CN110907507A - Humidity sensor with root-shaped electrode structure - Google Patents
Humidity sensor with root-shaped electrode structure Download PDFInfo
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- CN110907507A CN110907507A CN201911375041.8A CN201911375041A CN110907507A CN 110907507 A CN110907507 A CN 110907507A CN 201911375041 A CN201911375041 A CN 201911375041A CN 110907507 A CN110907507 A CN 110907507A
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- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000005518 polymer electrolyte Substances 0.000 claims description 18
- 239000011159 matrix material Substances 0.000 claims description 11
- 238000009826 distribution Methods 0.000 claims description 5
- 239000010410 layer Substances 0.000 abstract description 26
- 239000000463 material Substances 0.000 abstract description 7
- 239000012792 core layer Substances 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 abstract description 2
- 239000002086 nanomaterial Substances 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000005342 ion exchange Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000009713 electroplating Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000000243 solution Substances 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 239000012266 salt solution Substances 0.000 description 8
- 238000002791 soaking Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000005488 sandblasting Methods 0.000 description 5
- 229910052763 palladium Inorganic materials 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 102000004310 Ion Channels Human genes 0.000 description 2
- 229920000557 Nafion® Polymers 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002905 metal composite material Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000012279 sodium borohydride Substances 0.000 description 2
- 229910000033 sodium borohydride Inorganic materials 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 244000137852 Petrea volubilis Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000012271 agricultural production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/226—Construction of measuring vessels; Electrodes therefor
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Abstract
The invention discloses a humidity sensor with a root-shaped electrode structure, which comprises a layer of substrate film used as a dielectric medium, two surface electrode layers and a plurality of root-shaped electrodes; two surface electrode layers are adhered to the upper surface and the lower surface of the substrate film; a plurality of root electrodes are arranged inside the substrate film, and each root electrode is connected with one surface electrode layer. The root-shaped electrode structure of the invention has a nano structure microscopically and a micro structure macroscopically, and compared with the existing comb-shaped electrode structure, the contact area between the electrode and the core layer is greatly increased; the micro-nano granular structure and the root electrode of the electrode layer increase the humidity sensitivity of the sensor together; due to the flexibility and the optional thickness of the substrate film material, the humidity sensor can be manufactured into various shapes; the capacitive humidity sensor can be applied to detecting physical quantities such as pressure, displacement and gas concentration through improvement, and is wide in application.
Description
Technical Field
The invention belongs to the technical field of humidity sensors, and particularly relates to a humidity sensor with a root-shaped electrode structure.
Background
In the departments of industrial and agricultural production, meteorology, environmental protection, national defense, scientific research, aerospace and the like, the environmental humidity is often required to be measured and controlled. However, in the conventional environmental parameters, humidity is the most difficult parameter to measure accurately due to the influence of other factors (atmospheric pressure, temperature). The method of measuring humidity by a wet-dry bulb hygrometer or a hair hygrometer cannot meet the requirements of modern technological development, and therefore, the development of a novel humidity sensor is very important for modern industries. Among them, the capacitive humidity sensor is receiving a wide attention. A capacitor is formed by sandwiching an insulating dielectric between two metal electrodes, and is one of a large number of electronic components used in electronic devices. The capacitance type sensor converts the change of the measured non-electric quantity into the change of capacitance by using the principle of a capacitor, and then converts the change into signals such as voltage, current or frequency and the like which are convenient to measure and transmit. The capacitance changes with the measured parameter, and the sensor can be made into various sensors such as acceleration sensor, humidity sensor, pressure sensor, gas sensor, chemical sensor, biosensor, and surface acoustic wave sensor.
The polymer electrolyte is composed of a solid/liquid two-phase structure and has stronger water absorption/strain capacity in a humidity environment. When the polymer electrolyte absorbs water, an ion channel is formed inside the polymer electrolyte, a solution containing hydrated ions is arranged inside the ion channel, and the hydrated ions are communicated through the micro-channel to form a solid/liquid two-phase structure. If two layers of metal electrodes are respectively attached to the upper surface and the lower surface of the polymer electrolyte film, a polymer/metal composite film material is formed, and the sensor with specific signal response is formed. Because the membrane material has better moisture absorption swelling property, the sensor can be used for detecting the moisture content; or different metal ions are introduced to enable the membrane material to obtain different chemical characteristics, and the physical quantities such as humidity, gas concentration, ion concentration and the like are detected by utilizing the change of capacitance values caused by the change of the dielectric constant of the membrane material. Therefore, the sensor made of the polymer electrolyte/metal composite membrane material has wide application prospect.
To solve the above problems, i developed a humidity sensor having a root-shaped electrode structure.
Disclosure of Invention
The present invention has been made to solve the above problems, and an object of the present invention is to provide a humidity sensor having a root-shaped electrode structure.
The invention realizes the purpose through the following technical scheme:
a humidity sensor having a root electrode structure, comprising:
a substrate film as a dielectric;
two surface electrode layers; two surface electrode layers are adhered to the upper surface and the lower surface of the substrate film;
a plurality of root electrodes; a plurality of root electrodes are arranged inside the substrate film, and each root electrode is connected with one surface electrode layer.
