CN110824591A - Liquid lens - Google Patents

Liquid lens Download PDF

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Publication number
CN110824591A
CN110824591A CN201911140978.7A CN201911140978A CN110824591A CN 110824591 A CN110824591 A CN 110824591A CN 201911140978 A CN201911140978 A CN 201911140978A CN 110824591 A CN110824591 A CN 110824591A
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CN
China
Prior art keywords
liquid
transparent sheet
cavity
transparent film
transparent
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Pending
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CN201911140978.7A
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Chinese (zh)
Inventor
曾雪骢
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Suzhou Shiqu Electronic Technology Co Ltd
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Individual
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Application filed by Individual filed Critical Individual
Priority to CN201911140978.7A priority Critical patent/CN110824591A/en
Publication of CN110824591A publication Critical patent/CN110824591A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/12Fluid-filled or evacuated lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The present invention provides a liquid lens comprising: a first transparent sheet, a second transparent sheet and a transparent film; the transparent film has elasticity, and the transparent film is positioned between the first transparent sheet and the second transparent sheet; a first liquid is filled between the first transparent sheet and the transparent film; a second liquid is filled between the transparent film and the second transparent sheet; the refractive index of the first liquid is greater than or less than the refractive index of the second liquid. The liquid is arranged on both sides of the transparent film of the liquid lens, and when the spherical surface formed by the transparent film bulge of the liquid lens is less in deformation and not easy to shake, the optical performance of the liquid lens is stable.

Description

Liquid lens
Technical Field
The invention relates to the field of optical lenses, in particular to a liquid lens.
Background
A common liquid lens comprises a transparent film and a liquid provided on one side of the transparent film, the other side of the transparent film being in direct contact with the air. Therefore, when the liquid lens is erected, the liquid in the cavity has gravity, the transparent film is pressed to deform, the convex belly is caused, the spherical surface which cannot be presented by the transparent film influences the optical performance of the liquid lens. The transparent film of a conventional liquid lens is also prone to flutter, resulting in unstable optical performance.
Therefore, there is a need for improvements in the prior art.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the liquid lens aims to solve the problem that when the liquid lens in the prior art is erected, the spherical surface formed by the bulge of the diaphragm is large in deformation and easy to shake, so that the optical performance of the liquid lens is affected. The present invention provides a liquid lens to solve the above problems.
The technical scheme adopted by the invention for solving the technical problems is as follows: a liquid lens, comprising:
a first transparent sheet, a second transparent sheet, and a transparent film; the transparent film has elasticity, and the transparent film is positioned between the first transparent sheet and the second transparent sheet;
a first liquid is filled between the first transparent sheet and the transparent film; a second liquid is filled between the transparent film and the second transparent sheet; the refractive index of the first liquid is greater than or less than the refractive index of the second liquid.
Preferably, the first liquid is filled in the first cavity between the first transparent sheet and the transparent film; the second liquid is filled in a second cavity between the transparent film and the second transparent sheet;
the liquid lens further comprises an injection device and a recovery bag;
the injection device is used for injecting the first liquid into the first cavity or extracting the first liquid from the first cavity, and the recovery bag is made of plastic materials;
one end of the first conduit is connected to a liquid outlet of the injection device, and the other end of the first conduit is communicated to the first cavity; one end of the second conduit is communicated to the recovery bag, and the other end is communicated to the second cavity.
Preferably, the filter further comprises a filter device, wherein the filter device comprises a shell and a filter element arranged in the shell; the two ends of the shell are provided with ports communicated to the inside of the shell, and the shell is arranged on the first guide pipe through the ports at the two ends.
Preferably, the device further comprises a first conical space and a second conical space;
the large end of the first conical space is communicated with the first conduit, and the small end of the first conical space is communicated with the first cavity;
the large end of the second conical space is communicated with the second conduit, and the small end of the second conical space is communicated with the second cavity.
Preferably, the inner wall of the first accommodating cavity is provided with a first arc surface, the middle part of the first arc surface protrudes towards the direction far away from the first accommodating cavity, and the small end of the first conical space penetrates through the middle part of the first arc surface to be communicated with the first accommodating cavity;
the inner wall of the second accommodating cavity is provided with a second cambered surface, the middle of the second cambered surface protrudes towards the direction far away from the second accommodating cavity, and the small end of the second conical space penetrates through the middle of the second cambered surface to be communicated with the second accommodating cavity.
Preferably, the device further comprises a first fixing part and a second fixing part;
the first fixing part is positioned between the first transparent sheet and the transparent film;
the first fixing part is provided with a first end face, a second end face and a first through hole penetrating from the first end face to the second end face;
the second fixing part is provided with a third end surface, a fourth end surface and a second through hole penetrating from the third end surface to the fourth end surface;
the second end surface and the third end surface are arranged oppositely, and the second through hole is arranged corresponding to the position of the first through hole;
the first transparent sheet covers the first through hole and is fixed with the first end face through glue; the second transparent sheet covers the second through hole and is fixed with the fourth end face through glue; the transparent film separates the first through hole from the second through hole, and two sides of the transparent film are fixed with the second end face and the third end face through glue respectively;
the inner wall of the first through hole, the first transparent sheet and the transparent film jointly enclose a first containing cavity; the inner wall of the second through hole, the second transparent sheet and the transparent film jointly enclose a second cavity;
the inner wall of the first through hole is sunken to form the first cambered surface, and the first conical space is arranged in the first fixing part;
the inner wall of the second through hole is sunken to form the second cambered surface, and the second conical space is arranged in the second fixing part.
Preferably, a circle of first protrusions are arranged on the first end face, and the inner walls of the first protrusions are matched with the shape of the first transparent sheet; the inner wall of the first bulge is fixed with the edge of the first transparent sheet through glue;
a circle of second protrusions are arranged on the fourth end face, and the inner walls of the second protrusions are matched with the shape of the second transparent sheet; the inner wall of the second protrusion is fixed with the edge of the second transparent sheet through glue;
the second end face is provided with a circle of third protrusions, the third end face is provided with a circle of depressed parts matched with the third protrusions, the third protrusions extend into the depressed parts, and the third protrusions are fixed with the depressed parts through glue.
Preferably, the first transparent sheet and the second transparent sheet are made of glass.
Preferably, the first liquid is water, a glycerol solution, a sugar solution, a salt solution or decolorized olive oil; the second liquid is water, a glycerol solution, a sugar solution, a salt solution or decolorized olive oil;
the transparent film is made of PDMS.
Preferably, the refractive index of the first liquid is 0.01 to 0.3 greater than the refractive index of the second liquid.
The liquid lens has the beneficial effects that the two sides of the transparent film of the liquid lens are both provided with liquid, and the spherical surface formed by the transparent film bulge of the liquid lens is less in deformation and is not easy to shake, so that the optical performance of the liquid lens is stable.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic diagram of the structure of a preferred embodiment of a liquid lens of the present invention.
FIG. 2 is a schematic diagram of the configuration of the preferred embodiment of a liquid lens of the present invention in use.
FIG. 3 is a schematic diagram of the structure of a filter device according to a preferred embodiment of the liquid lens of the present invention.
Fig. 4 is a schematic structural view of a state of use of a liquid lens in the related art.
In the figure, 1, a first transparent sheet, 2, a second transparent sheet, 3, a transparent film, 4, a syringe, 401, a first conduit, 5, a recycling bag, 501, a second conduit, 6, a filtering device, 601, a shell, 602, a third containing cavity, 603, a port, 604, a filter element, 7, a first fixing part, 701, the first containing cavity, 702, a first tapered space, 703, a first cambered surface, 704, a first protrusion, 705, a third protrusion, 8, a second fixing part, 801, a second containing cavity, 802, a second tapered space, 803, a second cambered surface, 804 and a second protrusion.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.
As shown in fig. 1 to 3, the present invention provides a liquid lens, including:
a first transparent sheet 1, a second transparent sheet 2 and a transparent film 3. The transparent film 3 has elasticity, and the transparent film 3 is located between the first transparent sheet 1 and the second transparent sheet 2.
A first fixing portion 7 and a second fixing portion 8, the first fixing portion 7 being located between the first transparent sheet 1 and the transparent film 3. The first fixing portion 7 has a first end surface, a second end surface, and a first through hole penetrating from the first end surface to the second end surface. The second fixing portion 8 has a third end surface, a fourth end surface, and a second through hole penetrating from the third end surface to the fourth end surface. The second end surface and the third end surface are arranged oppositely, and the second through holes are arranged corresponding to the first through holes.
The first transparent sheet 1 covers the first through hole and is fixed with the first end face through glue. The second transparent sheet 2 covers the second through hole and is fixed with the fourth end face through glue. The transparent film 3 separates the first through-hole from the second through-hole and both sides of the transparent film 3 are fixed to the second end face and the third end face, respectively, by glue.
The inner wall of the first through hole, the first transparent sheet 1 and the transparent film 3 jointly enclose a first cavity 701, and the inner wall of the second through hole, the second transparent sheet 2 and the transparent film 3 jointly enclose a second cavity 801.
The first chamber 701 is filled with a first liquid. The second cavity 801 is filled with a second liquid. The refractive indices of the first liquid and the second liquid are different.
When the liquid in one of the cavities is more than that in the other cavity, the transparent film 3 protrudes to one side of the cavity with less liquid to form a lens.
As shown in fig. 4, one side of the transparent film 3 of the liquid lens in the prior art is filled with liquid, and the other side of the transparent film 3 is in direct contact with air, when such a liquid lens stands up, because the liquid in the cavity has gravity, and the pressure of the liquid increases with the distance from the liquid level, at this time, under the pressure of the liquid in the cavity, the maximum protrusion of the transparent film 3 is located at the middle-lower part of the transparent film 3, forming a shape similar to a "convex belly", at this time, the surface of the transparent film 3 is not a spherical surface, which affects the optical performance of the liquid lens. Further, the transparent film 3 of such a liquid lens is likely to shake like a balloon filled with water, resulting in unstable optical performance of the liquid lens.
Both sides of the transparent film 3 of the liquid lens provided by the invention are filled with liquid, when the liquid lens stands up, the pressure of the liquid at both sides is counteracted because any position of the transparent film 3 is subjected to the pressure of the liquid from both sides, and when the transparent film 3 protrudes towards the cavity at one side, the liquid in the cavity at one side can support the protruding part of the transparent film 3 in a floating manner, so that the liquid cannot fall down to form a convex belly. Therefore, when the transparent film 3 of the present invention is protruded, the surface can be formed in a shape close to a spherical surface, and the deformation is slight, and the optical performance is good. In addition, the two sides of the transparent film 3 are both provided with liquid, and the transparent film 3 is not easy to shake under the action of buoyancy support and liquid damping at the two sides, so that the optical performance is stable.
In this embodiment, the first transparent sheet 1 and the second transparent sheet 2 are preferably made of glass.
The first liquid and the second liquid are selected from water, glycerol solution, sugar solution, salt solution and decolorized olive oil because these liquids are non-toxic, non-volatile, easy to prepare and low cost.
The transparent film 3 is preferably made of PDMS, because the PDMS has a smooth surface and high transmittance, and does not chemically react with the first liquid and the second liquid.
According to further embodiments, the liquid lens further comprises an injection device and a recovery bag 5. The injection device is used for injecting the first liquid into the first cavity or extracting the first liquid from the first cavity, and the injector 4 is selected as the injection device. The recycling bag 5 is made of plastic material, that is, the recycling bag 5 has no elasticity, that is, the second liquid contained in the recycling bag 5 is not forced to flow out of the recycling bag 5 by the pressure of the recycling bag 5, and the recycling bag 5 is a plastic bag. One end of the first conduit 401 is connected to the liquid outlet of the injector 4, and the other end is connected to the first cavity 701. One end of the second conduit 501 is connected to the recycling bag 5, and the other end is connected to the second cavity 801.
In this embodiment, liquid can be injected into first chamber 701 and liquid can be withdrawn from first chamber 701 by syringe 4, and when liquid in first chamber 701 increases, liquid in second chamber 801 is squeezed into recovery bag 5, and when liquid in first chamber 701 decreases, liquid in recovery bag 5 flows back into second chamber 801.
