an exhaust gas treatment system for use in an electroplating process according to the present invention;
FIG. 2 is a schematic view of an exhaust line of an exhaust gas treatment system for use in an electroplating process according to the present invention;
FIG. 3 is a schematic cross-sectional view of an exhaust line of an exhaust gas treatment system for use in an electroplating process according to the present invention;
FIG. 4 is a schematic cross-sectional view of an exhaust treatment system for use in an electroplating process according to the present invention;
FIG. 5 is a schematic view of a switching device for an exhaust gas treatment system used in an electroplating process according to the present invention;
FIG. 6 is a schematic view of a processing chamber of an exhaust treatment system for use in an electroplating process according to the present invention.
1. The device comprises a processing chamber, 2, an air exhaust pipeline, 21, a first air inlet, 3, an air exhaust inner pipeline, 31, a second air inlet, 32, a catalyst layer, 33, a photochemical reaction device, 34, an oxidation spray head, 4, a vent pipe, 5, a reaction tank and 6, a switching device.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example one
Reference is made to fig. 1-4 for example.
An effluent treatment system for use in an electroplating process, comprising: a processing chamber (1) and a processor.
The exhaust gas treatment system also comprises an air extraction module and a reaction module. The processing chamber is provided with an air guide port which penetrates through the processing chamber.
The air extraction module comprises a circulating pump and an air extraction pipeline 2. The air exhaust pipeline 2 is arranged on the outer side of the processing chamber, the air exhaust pipeline 2 is connected with the circulating pump, and the circulating pump is connected with the processor. The processor outputs an opening signal or a closing signal to the circulating pump, and the circulating pump is opened or closed according to an instruction of the processor. The circulating pump pumps electroplating waste gas through the air pumping pipeline 2.
The circulating pump is connected with air exhaust pipeline 2, and air exhaust pipeline 2 distributes in electroplating the environment, if there are a plurality of plating baths, then air exhaust pipeline 2 encircles the plating bath setting, improves electroplating waste gas's suction efficiency, avoids electroplating waste gas to disperse in the production environment.
The circulating pump can set up at least two wind-forces that improve the extraction to and avoid the mechanical fault of circulating pump to cause and can not extract electroplating waste gas.
A plurality of first air inlets 21 are arranged on the air exhaust pipeline 2, the first air inlets 21 are uniformly distributed on one side of the air exhaust pipeline 2, and the first air inlets 21 are used for allowing electroplating waste gas to enter.
The first air inlet 21 is disposed on the top or the side of the air exhaust duct 2, and if there is a plating tank, the first air inlet 21 faces the plating tank, and the plating waste gas is extracted.
An inner air exhaust pipeline 3 is arranged in the air exhaust pipeline 2, the air exhaust pipeline 2 is sleeved outside the inner air exhaust pipeline 3, a second air inlet 31 is arranged on the inner air exhaust pipeline 3, and the position of the second air inlet 31 is not corresponding to that of the first air inlet 21.
The inner air exhaust pipeline 3 is sleeved in the air exhaust pipeline 2, and the diameter of the inner air exhaust pipeline 3 is smaller than that of the air exhaust pipeline 2. The position of the second air inlet 31 can be arranged at the bottom or the side of the exhaust inner pipe 3, and the first air inlet 21 and the second air inlet 31 are not at the same corresponding position.
The reaction module comprises a photochemical reaction device 33, an oxidation device and a catalyst layer 32.
The catalyst layer 32 is disposed on the second air inlet 31, the catalyst layer 32 is used for covering the second air inlet 31, and the electroplating waste gas passes through the catalyst layer 32 and reacts with the catalyst layer 32. The photochemical reaction device 33 is disposed around the inner side of the second gas inlet 31, and the photochemical reaction device 33 is used for providing light to the catalyst layer 32 to promote the reaction between the catalyst layer 32 and the electroplating waste gas.
The catalyst layer 32 may be a dielectric layer containing a reactive material, and the catalyst layer 32 is capable of decomposing and contacting the plating waste gas after receiving the irradiation of the photo-chemical reaction device 33. The catalyst layer 32 can be replaced after being worn.
The photochemical reaction device 33 may be an ultraviolet lamp or an irradiation lamp of a specific wavelength.
The oxidation device is arranged in the exhaust inner pipeline 3, the oxidation device comprises an oxidation spray head 34 and a liquid conveying pipeline, the liquid conveying pipeline is connected with an oxidant storage tank, the liquid conveying pipeline outputs oxidant in the oxidant storage tank to the oxidation spray head 34, and the oxidation spray head 34 sprays the oxidant into the exhaust inner pipeline 3. The oxidation nozzle 34 is connected to the processor, the processor outputs an opening signal or a closing signal to the oxidation nozzle 34, and the oxidation nozzle 34 performs an opening or closing operation according to an instruction of the processor.
