CN110757666A - Cutting fluid cooling circulation device - Google Patents
Cutting fluid cooling circulation device Download PDFInfo
- Publication number
- CN110757666A CN110757666A CN201911110185.0A CN201911110185A CN110757666A CN 110757666 A CN110757666 A CN 110757666A CN 201911110185 A CN201911110185 A CN 201911110185A CN 110757666 A CN110757666 A CN 110757666A
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- cutting fluid
- fluid
- cooling
- filtering
- dicing saw
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- 239000002173 cutting fluid Substances 0.000 title claims abstract description 131
- 238000001816 cooling Methods 0.000 title claims abstract description 116
- 238000001914 filtration Methods 0.000 claims abstract description 91
- 239000012530 fluid Substances 0.000 claims abstract description 48
- 230000000694 effects Effects 0.000 claims abstract description 14
- 239000012535 impurity Substances 0.000 claims abstract description 12
- 239000007788 liquid Substances 0.000 claims description 72
- 238000005520 cutting process Methods 0.000 claims description 28
- 238000003825 pressing Methods 0.000 claims description 21
- 229920000742 Cotton Polymers 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000003507 refrigerant Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 2
- 238000013461 design Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005574 cross-species transmission Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition
- B01D29/56—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection
- B01D29/58—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection arranged concentrically or coaxially
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention discloses a cutting fluid cooling circulation device, wherein a fluid outlet communicated with a fluid inlet of a dicing saw is arranged in a box body, the box body is respectively provided with a filtering area, a cooling area and a pressurizing supply area which are sequentially communicated, the filtering area is communicated with a fluid receiving port and is used for receiving cutting fluid discharged from a fluid outlet of the dicing saw, and meanwhile, the cutting fluid is filtered to separate impurities to obtain filtered cutting fluid; cooling the filtered cutting fluid by the cooling zone to obtain cooling circulating cutting fluid; when the dicing saw works, the pressurizing supply area conveys the cooling circulating cutting fluid to the fluid outlet through the pressurizing effect, and supplies the cooling circulating cutting fluid to the fluid inlet of the dicing saw through the fluid outlet to complete the cooling circulation of the cutting fluid of the dicing saw; according to the invention, through the simple structural design capable of being conveniently operated, high-quality circulating cutting fluid supply is realized, the cooling effect on the cutting fluid is good, and the capability of providing cooling circulating cutting fluid for the dicing saw is integrally improved.
Description
Technical Field
The invention belongs to the technical field of semiconductor packaging and cutting processing, and particularly relates to a cutting fluid cooling circulation device.
Background
Dicing saws are key devices in semiconductor post-packaging processes and function to divide semiconductor devices into individual circuit units or to divide large-sized materials into small-sized materials. The main working mechanism of the scribing machine is that the grinding wheel blade which runs at high speed is contacted with a workpiece to be processed in the cutting process by utilizing the powerful grinding of the grinding wheel blade, so that the scribing and cutting functions are realized. A large amount of heat is inevitably generated in the cutting process, and different cutting fluids are required to be selected according to different cutting materials in order to avoid damage of the heat to a workpiece and improve the cutting quality.
There is a cooling circulation device in the existing market, its technical scheme is mainly to set up in device one end and connect liquid mouth and scriber outlet connection, device is inside to divide into several compartments with the baffle, its bottom is airtight simultaneously, used cutting fluid only just through deposiing just provides the scriber cutting cooling by the pump of fixed mounting in the outside directly, the cutting fluid quality of recycling is relatively poor, and the operation when thoroughly changing the cutting fluid at every turn is very inconvenient, need to remove the box that fills with the cutting fluid, then pour the cutting fluid wholly through inverting, and when adding new cutting fluid to cooling circulation device, often have some cutting fluid to spill over from the stiff end of pump, whole operation process is very unsatisfactory, market urgent need technical scheme improves above technical problem.
