CN110726424B - Multi-parameter sensor based on FSS structure - Google Patents

Multi-parameter sensor based on FSS structure Download PDF

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CN110726424B
CN110726424B CN201910929776.4A CN201910929776A CN110726424B CN 110726424 B CN110726424 B CN 110726424B CN 201910929776 A CN201910929776 A CN 201910929776A CN 110726424 B CN110726424 B CN 110726424B
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groove
metal block
circular groove
rectangular
parameter
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CN110726424A (en
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华昌洲
丁世宇
黄雪琴
郑雁公
陈益
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Dragon Totem Technology Hefei Co ltd
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Ningbo University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance

Abstract

The invention discloses a multi-parameter sensor based on an FSS structure, which comprises a medium substrate and a radiation unit arranged on the upper surface of the medium substrate, wherein the radiation unit comprises a metal layer and a radiation groove structure, the metal layer is attached to the upper surface of the medium substrate and completely covers the upper surface of the medium substrate, the radiation groove structure is realized by forming an FSS structure by slotting on the metal layer, the radiation groove structure is provided with three resonance points which are respectively positioned at different frequencies, when a sensitive material of a parameter to be measured is added into the radiation groove structure, the change of the parameter to be measured can cause the change of the dielectric constant of the sensitive material of the parameter to be measured, the change of the dielectric constant of the sensitive material of the parameter to be measured can cause the resonance frequency of the corresponding resonance point in the radiation groove structure to shift, and the change of the attribute to be measured can be judged according to the shift condition of the resonance frequency of, realizing multi-parameter measurement; the advantage is that the structure is simpler, and the cost is lower and easily miniaturization.

Description

Multi-parameter sensor based on FSS structure
Technical Field
The invention relates to a multi-parameter sensor, in particular to a multi-parameter sensor based on an FSS structure.
Background
The sensor technology is one of three major foundations of information technology, is a high and new technology which is developed in competition in developed countries at present, and is one of ten top technologies which are preferentially developed since the 21 st century. The field of knowledge involved in sensor technology is very extensive and research and development is increasingly tied to the development of other disciplinary techniques. The sensor (english name: transducer/sensor) is a detection device, which can sense the measured information and convert the sensed information into electric signals or other information in required form according to a certain rule to output, so as to meet the requirements of information transmission, processing, storage, display, recording, control and the like. The multi-parameter sensor is one of the application of the technology, the multi-parameter sensor is a passive device, certain electromagnetic waves can be reflected and transmitted when the electromagnetic waves pass through the multi-parameter sensor, the reflection and transmission conditions of the electromagnetic waves can be measured by an instrument, when sensitive materials are added on the surface of the multi-parameter sensor, due to the change of external factors, the dielectric constant of the sensitive materials changes, the change of the dielectric constant of the sensitive materials can affect the original reflection and transmission curves, and the change of the dielectric constant of the sensitive materials can be known by observing the reflection and transmission conditions of the electromagnetic waves.
Since the Frequency Selective Surface (FSS) exhibits an electromagnetic filtering function in an open space, it has attracted attention in the aspects of antenna design, Surface wave processing, radar cross section control, and the like, and is one of the research hotspots in the field of antennas and microwaves. FSS is a periodic array structure, which by its very nature is a spatial filter, which exhibits significant bandpass or bandstop filtering characteristics in interaction with electromagnetic waves. FSS has a specific frequency selective effect and is widely used in the microwave, infrared to visible light bands.
The chinese patent with application number CN201520925399.4 discloses an FBG sensing head and a multi-parameter sensor using the FBG sensing head, wherein the FBG sensing head is a section of fiber bragg grating which is integrally of a biconical structure, a plurality of wave peaks exist in the reflection spectrum of the fiber bragg grating which is integrally of the biconical structure, each wave peak has different response sensitivity to different sensing parameters, and the multi-parameter sensor using the FBG sensing head can realize multi-parameter sensing measurement. However, the multi-parameter sensor has a relatively complex structure, is expensive, and is not easy to miniaturize.
Based on the combination of the FSS technology and the sensor technology, the design of the multi-parameter sensor based on the FSS structure, which has the advantages of simple structure, low cost and easy miniaturization, has important significance.
Disclosure of Invention
The invention aims to provide a multi-parameter sensor based on an FSS structure, which has the advantages of simple structure, low cost and easy miniaturization.
