CN110872689A - Evaporation boat assembly and disassembly tools and evaporation equipment - Google Patents
Evaporation boat assembly and disassembly tools and evaporation equipment Download PDFInfo
- Publication number
- CN110872689A CN110872689A CN201811002751.1A CN201811002751A CN110872689A CN 110872689 A CN110872689 A CN 110872689A CN 201811002751 A CN201811002751 A CN 201811002751A CN 110872689 A CN110872689 A CN 110872689A
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- China
- Prior art keywords
- evaporation
- handle
- movable electrode
- boat
- supporting
- Prior art date
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Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 122
- 230000008020 evaporation Effects 0.000 title claims abstract description 122
- 230000001681 protective effect Effects 0.000 claims description 9
- 238000009413 insulation Methods 0.000 claims description 7
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 3
- 239000010962 carbon steel Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 7
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 238000009834 vaporization Methods 0.000 abstract description 4
- 230000008016 vaporization Effects 0.000 abstract description 4
- 238000005191 phase separation Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides an evaporation boat dismounting tool and evaporation equipment, wherein the evaporation equipment comprises a fixed electrode and a movable electrode, an evaporation boat is clamped between the fixed electrode and the movable electrode, and the evaporation boat dismounting tool comprises a supporting seat and a dismounting handle; the supporting seat comprises a supporting part; the dismouting handle includes the handle and the cantilever that is connected with the handle, and the cantilever is kept away from the one end of handle and is formed the support end, supports the supporting part phase-match of end and supporting seat, and the cantilever is close to the one end of handle and forms butt portion, and butt portion can rotate and promote the movable electrode removal of evaporation equipment around supporting the end under the drive of handle. During the use, the supporting seat is fixed in on the coating by vaporization equipment through location portion, and the supporting part of the supporting end of dismouting handle and supporting seat cooperatees for the dismouting handle can use the supporting end to rotate as the fulcrum, and the butt portion of dismouting handle can promote the movable electrode of coating by vaporization equipment and remove, makes movable electrode and evaporation boat phase separation, simultaneously, also can play laborsaving effect, the operation of being more convenient for.
Description
Technical Field
The application relates to the technical field of evaporation plating, especially relates to an evaporation boat assembly and disassembly tools and evaporation plating equipment.
Background
The evaporation process is usually performed in an evaporation apparatus, the material to be evaporated is placed in an evaporation boat, and then both ends of the evaporation boat are connected to electrodes, so that the evaporation boat is electrified to generate heat and evaporate the film material.
The evaporation equipment includes one fixed electrode and one movable electrode connected to one elastic element, and when one evaporation boat is set between the fixed electrode and the movable electrode, the evaporation boat is clamped by the movable electrode and the fixed electrode and connected electrically to the two electrodes under the action of the elastic element.
The process of assembling and disassembling the evaporation boat is usually completed manually by an operator, in order to ensure the fixed stability of the evaporation boat, the elastic modulus of the elastic element is usually high, and the size of the movable electrode is usually small, so that the acting point is difficult to determine, and the assembly and disassembly of the evaporation boat of the existing evaporation equipment are inconvenient.
Disclosure of Invention
The application provides an evaporation boat assembly and disassembly tools and coating by vaporization equipment to solve the comparatively inconvenient problem of evaporation boat dismouting of current coating by vaporization equipment.
In a first aspect, an embodiment of the present invention provides an evaporation boat dismounting tool, which is used for dismounting an evaporation boat on an evaporation apparatus, where the evaporation apparatus includes a fixed electrode and a movable electrode, the evaporation boat is clamped between the fixed electrode and the movable electrode, the movable electrode can be away from the fixed electrode under the action of an external force, and the evaporation boat dismounting tool includes a support seat and a dismounting handle;
the supporting seat comprises a supporting part;
the disassembly and assembly handle comprises a handle and a cantilever connected with the handle, one end of the cantilever, far away from the handle, forms a support end, the support end is matched with the support part of the support seat, one end of the cantilever, close to the handle, forms an abutting part, so that the support seat is fixed on the evaporation equipment, the support end abuts against the support part, and the abutting part can be driven by the handle to rotate around the support end and push the movable electrode of the evaporation equipment to move.
