CN110789814A

CN110789814A - Substrate cassette, rod body structure and waterproof breathable assembly with nano film

Info

Publication number: CN110789814A
Application number: CN201810869441.3A
Authority: CN
Inventors: 颜晖展; 陈健福
Original assignee: Chung King Enterprise Co ltd
Current assignee: Chung King Enterprise Co ltd
Priority date: 2018-08-02
Filing date: 2018-08-02
Publication date: 2020-02-14

Abstract

The invention provides a waterproof breathable assembly which comprises a seat body, a cover body and a nano film. The cover body is combined and fixed on the seat body; the nanometer film is clamped between the base and the cover, and is provided with a plurality of nanometer-scale pores which only allow gas molecules to pass through and are communicated with the outsides of two sides of the nanometer film, and at least part of the surfaces of two sides of the nanometer film are not shielded by the base and the cover. In addition, a substrate cassette with the waterproof ventilating component and a rod body structure with the waterproof ventilating component are also provided. The waterproof ventilating assembly, the substrate cassette and the rod body structure can improve the reliability and prolong the service life of the rod body structure.

Description

Substrate cassette, rod body structure and waterproof breathable assembly with nano film

Technical Field

The invention relates to a waterproof breathable component with a nano film, and a substrate cassette and a rod body structure with the waterproof breathable component.

Background

With the continuous development of liquid crystal panels, the resolution of the liquid crystal panels is continuously improved from HD, FULL HD, 4K to 8K. For example, 8K UHDTV (4320p) has a width and height of 7680 × 4320, and the total pixel count is already 16 times that of FULL HD. While the finer the product picture, the more detailed the product picture, the more demanding the details of the related process, and if some fine dust falls on the liquid crystal panel inadvertently during the production process, the defects and defects will be caused.

At present, a common panel factory stores, transports and protects glass substrates used in the liquid crystal panel manufacturing process by using a substrate cassette, so that the quality of the substrate cassette directly affects the yield of the final liquid crystal panel product. As the process requirements are increasing, the requirements for contamination prevention and dust are becoming more stringent, and the cleanliness of the corresponding substrate cassette is also increasing. Therefore, in order to keep the substrate cassette clean in the panel factory, although the whole environment is in the clean room, the clean room still has a trace amount of dust, and the amount of dust accumulated in the substrate cassette over the years is considerable, so the substrate cassette needs to be cleaned periodically and then dried.

However, the rod body structure of the prior substrate cassette is designed to meet the requirements of structural strength and light weight, and most of the prior substrate cassettes adopt a round or square hollow rod body. In order to avoid the contamination caused by the cleaning agent or water remaining in the hollow rod body during the cleaning process, the rod body is usually closed at its end to form a closed structure. However, after the structure is cleaned and dried, the air in the closed structure repeatedly expands with heat and contracts with cold for a long time and cannot circulate outside the rod body, so that the rod body structure is deformed or broken, water vapor permeates into the rod body structure through a gap between the sealing cover and the rod body, accumulated water cannot be completely evaporated in the drying process inside the rod body structure for a long time, and finally, the water overflows and drips above the substrate to cause defects. Or after cleaning and drying, the sealing cover is abnormally dropped on the substrate due to long-term repeated expansion and contraction of the rod body structure, so that the substrate is damaged, and the like.

Disclosure of Invention

The invention provides a waterproof ventilating assembly, a substrate cassette and a rod body structure, which can improve the reliability of the rod body structure.

The waterproof breathable assembly comprises a base body, a cover body and a nano film. The cover body is combined and fixed on the seat body; the nanometer film is clamped between the base and the cover, and is provided with a plurality of nanometer-scale pores which only allow gas molecules to pass through and are communicated with the outsides of two sides of the nanometer film, and at least part of the surfaces of two sides of the nanometer film are not shielded by the base and the cover.

In an embodiment of the invention, the base is at least partially accommodated in the cover.

In an embodiment of the invention, the base is embedded in the cover.

In an embodiment of the invention, the base has a through hole, and the nano film covers the through hole.

In an embodiment of the invention, the cover body has a slot, and an opening direction of the slot is different from an axial direction of the through hole.

