CN110844878B - Electric-assisted rapid stamping forming device for workpiece surface microstructure - Google Patents

Electric-assisted rapid stamping forming device for workpiece surface microstructure Download PDF

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Publication number
CN110844878B
CN110844878B CN201910838513.2A CN201910838513A CN110844878B CN 110844878 B CN110844878 B CN 110844878B CN 201910838513 A CN201910838513 A CN 201910838513A CN 110844878 B CN110844878 B CN 110844878B
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workpiece
microstructure
frequency vibration
vibration exciter
forming
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CN110844878A (en
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彭林法
黃纪绘
李夏楠
徐竹田
来新民
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting

Abstract

The invention relates to an electrically-assisted rapid stamping forming device for a microstructure on the surface of a workpiece, which comprises a pulse power supply (1), a three-axis workbench (3), a high-frequency vibration exciter (9), a signal generator (5), a controller (7) and a microstructure stamping die (12), wherein the workpiece (11) to be processed is arranged on the three-axis workbench (3), the high-frequency vibration exciter (9) is connected with the microstructure stamping die (12) through an amplitude transformer (10) arranged at the lower part of the high-frequency vibration exciter, the pulse power supply (1) is respectively connected with the workpiece (11) to be processed and the controller (7), the controller (7) is connected with the three-axis workbench (3) through the signal generator (5), and the controller (7) controls the signal generator (5) to output an excitation signal and controls the pulse power supply (1) to output a current matched with the excitation signal. Compared with the prior art, the invention solves the problem of rapid high-precision processing of large-scale microstructures on the surface of a complex workpiece, reduces the required forming force and can obviously improve the forming quality.

Description

Electric-assisted rapid stamping forming device for workpiece surface microstructure
Technical Field
The invention relates to the field of surface microstructure forming, in particular to an electrically-assisted rapid stamping forming device for a workpiece surface microstructure.
Background
The high-frequency micro-imprinting technology is a typical die pressing forming technology, and the basic process is that the vibration of a vibration exciter is amplified by an amplitude transformer and then transmitted to a micro-forming die at the lower end, and the structural processing is completed on the surface of a workpiece through high-frequency reciprocating motion, so that the high-frequency micro-imprinting technology is an efficient surface micro-structure processing technology.
However, in the existing high-frequency imprinting technology, two factors restrict the application of the technology: one is that the vibration direction of the high-frequency vibration exciter is a fixed single direction, and the other directions and the attitude angles of the vibration exciter are not adjustable, so that the impressing process can only be carried out on a plane and the preparation requirement of a surface microstructure of a complex surface cannot be met; secondly, the high-frequency stamping technology has low single forming depth, and usually needs multiple times of vibration progressive forming to meet the requirement, so that the high-frequency vibration is usually applied to a workpiece as an auxiliary motion rather than a main forming motion in the actual processing process. Along with the increase of the hardness of the processed material, the required vibration times and the exciting force can be continuously increased, the processing efficiency is reduced while higher requirements are put on equipment, and the method is not suitable for rapid forming of large-range surface microstructures.
On the other hand, electrically assisted molding technology is gaining attention in recent years as a new process. The existing research shows that the high-frequency pulse current is introduced into the processed workpiece, so that the flow stress of the material can be obviously reduced, the elongation of the material is improved, and the rebound phenomenon of the formed material is inhibited, thereby improving the formability of the material and improving the forming quality. Based on the above characteristics, the electrically-assisted process has been applied to various forming processes such as rolling, drawing, and flat pressing.
The electric auxiliary technology is combined with the high-frequency stamping technology, so that the formability of the material can be improved, the forming speed of a fine structure can be improved, and the application range of the forming process can be expanded. However, no study has been reported yet.
The prior literature search shows that the Chinese patent publication numbers are as follows: CN108326137A, name: a general-purpose precision ultrasonic vibration shaping apparatus, the technique comprising: the device comprises an upper pressure plate, a support rod, a support plate, a guide sleeve, a guide pillar, a lower seat plate, a working plate, a lower die, an amplitude transformer, an ultrasonic transducer and a working head. The upper end of the guide post penetrates through the guide sleeve, and the lower end of the guide post penetrates through the workbench and then is fixedly installed on the lower seat plate. The disadvantage of this technique is that its vibrating head only allows Z-direction vibration, limiting its application.
And found by the research of the literature, chinese patent publication numbers are: CN105195584A, name: an ultrasonic vibration assisted plastic forming apparatus, the technique comprising: the device comprises a rack, a servo motor, a precise grating ruler, an upper die sleeve, a lower die, an ultrasonic amplitude transformer, an ultrasonic transducer and a pressure sensor. The pressure sensor, the servo motor and the precise grating ruler can form a closed-loop feedback system. The disadvantage of this technique is that the depth of formability is low, only by introducing ultrasonic vibration as an auxiliary forming means into the forming process.
