CN110764254A - Compileable Structured Light Projection System - Google Patents

Compileable Structured Light Projection System Download PDF

Info

Publication number
CN110764254A
CN110764254A CN201910940597.0A CN201910940597A CN110764254A CN 110764254 A CN110764254 A CN 110764254A CN 201910940597 A CN201910940597 A CN 201910940597A CN 110764254 A CN110764254 A CN 110764254A
Authority
CN
China
Prior art keywords
structured light
projection system
pattern
mems micromirror
light projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910940597.0A
Other languages
Chinese (zh)
Inventor
周鹏
沈文江
黄艳飞
李小光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Institute of Nano Tech and Nano Bionics of CAS
Original Assignee
Suzhou Institute of Nano Tech and Nano Bionics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Institute of Nano Tech and Nano Bionics of CAS filed Critical Suzhou Institute of Nano Tech and Nano Bionics of CAS
Priority to CN201910940597.0A priority Critical patent/CN110764254A/en
Publication of CN110764254A publication Critical patent/CN110764254A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518Projection by scanning of the object
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

本发明公开了可编译的结构光投影系统,所述可编译的结构光投影系统包括图像编译单元、控制中心、光源、MEMS微镜以及反馈单元等器件。图像编译单元用于根据输入的编译语言对待投影的结构光的图案信息进行编译;控制中心用于控制光源向MEMS微镜发射光线,以MEMS微镜向待测物的表面投射扫描光束,同时根据生成的图案信息控制MEMS微镜进行转动,形成预设的结构光图案;反馈单元用于获取MEMS微镜的转动信息,计算获得扫描光束投射在待测物上的位置信息并反馈至控制中心。由此,系统可以自由地对每一个像素进行编程,可以投射多个不同种类、高分辨率的结构光图案,系统还具有结构简易、功耗低、对光的高利用率以及泛用性强的优点。

Figure 201910940597

The invention discloses a compilable structured light projection system, which comprises an image compiling unit, a control center, a light source, a MEMS micromirror, a feedback unit and other devices. The image compiling unit is used to compile the pattern information of the structured light to be projected according to the input compiling language; the control center is used to control the light source to emit light to the MEMS micromirror, and use the MEMS micromirror to project the scanning beam to the surface of the object to be measured. The generated pattern information controls the MEMS micromirror to rotate to form a preset structured light pattern; the feedback unit is used to obtain the rotation information of the MEMS micromirror, calculate and obtain the position information of the scanning beam projected on the object to be measured, and feed it back to the control center. As a result, the system can freely program each pixel, and can project multiple different types of high-resolution structured light patterns. The system also has the advantages of simple structure, low power consumption, high utilization of light, and strong versatility. The advantages.

Figure 201910940597

Description

可编译的结构光投影系统Compileable Structured Light Projection System

技术领域technical field

本发明涉及结构光的技术领域,尤其是涉及用于物体三维信息的结构光投影系统。The present invention relates to the technical field of structured light, in particular to a structured light projection system for three-dimensional information of an object.

背景技术Background technique

结构光是由点或者线组成的图案,具有特定的特征信息,例如灰度信息、色彩信息、空间位置信息等,通过对这些信息进行解调可以得到物体的三维信息,即为结构光技术,其原理是向待测物体投射经过编码的特定光线即结构光,物体表面轮廓的平整度变化会引发编码的光线发生变形,此时通过三维相机采集编码光线形成的变形图案,再计算出对应的位移量、畸变量等信息,从而计算出物体的深度信息进而实现物体的三维信息获取。结构光技术广泛应用于各种场合,例如人脸识别、工业3D检测等。Structured light is a pattern composed of points or lines with specific characteristic information, such as grayscale information, color information, spatial position information, etc. By demodulating these information, three-dimensional information of an object can be obtained, which is structured light technology. The principle is to project a specific coded light, namely structured light, to the object to be measured. The flatness of the object surface profile will cause the coded light to deform. At this time, the deformation pattern formed by the coded light is collected by a 3D camera, and then the corresponding deformation pattern is calculated. Displacement, distortion and other information, so as to calculate the depth information of the object and realize the acquisition of three-dimensional information of the object. Structured light technology is widely used in various occasions, such as face recognition, industrial 3D detection, etc.