Preferably, the matrix film is a polymer electrolyte matrix film having moisture sensitive properties, the matrix film having a thickness greater than 0 microns and less than 200 microns.
Preferably, the surface electrode layer is a conductive layer, and the thickness of the surface electrode layer is more than 0 micron and less than 10 microns.
Preferably, the distance between any two immediately adjacent root electrodes is greater than 0 microns and less than 20 microns.
Preferably, the inner surface of the surface electrode layer exhibits a micro-nano-scale particle distribution structure.
The invention has the beneficial effects that:
the invention relates to a humidity sensor with root-shaped electrode structure, which comprises:
the root-shaped electrode structure is microscopically provided with a nano structure and macroscopically presents a micro structure, so that compared with the existing comb-shaped electrode structure, the contact area between the electrode and the core layer is greatly increased; the micro-nano granular structure and the root electrode of the electrode layer increase the humidity sensitivity of the sensor together; due to the flexibility and the optional thickness of the substrate film material, the humidity sensor can be manufactured into various shapes; the capacitive humidity sensor can be applied to detecting physical quantities such as pressure, displacement and gas concentration through improvement, and is wide in application.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a cross-sectional profile of a practical sensor of the present invention; wherein a is a schematic representation of a substrate film; b is a schematic view of a surface electrode layer; c is a schematic representation of a root electrode;
in the figure, 1-a substrate film; 2-surface electrode layer, 3-root electrode.
Detailed Description
The invention will be further described with reference to the accompanying drawings in which:
as shown in fig. 1 and 2, a humidity sensor having a root-shaped electrode structure includes:
a base film 1 as a dielectric;
two surface electrode layers 2; two surface electrode layers 2 are adhered to the upper and lower surfaces of the substrate film 1;
a plurality of root electrodes 3; a plurality of root electrodes 3 are provided inside the base film 1, and each root electrode 3 is connected to one surface electrode layer 2.
The matrix film 1 is a polymer electrolyte matrix film 1 with humidity sensitive characteristic, and the thickness of the matrix film 1 is more than 0 micron and less than 200 microns.
The surface electrode layer 2 is a conductive layer, and the thickness of the surface electrode layer 2 is more than 0 micron and less than 10 microns.
The distance between any two adjacent root electrodes 3 is greater than 0 microns and less than 20 microns.
The inner surface of the surface electrode layer 2 exhibits a micro-nano-scale particle distribution structure.
The application provides a root-shaped electrode 3 structure to improve the humidity sensing performance of a humidity sensor. The humidity sensor core layer according to the root electrode 3 structure is suitable for a polymer electrolyte, and the metal electrode according to the structure is suitable for platinum, palladium, silver, copper, and the like.
A moisture-sensitive matrix film 1, which is a matrix film 1 used as a dielectric, is characterized by a polymer electrolyte membrane having a specific solid/liquid microstructure, such as: nafion film, etc., preferably in the thickness range of 10 to 200 microns. Surface electrode layers are attached to the upper outer surface and the lower outer surface of the substrate film 1, the thickness is 1-10 micrometers, and the surface electrode layers are in a micrometer-nanometer granular shape. The surface electrode layer is connected with a root electrode 3, the components of which can be the same or different, are copper, silver, palladium or platinum or mixed metal, and are grown on the inner surface of the substrate film 1, and branches in the shape of tree roots penetrate into the substrate film 1.
The root-shaped electrode 3 structure is mainly realized by the following technology:
(1) the surface of the base film 1 is roughened. And (3) carrying out surface treatment on the substrate film 1 by adopting a specific method, wherein the related methods comprise sand paper polishing, sand blasting, plasma treatment and the like, and by taking a sand blasting mode as an example, the roughened substrate film 1 is obtained under the conditions that the time is controlled within 5min, the pressure is controlled within 0.5MPa and the size of glass sand is not more than 100 meshes, and the surface is provided with uniformly distributed micron-sized pits.
(2) Soaking and reduction plating. Based on the ion exchange capacity of the polymer electrolyte, the polymer electrolyte is put into a metal salt solution for ion exchange, wherein the concentration of the metal salt solution is not higher than 0.05mol/L, the ion exchange time is not less than 2h, and the reaction temperature is controlled between 40 ℃ and 60 ℃. And (2) putting the polymer dielectric film after ion exchange into a reducing solution for reduction, wherein the reducing solution comprises a sodium borohydride solution, a sodium sulfite solution and the like, the concentration of the reducing solution is not lower than 0.001mol/L, the reaction time is not less than 2h, and the reaction temperature is controlled between 40 ℃ and 60 ℃. And repeating the soaking reduction step for 3-5 times until the thickness of the surface electrode reaches 1-10 microns. Due to the existence of the micron-scale pits on the surface of the substrate film 1, the micro-nano-scale granular electrodes of the surface electrode are naturally formed. The process aims to form a primary surface electrode, so that the surface of the substrate film 1 has the conductive capability and provides conditions for subsequent soaking-electroplating.