Disclosure of Invention
In view of this, an object of the present invention is to provide a cutting fluid cooling circulation device, which realizes high-quality supply of circulating cutting fluid through a simple and convenient structural design, has a good cooling effect on the cutting fluid, and integrally improves the capability of providing cooling circulating cutting fluid to a dicing saw.
The technical scheme adopted by the invention is as follows:
a cutting fluid cooling circulation device comprises a box body for containing cutting fluid, a fluid receiving port connected with a fluid outlet of a dicing saw is arranged above the box body, a fluid outlet communicated with a fluid inlet of the dicing saw is arranged in the box body,
the box body is respectively provided with a filtering area, a cooling area and a pressurizing supply area which are sequentially communicated, wherein,
the filtering area is communicated with the liquid receiving port and used for receiving the cutting liquid discharged by the liquid discharging port of the dicing saw, and meanwhile, the cutting liquid is filtered to separate impurities to obtain filtered cutting liquid;
the cooling zone cools the filtered cutting fluid to obtain cooling circulating cutting fluid;
when the dicing saw works, the pressurizing supply area conveys the cooling circulation cutting fluid to the fluid outlet through the pressurizing effect, and the cooling circulation of the cutting fluid of the dicing saw is completed by supplying the cooling circulation cutting fluid to the fluid inlet of the dicing saw through the fluid outlet.
Preferably, the bottom of the box body is further provided with a drain valve for integrally replacing the cutting fluid in the box body.
Preferably, the bottom of the box body is provided with a roller for realizing displacement change on a working surface.
Preferably, the filtering area comprises a filtering box arranged inside the box body, at least 1-stage filtering pressing plate is arranged in the filtering box, and the filtering pressing plate is coated with filtering cotton.
Preferably, the filter box is installed in the filter area through a push-pull installation structure, the upper end of the filter box is communicated with the liquid receiving port, and the lower end of the filter box is communicated with the cooling area.
Preferably, install in the filter box and be the level filtering clamp plate and the secondary filter clamp plate that distribute from top to bottom, the cladding has level filtering cotton and secondary filter cotton respectively on level filtering clamp plate and the secondary filter clamp plate, level filtering cotton is used for right the cutting fluid carries out primary filter, secondary filter cotton is used for carrying out the fine grade through the cutting fluid after primary filter and filters for effective filtration separation impurity in the cutting fluid obtains filter the cutting fluid.
Preferably, the cooling zone includes a cooling coil disposed on the inner periphery of the box body, the cooling coil is communicated with the circulating refrigerant fluid and is in direct contact with the filtered cutting fluid in the box body, and is used for providing a cooling effect to the filtered cutting fluid in the box body.
Preferably, a booster pump connected with a scribing machine control port is installed in the booster zone, so that the booster pump and the scribing machine motor perform linkage work; when the scribing machine cuts, the booster pump is started to boost, and the cooling circulation cutting fluid is conveyed to the liquid outlet, and is supplied with the cooling circulation cutting fluid through the liquid outlet to the scribing machine inlet.
Preferably, the tank body is further provided with a pressure relief regulating valve for regulating the outlet pressure of the booster pump.
Preferably, install in the box and be equipped with the level gauge respectively, the upper and lower end of level gauge is equipped with high level sensor and low level sensor respectively for monitor respectively the liquid level state of box class.
According to the invention, through the structural design of the box body formed by the structures of the filtering area, the cooling area and the pressurizing supply area which are sequentially communicated, the cooling circulation treatment process of pre-filtering, re-cooling and final pressurizing supply is realized, and in the actual work, the filtering area is communicated with the liquid receiving port to receive cutting liquid discharged from the liquid discharging port of the dicing saw, and the cutting liquid is filtered to separate impurities to obtain filtered cutting liquid; the filtered cutting fluid in the filtering area enters a cooling area through a communicated box body structure, and the cooling area cools the filtered cutting fluid to obtain cooling circulating cutting fluid; when the dicing saw works, the pressurizing supply area conveys cooling circulating cutting fluid to the fluid outlet through the pressurizing effect, and supplies the cooling circulating cutting fluid to the fluid inlet of the dicing saw through the fluid outlet, so as to finish the cooling circulation of the cutting fluid of the dicing saw.