The technical scheme adopted by the invention for solving the technical problems is as follows: a multi-parameter sensor based on an FSS structure comprises a medium substrate and a radiation unit arranged on the upper surface of the medium substrate, wherein the medium substrate is a square plate, the radiation unit comprises a metal layer and a radiation groove structure, the external dimension of the metal layer is completely the same as that of the medium substrate, the metal layer is attached to the upper surface of the medium substrate and completely covers the upper surface of the medium substrate, the radiation groove structure is realized by slotting on the metal layer to form the FSS structure, the upper surface of the medium substrate is exposed at the radiation groove structure, the radiation groove structure is provided with three resonance points respectively under different frequencies, when a sensitive material to be measured by parameters is added into the radiation groove structure, the change of the measured parameters can cause the change of the dielectric constant of the sensitive material to be measured by the parameters, the change of the dielectric constant of the sensitive material of the parameter to be measured can cause the resonance frequency of the corresponding resonance point in the radiation slot structure to shift, and the change of the attribute of the parameter to be measured can be judged according to the shift condition of the resonance frequency of the resonance point, so that multi-parameter measurement is realized.
The radiation groove structure comprises a first circular groove, a second circular groove, a third circular groove, a first T-shaped groove and a second T-shaped groove which are formed in the metal layer, the first circular groove, the second circular groove and the third circular groove are sequentially concentrically arranged at intervals from inside to outside, the central axes of the first circular groove, the second circular groove and the third circular groove are superposed with the central axis of the medium substrate, the upper surface of the medium substrate is exposed at the first circular groove, the second circular groove and the third circular groove, and the outer ring diameter of the third circular groove is smaller than the side length of the medium substrate; the first T-shaped groove is positioned in the first annular groove, the first T-shaped groove comprises a first rectangular groove and a second rectangular groove, the upper surface of the medium substrate is exposed in the first rectangular groove and the second rectangular groove, the first rectangular groove is transversely arranged along the left and right directions, the second rectangular groove is longitudinally arranged along the front and back directions, the first rectangular groove is positioned at the front side of the center of the first annular groove, a distance is reserved between the rear end surface of the first rectangular groove and the center of the first annular groove, the second rectangular groove is positioned at the front side of the first rectangular groove, the rear end surface of the second rectangular groove is communicated with the front end surface of the first rectangular groove, the front end surface of the second rectangular groove extends to the first annular groove and is communicated with the first annular groove, the length of the first rectangular groove in the left-right direction is greater than that of the second rectangular groove in the left-right direction, the length of the first rectangular groove in the front-back direction is less than that of the second rectangular groove in the front-back direction, a straight line where a symmetry line extending in the front-back direction of the first rectangular groove is located coincides with a straight line where a symmetry line extending in the front-back direction of the second rectangular groove is located, the straight line passes through the center of the first annular groove, and the first T-shaped groove is rotated by 180 degrees and then completely coincides with the second T-shaped groove; the third circular groove is provided with a first metal block and a second metal block, the first metal block and the second metal block are connected with the metal layer in an integrated manner, the first metal block is positioned at the front side of the first T-shaped groove, the second metal block is positioned at the rear side of the second T-shaped groove, the third circular groove is divided into two bilaterally symmetrical parts by the first metal block and the second metal block, the front end surface of the first metal block and the rear end surface of the second metal block are positioned on the same circumference with the outer ring of the third circular groove, the rear end surface of the first metal block and the front end surface of the second metal block are positioned on the same circumference with the inner ring of the third circular groove, the second circular groove is provided with the third metal block, and the third metal block is connected with the metal layer in an integrated manner, the third metal block be located the front side in first T type groove, the preceding terminal surface of third metal block with the outer lane in second ring groove be located same circumference, the rear end face of third metal block with the inner circle in second ring groove be located same ring circumference, the left end face of first metal block, the left end face of second metal block, the left end face of third metal block with the left end face of second rectangular channel be located the coplanar, the right end face of first metal block, the right end face of second metal block, the right end face of third metal block with the right-hand member face of second rectangular channel be located the coplanar. In the structure, when the circumferences of the first circular groove, the second circular groove and the third circular groove are equal to the wavelength of the incident wave, a resonance is generated, and thus, the first circular groove, the second circular groove and the third circular groove generate three resonances at different frequencies, the circumference of the third circular groove is the longest, so the third circular groove generates a resonance at a low frequency, the circumference of the second circular groove is located between the circumferences of the first circular groove and the third circular groove, so the second circular groove generates a resonance at a medium frequency, the circumference of the first circular groove is the smallest, so the first circular groove generates a resonance at a high frequency, when the interval between the first circular groove, the second circular groove and the third circular groove is large, the mutual coupling ratio between them is weak, and in order to obtain three transmission bands closely spaced, the first circular groove, the second circular groove and the third circular groove need to be located at adjacent positions, however, the proximity also causes the first circular groove, the strong coupling between the second circular groove and the third circular groove, which causes the resonance to generate unnecessary separation, at this time, the first metal block and the second metal block are arranged on the third circular groove, at this time, the resonance frequency of the third circular groove shifts upwards by 2 times, the third metal block is arranged on the second circular groove, the resonance frequency of the second circular groove shifts upwards by 1.5 times, the resonance frequency on the first circular groove remains unchanged, at the same time, the first T-shaped groove and the second T-shaped groove change the distribution of the surface current of the radiation unit, which causes the third circular groove, the coupling between the second circular groove and the first circular groove is reduced, which avoids the unnecessary separation at the resonance, thereby adding the sensitive material (temperature sensitive material, pressure sensitive material or gas sensitive material) into the third circular groove, The sensor comprises a second circular groove, a first T-shaped groove, a second T-shaped groove, a first metal block and a second metal block, wherein two sensitive materials are added at two positions in the third circular groove, the two sensitive materials are respectively positioned in the middle of the left side part and the middle of the right side part of the third circular groove, which are obtained by dividing the third circular groove by the first metal block and the second metal block, the two sensitive materials are added at two positions in the second circular groove, the two sensitive materials are respectively positioned at the inner sides of the two sensitive materials added in the third circular groove, the two sensitive materials are added in the first circular groove, the two sensitive materials are respectively positioned at the inner sides of the two sensitive materials added in the second circular groove, when the external temperature, the pressure intensity or the gas property changes, the dielectric constant of the corresponding sensitive materials changes, and the change of the dielectric constant can cause the first circular groove, the second circular groove, the first metal block and the second metal block, The frequency deviation of the resonance point of the second circular groove and the third circular groove judges how the external temperature, the pressure intensity or the gas attribute corresponding to the sensitive material changes according to the frequency deviation of the resonance point, parameter identification is realized, the structure is realized by arranging a plurality of grooves on the surface of the metal layer, and on the basis of realizing multi-parameter measurement, the structure is simple in structure, convenient to realize and low in cost.
The medium substrate is 4.4mm in side length, the inner circle radius of the first circular ring groove is 1.34mm, the outer circle radius of the first circular ring groove is 1.48mm, the inner circle radius of the second circular ring groove is 1.6mm, the outer circle radius of the second circular ring groove is 1.72mm, the inner circle radius of the third circular ring groove is 1.83mm, the outer circle radius of the third circular ring groove is 1.95mm, the length of the first rectangular groove in the left-right direction is 0.3mm, the length of the first rectangular groove in the front-back direction is 0.12mm, the distance between the rear end face of the first rectangular groove and the center of the first circular ring groove is 0.12mm, and the length of the second rectangular groove in the left-right direction is 0.12 mm.
The metal layer is made of copper, the thickness of the metal layer is 0.035mm, the dielectric substrate is made of Rogers4003C, and the thickness of the dielectric substrate is 0.203 mm.
Compared with the prior art, the invention has the advantages that the multi-parameter sensor is constructed by the medium substrate and the radiation unit arranged on the upper surface of the medium substrate, the medium substrate is a square plate, the radiation unit comprises the metal layer and the radiation groove structure, the external dimension of the metal layer is completely the same as that of the medium substrate, the metal layer is attached to the upper surface of the medium substrate and completely covers the upper surface of the medium substrate, the radiation groove structure is realized by slotting on the metal layer to form an FSS structure, the upper surface of the medium substrate is exposed at the radiation groove structure, the radiation groove structure is provided with three resonance points respectively under different frequencies, when the sensitive material of the parameter to be measured is added into the radiation groove structure, the change of the parameter to be measured causes the change of the dielectric constant of the sensitive material of the parameter to be measured, the change of the dielectric constant of the sensitive material of the parameter to be measured causes the shift of the resonance frequency of the corresponding resonance point in the, the change of the attribute of the parameter to be measured can be judged according to the resonance frequency deviation condition of the resonance point, and the multi-parameter measurement is realized.
Drawings
FIG. 1 is a perspective view of an FSS structure-based multi-parameter sensor of the present invention;
FIG. 2 is a top view of an FSS structure based multi-parameter sensor of the present invention;
FIG. 3 is a side view of an FSS structure-based multi-parameter sensor of the present invention;
FIG. 4 is a simulation curve of reflection and transmission without sensitive material for the FSS structure-based multi-parameter sensor of the present invention;
FIG. 5 is a simulation curve of reflection and transmission of a multi-parameter sensor based on FSS structure after being added with a sensitive material.
Detailed Description
The invention is described in further detail below with reference to the accompanying examples.
Example (b): as shown in fig. 1, 2 and 3, a multi-parameter sensor based on an FSS structure includes a dielectric substrate 1 and a radiation unit disposed on an upper surface of the dielectric substrate 1, where the dielectric substrate 1 is a square plate, the radiation unit includes a metal layer 2 and a radiation slot structure, an external dimension of the metal layer 2 is identical to an external dimension of the dielectric substrate 1, the metal layer 2 is attached to the upper surface of the dielectric substrate 1 and covers the upper surface of the dielectric substrate 1 completely, the radiation slot structure is implemented by forming an FSS structure by slotting on the metal layer 2, the upper surface of the dielectric substrate 1 is exposed at the radiation slot structure, the radiation slot structure has three resonance points respectively at different frequencies, when a sensitive material of a parameter to be measured is added into the radiation slot structure, a change in the dielectric constant of the sensitive material of the parameter to be measured will cause a change in the dielectric constant of the sensitive material of the parameter to be measured, and a change in the dielectric constant of the sensitive material of the parameter to be measured will cause a corresponding resonance The resonance frequency generates deviation, and the change of the attribute of the parameter to be measured can be judged according to the deviation condition of the resonance frequency of the resonance point, so that multi-parameter measurement is realized.
In this embodiment, the radiation groove structure includes a first circular groove 3, a second circular groove 4, a third circular groove 5, a first T-shaped groove 6, and a second T-shaped groove 7, which are formed on the metal layer 2, the first circular groove 3, the second circular groove 4, and the third circular groove 5 are sequentially concentrically arranged at intervals from inside to outside, and central axes of the three coincide with a central axis of the dielectric substrate 1, the upper surface of the dielectric substrate 1 is exposed at the first circular groove 3, the second circular groove 4, and the third circular groove 5, and an outer ring diameter of the third circular groove 5 is smaller than a side length of the dielectric substrate 1; the first T-shaped groove 6 is positioned inside the first circular groove 3, the first T-shaped groove 6 comprises a first rectangular groove 8 and a second rectangular groove 9, the upper surface of the medium substrate 1 is exposed at the first rectangular groove 8 and the second rectangular groove 9, the first rectangular groove 8 is transversely arranged along the left-right direction, the second rectangular groove 9 is longitudinally arranged along the front-back direction, the first rectangular groove 8 is positioned at the front side of the center of the first circular groove 3, a distance is reserved between the rear end surface of the first rectangular groove 8 and the center of the first circular groove 3, the second rectangular groove 9 is positioned at the front side of the first rectangular groove 8, the rear end surface of the second rectangular groove 9 is communicated with the front end surface of the first rectangular groove 8, the front end surface of the second rectangular groove 9 extends to the first circular groove 3 to be communicated with the first circular groove 3, the length of the first rectangular groove 8 along the left-right direction is greater than the length of the second rectangular groove 9 along the left-right direction, the length of the first rectangular groove 8 along the front-back direction is less than the length of the second rectangular groove 9 along the front-, the straight line where the symmetrical line of the first rectangular groove 8 extends in the front-back direction is coincident with the straight line where the symmetrical line of the second rectangular groove 9 extends in the front-back direction, the straight line passes through the center of the first circular groove 3, and the first T-shaped groove 6 is completely coincident with the second T-shaped groove 7 after rotating 180 degrees; a first metal block 10 and a second metal block 11 are arranged on the third circular groove 5, the first metal block 10 and the second metal block 11 are integrally connected with the metal layer 2, the first metal block 10 is positioned at the front side of the first T-shaped groove 6, the second metal block 11 is positioned at the rear side of the second T-shaped groove 7, the third circular groove 5 is divided into two parts which are symmetrical left and right by the first metal block 10 and the second metal block 11, the front end surface of the first metal block 10 and the rear end surface of the second metal block 11 are positioned on the same circumference with the outer ring of the third circular groove 5, the rear end surface of the first metal block 10 and the front end surface of the second metal block 11 are positioned on the same circumference with the inner ring of the third circular groove 5, a third metal block 12 is arranged on the second circular groove 4, the third metal block 12 is integrally connected with the metal layer 2, the third metal block 12 is positioned at the front side of the first T-shaped groove 6, the front end surface of the third metal block 12 and the outer ring of the second metal block 4 are positioned on the same circumference, the rear end face of the third metal block 12 and the inner ring of the second circular groove 4 are located on the same circular circumference, the left end face of the first metal block 10, the left end face of the second metal block 11, the left end face of the third metal block 12 and the left end face of the second rectangular groove 9 are located on the same plane, and the right end face of the first metal block 10, the right end face of the second metal block 11, the right end face of the third metal block 12 and the right end face of the second rectangular groove 9 are located on the same plane.
In this embodiment, the side length of the medium substrate 1 is 4.4mm, the radius of the inner ring of the first circular groove 3 is 1.34mm, the radius of the outer ring of the first circular groove 3 is 1.48mm, the radius of the inner ring of the second circular groove 4 is 1.6mm, the radius of the outer ring of the second circular groove 4 is 1.72mm, the radius of the inner ring of the third circular groove 5 is 1.83mm, the radius of the outer ring of the third circular groove 5 is 1.95mm, the length of the first rectangular groove 8 in the left-right direction is 0.3mm, the length of the first rectangular groove 8 in the front-back direction is 0.12mm, the distance between the rear end face of the first rectangular groove 8 and the center of the first circular groove 3 is 0.12mm, and the length of the second rectangular groove 9 in the left-right direction is 0.12 mm.
In this embodiment, the metal layer 2 is made of copper, the thickness of the metal layer 2 is 0.035mm, the material of the dielectric substrate 1 is Rogers4003C, and the thickness of the dielectric substrate 1 is 0.203 mm.
The reflection and transmission simulation curve of the multi-parameter sensor based on the FSS structure without adding the sensitive material is shown in fig. 4, and the reflection and transmission simulation curve of the multi-parameter sensor based on the FSS structure after adding the sensitive material is shown in fig. 5. In fig. 4 and 5, the solid black line is the S11 curve, and the dashed black line is the S21 curve.
By adopting the multi-parameter sensor based on the FSS structure, different conditions that the dielectric constant of the sensitive material is changed from 1 to 10 are simulated, and a simulation data comparison table is shown in Table 1.
Watch 1
m1 m2 m3 m4 m5
Dielectric constant of 1 26.38 30.55 34.52 27.45 32.70
Dielectric constant of 2 26.06 30.50 34.52 27.22 32.68
Dielectric constant of 3 25.77 30.43 34.51 27.02 32.65
Dielectric constant of 4 25.57 30.35 34.48 26.87 32.59
Dielectric constant of 5 25.41 30.31 34.47 26.75 32.57
Dielectric constant of 6 25.14 30.23 34.41 26.53 32.49
Dielectric constant of 7 24.99 30.18 34.41 26.43 32.46
Dielectric constant of 8 24.82 30.13 34.40 26.27 32.45
Dielectric constant of 9 24.71 30.07 34.48 26.17 32.38
Dielectric constant of 10 24.56 30.00 34.47 26.06 32.38
In table 1, m1 corresponds to the first lowest point of the black solid line in fig. 5, m2 corresponds to the second lowest point of the black solid line in fig. 5, m3 corresponds to the third lowest point of the black solid line in fig. 5, m4 corresponds to the first lowest point of the black dashed line in fig. 5, and m5 corresponds to the second lowest point of the black dashed line in fig. 5. . According to the table 1, the frequency point offset is found to be regular, and when the multi-parameter sensor is used, data in a table can be compared according to the offset of the frequency point, and then the change of the pressure, the temperature and the gas property can be estimated according to the property of different sensitive materials.

Claims (3)

1. A multi-parameter sensor based on an FSS structure is characterized by comprising a medium substrate and a radiation unit arranged on the upper surface of the medium substrate, wherein the medium substrate is a square plate, the radiation unit comprises a metal layer and a radiation groove structure, the external dimension of the metal layer is completely the same as that of the medium substrate, the metal layer is attached to the upper surface of the medium substrate and completely covers the upper surface of the medium substrate, the radiation groove structure is realized by forming an FSS structure by slotting on the metal layer, the upper surface of the medium substrate is exposed at the radiation groove structure, the radiation groove structure is provided with three resonance points respectively under different frequencies, when a sensitive material of a parameter to be detected is added into the radiation groove structure, the change of the parameter to be detected can cause the change of the dielectric constant of the sensitive material of the parameter to be detected, the change of the dielectric constant of the sensitive material of the parameter to be measured can cause the resonance frequency of the corresponding resonance point in the radiation slot structure to shift, and the change of the attribute of the parameter to be measured can be judged according to the shift condition of the resonance frequency of the resonance point, so that multi-parameter measurement is realized;
the radiation groove structure comprises a first circular groove, a second circular groove, a third circular groove, a first T-shaped groove and a second T-shaped groove which are formed in the metal layer, the first circular groove, the second circular groove and the third circular groove are sequentially concentrically arranged at intervals from inside to outside, the central axes of the first circular groove, the second circular groove and the third circular groove are superposed with the central axis of the medium substrate, the upper surface of the medium substrate is exposed at the first circular groove, the second circular groove and the third circular groove, and the outer ring diameter of the third circular groove is smaller than the side length of the medium substrate;
the first T-shaped groove is positioned in the first annular groove, the first T-shaped groove comprises a first rectangular groove and a second rectangular groove, the upper surface of the medium substrate is exposed in the first rectangular groove and the second rectangular groove, the first rectangular groove is transversely arranged along the left and right directions, the second rectangular groove is longitudinally arranged along the front and back directions, the first rectangular groove is positioned at the front side of the center of the first annular groove, a distance is reserved between the rear end surface of the first rectangular groove and the center of the first annular groove, the second rectangular groove is positioned at the front side of the first rectangular groove, the rear end surface of the second rectangular groove is communicated with the front end surface of the first rectangular groove, the front end surface of the second rectangular groove extends to the first annular groove and is communicated with the first annular groove, the length of the first rectangular groove in the left-right direction is greater than that of the second rectangular groove in the left-right direction, the length of the first rectangular groove in the front-back direction is less than that of the second rectangular groove in the front-back direction, a straight line where a symmetry line extending in the front-back direction of the first rectangular groove is located coincides with a straight line where a symmetry line extending in the front-back direction of the second rectangular groove is located, the straight line passes through the center of the first annular groove, and the first T-shaped groove is rotated by 180 degrees and then completely coincides with the second T-shaped groove;
the third circular groove is provided with a first metal block and a second metal block, the first metal block and the second metal block are connected with the metal layer in an integrated manner, the first metal block is positioned at the front side of the first T-shaped groove, the second metal block is positioned at the rear side of the second T-shaped groove, the third circular groove is divided into two bilaterally symmetrical parts by the first metal block and the second metal block, the front end surface of the first metal block and the rear end surface of the second metal block are positioned on the same circumference with the outer ring of the third circular groove, the rear end surface of the first metal block and the front end surface of the second metal block are positioned on the same circumference with the inner ring of the third circular groove, the second circular groove is provided with the third metal block, and the third metal block is connected with the metal layer in an integrated manner, the third metal block be located the front side in first T type groove, the preceding terminal surface of third metal block with the outer lane in second ring groove be located same circumference, the rear end face of third metal block with the inner circle in second ring groove be located same ring circumference, the left end face of first metal block, the left end face of second metal block, the left end face of third metal block with the left end face of second rectangular channel be located the coplanar, the right end face of first metal block, the right end face of second metal block, the right end face of third metal block with the right-hand member face of second rectangular channel be located the coplanar.
2. The FSS structure-based multiparameter sensor according to claim 1, wherein the length of the side of the dielectric substrate is 4.4mm, the inner radius of the first circular groove is 1.34mm, the outer radius of the first circular groove is 1.48mm, the inner radius of the second circular groove is 1.6mm, the outer radius of the second circular groove is 1.72mm, the inner radius of the third circular groove is 1.83mm, the outer radius of the third circular groove is 1.95mm, the length of the first rectangular groove in the left-right direction is 0.3mm, the length of the first rectangular groove in the front-back direction is 0.12mm, the distance between the rear end surface of the first rectangular groove and the center of the first circular groove is 0.12mm, and the length of the second rectangular groove in the left-right direction is 0.12 mm.
3. The multiple parameter sensor based on the FSS structure as claimed in claim 1, wherein the material of the metal layer is copper, the thickness of the metal layer is 0.035mm, the material of the dielectric substrate is Rogers4003C, and the thickness of the dielectric substrate is 0.203 mm.
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