CN110793440A - Optical deflection transient measurement method - Google Patents

Optical deflection transient measurement method Download PDF

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CN110793440A
CN110793440A CN201911062078.5A CN201911062078A CN110793440A CN 110793440 A CN110793440 A CN 110793440A CN 201911062078 A CN201911062078 A CN 201911062078A CN 110793440 A CN110793440 A CN 110793440A
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patterns
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CN110793440B (en
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王道档
卢毅伟
孔明
相超
许新科
赵军
刘维
郭天太
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China Jiliang University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length

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Abstract

The invention provides a transient measurement method based on optical deflection, and relates to the technical field of measurement. The method utilizes frequency carrier fringes in the orthogonal direction to respectively and independently modulate four-step phase-shift fringe patterns (eight total phase-shift patterns) in the x direction and the y direction, and couples the combined patterns of the four phase-shift fringes in different directions to different color channels to finally obtain a color image, namely a pattern projected by a projection screen. The method comprises the steps of collecting a deformation pattern deflected by an element to be measured by a camera, separating a composite pattern in x and y directions by adopting color separation, obtaining eight phase-shifting patterns by demodulation operation, namely four phase-shifting fringe patterns in the x and y directions, obtaining phase information by a phase demodulation related algorithm, obtaining the slope of a measured wave surface by calculation, and finally obtaining a reconstructed wave surface by an integral algorithm. The method solves the technical problem that transient measurement cannot be carried out due to the fact that phase shift stripes need to be continuously projected on an element to be measured in the traditional optical deflection detection.

Description

Optical deflection transient measurement method
Technical Field
The invention relates to the technical field of measurement, in particular to a high-precision large-dynamic instantaneous measurement method based on a frequency carrier method, a phase shift method and a color coding method.
Background
With the development of optical design and manufacturing, optical elements are increasingly used in testing. The components were evaluated using a wavefront test method. The traditional wave-front detection method mainly adopts an interference method, such as a Twyman-Green interferometer, a Fizeau interferometer, a point diffraction interferometer and the like. The dynamic range of conventional interferometers, however, limits its practical application to the testing of a wide range of transmitted wavefronts.
In recent years, the deflection method has been widely used and successfully applied to the test of astronomical telescope reflectors, such as spherical, aspherical, mirror free mirrors and precision X-ray mirrors. Compared with the interference method, the deflection method has lower requirements on system configuration, and only needs elements such as a projection screen, a CCD camera, an element to be detected and the like. Based on a light ray tracing method, light rays from a projection screen to a camera after passing through an element to be detected are determined, and a detection wavefront is obtained through light ray aberration. And (3) creating mapping by using methods such as a binary method, a gray scale method, a phase shift method, a mixing method and the like, and realizing optical deflection measurement. The multi-step phase shift method is a commonly used detection method, and the projection screen continuously displays projected phase shift sine stripes. However, this conventional method can only display and acquire one phase shift pattern at a time. In the conventional optical deflection measurement, at least three sinusoidal phase-shift stripes need to be continuously projected on an element to be measured, so that the conventional optical deflection measurement cannot realize transient measurement, and the method has limitations in practical application and limits the measurement speed.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to solve the technical problem that the traditional method cannot carry out transient measurement because a plurality of phase shift stripes need to be continuously projected on a measured object. The invention provides a high-precision large-dynamic instantaneous measurement method based on a frequency carrier method, a phase shift method and a color coding method.
The invention is realized by the following technical scheme: an optical deflection transient measurement method, comprising the steps of:
establishing an optical detection system based on an optical deflection method, wherein the optical detection system comprises a projection screen, an element to be detected, a camera and a computer;
designing a projection screen projection coding pattern: using orthogonal frequency carrier wave stripe to modulate eight phase shift patterns obtained by four-step phase shift, coupling the combined pattern of the four phase shift stripes in x and y different directions to two different color channels to obtain a color image;
image demodulation: projecting the color image to the element to be detected, performing color channel separation on a deformed color image acquired by a camera after deflection of the element to be detected to obtain composite patterns in the x and y directions, and demodulating the composite patterns to obtain four phase-shifted fringe patterns in the x and y directions respectively and eight phase-shifted patterns in total;
processing the eight phase-shifting patterns by a four-step phase-shifting algorithm and a phase unwrapping algorithm to obtain phase information, so as to obtain actual light spot distribution, and comparing the actual light spot distribution with ideal light spot distribution obtained by light ray tracing in the optical detection system to obtain light ray aberration which is a result of the processing error action of the element to be detected;
and obtaining the slope distribution of the wavefront according to the relation between the wave aberration and the light aberration, and integrating the slope of the wavefront to complete wavefront reconstruction.