The invention further preferably provides a one-stage or multi-stage filter box device formed by the filter pressing plate and the filter cotton, the filter structure is convenient to install, can be conveniently replaced and maintained subsequently, is very favorable for filtering impurities of the cutting fluid discharged from the liquid discharge port of the dicing saw, and effectively improves the quality of the cooling circulation cutting fluid provided by the invention.
The invention further preferably provides a preferable cooling coil structure, circulating refrigerating fluid is communicated in the cooling coil, and the cooling coil can be directly contacted with the filtering cutting fluid in the box body for cooling, so that the cooling coil has a very excellent cooling effect;
the invention also preferably provides a preferable booster pump structure, the booster pump is connected with the control port of the dicing saw and is in linkage work with the motor of the dicing saw, and the booster pump can be started to normally boost when the dicing saw enters into cutting work, so that the precise starting state control of the booster pump is realized, and the service life of the booster pump is effectively prolonged;
the invention also preferably provides a roller structure (specifically a universal roller) for realizing displacement of the whole box body, and when the cutting fluid in the box body cannot meet the quality requirement of the cutting fluid of the dicing saw after being recycled for a long time and needs to be replaced, the roller structure can directly disconnect the roller structure and the dicing saw, and the box body is quickly and conveniently displaced to a proper position in a whole way through the roller structure at the bottom to carry out the whole replacement of the cutting fluid in the box body through a drain valve;
the invention also preferably provides a liquid level meter structure respectively provided with a high liquid level sensor and a low liquid level sensor, which can monitor the residual condition of the cutting fluid in the box body in real time, and give an alarm in time when the residual condition exceeds a high liquid level limit value or is lower than a low liquid level limit value, thereby not only effectively improving the production efficiency, but also effectively avoiding the device faults caused by insufficient cooling due to insufficient cutting fluid or damage to the booster pump due to excessive cutting fluid.
Drawings
Fig. 1 is a schematic structural view of a cutting fluid cooling circulation device according to an embodiment of the present invention.
Detailed Description
The embodiment of the invention discloses a cutting fluid cooling circulation device, which comprises a box body for containing cutting fluid, wherein a fluid receiving port connected with a fluid outlet of a dicing saw is arranged above the box body, a fluid outlet communicated with a fluid inlet of the dicing saw is arranged in the box body, and the box body is respectively provided with a filtering area, a cooling area and a pressurizing supply area which are sequentially communicated, wherein the filtering area is communicated with the fluid receiving port and is used for receiving the cutting fluid discharged from the fluid outlet of the dicing saw, and filtering and separating impurities from the cutting fluid to obtain filtered cutting fluid; cooling the filtered cutting fluid by the cooling zone to obtain cooling circulating cutting fluid; when the dicing saw works, the pressurizing supply area conveys the cooling circulation cutting fluid to the fluid outlet through the pressurizing effect, and supplies the cooling circulation cutting fluid to the fluid inlet of the dicing saw through the fluid outlet, so that the cooling circulation of the cutting fluid of the dicing saw is completed.