现有技术中,利用结构光技术获取物体的三维信息一般采用以下两种方案:In the prior art, the following two schemes are generally adopted to obtain the three-dimensional information of an object by using the structured light technology:

1、DOE(光学衍射元件)结构光:利用光学衍射元件产生结构光是目前手机中常见的人脸识别方案,其原理是利用VCESL(垂直腔面激光器)和DOE投射出大量点阵分布图案,激光光源发出的光束入射到扩散片上形成散射光,散射光通过准直元件后再入射到光学衍射元件上,激光经过光学衍射元件后会衍射出上万个散斑图案。当散斑图案入射到人脸后,人脸反射回至探测器的图案会携带人脸的三维信息,再经过一定算法就可以得到人脸的信息。其中,散斑图案由专门设计的光学衍射元件决定,为大量点阵分布图案。例如苹果公司手机中的Face ID,投射出30000个点分布的图案。1. DOE (optical diffractive element) structured light: The use of optical diffractive elements to generate structured light is a common face recognition solution in mobile phones. The principle is to use VCESL (vertical cavity surface laser) and DOE to project a large number of lattice distribution patterns. The beam emitted by the laser light source is incident on the diffuser to form scattered light. The scattered light passes through the collimating element and then enters the optical diffraction element. After the laser passes through the optical diffraction element, tens of thousands of speckle patterns are diffracted. When the speckle pattern is incident on the face, the pattern reflected by the face back to the detector will carry the three-dimensional information of the face, and then the information of the face can be obtained through a certain algorithm. Among them, the speckle pattern is determined by a specially designed optical diffraction element, which is a large number of lattice distribution patterns. For example, the Face ID in Apple's mobile phone projects a pattern of 30,000 dots.

2、基于Mask(掩膜)的编码结构光:工作原理为:Vcsel激光器(垂直腔面发射激光器)均匀照射掩膜,由掩膜形成上万个明暗相间的图案,再经过投影镜头投射出去,投射过程需要考虑畸变影响,且功耗较大。2. Encoded structured light based on Mask (mask): The working principle is: Vcsel laser (vertical cavity surface emitting laser) uniformly illuminates the mask, and tens of thousands of light and dark patterns are formed by the mask, and then projected through the projection lens, The projection process needs to consider the influence of distortion, and the power consumption is large.

但是,无论采用上述的何种方案,光学衍射元件和照射掩膜均只能对应特定的一种图案的结构光,如果需要采用其他图案的结构光时,必须通过重新设计所需图案的光学衍射元件/照射掩膜并进行更换,造成了不便,效率较低。However, no matter which of the above solutions is adopted, the optical diffractive element and the irradiation mask can only correspond to a specific pattern of structured light. If other patterns of structured light are required, the optical diffraction of the desired pattern must be redesigned Components/irradiation masks and replacements are inconvenient and less efficient.

发明内容SUMMARY OF THE INVENTION

有鉴于此,为了解决上述问题,本发明采用了如下的技术方案:In view of this, in order to solve the above problems, the present invention adopts the following technical solutions:

一种可编译的结构光投影系统,包括图像编译单元、控制中心、光源、MEMS微镜以及反馈单元,A compliable structured light projection system, comprising an image compiling unit, a control center, a light source, a MEMS micromirror and a feedback unit,

其中,所述图像编译单元用于根据输入的编译语言对待投影的结构光的图案信息进行编译;所述控制中心用于控制所述光源向所述MEMS微镜发射光线,以所述MEMS微镜向待测物的表面投射扫描光束,同时根据生成的图案信息控制所述MEMS微镜进行转动,形成预设的结构光图案;所述反馈单元用于获取所述MEMS微镜的转动信息,计算获得所述扫描光束投射在所述待测物上的位置信息并反馈至所述控制中心。Wherein, the image compiling unit is used for compiling the pattern information of the structured light to be projected according to the input compiling language; the control center is used for controlling the light source to emit light to the MEMS micromirror, so that the MEMS micromirror emits light. Project a scanning beam to the surface of the object to be tested, and control the MEMS micromirror to rotate according to the generated pattern information to form a preset structured light pattern; the feedback unit is used to obtain the rotation information of the MEMS micromirror, calculate The position information of the scanning beam projected on the object to be tested is obtained and fed back to the control center.

优选地,所述结构光图案包括二维矩阵式结构光图案,所述二维矩阵式结构光图案包括多个图案子单元,所述图案信息包括每个所述图案子单元对应的图像灰度、色彩信息和整幅图像的尺寸。Preferably, the structured light pattern includes a two-dimensional matrix structured light pattern, the two-dimensional matrix structured light pattern includes a plurality of pattern subunits, and the pattern information includes an image grayscale corresponding to each of the pattern subunits , color information, and the size of the entire image.

优选地,所述可编译的结构光投影系统包括存储单元,所述存储单元用于存储所述图像编译单元编译的结构光的图案信息,以供所述控制中心调用。Preferably, the compliable structured light projection system includes a storage unit for storing the structured light pattern information compiled by the image compiling unit for the control center to call.

优选地,所述MEMS微镜上设置有角度传感器或光学传感器,所述反馈单元通过所述角度传感器或所述光学传感器获取所述MEMS微镜的转动信息。Preferably, an angle sensor or an optical sensor is provided on the MEMS micromirror, and the feedback unit acquires the rotation information of the MEMS micromirror through the angle sensor or the optical sensor.