Optionally, a first avoiding notch is formed in the disassembling handle, the width of the first avoiding notch is larger than that of the evaporation boat, and when the supporting portion of the supporting seat is abutted to the supporting end of the disassembling handle, the evaporation boat penetrates through the first avoiding notch.
Optionally, a second avoidance notch matched with the shape of the fixed electrode of the evaporation equipment is formed in the supporting seat, and the second avoidance notch is used for avoiding the fixed electrode.
Optionally, the supporting seat further comprises a positioning portion, the supporting seat can be fixed to the evaporation equipment through the positioning portion, and when the supporting seat is fixed to the evaporation equipment, the positioning portion of the supporting seat is abutted to the side wall of the evaporation equipment.
Optionally, the support seat and/or the detachable handle are made of stainless steel or carbon steel.
Optionally, at least one edge of the support seat and/or the assembling handle is processed into a round angle.
Optionally, a protective sleeve for heat insulation and insulation is sleeved outside the handle. The evaporation boat dismantling tool as set forth in claim 8, wherein said protective sheath is formed with an anti-slip pattern.
Optionally, the support seat is provided with at least one lightening hole.
In a second aspect, an embodiment of the present invention provides an evaporation apparatus, including an evaporation boat, a fixed electrode, a movable electrode, and the evaporation boat assembly and disassembly tool, where the evaporation boat is clamped between the fixed electrode and the movable electrode;
the movable electrode is connected with the elastic element, the movable electrode can be far away from the fixed electrode under the action of external force, and the movable electrode can be close to the fixed electrode under the action of the elastic force of the elastic element when the external force is relieved;
the supporting part of the evaporation boat dismounting tool is fixed on the evaporation equipment.
This application is through setting up supporting seat and dismouting handle, in the use, on the supporting seat was fixed in the evaporation equipment through location portion, the supporting part of the supporting end of dismouting handle and supporting seat cooperateed for the dismouting handle can use the supporting end to make to support to hold the portion and support and hold the movable electrode to the direction swing that is close to the movable electrode as the fulcrum, the butt portion of dismouting handle can promote the movable electrode removal of evaporation equipment, make movable electrode and evaporation boat phase separation, thereby the dismouting of the evaporation boat of being convenient for. The detachable handle is equivalent to a lever in the using process, and can also play a labor-saving effect and be more convenient to operate.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
FIG. 1 is a diagram illustrating an exemplary use of a boat loading/unloading tool according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a support base according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a detachable handle according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The application provides an evaporation boat assembly and disassembly tools and evaporation equipment 100.
The evaporation boat mounting and dismounting tool is used for mounting and dismounting the evaporation boat 103 on the evaporation apparatus 100, in the embodiment, the evaporation apparatus 100 comprises the fixed electrode 101 and the movable electrode 102, and the evaporation boat 103 is clamped between the fixed electrode 101 and the movable electrode 102.
The movable electrode 102 is connected to the elastic element 104 and disposed on the evaporation apparatus 100 through the elastic element 104, wherein the elastic element 104 may be an original element such as a spring, etc., the movable electrode 102 can move in a direction away from the fixed electrode 101 under an external force, at this time, the elastic element 104 is compressed or stretched to accumulate a force, and when the external force is removed, the elastic potential energy stored in the elastic element 104 is released, so that the movable electrode 102 can move in a direction close to the fixed electrode 101 under the elastic force of the elastic element 104.