Through the research of the literature, the Chinese patent publication numbers are as follows: CN108906891A, name: the current-assisted rolling forming device for the large-area functional microstructure array comprises the following steps: the device comprises a precise microstructure array roller press, a driving motor, a control cabinet and an auxiliary forming power supply. The control cabinet is used for controlling the driving motor to drive the precise microstructure array roller press to complete the forming process of the formed piece, assisting the forming power supply to output pulse direct current, and realizing a current pair closed loop circuit by the roller press and the formed piece. The device adopts large tracts of land roll forming mode, and the roll is difficult to be changed and mould preparation requires comparatively high.
Disclosure of Invention
The invention aims to solve the problems and provide an electrically-assisted rapid stamping forming device for the surface microstructure of the workpiece, which has high production efficiency and wide application range and can meet the preparation requirements of different surface microstructures.
The purpose of the invention is realized by the following technical scheme: an electrically-assisted rapid imprinting forming device for a microstructure on the surface of a workpiece comprises a pulse power supply, a three-axis workbench, a high-frequency vibration exciter, a signal generator, a controller and a microstructure imprinting mold, wherein the workpiece to be processed is arranged on the three-axis workbench; introducing high-frequency pulse current into a workpiece to be processed, and reducing the material flow stress by using the electro-plastic effect generated by the current so that the high-frequency vibration exciter completes point-by-point formation of a surface microstructure under the excitation force. The high-frequency vibration exciter can realize high-frequency reciprocating vibration under the excitation of an external signal, the amplitude transformer amplifies the amplitude and transmits the amplified amplitude to the microstructure imprinting mold arranged at the lower end, and the rapid point-by-point microstructure imprinting forming process is completed on the surface of a workpiece. High-frequency pulse current is introduced into the stamping forming process, the controller is matched with the relation between the electric signal and the vibration signal, the electro-plastic effect is fully utilized, the flowing stress of the material is reduced, the formability of the material is improved, the required forming force is reduced, and the forming quality is improved.
Furthermore, the range of the duty ratio of the waveform current output by the pulse power supply is 0.0001-1, the range of the frequency is 1Hz-10kHz, and the pulse power supply can be freely adjusted in a larger range, so that the requirement of improving the formability of the workpiece to be processed is met.
Further, triaxial workstation includes top platform and bottom platform, and top platform and bottom platform are connected through the spliced pole that sets up in both sides, the top platform is equipped with the cardan shaft, and this cardan shaft connects the controller, just the high frequency vibration exciter passes through the cardan shaft and hangs between top platform and bottom platform, be equipped with the slide of two parallels on the platform of bottom, be connected with the work piece between two slides and place the board. The controller coordinates the output parameters of the pulse power supply, the signal generator and the three-axis workbench to ensure the normal operation of the whole device. The three-axis workbench can realize the positioning between the high-frequency vibration exciter and the workpiece in a three-dimensional space, and the universal shaft can adjust the attitude angle of the high-frequency vibration exciter relative to the workpiece in the space, so that the three-axis workbench is applicable to the forming of complex curved surfaces. The workpiece placing plate on the bottom platform can be suitable for workpieces of different shapes, and the position relation between the workpiece and the microstructure impressing mould can be conveniently adjusted.
Further, the length of the slide way is wider than the width of the workpiece placing plate, so that when the edge of the workpiece is machined, the workpiece can be moved, and the workpiece and the microstructure stamping die can be controlled to be in a well-machined relative position relation.
Furthermore, the triaxial workstation includes top platform and bottom platform to and the follow-up electrode that sets up in pairs, top platform and bottom platform are connected through the spliced pole that sets up in both sides, the follow-up electrode comprises electrically conductive copper nose, pressure spring and the electrically conductive gyro wheel that connects gradually, and the stiff end rigid coupling of two electrically conductive copper noses is on the both sides wall of high frequency vibration exciter, and the free end links to each other with pulse power supply, and when carrying out the impression shaping operation of treating the processing work piece, electrically conductive gyro wheel and the contact of treating the processing work piece.
Further, the signal generator outputs excitation signals with different frequencies and amplitudes to the high-frequency vibration exciter, the frequency range is 1Hz-1MHz, and the amplitude range is 10 -3 -10A。
Further, the signal generator is independently powered by a supply power source and can output an excitation signal with adjustable frequency and amplitude.
Further, the microstructure imprinting mold has an imprinting shape selected from one or more of a sphere, a square, a diamond or a pyramid, and the mold can be replaced to adapt to different processing requirements.
Furthermore, the characteristic size of the stamping shape is 1-10 cm, so that the method can be used for processing microstructures with invisible sizes and microstructures with visible sizes, and the application range is wide.
Furthermore, the controller is connected with a signal generator and a pulse power supply through control lines, the signal generator is connected with a high-frequency vibration exciter through a lead, and the pulse power supply is connected with a workpiece through a lead.
Further, the high-frequency vibration exciter realizes high-frequency reciprocating vibration under the excitation of an external signal, and an amplitude transformer at the lower end of the high-frequency vibration exciter amplifies the amplitude and transmits the amplified amplitude to a microstructure embossing mold arranged at the lower end to complete the forming process.
And further. The controller controls the three-axis workbench to adjust the spatial position and attitude angle of the high-frequency vibration exciter according to the set processing track, and the rapid impression forming of the microstructure on the surface of the workpiece is completed; meanwhile, the controller controls the output current of the pulse power supply to be matched with the output excitation signal of the signal generator, so that embossing forming is carried out at the moment when the pulse current reaches the peak value, and the electro-plastic effect is utilized to the maximum extent.
The invention connects the controller with the high-frequency power supply, the three-axis workbench and the signal generator, can control the output current of the high-frequency power supply to be matched with the output excitation signal of the signal generator, carries out impression forming at the moment when the pulse current reaches the peak value, utilizes the electro-plastic effect generated by the current to reduce the material flow stress, ensures that the high-frequency vibration exciter finishes point-by-point forming of a surface microstructure under smaller excitation force, namely maximally utilizes the electro-plastic effect on the premise of minimizing the joule heating effect, simultaneously controls the three-axis workbench to adjust the space position and the attitude angle of the high-frequency vibration exciter according to the set processing track, finishes quick impression forming of the surface microstructure of the workpiece to be processed, and can also adjust the space position and the attitude angle of the high-frequency vibration exciter in real time according to the actual processing requirement of the workpiece to be processed in the impression process.
Compared with the prior art, the invention realizes point-by-point rapid forming through high-frequency vibration, and solves the problem of rapid high-precision processing of large-scale microstructures on the surface of a complex workpiece; meanwhile, the invention introduces current into the processing process, reduces the required forming force, reduces the difficulty of quick forming by vibration excitation, and can obviously improve the forming quality; the invention is easy to adjust, has high production efficiency, and is a quick impression forming device suitable for surface microstructures.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a top view of the present invention;
FIG. 3 is a front view of the present invention;
fig. 4 is a schematic perspective view of a high-frequency exciter according to embodiment 2, in which a follower electrode is provided.
In the figure: 1-a pulse power supply; 2-a wire; 3-a three-axis table; 4-a control line; 5-a signal generator; 6-supplying power; 7-a controller; 8-a cardan shaft; 9-high frequency vibration exciter; 10-an amplitude transformer; 11-a workpiece to be machined; 12-a microstructure imprinting mold; 13-a follower electrode; 14-a conductive copper nose; 15-a compression spring; 16-a conductive copper wheel; 17-a top platform; 18-a bottom platform; 19-connecting column; 20-a slide way; 21-workpiece placing plate.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments.
Example 1
Referring to fig. 1-3, an electrically-assisted rapid imprinting forming device for a workpiece surface microstructure comprises a pulse power supply 1, a three-axis workbench 3, a high-frequency vibration exciter 9, a signal generator 5, a controller 7 and a microstructure imprinting mold 12, wherein a workpiece 11 to be processed is arranged on the three-axis workbench 3, the high-frequency vibration exciter 9 is connected with the microstructure imprinting mold 12 through an amplitude transformer 10 arranged at the lower part of the high-frequency vibration exciter 9, and the pulse power supply 1 is respectively connected with the workpiece 11 to be processed and the controller 7; the controller 7 is connected with the three-axis workbench 3 through the signal generator 5; the high-frequency vibration exciter 9 drives the lower amplitude transformer 10 to perform high-frequency vibration as main forming movement, and the controller 7 performs route planning and attitude control on the three-axis workbench 3 and the high-frequency vibration exciter 9, so that the rapid forming processing of the surface microstructure of the complex curved surface workpiece is realized; introducing high-frequency pulse current into a workpiece 11 to be processed, reducing material flow stress by using an electro-plastic effect generated by the current, enabling a high-frequency vibration exciter 9 to finish point-by-point forming of a surface microstructure under an exciting force, independently supplying power to a signal generator 5 by a power supply 6, controlling by connecting a controller 7 with the signal generator 5 and a pulse power supply 1 through a control line 4, connecting the signal generator 5 with the high-frequency vibration exciter 9 through a lead 2, and connecting the pulse power supply 1 with the workpiece 11 through the lead 2.
