CN110756986A - Method and device for preparing micro-lens array by laser-induced forward transfer - Google Patents
Method and device for preparing micro-lens array by laser-induced forward transfer Download PDFInfo
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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Abstract
The invention discloses a method and a device for preparing a micro-lens array by laser-induced forward transfer, which comprises a laser, a light path adjusting module and a material transfer module, wherein the light path adjusting module is used for adjusting a transmission light path of a laser beam and is provided with a light path inlet and a light path outlet; the material transfer module comprises a first XYZ axis moving platform, a receiving substrate and a transparent substrate, wherein the receiving substrate is arranged below the transparent substrate in parallel, a groove is formed in the lower end face of the transparent substrate, an absorption layer is arranged in the groove, and a material transfer layer is arranged below the absorption layer. The laser beam is focused after passing through the light path module and passes through the transparent substrate, the part irradiated by the laser beam in the absorption layer is vaporized, bubbles are formed in the absorption layer, the material in the material transfer layer is pushed, the material drops to the receiving substrate, an array-shaped liquid drop is formed on the receiving substrate, and the micro-lens array is formed after the liquid drop is solidified. The invention needs no mask preparation, shortens the production period in small-scale production and reduces the production cost.
Description
Technical Field
The invention relates to a process and a device for preparing a micro-lens array by using Laser Induced Forward Transfer (LIFT), belonging to the technical field of Laser application and micro-lens preparation, in particular to a method and a device for preparing a micro-lens array by using Laser induced forward transfer.
Background
Microlens arrays (MLAs) have been widely used in many fields such as optical sensors, 3D displays, Light Emitting Diodes (LEDs) and photovoltaic cells. Currently, various methods have been developed to fabricate MLAs, including photolithography, photoresist reflow, silicon template based micro-molding, and the like. Although successful in simplifying the steps of these techniques, the preparation of the mask or mold is still a time consuming and potentially costly step, limiting the efficiency of the overall process. This situation is exacerbated by the advent of additive manufacturing tools and the accompanying trend toward small customization. Under these circumstances, direct-write technologies (DWT) capable of building structures without intermediate steps, such as inkjet printing or laser micromachining, are becoming increasingly important. However, there are still some drawbacks that limit the use of DWT in micro-optical element fabrication. For example, conventional ink jet printing is limited by the rheology of the ink, with typical working viscosities in the range of 1-50mPas, which do not have sufficient optical properties in terms of transparency or dispersibility for most thermoset polymers. Problems also arise in common laser processing techniques, such as laser expansion or two-photon polymerization (2PP), where high quality microlenses can be obtained only for a limited number of materials, while controlling the positioning of the lens on the target surface remains difficult to achieve.
Disclosure of Invention
The present invention is directed to solve at least one of the problems of the prior art, and provides a method and an apparatus for fabricating a microlens array by laser induced forward transfer, which can fabricate a microlens array at a designated position on a receiving substrate without preparing a mask, and can greatly shorten the production period in small-scale production.
According to an embodiment of the first aspect of the present invention, there is provided an apparatus for preparing a microlens array by laser induced forward transfer, comprising
A laser for emitting a laser beam;
the optical path adjusting module is used for adjusting a transmission optical path of the laser beam and is provided with an optical path inlet and an optical path outlet; and
the material transfer module comprises a first XYZ axis moving platform, a receiving substrate arranged on the first XYZ axis moving platform and a transparent substrate positioned below the light path outlet, wherein the receiving substrate is arranged below the transparent substrate in parallel, the transparent substrate can move relative to the light path outlet, a groove is formed in the lower end face of the transparent substrate, an absorption layer is arranged in the groove, and a material transfer layer is arranged below the absorption layer.
The device at least has the following beneficial effects: the laser beam is focused and passes through the transparent substrate after passing through the light path module, the part irradiated by the laser beam in the absorption layer is vaporized, bubbles are formed in the absorption layer, the material in the material transfer layer is pushed, the material drops to the receiving substrate, hemispherical liquid drops are formed on the receiving substrate, the first XYZ axis moving platform moves, arrayed liquid drops are formed on the receiving substrate, and the micro-lens array is formed after the liquid drops are solidified. The invention does not need to prepare a mask, can greatly shorten the production period in small-scale production and reduce the production cost, and is particularly suitable for laboratory research and industrial small-scale trial production.
