CN110802755A - Multi-wire cutting main roller for diamond wires - Google Patents

Multi-wire cutting main roller for diamond wires Download PDF

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Publication number
CN110802755A
CN110802755A CN201911027081.3A CN201911027081A CN110802755A CN 110802755 A CN110802755 A CN 110802755A CN 201911027081 A CN201911027081 A CN 201911027081A CN 110802755 A CN110802755 A CN 110802755A
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CN
China
Prior art keywords
groove
main roller
guide pipe
wire cutting
barrel body
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Granted
Application number
CN201911027081.3A
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Chinese (zh)
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CN110802755B (en
Inventor
杜春保
张璐
朱维
庞峻
张冬冬
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Wuxi Wynne Pml Precision Mechanism Ltd
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Wuxi Wynne Pml Precision Mechanism Ltd
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Priority to CN201911027081.3A priority Critical patent/CN110802755B/en
Publication of CN110802755A publication Critical patent/CN110802755A/en
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Publication of CN110802755B publication Critical patent/CN110802755B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a diamond wire multi-wire cutting main roller which comprises a barrel body, guide pipes and glands, wherein a mounting groove is formed in the barrel body, the guide pipes are arranged in the mounting groove, two glands are connected between the barrel body and the guide pipes, limiting rings are arranged on the end surfaces of the two sides of the barrel body respectively, two clamping grooves are symmetrically formed in the edges of the end surfaces of the two sides of the barrel body respectively, two first pin holes are formed in the limiting rings and positioned on the end surfaces of the barrel body respectively, round tables are arranged at the two ends of the mounting groove respectively, four screw holes are formed in the round tables respectively, and first hoop grooves are formed in the groove walls at the two ends of the mounting groove respectively. The main roller can not deform due to high temperature, and air holes, sand holes and the like can not be generated; meanwhile, welding sparks cannot be generated, accident disasters are caused to workers and workshops, the inner wall of the integrated diamond wire multi-wire cutting main roller body can be machined, dynamic balance does not need to be influenced, and the adjustment is easy.