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a cutting fluid cooling circulation device comprises a box body 3 for containing cutting fluid, a fluid receiving port 91 connected with a fluid outlet of a dicing saw is arranged above the box body 3, a fluid outlet 6 communicated with a fluid inlet of the dicing saw is arranged in the box body 3, and a box body cover plate 8 is correspondingly arranged on the box body 3;
in the present embodiment, the box body 3 is respectively provided with a filtering area, a cooling area and a pressurizing supply area which are sequentially communicated, and particularly, in the present embodiment, the filtering area, the cooling area and the pressurizing supply area are respectively separated and installed and sequentially communicated by installing partition plates in the box body 3, and further, in order to ensure the supply quality of the cooling circulation cutting fluid in the implementation of the present application, the filtering area and the pressurizing supply area are of a closed structure, and the three areas are communicated through the cooling area;
in the embodiment, the filtering area is communicated with the liquid receiving port 91 and is used for receiving the cutting fluid discharged from the liquid discharging port of the dicing saw, and filtering and separating impurities from the cutting fluid to obtain filtered cutting fluid; preferably, the filtering area comprises a filtering box 10 installed inside the box body 3, the filtering box 10 is conveniently installed inside the filtering area through a push-pull installation structure, the upper end portion of the filtering box 10 is connected with the liquid receiving port installation cover plate 9 in an installation manner, the inside of the filtering box 10 is communicated with the liquid receiving port 91, the lower end portion of the filtering box 10 is communicated with the cooling area, in order to facilitate a one-way flow path of the filtered cutting liquid to the cooling area, a certain distance is reserved between the lower end portion of the filtering box 10 and the bottom of the box body 3, and the lower end portion of the filtering box 10 is communicated with the cooling area of the box body 3 through an outlet (not shown;
preferably, in the present embodiment, at least 1 stage of filtering pressing plate is installed in the filtering box 10, and the filtering pressing plate is covered with filtering cotton; particularly preferably, a primary filtering pressing plate 11 and a secondary filtering pressing plate 13 which are distributed up and down are installed in the filtering box 10, the primary filtering pressing plate 11 and the secondary filtering pressing plate 13 are respectively coated with primary filtering cotton 12 and secondary filtering cotton 14, the primary filtering cotton 12 is used for primary filtering of the cutting fluid, and the secondary filtering cotton 14 is used for fine filtering of the cutting fluid after the primary filtering and is used for effective filtering and separation of impurities in the cutting fluid to obtain filtered cutting fluid; in order to facilitate the installation, maintenance and replacement of the primary filtering pressing plate 11 and the secondary filtering pressing plate 13, the primary filtering pressing plate 11 and the secondary filtering pressing plate 13 are respectively clamped in the filtering box 10, the width of the secondary filtering pressing plate 13 is smaller than that of the primary filtering pressing plate 11, and during actual installation, the secondary filtering pressing plate 13 positioned below is installed in the filtering box 10, and then the primary filtering pressing plate 11 positioned above is installed; tests prove that the two-stage filtering structure provided by the embodiment can remove most of impurities in cutting fluid discharged from a liquid discharge port of a dicing saw;
wherein, the cooling zone cools the filtered cutting fluid to obtain cooling circulating cutting fluid; preferably, in the present embodiment, the cooling zone includes a cooling coil 4 disposed on the inner periphery of the box 3, and the cooling coil 4 is communicated with the circulating refrigerant fluid and is in direct contact with the filtered cutting fluid in the box 3 for providing a cooling effect to the filtered cutting fluid in the box 3; specifically, the cooling coil 4 usually adopts a copper pipe, and the circulating refrigerant liquid can directly adopt circulating refrigeration water;
when the dicing saw works, the pressurizing supply area conveys the cooling circulating cutting fluid to the fluid outlet 6 through the pressurizing effect, and supplies the cooling circulating cutting fluid to the fluid inlet of the dicing saw through the fluid outlet 6 to complete the cooling circulation of the cutting fluid of the dicing saw; preferably, in the present embodiment, a booster pump 5 connected to a dicing saw control port is installed in the booster zone, the booster pump 5 is installed on the lower side of the box cover plate 8 through a pump installation protective cover 7, and the booster pump 5 and the dicing saw motor perform linkage work; when the dicing saw performs cutting operation, the booster pump 5 starts boosting operation, conveys cooling circulating cutting fluid to the fluid outlet 6, and supplies the cooling circulating cutting fluid to the fluid inlet of the dicing saw through the fluid outlet 6, and because the booster pump 5 can start normal boosting operation only when the dicing saw enters the cutting operation, the precise starting state control of the booster pump 5 is realized, and the service life of the booster pump 5 is effectively prolonged; further preferably, in this embodiment, the box 3 is further provided with a pressure relief regulating valve 15 for regulating an outlet pressure of the booster pump 5, and during actual operation, the pressure relief regulating valve 15 is always in a normally open state, so as to reduce impact on the semiconductor device due to sudden excessive pressure caused by simultaneous operation of the booster pump 5 when the dicing saw starts a cutting action, which may cause damage to the semiconductor device, and at the same time, the pressure of the cooling circulation cutting fluid input into the dicing saw can be effectively regulated, thereby avoiding possible impact on the semiconductor device due to excessive supply pressure of the cutting fluid;
preferably, in the present embodiment, a drain valve 2 is further disposed at the bottom of the box 3 for replacing the cutting fluid in the box 3 as a whole; in order to facilitate the overall replacement of the cutting fluid in the box body 3, in the embodiment, the bottom of the box body 3 is provided with a roller for realizing displacement change on a working surface, the roller is specifically of a universal caster 1 structure, during actual operation, the box body 3 is easily and rapidly displaced to a proper position through the universal caster 1, the cutting fluid in the box body 3 is integrally replaced through the drain valve 2, the operation is very convenient and reliable, and when the overall box body 3 is cleaned, sewage in the box body can be discharged through the drain valve 2;
preferably, in the present embodiment, the tank 3 is provided with a liquid level meter 16, and the upper and lower ends of the liquid level meter 16 are provided with a high liquid level sensor and a low liquid level sensor respectively, for monitoring the liquid level states of the tank 3 respectively; in practical implementation, the low liquid level sensor can be arranged at a position which is 10mm-15mm away from the bottommost end of the booster pump 5 and is used as a low alarm liquid level position, once the low liquid level sensor identifies that the liquid level of the box body 3 is lower than the position range, the liquid level meter 16 sends a low liquid level alarm reminding signal to the dicing saw operation interface, the high liquid level sensor can be arranged at a position which is 25-35mm lower than the power supply box of the booster pump 5 and is used as a high alarm liquid level position, and once the high liquid level sensor identifies that the liquid level of the box body 3 is higher than the position range, the liquid level meter 16 sends a high liquid level alarm reminding signal to the dicing saw operation; after receiving the alarm reminding signal, the scribing machine operation interface firstly confirms the alarm reason, when the situation that the liquid level of the box body 3 is in the low alarm liquid level position due to the loss of the cutting liquid in the box body 3 or the leakage caused by other reasons in the scribing machine cutting process is found, the scribing machine operation interface alarms and prompts the content of adding the cutting liquid, and at the moment, the cutting liquid is added into the box body 3 in time; in the cutting fluid adding process, when the liquid level is higher than the high alarm liquid level position, the operating interface of the dicing saw prompts that the liquid level is too high, and at the moment, some cutting fluid can be released and discharged through the drain valve 2 in time.
In the embodiment, a box body 3 formed by sequentially communicating a filtering area, a cooling area and a pressurizing supply area is arranged, so that a cooling circulation treatment process of pre-filtering, re-cooling and final pressurizing supply is realized, and in the actual work, the filtering area is communicated with a liquid receiving port 91 to receive cutting liquid discharged from a liquid discharging port of a dicing saw, and the cutting liquid is filtered to separate impurities to obtain filtered cutting liquid; the filtered cutting fluid in the filtering area enters a cooling area through a communicated box body 3 structure, and the cooling area cools the filtered cutting fluid to obtain cooling circulating cutting fluid; when the dicing saw during operation, the pressure boost supply region is carried the cooling cycle cutting fluid to liquid outlet 6 through the pressure boost effect to carry out the supply of cooling cycle cutting fluid through liquid outlet 6 to the dicing saw inlet, accomplish the cooling cycle to the dicing saw cutting fluid, this embodiment is through simple and structural design that can convenient change the operation, ensures that whole cooling cycle process has realized the high-quality circulation cutting fluid supply, and is good to the cooling effect of cutting fluid, has wholly promoted the ability that provides the cooling cycle cutting fluid to the dicing saw.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A cutting fluid cooling circulation device comprises a box body for containing cutting fluid, a fluid receiving port connected with a fluid outlet of a dicing saw is arranged above the box body, a fluid outlet communicated with a fluid inlet of the dicing saw is arranged in the box body, and the cutting fluid cooling circulation device is characterized in that,
the box body is respectively provided with a filtering area, a cooling area and a pressurizing supply area which are sequentially communicated, wherein,
the filtering area is communicated with the liquid receiving port and used for receiving the cutting liquid discharged by the liquid discharging port of the dicing saw, and meanwhile, the cutting liquid is filtered to separate impurities to obtain filtered cutting liquid;
the cooling zone cools the filtered cutting fluid to obtain cooling circulating cutting fluid;
when the dicing saw works, the pressurizing supply area conveys the cooling circulation cutting fluid to the fluid outlet through the pressurizing effect, and the cooling circulation of the cutting fluid of the dicing saw is completed by supplying the cooling circulation cutting fluid to the fluid inlet of the dicing saw through the fluid outlet.
2. The cutting fluid cooling circulation device according to claim 1, wherein a drain valve is further provided at the bottom of the case body for integrally replacing the cutting fluid in the case body.
3. The cooling circulation device for cutting fluid as claimed in claim 2, wherein rollers for effecting displacement change on the working surface are installed at the bottom of the case.
4. The cutting fluid cooling circulation device according to claim 1, wherein the filtering section comprises a filtering box installed inside the box body, at least 1 stage of filtering pressure plate is installed inside the filtering box, and the filtering pressure plate is coated with filtering cotton.
5. The cutting fluid cooling circulation device according to claim 4, wherein the filter cartridge is installed in the filter zone by a push-pull installation structure, an upper end portion of the filter cartridge is installed and communicated with the fluid receiving port, and a lower end portion of the filter cartridge is communicated with the cooling zone.
6. The cutting fluid cooling circulation device according to claim 4 or 5, wherein a primary filtering pressing plate and a secondary filtering pressing plate are arranged in the filtering box and distributed up and down, the primary filtering pressing plate and the secondary filtering pressing plate are respectively coated with primary filtering cotton and secondary filtering cotton, the primary filtering cotton is used for primary filtering of the cutting fluid, and the secondary filtering cotton is used for fine filtering of the cutting fluid after primary filtering and is used for effective filtering and separation of impurities in the cutting fluid to obtain the filtered cutting fluid.
7. The cutting fluid cooling circulation device according to claim 1, wherein the cooling zone comprises a cooling coil disposed on an inner periphery of the housing, the cooling coil being in communication with a circulating refrigerant fluid and in direct contact with the filtered cutting fluid in the housing for providing a cooling effect to the filtered cutting fluid in the housing.
8. The cutting fluid cooling circulation device according to claim 1, wherein a booster pump connected to a dicing saw control port is installed in the booster zone, so that the booster pump and the dicing saw motor perform linkage work; when the scribing machine cuts, the booster pump is started to boost, and the cooling circulation cutting fluid is conveyed to the liquid outlet, and is supplied with the cooling circulation cutting fluid through the liquid outlet to the scribing machine inlet.
9. The cutting fluid cooling circulation device according to claim 8, wherein the tank is further provided with a pressure relief regulating valve for regulating an outlet pressure of the booster pump.
10. The cutting fluid cooling circulation device according to claim 1, wherein a liquid level meter is installed in each tank, and a high liquid level sensor and a low liquid level sensor are installed at the upper end and the lower end of each liquid level meter, respectively, and are used for monitoring the liquid level state of each tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911110185.0A CN110757666A (en) | 2019-11-14 | 2019-11-14 | Cutting fluid cooling circulation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911110185.0A CN110757666A (en) | 2019-11-14 | 2019-11-14 | Cutting fluid cooling circulation device |
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| CN110757666A true CN110757666A (en) | 2020-02-07 |
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| CN201911110185.0A Pending CN110757666A (en) | 2019-11-14 | 2019-11-14 | Cutting fluid cooling circulation device |
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