CN110890303A - Corrosion-resistant conveying device and corrosion-resistant method of conveying device - Google Patents
Corrosion-resistant conveying device and corrosion-resistant method of conveying device Download PDFInfo
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- CN110890303A CN110890303A CN201911133579.8A CN201911133579A CN110890303A CN 110890303 A CN110890303 A CN 110890303A CN 201911133579 A CN201911133579 A CN 201911133579A CN 110890303 A CN110890303 A CN 110890303A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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Abstract
The application discloses an anti-corrosion conveying device and an anti-corrosion method of the conveying device, and relates to the field of semiconductor manufacturing. The anti-corrosion conveying device at least comprises a conveying device, a heating device and a temperature controller; the heating device is arranged outside the conveying device and used for heating the conveying device; the heating device is connected with the temperature controller; the problem that the residual corrosive gas is in contact with water vapor and then corrodes the conveying device is solved; the conveying device is prevented from being corroded by corrosive gas, and the service life of the conveying device is prolonged.
Description
Technical Field
The application relates to the field of semiconductor manufacturing, in particular to an anti-corrosion conveying device and an anti-corrosion method of the conveying device.
Background
In the polysilicon (poly) process, hydrogen bromide (HBr), chlorine (Cl) are used2) After the polysilicon process is finished, some corrosive gas remains. When the wafer is circulated among the devices, the corrosive gas enters the air environment along with the wafer from the vacuum environment, and can contact with the water vapor in the air environment to form strong acid.
After the polysilicon process is completed on the wafer, the wafer is taken out by a mechanical arm and is placed into a conveying device (AirLock), then air is filled into a cavity of the conveying device, and if the air humidity is high, the conveying device is corroded by strong acid formed after the residual corrosive gas contacts with water vapor.
Disclosure of Invention
The application provides an anti-corrosion conveying device and an anti-corrosion method of the conveying device, which can solve the problem that the conveying device is corroded after residual corrosive gas and water vapor contact in the related technology.
In a first aspect, an embodiment of the present application provides an anti-corrosion conveying device, which at least includes a conveying device, a heating device, and a temperature controller;
the heating device is arranged outside the conveying device and used for heating the conveying device;
the heating device is connected with the temperature controller.
Alternatively, the heating means are provided on the upper and lower sides of the conveyor.
Optionally, the system further comprises a temperature sensor and a controller;
the temperature sensor is arranged in the cavity of the conveying device and is connected with the controller, and the controller is connected with the temperature controller.
Optionally, the system further comprises a humidity sensor and a controller;
the humidity sensor is arranged in the cavity of the conveying device, the humidity sensor is connected with the controller, and the controller is connected with the temperature controller
Optionally, the system further comprises a temperature sensor, a humidity sensor and a controller;
the temperature sensor and the humidity sensor are arranged in the cavity of the conveying device and are respectively connected with the controller, and the controller is connected with the temperature controller.
Optionally, the heating device is a heating belt.
In a second aspect, embodiments of the present application provide a method for corrosion resistance of a conveyor, the method including:
heating the conveyor by a heating device;
wherein, heating device sets up the outside at conveyer, and heating device is connected with the temperature controller.
Optionally, heating the conveying device by a heating device, comprising:
heating the upper and lower sides of the conveyor by a heating device;
wherein the heating means are provided at the upper and lower sides of the conveyor.
Optionally, the method further includes:
detecting a temperature within a chamber of a conveyor by a temperature sensor;
heating the conveyor by a heating device, comprising:
the heating temperature of the heating device is adjusted by controlling the temperature controller through the controller according to the temperature;
heating the conveyor by a heating device;
wherein, temperature sensor sets up in conveyer's cavity, and temperature sensor is connected with the controller, and the controller is connected with the temperature controller.
Optionally, the method further includes:
detecting, by a humidity sensor, humidity within a chamber of a conveyor;
heating the conveyor by a heating device, comprising:
the heating temperature of the heating device is adjusted by controlling the temperature controller through the controller according to the humidity;
heating the conveyor by a heating device;
wherein, humidity transducer sets up in conveyer's cavity, and humidity transducer is connected with the controller, and the controller is connected with the temperature controller.
