CN110794174B

CN110794174B - Nuclear spin magnetic resonance pressure microscope detection system

Info

Publication number: CN110794174B
Application number: CN201910984061.9A
Authority: CN
Inventors: 任韧
Original assignee: Xian Jiaotong University
Current assignee: Xian Jiaotong University
Priority date: 2019-10-16
Filing date: 2019-10-16
Publication date: 2021-05-28
Anticipated expiration: 2039-10-16
Also published as: CN110794174A

Abstract

The invention discloses a nuclear spin magnetic resonance pressure microscope detection system, which comprises a non-contact type three-dimensional nuclear spin magnetic resonance force three-dimensional microscope system and a radio frequency transmitter, wherein the radio frequency transmitter comprises a radio frequency coil, a radio frequency switch driver, a radio frequency signal generator, a frequency modulator electronic device, a pulse sequence program generator, a function generator, a preamplifier, a feedback analyzer, a fringe center locking part, a phase-locked amplification part, a gradient magnet optical fiber optical interference device radio frequency irradiation part and a laser; the atomic nuclear spin magnetic resonance force microscopic testing microscopic system comprises a resonance scanning segment, a cantilever, a phase-locked loop, an automatic gain loop, a piezoelectric ceramic four-dimensional nanometer precision precession component, a Feed Back loop and a four-quadrant photodiode detector; the invention has the characteristics of high quality factor, good resolution, excellent stiffness coefficient, compact structure, high sensitivity and excellent working reliability parameters.

Description

Nuclear spin magnetic resonance pressure microscope detection system

Technical Field

The invention relates to a nuclear spin magnetic resonance pressure microscope detection system, in particular to a method for constructing and realizing a nuclear spin resonance pressure microscope detector under the semiconductor integrated manufacturing technology.

Background

The nuclear spin magnetic resonance microscope detection system provides a technology that nuclear magnetic resonance pressure microscopy is carried out under a magnetic field and a resonance section according to specific frequency, the resonance section invades into the interior of a three-dimensional material structure for tomographic microscopic scanning, and microscopic atomic resolution images in the interior of a material are detected. Resonance spin microscopy has wide application in many fields, it is a combination of atomic microscopy and nuclear magnetic resonance imaging, and not only has an important influence on semiconductor integration, genome sequence, bioprotein, medicine, industrial catalysts, material and resource exploration, but also has great significance on novel electron spin devices, quantum computers and optical computers. The nuclear magnetic resonance force microscopy in the field of sensing microscopic detection is superior to SEM/AFM, so that three-dimensional detection can be realized, and the solid spinning state and images can be observed. The innovation in principle can generate a series of scientific changes, and the method has important significance in material surface interface appearance microscopy, information storage, magnetic information observation, quantum information and quantum communication. Therefore, the nuclear spin magnetic resonance pressure microscopic detection has good application field and prospect.

The detection of the atomic nucleus autorotation magnetic resonance pressure microscope has profound influence on semiconductor integration, micro-nano technology, nano optics and laser plasma micro-mechanical MEMS technology.

Disclosure of Invention

The invention aims to provide a nuclear spin magnetic resonance pressure microscope detection system. The system comprises a sample microscopic pressure detection part, a pulse sequence modulated nuclear magnetic resonance spinning system, acquisition of oscillator cantilever amplitude data and measurement of a quality factor Q value and a stiffness coefficient K of the probe. The test system has the characteristics of high quality factor, good resolution, excellent stiffness coefficient, compact structure, high sensitivity and excellent working reliability parameters. The invention provides a nuclear spin magnetic resonance pressure optical microscopic test system.

The invention adopts the following technical scheme:

the nuclear spin magnetic resonance pressure microscope detection system comprises a non-contact type three-dimensional nuclear spin magnetic resonance force three-dimensional microscope system and a radio frequency transmitter, wherein the radio frequency transmitter comprises a radio frequency coil, a radio frequency switch driver, a radio frequency signal generator, a frequency modulator electronic device, a pulse sequence program generator, a function generator, a preamplifier, a feedback analyzer, a fringe center locking part, a phase-locked amplifying part, a gradient magnet optical fiber optical interference device radio frequency irradiation part and a laser; the atomic nuclear spin magnetic resonance force microscopic testing microscopic system comprises a resonance scanning segment, a cantilever, a phase-locked loop, an automatic gain loop, a piezoelectric ceramic four-dimensional nanometer precision precession component, a Feed Back loop and a four-quadrant photodiode detector;

the radio frequency Coil signal is controlled and generated by a frequency modulator electronic device and a radio frequency signal generator, the RF amplification is sent into a radio frequency Coil RF Coil, the frequency modulation is driven by a radio frequency switch and controlled by a pulse sequence program generator, a function generator generates a signal function which is sent into a phase-locked amplification and frequency modulator electronic device, a feedback analyzer, a fringe center is locked, a laser fiber interference device is controlled to test fringe movement, fringe locking is carried out, magnetic resonance pressure microscopic force and surface magnetic spin information are calculated, the fiber interference detection information fiber optical interference device is sent into a preamplifier and a phase-locked amplification component to be matched with and lock interference fringes, a gradient magnet generates a gradient magnetic field, and the signal output end of the phase-locked amplification component is connected with a fiber optical interference device surface spin microscopic output port; the other signal output end of the Feed Back feedback loop is connected to the reference output port of the phase-locked amplification part through a preamplifier, the needle point of the gradient magnet and the uniform magnetic field B₀In the same direction, the gradient magnet and the resonance scanning segment are positioned right above the sample; the emergent end of the laser vertically irradiates on the cantilever of the cantilever oscillator, and the incident end of the four-quadrant photodiode detector is obliquely opposite to the optical fiber optical interference device.