The oxidizer storage tank may store an oxidizer, which may be an alkaline substance, for neutralizing the plating off-gas. The oxidizing nozzle 34 sprays an oxidizing agent into the exhaust duct 2 to react with the plating waste gas that has come into contact therewith.
The processor outputs a starting signal to the circulating pump, the circulating pump is started, and the circulating pump extracts electroplating waste gas from the air extraction pipeline 2.
The processor outputs an on signal to the photochemical reaction device 33, and the photochemical reaction device 33 is turned on to output light to the catalyst layer 32.
The processor outputs an opening signal to the oxidation nozzle 34, the oxidation nozzle 34 is opened, and the oxidation nozzle 34 sprays the oxidant into the air exhaust pipeline 2.
Example two
Reference is made to fig. 5-6 for example.
The present embodiment is substantially the same as the previous embodiments, except that, as a preferred mode of the present embodiment, the processing chamber 1 includes a processing module, the processing module includes a reaction chamber 5 and a vent pipe 4, the pumping inner pipe 3 is communicated with the vent pipe 4, and the vent pipe 4 is communicated with the reaction chamber 5. The reaction tank 5 stores a reaction agent for reacting with the electroplating waste gas.
The electroplating waste gas in the pumping inner pipeline 3 is output to the vent pipe 4, and the vent pipe 4 introduces the electroplating waste gas into the reaction tank 5. The plating waste gas reacts with the solution in the reaction cell 5.
As a preferable mode of this embodiment, the reaction tank 5 includes at least two reaction tanks, and a monitoring device is disposed in the reaction tank 5, and the monitoring device is connected to the processor.
The monitoring device can be a pH value monitor or an ion concentration monitor, and the solubility of the solution is monitored by monitoring specified components in the solution.
The number of the vent pipes 4 corresponds to that of the reaction tanks 5, and the air exhaust inner pipeline 3 is communicated with only one vent pipe 4 at the same time. A switching device 6 is arranged at the joint of the air pipe 4 and the air exhaust inner pipeline 3, and the switching device 6 is used for switching the connection of the air exhaust inner pipeline 3 and different air pipes 4.
The switching device 6 can be a three-way valve or a multi-way valve which can switch the communicated pipelines.
The monitoring device outputs the concentration of the reaction medicament to the processor, if the concentration is lower than a preset concentration threshold value, the processor outputs a switching signal to the switching device 6, and the switching device 6 switches the vent pipe 4 connected with the air exhaust inner pipeline 3.
The preset concentration threshold value can be set according to the type of the solution, the effective substances in the solution are consumed after the solution reacts with the electroplating waste gas, and the concentration of the effective substances in the solution can be obtained by monitoring the concentration of the effective substances. If the concentration is lower than the preset concentration threshold, the solution in the reaction tank 5 needs to be replaced.
The monitoring device monitors the concentration of the solution in the reaction tank 5, generates a concentration value and outputs the concentration value to the processor.
The processor receives the real-time concentration value and compares the real-time concentration value with a preset concentration threshold value.
If the concentration value is lower than the preset concentration threshold value, the processor outputs a switching signal to the switching device 6.
The switching device 6 switches the air pipe 4 connected with the air exhaust inner pipeline 3.
As an optimal mode of this embodiment, be provided with the update module in the reaction tank 5, the update module includes the suction pump, draws water mouthful, leading water pipe, the suction pump with the treater is connected, draw water mouthful set up in the bottom of reaction tank 5, the leading water pipe with draw water mouthful and connect, the suction pump passes through the leading water pipe is extracted the solution in with reaction tank 5.
And if the concentration of the solution monitored by the monitoring device is lower than a preset concentration threshold value, the processor outputs a starting signal to the water suction pump, and the water suction pump is started and extracts the solution in the reaction tank 5.
The monitoring device monitors the concentration of the solution in the reaction tank 5, generates a concentration value and outputs the concentration value to the processor.
The processor receives the real-time concentration value and compares the real-time concentration value with a preset concentration threshold value.
If the concentration value is lower than the preset concentration threshold value, the processor outputs a starting signal to the water suction pump, and the water suction pump is started.
The water pump pumps the solution in the reaction tank 5 through the water pumping port and the water conduit.