Optionally, the method further includes:
detecting a temperature within a chamber of a conveyor by a temperature sensor;
detecting, by a humidity sensor, humidity within a chamber of a conveyor;
heating the conveyor by a heating device, comprising:
the heating temperature of the heating device is adjusted by controlling the temperature controller according to the temperature and the humidity through the controller;
heating the conveyor by a heating device;
wherein, temperature sensor and humidity transducer set up in conveyer's cavity, and temperature sensor, humidity transducer are connected with the controller respectively, and the controller is connected with the temperature controller.
Optionally, the heating device is a heating belt.
The technical scheme at least comprises the following advantages:
set up heating device in conveyer's the outside, through temperature controller control heating device's heating temperature, utilize heating device heating conveyer, reduce the humidity in the conveyer, reduced steam content, avoid remaining corrosive gas to get into conveyer after and cause the corruption with the strong acid that the steam contact formed to conveyer, improved conveying system's defect, prolonged life.
Drawings
In order to more clearly illustrate the detailed description of the present application or the technical solutions in the prior art, the drawings needed to be used in the detailed description of the present application or the prior art description will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a corrosion-resistant conveyor according to an embodiment of the present disclosure;
FIG. 2 is a flow chart of a method for corrosion resistance of a conveyor according to an embodiment of the present disclosure;
FIG. 3 is a flow chart of an alternative method of corrosion resistance of a conveyor according to embodiments of the present disclosure;
FIG. 4 is a flow chart of an alternative method of corrosion resistance of a conveyor according to embodiments of the present disclosure;
fig. 5 is a flow chart of an alternative corrosion-resistant method for a conveyor according to an embodiment of the present disclosure.
Detailed Description
The technical solutions in the present application will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; the connection can be mechanical connection or electrical connection; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
In addition, the technical features mentioned in the different embodiments of the present application described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1, a schematic structural diagram of a corrosion-resistant transmission device provided in an embodiment of the present application is shown, the corrosion-resistant transmission device at least includes a transmission device 110, a heating device and a temperature controller 150.
A heating device is provided outside the conveyor 110, the heating device being used to heat the conveyor 110.
The heating device is connected with a temperature controller 150.
The heating device heats the conveyor 110, reducing the humidity within the chamber of the conveyor 110. In order to make the heating uniform, heating means are provided at the upper and lower sides of the conveyor 110.
The heating device 120 and the heating device 130 are respectively connected to the temperature controller 150 through wires 140. The temperature controller 150 is used to control the heating temperature of the heating device.
The distance between the heating device 120 and the conveying device 110, and the distance between the heating device 130 and the conveying device 110 are determined according to actual needs, and the embodiment of the present application is not limited thereto.
When the heating device heats the conveying device 110, the humidity in the cavity of the conveying device 110 is reduced, that is, the content of water vapor in the conveying device 110 is reduced, and after the residual corrosive gas enters the conveying device 110, the residual corrosive gas is not easy to contact with the water vapor to form strong acid, so that the corrosion to the conveying device is avoided, the defect of improving the conveying system is achieved, and the service life is prolonged.
Alternatively, the temperature of the heating conveyor 110 is set to 60 degrees celsius.
In an alternative embodiment based on the embodiment shown in fig. 1, the corrosion-resistant conveyor further comprises a temperature sensor and a controller.
A temperature sensor is disposed within the chamber of the conveyor, the temperature sensor for detecting a temperature within the chamber of the conveyor.
The temperature sensor is connected with the controller, and the controller obtains the temperature that the temperature sensor detected.
The controller is connected with the temperature controller, and the controller controls the temperature controller to adjust the heating temperature of the heating device according to the temperature detected by the temperature sensor.
Optionally, a predetermined temperature is set, when the controller detects that the temperature is lower than the predetermined temperature, the controller controls the temperature controller to increase the heating temperature of the heating device, and when the controller detects that the temperature is higher than or equal to the predetermined temperature, the controller controls the temperature controller to maintain the heating temperature of the heating device.
Alternatively, the predetermined temperature is set to 60 ℃.
In an alternative embodiment based on the embodiment shown in fig. 1, the corrosion-resistant conveyor further comprises a humidity sensor and a controller.
A humidity sensor is disposed within the chamber of the conveyor, the humidity sensor being configured to detect a humidity within the chamber of the conveyor.
The humidity sensor is connected with the controller, and the controller acquires the humidity detected by the humidity sensor.
The controller is connected with the temperature controller, and the controller controls the temperature controller to adjust the heating temperature of the heating device according to the humidity detected by the humidity sensor.
Optionally, a predetermined humidity is set, when the controller detects that the humidity is greater than the predetermined humidity, the controller controls the temperature controller to increase the heating temperature of the heating device, and when the controller detects that the humidity is less than or equal to the predetermined humidity, the controller controls the temperature controller to maintain the heating temperature of the heating device.
It should be noted that, in order to reduce the moisture content in the chamber of the conveyor, the humidity in the chamber of the conveyor is as small as possible, and ideally the humidity in the chamber of the conveyor is 0%, so the predetermined humidity may be set to a value close to 0%, and the specific value of the predetermined humidity may be set according to practical situations, which is not limited in the embodiment of the present application.
In an alternative embodiment based on the embodiment shown in fig. 1, the corrosion-resistant conveyor further comprises a temperature sensor, a humidity sensor, and a controller.
The temperature sensor and the humidity sensor are arranged in the cavity of the conveying device, the temperature sensor is used for detecting the temperature in the cavity of the conveying device, and the humidity sensor is used for detecting the humidity in the cavity of the conveying device.
The temperature sensor is connected with the controller, and the controller acquires the temperature detected by the temperature sensor; the humidity sensor is connected with the controller, and the controller acquires the humidity detected by the humidity sensor.
The controller is connected with the temperature controller, and the controller controls the temperature controller to adjust the heating temperature of the heating device according to the acquired temperature and humidity.
Optionally, a preset temperature and a preset humidity are set, when the controller detects that the humidity is higher than the preset humidity and/or the detected temperature is lower than the preset temperature, the controller controls the temperature controller to increase the heating temperature of the heating device, and when the controller detects that the humidity is not lower than the preset humidity, the controller controls the temperature controller to maintain the heating temperature of the heating device;
it should be noted that, the specific manner in which the controller controls the temperature controller to adjust the heating temperature of the heating device according to the obtained temperature and/or humidity is the prior art, and details are not described here.
Optionally, the heating device in the corrosion-resistant conveyor is a heating belt.
It should be noted that, since the transfer device is in a vacuum environment before the wafer is placed in the vacuum environment, after the temperature sensor and/or the humidity sensor are/is arranged, the sealing effect of the transfer device needs to be ensured.
Optionally, the transfer device is an AirLock.
Referring to fig. 2, an anti-corrosion method for a transfer device according to an embodiment of the present application is shown, the method at least includes the following steps:
The heating device is arranged on the outer side of the conveying device and is connected with the temperature controller, and the temperature controller is used for controlling the heating temperature of the heating device.
In summary, according to the corrosion-resistant method for the conveying device provided by the embodiment of the application, the heating device is arranged on the outer side of the conveying device, the conveying device is heated by the heating device, the humidity in the cavity of the conveying device is reduced, and the problem that the conveying device is corroded after residual corrosive gas is contacted with water vapor in the conveying device is solved; the conveying device is prevented from being corroded by corrosive gas, and the service life of the conveying device is prolonged.
In an alternative embodiment based on the embodiment shown in fig. 2, a temperature sensor is arranged in the chamber of the conveyor, the temperature sensor is connected with a controller, the controller is connected with a temperature controller, and the corrosion-resistant method of the conveyor can be realized by the following steps, as shown in fig. 3:
Optionally, after the wafer is placed in the cavity of the conveying device, air is injected, and the temperature in the cavity of the conveying device is detected by the temperature sensor; the temperature sensor detects a temperature within the chamber of the conveyor at a predetermined time period while the wafer is within the chamber of the conveyor and sends the detected temperature to the controller.
And step 302, adjusting the heating temperature of the heating device by the controller according to the temperature control temperature controller.
The controller acquires the temperature in the cavity of the conveying device detected by the temperature sensor, and controls the temperature sensor to adjust the heating temperature of the heating device according to the temperature.
Optionally, a predetermined temperature is set, when the controller detects that the temperature is lower than the predetermined temperature, the controller controls the temperature controller to increase the heating temperature of the heating device, and when the controller detects that the temperature is higher than or equal to the predetermined temperature, the controller controls the temperature controller to maintain the heating temperature of the heating device.