Triaxial workstation 3 includes top platform 17 and bottom platform 18, and top platform 17 and bottom platform 18 are connected through the spliced pole 19 that sets up in both sides, and top platform 17 is equipped with cardan shaft 8, this cardan shaft 8 connection director 7, just high frequency vibration exciter 9 hangs between top platform 17 and bottom platform 18 through cardan shaft 8, is equipped with the slide 20 of two parallels on the platform 18 of bottom, is connected with the work piece between two slides 20 and places board 21, waits to process the work piece and places board 21 and be used for placing work piece 11, and wherein slide 20's length is wider than the width that work piece 11 placed the board, and triaxial workstation 3 can be used to adjust high frequency vibration exciter 9's spatial position and attitude angle.
The microstructure imprinting mold 12 has an imprinting shape selected from one or more of a sphere, a square, a diamond, or a pyramid, and the feature size of the imprinting shape is 1 μm to 10cm.
The duty ratio of the waveform current output by the pulse power supply 1 is 0.0001-1, and the frequency is 1Hz-10kHz; the signal generator 5 outputs excitation signals with different frequencies and amplitudes to the high-frequency vibration exciter 9, the frequency range is 1Hz-1MHz, and the amplitude range is 10 -3 -10A。
The high-frequency vibration exciter 9 realizes high-frequency reciprocating vibration under the excitation of an external signal, and the amplitude transformer 10 at the lower end of the high-frequency vibration exciter 9 amplifies the amplitude and transmits the amplified amplitude to the microstructure embossing mold 12 arranged at the lower end to complete the forming process.
The controller 7 controls the three-axis workbench 3 to adjust the spatial position and attitude angle of the high-frequency vibration exciter 9 according to the set processing track, and the rapid impression forming of the surface microstructure of the workpiece 11 is completed; meanwhile, the controller 7 controls the output current of the pulse power supply 1 to be matched with the output excitation signal of the signal generator 5, so that stamping forming is carried out at the moment when the pulse current reaches the peak value, and the electro-plastic effect is utilized to the maximum extent.
Example 2
An electrically-assisted rapid imprint forming device for a microstructure on a workpiece surface is similar to that in embodiment 1, wherein a three-axis workbench 3 is provided with a follow-up electrode, specifically as shown in fig. 4, the three-axis workbench 3 comprises a top platform 17, a bottom platform 18 and paired follow-up electrodes 13, the top platform 17 and the bottom platform 18 are connected through connecting posts 19 arranged on two sides, each follow-up electrode 13 is composed of a conductive copper nose 14, a compression spring 15 and a conductive roller 16 which are sequentially connected, fixed ends of the two conductive copper noses 14 are fixedly connected to two side walls of a high-frequency vibration exciter 9, free ends of the two conductive copper noses are connected with a pulse power supply 1, and the conductive roller 16 is in contact with the workpiece 11 to be processed during imprint forming operation of the workpiece 11 to be processed.
The embodiments described above are described to facilitate an understanding and use of the invention by those skilled in the art. It will be readily apparent to those skilled in the art that various modifications to these embodiments may be made, and the generic principles described herein may be applied to other embodiments without the use of the inventive faculty. Therefore, the present invention is not limited to the above embodiments, and those skilled in the art should make improvements and modifications within the scope of the present invention based on the disclosure of the present invention.

Claims (8)

1. An electrically-assisted rapid stamping forming device for a microstructure on the surface of a workpiece comprises a pulse power supply (1), a three-axis workbench (3), a high-frequency vibration exciter (9), a signal generator (5), a controller (7) and a microstructure stamping die (12), wherein a workpiece (11) to be processed is arranged on the three-axis workbench (3), the device is characterized in that the high-frequency vibration exciter (9) is connected with the microstructure stamping die (12) through an amplitude transformer (10) arranged at the lower part of the high-frequency vibration exciter, and the pulse power supply (1) is respectively connected with the workpiece (11) to be processed and the controller (7); the controller (7) is connected with the three-axis workbench (3) through the signal generator (5); the three-axis workbench (3) comprises a top platform (17), a bottom platform (18) and paired following electrodes (13), the top platform (17) and the bottom platform (18) are connected through connecting columns (19) arranged on two sides, each following electrode (13) consists of a conductive copper nose (14), a compression spring (15) and a conductive roller (16) which are sequentially connected, the fixed ends of the two conductive copper noses (14) are fixedly connected to the two side walls of the high-frequency vibration exciter (9), the free ends of the two conductive copper noses are connected with the pulse power supply (1), and the conductive rollers (16) are in contact with a workpiece (11) to be machined when the stamping forming operation of the workpiece (11) to be machined is carried out;
the high-frequency vibration exciter (9) drives the amplitude transformer (10) at the lower part to carry out high-frequency vibration as main forming movement, and the controller (7) carries out route planning and attitude control on the three-axis workbench (3) and the high-frequency vibration exciter (9) so as to realize rapid forming processing of the surface microstructure of the complex curved surface workpiece; introducing high-frequency pulse current into a workpiece (11) to be processed, and reducing the material flow stress by using the electro-plastic effect generated by the current so that the high-frequency vibration exciter (9) completes point-by-point forming of a surface microstructure under the exciting force.
2. The electrically-assisted rapid imprint forming apparatus for workpiece surface microstructure according to claim 1, wherein the pulse power supply (1) outputs a waveform current with a duty cycle in a range of 0.0001-1 and a frequency in a range of 1Hz-10kHz.
3. The electrically-assisted rapid imprint forming apparatus for a workpiece surface microstructure according to claim 1, wherein the three-axis table (3) includes a top platform (17) and a bottom platform (18), the top platform (17) and the bottom platform (18) are connected by a connection column (19) disposed on both sides, the top platform (17) is provided with a universal shaft (8), the universal shaft (8) is connected to the controller (7), the high-frequency vibration exciter (9) is suspended between the top platform (17) and the bottom platform (18) through the universal shaft (8), the bottom platform (18) is made of an insulating material and is provided with two parallel slideways (20), a workpiece placing plate (21) is connected between the two slideways (20), both ends of the workpiece placing plate (21) are made of a conductive material, the middle part is made of an insulating material, the pulse power supply (1) is directly connected to the slideways (20), and a current is conducted to the workpiece through the conductive parts on both ends of the workpiece placing plate (21) to achieve an electrically-assisted machining process.
4. The device for electrically assisting in rapidly embossing and forming the microstructure on the surface of the workpiece as claimed in claim 1, wherein the signal generator (5) outputs excitation signals with different frequencies and amplitudes to the high-frequency vibration exciter (9), wherein the frequency ranges from 1Hz to 1MHz, and the amplitude ranges from 10 Hz to 1MHz -3 -10A。
5. An electrically-assisted rapid imprint forming apparatus of a microstructure on a surface of a workpiece as recited in claim 1, wherein the signal generator (5) is independently powered by the power supply (6).
6. An electrically-assisted rapid imprint forming apparatus for microstructure on surface of a workpiece according to claim 1, wherein the imprint shape of the microstructure imprint mold (12) is selected from one or more of a sphere, a square, a diamond, or a pyramid.
7. The electrically-assisted rapid embossing forming device for the microstructure on the surface of the workpiece according to claim 1, wherein the high-frequency vibration exciter (9) realizes high-frequency reciprocating vibration under the excitation of an external signal, and the amplitude transformer (10) at the lower end of the high-frequency vibration exciter (9) amplifies the amplitude and transmits the amplified amplitude to the microstructure embossing mold (12) arranged at the lower end to complete the forming process.
8. The device for electrically assisted rapid embossing and forming of the surface microstructure of the workpiece as claimed in any one of claims 1 to 7, wherein the controller (7) controls the three-axis workbench (3) to adjust the spatial position and attitude angle of the high-frequency vibration exciter (9) according to a set processing track, so as to complete rapid embossing and forming of the surface microstructure of the workpiece (11) to be processed; meanwhile, the controller (7) controls the output current of the pulse power supply (1) to be matched with the output excitation signal of the signal generator (5), so that stamping forming is carried out at the moment when the pulse current reaches the peak value, and the electro-plastic effect is utilized to the maximum extent.
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JP2017209827A (en) * 2016-05-24 2017-11-30 ベクトル株式会社 Stamping machine with guiding light function and punching method by stamping machine with guiding light function
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JP2008213348A (en) * 2007-03-06 2008-09-18 Ricoh Co Ltd Method and device for producing fine shaped form, and die and optical element
JP2010005708A (en) * 2008-06-24 2010-01-14 Showa Seiko Kk Multi-axis controlled cell automatic polishing apparatus and method for molding die
CN102151984A (en) * 2011-03-01 2011-08-17 华中科技大学 Laser machining method and device applicable for complicated curved surface
CN103495909A (en) * 2013-10-11 2014-01-08 中国科学院光电技术研究所 Surface high-frequency vibration conformal machining device and method for optical element
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