CN110906046A - Vacuum drainage electroless pure mechanical actuator - Google Patents
Vacuum drainage electroless pure mechanical actuator Download PDFInfo
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- CN110906046A CN110906046A CN201911212589.0A CN201911212589A CN110906046A CN 110906046 A CN110906046 A CN 110906046A CN 201911212589 A CN201911212589 A CN 201911212589A CN 110906046 A CN110906046 A CN 110906046A
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- valve rod
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
- F16K31/1262—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like one side of the diaphragm being spring loaded
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- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Actuator (AREA)
- Fluid-Driven Valves (AREA)
Abstract
The invention discloses a vacuum drainage electroless pure mechanical actuator which comprises a left shell, a diaphragm, a valve rod, an actuator main body, a spring, a sealing block, a sealing ring, a right shell and a valve head, wherein the left shell is installed on the left side of the actuator main body; the right end of the valve rod is matched with a valve head; an annular groove is formed in the wall surface of the inner cavity of the actuator main body, a sealing block is embedded in the annular groove, and a valve rod is matched with the inner ring of the sealing block; the right end of the actuator main body is matched with a right shell, and a sealing ring is arranged between the actuator main body and the right shell. The invention can realize the air pressure change of the inner cavity of the right shell in a purely mechanical mode, thereby playing the role of electroless control.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of vacuum systems, in particular to the technical field of vacuum drainage electroless pure mechanical actuators.
[ background of the invention ]
In many existing vacuum systems, electronic valves are used as actuators in the system to change the pressure conditions in the system. However, electronic valves are susceptible to damage with undesirable consequences. Thus, there is a need for an actuator that can change the air pressure condition of an object to be executed, not electrically but completely mechanically.
[ summary of the invention ]
The invention aims to solve the problems in the prior art, and provides a vacuum drainage electroless pure mechanical actuator which can realize the air pressure change of a cavity inside a right shell in a pure mechanical mode so as to achieve the effect of electroless control.
In order to achieve the purpose, the invention provides a vacuum drainage electroless pure mechanical actuator which comprises a left shell, a diaphragm, a valve rod, an actuator main body, a spring, a sealing block, a sealing ring, a right shell and a valve head, wherein the left shell is installed on the left side of the actuator main body; the right end of the valve rod is matched with a valve head; an annular groove is formed in the wall surface of the inner cavity of the actuator main body, a sealing block is embedded in the annular groove, and a valve rod is matched with the inner ring of the sealing block; the right end of the actuator main body is matched with a right shell, and a sealing ring is arranged between the actuator main body and the right shell.
Preferably, a first through hole is arranged below the left end face of the left shell, the first through hole is a circular through hole, and the first through hole is externally connected with the atmosphere or sealed through a pipeline; a first L-shaped through hole is formed in the lower portion inside the left shell and is externally connected with a vacuum source through a pipeline; and a first inner step is arranged on the wall surface of the inner cavity of the left shell, and the right side surface of the first inner step is in contact with the diaphragm.
Preferably, the middle part of the diaphragm is provided with a first annular bulge, and the first annular bulge is of a bulge structure with a circular arc-shaped cross section.
Preferably, a first annular groove is formed in the outer portion of the right side of the valve rod, and the first annular groove of the valve rod is matched with the valve head; the left end of the valve head is provided with a second annular groove, and the second annular groove of the valve head is matched with the valve rod; the right side casing right-hand member is equipped with the type of falling L through-hole, and the left end of the type of falling L through-hole just faces with the valve head, and the external atmosphere of lower extreme through-hole of the type of falling L passes through the pipeline.
Preferably, a second L-shaped through hole is formed in the lower left end of the actuator body, a second through hole is formed in the middle of the lower end of the actuator body, the second L-shaped through hole is communicated with the second through hole, and the second through hole is externally connected with a vacuum source through a pipeline.
Preferably, a second annular bulge is arranged on the left end face of the actuator main body, and the section of the second annular bulge is trapezoidal; and the outer part of the diaphragm is provided with an annular claw, and the annular claw of the diaphragm is matched with the second annular bulge of the actuator main body.