EXAMPLE III
The present embodiment is substantially the same as the above embodiments, except that, as a preferable mode of the present embodiment, a recycling module is disposed in the air exhaust duct 2, and the recycling module includes a sealing layer, a recycling port, and a drainage tube. The sealing layer is arranged at the bottom of the air exhaust pipeline 2 and used for sealing the bottom of the air exhaust pipeline 2, the recovery port is arranged on the sealing layer and used for collecting liquid in the air exhaust pipeline 2. The drainage tube is arranged in the closed layer, and the drainage tube leads out liquid in the closed layer to a waste liquid collecting position.
The seal coat is used for separating liquid and electroplating waste gas, and the recovery mouth is used for the infiltration of liquid, and the drainage tube is embedded in exhaust duct 2 and is carried out the drainage to liquid.
Example four
A method of operating an exhaust gas treatment system for use in an electroplating process, comprising the steps of:
the processor outputs a starting signal to the circulating pump, the circulating pump is started, and the circulating pump extracts electroplating waste gas from the air extraction pipeline 2.
The processor outputs an on signal to the photochemical reaction device 33, and the photochemical reaction device 33 is turned on to output light to the catalyst layer 32.
The processor outputs an opening signal to the oxidation nozzle 34, the oxidation nozzle 34 is opened, and the oxidation nozzle 34 sprays the oxidant into the air exhaust pipeline 2.
As a preferable mode of the present embodiment, the method includes the steps of:
the monitoring device monitors the concentration of the solution in the reaction tank 5, generates a concentration value and outputs the concentration value to the processor.
The processor receives the real-time concentration value and compares the real-time concentration value with a preset concentration threshold value.
If the concentration value is lower than the preset concentration threshold value, the processor outputs a switching signal to the switching device 6.
The switching device 6 switches the air pipe 4 connected with the air exhaust inner pipeline 3.
As a preferable mode of this embodiment, if the concentration value is lower than the preset concentration threshold, the method further includes the following steps:
the processor outputs a starting signal to the water suction pump, and the water suction pump is started.
The water pump pumps the solution in the reaction tank 5 through the water pumping port and the water conduit.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and are intended to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims (7)

1.一种用于电镀工艺过程中的废气处理系统,其特征在于,包括:处理腔室(1)、处理器、抽气模块以及反应模块;所述处理腔室(1)上设置有导气口,所述导气口贯通所述处理腔室(1);1. A waste gas treatment system used in an electroplating process, characterized in that it comprises: a treatment chamber (1), a processor, an air extraction module and a reaction module; the treatment chamber (1) is provided with a guide an air port, the air guide port penetrates the processing chamber (1); 所述抽气模块包括循环泵、抽气管道(2);所述抽气管道(2)设置于所述处理腔室外侧,所述抽气管道(2)与所述循环泵连接,所述循环泵与所述处理器连接;所述处理器向所述循环泵输出开启信号或关闭信号,所述循环泵根据所述处理器的指令开启或关闭;所述循环泵通过所述抽气管道(2)抽取电镀废气;The air extraction module includes a circulation pump and an air extraction pipeline (2); the air extraction pipeline (2) is arranged on the outside of the processing chamber, and the air extraction pipeline (2) is connected to the circulation pump, and the air extraction pipeline (2) is connected to the circulation pump. The circulating pump is connected with the processor; the processor outputs an opening signal or a closing signal to the circulating pump, and the circulating pump is turned on or off according to the instruction of the processor; the circulating pump passes through the suction pipe (2) Extract electroplating waste gas; 所述抽气管道(2)上设置有若干第一进气口(21),所述第一进气口(21)均匀分布于所述抽气管道(2)一侧,所述第一进气口(21)用于电镀废气的进入;A plurality of first air inlets (21) are arranged on the air extraction duct (2), and the first air inlets (21) are evenly distributed on one side of the air extraction duct (2). The gas