According to the apparatus in the embodiment of the first aspect of the present invention, the optical path adjusting module includes a beam expander, an optical filter, a scanning galvanometer, and a flat field focusing lens, which are connected in sequence. And the scanning galvanometer and the second XYZ axis moving platform enable the laser beam to scan at an ultrahigh speed and perform accurate positioning.
According to the device of the embodiment of the first aspect of the invention, the absorption layer is a titanium film, a silver film or a polyimide film.
According to an embodiment of the device according to the first aspect of the invention, the material transfer layer is a UV resin layer.
According to the device of the embodiment of the first aspect of the invention, the thickness of the absorption layer is 30-60 nm, and the thickness of the material transfer layer is 5-20 μm. When the absorption layer absorbs laser photons, high temperature gasification can be instantly generated due to the nano-level thickness of the absorption layer, bubbles are formed, and residues are not left in the material transfer layer. The heat absorbed by the absorbing layer also partially vaporizes the material in the micron-sized material transfer layer, and the resulting expansion of the bubbles causes a jet of material to be formed which is transferred to the receiving substrate.
The device according to the embodiment of the first aspect of the present invention further includes a curing module, where the curing module is an ultraviolet curing module, and a working end of the curing module faces vertically downward.
The apparatus according to an embodiment of the first aspect of the present invention further comprises a heating furnace for heating the material on the receiving substrate, the heating furnace being located between the first XYZ axes translation stage and the receiving substrate, the transparent substrate being mounted on the second XYZ axes translation stage. And transferring the material to a receiving substrate, moving the transparent substrate away by using a second XYZ axis moving platform, opening the heating furnace, carrying out heat treatment on the material on the receiving substrate, slightly refluxing the material, and then curing under a curing module to form a pure micro lens array.
According to a second aspect of embodiments of the present invention, there is provided a method of fabricating a microlens array by laser induced forward transfer, comprising the steps of,
1) the end of the transparent substrate with the protective layer and the material transfer layer is downward, and the transparent substrate is arranged above the receiving substrate in parallel;
2) the laser beam is focused and passes through the transparent substrate after passing through the light path module, the part irradiated by the laser beam in the absorption layer is vaporized, bubbles are formed in the absorption layer, the material in the material transfer layer is pushed, the material drops to the receiving substrate, and hemispherical liquid drops are formed on the receiving substrate;
3) the first XYZ axis moving platform moves to form an array-shaped liquid drop on the receiving substrate, and the liquid drop is solidified to form a micro lens array.
The method at least has the following beneficial effects: the laser beam is focused and passes through the transparent substrate after passing through the light path module, the part irradiated by the laser beam in the absorption layer is vaporized, bubbles are formed in the absorption layer, the material in the material transfer layer is pushed, the material drops to the receiving substrate, hemispherical liquid drops are formed on the receiving substrate, the first XYZ axis moving platform moves, arrayed liquid drops are formed on the receiving substrate, and the micro-lens array is formed after the liquid drops are solidified. The invention does not need to prepare a mask, can greatly shorten the production period in small-scale production and reduce the production cost, and is particularly suitable for laboratory research and industrial small-scale trial production. The manufacturing method adopted by the invention has a quick and repeatable process, and can control the sizes of the prepared micro-lens array by adjusting the parameters of the laser, the scanning galvanometer and the first XYZ-axis moving platform.
According to the method of the second aspect of the present invention, the steps 2) to 3) are repeated, and the material is dropped onto the formed microlens, and the drop is solidified to form a new microlens array until the microlens array reaches the required refractive index. Covering the formed micro lens with materials with the same refractive index, and controlling the appearance of the micro lens through multiple times of transfer to obtain the micro lens array with different refractive indexes. The invention does not need to prepare a mask, can greatly shorten the production period in small-scale production and reduce the production cost, and is particularly suitable for laboratory research and industrial small-scale trial production.
According to a third aspect of the present invention, a method of making a microlens array by laser induced forward transfer, comprises the steps of,
1) the end of the transparent substrate with the protective layer and the material transfer layer is downward, and the transparent substrate is arranged above the receiving substrate in parallel;
2) the laser beam is focused and passes through the transparent substrate after passing through the light path module, the part irradiated by the laser beam in the absorption layer is vaporized, bubbles are formed in the absorption layer, the material in the material transfer layer is pushed, the material drops to the receiving substrate, and hemispherical liquid drops are formed on the receiving substrate;
3) moving a first XYZ axis moving platform to form an array-shaped liquid drop on a receiving substrate, and forming a micro-lens array after the liquid drop is solidified;
4) changing a transparent substrate, wherein the refractive index of a material transfer layer in the transparent substrate is different from that of the previous material transfer layer, a laser beam passes through a light path module, is focused and passes through the transparent substrate, the part irradiated by the laser beam in an absorption layer is vaporized, bubbles are formed in the absorption layer to push the material in the material transfer layer, the material drops on the formed micro-lenses, and the droplets are solidified to form a new micro-lens array;
5) and repeating the step 4) until the microlens array has the required refractive index gradient.