Preferably, an outer step is arranged outside the right end of the actuator main body, a second inner step is arranged on the inner wall of the left side of the right shell, an annular cavity is formed between the outer step and the second inner step, and a sealing ring is arranged in the annular cavity.
Preferably, a third through hole is formed in the left lower end of the right shell, and the third through hole is externally connected with an executed component through a pipeline.
The invention has the beneficial effects that: the invention can realize the air pressure change of the inner cavity of the right shell in a purely mechanical mode, thereby playing the role of electroless control.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a schematic view of a vacuum drainage electroless pure mechanical actuator according to the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1 in accordance with the present invention;
FIG. 3 is an enlarged view of portion B of FIG. 1 in accordance with the present invention;
fig. 4 is an enlarged view of the portion C of fig. 1 according to the present invention.
In the figure: 1-left shell, 11-first straight through hole, 12-first L-shaped through hole, 13-first inner step, 2-diaphragm, 21-annular claw, 22-first annular bulge, 23-middle boss, 3-valve rod, 31-first annular groove, 4-actuator body, 41-second L-shaped through hole, 42-second straight through hole, 43-second annular bulge, 44-outer step, 5-spring, 6-sealing block, 7-sealing ring, 8-right shell, 81-second inner step, 82-third straight through hole, 83-inverted L-shaped through hole, 9-valve head, 91-second annular groove and 10-pipeline.
[ detailed description ] embodiments
Referring to fig. 1, 2, 3 and 4, the invention comprises a left shell 1, a diaphragm 2, a valve rod 3, an actuator body 4, a spring 5, a sealing block 6, a sealing ring 7, a right shell 8 and a valve head 9, wherein the left shell 1 is installed on the left side of the actuator body 4, the diaphragm 2 is installed between the actuator body 4 and the left shell 1, a middle boss 23 is arranged on the right side of the diaphragm 2, the valve rod 3 is sleeved on the middle boss 23, the spring 5 is sleeved outside the valve rod 3, and the right end face of the spring 5 is in contact with an inner cavity of the actuator body 4; the right end of the valve rod 3 is matched with a valve head 9; an annular groove is formed in the wall surface of the inner cavity of the actuator body 4, a sealing block 6 is embedded in the annular groove, and the inner ring of the sealing block 6 is matched with the valve rod 3; the right end of the actuator main body 4 is matched with a right shell 8, and a sealing ring 7 is arranged between the actuator main body 4 and the right shell 8.
Specifically, a first through hole 11 is arranged below the left end face of the left shell 1, the first through hole 11 is a circular through hole, and the first through hole 11 is externally connected with the atmosphere or sealed through a pipeline 10; a first L-shaped through hole 12 is arranged below the inner part of the left shell 1, and the first L-shaped through hole 12 is externally connected with a vacuum source through a pipeline 10; and a first inner step 13 is arranged on the wall surface of the inner cavity of the left shell 1, and the right side surface of the first inner step 13 is contacted with the diaphragm 2.
Specifically, the middle of the diaphragm 2 is provided with a first annular protrusion 22, and the first annular protrusion 22 is a protrusion structure with a circular arc-shaped cross section.
Specifically, a first annular groove 31 is formed in the outer portion of the right side of the valve rod 3, and the first annular groove 31 of the valve rod 3 is matched with the valve head 9; the left end of the valve head 9 is provided with a second annular groove 91, and the second annular groove 91 of the valve head 9 is matched with the valve rod 3; the right end of the right shell 8 is provided with an inverted L-shaped through hole 83, the left end of the inverted L-shaped through hole 83 is opposite to the valve head 9, and the lower end of the inverted L-shaped through hole 83 is externally connected with the atmosphere through a pipeline 10.
Specifically, a second L-shaped through hole 41 is formed in the lower left end of the actuator body 4, a second through hole 42 is formed in the middle of the lower end of the actuator body 4, the second L-shaped through hole 41 is communicated with the second through hole 42, and the second through hole 42 is externally connected with a vacuum source through a pipeline 10.
Specifically, a second annular bulge 43 is arranged on the left end surface of the actuator body 4, and the section of the second annular bulge 43 is trapezoidal; the diaphragm 2 is externally provided with an annular claw 21, and the annular claw 21 of the diaphragm 2 is matched with the second annular bulge 43 of the actuator body 4.