port (21) is used for the entry of electroplating exhaust gas; 所述抽气管道(2)内设置有抽气内管道(3),所述抽气管道(2)套设于所述抽气内管道(3)外,所述抽气内管道(3)上设置有第二进气口(31),所述第二进气口(31)的位置与所述第一进气口(21)非对应;The air extraction pipeline (2) is provided with an air extraction inner pipeline (3), the air extraction pipeline (2) is sleeved outside the air extraction inner pipeline (3), and the air extraction inner pipeline (3) A second air inlet (31) is provided thereon, and the position of the second air inlet (31) does not correspond to the first air inlet (21); 所述反应模块包括光化学反应装置(33)、氧化装置、触媒层(32);The reaction module includes a photochemical reaction device (33), an oxidation device, and a catalyst layer (32); 所述触媒层(32)设置于所述第二进气口(31)上,所述触媒层(32)用于覆盖所述第二进气口(31),所述电镀废气穿过所述触媒层(32)并与所述触媒层(32)进行反应;所述光化学反应装置(33)环绕所述第二进气口(31)的内侧设置,所述光化学反应装置(33)用于向所述触媒层(32)提供光照促进触媒层(32)与电镀废气的反应;The catalyst layer (32) is disposed on the second air inlet (31), the catalyst layer (32) is used to cover the second air inlet (31), and the electroplating exhaust gas passes through the second air inlet (31). A catalyst layer (32) reacts with the catalyst layer (32); the photochemical reaction device (33) is arranged around the inner side of the second air inlet (31), and the photochemical reaction device (33) is used for Providing light to the catalyst layer (32) promotes the reaction of the catalyst layer (32) with the electroplating exhaust gas; 所述氧化装置设置于所述抽气内管道(3)中,所述氧化装置包括氧化喷头(34)与输液管道,所述输液管道与氧化剂存储罐连接,所述输液管道将氧化剂存储罐中的氧化剂向氧化喷头(34)输出,所述氧化喷头(34)向所述抽气内管道(3)中喷洒氧化剂;所述氧化喷头(34)与所述处理器连接,所述处理器向所述氧化喷头(34)输出开启信号或关闭信号,所述氧化喷头(34)根据所述处理器的指令执行开启或关闭操作;The oxidation device is arranged in the air extraction inner pipeline (3), and the oxidation device comprises an oxidation nozzle (34) and an infusion pipeline, the infusion pipeline is connected with the oxidant storage tank, and the infusion pipeline connects the oxidant storage tank in the oxidant storage tank. The oxidized oxidant is output to the oxidation nozzle (34), and the oxidation nozzle (34) sprays the oxidant into the suction inner pipe (3); the oxidation nozzle (34) is connected to the processor, and the processor sends the The oxidation spray head (34) outputs an opening signal or a closing signal, and the oxidation spray head (34) performs an opening or closing operation according to an instruction of the processor; 所述处理腔室(1)内包括处理模块,所述处理模块包括反应池(5)、通气管(4),所述抽气内管道(3)与通气管(4)导通,所述通气管(4)与所述反应池(5)导通;所述反应池(5)内存储有反应药剂,所述反应药剂用于与电镀废气反应。The processing chamber (1) includes a processing module, and the processing module includes a reaction pool (5) and a ventilation pipe (4). The vent pipe (4) is in communication with the reaction tank (5); the reaction tank (5) stores a reaction agent, and the reaction agent is used for reacting with the electroplating exhaust gas. 2.根据权利要求1所述的一种用于电镀工艺过程中的废气处理系统,其特征在于,所述反应池(5)包括至少两个,所述反应池(5)内设置有监测装置,所述监测装置与所述处理器连接;2 . The waste gas treatment system used in the electroplating process according to claim 1 , wherein the reaction pool ( 5 ) comprises at least two, and a monitoring device is provided in the reaction pool ( 5 ). 3 . , the monitoring device is connected to the processor; 所述通气管(4)的数量与所述反应池(5)一一对应,所述抽气内管道(3)在同一时间内仅与一个通气管(4)导通;所述通气管(4)与所述抽气内管道(3)连接处设置有切换装置(6),所述切换装置(6)用于切换抽气内管道(3)与不同通气管(4)的连接;The number of the ventilation pipes (4) is in one-to-one correspondence with the reaction pools (5), and the inner suction pipe (3) is only connected to one ventilation pipe (4) at the same time; the ventilation pipe ( 4) A switching device (6) is provided at the connection with the inner suction pipe (3), and the switching device (6) is used to switch the connection between the inner suction pipe (3) and different ventilation pipes (4); 所述监测装置向所述处理器输出反应药剂的浓度,若浓度低于预设浓度阈值,则处理器向所述切换装置(6)输出切换信号,所述切换装置(6)切换与所述抽气内管道(3)连接的通气管(4)。The monitoring device outputs the concentration of the reaction agent to the processor, and if the concentration is lower than the preset concentration threshold, the processor outputs a switching signal to the switching device (6), and the switching device (6) switches with the said switching device (6). The ventilation pipe (4) connected to the inner pipe (3) for air extraction. 3.