By such adjustment, the radian of the transparent film 3 can be adjusted, and the power of the liquid lens can be adjusted. It should be noted that, under the same arc of the transparent film 3, the greater the difference between the refractive indexes of the liquids in the two chambers, the higher the power of the liquid lens.
It should be noted that, since the liquid outlet of the liquid lens injection device is communicated with the first cavity, in the use state, the transparent film is usually convex to one side of the second cavity. Therefore, the refractive index of the selected first liquid is larger than that of the second liquid, and the difference value between the refractive index of the first liquid and the refractive index of the second liquid is 0.01-0.3. The difference between the refractive index of the particular first liquid and the refractive index of the second liquid is determined by one skilled in the art as desired.
According to a further embodiment, the middle of the first conduit 401 is further provided with a filter device 6. The filtering device 6 comprises a housing 601, the housing 601 is hollow, the middle part of the housing 601 is expanded to form a third cavity 602, two ends of the housing 601 are provided with ports 603 communicated with the third cavity 602, a filter element 604 is arranged in the third cavity 602, and the filter element 604 has a dense honeycomb structure. The housing 601 is mounted to the first conduit 401 by ports 603 at both ends thereof.
In this embodiment, when the syringe 4 injects liquid into the first cavity 701, the liquid passes through the filter element 604, and the honeycomb structure of the filter element 604 enables the liquid to flow through and block and absorb air bubbles in the liquid, so as to prevent the air bubbles from entering the first cavity 701 and affecting the optical performance of the liquid lens.
According to another embodiment, a first tapered space 702 is formed in the first fixing portion 7, a small end of the first tapered space 702 penetrates through the inner wall of the first through hole to communicate with the first cavity 701, and the first conduit 401 penetrates through the first fixing portion 7 to communicate with a large end of the first tapered space 702.
A second conical space 802 is formed in the second fixing portion 8, a small end of the second conical space 802 penetrates through the inner wall of the second through hole to communicate with the second cavity 801, and the second conduit 501 penetrates through the second fixing portion 8 to communicate with a large end of the second conical space 802.
In this embodiment, the first conduit 401 is connected to the first cavity 701 through the first tapered space 702, when the liquid lens stands up, the large end of the first tapered space 702 is located above, and the small end of the first tapered space 702 is located below, so that bubbles in the liquid in the first tapered space 702 float up and float at a position close to the upper end of the first tapered space 702 under the action of buoyancy, and in the process that the liquid enters the first cavity 701, the bubbles in the first tapered space 702 are not easy to enter the first cavity 701, and the bubbles are prevented from entering the first cavity 701 and affecting the optical performance of the liquid lens. Similarly, the second conical space 802 can prevent air bubbles from entering the second cavity 801.
According to another embodiment, the inner wall of the first through hole is recessed to form a first arc surface 703, the middle of the first arc surface 703 protrudes in a direction away from the first cavity 701, the first arc surface 703 is disposed at a position corresponding to the first tapered space 702, and the small end of the first tapered space 702 penetrates through the middle of the first arc surface 703 and is communicated with the first cavity 701.
The inner wall of the second through hole is recessed to form a second arc surface 803, the middle of the second arc surface 803 protrudes in the direction away from the second cavity 801, the second arc surface 803 is arranged at the position corresponding to the second conical space 802, and the small end of the second conical space 802 penetrates through the middle of the second arc surface 803 and is communicated with the second cavity 801.
In this embodiment, when the liquid lens is erected, the bubbles in the first cavity 701 gather in the middle of the first cambered surface 703 under the action of buoyancy, so as to avoid the influence of the bubbles on the optical performance of the liquid lens, and meanwhile, the gathering position of the bubbles is close to the small end of the first tapered space 702, so that when liquid is drawn out from the first cavity 701, the bubbles are drawn out of the first cavity 701 in advance of the first liquid, and the influence of the bubbles existing in the first cavity 701 on the optical performance of the liquid lens is avoided. Similarly, the second cambered surface 803 can prevent the air bubbles in the second cavity 801 from affecting the optical performance of the liquid lens.