Specifically, the outer step 44 is arranged outside the right end of the actuator main body 4, the second inner step 81 is arranged on the inner wall of the left side of the right shell 8, an annular cavity is formed between the outer step 44 and the second inner step 81, and a sealing ring 7 is arranged in the annular cavity.
Specifically, a third through hole 82 is formed in the lower left end of the right housing 8, and the third through hole 82 is externally connected with an executed component through the pipeline 10.
The working process of the invention is as follows:
the invention relates to a vacuum drainage electroless pure mechanical actuator, which is explained in the working process with reference to the attached drawings.
When the state of the chamber externally connected with the first through hole 11 at the left end of the left shell 1 is changed from sealing to atmosphere, the chambers in the middle and the right of the actuator are still in a vacuum state, the diaphragm 2 is subjected to atmospheric pressure, so that the diaphragm 2 is pressed from left to right, the valve head 9 is in contact with the inner wall surface of the right shell 8, the inverted L-shaped through hole 83 is sealed, the atmosphere accessed at the rightmost end of the original actuator is not accessed into the rightmost chamber, and finally the chamber of the executed component connected with the lower part of the third through hole 82 is changed into vacuum by atmospheric pressure.
When the valve needs to be closed, the first straight through hole 11 is closed, the first L-shaped through hole 12 introduces vacuum to the left chamber of the actuator, the left chamber of the actuator becomes vacuum again, the valve head 9 moves leftwards, the third straight through hole 82 is communicated with the inverted L-shaped through hole 83, and the chamber of the executed component connected with the lower part of the third straight through hole 82 is changed into atmospheric pressure again from vacuum.
According to the invention, the air pressure change of the inner cavity of the right shell can be realized in a purely mechanical mode, so that the effect of electroless control is achieved.
The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.
Claims (8)
1. The utility model provides a vacuum drainage does not have pure mechanical actuator which characterized in that: the left sealing device comprises a left shell (1), a diaphragm (2), a valve rod (3), an actuator body (4), a spring (5), a sealing block (6), a sealing ring (7), a right shell (8) and a valve head (9), wherein the left shell (1) is installed on the left side of the actuator body (4), the diaphragm (2) is installed between the actuator body (4) and the left shell (1), a middle boss (23) is arranged on the right side of the diaphragm (2), the valve rod (3) is sleeved on the middle boss (23), the spring (5) is sleeved outside the valve rod (3), and the right end face of the spring (5) is contacted with a cavity in the actuator body (4); a valve head (9) is matched at the right end of the valve rod (3); an annular groove is formed in the wall surface of the inner cavity of the actuator body (4), a sealing block (6) is embedded in the annular groove, and the inner ring of the sealing block (6) is matched with the valve rod (3); the right end of the actuator main body (4) is matched with a right shell (8), and a sealing ring (7) is arranged between the actuator main body (4) and the right shell (8).
2. A vacuum displacement electroless pure mechanical actuator as claimed in claim 1 wherein: a first through hole (11) is arranged below the left end face of the left shell (1), the first through hole (11) is a circular through hole, and the first through hole (11) is externally connected with the atmosphere or sealed through a pipeline (10); a first L-shaped through hole (12) is formed in the lower portion inside the left shell (1), and the first L-shaped through hole (12) is externally connected with a vacuum source through a pipeline (10); the inner cavity wall surface of the left shell (1) is provided with a first inner step (13), and the right side surface of the first inner step (13) is in contact with the diaphragm (2).
3. A vacuum displacement electroless pure mechanical actuator as claimed in claim 1 wherein: the diaphragm (2) is provided with a first annular bulge (22) in the middle, and the first annular bulge (22) is of a bulge structure with a circular arc-shaped cross section.
4. A vacuum displacement electroless pure mechanical actuator as claimed in claim 1 wherein: a first annular groove (31) is formed in the outer portion of the right side of the valve rod (3), and the first annular groove (31) of the valve rod (3) is matched with the valve head (9); a second annular groove (91) is formed in the left end of the valve head (9), and the second annular groove (91) of the valve head (9) is matched with the valve rod (3); the right end of the right shell (8) is provided with an inverted L-shaped through hole (83), the left end of the inverted L-shaped through hole (83) is right opposite to the valve head (9), and the lower end of the inverted L-shaped through hole (83) is externally connected with the atmosphere through a pipeline (10).