In an embodiment of the invention, an opening direction of the groove is perpendicular to an axial direction of the through hole.

In an embodiment of the invention, the nano film is made of fluorine plastic.

In an embodiment of the invention, the thickness of the nano film is less than 500 nm.

In an embodiment of the invention, the Porosity (Porosity) of the nano-film is higher than 50%.

In an embodiment of the invention, the pore density of the nano-film is more than one million per square centimeter.

In an embodiment of the invention, the air permeability of the nano film is greater than 2cc/sec (cubic centimeter/second).

In an embodiment of the invention, a pore diameter of the nano film is less than 500 nanometers (nm).

In an embodiment of the invention, the nano-film has a water pressure resistance higher than 50 mm water (mmH)₂O)。

In an embodiment of the invention, the foreign substance protection rating (Ingress protection rating) of the nano film is IP42 or more.

The substrate cassette of the invention is suitable for accommodating at least one substrate. The substrate cassette includes a frame. The frame comprises a plurality of rod bodies, and each rod body is provided with a rod-shaped part. At least one rod body comprises the waterproof breathable component, and the rod-shaped part of the rod body containing the waterproof breathable component is provided with a hole corresponding to the waterproof breathable component. The waterproof breathable assembly is assembled in the opening through the base body or the cover body.

The rod structure of the invention is suitable for forming a frame or supporting at least one substrate in the substrate cassette. The rod body structure comprises a rod-shaped part and the waterproof and breathable assembly, wherein the rod-shaped part is provided with a hole. The waterproof breathable assembly is assembled in the opening through the base body or the cover body.

In an embodiment of the invention, the rod-shaped portion is made of a carbon fiber reinforced polymer composite material.

In an embodiment of the invention, the plurality of rods includes at least one supporting rod, and the supporting rod is adapted to support at least one substrate.

In an embodiment of the invention, the rod portion of the rod body with the waterproof and breathable component is tubular, and the opening is located on a side surface of the rod portion, a top surface of the rod portion, or a distal end of the rod portion of the rod body with the waterproof and breathable component and is communicated with an inner space of the rod portion.

In an embodiment of the invention, the base has a through hole, the through hole is aligned to the opening, and the nano film covers the through hole.

In an embodiment of the invention, the base is connected to and covers the opening, and the cover covers the base.

In an embodiment of the invention, the cover is connected to and covers the opening, and the base is embedded in the cover.

In an embodiment of the invention, the cover body has a slot, and an opening direction of the slot is different from an axial direction of the hole.

In an embodiment of the invention, an opening direction of the slot is perpendicular to an axial direction of the hole.

In an embodiment of the invention, at least one side edge of the opening of the slot is lower than the axis of the slot.

In view of the above, the substrate cartridge of the present invention utilizes the waterproof and air-permeable component to cover the opening of the rod-shaped portion of the rod structure, so that during the cleaning and drying processes, liquid water or cleaning solution is blocked outside the rod-shaped portion by the nano-film, and gas can flow through the nano-film into and out of the rod-shaped portion. Therefore, when the substrate cassette is dried after being cleaned and the air in the rod-shaped part expands with heat and contracts with cold, the rod-shaped part can not deform due to the expansion and contraction of the air in the rod-shaped part, thereby improving the reliability of the rod-shaped part and prolonging the service life of the rod-shaped part.

In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.

Drawings

Fig. 1 is a perspective view of a substrate cassette according to an embodiment of the present invention.

Fig. 2 is a perspective view of the rod structure having the waterproof and breathable assembly of fig. 1.

FIG. 3 is a partially enlarged view of the rod structure of FIG. 2 in a region A.

Fig. 4 is an exploded view of the stem portion and waterproof, breathable assembly of fig. 2.

Fig. 5 is a partial cross-sectional view of the rod structure of fig. 3.

Fig. 6 is an exploded view of the waterproof, breathable assembly of fig. 5.

Fig. 7 is a perspective view of the waterproof breathable assembly of fig. 5.

Fig. 8 is an exploded view of the waterproof, breathable assembly of fig. 7.