According to a further embodiment, a ring of first protrusions 704 is provided on the first end surface, the inner walls of the first protrusions 704 matching the shape of the first transparent sheet 1. The inner wall of the first protrusion 704 is fixed to the edge of the first transparent sheet 1 by glue.
A circle of second bulges 804 are arranged on the fourth end surface, and the inner walls of the second bulges 804 are matched with the shape of the second transparent sheet 2. The inner wall of the second protrusion 804 is fixed with the edge of the second transparent sheet 2 by glue.
The second end face is provided with a circle of third protrusions 705, the third end face is provided with a circle of concave parts matched with the third protrusions 705, the third protrusions 705 extend into the concave parts, and the third protrusions 705 and the concave parts are fixed through glue.
In this embodiment, the first transparent sheet 1, the second transparent sheet 2, and the transparent film 3 are fixed effectively, and the leakage is not likely to occur.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic representation of the term does not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims (10)

1. A liquid lens, comprising:
a first transparent sheet, a second transparent sheet, and a transparent film; the transparent film has elasticity, and the transparent film is positioned between the first transparent sheet and the second transparent sheet;
a first liquid is filled between the first transparent sheet and the transparent film; a second liquid is filled between the transparent film and the second transparent sheet; the refractive index of the first liquid is greater than or less than the refractive index of the second liquid.
2. A liquid lens according to claim 1, wherein:
the first liquid is filled in the first cavity between the first transparent sheet and the transparent film; the second liquid is filled in a second cavity between the transparent film and the second transparent sheet;
the liquid lens further comprises an injection device and a recovery bag;
the injection device is used for injecting the first liquid into the first cavity or extracting the first liquid from the first cavity, and the recovery bag is made of plastic materials;
one end of the first conduit is connected to a liquid outlet of the injection device, and the other end of the first conduit is communicated to the first cavity; one end of the second conduit is communicated to the recovery bag, and the other end is communicated to the second cavity.
3. A liquid lens according to claim 2, wherein:
the filter device comprises a shell and a filter element arranged in the shell; the two ends of the shell are provided with ports communicated to the inside of the shell, and the shell is arranged on the first guide pipe through the ports at the two ends.
4. A liquid lens according to claim 3, wherein:
the device also comprises a first conical space and a second conical space;
the large end of the first conical space is communicated with the first conduit, and the small end of the first conical space is communicated with the first cavity;
the large end of the second conical space is communicated with the second conduit, and the small end of the second conical space is communicated with the second cavity.
5. A liquid lens according to claim 4, wherein:
the inner wall of the first accommodating cavity is provided with a first cambered surface, the middle part of the first cambered surface protrudes towards the direction far away from the first accommodating cavity, and the small end of the first conical space penetrates through the middle part of the first cambered surface to be communicated with the first accommodating cavity;
the inner wall of the second accommodating cavity is provided with a second cambered surface, the middle of the second cambered surface protrudes towards the direction far away from the second accommodating cavity, and the small end of the second conical space penetrates through the middle of the second cambered surface to be communicated with the second accommodating cavity.
6. A liquid lens according to claim 5, wherein:
the first fixing part and the second fixing part are also included;
the first fixing part is positioned between the first transparent sheet and the transparent film;
the first fixing part is provided with a first end face, a second end face and a first through hole penetrating from the first end face to the second end face;
the second fixing part is provided with a third end surface, a fourth end surface and a second through hole penetrating from the third end surface to the fourth end surface;
the second end surface and the third end surface are arranged oppositely, and the second through hole is arranged corresponding to the position of the first through hole;
the first transparent sheet covers the first through hole and is fixed with the first end face through glue; the second transparent sheet covers the second through hole and is fixed with the fourth end face through glue; the transparent film separates the first through hole from the second through hole, and two sides of the transparent film are fixed with the second end face and the third end face through glue respectively;
the inner wall of the first through hole, the first transparent sheet and the transparent film jointly enclose a first containing cavity; the inner wall of the second through hole, the second transparent sheet and the transparent film jointly enclose a second cavity;
the inner wall of the first through hole is sunken to form the first cambered surface, and the first conical space is arranged in the first fixing part;
the inner wall of the second through hole is sunken to form the second cambered surface, and the second conical space is arranged in the second fixing part.
7. A liquid lens according to claim 6, wherein:
a circle of first bulges are arranged on the first end surface, and the inner walls of the first bulges are matched with the shape of the first transparent sheet; the inner wall of the first bulge is fixed with the edge of the first transparent sheet through glue;
a circle of second protrusions are arranged on the fourth end face, and the inner walls of the second protrusions are matched with the shape of the second transparent sheet; the inner wall of the second protrusion is fixed with the edge of the second transparent sheet through glue;
the second end face is provided with a circle of third protrusions, the third end face is provided with a circle of depressed parts matched with the third protrusions, the third protrusions extend into the depressed parts, and the third protrusions are fixed with the depressed parts through glue.
8. A liquid lens according to any one of claims 1 to 7, wherein:
the first transparent sheet and the second transparent sheet are made of glass materials.
9. A liquid lens according to any one of claims 1 to 7, wherein:
the first liquid is water, a glycerol solution, a sugar solution, a salt solution or decolorized olive oil; the second liquid is water, a glycerol solution, a sugar solution, a salt solution or decolorized olive oil;
the transparent film is made of PDMS.
10. A liquid lens according to any one of claims 1 to 7, wherein:
the refractive index of the first liquid is 0.01-0.3 greater than that of the second liquid.
CN201911140978.7A 2019-11-20 2019-11-20 Liquid lens Pending CN110824591A (en)

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CN201911140978.7A CN110824591A (en) 2019-11-20 2019-11-20 Liquid lens

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111240038A (en) * 2020-03-10 2020-06-05 像航(上海)科技有限公司 Retroreflection floating imaging system and manufacturing method of retroreflection mirror

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JP2004233945A (en) * 2003-01-29 2004-08-19 Futofumi Nagao Optical apparatus
US20050219707A1 (en) * 2004-04-02 2005-10-06 Carl Zeiss Smt Ag Projection objective of a microlithographic exposure apparatus
US20060146662A1 (en) * 2005-01-05 2006-07-06 Canon Kabushiki Kaisha Immersion optical system and optical apparatus having the same
CN1802726A (en) * 2003-06-19 2006-07-12 株式会社尼康 Exposure apparatus, and device manufacturing method
CN101069106A (en) * 2004-03-31 2007-11-07 加利福尼亚大学校务委员会 Fluidic adaptive lens
KR20130138588A (en) * 2012-06-11 2013-12-19 지택현 Varifocal optics
CN206114931U (en) * 2016-09-28 2017-04-19 张岩 Lens that can zoom
CN210666084U (en) * 2019-11-20 2020-06-02 曾雪骢 Liquid lens

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004233945A (en) * 2003-01-29 2004-08-19 Futofumi Nagao Optical apparatus
CN1802726A (en) * 2003-06-19 2006-07-12 株式会社尼康 Exposure apparatus, and device manufacturing method
CN101069106A (en) * 2004-03-31 2007-11-07 加利福尼亚大学校务委员会 Fluidic adaptive lens
US20050219707A1 (en) * 2004-04-02 2005-10-06 Carl Zeiss Smt Ag Projection objective of a microlithographic exposure apparatus
US20060146662A1 (en) * 2005-01-05 2006-07-06 Canon Kabushiki Kaisha Immersion optical system and optical apparatus having the same
KR20130138588A (en) * 2012-06-11 2013-12-19 지택현 Varifocal optics
CN206114931U (en) * 2016-09-28 2017-04-19 张岩 Lens that can zoom
CN210666084U (en) * 2019-11-20 2020-06-02 曾雪骢 Liquid lens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111240038A (en) * 2020-03-10 2020-06-05 像航(上海)科技有限公司 Retroreflection floating imaging system and manufacturing method of retroreflection mirror
CN111240038B (en) * 2020-03-10 2023-04-11 像航(上海)科技有限公司 Retroreflection floating imaging system and manufacturing method of retroreflection mirror

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