Description

Multi-wire cutting main roller for diamond wires
Technical Field
The invention relates to a diamond wire multi-wire cutting main roller, and belongs to the technical field of silicon wafer cutting and processing.
Background
The diamond wire multi-wire cutting main rollers are installed on the multi-wire cutting machine in pairs and used for cutting and processing silicon wafers, a V-shaped groove is spirally formed in an outer circle coating layer of each pair of main rollers and used for winding diamond wires, and the two main rollers rotate to drive the diamond wires to move back and forth to cut the silicon wafers.
The main roller installed in the multi-wire cutting machine in the market at present adopts the mode that end covers at two ends are assembled in inner holes at two ends of a cylinder body and the end covers are welded with the cylinder body (gas shield welding), and the mode has the following defects:
firstly, the whole main roller is deformed by high temperature (about 5500 ℃) generated in gas shielded welding, and air holes, sand holes, undercut and the like are easily generated in the welding process.
Secondly, when the main roller is processed after welding, cracks are easily generated at the welding position, and air leakage is caused when the main roller is used in the future.
Thirdly, the electric arc and dust generated during gas shielded welding have great influence on welders, and the generated sparks are easy to cause burning and explosion accidents.
Fourthly, the structure of the conventional main roller influences the dynamic balance and is difficult to adjust. The reason is as follows: after the upper end cover of the main roller and the cylinder body are assembled, the main roller and the cylinder body are welded together in a gas shielded welding mode, the whole welded body is certainly subjected to thermal deformation, after the processes of stress removal and rough grinding, the dynamic balance test is carried out, when the dynamic balancing machine rotates at a high speed, centrifugal force is generated due to the fact that the mass distribution of the main roller relative to an axis is not uniform, the unbalanced centrifugal force acts on the main roller to cause vibration, and the abrasion of the main roller is accelerated; after the dynamic balancing machine is used for measurement, the position and the size of the unbalance amount of the main roller are detected, and the weight is removed and added at the corresponding position through manpower and the balancing weight, so that the uniform mass distribution is achieved.
Fifthly, the labor cost is half higher than that of integrated machining, and the machining process steps are complicated. The reason is as follows: the method comprises the steps of end cover polishing by using a plurality of integrated benches, welding, post-welding stress relief, semi-fine grinding of a grinding machine, flaw detection of a main roller and the like.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects that a main roller installed in the existing multi-wire cutting machine adopts end covers at two ends to be assembled in inner holes at two ends of a cylinder body, and the end covers and the cylinder body are welded (gas shielded welding), and provides a main roller for multi-wire cutting of diamond wires.
In order to solve the technical problems, the invention provides the following technical scheme:
the invention relates to a multi-wire cutting main roller for a diamond wire, which comprises a roller body, a guide pipe and a gland, wherein a mounting groove is arranged in the roller body, the guide pipe is arranged in the mounting groove, two glands are connected between the roller body and the guide pipe, limiting rings are respectively arranged on the end surfaces of the two sides of the roller body, two clamping grooves are respectively symmetrically arranged on the edges of the end surfaces of the two sides of the roller body, two first pin holes are respectively arranged in the limiting rings and positioned on the end surfaces of the roller body, round tables are respectively arranged at the two ends of the mounting groove, four screw holes are respectively arranged on the round tables, first hoop grooves are respectively arranged on the groove walls at the two ends of the mounting groove, outer ring grooves are respectively arranged on the outer sides of the two ends of the guide pipe, second hoop grooves are arranged on the outer wall of the outer ring grooves, a fluid groove is arranged at the middle, the improved structure of the seal ring is characterized in that a through hole is formed in the wall of the countersunk head groove, four pin holes are formed in the round groove and the countersunk head groove and located on the gland, an inner hexagonal socket head screw is embedded in each pin hole, a micro gap is formed between the barrel and the guide pipe, a first O-shaped sealing ring is embedded in the first hoop groove, and a second O-shaped sealing ring is embedded in the second hoop groove.
Preferably, the first O-shaped sealing ring is positioned between the gland and the guide pipe, and the second O-shaped sealing ring is positioned between the cylinder body and the guide pipe.
Preferably, the four through holes correspond to the four screw holes one to one, and one end through hole of the socket head cap head screw is in threaded connection with the screw holes.
Preferably, the radius length of the first O-shaped sealing ring is smaller than that of the second O-shaped sealing ring, and the first O-shaped sealing ring and the second O-shaped sealing ring are made of rubber materials.
Preferably, the outer circle of the cylinder is coated with polyurethane with a certain thickness as a coating layer, and the coating layer is provided with a spiral V-shaped groove with a uniform pitch.
Preferably, the guide pipe is made of 304 stainless steel materials, and the micro gap is a sealed space.
Preferably, the cylinder body and the guide pipe are both formed by finish turning, and the structure of the mounting groove is matched with the structure of the outer wall of the gland.
Preferably, the outer wall structure of the outer ring groove is matched with the inner wall structure of the gland.
The invention has the following beneficial effects:
firstly, the main roller for multi-wire cutting of the diamond wire does not need to be processed in a gas shielded welding mode. The main roller can not deform due to high temperature, and air holes, sand holes and the like can not be generated; meanwhile, welding sparks can not be generated, and accident disasters can be caused to workers and workshops.
The inner wall of the integrated diamond wire multi-wire cutting main roller body can be machined, so that the dynamic balance is not influenced and the adjustment is easy; the reason is as follows: the upper end cover of the main roller and the cylinder are assembled without welding, so that the integral mass distribution of the main roller is not uniform due to thermal deformation after welding; after the coarse grinding process, the test of action balance can meet the use requirement after manual simple adjustment
The diamond wire multi-wire cutting main roller greatly improves the geometric tolerance requirements (coaxiality, cylindricity and roundness) of the taper holes at the two ends of the main roller, so that the slicing yield is improved when the main roller is installed and used, and the slicing yield is improved by 30%; meanwhile, the main roller is not easy to damage and the taper hole is not easy to wear, so that the service life of the main roller is prolonged to 1-2 years, and the service efficiency of the cutting machine is improved.
The diamond wire multi-wire cutting main roller integrally saves an end cover polishing process by a bench worker, a welding process, a post-welding stress removing process, a semi-fine grinding process of a grinding machine, a main roller flaw detection process and the like, has simple process steps, and is easy to operate and understand by workers; in addition, the processing time is reduced by more than 40% compared with the prior main roller, and the labor cost is reduced by nearly half; thereby greatly improving the productivity of the workshop and the project progress.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a front view of the present invention;
FIG. 2 is a side sectional view of the present invention;
fig. 3 is an enlarged view of the structure at a in fig. 2 according to the present invention.
In the figure: 1. a barrel; 11. a limiting ring; 12. a first pin hole; 13. a card slot; 14. mounting grooves; 15. screw holes; 16. a first hoop groove; 17. a circular truncated cone; 2. a guide tube; 21. an outer ring groove; 22. a second hoop groove; 23. a fluid tank; 3. a gland; 31. a countersunk groove; 32. perforating; 33. a second pin hole; 34. a circular groove; 4. a socket head cap screw; 5. a micro-gap; 6. a first O-shaped sealing ring; 7. no. two O type sealing washer.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.
Example 1
As shown in figures 1-3, the invention provides a diamond wire multi-wire cutting main roller, which comprises a cylinder body 1, a guide pipe 2 and a gland 3, wherein a mounting groove 14 is arranged in the cylinder body 1, the guide pipe 2 is arranged in the mounting groove 14, two glands 3 are connected between the cylinder body 1 and the guide pipe 2, limiting rings 11 are respectively arranged on the end surfaces of the two sides of the cylinder body 1, two clamping grooves 13 are respectively symmetrically arranged on the edges of the end surfaces of the two sides of the cylinder body 1, two first pin holes 12 are respectively arranged in the limiting rings 11 and positioned on the end surface of the cylinder body 1, round tables 17 are respectively arranged at the two ends of the mounting groove 14, four screw holes 15 are respectively arranged on the round tables 17, first hoop grooves 16 are respectively arranged on the groove walls at the two ends of the mounting groove 14, outer ring grooves 21 are respectively arranged on the outer sides of the two ends of the guide pipe 2, a second hoop groove 22 is arranged on the outer, four countersunk grooves 31 have been seted up to 3 marginal equidistance of gland, have all seted up perforation 32 on the cell wall of countersunk groove 31, have seted up four No. two pinhole 33 between circular slot 34 and the countersunk groove 31 and lie in gland 3, and the screw hole 15 is embedded to be equipped with interior hexagonal socket head cap screw 4, is equipped with micro-gap 5 between barrel 1 and the stand pipe 2, and No. one hoop groove 16 is embedded to be equipped with O type sealing washer 6, and No. two hoop grooves 22 are embedded to be equipped with No. two O type sealing washers 7.
Wherein, O type sealing washer 6 is located between gland 3 and stand pipe 2, and O type sealing washer 7 is located between barrel 1 and stand pipe 2 No. two.
Wherein, four perforation 32 and four screw hole 15 one-to-one correspondence, the one end perforation 32 and the screw hole 15 threaded connection of hexagon socket head cap screw 4.
The radius length of the first O-shaped sealing ring 6 is smaller than that of the second O-shaped sealing ring 7, and the first O-shaped sealing ring 6 and the second O-shaped sealing ring 7 are made of rubber materials.
Wherein, the outer circle of the cylinder body 1 is coated with polyurethane with a certain thickness as a coating layer, and the coating layer is provided with a spiral V-shaped groove with equal pitch.
Wherein, the guide tube 2 is made of 304 stainless steel materials, and the micro-gap 5 is a sealed space.
Wherein, barrel 1 and stand pipe 2 are the finish turning shaping, the structure of mounting groove 14 and 3 outer wall structure adaptations of gland.
Wherein, the outer wall structure of the outer ring groove 21 is matched with the inner wall structure of the gland 3.
When the integrated diamond wire multi-wire cutting machine is assembled and used, the integrated diamond wire multi-wire cutting main rollers are installed in the multi-wire cutting machine in pairs, the take-up pulley and the pay-off pulley are controlled by two synchronous servo motors, after the take-up pulley is fully wound with wires, the servo motors are reversely rotated, the take-up pulley serves as the pay-off pulley, the circular operation is realized, a proper distance is reserved between the two main rollers for slicing, monocrystalline silicon is fixed on a crystal support to be sliced from top to bottom, a stainless steel guide tube 2 is inserted into the cylinder body 1 to play a role in guiding the cylinder body 1; the pressing covers 3 at the two ends are used for fixing the guide pipe 2 and preventing the guide pipe 2 from moving transversely in the cylinder body 1, so that the guide pipe 2 cannot deviate in the cylinder body 1; a micro gap 5 is reserved between the gland 3 and the guide pipe 2 to prevent the bending caused by thermal deformation in high-speed rotation; the assembly surfaces of the guide pipe 2 and the gland 3 are hermetically sealed by adopting O-shaped sealing rings, and the proper compression amount is selected by testing, so that the phenomenon of water leakage caused by the use of the cylinder 1 is prevented; the gland 3 only needs the hexagon socket head cap screw 4 to be locked on the barrel 1, wherein, when the barrel 1 is used, one end of the barrel 1 is connected with the bearing box, the bearing box is internally provided with water, and part of the water flows to the inside of the barrel 1, so that a guide pipe 2 is inserted into the barrel 1 to play a role in guiding the water flow, the assembly surfaces of the two ends of the guide pipe 2 are sealed by O-shaped sealing rings to prevent the water flow from entering the barrel 1, and the guide pipe 2 is made of 304 stainless steel materials, so that the problem that the guide pipe 2 is corroded and rusted to influence the use of the barrel 1 due to the entering of the water flow is avoided; when stand pipe 2 uses, a screw rod of 2 inside interlude of stand pipe, stand pipe 2 plays the guide effect, compares with traditional welded roll body: the utility model provides a barrel 1 is integrated into one piece, and structural optimization, and the process is simplified, and the workman easily understands and processes, and the assembly process does not have welding heat altered shape, and the inside mass distribution of roll body is even, easily adjusts after the dynamic balance test, saves cost of labor and process time, and the high temperature (about 5500 ℃ C.) that no gas shield welding brought leads to the heat altered shape of main roll and occupational hazard and the operation danger that gas shield welding brought.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. A diamond wire multi-wire cutting main roller comprises a barrel body (1), a guide pipe (2) and glands (3), and is characterized in that a mounting groove (14) is formed in the barrel body (1), the guide pipe (2) is arranged in the mounting groove (14), the two glands (3) are connected between the barrel body (1) and the guide pipe (2), limiting rings (11) are respectively arranged on the end faces of the two sides of the barrel body (1), two clamping grooves (13) are respectively and symmetrically arranged on the edges of the end faces of the two sides of the barrel body (1), two first pin holes (12) are respectively arranged in the limiting rings (11) and positioned on the end face of the barrel body (1), round tables (17) are respectively arranged at the two ends of the mounting groove (14), four screw holes (15) are respectively arranged on the round tables (17), and first hoop grooves (16) are respectively arranged on the groove walls at the two ends of, outer ring grooves (21) are respectively arranged on the outer sides of the two ends of the guide pipe (2), a second hoop groove (22) is formed in the outer wall of each outer ring groove (21), a fluid groove (23) is arranged in the middle of the guide pipe (2), a circular groove (34) is arranged in the middle of the gland (3) corresponding to the fluid groove (23), four countersunk head grooves (31) are equidistantly arranged at the edge of the gland (3), the groove walls of the countersunk head grooves (31) are all provided with through holes (32), four second pin holes (33) are arranged between the circular groove (34) and the countersunk head groove (31) and on the gland (3), an inner hexagonal socket head cap screw (4) is embedded in the screw hole (15), a micro gap (5) is arranged between the cylinder body (1) and the guide pipe (2), a hoop groove (16) is embedded with an O-shaped sealing ring (6), and a hoop groove (22) is embedded with a second O-shaped sealing ring (7).
2. A diamond wire multi-wire cutting main roller according to claim 1, characterized in that: the first O-shaped sealing ring (6) is located between the gland (3) and the guide pipe (2), and the second O-shaped sealing ring (7) is located between the cylinder body (1) and the guide pipe (2).
3. A diamond wire multi-wire cutting main roller according to claim 1, characterized in that: the four through holes (32) correspond to the four screw holes (15) one by one, and the through hole (32) at one end of the inner hexagonal socket head screw (4) is in threaded connection with the screw holes (15).
4. A diamond wire multi-wire cutting main roller according to claim 1, characterized in that: the radius length of the first O-shaped sealing ring (6) is smaller than that of the second O-shaped sealing ring (7), and the first O-shaped sealing ring (6) and the second O-shaped sealing ring (7) are made of rubber materials.
5. A diamond wire multi-wire cutting main roller according to claim 1, characterized in that: the outer circle of the cylinder body (1) is coated with polyurethane with a certain thickness to serve as a coating layer, and the coating layer is provided with a spiral V-shaped groove with equal pitch.
6. A diamond wire multi-wire cutting main roller according to claim 1, characterized in that: the guide pipe (2) is made of 304 stainless steel materials, and the micro-gap (5) is a sealed space.
7. A diamond wire multi-wire cutting main roller according to claim 1, characterized in that: barrel (1) and stand pipe (2) are the finish turning shaping, the structure and the gland (3) outer wall structure looks adaptation of mounting groove (14).
8. A diamond wire multi-wire cutting main roller according to claim 1, characterized in that: the outer wall structure of the outer ring groove (21) is matched with the inner wall structure of the gland (3).
CN201911027081.3A 2019-10-27 2019-10-27 Multi-wire cutting main roller for diamond wires Active CN110802755B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911027081.3A CN110802755B (en) 2019-10-27 2019-10-27 Multi-wire cutting main roller for diamond wires

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911027081.3A CN110802755B (en) 2019-10-27 2019-10-27 Multi-wire cutting main roller for diamond wires

Publications (2)

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CN110802755A true CN110802755A (en) 2020-02-18
CN110802755B CN110802755B (en) 2022-03-15

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0241575A2 (en) * 1986-04-14 1987-10-21 Gebr. Klöckner GmbH & Co. Draw-in roller for chipping machines or the like
JP2009233779A (en) * 2008-03-26 2009-10-15 Kyocera Corp Roller member and wire saw apparatus
CN102161124A (en) * 2011-05-12 2011-08-24 无锡机床股份有限公司 Guide roller structure of multi-thread cutter
JP2012011490A (en) * 2010-06-30 2012-01-19 Kyocera Corp Roller, and wire saw device using the same
DE102011083175A1 (en) * 2011-09-22 2013-03-28 Voith Patent Gmbh Wire guide roller for wire saws with data acquisition system
JP2013146848A (en) * 2012-01-23 2013-08-01 Nippon Steel & Sumikin Materials Co Ltd Main roll for wire saw used for manufacturing solar battery
CN103586987A (en) * 2013-11-05 2014-02-19 中国电子科技集团公司第四十五研究所 Temperature control shaft roller
CN204019053U (en) * 2014-05-12 2014-12-17 苏州润德新材料有限公司 NTC multi-wire cutting machine home roll structure
KR20150049578A (en) * 2013-10-30 2015-05-08 신기산업 주식회사 Winding roller of wire saw

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0241575A2 (en) * 1986-04-14 1987-10-21 Gebr. Klöckner GmbH & Co. Draw-in roller for chipping machines or the like
JP2009233779A (en) * 2008-03-26 2009-10-15 Kyocera Corp Roller member and wire saw apparatus
JP2012011490A (en) * 2010-06-30 2012-01-19 Kyocera Corp Roller, and wire saw device using the same
CN102161124A (en) * 2011-05-12 2011-08-24 无锡机床股份有限公司 Guide roller structure of multi-thread cutter
DE102011083175A1 (en) * 2011-09-22 2013-03-28 Voith Patent Gmbh Wire guide roller for wire saws with data acquisition system
JP2013146848A (en) * 2012-01-23 2013-08-01 Nippon Steel & Sumikin Materials Co Ltd Main roll for wire saw used for manufacturing solar battery
KR20150049578A (en) * 2013-10-30 2015-05-08 신기산업 주식회사 Winding roller of wire saw
CN103586987A (en) * 2013-11-05 2014-02-19 中国电子科技集团公司第四十五研究所 Temperature control shaft roller
CN204019053U (en) * 2014-05-12 2014-12-17 苏州润德新材料有限公司 NTC multi-wire cutting machine home roll structure

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