Fig. 9 is a perspective view of a rod structure with a waterproof and breathable assembly according to another embodiment of the present invention.

FIG. 10 is a partial enlarged view of the rod structure of FIG. 9 in region A'.

FIG. 11 is an exploded view of the rod and the waterproof and breathable assembly of FIG. 9.

Fig. 12 is a partial cross-sectional view of the rod structure of fig. 10.

Fig. 13 is an exploded view of the waterproof, breathable assembly of fig. 12.

Fig. 14 is a perspective view of a substrate cassette according to yet another embodiment of the present invention.

Description of reference numerals:

100. 300, and (2) 300: a substrate cassette;

110. 310: a frame;

112: putting the frame on;

114: a lower frame;

116. 316: a side column;

116 a: a side strut;

118: a rear pillar;

120. 220, 320: a rod body/rod body structure;

122. 222: a rod-shaped portion;

122a, 222 a: opening a hole;

124. 224: a waterproof breathable component;

124a, 224 a: a base body;

124b, 224 b: a nanofilm;

124c, 224 c: a cover body;

224c 1: gluing a concave part;

224c 2: an extension portion;

311: a connecting rod;

330: a linear body;

d1, D1': the direction of the opening;

d2, D2': axial direction;

e1: a tenon structure;

e2: a hook is clamped;

e3: a clamping groove;

g: a waterproof adhesive;

H. h': through holes are formed;

s, S': and (4) slotting.

Detailed Description

Fig. 1 is a perspective view of a substrate cassette according to an embodiment of the present invention. Referring to fig. 1, the substrate cassette 100 of the present embodiment is used to accommodate glass substrates or other types of substrates used in the liquid crystal panel manufacturing process for storage, transportation and protection of the substrates.

The substrate cassette 100 includes a frame 110, and the frame 110 includes a plurality of rods 120. The frame 110 may be at least composed of an upper frame 112, a lower frame 114, a plurality of side pillars 116 connected between the upper frame 112 and the lower frame 114, and a plurality of rear pillars 118 connected between the upper frame 112 and the lower frame 114, wherein the rods 120 are respectively connected to the rear pillars 118 to form support rods disposed in the frame 110 and used for supporting the substrate. In addition, each side pillar 116 has a plurality of side support rods 116a for assisting in supporting the left and right sides of the substrate.

Fig. 2 is a perspective view of the rod structure having the waterproof and breathable assembly of fig. 1. FIG. 3 is a partially enlarged view of the rod structure of FIG. 2 in a region A. Fig. 4 is an exploded view of the stem portion and waterproof, breathable assembly of fig. 2.

Please refer to fig. 2 to fig. 4. Each rod 120 of the substrate cassette 100 of the present embodiment includes a rod portion 122, and at least one of the rods 120 further includes a waterproof and air-permeable member 124. The shaft 122 may be made of various high-strength materials, such as Carbon Fiber Reinforced Polymer (CFRP) composite material having high strength and light weight.

The rod portion 122 is tubular, and the rod portion 122 of the rod 120 provided with the waterproof and breathable component 124 further has an opening 122a corresponding to the waterproof and breathable component 124. The opening 122a is located on a side surface of the rod portion 122 and communicates with an inner space of the rod portion 122. The waterproof and air-permeable member 124 is assembled to the opening 122a to prevent water or other liquid from entering the inner space of the rod 122 and to allow air inside and outside the rod 122 to flow through.

Fig. 5 is a partial cross-sectional view of the rod structure of fig. 3. Fig. 6 is an exploded view of the waterproof, breathable assembly of fig. 5. Referring to fig. 5 and fig. 6, in detail, the waterproof and breathable assembly 124 includes a base 124a, a nanomembrane 124b and a cover 124 c.

The base 124a is connected to the opening 122a of the rod portion 122 and covers the opening 122a, the cover 124c is fixed on the base 124a and covers the base 124a, and a portion of the base 124a is accommodated in the cover 124 c. That is, the waterproof and air-permeable assembly 124 is assembled in the opening 122a through the seat 124a, and the seat 124a is hidden in the cover 124 c.

In the present embodiment, the seat 124a of the waterproof and breathable assembly 124 has a tenon structure E1, and is assembled to the opening 122a of the rod portion 122 through the tenon structure E1. However, the invention is not limited thereto, and in other embodiments, the seat 124a can be assembled to the opening 122a of the rod portion 122 by other suitable assembling structures.

Fig. 7 is a perspective view of the waterproof breathable assembly of fig. 5. Fig. 8 is an exploded view of the waterproof, breathable assembly of fig. 7. Referring to fig. 7 and 8, the cover 124c of the present embodiment has a hook E2, the base 124a has a locking slot E3, and the hook E2 is suitable for being locked in the locking slot E3 to combine the cover 124c and the base 124 a. In addition, the cover 124c may be coated with a waterproof adhesive G, so that the cover 124c is glued to the rod portion 122 by the waterproof adhesive G as shown in fig. 5. In other embodiments, the cover 124c can be combined with the base 124a and the rod 122 by other suitable methods, which is not limited in the present invention.

Referring to fig. 5 and 6, the nanomembrane 124b is sandwiched between the base 124a and the cover 124c, the nanomembrane 124b has a plurality of nano-scale pores that only allow gas molecules to pass through and communicate with the outside of the two sides of the nanomembrane 124b, and the two sides of the nanomembrane 124b have at least partial surfaces that are not covered by the base 124a and the cover 124 c.

Since the nanomembrane 124b has a plurality of nano-scale pores that only allow gas molecules to pass through and communicate with the outside of both sides of the nanomembrane 124b, and liquid molecules that are much larger than the gas molecules cannot pass through the nano-scale pores, the waterproof and breathable effects can be achieved. Thus, the nanomembrane may also be referred to as a waterproof breathable membrane.

The nanomembrane 124b may be made of fluoroplastic, such as tetrafluoroethylene resin (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), ethylene tetrafluoroethylene polymer (ETFE), polyvinylidene fluoride (PVDF), or the like. The fluorine plastic can make the nano-film 124b have wear resistance, smoothness and hydrophobicity, so as to prevent foreign matters such as dust, impurities and water from adhering to the surface of the nano-film 124b to block the pores.

The nano-film 124b preferably has a thickness of less than 500 nm to avoid its poor air permeability due to its excessive thickness. The preferable pore density of the nanomembrane 124b is more than one million per square centimeter; or a Porosity (Porosity) higher than 50%; further, it is preferable that the nanofilm 124b has a gas permeability of more than 2cc/sec, i.e., 2cc/sec or more of gas can pass through.

These characteristics can increase the gas flow rate passing through the nanomembrane 124b per unit time, so as to avoid the occurrence of structural rupture due to the fact that the rod 120 is not in time to exhaust the excessive gas therein during the baking process.

In addition, the pore diameter of the nanomembrane 124b is preferably less than 500 nm, so that the pore diameter is smaller than the liquid water molecules and most foreign particles. Specifically, the nano-film 124b preferably has an Ingress protection rating (IP 42) or higher to effectively block liquid water molecules and dust.

The cover 124c has a slot S, the base 124a has a through hole H, the through hole H is aligned to the opening 122a of the rod portion 122, and the nanomembrane 124b covers the through hole H of the base 124a, that is, the surface of the portion of the nanomembrane 124b corresponding to the through hole H on both sides is not shielded by the base 124a and the cover 124c, so that air can flow from the inside of the rod portion 122 to the outside of the rod portion 122 through the opening 122a, the through hole H, the nanomembrane 124b and the slot S, or reversely flow from the outside of the rod portion 122 to the inside of the rod portion 122.

The opening direction D1 (shown in fig. 5) of the slot S is different from the axial direction D2 (shown in fig. 5) of the bore 122a of the rod portion 122. And, at least one side edge of the opening of the slot S is positioned lower than the axis of the slot S (i.e., the axis coinciding with the axial direction D2 shown in fig. 5).

In the present embodiment, in a case where the hole 122a is located on a side surface of the rod portion 122, the opening direction D1 of the slot S is perpendicular to the axial direction D2 of the hole 122a, and the opening direction D1 of the slot S is directed downward. This reduces the direct intrusion of cleaning fluid/water or foreign matter into the interior of the waterproof breathable assembly 124. Even if cleaning liquid or water is flushed in, the cleaning liquid or the water can easily flow out of the slot S, so that water is prevented from accumulating in the slot S after cleaning.

In addition, the water pressure resistance of the nanomembrane 124b may preferably be higher than 50 mm water column (mmH)₂O) so that it does not break due to insufficient pressure resistance even when it is impacted by a cleaning liquid or liquid water during cleaning.

In addition to disposing the opening 122a and the waterproof and breathable member 124 outside the side surface of the rod-shaped portion 122, the opening 122a and the waterproof and breathable member 124 may also be disposed on the top surface of the rod-shaped portion 122, in which case the waterproof and breathable member 124 may also serve as a support pad for supporting the substrate, and the slot S is not disposed on the top of the support pad and is not closed by the substrate.

Under the above configuration, the substrate cassette 100 utilizes the waterproof and air-permeable member 124 to cover the opening 122a of the rod portion 122, so that water in the cleaning process is blocked outside the rod portion 122 by the nanomembrane 124b, and air can flow through the nanomembrane 124b into the rod portion 122 and out of the rod portion 122. Therefore, when the substrate cassette 100 is dried after being cleaned and the air in the rod portion 122 expands with heat and contracts with cold, the rod portion 122 will not deform or even break due to the expansion and contraction of the air therein, thereby improving the reliability and prolonging the service life.

Besides the side surface or the top surface of the rod portion 122, the waterproof and breathable component can be arranged at the end of the rod body. This is illustrated by the following further example.

Fig. 9 is a perspective view of a rod structure with a waterproof and breathable assembly according to another embodiment of the present invention. FIG. 10 is a partial enlarged view of the rod structure of FIG. 9 in region A'. FIG. 11 is an exploded view of the rod and the waterproof and breathable assembly of FIG. 9.

Referring to fig. 9 to 11, the rod structure 220 of the present embodiment includes a rod portion 222 and a waterproof and air-permeable component 224, wherein the rod portion 222 is a tubular hollow rod and has an opening 222a, and the opening 222a is located at the end of the rod portion 222 and is communicated with an inner space of the rod portion 222. The waterproof and air-permeable member 224 is assembled in the opening 222a to prevent water or other liquid from entering the inner space of the shaft 222 and to allow air to flow in the shaft 222 and out of the shaft 222.

Fig. 12 is a partial cross-sectional view of the rod structure of fig. 10. Fig. 13 is an exploded view of the waterproof, breathable assembly of fig. 12. Referring to fig. 12 and 13, the waterproof and air-permeable assembly 224 includes a base 224a, a nano-film 224b and a cover 224 c.

The nanomembrane 224b is sandwiched between the base 224a and the cover 224c, the base 224a can be embedded in the cover 224c by means of embedding and injection, and is accommodated and covered by the cover 224c, and the cover 224c is connected to the opening 222a of the rod-shaped portion 222 and covers the opening 222 a. That is, the waterproof and breathable assembly 224 is assembled in the opening 222a through the cover 224c, and the seat 224a is hidden in the cover 224 c.

In detail, the cover 224c in this embodiment has an extending portion 224c2, the extending portion 224c2 extends to the rear end of the seat 224a, and the nanomembrane 224b is sandwiched between the extending portion 224c2 of the cover 224c and the rear end of the seat 224 a. In other embodiments, the seat 224a and the cover 224c may sandwich the nanomembrane 224b therebetween in other manners, which is not limited in the present invention.

Under the above configuration, the waterproof and air-permeable member 224 covers the opening 222a of the rod-shaped portion 222, so that water in the cleaning process is blocked outside the rod-shaped portion 222 by the nano-film 224b, and air can flow through the nano-film 224b into the rod-shaped portion 222 and out of the rod-shaped portion 222. Therefore, when the substrate cassette 200 is dried after being cleaned and the air in the rod-shaped portion 222 expands with heat and contracts with cold, the rod-shaped portion 222 will not deform due to the expansion and contraction of the air therein, thereby improving the reliability thereof.

Referring to fig. 12 and 13, the cover 224c has a slot S ', the base 224a has a through hole H', the through hole H 'is opposite to the opening 222a of the rod-shaped portion 222, and the nanomembrane 224b covers the through hole H' of the base 224a, so that air can flow out of the rod-shaped portion 222 into the rod-shaped portion 222 or flow out of the rod-shaped portion 222 into the rod-shaped portion 222 through the slot S ', the nanomembrane 224b, the through hole H' and the opening 222 a.

In the present embodiment, the opening direction D1 ' (labeled in fig. 5) of the slot S ' of the cover 224c is perpendicular to the axial direction D2 ' (labeled in fig. 12) of the hole 222a of the rod-shaped portion 222. Therefore, the slot S 'faces downward, so that water accumulation in the slot S' after cleaning the rod portion 222 can be avoided.

In the embodiment, the cover 224c of the waterproof and air-permeable assembly 224 has a plurality of glue recesses 224c1, and the cover 224c can be adhered to the opening 222a of the rod-shaped portion 222 after the glue recesses 224c1 are coated with the waterproof adhesive. However, the invention is not limited thereto, and in other embodiments, the cover 224c may be assembled to the opening 222a of the rod-shaped portion 222 by other suitable assembling structures.

As for the material and characteristics of the nanomembrane 224b used in the present embodiment, the requirements and effects are completely the same as those of the nanomembrane 124b used in the previous embodiment, and thus, the detailed description thereof is omitted.

Fig. 14 is a perspective view of a substrate cassette according to yet another embodiment of the present invention. In the present embodiment, the substrate cassette 300 supports the substrate by the linear body 330 connected between the side posts 316 of the frame 310 without a support rod, so the rod structure 320 is not used as a support rod, but is used for any rod, such as a link or a post, constituting the frame 310. The present embodiment is exemplified by the connecting rod 311, which may be provided with the same or similar waterproof and air-permeable component 124 as the first embodiment.

Although the position and function of the rod structure 320 in this embodiment are different from those of the rod 120 in the first embodiment, the waterproof and air-permeable assembly 124 is used to block the entry of external liquid or foreign matter, and the action mechanism of exhausting the excess gas due to thermal expansion in the baking process is the same as that in the first embodiment, and thus the description thereof is not repeated.

In summary, the substrate cartridge of the present invention utilizes the waterproof and air-permeable member to cover the opening of the rod-shaped portion of the rod structure, so that water in the cleaning process is blocked by the nano-film outside the rod-shaped portion, and air can flow through the nano-film inside and outside the rod-shaped portion. Therefore, when the substrate cassette is dried after being cleaned and the air in the rod-shaped part expands with heat and contracts with cold, the rod-shaped part can not deform due to the expansion and contraction of the air in the rod-shaped part, thereby improving the reliability of the rod-shaped part and prolonging the service life of the rod-shaped part.

Although the present invention has been described with reference to the above embodiments, it should be understood that the invention is not limited thereto, and various changes and modifications can be made by those skilled in the art without departing from the spirit and scope of the invention.

Claims

1. A waterproof, breathable assembly, comprising:

a base body;

the cover body is combined and fixed on the seat body; and

the nanometer film is clamped between the base and the cover, the nanometer film is provided with a plurality of nanometer-scale pores which only allow gas molecules to pass through and are communicated with the outsides of two sides of the nanometer film, and at least partial surfaces of two sides of the nanometer film are not shielded by the base and the cover.

2. The waterproof and breathable assembly of claim 1, wherein the holder body is at least partially received within the cover body.

3. The waterproof and breathable assembly of claim 2, wherein the base is embedded within the cover.

4. The waterproof and breathable assembly of claim 1, wherein the base has a through hole, and the nanomembrane covers the through hole.

5. The waterproof and breathable assembly of claim 4, wherein the cover has a slot, and the opening direction of the slot is different from the axial direction of the through hole.

6. The waterproof and breathable assembly of claim 5, wherein the opening direction of the slot is perpendicular to the axial direction of the through hole.

7. The waterproof breathable assembly of claim 1, wherein the nanomembrane is made of fluoroplastic.

8. The waterproof breathable assembly of claim 1, wherein the nanomembrane has a thickness of less than 500 nanometers.

9. The waterproof breathable assembly of claim 1, wherein the nanomembrane has a porosity greater than 50%.

10. The waterproof breathable assembly of claim 1, wherein the nanomembrane has a pore density of greater than one million per square centimeter.

11. The waterproof breathable assembly of claim 1, wherein the nanofilm has an air permeability greater than 2cc/sec (cubic centimeters per second).

12. The waterproof breathable assembly of claim 1, wherein the nanomembrane has a pore diameter of less than 500 nanometers.

13. The waterproof and breathable assembly of claim 1, wherein the nanomembrane has a water pressure resistance of greater than 50 millimeters of water.

14. The waterproof breathable assembly of claim 1, wherein the nanomembrane has a foreign object protection rating of IP42 or greater.

15. A substrate cassette adapted to receive at least one substrate, the substrate cassette comprising:

a frame, comprising a plurality of rods, each of the rods having a rod-shaped portion, and wherein at least one of the rods comprises the waterproof and breathable assembly according to any one of claims 1 to 14, and the rod-shaped portion of the rod containing the waterproof and breathable assembly has an opening corresponding to the waterproof and breathable assembly, and the waterproof and breathable assembly is assembled in the opening through the base or the cover.

16. The substrate cassette of claim 15, wherein the rod-shaped portions are made of a carbon fiber reinforced polymer composite.

17. The substrate cassette of claim 15, wherein the plurality of rods comprises at least one support rod adapted to support the at least one substrate.

18. The substrate cassette of claim 15, wherein the rod portion of the rod having the waterproof and gas-permeable member is tubular, and the opening is located on a side surface of the rod portion of the rod having the waterproof and gas-permeable member, a top surface of the rod portion, or a distal end of the rod portion and communicates with an inner space of the rod portion.

19. The substrate cassette of claim 15, wherein the base has a through hole, the through hole is aligned with the opening, and the nanomembrane covers the through hole.

20. The substrate cassette of claim 15, wherein the retainer is coupled to and covers the opening, and the cover covers the retainer.

21. The substrate cassette of claim 15, wherein the cover is coupled to and covers the opening, and the base is embedded in the cover.

22. The substrate cassette of claim 15, wherein the cover has a slot with an opening direction different from an axial direction of the opening.

23. The substrate cassette of claim 22, wherein at least one side edge of the opening of the slot is positioned below an axis of the slot.

24. The substrate cassette of claim 22, wherein the open direction of the slot is perpendicular to the axial direction of the aperture.

25. The substrate cassette of claim 24, wherein at least one side edge of the opening of the slot is positioned below an axis of the slot.

26. A rod structure adapted to frame or support at least one substrate in a substrate cassette, the rod structure comprising:

a rod-shaped portion having an opening; and

the waterproof and breathable assembly of any one of claims 1 to 14, wherein the waterproof and breathable assembly is assembled to the opening through the base or the cover.

27. The rod structure of claim 26 wherein the rod-shaped portion is made of a carbon fiber reinforced polymer composite.

28. The rod structure according to claim 26, wherein the rod portion has a tubular shape, and the hole is located at a side surface of the rod portion or a distal end of the rod portion and communicates with an inner space of the rod portion.

29. The rod structure according to claim 26, wherein the seat has a through hole, the through hole is aligned with the opening, and the nanomembrane covers the through hole.

30. The pole structure of claim 26, wherein the housing is connected to and covers the opening, and the cover covers the housing.

31. The pole structure of claim 26, wherein the cover is connected to and covers the opening, and the seat is embedded in the cover.

32. The rod structure of claim 26 wherein the cap has a slot with an opening direction different from an axial direction of the bore.

33. The rod structure of claim 32 wherein at least one side edge of the opening of the slot is positioned below the axis of the slot.

34. The rod structure of claim 32 wherein the slotted opening direction is perpendicular to the axial direction of the bore.

35. The rod structure of claim 34 wherein at least one side edge of the opening of the slot is positioned lower than the axis of the slot.