CN110842193B - Efficient powder filling device and control method thereof - Google Patents

Efficient powder filling device and control method thereof Download PDF

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Publication number
CN110842193B
CN110842193B CN201911093488.6A CN201911093488A CN110842193B CN 110842193 B CN110842193 B CN 110842193B CN 201911093488 A CN201911093488 A CN 201911093488A CN 110842193 B CN110842193 B CN 110842193B
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permanent magnet
piezoelectric ceramic
magnetic field
filling
external magnetic
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CN110842193A (en
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张宇
王春阳
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Kunming University of Science and Technology
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Kunming University of Science and Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/004—Filling molds with powder
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02—Compacting only
    • B22F3/03—Press-moulding apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Abstract

The invention relates to an efficient powder filling device and a control method thereof, and belongs to the field of powder filling. The device comprises a filling device and a rotary external magnetic field device, wherein the filling device is positioned in the middle of the rotary external magnetic field device, a gap is reserved between the filling device and the rotary external magnetic field device, and the filling device comprises a power supply 1, a lead I, a piezoelectric ceramic piece and other components; the rotary external magnetic field device comprises a permanent magnet south pole, a permanent magnet tray, a motor and a permanent magnet north pole. Alternating current is led in through the lead I and the lead II, and the piezoelectric ceramics deform under the change of the current. The driving motor drives the rotating external magnetic field to rotate, and the ruthenium powder can be continuously and orderly arranged under the action of the rotating external magnetic field and can be continuously and orderly arranged under the action of the rotating external magnetic field. The device provided by the invention has the advantages of simple structure, simplicity in operation, convenience and practicability, solves the problems of loose powder flatness and uneven density and flatness of the ruthenium target during manual loading in the prior art, and improves the subsequent processing performance of ruthenium target prepared by powder metallurgy.

Description

Efficient powder filling device and control method thereof
Technical Field
The invention relates to an efficient powder filling device and a control method thereof, and belongs to the field of powder filling.
Background
The powder filling system is used as a second process of the powder metallurgy preparation system, most of the prior art adopts manual filling, which can not ensure the flatness of the powder in loose filling, so that the density and the flatness of the ruthenium target are not uniform, and finally the machining performance of the ruthenium target is poor. The uniformity of the target is very important because it affects the uniformity of the thickness distribution of the deposited film. The uniformity of the powder metallurgy prepared target material is mainly influenced by raw materials, and the powder particles are uniformly distributed and can be improved by a reasonable powder mixing process. The uniformity of the target is also represented by the uniformity of density, and when the density is not uniform, the uniformity of the sputtered film is also influenced, and even the target is sputtered, the target causes internal stress due to the non-uniform density to finally cause fragmentation.
Disclosure of Invention
The invention aims to solve the technical problem of providing an efficient powder filling device and a control method thereof, which are used for solving the problem that the flatness of powder in loose filling cannot be guaranteed after the existing manual filling.
The technical scheme adopted by the invention is as follows: a high-efficiency powder filling device comprises a filling device and a rotating external magnetic field device, wherein the filling device is positioned in the middle of the rotating external magnetic field device, a gap is reserved between the filling device and the rotating external magnetic field device, the filling device comprises a power supply 1, a lead I2, a piezoelectric ceramic piece 3, a supporting plate 4, two half dies 5, a mantle 6, a pressure head I7, ruthenium powder 8, carbon paper 9, a graphite gasket 10, a pressure head II 11 and a lead II 12, and the rotating external magnetic field device comprises a permanent magnet south pole 13, a permanent magnet tray 14, a motor 16 and a permanent magnet north pole 17;
the two half moulds 5 comprise two templates which are opposite from each other at the left and right, a filling cavity is arranged in the middle of the two half moulds 5, the overcoat films 6 are fixed at two sides of the two half moulds 5, the pressure head I7 is fixed at the bottom of the filling cavity in the middle of the two half moulds 5, the upper end of the pressure head I is positioned in the filling cavity, the support plate 4 at the lower end is positioned above the pressure head I7, two sides of the support plate 4 at the upper end are in close contact with the inner walls of two sides of the two half moulds 5, the graphite gasket 10 at the lower end is filled with a plurality of interlayers formed by carbon paper 9, ruthenium powder 8 and carbon paper 9, the graphite gasket 10 at the upper end is positioned above the carbon paper 9 at the uppermost end, the support plate 4 at the upper end is positioned above the graphite gasket 10 at the upper end, two sides of the support plate 4 at the upper end are in close contact with the inner walls of two sides of the two half moulds 5, a plurality of piezoelectric ceramic plates 3 are fixed at intervals at the tops of the piezoelectric ceramic plates 3, the pressure head II 11 is fixed above the piezoelectric ceramic plates 3, the lower part of a pressure head II 11 is positioned in a filling cavity between two half dies 5, a power supply 1 is connected with each piezoelectric ceramic piece 3 through a lead I2, a south pole 13 and a north pole 17 of a permanent magnet are positioned on two sides of the mantle 6 and are arranged on a permanent magnet tray 14, and a motor 16 is connected to the lower end of the permanent magnet tray 14 and can drive the permanent magnet tray 14 to rotate.
Preferably, the pressing heads I7 and II 11 are not in contact with the inner walls of the two half dies 5 on two sides or are in contact with the inner walls of the two half dies 5 on one side only.
Preferably, the permanent magnet south pole 13, the permanent magnet north pole 17 and the permanent magnet tray 14 are arranged in a concave shape.
Preferably, the lower end of the piezoelectric ceramic plate 3 is adhered to the upper end face of the upper end support plate 4, and the upper end of the piezoelectric ceramic plate is adhered to the lower end face of the pressure head II 11.
Preferably, the ruthenium powder 8 is spherical, the number of the piezoelectric ceramic pieces 3 is 7, and the power supply 1 outputs 220V and 50Hz alternating current.
Preferably, two adjacent interlayers formed by the carbon paper 9, the ruthenium powder 8 and the carbon paper 9 are separated by a wood gasket.
Preferably, the permanent magnet south pole 13, the permanent magnet north pole 17 and the permanent magnet tray 14 are detachably connected.
Preferably, the lower end of the permanent magnet tray 14 is mounted on the bracket 15, and the lower end surface of the permanent magnet tray 14 is in frictional contact with the upper end surface of the bracket 15.
Preferably, the diameter of each piezoelectric ceramic piece 3 is 6cm, the height of each piezoelectric ceramic piece 3 is 3cm, the distance between every two adjacent piezoelectric ceramic pieces 3 is 4cm, the distance between the leftmost piezoelectric ceramic piece 3 and the inner wall of the left side of each half mold 5 is the same as the distance between the rightmost piezoelectric ceramic piece 3 and the inner wall of each right half mold 5, and the distance is 6 cm.
A method of controlling the high efficiency powder loading apparatus, comprising the steps of:
step 1: firstly, mounting each part, and filling corresponding substances into a filling cavity between two half moulds 5;
step 2: the power supply 1 is switched on, so that the power supply 1 supplies power to the piezoelectric ceramic piece 3, and the motor 16 is switched on while the power supply is switched on, so that the permanent magnet tray 14 drives the south pole 13 and the north pole 17 of the permanent magnet to start rotating;
step 3: when the predetermined time is reached, the power supply 1 is cut off and the motor 16 stops rotating.
The invention has the beneficial effects that:
(1) the device efficiently promotes the ruthenium powder filling efficiency, improves the loose filling flatness of materials, and improves the controllability of the filling process.
(2) The device rotates the external magnetic field device part, and after powder is filled, the motor is turned on and the external magnetic field device is driven to rotate by the motor. Because the ruthenium powder has magnetism, the ruthenium powder can be continuously and orderly arranged under the action of a rotating external magnetic field, thereby improving the flatness during powder loading.
(3) The piezoelectric ceramic plate in the device deforms under the change of current to form vibration waves, so that the agglomeration phenomenon is reduced to a certain degree, and meanwhile, the fluidity of ruthenium powder is increased, and the ruthenium powder is rearranged. The ruthenium powder is loosely stacked and gradually compacted to increase the micro flatness upon stacking.
(4) The device selects the ruthenium powder with better sphericity, the shape of the ruthenium powder prepared at present is generally lamellar or nearly spherical, and in order to fundamentally change the problem of poor liquidity of the ruthenium powder, the ruthenium powder can flow more easily when being packed and stacked loosely, thereby ensuring the flatness of the powder.
(5) The device is electrified to the lead, and simultaneously, the rotating external magnetic field works. The working mode can lead the ruthenium powder to be continuously and orderly arranged, and simultaneously, the ruthenium powder is accelerated to stack under the action of the vibration wave, so that the loading effect is more optimized.
Drawings
FIG. 1 is a schematic view of the overall structure of the apparatus of the present invention;
FIG. 2 is a schematic view of a part of the structure of the apparatus of the present invention;
FIG. 3 is an enlarged view of the piezoelectric ceramic of the device of the present invention;
FIG. 4 is a rotating external magnetic field of the device of the present invention;
the reference numbers in the figures: 1-power supply, 2-lead I, 3-piezoelectric ceramic plate, 4-support plate, 5-two-half mould, 6-mantle, 7-pressure head I, 8-ruthenium powder, 9-carbon paper, 10-graphite gasket, 11-pressure head II, 12-lead II, 13-permanent magnet south pole, 14-permanent magnet tray, 15-support, 16-motor and 17-permanent magnet north pole.
Detailed Description
The invention is further described with reference to the following figures and specific examples.
Example 1: as shown in fig. 1-4, a high-efficiency powder filling device comprises a filling device and a rotating external magnetic field device, wherein the filling device is positioned in the middle of the rotating external magnetic field device, a gap is reserved between the filling device and the rotating external magnetic field device, the filling device comprises a power supply 1, a lead I2, a piezoelectric ceramic plate 3, a support plate 4, two half moulds 5, an overcoat film 6, a pressure head I7, ruthenium powder 8, carbon paper 9, a graphite gasket 10, a pressure head II 11 and a lead II 12, and the rotating external magnetic field device comprises a permanent magnet south pole 13, a permanent magnet tray 14, a motor 16 and a permanent magnet north pole 17;
the two half moulds 5 comprise two templates which are opposite from each other at the left and right, a filling cavity is arranged between the two half moulds 5, the overcoat films 6 are fixed at the two sides of the two half moulds 5, the pressure head I7 is fixed at the bottom of the filling cavity between the two half moulds 5, the upper end of the pressure head I is positioned in the filling cavity, the support plate 4 at the lower end is positioned above the pressure head I7, the two sides of the support plate are in close contact with the inner walls of the two sides of the two half moulds 5, the graphite gasket 10 at the lower end is positioned above the support plate 4, a plurality of interlayers formed by carbon paper 9, ruthenium powder 8 and carbon paper 9 are filled above the graphite gasket 10 at the lower end, the layered structure can more efficiently and uniformly arrange the ruthenium powder 8, the graphite gasket 10 at the upper end is arranged above the carbon paper 9 at the uppermost end, the support plate 4 is arranged above the graphite gasket 10 at the upper end, the two sides of the support plate 4 at the upper end are in close contact with the inner walls of the two sides of the two half moulds 5, and a plurality of piezoelectric ceramic plates 3 are fixed at intervals at the tops of the two half moulds 5, because the piezoelectric ceramic pieces 3 generate vibration waves under the left and right of current, if no interval exists between two adjacent piezoelectric ceramic pieces 3, the vibration waves are affected with each other, so that the vibration waves are unstable, a pressure head II 11 is fixed above the piezoelectric ceramic pieces 3, the lower part of the pressure head II 11 is positioned in a filling cavity between two half dies 5, a power supply 1 is connected with each piezoelectric ceramic piece 3 through a lead I2, a permanent magnet south pole 13 and a permanent magnet north pole 17 are positioned at two sides of an outer covering film 6 and are arranged on a permanent magnet tray 14, and a motor 16 is connected at the lower end of the permanent magnet tray 14 and can drive the permanent magnet tray 14 to rotate.
Further, pressure head I7, pressure head II 11 all with the both sides inner wall contactless of two half mould 5 or only with the contact of one side inner wall of two half mould 5, can prevent pressure head I7, pressure head II 11 and two half mould 5's excessive contact, pressure head I7, pressure head II 11 and two half mould 5's excessive contact can destroy pressure head I7, pressure head II 11's shape, make its supporting plane unstable, lead to the powder to fill unstably.
Further, the permanent magnet south pole 13, the permanent magnet north pole 17 and the permanent magnet tray 14 are arranged in a concave shape, that is, the permanent magnet south pole 13 and the permanent magnet north pole 17 are located at two ends of the upper end face of the permanent magnet tray 14, so that the two sides are symmetrical, the permanent magnet tray 14 can rotate stably, and the magnetic field between the permanent magnet south pole 13 and the permanent magnet north pole 17 is stable.
Furthermore, the lower end of the piezoelectric ceramic piece 3 is adhered to the upper end face of the upper end support plate 4, the upper end of the piezoelectric ceramic piece is adhered to the lower end face of the pressure head II 11, and the piezoelectric ceramic piece 3 can be firmly fixed and cannot shake randomly, so that vibration waves generated by the piezoelectric ceramic piece 3 are stable.
Furthermore, the ruthenium powder 8 is spherical, the number of the piezoelectric ceramic pieces 3 is 7, and the power supply 1 outputs 220V and 50Hz alternating current. The shape of the ruthenium powder is optimized to be spherical, so that the ruthenium powder 8 has better sphericity, the ruthenium powder 8 is easier to flow when loosely stacked, and the subsequent machining of the ruthenium target can be improved.
Further, two adjacent interlayers formed by the carbon paper 9, the ruthenium powder 8 and the carbon paper 9 are separated by a wood gasket. The wooden gasket can play the effect of initial pressure, finalizes the design to it when the device has not started yet to ruthenium powder more evenly receives the vibration. The wood shim can provide a flat support surface to facilitate the flow of the ruthenium powder 8.
Furthermore, the south pole 13 of the permanent magnet, the north pole 17 of the permanent magnet and the permanent magnet tray 14 are detachably connected, the distance can be changed at any time along with the change of the requirement, and the detachable connection mode is various, such as snap connection, screw connection and the like. The detachable connection can also reduce energy consumption and protect the environment.
Further, the lower end of the permanent magnet tray 14 is mounted on a bracket 15, and the lower end face of the permanent magnet tray 14 is in frictional contact with the upper end face of the bracket 15. The support 15 is fixedly installed on other equipment, the support 15 can provide supporting force for the permanent magnet tray 14, so that the whole rotating external magnetic field device can operate more stably, and the lower end face of the permanent magnet tray 14 is in friction contact with the upper end face of the support 15, so that the support 15 does not influence the rotation of the permanent magnet tray 14.
Further, the diameter of each piezoelectric ceramic piece 3 is 6cm, the height of each piezoelectric ceramic piece is 3cm, the distance between every two adjacent piezoelectric ceramic pieces 3 is 4cm, the distance between the leftmost piezoelectric ceramic piece 3 and the inner wall of the left side of each half mold 5 is the same as the distance between the rightmost piezoelectric ceramic piece 3 and the inner wall of each right half mold 5, and the distance is 6 cm.
Further, the permanent magnet south pole 13 and the permanent magnet north pole 14 in the rotating external magnetic field device are the same in size, the length, width and height of the permanent magnet south pole 13 are respectively 80cm, 80cm and 260cm, the length, width and height of the permanent magnet tray are respectively 320cm, 80cm and 20cm, and the length, width and height of the bracket 15 are respectively 40cm, 80cm and 10 cm.
Further, the width of the support film 4 is the same as that of the graphite gasket 10, the width is 40cm, the length and the height of the support film 4 are 40cm and 10cm respectively, and the length and the height of the graphite gasket 10 are 40cm and 5cm respectively.
Further, the length, width and height of the overcoat film 6 were 20cm, 6cm and 130cm, respectively, and the length, width and height of the indenter were 40cm, 40cm and 20cm, respectively.
A method of controlling the high efficiency powder loading apparatus, comprising the steps of:
step 1: firstly, mounting each part, and filling corresponding substances into a filling cavity between two half moulds 5;
step 2: the power supply 1 is switched on, so that the power supply 1 supplies power to the piezoelectric ceramic piece 3, and the motor 16 is switched on while the power supply is switched on, so that the permanent magnet tray 14 drives the south pole 13 and the north pole 17 of the permanent magnet to start rotating;
step 3: when the predetermined time is reached, the power supply 1 is cut off and the motor 16 stops rotating.
The working principle of the invention is as follows: after filling materials into the filling cavity between the two half moulds 5, alternating current is supplied to the piezoelectric ceramic piece 3, the piezoelectric ceramic piece 3 deforms under the change of the current to form vibration waves, the agglomeration phenomenon is reduced to a certain degree, and meanwhile, the fluidity of ruthenium powder 8 is increased, so that the ruthenium powder is rearranged. The ruthenium powder 8 is gradually compacted in a loose stack, thereby increasing the micro flatness upon stacking. When the ruthenium powder is electrified, the motor 16 is switched on to drive the rotating external magnetic field to rotate, and due to the magnetism of the ruthenium powder, the ruthenium powder can be continuously and orderly arranged under the action of the rotating external magnetic field, so that the flatness during filling is improved, and the integral automation is realized.
The device selects the ruthenium powder with better sphericity, and can ensure that the ruthenium powder flows more easily when loosely stacked in order to fundamentally solve the problem of poor liquidity of the ruthenium powder, thereby ensuring the flatness of the powder. The ruthenium powder is loosely stacked and gradually compacted, so that the microscopic flatness during stacking is increased, the reliability is high, the model is simplified, the understanding is easy, and the operation is simple and convenient.
The invention can effectively improve the powder filling efficiency, improve the loose filling flatness of the material and improve the controllability of the filling process.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. An efficient powder filling device is characterized in that: the device comprises a filling device and a rotary external magnetic field device, wherein the filling device is positioned in the middle of the rotary external magnetic field device, a gap is reserved between the filling device and the rotary external magnetic field device, the filling device comprises a power supply (1), a lead I (2), a piezoelectric ceramic piece (3), a supporting plate (4), two half moulds (5), an overcoat film (6), a pressure head I (7), ruthenium powder (8), carbon paper (9), a graphite gasket (10), a pressure head II (11) and a lead II (12), and the rotary external magnetic field device comprises a permanent magnet south pole (13), a permanent magnet tray (14), a motor (16) and a permanent magnet north pole (17);
the two half dies (5) comprise two templates which are opposite left and right, a filling cavity is arranged between the two half dies (5), the mantle (6) is fixed on two sides of the two half dies (5), the pressure head I (7) is fixed at the bottom of the filling cavity between the two half dies (5), the upper end of the pressure head I (7) is positioned in the filling cavity, the support plate (4) at the lower end is positioned above the pressure head I (7), two sides of the support plate are in close contact with the inner walls of two sides of the two half dies (5), the graphite gasket (10) at the lower end is positioned above the support plate (4), a plurality of interlayers formed by carbon paper (9), ruthenium powder (8) and carbon paper (9) are filled above the graphite gasket (10) at the lower end, the graphite gasket (10) at the upper end is positioned above the uppermost carbon paper (9), the support plate (4) at the upper end is positioned above the graphite gasket (10), two sides of the support plate (4) at the upper end are in close contact with the inner walls of two sides of the two half dies (5), and a plurality of piezoelectric ceramic plates (4) are fixed at intervals at the tops of the two sides of the upper end and two sides of the two half dies (5) 3) The upper portion of the piezoelectric ceramic piece (3) is fixed with a pressure head II (11), the lower portion of the pressure head II (11) is located in a filling cavity in the middle of two half dies (5), a power supply (1) is connected with each piezoelectric ceramic piece (3) through a lead I (2), a south pole (13) and a north pole (17) of a permanent magnet are located on two sides of an outer covering film (6) and are installed on a permanent magnet tray (14), and a motor (16) is connected to the lower end of the permanent magnet tray (14) and can drive the permanent magnet tray (14) to rotate.
2. A high efficiency powder charging apparatus as defined in claim 1, wherein: and the pressure head I (7) and the pressure head II (11) are not contacted with the inner walls of two sides of the two half moulds (5) or are contacted with the inner wall of one side of the two half moulds (5).
3. A high efficiency powder charging apparatus as defined in claim 1, wherein: the permanent magnet south pole (13), the permanent magnet north pole (17) and the permanent magnet tray (14) are arranged in a concave shape.
4. A high efficiency powder charging apparatus as defined in claim 1, wherein: the lower end of the piezoelectric ceramic piece (3) is adhered to the upper end face of the upper end support plate (4), and the upper end of the piezoelectric ceramic piece is adhered to the lower end face of the pressure head II (11).
5. A high efficiency powder charging apparatus as defined in claim 1, wherein: the ruthenium powder (8) is spherical, the number of the piezoelectric ceramic pieces (3) is 7, and the power supply (1) outputs alternating current of 220V and 50 Hz.
6. A high efficiency powder charging apparatus as defined in claim 1, wherein: two adjacent interlayers formed by the carbon paper (9), the ruthenium powder (8) and the carbon paper (9) are separated by a wood gasket.
7. A high efficiency powder charging apparatus as defined in claim 1, wherein: the south pole (13) of the permanent magnet, the north pole (17) of the permanent magnet and the permanent magnet tray (14) are detachably connected.
8. A high efficiency powder charging apparatus as defined in claim 1, wherein: the lower end of the permanent magnet tray (14) is provided with a bracket (15), and the lower end face of the permanent magnet tray (14) is in friction contact with the upper end face of the bracket (15).
9. A high efficiency powder charging apparatus as defined in claim 1, wherein: the diameter of each piezoelectric ceramic piece (3) is 6cm, the height of each piezoelectric ceramic piece is 3cm, the distance between every two adjacent piezoelectric ceramic pieces (3) is 4cm, the distance between the leftmost piezoelectric ceramic piece (3) and the inner wall of the left side of each half die (5) is the same as the distance between the rightmost piezoelectric ceramic piece (3) and the inner wall of each right half die (5), and the distance is 6 cm.
10. A method for controlling a high-efficiency powder filling apparatus according to any one of claims 1 to 9, characterized by: the method comprises the following steps:
step 1: firstly, mounting each component, and filling corresponding substances into a filling cavity between two half moulds (5);
step 2: the power supply (1) is switched on, the power supply (1) supplies power to the piezoelectric ceramic piece (3), and the motor (16) is started while the power supply is switched on, so that the permanent magnet tray (14) drives the south pole (13) and the north pole (17) of the permanent magnet to start rotating;
and step 3: when the preset time is reached, the power supply (1) is cut off, and the motor (16) stops rotating.
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