In the using process, the movable electrode 102 is moved in the direction away from the fixed electrode 101, then the evaporation boat 103 is placed between the fixed electrode 101 and the movable electrode 102, and then the movable electrode 102 is released, so that the movable electrode 102 is driven by the elastic element 104 to move in the direction close to the fixed electrode 101 and is in contact with the evaporation boat 103. At this time, the evaporation boat 103 is held between the fixed electrode 101 and the movable electrode 102, and is electrically connected to the fixed electrode 101 and the movable electrode 102.
The evaporator boat mounting/dismounting tool in this embodiment includes a support base 210 and a mounting/dismounting lever 220.
The support base 210 includes a support portion 211, and the detachable lever 220 includes a handle 221 and a cantilever 225.
The handle 221 is used for an operator to hold by hand during use and operate the detachable handle 220.
The cantilever 225 is connected to the handle 221, and an end of the cantilever 225 away from the handle 221 forms a support end 222, the support end 222 is matched with the support portion 211 of the support seat 210, and the support end 222 is matched with the support portion 211 of the support seat 210 and serves as a fulcrum during rotation of the assembling handle 220 during use.
An end of the cantilever 225 adjacent the handle 221 forms an abutment 223, the abutment 223 being adapted to abut the movable electrode 102 during use to urge the movable electrode 102 to move.
Specifically, when the supporting base 210 is fixed to the evaporation apparatus 100 and the supporting end 222 abuts against the supporting portion 221, the abutting portion 223 can rotate around the supporting end 222 under the driving of the handle 221 and abut against the movable electrode 102 of the evaporation apparatus 100, and when the handle 221 is further rotated, the abutting portion 223 can apply an external force to the movable electrode 102, and the movable electrode 102 will move in a direction away from the fixed electrode 101 under the action of the external force.
When the handle 221 is released, the external force applied to the movable electrode 102 is removed, and at this time, the movable electrode 102 moves toward the fixed electrode 102 by the elastic force of the elastic member 104.
In one embodiment, the supporting portion 211 is a groove formed on the supporting base 210, and can function as a supporting end 222 for supporting the detachable handle 220.
In another embodiment, the supporting portion 211 is a through hole opened on the supporting base 210, and the size of the through hole is slightly larger than that of the supporting end 222 of the assembling handle 220. When the support portion 211 of the detachable handle 220 is supported by the through hole, a downward force is applied to an inner wall of the through hole close to the movable electrode 102, and an upward force is applied to an inner wall of the through hole close to the fixed electrode 101, so that the support base 210 is prevented from tilting.
According to the invention, by arranging the supporting seat 210 and the dismounting handle 220, in the using process, the supporting seat 210 is fixed on the evaporation equipment 100, the supporting end 222 of the dismounting handle 220 is matched with the supporting part 211 of the supporting seat 210, so that the dismounting handle 220 can swing towards the direction close to the movable electrode 102 by taking the supporting end 222 as a fulcrum to enable the abutting part 223 to abut against the movable electrode 102, and the abutting part 223 of the dismounting handle 220 can push the movable electrode 102 of the evaporation equipment 100 to move, so that the movable electrode 102 is separated from the evaporation boat 103, and the dismounting of the evaporation boat 103 is facilitated. The detachable handle 220 is equivalent to a lever in the using process, and can also play a labor-saving effect and facilitate operation.
Further, in an embodiment, the detachable handle 220 is provided with a first avoiding gap 226, and the width of the first avoiding gap 226 is greater than the width of the evaporation boat 103, so that when the supporting portion 211 of the supporting base 210 abuts against the supporting end 222 of the detachable handle 220, the evaporation boat 103 is located in the first avoiding gap 226, which can avoid the interference of the evaporation boat 103 on the detachable handle 220 during use.
Further, two cantilevers 225 are formed on two sides of the first avoiding gap 226, and the width of the first avoiding gap 226 is actually the interval width between the two cantilevers 225.
In the use process, the evaporation boat 103 is positioned between the two cantilevers 225, so that the force applied to the movable electrode 102 by the dismounting handle 220 is symmetrical about the evaporation boat 103, the operation process is more stable, the movable electrode 102 can be prevented from being deviated due to uneven stress, and the possibility of damage of the movable electrode 102 caused by overlarge local stress can be reduced.
The supporting base 210 in this embodiment can be fixed on the evaporation apparatus 100 in different manners, for example, the supporting base 210 can be adhered to the evaporation apparatus 100 by using an adhesive; the support base 210 may be fixed to a predetermined position of the evaporation apparatus 100 by a fastening member such as a bolt; the support base 210 can also be directly welded at a designated position on the evaporation apparatus 100.
Further, in one embodiment, a positioning portion 212 is disposed on the supporting base 210 to facilitate connection between the supporting base 210 and the evaporation apparatus 100.
The positioning portion 212 may be matched with a positioning structure on the evaporation apparatus 100 to position the support base 210, for example, a positioning column may be welded on the evaporation apparatus 100 as the positioning structure, or a bolt may be provided on the evaporation apparatus 100 as the positioning structure.
In this embodiment, the positioning portion 212 is used to fix the support base 210 on the evaporation apparatus 100 by cooperating with some positioning structure of the evaporation apparatus 100. In one embodiment, the positioning portion 212 may abut against the sidewall 105 of the evaporation apparatus 100, and in another embodiment, a bolt or a protrusion structure on the evaporation apparatus 100 may be used as a positioning structure, so as to fix the support base 210 on the evaporation apparatus 100 through the positioning portion 212.
Further, in an embodiment, the supporting base 210 further has a second avoiding notch 213 matching with the shape of the fixed electrode 101 of the evaporation apparatus 100, and the second avoiding notch 213 is used for avoiding the fixed electrode 101 when the supporting base 210 is connected to the evaporation apparatus 100.
It should be understood that the fixed electrode 101 and the movable electrode 102 are respectively located at both ends of the evaporation boat 103, and the movable electrode 102 moves in a direction away from or close to the fixed electrode 101 along the direction in which the evaporation boat 103 is disposed. The supporting seat 210 is provided with a second avoiding notch 213 avoiding the fixed electrode 101, and in the using process, the positioning part 212 of the supporting seat 210 can avoid contacting with the fixed electrode 101, so that the external force from the evaporation boat dismounting tool can not be transmitted to the fixed electrode 101, and the possibility of damaging the fixed electrode 101 is reduced.
Further, at least one edge of the support base 210 and/or the removal/installation shank 220 is rounded. On one hand, the strength of the supporting seat 210 and/or the dismounting handle 220 can be improved, and the possibility of damage caused by local stress concentration is reduced; on the other hand, the effect of protecting the operator can be achieved, and the possibility of damaging the operator is reduced.
Further, a protective sheath 224 for thermal insulation and insulation is sleeved outside the handle 221.
The evaporation boat 103 generates a high amount of heat during use, and the generated heat may be transferred to the electrode and further to the detachable handle 220, thereby raising the temperature of the detachable handle 220. In addition, the electrodes may not be powered off during operation due to operational errors or negligence.
In order to improve the protection effect for the operator, a protective sheath 224 for thermal insulation and insulation may be further provided outside the handle 221 in this embodiment. The protective sleeve 224 can be made of wood or rubber and the like, and can achieve better insulating and heat-insulating effects. The outside of the protective sleeve 224 may also be formed with a slip-resistant pattern to facilitate handling.
The handle 221 or the protective sleeve 224 in this embodiment may be further ergonomically designed to adapt its shape to the hand shape of a general operator, so as to facilitate the operation, and specifically, reference may be made to the handle 221 of an existing kitchen tool, hardware tool, etc., which will not be further described and limited herein.
Further, the support base 210 is provided with at least one lightening hole.
The support base 210 and/or the disassembly handle 220 in this embodiment may be made of stainless steel or carbon steel. In order to reduce the weight of the support seat 210 and save materials, a lightening hole may be formed on the support seat 210 in this embodiment. Under the condition of not influencing the structural strength, the number of the lightening holes can be properly increased, and the effects of lightening the weight of the supporting seat 210 and saving materials can be further achieved. The lightening holes in the present embodiment may also be used as the positioning portions 212, for example, the lightening holes may cooperate with some structures on the evaporation apparatus 100 to perform a positioning function.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. An evaporation boat disassembling tool is characterized in that the evaporation boat disassembling tool is used for disassembling and assembling an evaporation boat on evaporation equipment, the evaporation equipment comprises a fixed electrode and a movable electrode, the evaporation boat is clamped between the fixed electrode and the movable electrode, the movable electrode can be far away from the fixed electrode under the action of external force, and the evaporation boat disassembling tool comprises a supporting seat and a disassembling and assembling handle;
the supporting seat comprises a supporting part, and the supporting part can be fixed on the evaporation equipment;
the disassembly and assembly handle comprises a handle and a cantilever connected with the handle, one end of the cantilever, far away from the handle, forms a support end, the support end is matched with the support part of the support seat, one end of the cantilever, close to the handle, forms an abutting part, so that the support seat is fixed on the evaporation equipment, the support end abuts against the support part, and the abutting part can be driven by the handle to rotate around the support end and push the movable electrode of the evaporation equipment to move.
2. The evaporator boat dismounting tool according to claim 1, wherein the dismounting handle is provided with a first avoiding notch, the width of the first avoiding notch is larger than that of the evaporator boat, and the evaporator boat is inserted into the first avoiding notch when the supporting portion of the supporting base abuts against the supporting end of the dismounting handle.
3. The evaporation boat assembly and disassembly tool of claim 1, wherein the supporting base is provided with a second avoiding notch matching with the shape of the fixed electrode of the evaporation equipment, and the second avoiding notch is used for avoiding the fixed electrode.
4. The evaporation boat assembly and disassembly tool of claim 1 or 3, wherein the support base further comprises a positioning portion, the support base can be fixed to the evaporation apparatus by the positioning portion, and when the support base is fixed to the evaporation apparatus, the positioning portion of the support base abuts against the side wall of the evaporation apparatus.
5. The evaporation boat dismantling tool of claim 1 wherein said support base and/or said dismantling lever are made of stainless steel or carbon steel.
6. The evaporation boat disassembly tool of claim 1, wherein at least one edge of the support base and/or the disassembly handle is rounded.
7. The evaporation boat dismantling tool as set forth in claim 1, wherein a protective sheath for thermal insulation is provided on an outer side of said handle.
8. The evaporation boat dismantling tool as set forth in claim 8, wherein said protective sheath is formed with an anti-slip pattern.
9. The evaporation boat dismantling tool of claim 1 wherein the support base is formed with at least one lightening hole.
10. An evaporation apparatus comprising an evaporation boat, a fixed electrode, a movable electrode, and the evaporation boat mounting/dismounting tool according to any one of claims 1 to 9, wherein the evaporation boat is held between the fixed electrode and the movable electrode;
the movable electrode is connected with the elastic element, the movable electrode can be far away from the fixed electrode under the action of external force, and the movable electrode can be close to the fixed electrode under the action of the elastic force of the elastic element when the external force is relieved;
the supporting part of the evaporation boat dismounting tool is fixed on the evaporation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811002751.1A CN110872689B (en) | 2018-08-30 | 2018-08-30 | Evaporation boat dismounting tool and evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811002751.1A CN110872689B (en) | 2018-08-30 | 2018-08-30 | Evaporation boat dismounting tool and evaporation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110872689A true CN110872689A (en) | 2020-03-10 |
| CN110872689B CN110872689B (en) | 2024-05-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811002751.1A Active CN110872689B (en) | 2018-08-30 | 2018-08-30 | Evaporation boat dismounting tool and evaporation equipment |
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| CN (1) | CN110872689B (en) |
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| Publication number | Publication date |
|---|---|
| CN110872689B (en) | 2024-05-28 |
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