CN110729918B - Dielectric elastomer driver capable of being driven at low voltage and manufacturing method - Google Patents
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- 229920002595 Dielectric elastomer Polymers 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 229920001971 elastomer Polymers 0.000 claims description 34
- 239000000806 elastomer Substances 0.000 claims description 34
- 239000007788 liquid Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 13
- 229920001296 polysiloxane Polymers 0.000 claims description 10
- 239000004519 grease Substances 0.000 claims description 7
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 174
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 53
- 239000000741 silica gel Substances 0.000 description 53
- 229910002027 silica gel Inorganic materials 0.000 description 53
- 239000011248 coating agent Substances 0.000 description 25
- 238000000576 coating method Methods 0.000 description 25
- 108010025899 gelatin film Proteins 0.000 description 20
- 238000001035 drying Methods 0.000 description 19
- 238000004528 spin coating Methods 0.000 description 18
- 239000012528 membrane Substances 0.000 description 14
- 239000010408 film Substances 0.000 description 13
- 239000006228 supernatant Substances 0.000 description 13
- 239000008367 deionised water Substances 0.000 description 10
- 229910021641 deionized water Inorganic materials 0.000 description 10
- 239000002109 single walled nanotube Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 230000009471 action Effects 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000002390 adhesive tape Substances 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000123 paper Substances 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 238000007865 diluting Methods 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000003085 diluting agent Substances 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229920002545 silicone oil Polymers 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000001132 ultrasonic dispersion Methods 0.000 description 3
- 238000003828 vacuum filtration Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical group CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000010023 transfer printing Methods 0.000 description 2
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 239000002042 Silver nanowire Substances 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000011086 glassine Substances 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
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-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
- H02N2/0085—Leads; Wiring arrangements
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
Abstract
The invention provides a dielectric elastomer driver capable of being driven at low voltage and a manufacturing method thereof, wherein a first electrode layer and a second electrode layer are arranged on two sides of each elastic body layer in a stacked structure of the dielectric elastomer driver, the conduction mode is unique, and the driving voltage of the dielectric elastomer driver can be greatly reduced by reasonably controlling the mechanical properties such as the material, the thickness, the elastic modulus, the relative dielectric constant, the resilience and the like of the elastic body layers and reasonably controlling the properties such as the thickness, the conductivity, the flexibility and the like of the first electrode layer and the second electrode layer. And moreover, the dielectric elastomer driver is manufactured by adopting a raised frame structure, so that the dielectric elastomer driver can generate resonant motion under the alternating voltage, and the integral driving effect of the driver is further improved.
Description
Technical Field
The invention relates to the technical field of dielectric elastomer drivers, in particular to a dielectric elastomer driver capable of being driven at low voltage and a manufacturing method thereof.
Background
Dielectric Elastomers (DE) are elastomeric materials with high Dielectric constants that change shape when an external electric field is applied and return to their original shape when the applied field is removed, which is accompanied by the generation of stress and strain, thereby converting electrical energy into mechanical energy.
A Dielectric Elastomer Actuator (DEA for short) having a sandwich structure, which is composed of flexible electrodes coated on the upper and lower surfaces of a Dielectric Elastomer, is widely used in the fields of miniature or micro robots, micro aircrafts, disk drives, flat microphones, prosthetic devices, and electronic skins, and is called a new generation of electro-active Actuator.
However, although the dielectric elastomer drivers studied at present can generate large electrostriction, they all need to be generated under high electric field, i.e. more than 1KV, which seriously affects the range of application of the dielectric elastomer drivers, especially in the biomedical field, and has potential danger to human body and equipment.
Therefore, a problem to be solved by those skilled in the art is how to provide a dielectric elastomer driver capable of being driven at a low voltage.
Disclosure of Invention
In view of the above, in order to solve the above problems, the present invention provides a dielectric elastomer driver capable of being driven at a low voltage and a manufacturing method thereof, and the technical solution is as follows:
a low voltage drivable dielectric elastomer driver, comprising:
a stacked structure; the stack structure includes: the structural layer comprises a plurality of first structural layers and a plurality of second structural layers, wherein the first structural layers and the second structural layers are sequentially overlapped in a first direction; wherein the first structural layer comprises a first electrode layer and an elastomer layer sequentially arranged in the first direction; the second structural layer comprises a second electrode layer and the elastomer layer which are sequentially arranged in the first direction;
and the frame structure is used for supporting a preset area of the stacking structure so that the preset area forms a protruding structure.
Preferably, in the dielectric elastomer actuator, a shape of the first electrode layer is the same as a shape of the second electrode layer;
the first electrode layer is divided into an electrode area and a conducting area;
the size of the electrode area is the same as the preset area.
Preferably, in the dielectric elastomer actuator, the electrode region is circular, and the conducting region is rectangular;
the conduction region extends to the outside of the elastomer layer;
wherein projections of the electrode region of the first electrode layer and the electrode region of the second electrode layer in the first direction overlap with the preset region;
the extending direction of the conductive region of the first electrode layer is opposite to the extending direction of the conductive region of the second electrode layer.
Preferably, in the dielectric elastomer actuator, a conductive tape is connected to the conductive region.
Preferably, in the dielectric elastomer actuator, the plurality of conductive regions of the first electrode layer are connected to each other by an electrode liquid or a conductive silicone grease;
and the plurality of conducting areas of the second electrode layer are connected through electrode liquid or conductive silicone grease.
Preferably, in the dielectric elastomer actuator, the plurality of conductive regions of the first electrode layer are connected to each other by a liquid metal;
and the plurality of conducting areas of the second electrode layer are connected through liquid metal.
Preferably, in the above dielectric elastomer driver, the elastomer layer has a thickness of 0.5 μm to 15 μm, inclusive.
Preferably, in the dielectric elastomer actuator, a thickness of the first electrode layer and a thickness of the second electrode layer are the same;
the thickness of the first electrode layer is as follows: 50nm-1um, inclusive.
Preferably, in the above dielectric elastomer driver, the predetermined region has a circular shape having a diameter of 0.5cm to 5cm inclusive.
A method of making a low voltage drivable dielectric elastomer drive, the method comprising:
providing a substrate;
forming a sacrificial layer on the substrate;
forming a stacked structure on the sacrificial layer; the stack structure includes: the structural layer comprises a plurality of first structural layers and a plurality of second structural layers, wherein the first structural layers and the second structural layers are sequentially overlapped in a first direction; wherein the first structural layer comprises a first electrode layer and an elastomer layer sequentially arranged in the first direction; the second structural layer comprises a second electrode layer and the elastomer layer which are sequentially arranged in the first direction;
dissolving the sacrificial layer to remove the substrate;
and placing a preset area of the stacking structure on a frame structure, so that the preset area forms a protruding structure.
Compared with the prior art, the invention has the following beneficial effects:
the first electrode layer and the second electrode layer are arranged on two sides of each elastic body layer in the stacked structure of the dielectric elastic body driver, the conduction mode of the dielectric elastic body driver is unique, and the driving voltage of the dielectric elastic body driver can be greatly reduced by reasonably controlling the mechanical properties such as material, thickness, elastic modulus, relative dielectric constant and rebound resilience of the elastic body layers and reasonably controlling the characteristics such as the thickness, conductivity and flexibility of the first electrode layer and the second electrode layer.
And moreover, the dielectric elastomer driver is manufactured by adopting a raised frame structure, so that the dielectric elastomer driver can generate resonant motion under the alternating voltage, and the integral driving effect of the driver is further improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a dielectric elastomer driver capable of being driven at a low voltage according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a first electrode layer according to an embodiment of the invention;
fig. 3 is a schematic diagram of a positional relationship between a first electrode layer and a second electrode layer according to an embodiment of the invention;
fig. 4 is a schematic flow chart illustrating a method for manufacturing a dielectric elastomer driver capable of being driven at a low voltage according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a dielectric elastomer driver capable of being driven at a low voltage according to an embodiment of the present invention.
The dielectric elastomer driver includes:
a stacked structure; the stack structure includes: the structural layer comprises a plurality of first structural layers and a plurality of second structural layers, wherein the first structural layers and the second structural layers are sequentially overlapped in a first direction; wherein the first structural layer comprises a first electrode layer 11 and an elastomer layer 12 arranged in sequence in the first direction; the second structural layer comprises a second electrode layer 13 and the elastomer layer 12 which are arranged in sequence in the first direction;
and the frame structure is used for supporting a preset area of the stacking structure so that the preset area forms a protruding structure.
In this embodiment, the first electrode layer and the second electrode layer are disposed on both sides of each elastomer layer in the stacked structure, and the conduction mode is unique, and the driving voltage of the dielectric elastomer driver can be greatly reduced by reasonably controlling the mechanical properties such as material, thickness, elastic modulus, relative dielectric constant and resilience of the elastomer layer, and reasonably controlling the properties such as thickness, conductivity and flexibility of the first electrode layer and the second electrode layer.
And moreover, the dielectric elastomer driver is manufactured by adopting a raised frame structure, so that the dielectric elastomer driver can generate resonant motion under the alternating voltage, and the integral driving effect of the driver is further improved.
It should be noted that, in fig. 1, the frame structure is not shown.
Further, in accordance with the above-mentioned embodiment of the present invention, the shape of the predetermined area includes, but is not limited to, a circle having a diameter of 0.5cm to 5cm, inclusive.
In this embodiment, the diameter of the circular predetermined area is 1cm or 2cm or 3cm or 4 cm.
Further, based on the above embodiment of the invention, referring to fig. 2, fig. 2 is a schematic structural diagram of a first electrode layer according to an embodiment of the invention; referring to fig. 3, fig. 3 is a schematic diagram of a positional relationship between a first electrode layer and a second electrode layer according to an embodiment of the present invention.
The shape of the first electrode layer is the same as the shape of the second electrode layer;
as shown in fig. 2, the first electrode layer is divided into an electrode region 21 and a conduction region 22;
the size of the electrode area is the same as the preset area.
Optionally, the electrode area is circular, and the conduction area is rectangular;
the conduction region extends to the outside of the elastomer layer;
wherein projections of the electrode region of the first electrode layer and the electrode region of the second electrode layer in the first direction overlap with the preset region;
as shown in fig. 3, the extending direction of the conductive region of the first electrode layer is opposite to the extending direction of the conductive region of the second electrode layer.
In this embodiment, when the shape of the preset region is a circle, the electrode region of the first electrode layer and the electrode region of the second electrode layer are both a circle, that is, the shape of the preset region and the shape of the electrode region are synchronized.
Further, according to the above embodiment of the present invention, the conductive tape is connected to the conducting area.
Further, based on the above embodiment of the present invention, the plurality of conducting areas of the first electrode layer are connected to each other through electrode liquid, conductive silicone grease, or conductive silicone;
and the plurality of conducting areas of the second electrode layer are connected through electrode liquid or conductive silicone grease or conductive silicone.
Further, according to the above embodiment of the present invention, the plurality of conducting regions of the first electrode layer are connected to each other through a liquid metal;
and the plurality of conducting areas of the second electrode layer are connected through liquid metal.
Further, in accordance with the above-described embodiments of the present invention, the elastomer layer has a thickness of 0.5 μm to 15 μm, inclusive.
In this embodiment, the thickness of the elastomer is 3 μm or 5 μm or 8 μm.
Further, according to the above embodiment of the present invention, the thickness of the first electrode layer is the same as the thickness of the second electrode layer;
the thickness of the first electrode layer is as follows: 50nm-1um, inclusive.
In this embodiment, the thickness of the first electrode layer and the thickness of the second electrode layer are 50nm or 100 nm.
It should be noted that, the dielectric elastomer driver can also be arranged and combined in various ways, so as to increase the mechanical force output by the dielectric elastomer driver and enhance the driving effect, thereby obtaining more excellent practical application value.
Based on all the above embodiments of the present invention, in another embodiment of the present invention, a method for manufacturing a dielectric elastomer driver capable of being driven at a low voltage is further provided, and referring to fig. 4, fig. 4 is a schematic flow chart of the method for manufacturing the dielectric elastomer driver capable of being driven at a low voltage according to the embodiment of the present invention.
The manufacturing method comprises the following steps:
s401: providing a substrate;
s402: forming a sacrificial layer on the substrate;
s403: forming a stacked structure on the sacrificial layer; the stack structure includes: the structural layer comprises a plurality of first structural layers and a plurality of second structural layers, wherein the first structural layers and the second structural layers are sequentially overlapped in a first direction; wherein the first structural layer comprises a first electrode layer and an elastomer layer sequentially arranged in the first direction; the second structural layer comprises a second electrode layer and the elastomer layer which are sequentially arranged in the first direction;
s404: dissolving the sacrificial layer to remove the substrate;
in this step, the sacrificial layer may be removed by a thermal tack-free removal method, a UV tack-free removal method, or the like.
S405: and placing a preset area of the stacking structure on a frame structure, so that the preset area forms a protruding structure.
In this embodiment, the number of stacked layers of the stacked structure is not limited, and may be determined according to specific situations.
Some preferred embodiments are described below as examples.
Firstly, the method comprises the following steps: a dielectric elastomer actuator having a 15 μm elastomer layer, a 1 μm electrode layer and a predetermined area in a circular shape with a diameter of 2cm was prepared.
The method comprises the following steps: preparing a silica gel coating liquid, wherein the elastic modulus of the silica gel product is 1MPa, the viscosity is 60000cp, carrying out spin coating on the PI base material coated with the sacrificial layer at the spin coating speed of 4500 r/min for 2min, and curing and drying at the temperature of 120 ℃ for 10min to form a dry silica gel film with the thickness of 15 microns, namely an elastomer layer.
Step one alternative scheme: preparing a silica gel coating liquid, wherein the elastic modulus of a silica gel product is 1MPa, the compression permanent deformation is less than 5%, the viscosity is 1000cp, the diluent is volatile silicone oil, the viscosity is 1cp, and the solid content of the silica gel is 50%, slit coating is carried out on a PET substrate coated with a sacrificial layer at the speed of 20m/min and the wet film thickness of 75 μm, and after drying by air blowing in a drying tunnel at the temperature of 120 ℃ for 30min, a dry silica gel film with the thickness of 15 μm, namely an elastomer layer, is formed.
Step two: preparing an electrode coating liquid, dispersing commercial single-walled carbon nanotubes (SWCNT) in deionized water, performing ultrasonic dispersion for 16.5min under the power of 150W, centrifuging at 12000rpm for 2h, removing supernatant, and diluting by 5 times by using deionized water. Selecting an inorganic alumina filter with the pore diameter of 20nm, forming an electrode thin film on the filter in a vacuum filtration mode, drying at 40 ℃ for 1h, wherein the thickness of the electrode layer is 1 mu m, the sheet resistance of the electrode layer is 3000 omega/□, the modulus is 1MPa, cutting a tadpole shape from glass paper, covering the tadpole shape on the surface of a dry silica gel film, directly transferring the electrode thin film to the dry silica gel film, and removing the glass paper to obtain the tadpole shape electrode layer.
It should be noted that: the "tadpole shape" in the embodiment of the present invention means that the electrode region of the electrode layer is circular, and the conductive region is rectangular.
Step three: and taking out the silica gel film after the sacrificial layer is dissolved, and transferring the electrode on the other surface of the silica gel film in the same way after drying to complete the single-layer dielectric elastomer driver unit.
Step four: a "bump" type multilayer flexible actuator was prepared. The single-layer driver and the silicon membrane are alternately overlapped, three layers are overlapped together, the single-layer driver and the silicon membrane are arranged on a circular frame for supporting, and the inner diameter of the frame of the driver is 2 cm. And (3) leading out the tail of each layer of the tadpole-shaped electrode by using a conductive adhesive tape, and converging the positive electrode and the negative electrode of each layer of the electrode together to prepare the three-layer flexible driver.
The effect is as follows: when the alternating voltage is applied to 300V and the frequency is 30-35Hz, the vertical displacement of the driver under the resonance action reaches 480 mu m, the response time is 8ms, and the high elasticity recovery is more than or equal to 99 percent after the voltage is removed.
II, secondly: an 8 μm elastomer layer, a 1 μm electrode layer and a circular dielectric elastomer actuator with a predetermined area of 3cm diameter were prepared.
The method comprises the following steps: preparing a silica gel coating liquid, wherein the elastic modulus of the silica gel product is 1MPa, the viscosity is 60000cp, and the mass ratio of the basic component to the curing agent is 10: 1. And (3) carrying out spin coating on the PI substrate coated with the sacrificial layer, wherein the spin coating speed is 6000 r/min, the spin coating time is 2min, and after curing and drying at the temperature of 120 ℃ for 10min, a dry silica gel film with the thickness of 8 microns, namely an elastomer layer, is formed.
Step one alternative scheme: preparing a silica gel coating liquid, wherein the elastic modulus of the silica gel product is 0.5MPa, the viscosity is 30000cp, performing micro-concave transfer printing on the PI base material coated with the sacrificial layer, and curing and drying at the temperature of 120 ℃ for 10min to form a dry silica gel film with the thickness of 8 microns, namely an elastomer layer.
Step two: preparing an electrode coating liquid, and dispersing the single-walled carbon nanotubes in a solution mixed by an organic solvent and deionized water in a ratio of 1:1, wherein the organic solvent is isopropanol: propylene glycol butyl ether: ethylene glycol (71: 20: 4) and the concentration of the single-walled carbon nanotubes is 0.5 mg/mL. Ultrasonically dispersing the solution for 20min, centrifuging at 12000rpm for 30min, and collecting supernatant. After the silica gel membrane is subjected to plasma treatment, the glass paper cut into a tadpole shape is covered on the surface of the silica gel membrane, and the electrode liquid is formed on the surface of the silica gel membrane in a spin coating mode. The thickness of the electrode layer was 1 μm, the sheet resistance of the electrode layer was 3000. omega./□, and the modulus was 1 MPa.
Step two alternative scheme: preparing an electrode coating liquid, dispersing the single-walled carbon nanotube in a mail organic solvent, ultrasonically dispersing at 150W for 20min, centrifuging at 8000rpm for 30min, and taking a supernatant. The electrode is sprayed on the surface of the silica gel membrane covered with the tadpole-shaped glass paper in a spraying mode to form the electrode, the spraying liquid drop particles are 15 micrometers, and the frequency is 200 Hz. After drying at 120 ℃ for 30min, the thickness of the electrode layer is 1 μm, the sheet resistance of the electrode layer is 4000 Ω/□, and the modulus is 5 MPa.
Step three: and continuously spin-coating a silica gel coating liquid on the surface of the silica gel layer coated with the electrode layer, then spin-coating the electrode in the same way, and alternately spin-coating to prepare the five-layer flexible driver. And dissolving the sacrificial layer, and taking out the five layers of stacked structural units.
Step four: a laser knife was used to cut a section at the electrode lead-out portion, and the multilayer elastomer was placed on a circular frame for support having an inner diameter of 3 cm. Conducting silicone grease or conducting silicone gel is used for connecting the multilayer electrodes, and the positive electrode and the negative electrode are led out to prepare the five-layer flexible driver.
The effect is as follows: when the alternating voltage is applied to 900V and the frequency is 45-55Hz, the vertical displacement of the driver under the resonance action reaches 670 mu m, the response time is 8ms, and the high elasticity recovery is more than or equal to 99 percent after the voltage is removed.
Thirdly, the method comprises the following steps: a0.5 μm elastomer layer, a 50nm electrode layer and a predetermined area were prepared as a circular dielectric elastomer actuator with a diameter of 0.5 cm.
The method comprises the following steps: preparing a silica gel coating liquid, wherein the modulus of the silica gel product is 0.5MPa, the viscosity is 30000cp, the diluent is volatile silicone oil, the viscosity is 1cp, and the solid content of the silica gel is 10%. And spin-coating on the PI substrate coated with the sacrificial layer at 10000 r/min for 2min, and curing and drying at 120 deg.C for 10min to obtain 0.5 μm dry silica gel film, i.e. the elastomer layer.
Step two: and preparing an electrode coating liquid, taking the supernatant of the commercial nano silver wire PEDOT dispersion liquid, diluting the supernatant by 2 times with deionized water, and using the diluted supernatant as the electrode coating liquid. After the silica gel membrane is subjected to plasma treatment, a piece of glassine paper which is cut into a tadpole-shaped hollow part is covered, electrode liquid is formed on the silica gel membrane in a spin coating mode, the spin coating speed is 10000 r/min, the spin coating time is 20s, after curing and drying are carried out for 5min at the temperature of 120 ℃, the thickness of an electrode is 50nm, and the sheet resistance of the electrode is 1000 omega/□.
Step two alternative scheme: preparing an electrode coating liquid, dispersing commercial single-walled carbon nanotubes in a deionized water solution, performing ultrasonic dispersion for 30min at 150w, centrifuging at 12000rpm for 20min, taking a supernatant, forming the electrode coating liquid on a silica gel membrane by using an ink-jet printing device, printing a tadpole-shaped electrode, and performing forced air drying to obtain the electrode with the thickness of 50nm and the sheet resistance of 2500 omega/□.
Step three: the conduction mode is that the tail part of the tadpole-shaped electrode on the silica gel film is covered by conductive ink, the thickness of a conduction area is increased to 0.5um, the conduction area is dried for 10min at the temperature of 120 ℃, and the conductive ink part is well adhered by using a weak-viscosity adhesive tape to play a role in protection. And then alternately spin-coating the electrode layer with the silica gel coating liquid and the electrode coating liquid for ten times to prepare ten layers of structural units.
Step four: and taking out the multilayer film after the sacrificial layer is dissolved, placing the multilayer film in a circular frame for supporting, wherein the inner diameter of the frame is 0.5cm, and leading out the electrode of the conductive ink protection part by using a conductive adhesive tape to finish the preparation of the ten-layer flexible driver.
The effect is as follows: when the alternating voltage is applied to 600V and the frequency is 95-100Hz, the vertical displacement of the driver under the resonance action reaches 213 μm, the response time is 8ms, and the high elasticity recovery is more than or equal to 99 percent after the voltage is removed.
Fourthly, the method comprises the following steps: a5 μm elastomer layer, a 500nm electrode layer and a predetermined area were prepared as a circular dielectric elastomer actuator with a diameter of 1 cm.
The method comprises the following steps: preparing a silica gel coating liquid, wherein the modulus of the silica gel product is 1MPa, the viscosity is 60000cp, the permanent deformation is less than 5%, the diluent is volatile silicone oil, the viscosity is 1cp, and the solid content of the silica gel is 20%. Slit coating is carried out on the PI base material coated with the sacrificial layer at the speed of 20m/min, the thickness of a wet silica gel film is 25 mu m, and after drying is carried out for 30min by air blowing in a drying tunnel at the temperature of 120 ℃, a dry silica gel film with the thickness of 5 mu m, namely an elastomer layer, is formed.
Step two: preparing an electrode coating liquid, dispersing commercial single-walled carbon nanotubes (SWCNT) in deionized water, ultrasonically dispersing for 16.5min under the power of 150w, centrifuging at 12000rpm for 2h, taking supernatant, and diluting the supernatant by 5 times by using the deionized water. Selecting a polycarbonate filter with the pore diameter of 50nm, forming an electrode film on the filter in a vacuum filtration mode, drying at 40 ℃ for 1h, then transferring the electrode film and the filter to a wet glue film, arranging and combining electrodes cut into a tadpole shape into an electrode array with 8 x 5 to form a driving group, wherein the thickness of the electrode layer is 500nm, the sheet resistance of the electrode layer is 3000 omega/□, and the modulus is 1 MPa.
Step two alternative scheme: preparing an electrode coating liquid, mixing and dispersing the commercial single-walled carbon nanotube and the nano silver wire in an organic solvent, performing ultrasonic dispersion for 30min at the power of 120w, centrifuging for 30min at 8000rpm, and taking supernatant. Selecting a polytetrafluoroethylene filter with the pore diameter of 100nm, forming an electrode film on the filter in a vacuum filtration mode, drying at 40 ℃ for 0.5h, then transferring the electrode film and the filter to a wet glue film, arranging and combining electrodes cut into a tadpole shape into an electrode matrix of 8 x 5 to form a driving group, wherein the thickness of the electrode layer is 500nm, the sheet resistance of the electrode layer is 2000 omega/□, and the modulus is 1.5 MPa.
Step three: and (3) placing the transferred wet silica gel film into a drying tunnel at 120 ℃ for air blast drying for 30min, and continuously curing and drying the wet silica gel film, wherein the thickness of the dry silica gel film is 5 mu m. And (3) regularly arranging the electrodes with the diameter of 1cm according to actual needs when transferring the electrodes to obtain an 8-by-5 electrode matrix, uncovering the filter, and completely coating the electrode film on the surface of the silica gel film. And continuously carrying out silica gel slit coating on the surface of the dielectric elastomer, transferring electrodes in the same manner, and alternately superposing to obtain ten layers of dielectric elastomers.
Step four: and taking out the film after the sacrificial layer is dissolved, and placing the film on a rectangular frame for supporting, wherein the size of the inner edge of the rectangular frame is 8cm by 5 cm. Cutting a multilayer section at the tail part of the tadpole-shaped electrode at the edge by using a laser knife, dripping liquid metal to conduct the multilayer, and then leading out the positive electrode and the negative electrode of each layer of electrode by using copper foil to finish the preparation of the ten-layer flexible driver.
The effect is as follows: when the alternating voltage is applied to 700V and the frequency is 75-85Hz, the vertical displacement of the driver under the resonance action reaches 430 mu m, the response time is 8ms, the output mechanical force is 8mN, and the high elasticity recovery is more than or equal to 99 percent after the voltage is removed.
Fifthly: a3 μm elastomer layer, a 500nm electrode layer and a circular dielectric elastomer actuator with a predetermined area of 4cm diameter were prepared.
The method comprises the following steps: and preparing a silica gel coating liquid, wherein the elastic modulus of the silica gel product is 0.5MPa, and the viscosity of the silica gel product is 30000 cp. And (3) carrying out spin coating on the PI substrate coated with the sacrificial layer, wherein the spin coating speed is 10000 r/min, the spin coating time is 2min, and after curing and drying are carried out for 10min at the temperature of 120 ℃, a dry silica gel film with the thickness of 3 mu m, namely an elastomer layer, is formed.
Step two: preparing an electrode coating liquid, dispersing commercial silver nanowires and multi-walled carbon nanotubes (MWCNT) in deionized water, performing ultrasonic treatment for 30min at the power of 150w, centrifuging for 30min at 10000rpm, and taking supernatant. And (3) taking a proper amount of electrode liquid, continuously spin-coating on the dry silica gel membrane subjected to plasma treatment, covering the dry silica gel membrane with glass paper cut into a tadpole hollow shape, and forming the electrode on the silica gel membrane. The thickness of the electrode layer is 500nm, the sheet resistance of the electrode layer is 4000 omega/□, and the modulus is 1.5 MPa.
Step two alternative scheme: preparing an electrode coating liquid, dispersing the commercial single-walled carbon nanotubes in deionized water, ultrasonically dispersing for 16.5min under the power of 150w, centrifuging at 12000rpm for 2h, taking supernatant, and diluting the supernatant by 5 times by using the deionized water. Directly printing the electrode on a dry silica gel film by a micro-gravure printing mode, drying at 40 ℃ for 1h, wherein the thickness of the electrode layer is 500nm, the sheet resistance of the electrode layer is 3500 omega/□, and the modulus is 1 MP.
Step three: after the electrode layer is formed on the surface of the silica gel film, the tail of the tadpole-shaped electrode is partially covered by conductive ink in a transfer printing mode, and the thickness of a conduction area is increased to 3 um. And continuously and alternately printing the silicon film and the electrode layer in the same way to prepare the seven-layer dielectric elastomer.
Step three alternative scheme: after the electrode layer is formed on the surface of the silica gel, the tail connecting part of the tadpole-shaped electrode is led out by using the conductive adhesive tape, and then the silica gel film and the electrode layer are continuously and alternately formed in the same way to prepare the seven-layer dielectric elastomer.
Step four: and (3) taking out the membrane after the sacrificial layer is dissolved, placing the membrane on a circular frame for supporting, wherein the inner diameter of the frame is 4cm, and leading out the positive electrode and the negative electrode of each layer of electrode by using a conductive adhesive tape to finish the preparation of the seven-layer flexible driver.
The effect is as follows: when the alternating voltage is applied to 600V and the frequency is 30-35Hz, the vertical displacement of the driver under the resonance action reaches 1250 mu m, the response time is 8ms, the output mechanical force is 3mN, and the high elasticity recovery is more than or equal to 99 percent after the voltage is removed.
The dielectric elastomer driver capable of being driven at low voltage and the manufacturing method thereof provided by the invention are described in detail above, and the principle and the implementation mode of the invention are explained in the present document by applying specific examples, and the description of the above examples is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
It should be noted that, in the present specification, the embodiments are all described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include or include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (6)
1. A dielectric elastomer driver drivable at a low voltage, the dielectric elastomer driver comprising:
a stacked structure; the stack structure includes: the structural layer comprises a plurality of first structural layers and a plurality of second structural layers, wherein the first structural layers and the second structural layers are sequentially overlapped in a first direction; wherein the first structural layer comprises a first electrode layer and an elastomer layer sequentially arranged in the first direction; the second structural layer comprises a second electrode layer and the elastomer layer which are sequentially arranged in the first direction;
the frame structure is used for supporting a preset area of the stacking structure so that the preset area forms a protruding structure;
wherein the shape of the first electrode layer is the same as the shape of the second electrode layer;
the first electrode layer is divided into an electrode area and a conducting area;
the size of the electrode area is the same as that of the preset area;
the plurality of conducting regions of the first electrode layer are connected together, and the plurality of conducting regions of the second electrode layer are connected together;
the thickness of the first electrode layer is the same as that of the second electrode layer;
the thickness of the first electrode layer is as follows: 50nm-1um, inclusive;
the conducting areas of the first electrode layer are connected through electrode liquid or conductive silicone grease; the conducting areas of the second electrode layer are connected through electrode liquid or conductive silicone grease;
or the like, or, alternatively,
the conducting areas of the first electrode layer are connected through liquid metal; and the plurality of conducting areas of the second electrode layer are connected through liquid metal.
2. A dielectric elastomer driver as claimed in claim 1 wherein the electrode region is circular and the conducting region is rectangular;
the conduction region extends to the outside of the elastomer layer;
wherein projections of the electrode region of the first electrode layer and the electrode region of the second electrode layer in the first direction overlap with the preset region;
the extending direction of the conductive region of the first electrode layer is opposite to the extending direction of the conductive region of the second electrode layer.
3. A dielectric elastomer driver as claimed in claim 1, wherein a conductive tape is attached to the conductive area.
4. A dielectric elastomer driver according to claim 1, wherein the elastomer layer has a thickness of 0.5 μ ι η to 15 μ ι η, inclusive.
5. A dielectric elastomer driver as claimed in claim 1, wherein the predetermined area is circular in shape and has a diameter of 0.5cm to 5cm, inclusive.
6. A method for manufacturing a dielectric elastomer driver capable of being driven at low voltage, the method being used for manufacturing the dielectric elastomer driver capable of being driven at low voltage according to any one of claims 1 to 5, the method comprising:
providing a substrate;
forming a sacrificial layer on the substrate;
forming a stacked structure on the sacrificial layer; the stack structure includes: the structural layer comprises a plurality of first structural layers and a plurality of second structural layers, wherein the first structural layers and the second structural layers are sequentially overlapped in a first direction; wherein the first structural layer comprises a first electrode layer and an elastomer layer sequentially arranged in the first direction; the second structural layer comprises a second electrode layer and the elastomer layer which are sequentially arranged in the first direction;
dissolving the sacrificial layer to remove the substrate;
and placing a preset area of the stacking structure on a frame structure, so that the preset area forms a protruding structure.
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| CN105071683A (en) * | 2015-08-07 | 2015-11-18 | 哈尔滨工业大学（威海） | Technology for manufacturing dielectric elastomer stacking driver |
| CN106737567A (en) * | 2017-02-22 | 2017-05-31 | 西安交通大学 | A kind of Ultralight robot driven based on dielectric elastomer resonator |
| CN107493035A (en) * | 2017-09-19 | 2017-12-19 | 中国地质大学（武汉） | Graphene electrodes dielectric elastomer driver |
| CN109167530A (en) * | 2018-09-20 | 2019-01-08 | 北京中石伟业科技股份有限公司 | It is a kind of can low voltage drive dielectric elastomer driver and preparation method thereof, energy converter |
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| CN105470381B (en) * | 2016-01-11 | 2019-01-11 | 京东方科技集团股份有限公司 | A kind of electrification structure and preparation method thereof, electronic equipment |
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| CN105071683A (en) * | 2015-08-07 | 2015-11-18 | 哈尔滨工业大学（威海） | Technology for manufacturing dielectric elastomer stacking driver |
| CN106737567A (en) * | 2017-02-22 | 2017-05-31 | 西安交通大学 | A kind of Ultralight robot driven based on dielectric elastomer resonator |
| CN107493035A (en) * | 2017-09-19 | 2017-12-19 | 中国地质大学（武汉） | Graphene electrodes dielectric elastomer driver |
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