Preferably, the designing the projection screen to project the coding pattern comprises the steps of:
four phase-shifting patterns I with sine intensity variation are respectively designed in the x and y directionspxn，IpynIndependently modulating eight phase shift patterns by using orthogonal frequency carrier stripes to convert the x-directionThe combined pattern of the four phase-shift stripes in the y direction is coupled to the red R channel, and the combined pattern of the four phase-shift stripes in the y direction is coupled to the blue B channel, so as to finally obtain a color map, wherein the color map can be represented by a mathematical formula:
Figure BDA0002258230470000021
a, B are the background intensity and modulation intensity coefficients of the sinusoidal fringes, respectively; i isx，IyIntensity in x, y directions, respectively; i isR，IB，IGIntensities in the R, G, B channels, respectively; n is the number of phase shift steps, and (n ═ 1,2,3, 4); i isfx,n＝cos(2πffx, nx)，Ify,n＝cos(2πffy,ny) are respectively frequency carriers with different directions of x and y; f. offx,n，ffy,nThe design frequency of each carrier wave in the x and y directions respectively.
Preferably, the IpxnAnd IpynRespectively as follows:
Ipxn＝1/2+cos(2πfx+n·π/2)
Ipyn＝1/2+cos(2πfy+n·π/2)
where f is the frequency of the phase shift pattern and x, y are the pixel coordinates on the projection screen, respectively.
Preferably, the image demodulation comprises the steps of:
carrying out color channel separation on the deformed color image collected by the camera after passing through the element to be detected to obtain composite phase shift stripes in the x and y directions;
separating out composite patterns of different carrier frequencies and phase shift stripes by using a band-pass filter, wherein four patterns are arranged in the x direction and the y direction respectively;
according to the Butterworth filter principle, with fnA bandpass filter is designed for the center. The cut-off frequency of each band is designed to be fn＝(fn-1+fn) A/2, where N is 1,2,3, …, N and baseband channel f0When the band pass filter is equal to 0, the band information after the band pass filter is:
wherein
Figure BDA0002258230470000032
Is along the carrier direction with fnA frequency-centered bandpass filter; i isCP(x, y) is the intensity of the composite phase-shifted fringe pattern; i'n(x, y) is the intensity of the phase-shifted fringe pattern;
and (3) processing by a low-pass filter, and filtering carrier fringe information in the orthogonal direction, thereby separating a carrier frequency and a phase shift fringe pattern:
Figure BDA0002258230470000033
wherein
Figure BDA0002258230470000034
Is the intensity, h ', of the final recovered phase-shifted fringe pattern'LP(x) Is a low pass filter.
Compared with the prior art, the invention has the beneficial effects that: the method breaks through the traditional measurement speed limit, uses a color image to replace a plurality of phase shift images generated by multi-step phase shift, realizes transient measurement and reduces the cost. When designing a coding pattern, the existing method is to generate three phase shift diagrams by three-step phase shift and couple the three phase shift diagrams to three channels of R, G and B respectively, and then the problem that the channels can be mutually crosstalked occurs, but in the method, the fringe diagram coupled into the channels is already a modulated composite phase shift diagram, and the problem of channel crosstalk is also solved. Because the wavelengths of R, G and B are different, after the three phase shift diagrams are coupled into the R, G and B channels, errors can be introduced in subsequent phase shift calculation, but in the method, the four phase shift diagrams in the same direction are modulated into a composite phase shift diagram to enter the same channel, so that the errors are avoided. The invention provides a high-precision large-dynamic instantaneous measurement method based on a frequency carrier method, a phase shift method and a color coding method for optical deflection detection.