优选地,所述结构光投影系统还包括用于光学整形的整形透镜,所述光源发射的光线通过所述整形透镜后射向所述MEMS微镜。Preferably, the structured light projection system further includes a shaping lens for optical shaping, and the light emitted by the light source passes through the shaping lens and then goes toward the MEMS micromirror.

优选地,所述光源为激光器。Preferably, the light source is a laser.

优选地,所述光源为红外激光器或RGB三色光激光器。Preferably, the light source is an infrared laser or an RGB three-color laser.

优选地,所述结构光投影系统还包括反射镜,所述光源发射的光线通过所述整形透镜后经过所述反射镜的反射再射向所述MEMS微镜。Preferably, the structured light projection system further includes a reflector, and the light emitted by the light source passes through the shaping lens and is reflected by the reflector before being directed toward the MEMS micromirror.

本发明提供的可编译的结构光投影系统,基于MEMS微镜,通过图像编译单元对结构光图案进行编程,以控制中心根据图案信息控制光源及MEMS微镜实现指定结构光图案的投射,其自由度极高,相比于现有技术无需更换特定器件即可投射不同种类的高分辨率结构光图案,提高了工作效率,并且其有着降低结构复杂度、对光的高利用率以及功耗较低的优势。The compilable structured light projection system provided by the present invention is based on the MEMS micromirror, and the structured light pattern is programmed through the image compiling unit, and the control center controls the light source and the MEMS micromirror according to the pattern information to realize the projection of the specified structured light pattern. Compared with the existing technology, different types of high-resolution structured light patterns can be projected without replacing specific devices, which improves the work efficiency, and has the advantages of reducing structural complexity, high utilization of light and relatively low power consumption. low advantage.

附图说明Description of drawings

图1是本发明提供的可编译的结构光投影系统的结构示意图;1 is a schematic structural diagram of a compilable structured light projection system provided by the present invention;

图2是所述可编译的结构光投影系统的使用流程实例图。FIG. 2 is an example diagram of a usage flow of the compliable structured light projection system.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚,下面结合附图对本发明的具体实施方式进行详细说明。这些优选实施方式的示例在附图中进行了例示。附图中所示和根据附图描述的本发明的实施方式仅仅是示例性的,并且本发明并不限于这些实施方式。In order to make the objectives, technical solutions and advantages of the present invention clearer, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the invention shown in the drawings and described with reference to the drawings are merely exemplary and the invention is not limited to these embodiments.

在此,还需要说明的是,为了避免因不必要的细节而模糊了本发明,在附图中仅仅示出了与根据本发明的方案密切相关的结构和/或处理步骤,而省略了关系不大的其他细节。Here, it should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only the structures and/or processing steps closely related to the solution according to the present invention are shown in the drawings, and the relationship is omitted. Not much other details.

参阅图1所示,本发明实施例提供了一种可编译的结构光投影系统,所述可编译的结构光投影系统包括图像编译单元1、控制中心2、光源3、MEMS(Micro-Electro-MechanicalSystem,微机电系统)微镜4以及反馈单元5。Referring to FIG. 1 , an embodiment of the present invention provides a compliable structured light projection system. The compliable structured light projection system includes an image compiling unit 1 , a control center 2 , a light source 3 , a MEMS (Micro-Electro- Mechanical System, micro-electromechanical system) micro mirror 4 and feedback unit 5.

其中,结合图2所示,所述图像编译单元1用于根据输入的编译语言对待投影的结构光的图案信息进行编译;所述控制中心2用于控制所述光源3向所述MEMS微镜4发射光线,以所述MEMS微镜4向待测物的表面投射扫描光束,同时根据生成的图案信息控制所述MEMS微镜4进行转动,形成预设的结构光图案;所述反馈单元5用于获取所述MEMS微镜4的转动信息,计算获得所述扫描光束投射在所述待测物上的位置信息并反馈至所述控制中心2。Wherein, as shown in FIG. 2 , the image compiling unit 1 is used to compile the pattern information of the structured light to be projected according to the input compiling language; the control center 2 is used to control the light source 3 to the MEMS micromirror 4. Emit light, project a scanning beam to the surface of the object to be measured with the MEMS micromirror 4, and control the MEMS micromirror 4 to rotate according to the generated pattern information to form a preset structured light pattern; the feedback unit 5 It is used to obtain the rotation information of the MEMS micromirror 4 , calculate and obtain the position information of the scanning beam projected on the object to be measured, and feed it back to the control center 2 .

本发明提供的可编译的结构光投影系统,利用了图像编译单元1实现了对结构光图案进行编译,由此,控制中心2能够根据图案信息控制光源基于MEMS微镜4向待测物的表面投射扫描光束以形成所需的结构光图案,用户能够根据需要自由地选择结构光图案,投射的结构光图案的分辨率高,该可编译的结构光投影系统能够投射多种结构光图案,比如同时投射点结构光和线结构光,适用于多种应用场景,泛用性强。特别是,相比于现有技术中的光学衍射元件结构光方案和基于掩膜的编码结构光方案,无需更换或者重新设计特定的器件,更为便捷,有利于提高工作效率。而且,光学衍射元件结构光方案中器件性能会受温度影响,且光学衍射元件会产生0级亮斑,其系统内部需要额外添加光源元件来消除0级亮斑,增加了系统的复杂性,光效率低;而基于掩膜的编码结构光方案主要用于提高三维恢复速度,其无法适用于高精度的三维恢复,本发明提供的可编译的结构光投影系统能够规避这些问题。The compilable structured light projection system provided by the present invention utilizes the image compiling unit 1 to realize the compiling of the structured light pattern, whereby the control center 2 can control the light source based on the MEMS micromirror 4 to the surface of the object to be measured according to the pattern information Project the scanning beam to form the desired structured light pattern, the user can freely select the structured light pattern according to the needs, the projected structured light pattern has high resolution, the compliable structured light projection system can project a variety of structured light patterns, such as At the same time, it projects point structured light and line structured light, which is suitable for a variety of application scenarios and has strong versatility. In particular, compared with the optical diffraction element structured light scheme and the mask-based coded structured light scheme in the prior art, there is no need to replace or redesign specific devices, which is more convenient and helps to improve work efficiency. Moreover, in the optical diffraction element structured light scheme, the device performance will be affected by temperature, and the optical diffraction element will produce 0-order bright spots. Additional light source elements need to be added inside the system to eliminate the 0-order bright spots, which increases the complexity of the system. The efficiency is low; while the mask-based coded structured light scheme is mainly used to improve the 3D restoration speed, which cannot be applied to high-precision 3D restoration. The compliable structured light projection system provided by the present invention can avoid these problems.

上述可编译的结构光投影系统因为具备自由编程的特点,能够逐一对结构光图案上的每一个像素点进行灰度矫正和幅值改变,比如对于所述结构光图案包括的散斑结构光、编码结构光等二维矩阵式结构光图案,所述二维矩阵式结构光图案包括多个图案子单元,所述图案信息包括每个所述图案子单元对应的图像灰度、色彩信息和整幅图像的尺寸,所述图像编译单元1提供配套操作系统上的软件编译窗口,用户可以利用简易的编程语言对每一个图案子单元进行编译,设定每个图案子单元对应的图像灰度(例如0~255)和色彩信息,由此使得所述可编译的结构光投影系统的自由度极高,可以减少甚至避免因为待测物表面的反射或者采集结构光图像的三维相机等外在因素造成后期获得的三维信息以及进行三维恢复的图像存在光强不均匀的问题发生。Because the above-mentioned compliable structured light projection system has the characteristics of free programming, it can perform grayscale correction and amplitude change on each pixel on the structured light pattern one by one, for example, for the speckle structured light, A two-dimensional matrix structured light pattern such as coded structured light, the two-dimensional matrix structured light pattern includes a plurality of pattern subunits, and the pattern information includes image grayscale, color information and integer information corresponding to each of the pattern subunits. The size of an image, the image compiling unit 1 provides a software compiling window on the supporting operating system, the user can use a simple programming language to compile each pattern subunit, and set the image grayscale ( For example, 0 to 255) and color information, so that the compliable structured light projection system has a very high degree of freedom, which can reduce or even avoid external factors such as reflection on the surface of the object to be measured or a 3D camera that collects structured light images. This causes the problem of uneven light intensity in the 3D information obtained later and the image for 3D restoration.

具体地,结合图2所示,所述待测物的表面上形成的图像通过被三维相机采集并经过数据处理后生成待测物的三维信息,所以,假若通过所述三维相机采集的图像发现存在光强不均匀分布等问题,配合上述图像编译单元1能对每一个图案子单元进行编译的特点,使用所述可编译的结构光投影系统时,可以对光强变化区域进行矫正,例如根据需要矫正的程度对图像上每个像素对应的图案信息附加修正因子,对应地调节光源如激光器的驱动电流,使得光强分布均匀。当然,也可以通过设计程序使控制中心2可以自动根据反馈单元5反馈的信息进行调节。此外,由于在扫描图像左右两侧时MEMS微镜4运动较慢,所述扫描光束在两侧所停留时间较长,对这两侧区域光强进行修正时,可以通过添加或减少该处的激光驱动时间。当通过增加驱动时间,由于三维相机的积分效应,能够提高图像亮度。Specifically, as shown in FIG. 2 , the image formed on the surface of the object to be measured is collected by the three-dimensional camera and processed to generate the three-dimensional information of the object to be measured. There are problems such as uneven distribution of light intensity. With the feature that the above-mentioned image compiling unit 1 can compile each pattern sub-unit, when using the compliable structured light projection system, the light intensity variation area can be corrected, for example, according to The degree of correction that needs to be corrected adds a correction factor to the pattern information corresponding to each pixel on the image, and adjusts the driving current of a light source such as a laser accordingly to make the light intensity distribution uniform. Of course, the control center 2 can also automatically adjust according to the information fed back by the feedback unit 5 by designing a program. In addition, since the MEMS micromirror 4 moves slowly when scanning the left and right sides of the image, the scanning beam stays on the two sides for a long time. When correcting the light intensity of the two sides, it is possible to add or reduce the light intensity there. Laser drive time. When the driving time is increased, the image brightness can be improved due to the integral effect of the 3D camera.

进一步地,如图2所示,所述可编译的结构光投影系统包括存储单元6,所述存储单元6用于存储所述图像编译单元1编译的结构光的图案信息,以供所述控制中心2调用。所述可编译的结构光投影系统利用所述存储单元6能够对每个编译完成的结构光图案进行存储,用户通过操作系统软件对编译完成的结构光图案命名后存储到系统中,后续可以随意调用储存的结构光图案,例如,部分结构光技术需要多幅结构光图案组合投射才能获得物体三维信息,此时可以从所述存储单元6中调用编译好的多个结构光图案,设置好对应不同结构光图案之间投射的时间间隔和顺序,即可完成这类三维信息获取任务。Further, as shown in FIG. 2 , the compliable structured light projection system includes a storage unit 6 for storing the pattern information of the structured light compiled by the image compiling unit 1 for the control Center 2 calls. The compilable structured light projection system can use the storage unit 6 to store each compiled structured light pattern, and the user names the compiled structured light pattern through the operating system software and stores it in the system, which can be freely followed later. Call the stored structured light pattern. For example, some structured light technologies require the combined projection of multiple structured light patterns to obtain the three-dimensional information of the object. At this time, multiple compiled structured light patterns can be called from the storage unit 6, and the corresponding The time interval and sequence of projections between different structured light patterns can complete such three-dimensional information acquisition tasks.

MEMS微镜4可以沿着相互垂直的两个方向转动,分别为:一、沿横向以较快转动速度转动,该轴向定义为为快轴,二、沿纵向以相对较慢的转动速度转动,该轴向定义为慢轴,在所述控制中心2的控制下,所述MEMS微镜4分别在快轴和慢轴上的转动,使扫描光经过MEMS微镜4反射后在远场扫描形成光栅形状或利萨如形状等结构光图案。所以,在本实施例中,所述MEMS微镜4上设置有角度传感器或光学传感器,一般地,所述角度传感器集成于MEMS微镜中,也可以利用在系统外部嵌入所述光学传感器来取代集成的所述角度传感器,所述反馈单元5可以通过所述角度传感器或所述光学传感器实时地获取所述MEMS微镜4的转动信息,具体包括所述MEMS微镜4转动的角度,而由于所述MEMS微镜4沿快轴转动为谐振,其反馈信号为正弦信号,反馈单元5对反馈信号进行处理可以得到光斑扫描所在横向位置。同样也可以根据慢轴的反馈信号得到光斑扫描所在纵向位置;当慢轴为受迫驱动时,其光斑位置信息则由驱动信号决定,由此能通过获得所述扫描光束投射在所述待测物上的位置信息并反馈至所述控制中心2。The MEMS micromirror 4 can rotate in two mutually perpendicular directions, namely: 1. Rotate at a relatively fast rotational speed in the lateral direction, which is defined as the fast axis, and 2. Rotate at a relatively slow rotational speed in the longitudinal direction. , the axis is defined as the slow axis. Under the control of the control center 2, the MEMS micromirror 4 rotates on the fast axis and the slow axis respectively, so that the scanning light is reflected by the MEMS micromirror 4 and then scanned in the far field. Forms structured light patterns such as grating shapes or Lissajous shapes. Therefore, in this embodiment, the MEMS micromirror 4 is provided with an angle sensor or an optical sensor. Generally, the angle sensor is integrated in the MEMS micromirror, and the optical sensor can also be embedded outside the system instead of The integrated angle sensor, the feedback unit 5 can acquire the rotation information of the MEMS micromirror 4 in real time through the angle sensor or the optical sensor, specifically including the rotation angle of the MEMS micromirror 4, and due to The MEMS micromirror 4 rotates along the fast axis to resonate, and its feedback signal is a sinusoidal signal. The feedback unit 5 can process the feedback signal to obtain the lateral position of the spot scanning. Similarly, the longitudinal position of the spot scanning can also be obtained according to the feedback signal of the slow axis; when the slow axis is forced to drive, its spot position information is determined by the driving signal, so that the scanning beam can be projected on the to-be-measured by obtaining the scanning beam. The position information on the object is fed back to the control center 2 .

进一步地,所述结构光投影系统还包括用于光学整形的整形透镜7,所述光源发射的光线通过所述整形透镜7后射向所述MEMS微镜4。所述整形透镜7能将光束整形为所需要光斑大小及对应发散角。示例性地,所述光源3为激光器,进一步地,所述光源3可选用红外激光器或RGB三色光激光器。所述光源3的种类具体可根据实际需求进行选择。激光器发出的激光可以经过上述整形透镜7被准直为口径较小且发散角也较小的光束,例如单模激光器发出的激光准直为1mm直径后,其发散角小于1mrad,在1米范围内光斑大小保持不变。采用激光器作为光源3还有利于测量表面深度变化较大的物体以及测量不同距离范围内的物体。Further, the structured light projection system further includes a shaping lens 7 for optical shaping, and the light emitted by the light source passes through the shaping lens 7 and then goes towards the MEMS micromirror 4 . The shaping lens 7 can shape the light beam into the required spot size and corresponding divergence angle. Exemplarily, the light source 3 is a laser. Further, the light source 3 can be an infrared laser or an RGB three-color laser. The type of the light source 3 can be specifically selected according to actual needs. The laser light emitted by the laser can be collimated into a beam with a smaller diameter and a smaller divergence angle through the above-mentioned shaping lens 7. For example, after the laser emitted by a single-mode laser is collimated to a diameter of 1mm, its divergence angle is less than 1mrad, which is within the range of 1m. The inner spot size remains unchanged. Using a laser as the light source 3 is also beneficial for measuring objects whose surface depth varies greatly and objects in different distance ranges.

示例性地,所述可编译的结构光投影系统中的激光器驱动芯片可选用能对激光器高频调制的器件,例如ISL58315高速激光二极管驱动器,其灰度等级可以从0到1023。而对于类似散斑的结构光图案,其图像只需要以亮暗区分,可以使用类似三极管、MOS管等高频开关器件对激光器进行驱动,有利于在满足需求的前提下尽可能降低系统成本和功耗。Exemplarily, the laser driver chip in the compliable structured light projection system can select a device capable of high-frequency modulation of the laser, such as an ISL58315 high-speed laser diode driver, whose gray level can be from 0 to 1023. For a speckle-like structured light pattern, the image only needs to be distinguished by light and dark, and high-frequency switching devices such as triodes and MOS tubes can be used to drive the laser, which is conducive to reducing the system cost as much as possible while meeting the requirements. power consumption.

另外,为了测试不同位置的物体三维信息,为了保证结构光图案能完好照射到物体,基于上述可编译的结构光投影系统,可以通过对最大扫描角进行归一化处理,用户根据实际应用情况自行进行换算,重新调整图案扫描角度,匹配合适的结构光图案尺寸。In addition, in order to test the three-dimensional information of objects at different positions, in order to ensure that the structured light pattern can perfectly illuminate the object, based on the above-mentioned compliable structured light projection system, the maximum scan angle can be normalized, and the user can customize it according to the actual application. Perform conversion, readjust the pattern scanning angle, and match the appropriate structured light pattern size.

进一步地,所述结构光投影系统还包括反射镜8,所述光源3发射的光线通过所述准直透镜7后经过所述反射镜8的反射再射向所述MEMS微镜4。可以利用所述反射镜8用于调节光路,方便设置所述系统内部各部件的空间分布。Further, the structured light projection system further includes a reflector 8 , and the light emitted by the light source 3 passes through the collimating lens 7 and is reflected by the reflector 8 before being emitted to the MEMS micromirror 4 . The reflector 8 can be used to adjust the optical path, so as to conveniently set the spatial distribution of each component inside the system.

综上所述,本发明实施例提供的可编译的结构光投影系统,基于MEMS微镜4搭建可编译的结构光投影系统,能够实现对结构光图案中的每一个像素自由地编程,方便进行不同种类的、高分辨率的多结构光图案参与的三维信息获取及重建工作,相比于现有技术的常规方案,系统更为简易,功耗较低,对光的利用率高,泛用性较强。To sum up, the compliable structured light projection system provided by the embodiments of the present invention builds a compliable structured light projection system based on the MEMS micromirror 4, which can realize free programming of each pixel in the structured light pattern, which is convenient for Compared with the conventional scheme of the prior art, the system is simpler, the power consumption is lower, the utilization rate of light is high, and the system is widely used. Strong sex.