Alternatively, the predetermined temperature is set to 60 ℃.
Optionally, heating means are provided above and below the conveyor.
Optionally, the heating device is a heating belt.
In an alternative embodiment based on the embodiment shown in fig. 2, a humidity sensor is arranged in the chamber of the conveyor, the humidity sensor is connected with a controller, the controller is connected with a temperature controller, and the corrosion-resistant method of the conveyor can be realized by the following steps, as shown in fig. 4:
Optionally, after the wafer is placed in the cavity of the conveying device, air is injected, and the humidity in the cavity of the conveying device is detected by a humidity sensor; when the wafer is in the chamber of the conveyor, the humidity sensor detects the humidity in the chamber of the conveyor at a predetermined time period and sends the detected humidity to the controller.
And step 402, controlling the temperature controller by the controller according to the humidity to adjust the heating temperature of the heating device.
The controller obtains the humidity in the cavity of the conveying device detected by the humidity sensor, and the controller controls the temperature controller to adjust the heating temperature of the heating device according to the humidity.
Optionally, a predetermined humidity is set, when the controller detects that the humidity is less than the predetermined humidity, the controller controls the temperature controller to increase the heating temperature of the heating device, and when the controller detects that the humidity is greater than or equal to the predetermined humidity, the controller controls the temperature controller to maintain the heating temperature of the heating device.
Alternatively, the predetermined temperature is set to 60 ℃.
It should be noted that, in order to reduce the moisture content in the chamber of the conveyor, the humidity in the chamber of the conveyor is as small as possible, and ideally the humidity in the chamber of the conveyor is 0%, so the predetermined humidity may be set to a value close to 0%, and the specific value of the predetermined humidity may be set according to practical situations, which is not limited in the embodiment of the present application.
In step 403, the conveyor is heated by a heating device.
Optionally, heating means are provided above and below the conveyor.
Optionally, the heating device is a heating belt.
In an alternative embodiment based on the embodiment shown in fig. 2, a temperature sensor and a humidity sensor are arranged in a chamber of the conveyer, the temperature sensor and the humidity sensor are respectively connected with a controller, the controller is connected with a temperature controller, and the corrosion resisting method of the conveyer can be realized by the following steps, as shown in fig. 5:
in step 501, the temperature in the chamber of the conveyor is detected by a temperature sensor.
Optionally, after the wafer is placed in the cavity of the conveying device, air is injected, and the temperature in the cavity of the conveying device is detected by the temperature sensor; the temperature sensor detects a temperature within the chamber of the conveyor at a predetermined time period while the wafer is within the chamber of the conveyor and sends the detected temperature to the controller.
Optionally, after the wafer is placed in the cavity of the conveying device, air is injected, and the humidity in the cavity of the conveying device is detected by a humidity sensor; when the wafer is in the chamber of the conveyor, the humidity sensor detects the humidity in the chamber of the conveyor at a predetermined time period and sends the detected humidity to the controller.
It should be noted that the temperature sensor and the humidity sensor may or may not operate simultaneously.
Optionally, a preset temperature and a preset humidity are set, when the controller detects that the humidity is higher than the preset humidity and/or the detected temperature is lower than the preset temperature, the controller controls the temperature controller to increase the heating temperature of the heating device, and when the controller detects that the humidity is not lower than the preset humidity, the controller controls the temperature controller to maintain the heating temperature of the heating device;
it should be noted that, the specific manner in which the controller controls the temperature controller to adjust the heating temperature of the heating device according to the obtained temperature and/or humidity is the prior art, and details are not described here.
Optionally, heating means are provided above and below the conveyor.
Optionally, the heating device is a heating belt.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications of this invention are intended to be covered by the scope of the invention as expressed herein.
Claims (12)
1. An anti-corrosion conveying device is characterized by at least comprising a conveying device, a heating device and a temperature controller;
the heating device is arranged outside the conveying device and used for heating the conveying device;
the heating device is connected with the temperature controller.
2. An erosion resistant conveyor as claimed in claim 1 or claim 2 wherein the heating means are provided on the upper and lower sides of the conveyor.