5. A vacuum displacement electroless pure mechanical actuator as claimed in claim 1 wherein: the left lower end of the actuator body (4) is provided with a second L-shaped through hole (41), the middle of the lower end of the actuator body (4) is provided with a second through hole (42), the second L-shaped through hole (41) is communicated with the second through hole (42), and the second through hole (42) is externally connected with a vacuum source through a pipeline (10).
6. A vacuum displacement electroless pure mechanical actuator as claimed in claim 1 wherein: a second annular bulge (43) is arranged on the left end face of the actuator main body (4), and the section of the second annular bulge (43) is trapezoidal; the outer part of the diaphragm (2) is provided with an annular claw (21), and the annular claw (21) of the diaphragm (2) is matched with a second annular bulge (43) of the actuator main body (4).
7. A vacuum displacement electroless pure mechanical actuator as claimed in claim 1 wherein: the outer step (44) is arranged outside the right end of the actuator main body (4), the second inner step (81) is arranged on the inner wall of the left side of the right shell (8), an annular cavity is formed between the outer step (44) and the second inner step (81), and a sealing ring (7) is arranged in the annular cavity.
8. A vacuum displacement electroless pure mechanical actuator as claimed in claim 1 wherein: and a third through hole (82) is formed in the lower left end of the right shell (8), and the third through hole (82) is externally connected with an executed part through a pipeline (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911212589.0A CN110906046A (en) | 2019-12-02 | 2019-12-02 | Vacuum drainage electroless pure mechanical actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911212589.0A CN110906046A (en) | 2019-12-02 | 2019-12-02 | Vacuum drainage electroless pure mechanical actuator |
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| Publication Number | Publication Date |
|---|---|
| CN110906046A true CN110906046A (en) | 2020-03-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911212589.0A Pending CN110906046A (en) | 2019-12-02 | 2019-12-02 | Vacuum drainage electroless pure mechanical actuator |
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| Country | Link |
|---|---|
| CN (1) | CN110906046A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59226704A (en) * | 1983-06-07 | 1984-12-19 | サムソン・アクチエンゲゼルシヤフト | Regulator for membrane |
| CN205745581U (en) * | 2016-06-30 | 2016-11-30 | 纽威石油设备（苏州）有限公司 | A kind of pneumatic diaphragm executor and relief valve |
| CN109027355A (en) * | 2018-08-31 | 2018-12-18 | 杭州电子科技大学 | A kind of micro-control controller |
| CN109113158A (en) * | 2018-08-31 | 2019-01-01 | 杭州电子科技大学 | A kind of Self-controllable level distribution fluid collection device |
| CN109267619A (en) * | 2018-08-31 | 2019-01-25 | 杭州电子科技大学 | A kind of closestool manual control remote button control system |
| CN110319233A (en) * | 2019-06-25 | 2019-10-11 | 浙江广播电视大学 | A kind of shock proof vacuum interface valve |
-
2019
- 2019-12-02 CN CN201911212589.0A patent/CN110906046A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59226704A (en) * | 1983-06-07 | 1984-12-19 | サムソン・アクチエンゲゼルシヤフト | Regulator for membrane |
| CN205745581U (en) * | 2016-06-30 | 2016-11-30 | 纽威石油设备（苏州）有限公司 | A kind of pneumatic diaphragm executor and relief valve |
| CN109027355A (en) * | 2018-08-31 | 2018-12-18 | 杭州电子科技大学 | A kind of micro-control controller |
| CN109113158A (en) * | 2018-08-31 | 2019-01-01 | 杭州电子科技大学 | A kind of Self-controllable level distribution fluid collection device |
| CN109267619A (en) * | 2018-08-31 | 2019-01-25 | 杭州电子科技大学 | A kind of closestool manual control remote button control system |
| CN110319233A (en) * | 2019-06-25 | 2019-10-11 | 浙江广播电视大学 | A kind of shock proof vacuum interface valve |
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Application publication date: 20200324 |
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