需要说明的是,在本文中,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。It should be noted that, herein, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements, It also includes other elements not expressly listed or inherent to such a process, method, article or apparatus. Without further limitation, an element qualified by the phrase "comprising a..." does not preclude the presence of additional identical elements in a process, method, article or apparatus that includes the element.

以上所述仅是本申请的具体实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。The above are only specific embodiments of the present application. It should be pointed out that for those skilled in the art, without departing from the principles of the present application, several improvements and modifications can also be made. It should be regarded as the protection scope of this application.

Claims (8)

1.一种可编译的结构光投影系统,其特征在于,包括图像编译单元、控制中心、光源、MEMS微镜以及反馈单元,1. a compileable structured light projection system, is characterized in that, comprises image compilation unit, control center, light source, MEMS micromirror and feedback unit, 其中,所述图像编译单元用于根据输入的编译语言对待投影的结构光的图案信息进行编译;Wherein, the image compiling unit is configured to compile the pattern information of the structured light to be projected according to the input compiling language; 所述控制中心用于控制所述光源向所述MEMS微镜发射光线,以所述MEMS微镜向待测物的表面投射扫描光束,同时根据生成的图案信息控制所述MEMS微镜进行转动,形成预设的结构光图案;The control center is used to control the light source to emit light to the MEMS micromirror, project a scanning beam to the surface of the object to be measured by the MEMS micromirror, and control the MEMS micromirror to rotate according to the generated pattern information, forming a preset structured light pattern; 所述反馈单元用于获取所述MEMS微镜的转动信息,计算获得所述扫描光束投射在所述待测物上的位置信息并反馈至所述控制中心。The feedback unit is used to obtain the rotation information of the MEMS micromirror, calculate and obtain the position information of the scanning beam projected on the object to be measured, and feed it back to the control center. 2.根据权利要求1所述的可编译的结构光投影系统,其特征在于,所述结构光图案包括二维矩阵式结构光图案,所述二维矩阵式结构光图案包括多个图案子单元,所述图案信息包括每个所述图案子单元对应的图像灰度、色彩信息和整幅图像的尺寸。2 . The compliable structured light projection system according to claim 1 , wherein the structured light pattern comprises a two-dimensional matrix structured light pattern, and the two-dimensional matrix structured light pattern comprises a plurality of pattern subunits. 3 . , the pattern information includes image grayscale, color information and the size of the entire image corresponding to each of the pattern subunits. 3.根据权利要求1所述的可编译的结构光投影系统,其特征在于,所述可编译的结构光投影系统包括存储单元,所述存储单元用于存储所述图像编译单元编译的结构光的图案信息,以供所述控制中心调用。3 . The compliable structured light projection system according to claim 1 , wherein the compliable structured light projection system comprises a storage unit for storing the structured light compiled by the image compiling unit. 4 . pattern information for the control center to call. 4.根据权利要求1所述的可编译的结构光投影系统,其特征在于,所述MEMS微镜上设置有角度传感器或光学传感器,所述反馈单元通过所述角度传感器或所述光学传感器获取所述MEMS微镜的转动信息。4 . The compliable structured light projection system according to claim 1 , wherein an angle sensor or an optical sensor is provided on the MEMS micromirror, and the feedback unit is obtained by the angle sensor or the optical sensor. 5 . Rotation information of the MEMS micromirror. 5.根据权利要求1所述的可编译的结构光投影系统,其特征在于,所述结构光投影系统还包括用于光学整形的整形透镜,所述光源发射的光线通过所述整形透镜后射向所述MEMS微镜。5 . The compliable structured light projection system according to claim 1 , wherein the structured light projection system further comprises a shaping lens for optical shaping, and the light emitted by the light source passes through the shaping lens and is emitted backward. 6 . to the MEMS micromirror. 6.根据权利要求1所述的可编译的结构光投影系统,其特征在于,所述光源为激光器。6. The compliable structured light projection system according to claim 1, wherein the light source is a laser. 7.根据权利要求6所述的可编译的结构光投影系统,其特征在于,所述光源为红外激光器或RGB三色光激光器。7 . The compliable structured light projection system according to claim 6 , wherein the light source is an infrared laser or an RGB three-color light laser. 8 . 8.根据权利要求5所述的可编译的结构光投影系统,其特征在于,所述结构光投影系统还包括反射镜,所述光源发射的光线通过所述整形透镜后经过所述反射镜的反射再射向所述MEMS微镜。8 . The composable structured light projection system according to claim 5 , wherein the structured light projection system further comprises a reflection mirror, and the light emitted by the light source passes through the shaping lens and then passes through the reflection mirror. 9 . The reflection is then directed towards the MEMS micromirror.
CN201910940597.0A 2019-09-30 2019-09-30 Compileable Structured Light Projection System Pending CN110764254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910940597.0A CN110764254A (en) 2019-09-30 2019-09-30 Compileable Structured Light Projection System