Drawings
FIG. 1 is a flow chart of the present invention;
FIG. 2 is a schematic diagram of a detection optical path system according to an embodiment of the present invention;
FIG. 3 is a schematic view of a frequency carrier composite color map coding design for instantaneous deflection measurement projection screen projection according to the present invention;
FIG. 4 is a diagram of a demodulation process of a deformed color image acquired by a camera after passing through an element to be measured according to the present invention;
fig. 5 is a diagram of phase recovery after demodulation according to the present invention.
Detailed Description
The present invention will be described in detail with reference to the specific embodiments shown in the drawings, which are not intended to limit the present invention, and structural, methodological, or functional changes made by those skilled in the art according to the specific embodiments are included in the scope of the present invention.
Referring to fig. 1, the method for transient measurement of optical deflection according to the present invention includes the following steps:
s1: an optical detection system based on an optical deflection method for transmission element detection is established. As shown in fig. 2, the optical inspection system includes a projection screen 1, a transmission element 2 to be inspected, a camera 3, and a computer. The projection screen 1, the element to be measured 2 and the camera 3 are arranged according to a reverse Hartmann structure. The front end of the camera 3 is provided with a small filtering hole to overcome aperture imaging aberration. The projection screen 1 displays a color pattern which is finally formed by modulating the frequency carrier stripes in the orthogonal direction and coupling the combined pattern of the four phase-shift stripes in different directions to different color channels, the color pattern passes through the element to be detected 2, the camera 3 can obtain the complete imaging of the element to be detected 2, and the imaged deformed color pattern is collected. And carrying out color channel separation on the deformed color image to obtain a composite pattern in the x and y directions, and demodulating the composite pattern. The camera 3 and the projection screen 1 are respectively connected with a computer.
S2: the desired projection screen is designed to project the coding pattern. The following methods were used: the four-step phase-shift fringe pattern in the x, y directions can be represented as:
Ipxn＝1/2+cos(2πfx+n·π/2) (1)
Ipyn＝1/2+cos(2πfy+n·π/2) (2)
where f is the frequency of the phase shift pattern, x, y are the pixel coordinates on the projection screen, respectively, and n is the phase shift step number (n is 1,2,3, 4).
After four-step phase shifting, four phase shifting patterns in x and y directions are obtained, eight phase shifting patterns are independently modulated by using frequency carrier stripes in orthogonal directions, and the combined patterns of the four phase shifting stripes in different directions are coupled to different color channels:
Figure BDA0002258230470000051
wherein Ix，IyIntensity in x, y directions, respectively; A. b is the background intensity and modulation intensity coefficient of the sine stripe respectively; i isfx,n＝cos(2πffx,nx)，Ify,n＝cos(2πffy,ny) are respectively frequency carriers with different directions of x and y; f. offx,n，ffy,nThe design frequency of each carrier wave in the x and y directions respectively.
And coupling the combined pattern of the four phase-shift stripes in the x direction to a red R channel, and coupling the combined pattern of the four phase-shift stripes in the y direction to a blue B channel to finally obtain a color image. The color map can be represented by a mathematical formula:
a, B are the background intensity and modulation intensity coefficient of the sine stripe respectively; i isx，IyIntensity in x, y directions, respectively; i isR,IB,IGIntensities in the R, G, B channels, respectively; n is the number of phase shift steps, and (n ═ 1,2,3, 4); i isfx,n＝cos(2πffx,nx)，Ify,n＝cos(2πffy,ny) are respectively frequency carriers with different directions of x and y; f. offx,n，ffy,nThe design frequency of each carrier wave in the x and y directions respectively.
S3: and (5) image demodulation. The following method is adopted: and projecting the color image to the element to be detected, performing color channel separation on the deformed color image acquired by the camera after deflection of the element to be detected to obtain composite stripes in the x direction and the y direction, and separating composite phase shift images in different directions by using a band-pass filter based on Butterworth to realize uniform filtering on the phase shift images. And applying the low-pass filter to the frequency carrier direction to obtain a deformed phase shift diagram, and finally obtaining eight phase shift patterns, namely acquiring four phase shift diagrams in the x direction and the y direction respectively. (the same applies to the y-direction, taking the x-direction as an example) according to the Butterworth filter principle, with fnA bandpass filter is designed for the center. The cutoff frequency for each band is designed to be:
Figure BDA0002258230470000062
where N is 1,2,3, …, N and baseband channel f 00. The band-pass filtered fringe information is:
Figure BDA0002258230470000063
wherein
Figure BDA0002258230470000064
Is in the orthogonal direction at fnA frequency-centered bandpass filter; i isCP(x, y) is the intensity of the composite phase-shifted fringe pattern; i'n(x, y) is the intensity of the phase-shifted fringe pattern. And (3) processing the signal by a low-pass filter, and filtering out the carrier fringe information in the orthogonal direction, thereby separating out a carrier frequency and a phase shift fringe pattern:
Figure BDA0002258230470000071
wherein
Figure BDA0002258230470000072
Is the intensity of the final recovered phase shifted fringe pattern; h'LP(x) Is a low pass filter.
S4: wave front reconstruction: phase information is obtained through a four-step phase-shifting algorithm and a phase unwrapping algorithm, so that actual light spot distribution is obtained, the actual light spot distribution is compared with ideal light spot distribution obtained through light tracing in an optical deflection detection system, light aberration is obtained, and the measured light aberration is a result of processing error action of the element to be measured. Therefore, the wave aberration and the light aberration can be utilized to obtain the slope distribution of the wave front, and the slope of the wave front is integrated to complete wave front reconstruction.
Examples
Fig. 2 is an optical path layout of an optical deflection transient measurement system for transmission element detection. The device 2 to be measured is a convex lens with a diameter of 25.4mm and a refractive index of 1.51. The measurement field size is set to 1080 × 1080 pixels, the carrier frequencies in the x and y directions are set to frequencies corresponding to 40, 70, 100 and 130 periods, and each phase-shift fringe pattern has about 12 periods. The number of pixels of the liquid crystal screen for fringe projection is 1920(H) multiplied by 1080(V), the corresponding pixel size is 0.265mm (H) multiplied by 0.265mm (V), a three-channel 8-bit color CCD camera is adopted, the resolution is 1348(H) multiplied by 1280(V), and the pixel size is 3.63 μm (H) multiplied by 3.63 μm (V).
Step 1, as shown in fig. 3, designing a coding pattern required by projection of a projection screen: four phase-shifting patterns I with sine intensity variation are respectively designed in the x and y directionspxn、IpynThe eight phase-shift patterns are individually modulated by using the frequency carrier stripes in the orthogonal direction, the combined pattern of the four phase-shift stripes in the x direction is coupled to a red channel, the combined pattern of the four phase-shift stripes in the y direction is coupled to a blue channel, and finally a color image is obtained. The color map can be represented by a mathematical formula:
Figure BDA0002258230470000073
wherein, IR，IB，IGIllumination intensity in R, G, B channels, respectively
And 2, performing color channel separation on the deformed color image acquired by the camera after passing through the element to be detected as shown in fig. 4 to obtain composite stripes in the x direction and the y direction, and separating composite phase shift images in different directions by using a band-pass filter based on Butterworth to realize uniform filtering on the phase shift images. And applying a low-pass filter to the frequency carrier direction to obtain a phase shift diagram, and finally obtaining eight phase shift diagrams, namely acquiring four phase shift diagrams in the x direction and the y direction respectively.
And 3, obtaining eight phase-shifting patterns as shown in the figure 5, and then obtaining phase information by using a four-step phase-shifting algorithm and a phase unwrapping algorithm. The wrapped phase maps acquired in the x and y directions are (a), (d) in fig. 5 and the corresponding unwrapped phases are (b), (e) in fig. 5. Fig. 5 (c) and (f) show contrast data for ideal phases. Therefore, the actual light spot distribution can be obtained, the actual light spot distribution is compared with the ideal light spot distribution obtained by light ray tracing in the optical deflection detection system, the light ray aberration is obtained, and the measured result of the processing error action of the light ray aberration element to be detected is obtained. Therefore, the wave aberration and the light aberration can be utilized to obtain the slope distribution of the wave front, and the slope of the wave front is integrated to complete wave front reconstruction.
Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Claims (4)

1. An optical deflection transient measurement method is characterized in that:
establishing an optical detection system based on an optical deflection method, wherein the optical detection system comprises a projection screen, an element to be detected, a camera and a computer;
designing a projection screen projection coding pattern: using orthogonal frequency carrier wave stripe to modulate eight phase shift patterns obtained by four-step phase shift, coupling the combined pattern of the four phase shift stripes in x and y different directions to two different color channels to obtain a color image;
image demodulation: projecting the color image to the element to be detected, performing color channel separation on a deformed color image acquired by a camera after deflection of the element to be detected to obtain composite patterns in the x and y directions, and demodulating the composite patterns to obtain four phase-shifted fringe patterns in the x and y directions respectively and eight phase-shifted patterns in total;
wave front reconstruction: processing the eight phase-shifting patterns by a four-step phase-shifting algorithm and a phase unwrapping algorithm to obtain phase information, so as to obtain actual light spot distribution, and comparing the actual light spot distribution with ideal light spot distribution obtained by light ray tracing in the optical detection system to obtain light ray aberration which is a result of the processing error action of the element to be detected; and obtaining the slope distribution of the wavefront according to the relation between the wave aberration and the light aberration, and integrating the slope of the wavefront to complete wavefront reconstruction.
2. The method of claim 1, wherein the transient measurement of optical deflection comprises: the designing of the projection screen projection coding pattern comprises the steps of:
four phase-shifting patterns I with sine intensity variation are respectively designed in the x and y directionspxn，IpynThe eight phase shift patterns are individually modulated by using the frequency carrier stripes in the orthogonal direction, the combined pattern of the four phase shift stripes in the x direction is coupled to the red R channel, the combined pattern of the four phase shift stripes in the y direction is coupled to the blue B channel, and finally a color image is obtained, wherein the color image can be represented by a mathematical formula:
Figure FDA0002258230460000011
a, B are the background intensity and modulation intensity coefficients of the sinusoidal fringes, respectively; i isx，IyIntensity in x, y directions, respectively; i isR，IB，IGIntensities in the R, G, B channels, respectively; n is the number of phase-shifting steps, and n is equal to(1，2，3，4)；Ifx,n＝cos(2πffx,nx)，Ify,n＝cos(2πffy,ny) are respectively frequency carriers with different directions of x and y; f. offx,n，ffy,nThe design frequency of each carrier wave in the x and y directions respectively.
3. The method of claim 2, wherein the transient measurement of optical deflection comprises: said IpxnAnd IpynRespectively as follows:
Ipxn＝1/2+cos(2πfx+n·π/2)
Ipyn＝1/2+cos(2πfy+n·π/2)
where f is the frequency of the phase shift pattern and x, y are the pixel coordinates on the projection screen, respectively.
4. The method of claim 1, wherein the transient measurement of optical deflection comprises: the image demodulation comprises the steps of:
carrying out color channel separation on the deformed color image collected by the camera after passing through the element to be detected to obtain composite phase shift stripes in the x and y directions;
separating out composite patterns of different carrier frequencies and phase shift stripes by using a band-pass filter, wherein four patterns are arranged in the x direction and the y direction respectively;
according to the Butterworth filter principle, with fnA bandpass filter is designed for the center. The cut-off frequency of each band is designed to be fn＝(fn-1+fn) A/2, where N is 1,2,3, …, N and baseband channel f0When the band pass filter is equal to 0, the band information after the band pass filter is:
Figure FDA0002258230460000021
whereinIs along the carrier direction with fnA frequency-centered bandpass filter; i isCP(x, y) is the intensity of the composite phase-shifted fringe pattern; i'n(x, y) is the intensity of the phase-shifted fringe pattern;
and (3) processing by a low-pass filter, and filtering carrier fringe information in the orthogonal direction, thereby separating a carrier frequency and a phase shift fringe pattern:
Figure FDA0002258230460000023
wherein
Figure FDA0002258230460000024
Is the intensity, h ', of the final recovered phase-shifted fringe pattern'LP(x) Is a low pass filter.
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