CN1107635A - Special power supply for plasma producer - Google Patents
Special power supply for plasma producer Download PDFInfo
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- CN1107635A CN1107635A CN 94102039 CN94102039A CN1107635A CN 1107635 A CN1107635 A CN 1107635A CN 94102039 CN94102039 CN 94102039 CN 94102039 A CN94102039 A CN 94102039A CN 1107635 A CN1107635 A CN 1107635A
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- power supply
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Abstract
The power supply specially for plasma producer is composed of high-frequency transformer, rectifier, inverter and controller circuits. The primary windings of rectifier, inverter and transformer are in turn connected and the secondary winding of transformer is connected to pulse outputs, across which an inductor generating pulse magnetic field is connected. Controller can control waveform in inverter circuit. A current feedback circuit is between controller, outputs and input of inductor.
Description
The present invention is a kind of power supply that is exclusively used in plasma generator, and it is suitable for the plasma chemistry heat treatment industry.
The form that plasma exists as a kind of material has obtained using widely in the world today.Yet, for the power source special of its service is not but slowly seen generation.With " multi-arc ion plating film " technology is example, and a kind of crucial power supply of this arts demand is used for producing a large amount of plasmas, so claim that also this power supply is a plasma accelerator, is called for short " PA ".Owing to still there is not this power source special at present, therefore generally all be to adopt electric welding machine to replace " PA ".This just certainly will bring some problems: electric welding machine is to be used for normal atmospheric to depress arcing, utilizes the heat weld metal of arc; And " PA " work under the vacuum state, produces a large amount of plasma vapours with the form of arcing, and this plasma steam in another power supply (generally claiming grid bias power supply) effect down and the new compound of other gas composition, deposits to surface of the work again.Two kinds of power work environment difference are very big, and are also different to power requirement, can only be the acts in a period of time so replace " PA " with electric welding machine simply.In addition, the metal vapors of universal electric welder power supply burning ejection, its particle is too thick, directly influences the quality of plated film.
In theory, " PA " can dissolve all substances on the earth.These material performances vary, and are very inconsistent.With regard to metal material, what stand in the breach is molten some problem, various metals, and it is low that molten point has height to have, and differs greatly.In general, the easy starting the arc of metal that molten point is high, and low metal one starting the arc of molten point just forms large-area molten hole on the end face of target, even dissolve drippage, be difficult to work.Therefore, start with, change, optimize the concrete physical process of arcing from power supply, the fining metal particle, extremely meaningful to improving coating quality.
The objective of the invention is in order to solve in the above-mentioned background burning of existing target surface inhomogeneous, the metal vapors particle of burning ejection is too thick, thereby directly influence the problem of coating quality, and a kind of power supply that is exclusively used in plasma generator is proposed, its burning is interrupted with higher frequency, and can control the spots moving track, and making the evenly burning on target surface of arc spot with changeable direction and speed, it is also applicable to the low target of molten point.
The present invention produces on " multifunctional biasing power supply " basis of (application number 92100425.7, the applying date 920129).
For achieving the above object, the present invention adopts the line voltage of being made up of high frequency transformer, rectification circuit, inverter circuit, control circuit that utilizes to produce the design of pulse voltage and pulsed magnetic field output.Wherein, the elementary winding of described high frequency transformer links to each other with the output of inverter circuit, the input of inverter circuit links to each other with the output of rectification circuit, the input of rectification circuit links to each other with electrical network, the output of control circuit links to each other with the ground level of switching tube in the inverter circuit respectively, and the secondary winding of high frequency transformer links to each other with pulse output end N, the P of this power supply.Feature of the present invention is: cross-over connection has inductance L between output N, P
2, inductance L
2Produce pulsed magnetic field, be connected to current feedback circuit between control circuit and high frequency transformer secondary winding current sampling end A, described high frequency transformer is a step-down transformer.
When the present invention worked, rectification circuit obtained the direct current of about 500V with the direct rectification of line voltage, and inverter circuit obtains about 20KH with this dc inverter
zHigh-frequency alternating current, again through the high frequency transformer step-down, the alternating current after the step-down forms DC pulse after rectification, exports to the arc target between pulsed magnetic field and pulse output end N, P again after suitable filtering.
Can be in order to ensure the arc target in smooth combustion under the vacuum state; the present invention is designed to the constant-current type power supply; utilize current feedback circuit that the current signal of pulsed magnetic field and pulse output end N, P is fed back to control circuit, duty of ratio during control circuit control inversion reaches the purpose of constant current.
In sum, the present invention has the following advantages and effect.
1. a shared power supply is exported in pulsed magnetic field and pulse, both keep a kind of synchronous output, like this, the arc spot is when burning, magnetic field hauls the arc spot with changeable direction and speed motion with wet human relations magnetic force, and on target surface, burn, have the fining metal particle, help controlling the combustion erosion process and the state of target surface.