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910940597.0A CN110764254A (en) 2019-09-30 2019-09-30 Compileable Structured Light Projection System

Publications (1)

Publication Number Publication Date
CN110764254A true CN110764254A (en) 2020-02-07

Family

ID=69330320

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910940597.0A Pending CN110764254A (en) 2019-09-30 2019-09-30 Compileable Structured Light Projection System

Country Status (1)

Country Link
CN (1) CN110764254A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111486791A (en) * 2020-05-27 2020-08-04 中科融合感知智能研究院(苏州工业园区)有限公司 Device for adaptively adjusting light quality of sine stripe structure and operation method
CN112729164A (en) * 2020-12-21 2021-04-30 革点科技(深圳)有限公司 Self-adaptive lattice structure light projection method based on MEMS

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100188400A1 (en) * 2009-01-23 2010-07-29 National Taipei University Of Technology Method for simultaneous hue phase-shifting and system for 3-d surface profilometry using the same
CN104884995A (en) * 2012-12-26 2015-09-02 西铁城控股株式会社 Projection device
US20150268731A1 (en) * 2014-03-21 2015-09-24 Dell Products L.P. Interactive Projected Information Handling System Support Input and Output Devices
CN106052592A (en) * 2016-06-28 2016-10-26 西安励德微系统科技有限公司 Scanning type structured light projection system and control method thereof
CN107193123A (en) * 2017-05-25 2017-09-22 西安知象光电科技有限公司 A kind of closed loop modulator approach of adaptive line-structured light
CN108490420A (en) * 2018-06-12 2018-09-04 深圳市镭神智能系统有限公司 A kind of micro mirror scanning optics

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100188400A1 (en) * 2009-01-23 2010-07-29 National Taipei University Of Technology Method for simultaneous hue phase-shifting and system for 3-d surface profilometry using the same
CN104884995A (en) * 2012-12-26 2015-09-02 西铁城控股株式会社 Projection device
US20150268731A1 (en) * 2014-03-21 2015-09-24 Dell Products L.P. Interactive Projected Information Handling System Support Input and Output Devices
CN106052592A (en) * 2016-06-28 2016-10-26 西安励德微系统科技有限公司 Scanning type structured light projection system and control method thereof
CN107193123A (en) * 2017-05-25 2017-09-22 西安知象光电科技有限公司 A kind of closed loop modulator approach of adaptive line-structured light
CN108490420A (en) * 2018-06-12 2018-09-04 深圳市镭神智能系统有限公司 A kind of micro mirror scanning optics

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111486791A (en) * 2020-05-27 2020-08-04 中科融合感知智能研究院(苏州工业园区)有限公司 Device for adaptively adjusting light quality of sine stripe structure and operation method
CN112729164A (en) * 2020-12-21 2021-04-30 革点科技(深圳)有限公司 Self-adaptive lattice structure light projection method based on MEMS

Similar Documents

Publication Publication Date Title
US20210297651A1 (en) Three dimensional depth mapping using dynamic structured light
JP5693001B2 (en) Measurement system, image correction method, and computer program
CN100454147C (en) Pattern writing apparatus and block number determining method
JP6516453B2 (en) Image measuring device and measuring device
US10094656B2 (en) Chromatic confocal sensor and measurement method
US20120218464A1 (en) Method and system for structured light 3D camera
KR20150030246A (en) Efficient spatially modulated illumination system
JP6461609B2 (en) Interference objective lens and optical interference measurement apparatus
CN102227679A (en) Speckle mitigation in laser scanner projector systems
CN110764254A (en) Compileable Structured Light Projection System
CN111174702A (en) Adaptive structured light projection module and measurement method
US20210131798A1 (en) Structured light projection optical system for obtaining 3d data of object surface
CN107031035A (en) Three-dimensional object forming system and correction method thereof
US10495955B2 (en) Method and apparatus for controlling projector
JP4942301B2 (en) Direct exposure apparatus and direct exposure method
JP2014106094A (en) Shape measurement device
JP2016164557A (en) Surface shape measurement device and surface shape measurement method
CN102751657B (en) Laser source system based on accurate and adjustable digital microlens device light intensity
JP2011002416A (en) Three-dimensional shape measuring device
JP2010134375A (en) Drawing apparatus and drawing method
CN108240800B (en) Surface topography measuring method
CN110073269A (en) For exposing the device and method of photosensitive layer
KR101747172B1 (en) 3D scan image generation device and method
TWI719387B (en) Projector, electronic device having projector, and method for obtaining depth information of image data
US20140111619A1 (en) Device and method for acquiring image

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20200207