根据权利要求2所述的一种用于电镀工艺过程中的废气处理系统,其特征在于,所述反应池(5)内设置有更新模块,所述更新模块包括抽水泵、抽水口、引水管,所述抽水泵与所述处理器连接,所述抽水口设置于所述反应池(5)的底部,所述引水管与所述抽水口连接,所述抽水泵通过所述引水管将反应池(5)中的溶液抽取出;3. The waste gas treatment system used in the electroplating process according to claim 2, characterized in that, an update module is provided in the reaction tank (5), and the update module comprises a pump, a water outlet, A water lead pipe, the suction pump is connected to the processor, the water suction port is arranged at the bottom of the reaction tank (5), the water lead pipe is connected to the water suction port, and the suction pump passes through the water lead pipe extracting the solution in the reaction tank (5); 若所述监测装置监测到的溶液浓度低于预设浓度阈值,则处理器向所述抽水泵输出开启信号,所述抽水泵开启并将所述反应池(5)中的溶液抽取出。If the concentration of the solution monitored by the monitoring device is lower than the preset concentration threshold, the processor outputs a turn-on signal to the suction pump, and the suction pump is turned on to extract the solution in the reaction tank (5). 4.根据权利要求3所述的一种用于电镀工艺过程中的废气处理系统,其特征在于,所述抽气管道(2)中设置有回收模块,所述回收模块包括封闭层、回收口、引流管;所述封闭层设置于所述抽气管道(2)底部,所述封闭层用于封闭所述抽气管道(2)的底部,所述回收口设置于所述封闭层上,所述回收口用于收集所述抽气管道(2)中的液体;所述引流管设置于所述封闭层内,所述引流管将所述封闭层内的液体向废液收集处导出。4 . The waste gas treatment system used in the electroplating process according to claim 3 , wherein a recovery module is provided in the gas extraction pipeline ( 2 ), and the recovery module comprises a closed layer and a recovery port. 5 . , drainage pipe; the sealing layer is arranged at the bottom of the air extraction pipe (2), the sealing layer is used to close the bottom of the air extraction pipe (2), and the recovery port is arranged on the sealing layer, The recovery port is used to collect the liquid in the air suction pipe (2); the drainage pipe is arranged in the closed layer, and the drainage pipe leads the liquid in the closed layer to the waste liquid collection place. 5.根据权利要求4所述的一种用于电镀工艺过程中的废气处理系统的工作方法,其特征在于,包括以下步骤:5. a kind of working method for the waste gas treatment system in electroplating process according to claim 4, is characterized in that, comprises the following steps: 处理器向循环泵输出开启信号,循环泵启动,循环泵自抽气管道(2)中抽取电镀废气;The processor outputs a turn-on signal to the circulating pump, the circulating pump starts, and the circulating pump extracts the electroplating waste gas from the exhaust pipe (2); 处理器向光化学反应装置(33)输出开启信号,光化学反应装置(33)开启,向触媒层(32)输出光照;The processor outputs a turn-on signal to the photochemical reaction device (33), the photochemical reaction device (33) is turned on, and outputs light to the catalyst layer (32); 处理器向氧化喷头(34)输出开启信号,氧化喷头(34)开启,氧化喷头(34)向抽气管道(2)内喷洒氧化剂。The processor outputs an opening signal to the oxidizing nozzle (34), the oxidizing nozzle (34) is turned on, and the oxidizing nozzle (34) sprays the oxidant into the air extraction pipe (2). 6.根据权利要求5所述的一种用于电镀工艺过程中的废气处理系统的工作方法,其特征在于,包括以下步骤:6. a kind of working method for the waste gas treatment system in electroplating process according to claim 5, is characterized in that, comprises the following steps: 监测装置监测反应池(5)中溶液浓度,并生成浓度值向处理器输出;The monitoring device monitors the concentration of the solution in the reaction tank (5), and generates a concentration value for output to the processor; 处理器接收实时的浓度值并将其与预设浓度阈值进行比对;The processor receives the real-time concentration value and compares it with the preset concentration threshold; 若浓度值低于预设浓度阈值,则处理器向切换装置(6)输出切换信号;If the concentration value is lower than the preset concentration threshold, the processor outputs a switching signal to the switching device (6); 切换装置(6)切换与抽气内管道(3)连接的通气管(4)。The switching device (6) switches the ventilation pipe (4) connected to the inner pipe (3) for air extraction. 7.根据权利要求6所述的一种用于电镀工艺过程中的废气处理系统的工作方法,其特征在于,若浓度值低于预设浓度阈值,则还包括以下步骤:7. The working method of a waste gas treatment system used in an electroplating process according to claim 6, wherein if the concentration value is lower than a preset concentration threshold, the method further comprises the following steps: 处理器向抽水泵输出开启信号,抽水泵开启;The processor outputs a start signal to the water pump, and the water pump is turned on; 抽水泵通过抽水口与引水管抽取反应池(5)中的溶液。The water pump extracts the solution in the reaction tank (5) through the water inlet and the water lead pipe.
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