2. pulse output waveform of the present invention is multiple waveform, even can be random waveform, and these characteristics can be strengthened the effect in the advantage 1, also helps to make the present invention to be applicable to the target of LMP.At the target of LMP, can select average power low, but the not low output waveform of instantaneous power.
3. employing inversion transformation technique, duty of ratio when regulating inversion can Control current.The frequency of first-harmonic is constant during simultaneously, owing to inversion (is about 20KH
z), only the low frequency wave of control circuit generation so key parameter of the present invention can both be fixed, makes that design work is easy to finish, and also can reduce cost.
Following with reference to the description of drawings embodiments of the invention.
Accompanying drawing is the circuit that the present invention does DC pulse output.
In the accompanying drawings, rectification circuit is by diode D
1D
2D
3D
4D
5D
6The rectifier bridge of forming constitutes, and the direct voltage of its output is about 500V.Behind rectification circuit, connect a capacitor C
1, capacitor C
1Strobe.Filtered direct current input inverter circuit, inverter circuit is by capacitor C
2, C
3, diode D
7, D
8, switch transistor T
1, T
2The semi-bridge inversion of forming, switch transistor T
1, T
2Output with control circuit links respectively, and the output of inverter circuit links to each other with the elementary winding of high frequency transformer, and the fundamental frequency that inverter circuit produces is about 20KH
z, on this first-harmonic, control circuit is exported one again and is lower than 20KH
zThe low frequency waveform, be superimposed on the first-harmonic, first-harmonic is modulated, because waveform, frequency, the duty specific energy of this low frequency wave in very large range adjust, so the output waveform of inverter circuit can be arbitrarily.The multiple parameter control of low frequency wave can realize by special control circuit, also can realize by the establishment of computer by software.
High frequency transformer is the transformer of a step-down, and its elementary winding links to each other with the output of inverter circuit, and secondary winding has centre cap, and centre cap links to each other with pulse output end P, and secondary winding two ends in addition passes through diode D respectively
9, D
10Rectification, inductance L
1Link to each other with pulse output end N after the filtering, cross-over connection has an inductance L between the output N of arteries and veins portion, P
2, inductance L
2Produce pulsed magnetic field, in control circuit and inductance L
1Be not connected to current negative feedback circuit between the end.
The parameter of this power supply:
Output voltage 0-70 is adjustable
Output current 0-100A is adjustable
As a plurality of pulse outputs of need and pulsed magnetic field, can be in parallel behind high frequency transformer.
The way of output of the present invention can be flexible and changeable, can be the pulse output of random waveform, sees circuit shown in the accompanying drawing, also can remove the diode D of rectifying part
9, D
10Inductance L with the filtering part
1, Secondary winding of transformer is directly linked with output N, P, obtain to exchange and export.
Claims (1)
1, a kind of power supply that is exclusively used in plasma generator, comprise high frequency transformer, rectification circuit, inverter circuit and control circuit, wherein, the elementary winding of high frequency transformer links to each other with the output of inverter circuit, the input of inverter circuit links to each other with the output of rectification circuit, the input of rectification circuit links to each other with electrical network, the output of control circuit links to each other with the ground level of switching tube in the inverter circuit respectively, pulse output end (the N of the secondary winding of high frequency transformer and this power supply, P) link to each other, the invention is characterized in: cross-over connection has the inductance L that produces pulsed magnetic field between pulse output end N and P
2, between control circuit and high frequency change device secondary winding current sampling end A, being connected to current feedback circuit, described high frequency transformer is a step-down transformer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94102039 CN1107635A (en) | 1994-02-23 | 1994-02-23 | Special power supply for plasma producer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94102039 CN1107635A (en) | 1994-02-23 | 1994-02-23 | Special power supply for plasma producer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1107635A true CN1107635A (en) | 1995-08-30 |
Family
ID=5030481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94102039 Pending CN1107635A (en) | 1994-02-23 | 1994-02-23 | Special power supply for plasma producer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1107635A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106287811A (en) * | 2016-08-31 | 2017-01-04 | 福建省鸿山热电有限责任公司 | The method that two generating set plasma ignition systems share a set of electrical source of power |
-
1994
- 1994-02-23 CN CN 94102039 patent/CN1107635A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106287811A (en) * | 2016-08-31 | 2017-01-04 | 福建省鸿山热电有限责任公司 | The method that two generating set plasma ignition systems share a set of electrical source of power |
| CN106287811B (en) * | 2016-08-31 | 2019-08-30 | 福建省鸿山热电有限责任公司 | The method that two generating set plasma ignition systems share a set of electrical source of power |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |