CN110908228B - Optical module assembling method - Google Patents

Optical module assembling method Download PDF

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CN110908228B
CN110908228B CN201911235979.XA CN201911235979A CN110908228B CN 110908228 B CN110908228 B CN 110908228B CN 201911235979 A CN201911235979 A CN 201911235979A CN 110908228 B CN110908228 B CN 110908228B
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laser
optical module
axis
primary colors
light
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CN110908228A (en
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赵连军
边宗丽
黄慧妍
杜慧
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Goertek Optical Technology Co Ltd
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Goertek Inc
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings
    • G03B21/2006Lamp housings characterised by the light source
    • G03B21/2033LED or laser light sources

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  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The invention discloses an optical module assembly method, which comprises the following steps: the tricolor laser tubes in the optical module correspondingly emit tricolor laser which is emitted out of the optical module through the optical components in respective optical paths; dividing the tricolor laser into two beams of laser which are emitted to a first direction and a second direction; capturing laser in a first direction and laser in a second direction, and analyzing three primary colors in the laser respectively to obtain X, Y, Z-axis data of the laser of each primary color; and adjusting the optical components in the three primary color light paths by analyzing the data so that the centers of the light spots in the first direction are overlapped and the light spot in the second direction is minimum. The invention has the technical effects that the optical components in the optical module can be assembled and adjusted according to the analyzed data by analyzing the lasers of three primary colors emitted by the optical module at the same time, so that the components in the light paths of the lasers of the three primary colors can be adjusted at the same time, the time for assembling the optical module is reduced, and the assembling efficiency is improved.

Description

Optical module assembling method
Technical Field
The invention relates to the technical field of laser projection, in particular to an optical module assembling method.
Background
At present, a plurality of optical modules with independent functions are available on the market, and the optical modules can form different products with other equipment. For example, a mobile phone camera module, a vehicle-mounted camera module, a VR (Virtual Reality) optical module, an AR (Augmented Reality) optical module, a laser projection module, and the like.
The optical module is obtained by assembling a plurality of optical components and other elements, such as a micro laser projection module, which mainly comprises an MEMS laser module (comprising an MEMS micro-mirror, an RGB micro laser tube and an optical lens group), an MEMS driving circuit, a laser driving circuit and an image processing control circuit. Among them, the assembly of the optical lens and the MEMS micro-mirror plays an important role for the micro laser projector. Has a great influence on the precision of the optical module.
In the prior art, in order to improve the assembly precision, a single primary color emitted by an optical module is monitored and analyzed by building a light path so as to adjust an optical component in the optical module for assembly. Therefore, the laser of different primary colors needs to be monitored and analyzed in sequence, and the optical module is complex in assembly process and long in time consumption.
Therefore, a new technical solution is needed to solve the above technical problems.
Disclosure of Invention
An object of the present invention is to provide a new solution for an optical module assembling method.
According to a first aspect of the present invention, there is provided an optical module assembling method comprising the steps of:
the tricolor laser tubes in the optical module correspondingly emit red, green and blue tricolor lasers which are respectively emitted out of the optical module through the optical components in respective optical paths;
dividing the red, green and blue laser emitted out of the optical module into two beams of laser containing red, green and blue three primary colors, which are respectively emitted to a first direction and a second direction;
capturing laser in a first direction, analyzing red, green and blue tricolor laser in the first direction respectively to obtain X, Y-axis data of each primary color laser, capturing laser in a second direction, and analyzing the red, green and blue tricolor laser in the second direction respectively to obtain Z-axis data of each primary color laser;
and adjusting the optical components in the three primary color light paths through analyzed data of X, Y, Z axes corresponding to the primary color lasers, so that the centers of the light spots in the first direction are coincident, and the light spot in the second direction is minimum.
Optionally, the first beam splitter prism splits the red, green and blue laser beams emitted from the optical module into two laser beams with three primary colors of red, green and blue, which are emitted to the first direction and the second direction, respectively.
Alternatively, the laser light directed into the first direction needs to first pass through a relay lens.
Alternatively, the laser light directed into the second direction needs to be transmitted through a diffuser sheet first.
Optionally, after dividing the laser beam emitted to the first direction into three laser beams emitted to different optical paths, capturing the laser beams of three primary colors of red, green and blue respectively and analyzing the three laser beams to obtain X, Y-axis data of the laser beams of the primary colors;
and dividing the laser emitted to the second direction into three laser beams respectively emitted to different light paths, and respectively capturing the laser beams of the three primary colors of red, green and blue for analysis to obtain the Z-axis data of the laser beams of the primary colors.
Optionally, the laser light in the first direction is captured by a first prism beam splitter camera, and the data of X, Y axes of the laser light in each of the three primary colors of red, green and blue is obtained through analysis.
Optionally, the laser in the second direction is captured by a second prism beam splitter camera, and the Z-axis data of the laser in each of the three primary colors of red, green, and blue is obtained through analysis.
Optionally, when the optical assembly is adjusted for assembly,
firstly, X, Y axes are adjusted to enable the centers of X, Y axes of light spots to coincide;
and adjusting the Z axis to minimize the Z axis light spot.
Alternatively, after the Z axis is adjusted to minimize the Z axis spot, the X, Y axis is adjusted again to make the X, Y axis spot centers coincide.
Optionally, after the optical assembly is adjusted and assembled by analyzing the data of X, Y, Z axes of the corresponding color laser, the adjustment step is repeated to perform adjustment.
According to one embodiment of the invention, by analyzing the lasers of three primary colors emitted by the optical module at the same time, the optical components in the optical module can be assembled and adjusted according to the analyzed data, so that the components in the light paths of the lasers of the three primary colors can be adjusted at the same time, the time for assembling the optical module is reduced, and the assembly efficiency is improved.
Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
FIG. 1 is a schematic diagram of an optical module requiring adjustment according to the present invention.
Fig. 2 is an assembled optical path diagram of an assembled optical module in the prior art.
Fig. 3 is a flow chart of assembly in the prior art.
FIG. 4 is an optical diagram of an optical module assembly according to an embodiment of the present invention.
FIG. 5 is a flow chart of the optical module assembly according to one embodiment of the present invention.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.
Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.
In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
As shown in fig. 1 and 2, in the prior art, an assembly optical path is provided for an optical module to be assembled. The three primary colors laser respectively strikes the reflectors 7, 8 and 9 through the optical lenses 4, 5 and 6, and finally reaches an accurate position through the MEMS reflector 10, so that the function of the module is realized. In order to ensure the performance of the whole optical module, the centers of light spots of the three laser beams are required to be coincident and the light spot at the corresponding distance is required to be minimum. Therefore, the assembly accuracy of the lenses 4, 5, and 6 needs to be strictly controlled, and the X, Y, Z axis adjustment of the lenses 4, 5, and 6 is needed during assembly to ensure that the centers of the final light spots are overlapped and the area is minimum. The X, Y, Z axis direction is shown in fig. 2 and 4.
In the prior art, an assembled light path analyzes a laser beam through a beam quality analyzer, and only one primary color can be adjusted at a time, so that only an optical component through which one primary color passes can be adjusted at a time.
The adjustment process is shown in fig. 3, the test method can only sequentially adjust a single color, and adjust another color after the adjustment of X, Y, Z three axes of one color is completed. The time consumption for adjusting the optical module is serious, and the efficiency is low.
Also, when analyzing the laser beam, calculations need to be performed on the beam. In the prior art, when the minimum light beam is searched, the light beam size is measured by calculating the light beam width. Along two vertical lines passing through the centroid of the light beam, all pixel points of the clamping percentage exceeding the current peak energy value are respectively calculated to determine the width of the light beam. The beam width is the total number of all points that exceed the pinching percentage of the current peak energy value multiplied by the pixel width. The acquisition of the current peak energy value means that the gray value of the image cannot be overexposed, the requirement on exposure is high, and the method is difficult to adapt to all lens products; because the width of the light beam is calculated only by two vertical lines along the centroid of the light beam, fewer sample points are obtained, the influence of image noise is increased, and the calculation result is unstable.
In view of the deficiencies of the prior art, the present invention provides the following embodiments to solve the above problems.
According to an embodiment of the present disclosure, there is provided an optical module assembling method, as shown in fig. 4, including the steps of:
the tricolor laser tubes in the optical module correspondingly emit red, green and blue tricolor lasers which are respectively emitted out of the optical module through the optical components in respective optical paths;
dividing the red, green and blue laser emitted out of the optical module into two beams of laser containing red, green and blue three primary colors, which are respectively emitted to a first direction and a second direction;
capturing laser in a first direction, analyzing red, green and blue tricolor laser in the first direction respectively to obtain X, Y-axis data of each primary color laser, capturing laser in a second direction, and analyzing the red, green and blue tricolor laser in the second direction respectively to obtain Z-axis data of each primary color laser;
the X, Y, Z axis direction is shown in fig. 2 and 4.
And adjusting the optical components in the three primary color light paths through analyzed data of X, Y, Z axes corresponding to the primary color lasers, so that the centers of the light spots in the first direction are coincident, and the light spot in the second direction is minimum.
In the embodiment, by analyzing the lasers of three primary colors emitted by the optical module at the same time, the optical components in the optical module can be assembled and adjusted according to the analyzed data, so that the components in the light path of the laser of the three primary colors can be adjusted at the same time, the time for assembling the optical module is reduced, and the assembly efficiency is improved.
When the optical film group is assembled, laser is emitted simultaneously through the three-primary-color laser tube in the optical module. Each type of laser exits the optical module through a respective optical path.
The laser emitted out of the laser module is divided into two beams of laser containing three primary colors of red, green and blue which respectively emit to a first direction and a second direction;
optionally, the first beam splitter prism 11 splits the three primary colors of red, green and blue laser beams emitted from the optical module into two laser beams with three primary colors of red, green and blue, which are emitted to the first direction and the second direction respectively. For example, as shown in fig. 4, the direction of the dashed box B is the first direction, and the direction of the dashed box a is the second direction.
It should be noted that the laser light in the first direction and the second direction is split off simultaneously. Therefore, the laser light capturing in the first direction and the laser light capturing in the second direction are not performed successively.
For example, the laser beam emitted from the optical module is split into two directions by the first beam splitter prism 11 and emitted. Wherein, after the two directions are separated, X, Y, Z of the laser can be conveniently adjusted respectively.
The laser in the first direction is captured by the first prism beam splitting camera, and X, Y-axis data of the laser in each primary color of the red, green and blue primary colors are obtained through analysis. The prism spectral camera can capture red, green and blue three-primary-color lasers in the first direction simultaneously, can obtain X, Y-axis data of the three primary colors simultaneously, and facilitates simultaneous adjustment of X, Y axes of optical components through which the three primary colors pass.
And capturing the laser in the second direction by a second prism light splitting camera, and analyzing to obtain Z-axis data of the laser of each primary color in the three primary colors of red, green and blue. The prism beam splitter camera can capture red, green and blue tricolor lasers in the first direction simultaneously, can obtain Z-axis data of the tricolor simultaneously, and facilitates simultaneous adjustment of Z-axis of an optical assembly through which the tricolor passes.
Finally, the optical components in the three primary color light paths are adjusted through analyzed data of X, Y, Z axes corresponding to the primary color lasers, so that the centers of light spots in the first direction are overlapped, and the light spot in the second direction is the minimum.
In one embodiment, when analyzing the laser captured by the prism beam splitting camera, the transverse distribution of energy of the light beam at a certain position is calculated by analyzing the transverse projection integral of the energy of the light beam, and the transverse energy distribution is more gathered at the position where the light beam is smaller, and becomes dispersed as the light beam becomes larger. And performing Gaussian fitting on the transverse distribution data to obtain the full width at half maximum of the fitting data as a standard for measuring the size of the light beam.
Compared with the existing analysis method, the method has the advantages that the noise influence is reduced and the robustness of the calculation result is improved by integrating the transverse projection of the energy of the whole light beam instead of counting only by two vertical lines; and the full width at half maximum of fitting data is obtained through Gaussian fitting instead of searching the current peak energy value, so that the requirement of a lens product on exposure is weakened, and the method can adapt to more lens products.
The method for processing the obtained laser faculae comprises the following steps: the R, G and B values of each pixel are respectively collected through the prism spectral camera technology, abnormal and accurate color data can be output, and uncertain data output in an overlapping area cannot occur. Accurate RGB values and full spatial resolution can be obtained by using a prism beam splitting camera.
The principle of the treatment method is as follows: by analyzing the transverse projection integral of the light beam energy, the transverse distribution of the energy of the light beam at a certain position is calculated, and the transverse energy distribution is more gathered at the position where the light beam is smaller, and becomes dispersed as the light beam becomes larger. And performing Gaussian fitting on the transverse distribution data to obtain the full width at half maximum of the fitting data as a standard for measuring the size of the light beam.
The processing method can solve the image noise influence in the prior art and instability caused by acquiring the width of the light beam only along two vertical lines of the centroid of the light beam.
The processing method has the advantages that the noise influence is reduced and the robustness of the calculation result is increased by integrating the transverse projection of the energy of the whole light beam instead of counting only by two vertical lines. And the full width at half maximum of fitting data is obtained through Gaussian fitting instead of searching the current peak energy value, so that the requirement of a lens product on exposure is weakened, and the method can adapt to more lens products.
And performing adjustment assembly on the optical components in the optical module through the obtained X, Y, Z axis data.
In one embodiment, as shown in fig. 4, after the laser is divided into three laser beams emitted to different optical paths after the laser beam is divided into a first direction and a second direction, the laser beam emitted to the first direction is divided into three laser beams emitted to different optical paths, and the three primary color laser beams of red, green and blue are captured and analyzed to obtain X, Y-axis data of each primary color laser beam;
and dividing the laser emitted to the second direction into three laser beams respectively emitted to different light paths, and respectively capturing the laser beams of the three primary colors of red, green and blue for analysis to obtain the Z-axis data of the laser beams of the primary colors.
The three beams of laser emitted to different optical paths in the first direction and the second direction respectively contain laser of three primary colors.
It should be noted that the laser light in the first direction and the second direction is split off simultaneously. Therefore, the laser light capturing in the first direction and the laser light capturing in the second direction are not performed successively.
Alternatively, the laser light in the first direction is split into three laser lights in different optical paths by the third beam splitter prism 13. The laser light in the second direction is split into three laser beams with different optical paths by the second beam splitter prism 14.
After the lasers in the first direction and the second direction are respectively divided into different light paths, the lasers of three primary colors of red, green and blue are respectively captured in the three light paths in the first direction for analysis. And capturing the laser of three primary colors of red, green and blue in three light paths in the second direction respectively for analysis.
Wherein, each light path in three light paths only catches a colour, and three light paths accomplish the seizure to the laser of red, green, blue three primary colors to can carry out analysis adjustment to the optical component in three primary colors light paths simultaneously. For example, three cameras are correspondingly arranged on the three optical paths in the first direction for receiving, and the three cameras receive laser lights with different colors. Three cameras are correspondingly arranged on the three light paths in the second direction for receiving, and the three cameras receive laser with different colors.
For example, setting the first camera 15 in the first direction corresponds to capturing X, Y-axis data of the laser emitter 1, the second camera 17 corresponds to capturing X, Y-axis data of the laser emitter 2, and the third camera 16 corresponds to capturing X, Y-axis data of the laser emitter 3.
The second direction is set with the fourth camera 19 corresponding to capturing the Z-axis data of the laser transmitter 1, the fifth camera 18 corresponding to capturing the Z-axis data of the laser transmitter 2, and the sixth camera 20 corresponding to capturing the Z-axis data of the laser transmitter 3.
The three primary colors of laser light received by the three cameras in the first direction are analyzed, and X, Y axis data of the three primary colors of laser light are obtained.
And analyzing the three primary colors of laser received by the three cameras in the second direction to obtain the Z-axis data of the three primary colors of laser.
After X, Y, Z-axis data is obtained, the optical components corresponding to the three primary colors in the optical module are adjusted at the same time.
The adjustment in the first direction and the second direction can be performed simultaneously, so that the X, Y, Z axes of the laser spots can be simultaneously adjusted to adjust the assembly positions of the optical components corresponding to the three primary colors. The assembly efficiency of the optical module is improved.
Optionally, after the optical assembly is adjusted and assembled by analyzing the data of X, Y, Z axes of the corresponding color lasers, the previous steps are repeated to adjust. So that the centers of the laser spots emitted by the optical module are overlapped and the area of the laser spots is the minimum. By repeating the adjustment in this way, the accuracy of the adjustment of the optical unit can be improved.
When the X, Y axis is adjusted, the X, Y axis is adjusted by calculating the position of a laser spot received by the prism beam splitter camera in the first direction, so that the laser spots are overlapped.
When the Z axis is adjusted, the Z axis is adjusted by calculating the brightness and the half-height width of the light spot received by the prism beam splitting camera in the second direction, so that the light spot is minimum.
Preferably, the X, Y, Z axes are simultaneously adjusted so that the spot centers of the X, Y axes coincide and the spot in the Z axis is minimized. Namely, the adjustment of the first direction and the second direction is carried out simultaneously, and the assembly process of the three light paths can be realized simultaneously.
In the adjusting process, the optical assembly is adjusted through the condition of the light spots received by the prism beam splitting camera so as to adjust the emitted three-primary-color laser, the light spots are adjusted to the set condition, and the adjusting position of the optical assembly is determined. The purpose of adjusting the optical module can be achieved. The three light paths emitted by the three-primary-color laser tube are adjusted simultaneously, and the assembly process of the whole optical module is reduced. Not only ensuring the assembly accuracy but also improving the assembly efficiency.
In one embodiment, the optical assembly is adjusted to fit the optical assembly,
firstly, X, Y axes are adjusted to enable the centers of X, Y axes of light spots to coincide;
the X, Y axes of the three primary colors are correspondingly adjusted by the three light paths in the first direction, so that the light spots of the X, Y axes are coincident. This enables the X, Y axes of the three optical path optical components to be adjusted to precise positions.
And adjusting the Z axis to minimize the Z axis light spot.
And the three light paths in the second direction correspondingly adjust the Z axes of the three primary colors, so that the light spot of the Z axis is minimized. This enables the Z-axis adjustment of the three optical path optical components to a precise position.
In one embodiment, as shown in FIG. 5, the X, Y axes are first adjusted so that the X, Y axes spot centers coincide. The Z axis was adjusted again to minimize the Z axis spot, and then the X, Y axis was adjusted again to center the X, Y axis spots. This adjustment again enables the X, Y axis to be adjusted more precisely.
In one embodiment, the laser light directed into the first direction needs to first pass through the relay lens 12.
The relay mirror 12 can ensure that the transmitted laser is kept stable, so that the light spot formed by the laser does not change. The light spot can be calculated conveniently, and the size of the light spot can not be changed in the adjusting process. The light spots of the first direction are adjusted to be coincident in center.
In one embodiment, the laser light directed into the second direction needs to first pass through diffuser 21.
The diffusion sheet 21 can make the distribution of the light spots formed by the transmitted laser light uniform, and the distribution of the captured light spots uniform. It is convenient to adjust the spot in the second direction to a minimum.
Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims (9)

1. An optical module assembly method, comprising the steps of:
the tricolor laser tubes in the optical module correspondingly emit red, green and blue tricolor lasers which are respectively emitted out of the optical module through the optical components in respective optical paths;
dividing the red, green and blue laser emitted out of the optical module into two beams of laser containing red, green and blue three primary colors, which are respectively emitted to a first direction and a second direction;
dividing the laser emitted to the first direction into three laser beams respectively emitted to different light paths, and respectively capturing the laser beams of three primary colors of red, green and blue for analysis to obtain X, Y-axis data of the laser beams of the primary colors;
dividing the laser emitted to the second direction into three laser beams respectively emitted to different light paths, and respectively capturing the laser beams of the three primary colors of red, green and blue for analysis to obtain Z-axis data of the laser beams of the primary colors;
and adjusting the optical components in the three primary color light paths through analyzed data of X, Y, Z axes corresponding to the primary color lasers, so that the centers of the light spots in the first direction are coincident, and the light spot in the second direction is minimum.
2. The method of claim 1, wherein the primary colors of red, green, and blue laser beams emitted from the optical module are divided into two laser beams having the primary colors of red, green, and blue, which are emitted to the first direction and the second direction, respectively, by the first beam splitter prism.
3. The method of claim 1 wherein the laser directed in the first direction is directed through a relay lens.
4. The method of claim 1 wherein the laser directed in the second direction is directed through a diffuser.
5. The method of claim 1, wherein the first prism beam splitter captures the laser light in the first direction and analyzes the data to obtain X, Y-axis data of the laser light in each of the three primary colors of red, green and blue.
6. The method of claim 1, wherein the second prism beam splitter captures the laser beams in the second direction and analyzes the data of the Z-axis of the laser beams in each of the three primary colors of red, green and blue.
7. The method of claim 1, wherein the step of adjusting the optical assembly,
firstly, X, Y axes are adjusted to enable the centers of X, Y axes of light spots to coincide;
and adjusting the Z axis to minimize the Z axis light spot.
8. The method of claim 7 wherein the Z axis is adjusted to minimize the Z axis spot and the X, Y axis is adjusted again to make the X, Y axis spots center coincident.
9. The method of claim 1, wherein the adjusting step is repeated after the optical module is adjusted and assembled according to the analyzed X, Y, Z axis data of the laser with corresponding color.
CN201911235979.XA 2019-12-05 2019-12-05 Optical module assembling method Active CN110908228B (en)

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Citations (6)

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Publication number Priority date Publication date Assignee Title
US4752964A (en) * 1984-04-17 1988-06-21 Kawasaki Jukogyo Kabushiki Kaisha Method and apparatus for producing three-dimensional shape
CN101356304A (en) * 2005-10-11 2009-01-28 Gsi集团公司 Optical metrological scale and laser-based manufacturing method therefor
CN104756006A (en) * 2012-10-30 2015-07-01 日立麦克赛尔株式会社 Projection-type video display device
CN104930464A (en) * 2015-06-11 2015-09-23 横店集团得邦照明股份有限公司 Method for forming annular halo
CN105865361A (en) * 2016-04-07 2016-08-17 哈尔滨工业大学 Laser interferometer used for material surface inner deformation and strain field measurement, and application method
CN109341600A (en) * 2018-09-18 2019-02-15 重庆邮电大学 A kind of three axis photoelectric auto-collimators

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4752964A (en) * 1984-04-17 1988-06-21 Kawasaki Jukogyo Kabushiki Kaisha Method and apparatus for producing three-dimensional shape
CN101356304A (en) * 2005-10-11 2009-01-28 Gsi集团公司 Optical metrological scale and laser-based manufacturing method therefor
CN104756006A (en) * 2012-10-30 2015-07-01 日立麦克赛尔株式会社 Projection-type video display device
CN104930464A (en) * 2015-06-11 2015-09-23 横店集团得邦照明股份有限公司 Method for forming annular halo
CN105865361A (en) * 2016-04-07 2016-08-17 哈尔滨工业大学 Laser interferometer used for material surface inner deformation and strain field measurement, and application method
CN109341600A (en) * 2018-09-18 2019-02-15 重庆邮电大学 A kind of three axis photoelectric auto-collimators

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