The method at least has the following beneficial effects: and covering materials with different refractive indexes on the formed micro lenses to form a new micro lens array until the micro lens array has the required refractive index gradient. The invention does not need to prepare a mask, can greatly shorten the production period in small-scale production and reduce the production cost, and is particularly suitable for laboratory research and industrial small-scale trial production.
Drawings
In order to more clearly illustrate the technical solution in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below. It is clear that the described figures are only some embodiments of the invention, not all embodiments, and that a person skilled in the art can also derive other designs and figures from them without inventive effort.
FIG. 1 is a schematic diagram of the structure of an apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the principle of laser induced forward transfer according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to the present preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
Referring to fig. 1, an apparatus for manufacturing a microlens array by laser induced forward transfer includes a laser 1, a light path adjusting module, and a material transfer module, the laser 1 being configured to emit a laser beam 17; the light path adjusting module is used for adjusting a transmission light path of the laser beam 17 and is provided with a light path inlet and a light path outlet; the material transfer module comprises a first XYZ axis moving platform 11, a receiving substrate 9 arranged on the first XYZ axis moving platform 11 and a transparent substrate 6 positioned below an optical path outlet, wherein the receiving substrate 9 is arranged below the transparent substrate 6 in parallel, the transparent substrate 6 can move relative to the optical path outlet, a groove is formed in the lower end face of the transparent substrate 6, an absorption layer 7 is arranged in the groove, and a material transfer layer 8 is arranged below the absorption layer 7. The transparent substrate 6 is mounted on a Z-axis moving platform or a second XYZ-axis moving platform 12 by a jig, and the transparent substrate 6 can move in the Z-axis direction to control the defocus distance of the transparent substrate 6 for the laser beam 17.
Of course, a computer 15 is included which controls the operating conditions and parameters of the laser 1, the optical path conditioning module, the material transfer module and the curing module.
The light path adjusting module comprises a beam expanding lens 2, an optical filter 3, a scanning galvanometer 4 and a flat field focusing lens 5 which are connected in sequence. Laser beams enter the beam expanding lens 2 through a light path inlet, the laser beams 17 are emitted from a light path outlet after passing through the flat field focusing lens 5, impurities of light spots can be removed after the laser beams 17 pass through the beam expanding lens 2 and the optical filter 3, and then the light paths are adjusted to the specified positions through the scanning vibrating lens 4 and the flat field focusing lens 5. The scanning galvanometer 4 and the second XYZ axis movement stage 12 enable the laser beam 17 to scan at an ultra high speed and perform precise positioning.
The transparent substrate 6 can be made of quartz glass, acrylic plate or PDMS with high light transmittance. The absorption layer 7 can be prepared by physical vapor deposition or chemical vapor deposition, and the thickness of the absorption layer 7 is 30-60 nm. Preferably, the thickness of the absorption layer 7 is 30, 40 or 50 nm. The material transfer layer 8 can be uniformly mixed by ultrasonic, and then a layer is carefully scraped on the prepared absorption layer 7, wherein the thickness of the material transfer layer 8 is 5-20 mu m. Preferably, the thickness of the material transfer layer 8 is 5, 10, 15 or 20 μm.
Preferably, the absorption layer is a titanium film, a silver film or a polyimide film.
Preferably, the material transfer layer 8 is a UV resin layer.
Preferably, the curing module 14 is an ultraviolet curing module, and the working end of the curing module 14 faces vertically downwards. The invention adopts the photocuring principle to generate a finished product, and is simple, convenient and low in cost.
Preferably, the heating furnace 10 is used for heating the material on the receiving substrate 9, the heating furnace 10 is located between the first XYZ shaft transfer stage 11 and the receiving substrate 9, and the transparent substrate 6 is mounted on the second XYZ shaft transfer stage 12. The transparent substrate 6 is mounted on a second XYZ shaft transfer stage 12 by a jig 13, and the second XYZ shaft transfer stage 12 is mounted on the first XYZ shaft transfer stage 11. The material is transferred to the receiving substrate 9, the transparent substrate 6 is removed by the second XYZ-axis transfer stage 12, the heating furnace 10 is opened, the material on the receiving substrate 9 is heat-treated, the material is slightly reflowed, and then cured under the curing module 14 to form a clear microlens array.
After passing through the optical path module, the laser beam 17 is focused and passes through the transparent substrate 6, the part irradiated by the laser beam 17 in the absorption layer 7 is vaporized, bubbles are formed inside the absorption layer 7, the material in the material transfer layer 8 is pushed, the material drops to the receiving substrate 9, hemispherical liquid drops are formed on the receiving substrate 9, the first XYZ axis moving platform 11 moves, arrayed liquid drops are formed on the receiving substrate 9, and the liquid drops form a micro-lens array after being solidified. The invention does not need to prepare a mask, can greatly shorten the production period in small-scale production and reduce the production cost, and is particularly suitable for laboratory research and industrial small-scale trial production. The invention ensures the product quality by reasonably applying the absorption layer 7 and the material transfer layer 8. The manufacturing method adopted by the invention has a quick and repeatable process, and can control the sizes of the prepared micro-lens array by adjusting the parameters of the laser 1, the scanning galvanometer 4 and the first XYZ-axis moving platform.
The following description will specifically discuss the absorbing layer 7 as a titanium film, the material transfer layer 8 as a UV resin layer, the curing module 14 as an ultraviolet curing module, and the transparent substrate 6 as quartz glass.
In the first embodiment, the first step is,
a method for preparing a microlens array by laser induced forward transfer, comprising the steps of,
1) determining various size requirements of a micro-lens array to be prepared, and adjusting various parameters of the laser 1, such as repetition frequency, pulse width, power, scanning speed of the scanning galvanometer 4, scanning route and the like;
2) preparing a titanium film on a transparent substrate 6 as a protective layer and an absorption layer 7, and preparing an ultraviolet-curable UV resin layer on the lower surface of the titanium film, wherein the UV resin layer is used as a transfer material to prepare a micro-lens array;
3) the transparent substrate 6 with the titanium film and the UV resin layer side facing down, placed parallel to the receiving substrate 9 and fixed by the jig 13, the defocus distance is adjusted by controlling the second XYZ axis movement stage 12 by the computer 15, the receiving distance between the transparent substrate 6 and the receiving substrate 9 is adjusted by controlling the first XYZ axis movement stage 11 and the second XYZ axis movement stage 12 by the computer 15 to prepare a desired microlens array;
4) after the parameters are adjusted, laser beams 17 emitted by the laser 1 pass through the beam expander 2 and the optical filter 3 to obtain better spot quality, and after the light path is changed through the scanning galvanometer 4, the laser beams finally pass through the flat field focusing lens 5 and are focused on the protective layer; the laser beam 17 passes through the transparent substrate 6, is absorbed by the titanium film, causes the irradiated part to be partially vaporized, forms bubbles in the titanium film, and pushes the UV resin of the surrounding UV resin layer to be flushed to the receiving substrate 9 along with the continuous expansion of the bubbles; forming liquid drops between the transparent substrate 6 and the receiving substrate 9, moving the first XYZ axis moving platform 11 to finally form a micro-hemispherical array, wherein the movement of the first XYZ axis moving platform 11 can be controlled manually or by a computer 15;
5) the transparent substrate 6 is moved away by a second XYZ axis moving platform 12, the transferred micro-hemispherical array is flatly placed, the heating furnace 10 is opened for heat treatment, materials are slightly refluxed, the transparent substrate 6 is moved to the lower part of the ultraviolet light curing module and is cured under ultraviolet light 16 to form pure MLA, and the wavelength of the ultraviolet light 16 is 365 nm.
In the second embodiment, as shown in fig. 2,
a method for preparing a microlens array by laser induced forward transfer, comprising the steps of,
1) determining various size requirements of a micro-lens array to be prepared, and adjusting various parameters of the laser 1, such as repetition frequency, pulse width, power, scanning speed of the scanning galvanometer 4, scanning route and the like;
2) preparing a titanium film on a transparent substrate 6 as a protective layer and an absorption layer 7, and preparing an ultraviolet-curable UV resin layer on the lower surface of the titanium film, wherein the UV resin layer is used as a transfer material to prepare a micro-lens array;
3) the transparent substrate 6 with the titanium film and the UV resin layer side facing down, placed parallel to the receiving substrate 9 and fixed by the jig 13, the defocus distance is adjusted by controlling the second XYZ axis movement stage 12 by the computer 15, the receiving distance between the transparent substrate 6 and the receiving substrate 9 is adjusted by controlling the first XYZ axis movement stage 11 and the second XYZ axis movement stage 12 by the computer 15 to prepare a desired microlens array;
4) after the parameters are adjusted, laser beams 17 emitted by the laser 1 pass through the beam expander 2 and the optical filter 3 to obtain better spot quality, and after the light path is changed through the scanning galvanometer 4, the laser beams finally pass through the flat field focusing lens 5 and are focused on the protective layer; the laser beam 17 passes through the transparent substrate 6, is absorbed by the titanium film, causes the irradiated part to be partially vaporized, forms bubbles in the titanium film, and pushes the UV resin of the surrounding UV resin layer to be flushed to the receiving substrate 9 along with the continuous expansion of the bubbles; and forming liquid drops between the transparent substrate 6 and the receiving substrate 9 to finally form a micro-hemispherical array;
5) the transparent substrate 6 is moved away by a second XYZ axis moving platform 12, the transferred micro-hemispherical array is flatly placed, the heating furnace 10 is opened for heat treatment, materials are slightly refluxed, the transparent substrate 6 is moved to the lower part of the ultraviolet light curing module and is cured under ultraviolet light 16 to form pure MLA, and the wavelength of the ultraviolet light 16 is 365 nm.
6) And repeating the steps 4) and 5), transferring the UV resin to the position above the MLA which is formed previously, and curing under the ultraviolet light 16 to form a new MLA shape until the obtained MLA reaches the required refractive index.
In the third embodiment, as shown in fig. 2,
a method for preparing a microlens array by laser induced forward transfer, comprising the steps of,
1) determining various size requirements of a micro-lens array to be prepared, and adjusting various parameters of the laser 1, such as repetition frequency, pulse width, power, scanning speed of the scanning galvanometer 4, scanning route and the like;
2) preparing a titanium film on a transparent substrate 6 as a protective layer and an absorption layer 7, and preparing an ultraviolet-curable UV resin layer on the lower surface of the titanium film, wherein the UV resin layer is used as a transfer material to prepare a micro-lens array;
3) the transparent substrate 6 with the titanium film and the UV resin layer side facing down, the transparent substrate 6 being placed parallel to the receiving substrate 9 and fixed by a jig 13, the defocus distance being adjusted by controlling the second XYZ-axis movement stage 12 by the computer 15, the receiving distance between the transparent substrate 6 and the receiving substrate 9 being adjusted by controlling the first XYZ-axis movement stage 11 and the second XYZ-axis movement stage 12 by the computer 15, to prepare a desired microlens array;
4) after the parameters are adjusted, laser beams 17 emitted by the laser 1 pass through the beam expander 2 and the optical filter 3 to obtain better spot quality, and after the light path is changed through the scanning galvanometer 4, the laser beams finally pass through the flat field focusing lens 5 and are focused on the protective layer; the laser beam 17 passes through the transparent substrate 6, is absorbed by the titanium film, causes the irradiated part to be partially vaporized, forms bubbles in the titanium film, and pushes the UV resin of the surrounding UV resin layer to be flushed to the receiving substrate 9 along with the continuous expansion of the bubbles; and forming liquid drops between the transparent substrate 6 and the receiving substrate 9 to finally form a micro-hemispherical array;
5) the transparent substrate 6 is moved away by a second XYZ axis moving platform 12, the transferred micro-hemispherical array is flatly placed, the heating furnace 10 is opened for heat treatment, materials are slightly refluxed, the transparent substrate 6 is moved to the lower part of the ultraviolet light curing module and is cured under ultraviolet light 16 to form pure MLA, and the wavelength of the ultraviolet light 16 is 365 nm.
6) Preparing UV resin layers with different refractive indexes on a new transparent substrate 6, clamping by a clamp 13, irradiating laser above a titanium film through optical devices such as a beam expander 2, an optical filter 3, a scanning galvanometer 4, a flat field focusing lens 5 and the like and the new transparent substrate 6, transferring the UV resin layers with different refractive indexes to the same transparent substrate 6, enabling the position of each liquid drop to be completely consistent with the position transferred before, slightly refluxing after heat treatment, and curing under ultraviolet light 16 to form MLA with a new appearance and a gradient refractive index;
7) step 6 is repeated until an MLA having the desired refractive index gradient is formed.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that the present invention is not limited to the details of the embodiments shown and described, but is capable of numerous equivalents and substitutions without departing from the spirit of the invention as set forth in the claims appended hereto.
Claims (10)
1. An apparatus for preparing a microlens array by laser-induced forward transfer, comprising: comprises that
A laser for emitting a laser beam;
the optical path adjusting module is used for adjusting a transmission optical path of the laser beam and is provided with an optical path inlet and an optical path outlet; and
the material transfer module comprises a first XYZ axis moving platform, a receiving substrate arranged on the first XYZ axis moving platform and a transparent substrate positioned below the light path outlet, wherein the receiving substrate is arranged below the transparent substrate in parallel, the transparent substrate can move relative to the light path outlet, a groove is formed in the lower end face of the transparent substrate, an absorption layer is arranged in the groove, and a material transfer layer is arranged below the absorption layer.
2. The apparatus for preparing a microlens array by laser induced forward transfer as claimed in claim 1, wherein: the light path adjusting module comprises a beam expanding lens, an optical filter, a scanning galvanometer and a flat field focusing lens which are connected in sequence.
3. The apparatus for preparing a microlens array by laser induced forward transfer as claimed in claim 1, wherein: the absorption layer is a titanium film, a silver film or a polyimide film.
4. The apparatus for preparing a microlens array by laser induced forward transfer as claimed in claim 1, wherein: the material transfer layer is a UV resin layer.
5. The apparatus for preparing a microlens array by laser induced forward transfer as claimed in claim 1, wherein: the thickness of the absorption layer is 30-60 nm, and the thickness of the material transfer layer is 5-20 mu m.
6. The apparatus for preparing a microlens array by laser induced forward transfer as claimed in claim 1, wherein: the ultraviolet curing device is characterized by further comprising a curing module, wherein the curing module is an ultraviolet curing module, and the working end of the curing module faces downwards vertically.
7. The apparatus for preparing a microlens array by laser induced forward transfer as claimed in claim 1, wherein: the device also comprises a heating furnace, wherein the heating furnace is used for heating the material on the receiving substrate, the heating furnace is positioned between the first XYZ axis moving platform and the receiving substrate, and the transparent substrate is arranged on the second XYZ axis moving platform.
8. A method of making a microlens array by laser induced forward transfer, comprising: comprises the following steps of (a) carrying out,
1) the end of the transparent substrate with the protective layer and the material transfer layer is downward, and the transparent substrate is arranged above the receiving substrate in parallel;
2) the laser beam is focused and passes through the transparent substrate after passing through the light path module, the part irradiated by the laser beam in the absorption layer is vaporized, bubbles are formed in the absorption layer, the material in the material transfer layer is pushed, the material drops to the receiving substrate, and hemispherical liquid drops are formed on the receiving substrate;
3) the first XYZ axis moving platform moves to form an array-shaped liquid drop on the receiving substrate, and the liquid drop is solidified to form a micro lens array.
9. The method of producing a microlens array by laser induced forward transfer as claimed in claim 8, wherein: and (3) repeating the steps 2) to 3), dropping the material on the formed micro-lenses, and forming a new micro-lens array after the liquid drops are solidified until the obtained micro-lens array reaches the required refractive index.
10. A method of making a microlens array by laser induced forward transfer, comprising: comprises the following steps of (a) carrying out,
1) the end of the transparent substrate with the protective layer and the material transfer layer is downward, and the transparent substrate is arranged above the receiving substrate in parallel;
2) the laser beam is focused and passes through the transparent substrate after passing through the light path module, the part irradiated by the laser beam in the absorption layer is vaporized, bubbles are formed in the absorption layer, the material in the material transfer layer is pushed, the material drops to the receiving substrate, and hemispherical liquid drops are formed on the receiving substrate;
3) moving a first XYZ axis moving platform to form an array-shaped liquid drop on a receiving substrate, and forming a micro-lens array after the liquid drop is solidified;
4) changing a transparent substrate, wherein the refractive index of a material transfer layer in the transparent substrate is different from that of the previous material transfer layer, a laser beam passes through a light path module, is focused and passes through the transparent substrate, the part irradiated by the laser beam in an absorption layer is vaporized, bubbles are formed in the absorption layer to push the material in the material transfer layer, the material drops on the formed micro-lenses, and the droplets are solidified to form a new micro-lens array;
5) and repeating the step 4) until the microlens array has the required refractive index gradient.
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