Nuclear spin magnetic resonance pressure microscopy detection has profound effects on semiconductor integration, micro-nano technology, nano-optics, laser plasma, micro-mechanical MEMS technology, and novel precision optical field regulation.

The technical effects are as follows: the technical scheme of the invention can induce extremely weak spin signals through the microscopic nuclear spin, can realize full-molecule 3D images, chemically distinguish the spin state of non-contact detection nuclei, the spin state of atoms with a certain volume under the surface interface of a microscopic substance, measure a weak magnetic field, carry out micro-inertia measurement and test surface magnetic information, realize the high-sensitivity detection and spin control of the nuclear spin, and achieve the effects of extremely fine surface interface morphology microscopy, information storage, precise measurement of observation parameters of the surface magnetic information and microscopic imaging.

Drawings

FIG. 1 is a schematic diagram of the system of the present invention.

Detailed Description

Referring to fig. 1, the sample on the cantilever detected by the nuclear spin magnetic resonance pressure microscope of the present invention is mounted, and the devices for connecting the electronic components of each system are mounted. First, the frequency modulator electronics generates a frequency modulated voltage that is fed to the modulation input of the radio frequency signal generator. Secondly, the time sequence of the frequency modulator is controlled by a pulse sequence program and a radio frequency switch drive. Third, the gate voltage and modulation voltage of the RF are amplified by 50dB by the gain of the RF amplifier. Fourthly, the result of the oscillator oscillation is synchronously detected by using phase-locked amplification and referring to the frequency modulated by the same frequency. And fifthly, acquiring amplitude information through an optical fiber interference surface spin microscope output port, outputting the resonance pressure of the surface atomic nuclei of the sample, and outputting surface atomic nuclei spin magnetic information.

The output end of the broadband RF amplifier is connected with the output end of an RF coil, a columnar magnet generates a gradient magnetic field, a frequency modulation module is input into an RF signal generator, the frequency modulation is controlled by a pulse program and a switch driving circuit, an RF amplified signal is sent into the RF coil, and cantilever oscillation and a phase-locked amplifier synchronously measure magnetic resonance pressure through fiber laser interference and further convert the magnetic resonance pressure into surface morphology and surface magnetic spin information.

The radio frequency signal is generated by the control of the frequency modulator electronics 3 and the radio frequency signal generator 2, the RF amplification is sent to the radio frequency Coil (RF Coil), the frequency modulation is controlled by the radio frequency switch drive 1 and the pulse sequence program generator 4, the function generator 5 generates the signal function to be sent to the phase lock amplification and frequency modulator electronics. The method comprises the steps of feeding back an analyzer 7, locking a fringe center 8, controlling a laser fiber interference device to test fringe movement, locking the fringe, and calculating magnetic resonance pressure micro force and surface magnetic spin information. The optical fiber interference detection information optical fiber optical interference device 12 is sent into the preamplifier 9 and the phase-locked amplifier 10 to be matched with the locking interference fringe, and the gradient magnet 11 generates a gradient magnetic field.

The nuclear spin single scanning data test control method comprises the following steps: the amplitude signal is mixed with the pseudo-excitation as the cylindrical magnet generates a gradient magnetic field that moves under the RF coil. Since the RF coil diameter is 800um and the magnet-sample distance is 400um, the typical single sweep data and amplitude are a function of the magnet-sample distance, the gyromagnetic ratio of the detecting element and the frequency of detection are in a certain relationship. Factors to be considered include the limitation of nuclear magnetic resonance spectrum range, gyromagnetic ratio MHz/T, resonance frequency of test sample element, rate factor, coaxial cable capacitance, keeping the length of cable between RF coil and changed capacitance less than a certain value, effective power less B₁And lambda/2 is used for the connection between the RF coil and the capacitor. After the frequency spectrum, the resonance frequency, the gyromagnetic ratio and the spectrum detection range are reasonably set, the system can detect the nuclear spin resonance micro-force, the surface morphology and the surface magnetic spin information.

The signal diagnosis process method of the nuclear spin magnetic resonance force microscope includes the steps of checking the uniform magnetic field strength, and checking the NMRFM test through the change of the magnetic field strength to find out a proper test sample. The proper magnetic field strength is selected to ensure the spin of the operation sample. The strength of the solid local magnetic field is in the order of Guass. Second, the magnetic field B of the RF coil is confirmed₁The method has the advantages of being strong, overcoming the local field intensity, controlling the nuclear spin under the overturning condition, and microscopic surface appearance and surface magnetic spin information.

At present, the atomic structure of a material is analyzed by an atomic magnetic resonance force microscope, and the assembly regulation and control of the material structure, the assembly of biological protein and the control of the biological neuron power can be realized. The nano-magnetic Tip has nm spatial resolution under high gradient nuclear magnetic resonance force, and the nano-channel, the ion channel of various receptors and the molecule transporter can be observed by atomic nuclear resonance force microscopy and magnetic resonance tomography. The torsion cantilever magnetic spin resonance pressure can obtain an angstrom-level three-dimensional structure, realize a single-atom single-molecule image, perform spin state observation and image microscopy below the solid surface, is superior to SEM/AFM, and can realize atom assembly, and control of the spin direction of atomic nuclei. The artificial superstructure superlattice can be observed, and the spin magnetic resonance pressure microscopy can be used for spin sensing, electron density sensing, magnetic information sensing, displacement sensing, temperature sensing and high-sensitivity high-resolution spin sensing. Different from other microscopic scanning probe technologies, the existing atomic microscopic scanning transmission technology TEM requires that a sample is extremely thin and 50 nm. The scanning tunneling microscopy STM detects the structure and the shape of an object and detects the motion rule of atoms and molecules by using the principle of 1 nanometer tunneling effect. The electron scanning microscopy SEM and the spin polarization microscopy SPM limit the direction of detection of spins, and the range and kinds of materials are limited, and are only applicable to conductors and semiconductors. The SEM beam must propagate in vacuum and the sample must be conductive and resistant to electron beam bombardment. STM utilizes electric current to carry out surface morphology and surface electronic structure property research, is suitable for conductor and semiconductor. AFM causes cantilever bending by the weak interaction force existing between the tip and the atoms on the surface of the sample, and the typical forces causing bending of atomic force microscopic micro-cantilever are Vander Waals force (Vander Waals force), electrostatic force, magnetic force, thermal gradient, light intensity and the like. Compared with the method, the resonance pressure microscope has CoFe strong magnetic field gradient, high Q value (5000-10000), photoetching silicon oscillator and externally added RF Coil field, so that the limitation on microscopic materials can be broken, and the internal stereo microscope of semiconductor materials can be realized. Therefore, the nuclear autorotation magnetic resonance pressure light field microscopic detection has wide application fields and good prospects.

Claims

1. A nuclear spin magnetic resonance pressure stereo microscope test system is characterized in that: comprises a non-contact type stereo nuclear spin magnetic resonance pressure stereo microscope systemThe radio frequency transmitter comprises a radio frequency coil (1), a radio frequency switch driver (2), a radio frequency signal generator (3), a frequency modulator electronic device (4), a pulse sequence program generator (5), a function generator (6), a preamplifier (7), a feedback analyzer (8), a fringe center lock (9), a phase-locked amplification part (10), a magnetic field comprising a static magnetic field B0, a gradient magnetic field generated by a gradient magnet and an RF coil magnetic field, a fiber optical interference device (12), a radio frequency irradiation part (13) and a laser (14); the atomic nucleus autorotation magnetic resonance pressure microscopic test microscopic system comprises a resonance scanning segment (15), a torsion cantilever (16) and a torsion cantilever magnetic spin resonance pressure acquisition atomic angstrom-level three-dimensional structure, wherein the torsion cantilever (16) induces the magnetic spin resonance pressure, a phase-locked loop (17), an automatic gain loop (18), a piezoelectric ceramic four-dimensional nanometer precision precession component (19), a Feed Back feedback loop (20) and a four-quadrant photodiode detector (21), a radio frequency Coil (1) signal is controlled and generated by a radio frequency signal generator (3) and a radio frequency switch driver (2), RF amplification is sent to a radio frequency Coil RF Coil, frequency modulation is controlled by a radio frequency switch driver (2) and a pulse sequence program generator (5), a function generator (6) generates a signal function and sends the signal function to a phase-locking amplification and frequency modulator electronic device, and a feedback analyzer (8), The fringe center is locked (9), the movement of the test fringe of the laser optical fiber interference device is controlled, the fringe is locked, and the magnetic resonance pressure micro force and the surface magnetic spin information are calculated, the optical fiber optical interference device (12) for detecting the information by optical fiber interference is sent into a preamplifier (7) and a phase-locked amplification part (10) to be matched with and lock the interference fringe, a gradient magnet (11) generates a gradient magnetic field, and the signal output end of the phase-locked amplification part (10) is connected with the surface spin micro output port of the optical fiber optical interference device (12); the other signal output end of the Feed Back feedback loop (20) is connected to the reference output port of the phase-locked amplification part (10) through a preamplifier, the needle point of the gradient magnet (11) and the static magnetic field B₀In the same direction, the gradient magnet (11) and the resonance scanning section (15) are positioned directly above the sample; the emitting end of the laser (14) vertically irradiates on the cantilever of the torsional cantilever oscillator, four quadrantsThe incident end of the photodiode detector (21) is obliquely opposite to the optical fiber optical interference device (12), and the magnetic resonance pressure micro gyromagnetic ratio MHz/T is obtained.