(3) Soaking and electroplating. Repeating the soaking process in the step (2): based on the ion exchange capacity of the polymer electrolyte, the polymer electrolyte is put into a metal salt solution for ion exchange, wherein the concentration of the metal salt solution is not higher than 0.05mol/L, the ion exchange time is not less than 2h, and the reaction temperature is controlled between 40 ℃ and 60 ℃. And electroplating the soaked substrate film 1 for 3-5min per surface, wherein the electroplating current is not higher than 0.5A, and the electroplating voltage is not higher than 5V.
The plating process is repeated until a distance distribution between the root electrodes 3 in the range of 0 to 20 μm is reached.
In the preferred embodiment, a Nafion film is used as the base film 1, having a thickness of 180. mu.m. Surface electrodes, which are noble metal palladium in this embodiment, are attached to the upper and lower outer surfaces of the substrate film 1, and the surfaces are loose micron-sized electrode particles, as shown in fig. 2. The root electrode 3 is also palladium metal, and is grown on the inner surface of the base film 1 in a root shape extending into the base film 1.
The root-shaped electrode 3 structure is mainly realized by the following technology: (1) the surface of the base film 1 is roughened. Adopting a sand blasting method, wherein the sand blasting time is 2 mim/surface, the sand blasting pressure is 0.2MPa, and the size of the glass sand is 200 meshes, so as to obtain the roughened substrate film 1 with uniformly distributed micron-sized pits on the surface. (2) Soaking and reduction plating. Based on the ion exchange capacity of the polymer electrolyte, the polymer electrolyte is put into a metal salt solution for ion exchange, wherein the concentration of the metal salt solution is 0.02mol/L, the ion exchange time is 2h, and the reaction temperature is controlled at 50 ℃. And (3) putting the polymer dielectric film after ion exchange into a reducing solution for reduction, wherein the reducing solution is selected from a sodium borohydride solution, the concentration is 0.001mol/L, the reaction time is 2h, and the reaction temperature is 50 ℃. The soaking reduction step is repeated for 3 times, and the thickness of the surface electrode reaches 5 microns. Due to the existence of the micron-scale pits on the surface of the substrate film 1, the micro-nano-scale granular electrodes of the surface electrode are naturally formed. The process aims to form a primary surface electrode, so that the surface of the substrate film 1 has the conductive capability and provides conditions for subsequent soaking-electroplating. (3) Soaking and electroplating. Repeating the soaking process in the step (2): based on the ion exchange capacity of the polymer electrolyte, the polymer electrolyte is put into a metal salt solution for ion exchange, wherein the concentration of the metal salt solution is 0.02mol/L, the ion exchange time is 2h, and the reaction temperature is controlled at 50 ℃. And electroplating the soaked substrate film 1 for 3 min/surface at an electroplating current of 0.3A and an electroplating voltage of 5V. The electroplating process was repeated 3 times until the distance distribution between the root electrodes 3 reached about 10 μm.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. A humidity sensor having a root electrode structure, comprising:
a substrate film as a dielectric;
two surface electrode layers; two surface electrode layers are adhered to the upper surface and the lower surface of the substrate film;
a plurality of root electrodes; a plurality of root electrodes are disposed within the base film, and each root electrode is connected to an inner surface of a surface electrode layer.
2. A humidity sensor having a root electrode structure according to claim 1, wherein: the matrix film is a polymer electrolyte matrix film with humidity sensitive characteristic, and the thickness of the matrix film is more than 0 micron and less than 200 microns.
3. A humidity sensor having a root electrode structure according to claim 1, wherein: the surface electrode layer is a conductive layer, and the thickness of the surface electrode layer is more than 0 micron and less than 10 microns.
4. A humidity sensor having a root electrode structure according to claim 1, wherein: the distance between any two adjacent root electrodes is greater than 0 microns and less than 20 microns.
5. A humidity sensor having a root electrode structure according to claim 1, wherein: the inner surface of the surface electrode layer presents a micro-nano level granular distribution structure.
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| CN201911375041.8A CN110907507A (en) | 2019-12-27 | 2019-12-27 | Humidity sensor with root-shaped electrode structure |
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| CN201911375041.8A CN110907507A (en) | 2019-12-27 | 2019-12-27 | Humidity sensor with root-shaped electrode structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111830088A (en) * | 2020-07-30 | 2020-10-27 | 河海大学常州校区 | Ionic type film humidity sensor and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109830372A (en) * | 2019-03-19 | 2019-05-31 | 河海大学常州校区 | A kind of capacitor and preparation method with dendritic electrode structure |
| CN211292688U (en) * | 2019-12-27 | 2020-08-18 | 中国工程物理研究院总体工程研究所 | Humidity sensor with root-shaped electrode structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109830372A (en) * | 2019-03-19 | 2019-05-31 | 河海大学常州校区 | A kind of capacitor and preparation method with dendritic electrode structure |
| CN211292688U (en) * | 2019-12-27 | 2020-08-18 | 中国工程物理研究院总体工程研究所 | Humidity sensor with root-shaped electrode structure |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111830088A (en) * | 2020-07-30 | 2020-10-27 | 河海大学常州校区 | Ionic type film humidity sensor and preparation method thereof |
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