3. The corrosion resistant conveyor of claim 1 or 2 further comprising a temperature sensor and a controller;
the temperature sensor is arranged in the cavity of the conveying device and connected with the controller, and the controller is connected with the temperature controller.
4. The corrosion-resistant conveyor of claim 1 or 2, further comprising a humidity sensor and a controller;
the humidity sensor is arranged in the cavity of the conveying device and connected with the controller, and the controller is connected with the temperature controller.
5. The corrosion resistant conveyor of claim 1 or 2 further comprising a temperature sensor, a humidity sensor and a controller;
the temperature sensor and the humidity sensor are arranged in a cavity of the conveying device and are respectively connected with the controller, and the controller is connected with the temperature controller.
6. An erosion resistant conveyor as claimed in any one of claims 1 to 5 wherein the heating means is a heating belt.
7. A method of corrosion resistance of a conveyor, the method comprising:
heating the conveyor by a heating device;
wherein, heating device sets up the outside at conveyer, heating device is connected with the temperature controller.
8. The method of claim 7, wherein heating the conveyor by a heating device comprises:
heating the upper and lower sides of the conveyor by the heating means;
wherein the heating means are provided at upper and lower sides of the transfer means.
9. The method according to claim 7 or 8, characterized in that the method further comprises:
detecting a temperature within a chamber of the conveyor by a temperature sensor;
the heating of the conveyor by the heating device comprises:
the temperature controller is controlled by the controller according to the temperature to adjust the heating temperature of the heating device;
heating the conveyor by the heating device;
the temperature sensor is arranged in a cavity of the conveying device and connected with the controller, and the controller is connected with the temperature controller.
10. The method according to claim 7 or 8, characterized in that the method further comprises:
detecting, by a humidity sensor, humidity within a chamber of the conveyor;
the heating of the conveyor by the heating device comprises:
the temperature controller is controlled by a controller according to the humidity to adjust the heating temperature of the heating device;
heating the conveyor by the heating device;
the humidity sensor is arranged in a cavity of the conveying device and connected with the controller, and the controller is connected with the temperature controller.
11. The method according to claim 7 or 8, characterized in that the method further comprises:
detecting a temperature within a chamber of the conveyor by a temperature sensor;
detecting, by a humidity sensor, humidity within a chamber of the conveyor;
the heating of the conveyor by the heating device comprises:
controlling the temperature controller to adjust the heating temperature of the heating device through a controller according to the temperature and the humidity;
heating the conveyor by the heating device;
the temperature sensor and the humidity sensor are arranged in a cavity of the conveying device, the temperature sensor and the humidity sensor are respectively connected with the controller, and the controller is connected with the temperature controller.
12. A method according to any one of claims 7 to 11, wherein the heating means is a heating belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911133579.8A CN110890303A (en) | 2019-11-18 | 2019-11-18 | Corrosion-resistant conveying device and corrosion-resistant method of conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911133579.8A CN110890303A (en) | 2019-11-18 | 2019-11-18 | Corrosion-resistant conveying device and corrosion-resistant method of conveying device |
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| CN110890303A true CN110890303A (en) | 2020-03-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911133579.8A Pending CN110890303A (en) | 2019-11-18 | 2019-11-18 | Corrosion-resistant conveying device and corrosion-resistant method of conveying device |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100144127A1 (en) * | 2007-07-13 | 2010-06-10 | Canon Anelva Corporation | METHOD FOR REDUCING AGGLOMERATION OF Si LAYER, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND VACUUM TREATMENT APPARATUS |
| CN107871682A (en) * | 2016-09-27 | 2018-04-03 | 北京北方华创微电子装备有限公司 | Transmission chamber and semiconductor processing equipment |
-
2019
- 2019-11-18 CN CN201911133579.8A patent/CN110890303A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100144127A1 (en) * | 2007-07-13 | 2010-06-10 | Canon Anelva Corporation | METHOD FOR REDUCING AGGLOMERATION OF Si LAYER, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND VACUUM TREATMENT APPARATUS |
| CN107871682A (en) * | 2016-09-27 | 2018-04-03 | 北京北方华创微电子装备有限公司 | Transmission chamber and semiconductor processing equipment |
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Application publication date: 20200317 |
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